• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    A method and apparatus heats ultrapure water using microwaves. Chambers such as pipes containing the water are capable of admitting microwaves to the water, allowing the microwaves to heat the water. The pipes may be made of inert material such as PVDF or quartz that will not introduce contamination into the water.
    公开号:US20010003339A1
    申请号:US09/376,270
    申请日:1999-08-18
    公开日:2001-06-14
    发明作者:Daniel A. Havens；Ralph N. Williams
    申请人:CH2M Hill Industrial Design Corp；
    IPC主号:H05B6-802
    专利说明:
    [0001] The present invention is related to water heating systems and more specifically to heating systems for ultrapure water. [0001] BACKGROUND OF THE INVENTION
    [0002] Some purification systems produce ultrapure water. Such systems remove from a water supply particulates, ions, organic matter and microbes that could otherwise contaminate the process or device that uses the ultrapure water. One example of a system for producing ultrapure water is described in Sauer & Vedova, “A New Water Treatment System for the latest Generation of Semiconductor Devices”, [0002] Ultrapure Water, December 1996.
    [0003] Some processes require heated ultrapure water or ultrapure steam. For example, some manufacturing processes may use heated ultrapure water for producing and cleaning semiconductor wafers used to manufacture electronic devices. Other manufacturing processes may use heated ultrapure water for producing and cleaning components used to manufacture disk drives. Pharmaceutical and biotechnology manufacturing processes use heated ultrapure water for cleaning and sterilizing, and can also include ultrapure water in the finished product. In addition, heated ultrapure water may be used to clean the filters that make up the purification system. It is therefore desirable to heat ultrapure water. [0003]
    [0004] Many conventional techniques exist for heating water. For example, conventional systems for heating water may use heat exchange techniques. In these techniques, heat is transferred from a liquid or gas to the liquid to be heated. Conventional heat exchange techniques use a plate and frame, double pipe, shell & tube, or other form of heat exchanger to transfer heat from a non-purified aqueous- or steam- heat source to the liquid to be heated, separated by a heat conductor. Other heat exchange techniques include cross flow systems in which heated air is passed over pipes containing the water. The pipes used in the heat exchanger have fins to improve the effective heat transfer from the air to the water. Pipes or heat conductors for such systems may be made of aluminum, copper, stainless steel, or nickel alloys, exotic metals, such as titanium, or plastics in order to maximize the heat transfer to the water. [0004]
    [0005] While such systems can provide efficient heat transfer, they can contaminate ultrapure water. When heated, the conductive materials used for the piping or heat conductors can leach particulate and ionic contamination into the ultrapure water. Titanium pipes or conductors have been used in the heat exchangers instead of the other types of pipes, but as standards for ultrapure water improve, titanium introduces unacceptable amounts of impurities into the ultrapure water. Fluoropolymer pipes have also been used in heat exchangers, but such pipes are not good conductors of heat, and thus, they adversely impact the efficiency of the heat exchange. [0005]
    [0006] Other heating techniques have been attempted to heat ultrapure water such as running a thin stream of ultrapure water past a current-carrying wire used as a heat source. Here too, the contamination introduced by the heated metal wire is sufficiently high to contaminate the ultrapure water. Radiant heat can be passed through quartz pipes, but quartz pipes are fragile and relatively difficult to seal. [0006]
    [0007] What is needed is a method and apparatus for heating ultrapure water while minimizing the amount of contamination introduced to the water by the heating process. [0007] SUMMARY OF INVENTION
    [0008] A method and apparatus uses microwave energy to heat ultrapure water in a chamber that does not release contaminants to the water when heated. Because fluid-fluid heat exchange techniques are not used to heat the water, thermally conductive materials need not be used to transport the ultrapure water, and tubing made of inert materials may be used instead, maintaining the purity of the water. Because the heat source itself is not in contact with the water, the purity of the water is maintained. [0008] BRIEF DESCRIPTION OF THE DRAWINGS
    [0009] FIG. 1A is a block schematic diagram of an apparatus for producing ultrapure water, heating the ultrapure water and using the heated ultrapure water according to one embodiment of the present invention. [0009]
    [0010] FIG. 1B is a block schematic diagram of a conventional apparatus for producing ultrapure water. [0010]
    [0011] FIG. 2A is a top view of a block schematic diagram of an apparatus for heating ultrapure water according to one embodiment of the present invention. [0011]
    [0012] FIG. 2B is a side view of an apparatus for heating ultrapure water according to another embodiment of the present invention. [0012]
    [0013] FIG. 3 is a flowchart illustrating a method of heating ultrapure water according to one embodiment of the present invention. [0013] DETAILED DESCRIPTION OF A PREFERRED EMBODIMENT
    [0014] Referring now to FIG. 1A, a system for producing and heating ultrapure water is shown according to one embodiment of the present invention. An ultrapure water purification system [0014] 102 described below receives raw water from a source 104 and purifies it to ultrapure standards of 18.2 megaohm-cm (if the water is at a temperature of 25 degrees Celsius), and containing silicon dioxide of under 0.5 parts per billion, total organic carbon of under 1 part per billion, total ionic content of less than 1 part per billion and dissolved oxygen of under 5 parts per billion. The ultrapure water contains less than one thousand 0.05 micrometer sized particles per liter, less than fifty 0.1 micrometer sized particles per liter, and microorganism contamination of no more than 1 cfu/L. In other embodiments, the specifications above are 5%, 10%, 15%, 20% or 25% higher or lower than described above.
    [0015] The ultrapure water purification system [0015] 102 feeds a microwave system 104 described in more detail below, which adds heat to the ultrapure water. The heated ultrapure water is provided to process 106, which uses the heated ultrapure water or steam produced therefrom and materials 108 to produce a product 110, such as a disk drive, semiconductor device, pharmaceutical or biotechnology product. The heated ultrapure water or steam may also be used for a process, such as to mix ultrapure chemicals or to clean filters in the ultrapure water purification system 102.
    [0016] Referring now to FIG. 1B, a conventional ultrapure water purification system [0016] 102 of FIG. 1A is shown although any ultrapure water purification system may be used. In one embodiment, ultrapure water purification system 102 includes pretreatment filtration 114, which includes multimedia filters 116 to filter particulate contaminants such as silt, and activated carbon filters 118 to filter total organic carbon and chlorine. Precoat filters 120 containing diatomaceous earth perform additional filtration of particulate and other matter. Water flows in the direction of the arrows in the Figure.
    [0017] Precipitation inhibitor [0017] 122 adds antiscalant based on polyacrylic acid to the water to avoid calcium carbonate precipitation in subsequent portions of the apparatus, though conventional acid dosing techniques may be used.
    [0018] Reverse osmosis membrane [0018] 128 separates ionic, colloidal and organic matter from the water and supplies the water to a tank 130. A loop 132 containing a vacuum degasifier 134 to remove gases such as carbon dioxide and oxygen and reduce total organic matter, UV radiator 136 to kill microorganisms and oxidize organic matter and mixed bed deionizers 135 to remove residual ions is operated by pump 138 to keep the water from stagnating.
    [0019] The loop system feeds a second tank [0019] 140, which has a layer of nitrogen above the surface of the water it contains to prevent absorption of oxygen and carbon dioxide. Water is fed from tank 140 to a loop 141 containing another UV radiator 142, mixed bed ion exchange 144 and ultrafilters 146 to remove residual particulate matter, and circulated by means of pump 148. Tapped off the loop 141 and downstream of all of the filters is outlet 150, coupled to microwave heating unit described below, which heats the water.
    [0020] Referring now to FIG. 2A, the microwave heating unit [0020] 104 of FIG. 1A is shown according to one embodiment of the present invention. Microwave heating unit 104 contains a conventional microwave generator 210 such as a magnetron, clystron or other microwave generating source aimed at chamber 216, which may be pipes, carrying ultrapure water, purified as described above. Chamber 216 carrying the ultrapure water received at input 218 coupled to outlet 150 of FIG. 1B allow microwaves to pass through to the water contained therein. Chamber 216 withstands the heat produced by the microwaved water without significantly contaminating the water. In one embodiment, chamber 216 is made of quartz, and in another embodiment, chamber 216 is made of polyvinylidene fluoride resin, referred to as PVDF, or Teflon PFA commercially available from E. I. du Pont de Nemours and Company of Wilmington, Del., although any chamber that admits microwaves and does not significantly contaminate the water may be used. Chamber 216 may be in the shape of one or more pipes or may be other shapes. Chamber 216 may be straight or not straight in shape. Shapes that are not straight may allow the water to come into contact with microwaves for a longer time. Microwave generator 210 generates microwaves which heats the water in the pipes to produce hot water or steam, which is provided to output 220.
    [0021] In another embodiment of the present invention, shown in FIG. 2B, microwave heating unit [0021] 104 includes the components of FIG. 2A and also includes rotating fan 212 and reflectors 214. Microwaves emitted from microwave generator 210 are disbursed by rotating fan 212 and reflected by reflectors 214, both of which reflect microwave energy without significant absorption. These components operate as if they were in a conventional microwave oven for use in household cooking. Such embodiment may make more efficient use of the microwaves generated by microwave generator 210.
    [0022] Referring again to FIG. 2A, in one embodiment, a sensor [0022] 222 is coupled to controller 224 which controls the operation of microwave generator 210 to provide a desired temperature of the water flowing past the sensor 222. If the water sensed by sensor 222 is too warm, controller 224 reduces the output of microwave generator 210 to reduce the temperature of the water. If the water sensed by sensor 222 is too cold, controller 224 increases the output of microwave generator 210. The output of microwave generator may be adjusted by cycling microwave generator 210 on and off or by varying the power input to microwave generator 210.
    [0023] In another embodiment, sensor [0023] 222, controller 224 and a valve 226 are used to control the temperature of the water. Sensor 222 is coupled to controller 224, which is in turn coupled to control valve 226. Controller 224 opens valve 226 when water reaches a desired temperature as indicated by sensor 222, and otherwise keeps water from flowing out of microwave heating unit 104. If it is desirable to achieve a constant flow of water, unheated ultrapure water may be routed from input 218 to output 216 to make up water restricted by valve 226. In one embodiment, a valve similar to valve 226 is used on the supply of unheated ultrapure water and this valve is also controlled by controller 224 to provide a constant flow of ultrapure water. A second sensor (not shown) coupled to controller 224 may allow for detection of the temperature of the unheated ultrapure water to allow controller 224 to provide the proper mix of heated and unheated ultrapure water to provide ultrapure water at a desired temperature or within a desired temperature range.
    [0024] Referring now to FIG. 3, a method of producing ultrapure hot water or steam is shown according to one embodiment of the present invention. The water is purified to ultrapure standards [0024] 310 as described above. The water that is purified in step 310 is provided 312 to an inert chamber, such as piping made from quartz, PVDF or Teflon PFA. Microwaves are generated 314 and applied 316 to the chamber, which transmits the microwaves to the water in the chamber as described above. Step 316 may include disbursing the microwaves. The microwaves alternately polarize the water molecules and then reverse polarize them over and over again at high speed, which generates heat in the water. The water is thus heated or turned to steam, and the heated water or steam is provided 318 to a process. Step 318 may include sensing the temperature of the water at one or more locations as described above and using the temperature of the water to control one or more valves or to control the generation of microwaves in step 314 in order to provide water at a desired temperature. A product is manufactured 320 using the ultrapure hot water or steam, or the ultrapure water is used in a process as described above.
    权利要求:
    Claims (22)
    [1" id="US-20010003339-A1-CLM-00001] 1. An apparatus for heating ultrapure water, comprising:
    a microwave generator for emitting microwaves; and
    at least one chamber for transporting the ultrapure water through the microwaves emitted from the microwave generator.
    [2" id="US-20010003339-A1-CLM-00002] 2. The apparatus of
    claim 1 , wherein the at least one chamber is capable of transmitting microwaves and withstanding heat emitted from the water transported through the microwaves without significantly contaminating the water.
    [3" id="US-20010003339-A1-CLM-00003] 3. The apparatus of
    claim 2 wherein the at least one chamber comprises PVDF.
    [4" id="US-20010003339-A1-CLM-00004] 4. The apparatus of
    claim 2 wherein the at least one chamber comprises quartz.
    [5" id="US-20010003339-A1-CLM-00005] 5. The apparatus of
    claim 2 wherein the at least one chamber comprises Teflon PFA.
    [6" id="US-20010003339-A1-CLM-00006] 6. The apparatus of
    claim 1 wherein the ultrapure water has a resistivity of at least 17 megaohm-cm total organic carbon not more than 25 ppb C.
    [7" id="US-20010003339-A1-CLM-00007] 7. The apparatus of
    claim 1 additionally comprising:
    a control valve coupled to the chamber to restrict a flow of ultrapure water past the control valve;
    a sensor for sensing a temperature of the ultrapure water; and
    a controller coupled to the control valve and the sensor, the controller for operating the valve responsive to the sensor.
    [8" id="US-20010003339-A1-CLM-00008] 8. The apparatus of
    claim 1 additionally comprising:
    a sensor for sensing a temperature of the ultrapure water; and
    a controller coupled to the microwave generator and the sensor, the controller for operating the microwave generator responsive to the sensor.
    [9" id="US-20010003339-A1-CLM-00009] 9. A method of heating ultrapure water, the method comprising:
    receiving ultrapure water; and
    exposing the ultrapure water received to microwave energy.
    [10" id="US-20010003339-A1-CLM-00010] 10. The method of
    claim 9 comprising the additional step of transporting the ultrapure water through the microwave energy.
    [11" id="US-20010003339-A1-CLM-00011] 11. The method of
    claim 10 , wherein the transporting step comprises transporting the ultrapure water in a chamber that is capable of transmitting the microwave energy.
    [12" id="US-20010003339-A1-CLM-00012] 12. A product produced using the method of
    claim 9 .
    [13" id="US-20010003339-A1-CLM-00013] 13. The product of
    claim 12 , wherein the method additionally comprises transporting the ultrapure water through the microwave energy.
    [14" id="US-20010003339-A1-CLM-00014] 14. The product of
    claim 13 , wherein the transporting step comprises transporting the ultrapure water in a chamber that is capable of admitting the microwave energy.
    [15" id="US-20010003339-A1-CLM-00015] 15. The product of
    claim 12 , wherein the product comprises a microelectronic device.
    [16" id="US-20010003339-A1-CLM-00016] 16. The product of
    claim 12 , wherein the product comprises a disk drive.
    [17" id="US-20010003339-A1-CLM-00017] 17. The product of
    claim 12 , wherein the product comprises a pharmaceutical product.
    [18" id="US-20010003339-A1-CLM-00018] 18. The product of
    claim 12 , wherein the product comprises a biotechnology product.
    [19" id="US-20010003339-A1-CLM-00019] 19. The method of
    claim 9 comprising the additional step of sensing a temperature of the ultrapure water.
    [20" id="US-20010003339-A1-CLM-00020] 20. The method of
    claim 19 , wherein the exposing step is responsive to the sensing step.
    [21" id="US-20010003339-A1-CLM-00021] 21. The method of
    claim 19 additionally comprising a step of regulating at least one flow of ultrapure water responsive to the sensing step.
    [22" id="US-20010003339-A1-CLM-00022] 22. A method of heating ultrapure water, comprising:
    receiving the ultrapure water; and
    rapidly polarizing and reverse polarizing molecules in the water.
    类似技术:
    公开号 | 公开日 | 专利标题
    KR100495551B1|2005-06-16|Ozone treatment device of semiconductor process system
    US6991733B2|2006-01-31|Process for removing organics from ultrapure water
    US20080011336A1|2008-01-17|Induction heating type pure water heating apparatus and pure water heating method
    JP2009515366A|2009-04-09|Batch photoresist dry stripping and ashing system and method
    JP2006255650A|2006-09-28|Apparatus for producing pure water
    CN1237012C|2006-01-18|Ozonation process
    US6369371B2|2002-04-09|Method and apparatus for heating ultrapure water using microwave energy
    JP2019055404A|2019-04-11|Method and system for providing ultrapure water
    CN1282306A|2001-01-31|Method and device for production of pure water
    JP2006502845A|2006-01-26|Method for simultaneously performing decalcification and removal of toxic substances, and reactor
    WO2014147645A2|2014-09-25|A system and a process for water descaling
    JP3954647B2|2007-08-08|Method and apparatus for purifying gas and liquid
    JP2010000433A|2010-01-07|Apparatus for producing refined water and method for sterilizing the same
    US20110233142A1|2011-09-29|Water Purification System and Method
    WO2018051552A1|2018-03-22|Ultrapure water manufacturing device
    JP2009189905A|2009-08-27|Heat recovery type cleaning equipment
    JP4438077B2|2010-03-24|Method for preparing gas-dissolved water for cleaning electronic materials
    JP3474991B2|2003-12-08|Oxidation treatment apparatus and oxidation treatment method
    JP2017202474A|2017-11-16|Ozone dissolved water production apparatus
    US10618032B2|2020-04-14|Low temperature wet air oxidation
    RU2322811C2|2008-04-27|Apparatus for producing of sterilized milk
    JP3041410U|1997-09-19|Heat exchange system
    JP2002018431A|2002-01-22|Device for irradiating ultraviolet ray and device for producing ultrapure water
    KR200403854Y1|2005-12-14|The Apparatus for Generation of Ultra Pure Water Using Far Infrared
    JPH06121902A|1994-05-06|Deaerating device and deaerating method
    同族专利:
    公开号 | 公开日
    US6369371B2|2002-04-09|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US20090134152A1|2005-10-27|2009-05-28|Sedlmayr Steven R|Microwave nucleon-electron-bonding spin alignment and alteration of materials|US4152567A|1977-03-07|1979-05-01|Mayfield Esther O|Microwave water heater|
    US4310738A|1980-02-08|1982-01-12|Michael Moretti|Microwave fluid heating system|
    US4288674A|1980-04-21|1981-09-08|Councell Graham D|Microwave actuated steam generator|
    US4313798A|1980-06-17|1982-02-02|Lakehurst Galleries, Ltd.|Micro-wave powered distillation unit|
    US4417116A|1981-09-02|1983-11-22|Black Jerimiah B|Microwave water heating method and apparatus|
    US4826575A|1985-11-18|1989-05-02|Karamian Narbik A|Apparatus for production of high-purity water by microwave technology|
    US5521361A|1992-06-22|1996-05-28|Strait, Jr.; Clifford C.|Microwave ovenware apparatus, hydrating microwave ovens and microwave water purifier|GB2413005B|2004-04-07|2007-04-04|Jenact Ltd|UV light source|
    US7432482B2|2004-07-09|2008-10-07|Sedlmayr Steven R|Distillation and distillate method by microwaves|
    US7119312B2|2004-07-09|2006-10-10|Sedlmayr Steven R|Microwave fluid heating and distillation method|
    GB2418335B|2004-09-17|2008-08-27|Jenact Ltd|Sterilising an air flow using an electrodeless UV lamp within microwave resonator|
    法律状态:
    1999-08-18| AS| Assignment|Owner name: CH2MHILL INDUSTRIAL DESIGN CORPORATION, OREGON Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HAVENS, DANIEL A.;WILLIAMS, RALPH N.;REEL/FRAME:010187/0836;SIGNING DATES FROM 19990813 TO 19990817 |
    2002-03-21| STCF| Information on status: patent grant|Free format text: PATENTED CASE |
    2005-04-19| FPAY| Fee payment|Year of fee payment: 4 |
    2009-06-19| FPAY| Fee payment|Year of fee payment: 8 |
    2013-11-15| REMI| Maintenance fee reminder mailed|
    2014-04-07| SULP| Surcharge for late payment|Year of fee payment: 11 |
    2014-04-07| FPAY| Fee payment|Year of fee payment: 12 |
    优先权:
    申请号 | 申请日 | 专利标题
    US09/376,270|US6369371B2|1999-08-18|1999-08-18|Method and apparatus for heating ultrapure water using microwave energy|US09/376,270| US6369371B2|1999-08-18|1999-08-18|Method and apparatus for heating ultrapure water using microwave energy|
    [返回顶部]