Sulfonates, polymers, resist compositions and patterning process

专利摘要:
The novel sulfonic acid ester compound of the general formula (1), wherein R 1 to R 3 are H, F or C 1-20 alkyl or fluoroalkyl group, and at least one of R 1 to R 3 contains F. Polymers comprising units derived from sulfonic acid ester compounds are used as base resins to form resist compositions that are sensitive to high energy rays, maintain high transparency at wavelengths of 200 nm or less, and have improved alkali soluble contrast and plasma etching resistance. .
公开号:KR20040072479A
申请号:KR1020040008686
申请日:2004-02-10
公开日:2004-08-18
发明作者:하라다유지；하타케야마준；가와이요시오；사사고마사루；엔도마사유키；기시무라신지；마에다가즈히코；고모리야하루히코；미야자와사토루
申请人:신에쓰 가가꾸 고교 가부시끼가이샤；마쯔시다덴기산교 가부시키가이샤；센트럴가라스 가부시기가이샤；
IPC主号:

专利说明:

Sulphonic acid esters, polymers, resist compositions, and patterning methods {SULFONATES, POLYMERS, RESIST COMPOSITIONS AND PATTERNING PROCESS}
[1] The present invention relates to polymers useful as base resins in resist compositions suitable for microfabrication techniques, and to sulfonic acid esters useful as starting monomers for these polymers. The present invention also relates to a resist composition, particularly a chemically amplified resist composition comprising the polymer, and a pattern forming method using the same.
[2] In recent years, with high integration and high speed of LSI, finer pattern rule is required. Background of the rapid progress of miniaturization includes high NA of the projection lens, improved performance of the resist material, and short wavelength of the irradiated light. Regarding high resolution and high sensitivity of the resist material, chemically amplified positive resist materials using an acid generated by light irradiation as catalysts are disclosed in U.S. Patent Nos. 4,491,628 and 5,310,619 (Japanese Patent-B 2-27660 and Japanese Patent). -A 63-27829). They are currently a particularly important resist material in far ultraviolet lithography.
[3] In addition, shorter wavelengths from i-line (365 nm) to KrF (248 nm) have brought about significant changes. The resist material for the KrF excimer laser has begun in a 0.30 micron process, past the 0.25 micron rule and has now begun mass production of 0.18 micron rules. Technologists are beginning to study less than 0.10 micron rule, and the trend toward miniaturization is accelerating.
[4] For ArF (193 nm), miniaturization of the design rule is expected to be 0.13 µm or less. Resin used conventionally, such as a novolak resin and polyvinyl phenol type | system | group, has a very strong absorption in the vicinity of 193 nm, and cannot be used as a base resin for resists. In order to ensure transparency and the necessary dry etching resistance, some technicians have disclosed, as disclosed in Japanese Patent-A 9-73173, Japanese Patent-A 10-10739, Japanese Patent-A 9-230595 and WO 97/33198. Acrylic resins or cycloaliphatic resins (typically cycloolefins) have been studied.
[5] Regarding F ₂ (157 nm), micronization of 0.10 μm or less is expected, but since the acrylic resin, which is the base resin for ArF, does not transmit light at all and the cycloolefin resin having a carbonyl bond has been found to have strong absorption. As a result, it becomes more difficult to secure transparency. In addition, poly (vinylphenol), a base resin for KrF, has an absorption window near 160 nm, which slightly improves transmittance, but it is found to be far less than practical.
[6] As described above, since carbonyl groups and carbon-carbon double bonds have absorption in the vicinity of 157 nm, reducing these units is considered to be one effective method for improving transmittance. However, recent studies have shown a significant improvement in transparency in the F ₂ region by introducing fluorine atoms into the base polymer.
[7] In SPIE 2001, Lecture No. 4345-31 "Polymer Design for 157 nm Chemically Amplified Resists", α-trifluoromethyl acrylate tert-butyl and 5- (2-hydroxy-2,2-bistrifluoromethyl) ethyl- The resist composition using a copolymer of 2-norbornene and a copolymer of α-trifluoromethyl acrylate tert-butyl and 4- (2-hydroxy-2,2-bistrifluoromethyl) methylstyrene was 157 nm. It has been reported that the absorbance of the polymer is improved by up to about 3. However, since absorbance of 2 or less is considered essential for forming a rectangular pattern with a film thickness of 2,000 Pa or more through F ₂ exposure, transparency is still insufficient with these resins.
[8] In addition, the inventors found that incorporation of the fluorinated vinyl sulfonic acid ester unit into the α-trifluoromethylacrylate polymer described above improves transparency while maintaining substrate adhesiveness and developer affinity of the resin. These systems furthermore have an absorbance of approximately two.
[9] It is an object of the present invention to have a high transmittance with respect to the vacuum ultraviolet rays of 300 nm or less, in particular F ₂ (157 nm), Kr ₂ (146 nm), KrAr (134 nm) and Ar ₂ (126 nm) laser beams, and as a base resin in the resist composition To provide useful new polymers and novel sulfonic acid esters useful as starting monomers for these polymers. Still another object is to provide a resist composition comprising the polymer, in particular a chemically amplified resist composition, and a pattern forming method using the same.
[10] When a polymer comprising units derived from monomers having fluorinated alkyl groups introduced into the sulfonic acid side chain is used as the base resin, the resulting resist composition, in particular the chemically amplified resist composition, has markedly reduced contrast and adhesion without deteriorating transparency. It has been found to improve.
[11] In a first aspect, the present invention provides a sulfonic acid ester compound having the following general formula (1).
[12]
[13] Wherein R ¹ to R ³ are each a hydrogen atom, a fluorine atom or a linear, branched or cyclic alkyl group or a fluorinated alkyl group having 1 to 20 carbon atoms, at least one of R ¹ to R ³ contains a fluorine atom, R ¹ and R ² , R ¹ and R ³ , or R ² and R ³ may be bonded to each other to form a ring. When a ring is formed, R ¹ to R ³ each have 1 to 18 carbon atoms, preferably 1 to 10 linear or branched alkylene groups or fluorinated alkylene groups.
[14] In a second aspect, the present invention provides a polymer comprising a repeating unit of the following general formula (2) and having a weight average molecular weight of 1,000 to 500,000.
[15]
[16] Wherein R ¹ to R ³ are as defined above.
[17] In a preferred embodiment, the polymer further comprises at least one repeating unit selected from the following general formulas (3a) to (3f).
[18]
[19] Wherein R ⁴ , R ⁵ , R ⁷ , R ⁸ and R ¹⁵ are each a single bond or a linear, branched or cyclic alkylene group or fluorinated alkylene group having 1 to 20 carbon atoms, and R ⁶ , R ⁹ , R ¹² and R ¹⁸ are each a hydrogen atom or an acid labile group, and R ¹⁰ , R ¹¹ , R ¹³ , R ¹⁴ , R ¹⁶ and R ¹⁷ are each a hydrogen atom, a fluorine atom, linear, branched or cyclic having 1 to 20 carbon atoms. An alkyl group or a fluorinated alkyl group, at least one of R ¹⁶ and R ¹⁷ contains one or more fluorine atoms, R ¹⁹ is a linear, branched, or cyclic fluorinated alkyl group having 1 to 20 carbon atoms, and "a" and "b" is 1 or 2, respectively.
[20] In a preferred embodiment, the polymer further comprises a repeating unit of the following general formula (4).
[21]
[22] In the above formula, R ²⁰ is a methylene group, an oxygen atom or a sulfur atom, and R ²¹ to R ²⁴ each represent a hydrogen atom, a fluorine atom, -R ²⁵ -OR ²⁶ , -R ²⁵ -CO ₂ R ^26, or a C 1-20 carbon atom. A linear, branched or cyclic alkyl group or a fluorinated alkyl group, at least one of R ²¹ to R ²⁴ contains -R ²⁵ -OR ²⁶ or -R ²⁵ -CO ₂ R ²⁶ , and R ²⁵ is a single bond or 1 carbon atom A linear, branched or cyclic alkylene group or a fluorinated alkylene group of ˜20, and R ²⁶ is a straight chain, minute having 1 to 20 carbon atoms which may contain a hydrophilic group such as a hydrogen atom, an acid labile group, an adhesive group, or a hydroxyl group; A gaseous or cyclic fluorinated alkyl group, c is 0 or 1.
[23] More preferably, the repeating unit of general formula (4) has a structure of the following general formula (4a) or (4b).
[24]
[25] In the above formula, R ²⁶ is as defined above, R ²⁷ to R ³⁰ are each a hydrogen atom, a fluorine atom or an alkyl group or fluorinated alkyl group having 1 to 4 carbon atoms, and at least one of R ²⁷ and R ²⁸ is one or more A fluorine atom, and at least one of R ²⁹ and R ³⁰ contains one or more fluorine atoms.
[26] In a preferred embodiment, the polymer further comprises repeating units of the following general formula (5).
[27]
[28] Wherein R ³¹ is a hydrogen atom, a fluorine atom or a straight, branched or cyclic alkyl group having 1 to 20 carbon atoms or a fluorinated alkyl group, and R ³² is a single bond or a straight, branched or cyclic alkylene group having 1 to 20 carbon atoms Or a fluorinated alkylene group, R ³³ is a hydrogen atom or an acid labile group, R ³⁴ is a fluorine atom or a linear, branched or cyclic fluorinated alkyl group having 1 to 20 carbon atoms, d is 1 or 2, e is It is an integer of 0-4 and 1 <d + e <= 5 is satisfied.
[29] More preferably, the repeating unit of general formula (5) has the following general formula (5a) or (5b).
[30]
[31] In the above formula, R ³³ is as defined above, R ³⁵ to R ⁴⁰ are each a hydrogen atom, a fluorine atom or an alkyl group having 1 to 4 carbon atoms or a fluorinated alkyl group, and at least one of R ³⁵ and R ³⁶ is one or more A fluorine atom, at least one of R ³⁷ and R ³⁸ contains one or more fluorine atoms, and at least one of R ³⁹ and R ⁴⁰ contains one or more fluorine atoms.
[32] In another preferred embodiment, the polymer further comprises a repeating unit of formula (6).
[33]
[34] Wherein R ⁴¹ to R ⁴³ each represent a hydrogen atom, a fluorine atom or a linear, branched or cyclic alkyl group or a fluorinated alkyl group having 1 to 20 carbon atoms, and R ⁴⁴ represents a hydrogen atom, an acid labile group, an adhesive group, or a hydroxyl group. It is a C1-C20 linear, branched or cyclic fluorinated alkyl group which may contain the same hydrophilic group. Most often R ⁴³ is a trifluoromethyl group
[35] In a third aspect, the invention provides a resist composition comprising a polymer as defined above, specifically a chemically amplified positive resist composition comprising (A) the polymer as defined above, (B) an organic solvent and (C) a photoacid generator. To provide. The resist composition may further comprise (D) a basic compound and / or (E) a dissolution inhibitor.
[36] In a fourth aspect, the present invention provides a method of forming a coating comprising: applying the resist composition onto a substrate to form a coating; After the coating is heat treated, exposing to high energy rays in the wavelength range of 10 to 180 nm or 1 to 30 nm through a photo mask; And heat-treating the exposed coating as needed, and then developing using a developing solution. The high energy ray is typically an F ₂ laser beam, an Ar ₂ laser beam or a soft x-ray.
[37] Polymer
[38] In order to improve the transmittance around 157 nm, it is thought that one effective method is to reduce the number of carbonyl groups and carbon-carbon double bonds. It has also been found that the introduction of fluorine atoms into the base polymer greatly contributes to the improvement of the transmittance. Indeed, a polymer incorporating fluorine in the aromatic ring of polyvinylphenol provides a transmittance near an acceptable level in practice (see JP-A 2001-146505). However, this base polymer has been found to be negative upon exposure to high energy rays such as F ₂ lasers, which hinders its practical use as a resist. On the other hand, polymers in which fluorine is introduced into a polymer containing an alicyclic compound derived from an acrylic resin or a norbornene derivative in the main chain have been found to have high transparency and no negative effect. However, when the introduction rate of fluorine is increased to increase transparency, It exists in the tendency for the board | substrate adhesiveness of a resin, and a developer permeability to be impaired.
[39] Although sulfonic acid esters contain two sulfur-oxygen double bonds, they have a relatively high transmittance near about 157 nm, and resins containing such sulfonic acid ester units have significantly improved substrate adhesion or developer permeability compared to the fluorinated polymers described above. It has been found to improve. In particular, stability is maintained by using a base polymer comprising a unit of formula (2) derived from a sulfonic acid ester compound of formula (1) obtained by introducing fluorine into a tertiary alkyl ester of sulfonic acid which is inherently lacking in stability. At the same time, a resist composition having an acid removal ability is obtained.
[40]
[41] Wherein R ¹ to R ³ are a hydrogen atom, a fluorine atom or a linear, branched or cyclic alkyl group or a fluorinated alkyl group having 1 to 20 carbon atoms, at least one of R ¹ to R ³ contains a fluorine atom, R ¹ and R ² , R ¹ and R ³ , or R ² and R ³ may be bonded to each other to form a ring. When a ring is formed, R ¹ to R ³ each have 1 to 18 carbon atoms, preferably 1 It is -10 linear or branched alkylene group or fluorinated alkylene group.
[42] The polymer or high molecular weight compound of the present invention is defined as including the repeating unit of the general formula (2), but for the purpose of improving the dissolution contrast, substrate adhesion, dry etching resistance and other physical properties of the resist, the general formula (3a) It is preferable that at least one repeating unit selected from-(3f) and / or the repeating unit of the general formula (4) and / or the repeating unit of the general formula (5) and / or the repeating unit of the general formula (6) are incorporated. Do.
[43]
[44] Wherein R ⁴ , R ⁵ , R ⁷ , R ⁸ and R ¹⁵ are each a single bond or a linear, branched or cyclic alkylene group or fluorinated alkylene group having 1 to 20 carbon atoms, and R ⁶ , R ⁹ , R ¹² and R ¹⁸ are each a hydrogen atom or an acid labile group, and R ¹⁰ , R ¹¹ , R ¹³ , R ¹⁴ , R ¹⁶ and R ¹⁷ are each a hydrogen atom, a fluorine atom, linear, branched or cyclic having 1 to 20 carbon atoms. An alkyl group or a fluorinated alkyl group, at least one of R ¹⁶ and R ¹⁷ contains one or more fluorine atoms, R ¹⁹ is a linear, branched, or cyclic fluorinated alkyl group having 1 to 20 carbon atoms, and "a" and "b" is 1 or 2, respectively.
[45]
[46] In the above formula, R ²⁰ is a methylene group, an oxygen atom or a sulfur atom, and R ²¹ to R ²⁴ each represent a hydrogen atom, a fluorine atom, -R ²⁵ -OR ²⁶ , -R ²⁵ -CO ₂ R ^26, or a C 1-20 carbon atom. A linear, branched or cyclic alkyl group or a fluorinated alkyl group, at least one of R ²¹ to R ²⁴ contains -R ²⁵ -OR ²⁶ or -R ²⁵ -CO ₂ R ²⁶ , and R ²⁵ is a single bond or 1 carbon atom A linear, branched or cyclic alkylene group or a fluorinated alkylene group of ˜20, and R ²⁶ is a straight chain, minute having 1 to 20 carbon atoms which may contain a hydrophilic group such as a hydrogen atom, an acid labile group, an adhesive group, or a hydroxyl group; A gaseous or cyclic fluorinated alkyl group, c is 0 or 1.
[47]
[48] Wherein R ³¹ is a hydrogen atom, a fluorine atom or a straight, branched or cyclic alkyl group having 1 to 20 carbon atoms or a fluorinated alkyl group, and R ³² is a single bond or a straight, branched or cyclic alkylene group having 1 to 20 carbon atoms Or a fluorinated alkylene group, R ³³ is a hydrogen atom or an acid labile group, R ³⁴ is a fluorine atom or a linear, branched or cyclic fluorinated alkyl group having 1 to 20 carbon atoms, d is 1 or 2, e is It is an integer of 0-4 and 1 <d + e <= 5 is satisfied.
[49]
[50] Wherein R ⁴¹ to R ⁴³ each represent a hydrogen atom, a fluorine atom or a linear, branched or cyclic alkyl group or a fluorinated alkyl group having 1 to 20 carbon atoms, and R ⁴⁴ represents a hydrogen atom, an acid labile group, an adhesive group, or a hydroxyl group. It is a C1-C20 linear, branched or cyclic fluorinated alkyl group which may contain the same hydrophilic group. Preferably, R ⁴³ is a trifluoromethyl group.
[51] It is preferable that the repeating unit of general formula (4) is a unit of the following general formula (4a) or (4b).
[52]
[53] In the above formula, R ²⁶ is as defined above, R ²⁷ to R ³⁰ are each a hydrogen atom, a fluorine atom or an alkyl group or fluorinated alkyl group having 1 to 4 carbon atoms, and at least one of R ²⁷ and R ²⁸ is one or more A fluorine atom, and at least one of R ²⁹ and R ³⁰ contains one or more fluorine atoms.
[54] It is preferable that the repeating unit of general formula (5) is a unit of the following general formula (5a) or (5b).
[55]
[56] In the above formula, R ³³ is as defined above, R ³⁵ to R ⁴⁰ are each a hydrogen atom, a fluorine atom or an alkyl group or fluorinated alkyl group having 1 to 4 carbon atoms, and at least one of R ³⁵ and R ³⁶ is one or more A fluorine atom, at least one of R ³⁷ and R ³⁸ contains one or more fluorine atoms, and at least one of R ³⁹ and R ⁴⁰ contains one or more fluorine atoms.
[57] More specifically, the linear, branched or cyclic alkyl group having 1 to 20 carbon atoms is methyl, ethyl, propyl, isopropyl, n-propyl, n-butyl, sec-butyl, tert-butyl or cyclo Pentyl group, cyclohexyl group, cyclohexylmethyl group, 2-ethylhexyl group, n-octyl group, 2-adamantyl group, and (2-adamantyl) methyl group, and have 1 to 12 carbon atoms, especially 1 to Although those of l0 are preferable, they are not limited to these.
[58] The fluorinated alkyl group is one in which part or all of the hydrogen atoms of the alkyl group are substituted with fluorine atoms. Examples include trifluoromethyl group, 2,2,2-trifluoroethyl group, 3,3, -3-trifluoropropyl group, 1,1,1,3,3,3-hexafluoroisopropyl group, and 1,1,2,2,3, -3,3-heptafluoropropyl group and other groups represented by the following formulas are included, but not limited to these.
[59]
[60] In the above formula, R ⁴⁵ is a hydrogen atom, a fluorine atom or a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms or a fluorinated alkyl group, and f is an integer of 0 to 5.
[61] The linear, branched or cyclic alkylene group having 1 to 20 carbon atoms is obtained by removing one hydrogen atom from the alkyl group. Suitable fluorinated alkylene groups are likewise alkylene groups in which part or all are replaced with fluorine atoms.
[62] The acid labile groups represented by R ⁶ , R ⁹ , R ¹² , R ¹⁸ , R ²⁶ , R ³³ and R ⁴⁴ are selected from various such groups, and groups of the following general formulas (7) to (9) are particularly preferred.
[63]
[64] In the general formula (7), R ⁴⁶ is a C4-20, preferably a tertiary alkyl group of 4 to 15, or oxoalkyl groups of 4 to 20 carbon atoms. Suitable tertiary alkyl groups are tert-butyl group, tert-amyl group, 1,1-diethylpropyl group, 1-ethylcyclopentyl group, 1-butylcyclopentyl group, 1-ethylcyclohexyl group, 1-butylcyclohex It includes a real group, a 1-ethyl-2-cyclopentenyl group, a 1-ethyl 2-cyclohexenyl group, and a 2-methyl-2-adamantyl group. Suitable oxoalkyl groups include 3-oxocyclohexyl groups, 4-methyl-2-oxooxan-4-yl groups, and 5-methyl-5-oxooxolane-4-yl groups. The letter g is an integer of 0-6.
[65] Non-limiting examples of acid labile groups of formula (7) include tert-butoxycarbonyl group, tert-butoxycarbonylmethyl group, tert-amyloxycarbonyl group, tert-amyloxycarbonylmethyl group, 1,1-diethylpropyloxy Carbonyl group, 1,1-diethylpropyloxycarbonylmethyl group, 1-ethylcyclopentyloxycarbonyl group, 1-ethylcyclopentyloxycarbonylmethyl group, 1-ethyl-2-cyclopentenyloxycarbonyl group, 1-ethyl-2- Cyclopentenyloxycarbonylmethyl group, 1-ethoxyethoxycarbonylmethyl group, 2-tetrahydropyranyloxycarbonylmethyl group, and 2-tetrahydrofuranyloxycarbonylmethyl group.
[66] In general formula (8), R ⁴⁷ and R ⁴⁸ are a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 18, preferably 1 to 10, carbon atoms, for example, methyl, ethyl, propyl, isopropyl Group, n-butyl group, sec-butyl group, tert-butyl group, cyclopentyl group, cyclohexyl group, 2-ethylhexyl group, and n-octyl group. R ⁴⁹ is a monovalent hydrocarbon group having 1 to 18 carbon atoms, preferably 1 to 10 carbon atoms, which may contain a hetero atom such as an oxygen atom, for example, a linear, branched, or cyclic alkyl group, and some hydrogens. The atom is a substituted alkyl group substituted with a hydroxyl group, an alkoxy group, an oxo group, an amino group or an alkylamino group. Typical substituted alkyl groups are shown below.
[67]
[68] R ⁴⁷ and R ⁴⁸ , R ⁴⁷ and R ⁴⁹ , or R ⁴⁸ and R ⁴⁹ may combine with each other to form a ring. When a ring is formed, R ⁴⁷ , R ⁴⁸ and R ⁴⁹ are each a linear or branched alkylene group having 1 to 18 carbon atoms, preferably 1 to 10 carbon atoms.
[69] Among the acid labile groups of formula (8), straight or branched groups are exemplified by the following groups.
[70]
[71] In the acid labile group of the general formula (8), the cyclic group is a tetrahydrofuran-2-yl group, 2-methyltetrahydrofuran-2-yl group, tetrahydropyran-2-yl group and 2-methyltetrahydropyran-2-yl group Illustrated by
[72] Among the groups of the general formula (8), an ethoxyethyl group, butoxyethyl group and ethoxypropyl group are preferable.
[73] In formula (9), R ⁵⁰ , R ⁵¹ and R ⁵² are each monovalent hydrocarbon groups, which are typically linear, branched or cyclic alkyl groups having 1 to 20 carbon atoms, such as oxygen, sulfur, nitrogen and fluorine. It may contain hetero atoms. R ⁵⁰ and R ⁵¹ , R ⁵⁰ and R ⁵² , and R ⁵¹ and R ⁵² may be bonded to each other to form a ring together with the carbon atom to which they are bonded.
[74] Examples of tertiary alkyl groups represented by the general formula (9) include tert-butyl group, triethylcarbyl group, 1-ethylnorbornyl group, 1-methylcyclohexyl group, 1-ethylcyclopentyl group, and 2- (2-methyl ) Adamantyl group, 2- (2-ethyl) adamantyl group, tert-amyl group, 1,1,1,3,3,3-hexaflouro-2-methylisopropyl group, and 1,1,- 1,3,3,3-hexafluoro-2-cyclohexylisopropyl group, and other groups shown below.
[75]
[76] In the above formula, R ⁵³ is a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms, for example, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, sec-butyl group, n-pentyl group, n-hexyl group, cyclopropyl group, cyclopropylmethyl group, cyclobutyl group, cyclopentyl group, and cyclohexyl group. R ⁵⁴ is a C2-C6 linear, branched or cyclic alkyl group, for example, an ethyl group, a propyl group, isopropyl group, n-butyl group, sec-butyl group, n-pentyl group, n-hexyl group, Cyclopropyl group, cyclopropylmethyl group, cyclobutyl group, cyclopentyl group and cyclohexyl group. R ⁵⁵ and R ⁵⁶ each represent a hydrogen atom, a monovalent hydrocarbon group having 1 to 6 carbon atoms which may contain a hetero atom, or a monovalent hydrocarbon group having 1 to 6 carbon atoms which may be interrupted by a hetero atom. These groups can be linear, branched or cyclic. Heteroatoms are typically selected from oxygen atoms, sulfur atoms and nitrogen atoms, and are -OH, -OR ⁵⁷ , -O-, -S-, -S (= 0)-, -NH ₂ , -NHR ⁵⁷ , -N Or contained in the form of (R ⁵⁷ ) ₂ , —NH— or —NR ⁵⁷ —, wherein R ⁵⁷ is a C _1-5 alkyl group. Examples of the R ⁵⁵ and R ⁵⁶ groups include methyl group, hydroxymethyl group, ethyl group, hydroxyethyl group, propyl group, isopropyl group, n-butyl group, sec-butyl group, n-pentyl group, n-hexyl group and methoxy group , Methoxymethoxy group, ethoxy group and tert-butoxy group.
[77] Next, the adhesive groups represented by R ²⁶ and R ⁴⁴ are selected from various such groups, and are preferably groups of the following general formula.
[78]
[79] In the above formula, R ⁵⁸ is a methylene group, an oxygen atom or a sulfur atom.
[80] Examples of units of the general formula (2) are provided below, but are not limited to these.
[81]
[82] Examples of units of the general formulas (3a) to (3d) are provided below, but are not limited to these.
[83]
[84] Wherein R ⁶ , R ⁹ and R ¹⁸ are as defined above.
[85] Examples of units of the general formulas (4), (4a) and (4b) are provided below, but are not limited to these.
[86]
[87] Wherein R ²⁶ is as defined above.
[88] Examples of the units of the general formulas (5), (5a) and (5b) are provided below, but are not limited to these.
[89]
[90] Wherein R ³³ is as defined above.
[91] In addition, the units shown below can be incorporated into the polymers of the invention for the purpose of improving substrate adhesion and transparency.
[92]
[93] In the above formula, R ⁵⁹ to R ⁶³ each represent a hydrogen atom, a fluorine atom or a fluorinated alkyl group having 1 to 4 carbon atoms, and at least one of R ⁶⁰ to R ⁶³ contains one or more fluorine atoms. R ⁶⁴ and R ⁶⁵ are each a hydrogen atom, a methyl group or a trifluoromethyl group.
[94] In the polymer of the present invention, the unit of formula (2) is U1, the units of formulas (3a) to (3f) are U2, the units of formulas (4), (4a) and (4b) are U3, U1 + U2 + U3 + U4 + U5 + when the unit of (5), (5a) and (5b) is U4, the unit of general formula (6) is U5, and the adhesive and transparency unit other than the above is U6 U6 = 1, U preferably
[95] 0 <U1 ≦ 0.9, more preferably 0.1 ≦ U1 ≦ 0.5
[96] 0 ≦ U2 ≦ O.6, more preferably 0 ≦ U2 ≦ 0.4
[97] 0 ≦ U3 ≦ 0.6, more preferably 0 ≦ U3 ≦ 0.4
[98] 0 ≦ U4 ≦ 0.6, more preferably 0 ≦ U4 ≦ 0.4
[99] 0 ≦ U5 ≦ 0.7, more preferably 0 ≦ U5 ≦ 0.5
[100] 0 ≦ U6 ≦ 0.4, more preferably 0 ≦ U6 ≦ 0.2
[101] Range.
[102] The polymer of the present invention is generally represented by the formulas (2), (3a) to (3f), (4), (4a), (4b), (5), (5a), (5b) and (6). A monomer corresponding to each unit and optionally an adhesive-enhancing monomer, a transparency-enhancing monomer, and the like are dissolved in a solvent, a catalyst is added thereto, and synthesized by carrying out a polymerization reaction while heating or cooling the system as necessary. The polymerization reaction depends on the kind of initiator or catalyst, the means of initiation (light, heat, radiation, plasma, etc.), the polymerization conditions (temperature, pressure, concentration, solvent, additives) and the like. In the polymerization of the polymer of the present invention, radical copolymerization which initiates polymerization with an initiator such as 2,2'-azobisisobutyronitrile (AIBN) or the like, and ionic (anion) polymerization using a catalyst such as alkyllithium are usually used. These polymerization steps can be carried out in a conventional manner.
[103] The radical polymerization initiator used here is not critical. Typical initiators are AIBN, 2,2'-azobis (4-methoxy-2,4-dimethylvaleronitrile), 2,2'-azobis (2,4-dimethylvaleronitrile), and 2,2 Azo compounds such as' -azobis (2,4,4-trimethylpentane); peroxide compounds such as tert-butylperoxypivalate, lauroylperoxide, benzoylperoxide, and tert-butylperoxylaurate; Water-soluble initiators such as persulfates such as potassium persulfate; And redox combinations of peroxides such as potassium persulfate or hydrogen peroxide with reducing agents such as sodium sulfite. The amount of the polymerization initiator to be used is appropriately determined depending on factors such as the type of initiator and the polymerization conditions, but is mainly in the range of about 0.001 to 5% by weight, especially about 0.01 to 2% by weight, based on the total weight of the monomers to be polymerized.
[104] A solvent can be used for a polymerization reaction. It is preferable that the polymerization solvent used here does not interfere with a polymerization reaction. Typical solvents include ester solvents such as ethyl acetate and n-butyl acetate, ketone solvents such as acetone, methylethyl ketone and methyl isobutyl ketone, aliphatic or aromatic hydrocarbon solvents such as toluene, xylene and cyclohexane, isopropyl alcohol and ethylene glycol monomethyl ether Ether solvents such as alcohol solvents, diethyl ether, dioxane and tetrahydrofuran. These solvents can be used individually or in mixture of 2 or more types. Furthermore, well known molecular weight modifiers such as dodecyl mercaptan can be used in the polymerization system.
[105] Although the temperature of a polymerization reaction changes with kinds of polymerization initiators or the boiling point of a solvent, the range of about 20-200 degreeC mainly, especially about 50-140 degreeC is preferable. Any desired reactor or vessel can be used for the polymerization reaction.
[106] From the solution or dispersion of the polymer thus obtained, the organic solvent or water used as the reaction medium is removed by any of the well known techniques. Suitable techniques include, for example, filtration after reprecipitation, and heat distillation under vacuum.
[107] Preferably the polymer has a weight average molecular weight of about 1,000 to 500,000, in particular about 2,000 to 100,000.
[108] The polymers of the invention can be used as base resins of resist compositions, in particular chemically amplified resist compositions, in particular chemically amplified positive acting resist compositions. It is understood that the polymers of the present invention may be mixed with other polymers to alter the mechanical, thermal, alkali solubility and other properties of the polymer membrane. Any of the polymers known to be useful for resist use can be mixed in any desired ratio.
[109] In the practice of the present invention, the sulfonic acid ester compound of the general formula (1) can be prepared by the following reaction scheme, but is not limited thereto.
[110]
[111] Wherein R ¹ to R ³ are as defined above.
[112] The reaction easily takes place under known conditions. Preferably, the alcohol reactant and a base such as pyridine are added simultaneously to a solvent such as dichloromethane, and chloroethanesulfonyl chloride is added dropwise under an ice bath. In this way the desired monomer is obtained.
[113] Resist composition
[114] As long as the polymer of the present invention is used as the base resin, the resist composition of the present invention can be prepared using known components. In a preferred embodiment, the chemically amplified positive resist composition is defined as comprising (A) the above-defined polymer as the base resin, (B) an organic solvent, and (C) a photo acid generator. In the resist composition, (D) basic compound and / or (E) dissolution inhibitor may be further blended.
[115] Ingredient (B)
[116] The organic solvent used as component (B) in the present invention may be any organic solvent in which a base resin, a photo acid generator, and other components are soluble. Non-limiting examples of organic solvents include ketones such as cyclohexanone and methyl 2-n-amyl ketone; Alcohols such as 3-methoxybutanol, 3-methyl-3-methoxybutanol, 1-methoxy-2-propanol and 1-ethoxy-2-propanol; Ethers such as propylene glycol monomethyl ether, ethylene glycol monomethyl ether, propylene glycol monomethyl ether, ethylene glycol monoethyl ether, propylene glycol dimethyl ether and diethylene glycol dimethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate Esters such as sodium, ethyl lactate, ethyl pyruvate, butyl acetate, methyl 3-methoxypropionate, ethyl 3-ethoxypropionate, tert-butyl acetate, tert-butyl propionate and propylene glycol mono-tert-butyl ether acetate; And lactones such as γ-butyllactone.
[117] Fluorinated organic solvents are also useful. Non-limiting examples include 2-fluoroanisole, 3-fluoroanisole, 4-fluoroanisole, 2,3-difluoroanisole, 2,4-difluoroanisole, 2,5-di Fluoroanisole, 5,8-difluoro-1,4-benzodioxane, 2,3-difluorobenzyl alcohol, 1,3-difluoro-2-propanol, 2 ', 4'-di Fluoropropiophenone, 2,4-difluorotoluene, trifluoroacetaldehyde ethyl hemiacetal, trifluoroacetamide, trifluoroethanol, 2,2,2-trifluoroethylbutyrate, ethyl heptafluoro Robutyrate, ethyl heptafluorobutyl acetate, ethyl hexafluoroglutarylmethyl, ethyl 3-hydroxy-4,4,4-trifluorobutyrate, ethyl 2-methyl-4,4,4-trifluoro Acetoacetate, ethyl pentafluorobenzoate, ethyl pentafluoropropionate, ethyl pentafluoropropynyl acetate, ethyl perfluorooctanoate, Tyl 4,4,4-trifluoroacetoacetate, ethyl 4,4,4-trifluorobutyrate, ethyl 4,4,4-trifluorocrotonate, ethyl trifluorosulfonate, ethyl 3- (tri Fluoromethyl) butyrate, ethyl trifluoropyruvate, sec-ethyl trifluoroacetate, fluorocyclohexane, 2,2,3,3,4,4,4-heptafluoro-1-butanol, 1, 1,1,2,2,3,3-heptafluoro-7,7-dimethyl-4,6-octanedione, 1,1,1,3,5,5,5-heptafluoropentane-2, 4-dione, 3,3,4,4,5,5,5-heptafluoro-2-pentanol, 3,3,4,4,5,5,5-heptafluoro-2-pentanone,
[118] Isopropyl 4,4,4-trifluoroacetoacetate, methyl perfluorodecanoate, methyl perfluoro (2-methyl-3-oxahexanoate), methyl perfluorononanoate,
[119] Methyl perfluorooctanoate, methyl 2,3,3,3-tetrafluoropropionate,
[120] Methyl trifluoroacetoacetate, 1,1,1,2,2,6,6,6-octafluoro-2,4-hexanedione,
[121] 2,2,3,3,4,4,5,5-octafluoro-1-pentanol, 1H, 1H, 2H, 2H-perfluoro-1-decanol,
[122] Perfluoro-2,5-dimethyl-3,6-dioxan anionic acid methylester, 2H-perfluoro-5-methyl-3,6-dioxanonane, 1H, 1H, 2H, 3H, 3H- Perfluorononan-1,2-diol, 1H, 1H, 9H-perfluoro-1-nonanol, 1H, 1H-perfluorooctanol, 1H, 1H, 2H, 2H-perfluorooctanol, 2H-perfluoro-5,8,11,14-tetramethyl-3,6,9,12,15-pentaoxaoctadecane,
[123] Perfluorotributylamine, perfluorotrihexylamine, methyl perfluoro-2,5,8-trimethyl-3,6,9-trioxadodecanoate, perfluorotripentylamine, perfluorotripropylamine, 1H , 1H, 2H, 3H, 3H-perfluorodecane-1,2-diol, trifluorobutanol-1,1,1-trifluoro-5-methyl-2,4-hexanedione, 1,1, 1-trifluoro-2-propanol, 3,3,3-trifluoro-1-propanol, 1,1,1-trifluoro-2-propylacetate, perfluorobutyltetrahydrofuran, perfluoro Decalin, perfluoro (1,2-dimethylcyclohexane), perfluoro (1,3-dimethylcyclohexane), propylene glycol trifluoromethyl ether acetate, propylene glycol methyl ether trifluoromethyl acetate, butyl trifluor Chloromethyl acetate, methyl 3-trifluoromethoxypropionate, perfluorocyclohexanone, propylene glycol trifluoro Methyl ether, butyl trifluoroacetate, and 1,1,1-trifluoro-5,5-dimethyl-2,4-hexanedione.
[124] These solvents may be used alone or in combination of two or more thereof. Among the organic solvents, diethylene glycol dimethyl ether and 1-ethoxy-2-propanol, which are excellent in solubility of photoacid generators, safe propylene glycol monomethyl ether acetate, and mixtures thereof are preferred.
[125] The solvent is preferably used in an amount of about 300 to 10,000 parts by weight, more preferably about 500 to 5,000 parts by weight, per 100 parts by weight of the base resin.
[126] Ingredient (C)
[127] Photoacid generators are compounds that can generate acid upon exposure to high energy rays or electron beams,
[128] (i) an onium salt of the following general formula (P1a-1), (P1a-2) or (P1b),
[129] (ii) diazo methane derivatives of the general formula (P2)
[130] (iii) glyoxime derivatives of the general formula (P3)
[131] (iv) bissulfone derivatives of the general formula (P4)
[132] (v) sulfonic acid esters of N-hydroxyimide compounds of the following general formula (P5),
[133] (vi) β-keto sulfonic acid derivatives,
[134] (vii) disulfone derivatives,
[135] (viii) nitrobenzyl sulfonate derivatives, and
[136] (ix) sulfonic acid ester derivatives
[137] It includes.
[138] These photoacid generators are explained in full detail.
[139] (i) Onium salt of general formula (P1a-1), (P1a-2) or (P1b)
[140]
[141] ^Wherein R ^101a , R ^101b , and R ^101c are each independently a linear, branched or cyclic alkyl group having 1 to 12 carbon atoms, an alkenyl group, an oxo alkyl group or an oxo alkenyl group, an aryl group having 6 to 20 carbon atoms, or 7 carbon atoms. Or an aralkyl group or an aryloxooxoalkyl group of 12, and some or all of the hydrogen atoms of these groups may be substituted by an alkoxy group or other groups. In addition, R ^101b and R ^101c may be bonded to each other to form a ring. When a ring is formed, R ^101b and R ^101c each represent an alkylene group having 1 to 6 carbon atoms. K ⁻ represents a nonnucleophilic counter ion.
[142] R ^101a , R ^101b , R ^101c may be the same or different and are exemplified below. Typical alkyl groups are methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, pentyl, hexyl, heptyl, octyl, cyclopentyl, cyclohexyl and cyclo Heptyl group, cyclopropylmethyl group, 4-methylcyclohexyl group, cyclohexylmethyl group, norbornyl group, and adamantyl group. Typical alkenyl groups include vinyl groups, allyl groups, propenyl groups, butenyl groups, hexenyl groups, and cyclohexenyl groups. Typical oxoalkyl groups are 2-oxocyclopentyl groups, 2-oxocyclohexyl groups, 2-oxopropyl groups, 2-cyclopentyl-2-oxoethyl groups, 2-cyclohexyl-2-oxoethyl groups, and 2- (4- Methylcyclohexyl) -2-oxoethyl group. Typical aryl groups include phenyl and naphthyl groups; alkoxyphenyl groups such as p-methoxyphenyl group, m-methoxyphenyl group, o-methoxyphenyl group, ethoxyphenyl group, p-tert-butoxyphenyl group, and m-tert-butoxyphenyl group; Alkylphenyl groups such as 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, ethylphenyl group, 4-tert-butylphenyl group, 4-butylphenyl group, and dimethylphenyl group; Alkyl naphthyl groups such as methylnaphthyl group and ethylnaphthyl group; Alkoxynaphthyl groups such as methoxynaphthyl group and ethoxynaphthyl group, dialkylnaphthyl groups such as dimethylnaphthyl group and diethylnaphthyl group; And dialkoxy naphthyl such as dimethoxynaphthyl group and diethoxy naphthyl group. Typical aralkyl groups include benzyl groups, phenylethyl groups and phenethyl groups. Typical aryloxoalkyl groups are 2-aryl-2-oxoethyl groups such as 2-phenyl-2-oxoethyl group, 2- (1-naphthyl) -2-oxoethyl group and 2- (2-naphthyl) -2-oxoethyl group It includes. Examples of non-nucleophilic counter ions represented by K ⁻ are halide ions such as chloride and bromide ions, triflate, fluoroalkylsulfonate, tosylate, such as 1,1,1-trifluoroethanesulfonate and nonafluorobutanesulfonate Arylsulfonates such as benzenesulfonate, 4-fluorobenzenesulfonate and 1,2,3,4,5-pentafluorobenzenesulfonate, alkylsulfonates such as mesylate and butanesulfonate.
[143]
[144] In the above formula, R ^102a and R ^102b independently represent a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms. R ¹⁰³ represents a linear, branched or cyclic alkylene group having 1 to 10 carbon atoms. R ^104a and R ^104b independently represent a 2-oxoalkyl group having 3 to 7 carbon atoms. K ⁻ represents a nonnucleophilic counter ion.
[145] Examples of the group represented by R ^102a and R ^102b include methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, pentyl, hexyl, heptyl, octyl and cyclo Pentyl group, cyclohexyl group, cyclopropylmethyl group, 4-methylcyclohexyl group, and cyclohexylmethyl group. Examples of the group represented by R ¹⁰³ are methylene group, ethylene group, propylene group, butylene group, pentylene group, hexylene group, heptylene group, octylene group, nonylene group, 1,4-cyclohexylene group, 1,2-cyclo Hexylene group, 1,3-cyclopentylene group, 1,4-cyclooctylene group, and 1,4-cyclohexanedimethylene group. Examples of the group represented by R ^104a and R ^104b are 2-oxopropyl group, 2-oxocyclopentyl group, 2-oxocyclohexyl group, and 2-oxocycloheptyl group. Examples of counter ions represented by K ⁻ are the same as those exemplified for the general formulas (P1a-1) and (P1a-2).
[146] (ii) Diazomethane Derivatives of Formula (P2)
[147]
[148] In the above formula, R ¹⁰⁵ and R ¹⁰⁶ independently represent a linear, branched or cyclic alkyl group or a halogenated alkyl group having 1 to 12 carbon atoms, an aryl group or halogenated aryl group having 6 to 20 carbon atoms, or an aralkyl group having 7 to 12 carbon atoms. .
[149] Of the groups represented by R ¹⁰⁵ and R ¹⁰⁶ , typical alkyl groups are methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, pentyl, hexyl, heptyl, octyl , Amyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, norbornyl group, and adamantyl group. Typical halogenated alkyl groups include trifluoromethyl groups, 1,1,1-trifluoroethyl groups, 1,1,1-trichloroethyl groups, and nonafluorobutyl groups. Typical aryl groups are phenyl groups; alkoxyphenyl groups such as p-methoxyphenyl group, m-methoxyphenyl group, o-methoxyphenyl group, ethoxyphenyl group, p-tert-butoxyphenyl group, and m-tert-butoxyphenyl group; And alkylphenyl groups such as 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, ethylphenyl group, 4-tert-butylphenyl group, 4-butylphenyl group, and dimethylphenyl group. Typical halogenated aryl groups include fluorophenyl groups, chlorophenyl groups, and 1,2,3,4,5-pentafluorophenyl groups. Typical aralkyl groups include benzyl and phenethyl groups.
[150] (iii) glyoxime derivatives of general formula (P3)
[151]
[152] Wherein R ¹⁰⁷ , R ¹⁰⁸ , and R ¹⁰⁹ are each independently a linear, branched or cyclic alkyl group or a halogenated alkyl group having 1 to 12 carbon atoms, an aryl group or a halogenated aryl group having 6 to 20 carbon atoms, or a 7 to 12 carbon atom. Aralkyl group is represented. In addition, R ¹⁰⁸ and R ¹⁰⁹ may be bonded to each other to form a ring. When a ring is formed, R ¹⁰⁸ and R ¹⁰⁹ each represent a linear or branched alkylene group having 1 to 6 carbon atoms.
[153] Examples of the alkyl group, halogenated alkyl group, aryl group, halogenated aryl group, and aralkyl group represented by R ¹⁰⁷ , R ¹⁰⁸ , and R ¹⁰⁹ are the same as those exemplified for R ¹⁰⁵ and R ¹⁰⁶ . Examples of the alkylene group represented by R ¹⁰⁸ and R ¹⁰⁹ include methylene group, ethylene group, propylene group, butylene group and hexylene group.
[154] (iv) bissulfone derivatives of general formula (P4)
[155]
[156] ^Wherein R ^101a and R ^101b are as defined above.
[157] (v) sulfonic acid esters of N-hydroxyimide compounds of general formula (P5)
[158]
[159] In the above formula, R ¹¹⁰ is an allylene group having 6 to 10 carbon atoms, an alkylene group having 1 to 6 carbon atoms, or an alkenylene group having 2 to 6 carbon atoms, and some or all of the hydrogen atoms of these groups are linear with 1 to 4 carbon atoms. Or a branched alkyl group or alkoxy group, nitro group, acetyl group or phenyl group. R ¹¹¹ is a linear, branched or cyclic alkyl, alkenyl, alkoxyalkyl, phenyl or naphthyl group having 1 to 8 carbon atoms, wherein some or all of the hydrogen atoms are alkyl or alkoxy or phenyl groups having 1 to 4 carbon atoms (this is Or an alkyl group having 1 to 4 carbon atoms or an alkoxy group, a nitro group, or an acetyl group), a heteroaromatic group having 3 to 5 carbon atoms; Or a chlorine atom or a fluorine atom.
[160] Among the groups represented by R ¹¹⁰ , typical arylene groups include 1,2-phenylene groups, and 1,8-naphthylene groups; Typical alkylene groups include methylene groups, ethylene groups, trimethylene groups, tetramethylene groups, phenylethylene groups, and norbornane-2,3-diyl groups; Typical alkenylene groups include 1,2-vinylene groups, 1-phenyl-1,2-vinylene groups, and 5-norbornene-2,3-diyl groups. Among the groups represented by R ¹¹¹ , typical alkyl groups are the same as those exemplified for R ^101a to R ^101b ; Typical alkenyl groups are vinyl, 1-propenyl, allyl, 1-butenyl, 3-butenyl, isoprenyl, 1-pentenyl, 3-pentenyl, 4-pentenyl, dimethylallyl, 1- Hexenyl, 3-hexenyl, 5-hexenyl, 1-heptenyl, 3-heptenyl, 6-heptenyl, and 7-octenyl; Typical alkoxyalkyl groups are methoxymethyl group, ethoxymethyl group, propoxymethyl group, butoxymethyl group, pentyloxymethyl group, hexyloxymethyl group, heptyloxymethyl group, methoxyethyl group, ethoxyethyl group, propoxyethyl group, butoxyethyl group, pentyloxy Ethyl group, hexyloxyethyl group, methoxypropyl group, ethoxypropyl group, propoxypropyl group, butoxypropyl group, methoxybutyl group, ethoxybutyl group, propoxybutyl group, methoxypentyl group, ethoxypentyl group , Methoxyhexyl group, and methoxyheptyl group.
[161] Among the substituents for these groups, the alkyl group having 1 to 4 carbon atoms includes methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group and tert-butyl group; An alkoxy group having 1 to 4 carbon atoms includes a methoxy group, ethoxy group, propoxy group, isopropoxy group, n-butoxy group, isobutoxy group and tert-butoxy group; The phenyl group which may be substituted with an alkyl group or an alkoxy group, a nitro group, or an acetyl group having 1 to 4 carbon atoms includes a phenyl group, tolyl group, p-tert-butoxyphenyl group, p-acetylphenyl group, and p-nitrophenyl group; Hetero-aromatic groups having 3 to 5 carbon atoms include a pyridyl group and a furyl group.
[162] Specific examples of photoacid generators
[163] Diphenyl iodonium trifluoromethanesulfonate, (p-tert-butoxyphenyl) phenyl iodonium trifluoromethanesulfonate, diphenylyodonium p-toluenesulfonate, (p-tert-butoxyphenyl) phenyl Iodonium p-toluenesulfonate, triphenylsulfonium trifluoromethanesulfonate, (p-tert-butoxyphenyl) diphenylsulfonium trifluoromethanesulfonate, bis (p-tert-butoxyphenyl) phenyl Sulfonium trifluoromethanesulfonate, tris (p-tert-butoxyphenyl) sulfonium trifluoromethanesulfonate, triphenylsulfonium p-toluenesulfonate, (p-tert-butoxyphenyl) diphenylsul P-toluenesulfonate, bis (p-tert-butoxyphenyl) phenylsulfonium p-toluenesulfonate, tris (p-tert-butoxyphenyl) sulfonium p-toluenesulfonate, triphenylsulfonium nonafluor Robutanesulfonate, triphenylsulfonium butanesulfonate, trimethylsulfonium trifluoromethanesulfo Acetate, trimethylsulfonium p-toluenesulfonate, cyclohexylmethyl (2-oxocyclohexyl) sulfonium trifluoromethanesulfonate, cyclohexylmethyl (2-oxocyclohexyl) sulfonium p-toluenesulfonate, dimethylphenyl Sulfonium trifluoromethanesulfonate, dimethylphenylsulfonium p-toluenesulfonate, dicyclohexylphenylsulfonium trifluoromethanesulfonate, dicyclohexylphenylsulfonium p-toluenesulfonate, trinaphthylsulfonium trifluor Romethanesulfonate, cyclohexylmethyl (2-oxocyclohexyl) sulfonium trifluoromethanesulfonate, (2-norbornyl) methyl (2-oxocyclohexyl) sulfonium trifluoromethanesulfonate, ethylenebis Onium salts such as [methyl (2-oxocyclopentyl) sulfonium trifluoromethanesulfonate], and 1,2'-naphthylcarbonylmethyltetrahydrothiophenium triflate;
[164] Bis (benzenesulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane, bis (xylenesulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, bis (cyclopentylsulfonyl) Diazomethane, bis (n-butylsulfonyl) diazomethane, bis (isobutylsulfonyl) diazomethane,
[165] Bis (sec-butylsulfonyl) diazomethane, bis (n-propylsulfonyl) diazomethane, bis (isopropylsulfonyl) diazomethane, bis (tert-butylsulfonyl) diazomethane, bis (n Amylsulfonyl) diazomethane, bis (isoamylsulfonyl) diazomethane, bis (sec-amylsulfonyl) diazomethane,
[166] Bis (tert-amylsulfonyl) diazomethane, 1-cyclohexylsulfonyl-1- (tert-butylsulfonyl) diazomethane, 1-cyclohexylsulfonyl-1- (tert-amylsulfonyl) diazo Methane, and
[167] Diazomethane derivatives such as 1-tert-amylsulfonyl-1- (tert-butylsulfonyl) diazomethane;
[168] Bis-0- (p-toluenesulfonyl) -α-dimethylglyoxime, bis-0- (p-toluenesulfonyl) -α-diphenylglyoxime, bis-0- (p-toluenesulfonyl) -α -Dicyclohexylglyoxime, bis-0- (p-toluenesulfonyl) -2,3-pentanedioneglyoxime, bis-0- (p-toluenesulfonyl) -2-methyl-3,4-pentanedione Glyoxime, bis-0- (n-butanesulfonyl) -α-dimethylglyoxime, bis-0- (n-butanesulfonyl) -α-diphenylglyoxime, bis-0- (n-butanesulfonyl ) -α-dicyclohexylglyoxime, bis-0- (n-butanesulfonyl) -2,3-pentanedioneglyoxime, bis-0- (n-butanesulfonyl) -2-methyl-3,4 -Pentanedioneglyoxime, bis-0- (methanesulfonyl) -α-dimethylglyoxime, bis-0- (trifluoromethanesulfonyl) -α-dimethylglyoxime, bis-0- (1,1, 1-trifluoroethanesulfonyl) -α-dimethylglyoxime,
[169] Bis-0- (tert-butanesulfonyl) -α-dimethylglyoxime, bis-0- (perfluorooctanesulfonyl) -α-dimethylglyoxime, bis-0- (cyclohexanesulfonyl) -α- Dimethylglyoxime, bis-0- (benzenesulfonyl) -α-dimethylglyoxime, bis-0- (p-fluorobenzenesulfonyl) -α-dimethylglyoxime, bis-0- (p-tert-butyl Glyoxime derivatives such as benzenesulfonyl) -α-dimethylglyoxime, bis-0- (xylenesulfonyl) -α-dimethylglyoxime, and bis-0- (camphorsulfonyl) -α-dimethylglyoxime;
[170] Bisnaphthylsulfonylmethane, bistrifluoromethylsulfonylmethane, bismethylsulfonylmethane, bisethylsulfonylmethane, bispropylsulfonylmethane, bisisopropylsulfonylmethane, bis-p-toluenesulfonylmethane, and Bissulfon derivatives such as bisbenzenesulfonylmethane;
[171] Β-ketosulphone derivatives such as 2-cyclohexylcarbonyl 2- (p-toluenesulfonyl) propane, and 2-isopropylcarbonyl-2- (p-toluenesulfonyl) propane;
[172] p-toluenesulfonic acid 2,6-dinitrobenzyl, and
[173] nitrobenzyl sulfonic acid ester derivatives such as p-toluenesulfonic acid 2,4-dinitrobenzyl;
[174] 1,2,3-tris (methanesulfonyloxy) benzene, 1,2,3-tris (trifluoromethanesulfonyl oxy) benzene, and 1,2,3-tris (p-toluenesulfonyloxy) benzene Sulfonic acid ester derivatives such as;
[175] N-hydroxysuccinimide methanesulfonate, N-hydroxysuccinimide trifluoromethanesulfonate, N-hydroxysuccinimide ethanesulfonate, N-hydroxysuccinimide 1-propanesulfonate, N -Hydroxysuccinimide 2-propanesulfonate, N-hydroxysuccinimide 1-pentanesulfonate, N-hydroxysuccinimide 1-octanesulfonate, N-hydroxysuccinimide p-toluene sulfonate , N-hydroxysuccinimide p-methoxybenzenesulfonate, N-hydroxysuccinimide 2-chloroethanesulfonate, N-hydroxysuccinimide benzenesulfonate, N-hydroxysuccinimide 2, 4,6-trimethylbenzenesulfonate, N-hydroxysuccinimide 1-naphthalenesulfonate, N-hydroxysuccinimide 2-naphthalenesulfonate, N-hydroxy 2-phenylsuccinimide methanesulfonate, N -Hydroxymaleimide methanesulfonate, N-hydroxymaleimide ethanesulfonate, N-hydroxy 2-phenylmaleimide methane Phosphate, N-hydroxyglutarimide methanesulfonate, N-hydroxyglutarimide benzenesulfonate, N-hydroxyphthalimide methanesulfonate, N-hydroxyphthalimide benzenesulfonate, N-hydroxy Oxyphthalimide trifluoromethanesulfonate, N-hydroxyphthalimide p-toluenesulfonate, N-hydroxynaphthalimide methanesulfonate, N-hydroxynaphthalimide benzenesulfonate, N- Hydroxy 5-norbornene 2,3-dicarboxyimide methanesulfonate, N-hydroxy 5-norbornene-2,3-dicarboxyimide trifluoromethanesulfonate, and N-hydroxy-5- Sulfonic acid esters of N-hydroxyimide, such as norbornene 2,3-dicarboxyimide p-toluenesulfonate
[176] It includes.
[177] Preferred among these photoacid generators
[178] Trifluoromethanesulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, trifluoromethanesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, p-toluene Sulfonic acid triphenylsulfonium, p-toluenesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, p-toluenesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, trifluoromethanesulfonic acid trinaphthylsulfonium Trifluoromethanesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, trifluoromethanesulfonic acid (2-norbornyl) methyl (2-oxocyclohexyl) sulfonium, and
[179] Onium salts such as 1,2'-naphthylcarbonylmethyltetrahydrothiophenium triflate;
[180] Bis (benzenesulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, bis (n-butylsulfonyl) diazomethane, bis (isobutylsulfonate) Phonyl) diazomethane, bis (sec-butylsulfonyl) diazomethane, bis (n-propylsulfonyl) diazomethane, bis (isopropylsulfonyl) diazomethane, and
[181] Diazomethane derivatives such as bis (tert-butylsulfonyl) diazomethane;
[182] Glyoxime derivatives such as bis-O- (p-toluenesulfonyl) -α-dimethylglyoxime, and bis-O- (n-butanesulfonyl) -α-dimethylglyoxime;
[183] Bissulphone derivatives such as bisnaphthylsulfonylmethane;
[184] N-hydroxysuccinimide methanesulfonate, N-hydroxysuccinimide trifluoromethanesulfonate, N-hydroxysuccinimide 1-propanesulfonate, N-hydroxysuccinimide 2-propanesulfonate , N-hydroxysuccinimide 1-pentanesulfonate, N-hydroxysuccinimide p-toluenesulfonate, N-hydroxynaphthalimide methanesulfonate, and N-hydroxynaphthalimide benzenesulfonic acid Sulfonic acid ester derivatives of N-hydroxyimide compounds such as salts.
[185] These photoacid generators may be used alone or in combination of two or more thereof. Onium salts are effective for improving spherical formation, and diazomethane derivatives and glyoxime derivatives are effective for reducing standing waves. Therefore, fine adjustment of the profile can be performed by combining both.
[186] The photoacid generator is added in an amount of 0.1 to 50 parts, in particular 0.5 to 40 parts, per 100 parts by weight of the base resin (all parts are parts by weight). If less than 0.1 part, the amount of acid generated at the time of exposure may be small, and the sensitivity and the resolution may sometimes be reduced, while if it is more than 50 parts, the transmittance and resolution may be negatively affected.
[187] Ingredient (D)
[188] The basic compound used as component (D) is preferably a compound capable of suppressing the diffusion rate when the acid generated by the photoacid generator diffuses into the resist film. Mixing of this kind of basic compound lowers the rate of acid diffusion into the resist film, thereby improving the resolution. In addition, by suppressing the change in sensitivity after exposure, the substrate and the environment dependence are reduced, and the exposure margin and pattern profile are improved.
[189] Examples of suitable basic compounds include primary, secondary and tertiary aliphatic amines, hybrid amines, aromatic amines, heterocyclic amines, nitrogen-containing compounds with carboxyl groups, nitrogen-containing compounds with sulfonyl groups, nitrogen-containing compounds with hydroxyl groups, Nitrogen-containing compounds having hydroxyphenyl groups, alcoholic nitrogen-containing compounds, amide derivatives and imide derivatives.
[190] Examples of suitable primary aliphatic amines are methylamine, ethylamine, n-propylamine, isopropylamine, n-butylamine, iso-butylamine, sec-butylamine, tert-butylamine, pentylamine, tert-amylamine , Cyclopentylamine, hexylamine, cyclohexylamine, heptylamine, octylamine, nonylamine, decylamine, dodecylamine, cetylamine, methylenediamine, ethylenediamine, and tetraethylenepentamine. Examples of suitable secondary aliphatic amines include dimethylamine, diethylamine, di-n-propylamine, di-iso-propylamine, di-n-butylamine, di-iso-butylamine, di-sec-butylamine, Dipentylamine, dicyclopentylamine, dihexylamine, dicyclohexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, didodecylamine, dicetylamine, N, N-dimethylmethylenediamine, N, N-dimethylethylenediamine, and N, N-dimethyltetraethylenepentamine. Examples of suitable tertiary aliphatic amines include trimethylamine, triethylamine, tri-n-propylamine, tri-iso-propylamine, tri-n-butylamine, tri-iso-butylamine, tri-sec-butylamine, Tripentylamine, tricyclopentylamine, trihexylamine, tricyclohexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, tridodecylamine, tricetylamine, N, N, N ', N'-tetramethylmethylenediamine, N, N, N ', N'-tetramethylethylenediamine, and N, N, N', N'-tetramethyltetraethylenepentamine.
[191] Examples of suitable hybrid amines include dimethylethylamine, methylethylpropylamine, benzylamine, phenethylamine, and benzyldimethylamine. Examples of suitable aromatic amines are aniline derivatives (eg, aniline, N-methylaniline, N-ethylaniline, N-propylaniline, N, N-dimethylaniline, 2-methylaniline, 3-methylaniline, 4-methyl Aniline, ethylaniline, propylaniline, trimethylaniline, 2-nitroaniline, 3-nitroaniline, 4-nitroaniline, 2,4-dinitroaniline, 2,6-dinitroaniline, 3,5-dinitroaniline and N, N-dimethyltoluidine), diphenyl (p-tolyl) amine, methyldiphenylamine, triphenylamine, phenylenediamine, naphthylamine, and diaminonaphthalene. Examples of suitable heterocyclic amines include pyrrole derivatives (eg pyrrole, 2H-pyrrole, 1-methylpyrrole, 2,4-dimethylpyrrole, 2,5-dimethylpyrrole and N-methylpyrrole), oxazole derivatives (eg For example, oxazoles and isoxazoles), thiazole derivatives (eg thiazole and isothiazole), imidazole derivatives (eg imidazole, 4-methylimidazole and 4-methyl-2 -Phenylimidazole), pyrazole derivatives, furazane derivatives, pyrroline derivatives (e.g. pyrroline and 2-methyl-1-pyrroline), pyrrolidine derivatives (e.g. pyrrolidine, N -Methylpyrrolidine, pyrrolidinone and N-methylpyrrolidone), imidazoline derivatives, imidazolidine derivatives, pyridine derivatives (e.g. pyridine, methylpyridine, ethylpyridine, propylpyridine, butylpyridine, 4- (1-butylpentyl) pyridine, dimethylpyridine, trimethylpyridine, triethylpyridine, phenylpyridine, 3-methyl-2-phenylpyridine, 4-tert-butylpyridine, diphenylpyridine , Benzylpyridine, methoxypyridine, butoxypyridine, dimethoxypyridine, 1-methyl-2-pyridine, 4-pyrrolidinopyridine, 1-methyl-4-phenylpyridine, 2- (1-ethylpropyl) pyridine, Aminopyridine and dimethylaminopyridine), pyridazine derivatives, pyrimidine derivatives, pyrazine derivatives, pyrazoline derivatives, pyrazolidine derivatives, piperidine derivatives, piperazine derivatives, morpholine derivatives, indole derivatives, isoindole derivatives, 1H- Indazole derivatives, indolin derivatives, quinoline derivatives (e.g., quinoline and 3-quinoline carbonitrile), isoquinoline derivatives, cinnoline derivatives, quinazoline derivatives, quinoxaline derivatives, phthalazine derivatives, purine derivatives, puteri Dean derivatives, carbazole derivatives, phenanthridine derivatives, acridine derivatives, phenazine derivatives, 1,10-phenanthroline derivatives, adenine derivatives, adenosine derivatives, guanine derivatives, guanosine derivatives, uracil oils Conductors, and uridine derivatives.
[192] Examples of nitrogenous compounds having suitable carboxyl groups include aminobenzoic acid, indolecarboxylic acid, nicotinic acid, and amino acid derivatives (e.g., alanine, arginine, aspartic acid, glutamic acid, glycine, histidine, isoleucine, glycylosin, leucine, Methionine, phenylalanine, threonine, lysine, 3-aminopyrazine-2-carboxylic acid and methoxyalanine).
[193] Examples of nitrogen-containing compounds having suitable sulfonyl groups include 3-pyridine sulfonic acid and pyridinium p-toluenesulfonate.
[194] Examples of a nitrogen-containing compound having a suitable hydroxyl group, a nitrogen-containing compound having a hydroxyphenyl group, and an alcoholic nitrogen-containing compound include 2-hydroxypyridine, aminocresol, 2,4-quinolinediol, 3-indolmethanol hydrate, monoethanol Amine, diethanolamine, triethanolamine, N-ethyl diethanolamine, N, N-diethylethanolamine, triisopropanolamine, 2,2'-imino diethanol, 2-aminoethanol, 3-amino-1-propanol , 4-amino-1-butanol, 4- (2-hydroxyethyl) morpholine, 2- (2-hydroxyethyl) pyridine, 1- (2-hydroxyethyl) piperazine, 1- [2- ( 2-hydroxyethoxy) ethyl] piperazine, piperidine ethanol, 1- (2-hydroxyethyl) pyrrolidine, 1- (2-hydroxyethyl) -2-pyrrolidinone, 3-piperi Dino-1,2-propanediol, 3-pyrrolidino-1,2-propanediol, 8-hydroxyzulolidine, 3-quinuclidinol, 3-tropanol, 1-methyl-2-pyrrolidine Ethanol, 1-Aziridine Ethanol, N- (2-Hyde When ethyl) and phthalimide, and N- (including 2-hydroxyethyl) iso-nicotinamide.
[195] Examples of suitable amide derivatives include formamide, N-methylformamide, N, N-dimethylformamide, acetamide, N-methylacetamide, N, N-dimethylacetamide, propionamide, and benzamide. Suitable imide derivatives include phthalimide, succinimide, and maleimide.
[196] In addition, the basic compound of following General formula (B) -1 can be contained individually or in mixture.
[197]
[198] In the above formulas, n is 1, 2 or 3. The side chains X may be the same or different and are represented by general formula (X) -1, (X) -2 or (X) -3. The side chain Y may be the same or different and may represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms, and may contain an ether group or a hydroxyl group. Two or three X may combine with each other to form a ring.
[199] In the above formula, R ³⁰⁰ , R ³⁰² , and R ³⁰⁵ are independently a linear or branched alkylene group having 1 to 4 carbon atoms, and R ³⁰¹ and R ³⁰⁴ are independently a hydrogen atom, a linear, branched phase having 1 to 20 carbon atoms Or a cyclic alkyl group, which may contain at least one hydroxyl group, ether group, ester group, or lactone ring, R ³⁰³ is a single bond, a linear or branched alkylene group having 1 to 4 carbon atoms, and R ³⁰⁶ is 1 to C carbon atoms. It is a 20 linear, branched, or cyclic alkyl group, and can contain at least 1 hydroxyl group, an ether, ester group, or a lactone ring.
[200] Non-limiting examples of compounds of general formula (B) -1
[201] Tris (2-methoxymethoxyethyl) amine, tris {2- (2-methoxyethoxy) ethyl} amine,
[202] Tris {2- (2-methoxyethoxymethoxy) ethyl} amine,
[203] Tris {2- (1-methoxyethoxy) ethyl} amine, tris {2- (1-ethoxyethoxy) ethyl} amine,
[204] Tris {2- (1-ethoxypropoxy) ethyl} amine,
[205] Tris [2- {2- (2-hydroxyethoxy) ethoxy} ethyl] amine,
[206] 4,7,13,16,21,24-hexaoxa-1,10-diazobicyclo [8.8.8] hexacoic acid,
[207] 4,7,13,18-tetraoxa-1,10-diazabicyclo [8.5.5] eichoic acid,
[208] 1,4,10,13-tetraoxa-7,16-diazabicyclooctadecane,
[209] 1-Aza-12-Crown-4, 1-Aza-15-Crown-5, 1-Aza-18-Crown-6,
[210] Tris (2-formyloxyethyl) amine, tris (2-acetoxyethyl) amine,
[211] Tris (2-propionyloxyethyl) amine, tris (2-butyryloxyethyl) amine,
[212] Tris (2-isobutyryloxyethyl) amine, tris (2- valeryloxyethyl) amine,
[213] Tris (2-pivaloyloxyethyl) amine,
[214] N, N-bis (2-acetoxyethyl) -2- (acetoxyacetoxy) ethylamine,
[215] Tris (2-methoxycarbonyloxyethyl) amine,
[216] Tris (2-tert-butoxycarbonyloxyethyl) amine,
[217] Tris [2- (2-oxopropoxy) ethyl] amine,
[218] Tris [2- (methoxycarbonylmethyl) oxyethyl] amine,
[219] Tris [2- (tert-butoxycarbonylmethyloxy) ethyl] amine,
[220] Tris [2- (cyclohexyloxycarbonylmethyloxy) ethyl] amine,
[221] Tris (2-methoxycarbonylethyl) amine, tris (2-ethoxycarbonylethyl) amine,
[222] N, N-bis (2-hydroxyethyl) -2- (methoxycarbonyl) ethylamine,
[223] N, N-bis (2-acetoxyethyl) -2- (methoxycarbonyl) ethylamine,
[224] N, N-bis (2-hydroxyethyl) -2- (ethoxycarbonyl) ethylamine,
[225] N, N-bis (2-acetoxyethyl) -2- (ethoxycarbonyl) ethylamine,
[226] N, N-bis (2-hydroxyethyl) -2- (2-methoxyethoxycarbonyl) ethylamine,
[227] N, N-bis (2-acetoxyethyl) -2- (2-methoxyethoxycarbonyl) ethylamine,
[228] N, N-bis (2-hydroxyethyl) -2- (2-hydroxyethoxycarbonyl) ethylamine,
[229] N, N-bis (2-acetoxyethyl) -2- (2-acetoxyethoxycarbonyl) ethylamine,
[230] N, N-bis (2-hydroxyethyl) -2-[(methoxycarbonyl) methoxycarbonyl] ethylamine,
[231] N, N-bis (2-acetoxyethyl) -2-[(methoxycarbonyl) methoxycarbonyl] ethylamine,
[232] N, N-bis (2-hydroxyethyl) -2- (2-oxopropoxycarbonyl) ethylamine,
[233] N, N-bis (2-acetoxyethyl) -2- (2-oxopropoxycarbonyl) ethylamine,
[234] N, N-bis (2-hydroxyethyl) -2- (tetrahydrofurfuryloxycarbonyl) ethylamine,
[235] N, N-bis (2-acetoxyethyl) -2- (tetrahydrofurfuryloxycarbonyl) -ethylamine,
[236] N, N-bis (2-hydroxyethyl) -2-[(2-oxotetrahydrofuran-3-yl) oxycarbonyl] ethylamine,
[237] N, N-bis (2-acetoxyethyl) -2-[(2-oxotetrahydrofuran-3-yl) oxycarbonyl] ethylamine,
[238] N, N-bis (2-hydroxyethyl) -2- (4-hydroxybutoxycarbonyl) ethylamine,
[239] N, N-bis (2-formyloxyethyl) -2- (4-formyloxybutoxycarbonyl) ethylamine,
[240] N, N-bis (2-formyloxyethyl) -2- (2-formyloxyethoxycarbonyl) ethylamine,
[241] N, N-bis (2-methoxyethyl) -2- (methoxycarbonyl) ethylamine,
[242] N- (2-hydroxyethyl) -bis [2-methoxycarbonyl) ethyl] amine,
[243] N- (2-acetoxyethyl) -bis [2-methoxycarbonyl) ethyl] amine,
[244] N- (2-hydroxyethyl) -bis [2- (ethoxycarbonyl) ethyl] amine,
[245] N- (2-acetoxyethyl) -bis [2- (ethoxycarbonyl) ethyl] amine,
[246] N- (3-hydroxy-1-propyl) -bis [2- (methoxycarbonyl) ethyl] amine,
[247] N- (3-acetoxy-1-propyl) -bis [2- (methoxycarbonyl) ethyl] amine,
[248] N- (2-methoxyethyl) -bis [2- (methoxycarbonyl) ethyl] amine,
[249] N-butyl-bis [2- (methoxycarbonyl) ethyl] amine,
[250] N-butyl-bis [2- (2-methoxyethoxycarbonyl) ethyl] amine,
[251] N-methyl-bis (2-acetoxyethyl) amine, N-ethyl-bis (2-acetoxyethyl) amine,
[252] N-methyl-bis (2-pivaloyloxyethyl) amine,
[253] N-ethyl-bis [2- (methoxycarbonyloxy) ethyl] amine,
[254] N-ethyl-bis [2- (tert-butoxycarbonyloxy) ethyl] amine,
[255] Tris (methoxycarbonylmethyl) amine, tris (ethoxycarbonylmethyl) amine,
[256] N-butyl-bis (methoxycarbonylmethyl) amine,
[257] N-hexyl-bis (methoxycarbonylmethyl) amine, and
[258] β- (diethylamino) -δ-valerolactone.
[259] Also useful are one or more of the basic compounds having a cyclic-structure having the following general formula (B) -2.
[260]
[261] Wherein X is as defined above and R ³⁰⁷ is a straight or branched alkylene group having 2 to 20 carbon atoms, which may contain one or more carbonyl, ether, ester or sulfide groups.
[262] Non-limiting examples of cyclic-structured basic compounds having general formula (B) -2
[263] 1- [2-methoxymethoxy) ethyl] pyrrolidine, 1- [2- (methoxymethoxy) ethyl] piperidine,
[264] 4- [2- (methoxymethoxy) ethyl] morpholine,
[265] 1- [2-[(2-methoxyethoxy) methoxy] ethyl] pyrrolidine,
[266] 1- [2-[(2-methoxyethoxy) methoxy] ethyl] piperidine,
[267] 4- [2-[(2-methoxyethoxy) methoxy] ethyl] morpholine,
[268] 2- (1-pyrrolidinyl) ethyl acetate, 2-piperidinoethyl acetate,
[269] 2-morpholinoethyl acetate, 2- (1-pyrrolidinyl) ethyl formate,
[270] 2-piperidinoethyl propionate, 2-morpholinoethyl acetoxy acetate,
[271] 2- (1-pyrrolidinyl) ethyl methoxyacetate,
[272] 4- [2- (methoxycarbonyloxy) ethyl] morpholine,
[273] 1- [2- (t-butoxycarbonyloxy) ethyl] piperidine,
[274] 4- [2- (2-methoxyethoxycarbonyloxy) ethyl] morpholine,
[275] Methyl 3- (1-pyrrolidinyl) propiotate, methyl 3-piperidinopropionate,
[276] Methyl 3-morpholinopropionate, methyl 3- (thiomorpholino) propionate,
[277] Methyl 2-methyl-3- (1-pyrrolidinyl) propionate,
[278] Ethyl 3-morpholinopropionate,
[279] Methoxycarbonylmethyl 3-piperidinopropionate,
[280] 2-hydroxyethyl 3- (1-pyrrolidinyl) propionate,
[281] 2-acetoxyethyl 3-morpholinopropionate,
[282] 2-oxotetrahydrofuran-3-yl 3- (1-pyrrolidinyl) propionate,
[283] Tetrahydrofurfuryl 3-morpholinopropionate,
[284] Glycidyl 3-piperidinopropionate,
[285] 2-methoxyethyl 3-morpholinopropionate,
[286] 2- (2-methoxyethoxy) ethyl 3- (1-pyrrolidinyl) propionate,
[287] Butyl 3-morpholinopropionate,
[288] Cyclohexyl 3-piperidinopropionate,
[289] α- (1-pyrrolidinyl) methyl-γ-butyrolactone,
[290] β-piperidino-γ-butyrolactone, β-morpholino-δ-valerolactone,
[291] Methyl 1-pyrrolidinyl acetate, methyl piperidinoacetate,
[292] Methyl morpholinoacetate, methyl thiomorpholinoacetate,
[293] Ethyl 1-pyrrolidinyl acetate, and
[294] 2-methoxyethyl morpholinoacetate.
[295] In addition, one or more of the basic compounds having cyano having the following general formulas (B) -3 to (B) -6 may be blended.
[296]
[297] Wherein X, R ³⁰⁷ and n are as defined above and R ³⁰⁸ and R ³⁰⁹ are each independently a linear or branched alkylene group having 1 to 4 carbon atoms.
[298] Examples of basic compounds having cyano groups
[299] 3- (diethylamino) propiononitrile, N, N-bis (2-hydroxyethyl) -3-aminopropiononitrile, N, N-bis (2-acetoxyethyl) -3-aminopropiononitrile , N, N-bis (2-formyloxyethyl) -3-aminopropiononitrile, N, N-bis (2-methoxyethyl) -3-aminopropiononitrile, N, N-bis [2- (Methoxymethoxy) ethyl] -3-aminopropiononitrile, methyl N- (2-cyanoethyl) -N- (2-methoxyethyl) -3-aminopropionate, methyl N- (2- Cyanoethyl) -N- (2-hydroxyethyl) -3-aminopropionate, methyl N- (2-acetoxyethyl) -N- (2-cyanoethyl) -3-aminopropionate, N- (2-cyanoethyl) -N-ethyl-3-aminopropiononitrile, N- (2-cyanoethyl) -N- (2-hydroxyethyl) -3-aminopropiononitrile, N- (2-acetoxyethyl) -N- (2-cyanoytel) -3-aminopropiononitrile, N- (2-cyanoethyl) -N- (2-formyloxyethyl) -3-aminoprop Pyrononitrile, N- (2-hour Noethyl) -N- (2-methoxyethyl) -3-aminopropiononitrile, N- (2-cyanoethyl) -N- [2- (methoxymethoxy) ethyl] -3-aminopropiono Nitrile, N- (2-cyanoethyl) -N- (3-hydroxy-1-propyl) -3-aminopropiononitrile, N- (3-acetoxy-1-propyl) -N- (2- Cyanoethyl) -3-aminopropiononitrile, N- (2-cyanoethyl) -N- (3-formyloxy-1-propyl) -3-aminopropiononitrile, N- (2-cyano Ethyl) -N-tetrahydrofurfuryl-3-aminopropiononitrile, N, N-bis (2-cyanoethyl) -3-aminopropiononitrile, diethylaminoacetonitrile, N, N-bis (2 -Hydroxyethyl) aminoacetonitrile, N, N-bis (2-acetoxyethyl) aminoacetonitrile, N, N-bis (2-formyloxyethyl) aminoacetonitrile, N, N-bis (2- Methoxyethyl) aminoacetonitrile, N, N-bis [2- (methoxymethoxy) ethyl] aminoacetonitrile, methyl N-cyanomethyl-N- (2-methoxyethyl) -3-a With Smirnoff propionate,
[300] Methyl N-cyanomethyl-N- (2-hydroxyethyl) -3-aminopropionate, methyl N- (2-acetoxyethyl) -N-cyanomethyl-3-aminopropionate, N- Cyanomethyl-N- (2-hydroxyethyl) aminoacetonitrile, N- (2-acetoxyethyl) -N- (cyanomethyl) aminoacetonitrile, N-cyanomethyl-N- (2-form Miloxyethyl) aminoacetonitrile, N-cyanomethyl-N- (2-methoxyethyl) aminoacetonitrile, N-cyanomethyl-N- [2- (methoxymethoxy) ethyl) aminoacetonitrile, N-cyanomethyl-N- (3-hydroxy-1-propyl) aminoacetonitrile, N- (3-acetoxy-1-propyl) -N- (cyanomethyl) aminoacetonitrile, N-cyano Methyl-N- (3-formyloxy-1-propyl) aminoacetonitrile, N, N-bis (cyanomethyl) aminoacetonitrile, 1-pyrrolidinepropiononitrile, 1-piperidinepropiononitrile , 4-morpholine propiononitrile, 1-pyrrolidineacetonitrile, 1-piperidine acetonitrile Nitrile, 4-morpholine acetonitrile, cyanomethyl3-diethylaminopropionate, cyanomethyl N, N-bis (2-hydroxyethyl) -3-aminopropionate, cyanomethyl N, N -Bis (2-acetoxyethyl) -3-aminopropionate, cyanomethyl N, N-bis (2-formyloxyethyl) -3-aminopropionate, cyanomethyl N, N-bis ( 2-methoxyethyl) -3-aminopropionate, cyanomethyl N, N-bis [2- (methoxymethoxy) ethyl] -3-aminopropionate, 2-cyanoethyl 3-diethyl Aminopropionate, 2-cyanoethyl N, N-bis (2-hydroxyethyl) -3-aminopropionate, 2-cyanoethyl N, N-bis (2-acetoxyethyl) -3- Aminopropionate, 2-cyanoethyl N, N-bis (2-formyloxyethyl) -3-aminopropionate, 2-cyanoethyl N, N-bis (2-methoxyethyl) -3 -Aminopropionate, 2-cyanoethyl N, N-bis [2- (methoxymethoxy) ethyl] -3-amino Propionate, cyanomethyl 1-pyrrolidinepropionate, cyanomethyl 1-piperidine propionate, cyanomethyl 4-morpholine propionate, 2-cyanoethyl 1-pyrrolidineprop Cypionate, 2-cyanoethyl 1-piperidine propionate, and 2-cyanoethyl 4-morpholine propionate.
[301] These basic compounds may be used alone or in combination. The basic compound is preferably blended in an amount of 0.001 to 2 parts, in particular 0.01 to 1 part, per 100 parts by weight of the base resin. When the basic compound is less than 0.001 part, the desired effect cannot be achieved, and when used in excess of 2 parts, the sensitivity may be lowered.
[302] Ingredient (E)
[303] The dissolution inhibiting agent (E) preferably has a weight average molecular weight of 100 to 1,000, has at least two phenolic hydroxyl groups in the molecule, and an average of 10 to 100 mol% of all hydrogen atoms of the phenolic hydroxyl group is substituted with an acid labile group. Selected from compounds.
[304] Non-limiting examples of dissolution inhibitors (E) useful here
[305] Bis (4- (2'-tetrahydropyranyloxy) phenyl) methane, bis (4- (2'-tetrahydrofuranyloxy) phenyl) methane, bis (4-tert-butoxyphenyl) methane, bis ( 4-tert-butoxycarbonyloxyphenyl) methane, bis (4-tert-butoxycarbonylmethyloxyphenyl) methane, bis (4- (1'-ethoxyethoxy) phenyl) methane, bis (4- (1'-ethoxypropyloxy) phenyl) methane, 2,2-bis (4 '-(2 "-tetrahydropyranyloxy)) propane, 2,2-bis (4'-(2" -tetrahydro Furanyloxy) phenyl) propane, 2,2-bis (4'-tert-butoxyphenyl) propane, 2,2-bis (4'-tert-butoxycarbonyloxyphenyl) propane, 2,2-bis (4-tert-butoxycarbonylmethyloxyphenyl) propane, 2,2-bis (4 '-(1 "-ethoxyethoxy) phenyl) propane, 2,2-bis (4'-(1"- Ethoxypropyloxy) phenyl) propane,
[306] tert-butyl 4,4-bis (4 '-(2 "-tetrahydropyranyloxy) phenyl) valerate,
[307] tert-butyl 4,4-bis (4 '-(2 "-tetrahydrofuranyloxy) phenyl) valerate,
[308] tert-butyl 4,4-bis (4'-tert-butoxyphenyl) valerate,
[309] tert-butyl 4,4-bis (4-tert-butoxycarbonyloxyphenyl) valerate,
[310] tert-butyl 4,4-bis (4'-tert-butoxycarbonylmethyloxyphenyl) valerate,
[311] tert-butyl 4,4-bis (4 '-(1 "-ethoxyethoxy) phenyl) valerate,
[312] tert-butyl 4,4-bis (4 '-(1 "-ethoxypropyloxy) phenyl) valerate,
[313] Tris (4- (2'-tetrahydropyranyloxy) phenyl) methane, tris (4- (2'-tetrahydrofuranyloxy) phenylmethane, tris (4-tert-butoxy phenyl) methane, tris (4 -tert-butoxycarbonyloxymethylphenyl) methane, tris (4-tert-butoxycarbonyloxymethylphenyl) methane, tris (4- (1'-ethoxyethoxy) phenyl) methane, tris (4- (1 '-Ethoxypropyloxy) phenyl) methane, 1,1,2-tris (4'-(2 "-tetrahydropyranyloxy) phenyl) ethane, 1,1,2-tris (4 '-(2" -Tetrahydrofuranyloxy) phenyl) ethane, 1,1,2-tris (4'-tert-butoxyphenyl) ethane,
[314] 1,1,2-tris (4'-tert-butoxycarbonyloxyphenyl) ethane,
[315] 1,1,2-tris (4'-tert-butoxycarbonylmethyloxyphenyl) ethane,
[316] 1,1,2-tris (4 '-(1'-ethoxyethoxy) phenyl) ethane, and
[317] 1,1,2-tris (4 '-(1'-ethoxypropyloxy) phenyl) ethane.
[318] The compound used as the dissolution inhibitor has a weight average molecular weight of 100 to 1,000, preferably 150 to 800.
[319] Suitable amounts of dissolution inhibiting agent (E) are from 0 to about 50 parts, preferably from about 5 to 50 parts, more preferably from about 10 to 30 parts, per 100 parts by weight of the base resin. Less amount of dissolution inhibiting agent cannot improve the resolution, and too much amount thins the patterned film and lowers the resolution.
[320] The resist composition of the present invention may include optional components, typically surfactants commonly used to improve coating properties. Optional ingredients may be added in amounts so long as the object of the invention is not impaired.
[321] Non-limiting examples of surfactants include polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether, polyethylene stearyl aryl ether, polyoxyethylene cetyl ether and polyoxyethylene oleyl ether; Polyoxyethylene alkylaryl ethers such as polyoxyethylene octylphenol ether and polyoxyethylene nonylphenol ether; Polyoxyethylene polyoxypropylene co-polymers; Sorbitan fatty acid esters such as sorbitan monolaurate, sorbitan monopalmitate and sorbitan monostearate; Polyoxyethylene sorbitan such as polyoxyethylene sorbitan monolaurate, polyoxyethylene sorbitan monopalmitate, polyoxyethylene sorbitan monostearate, polyoxyethylene sorbitan trioleate and polyoxyethylene sorbitan tristearate Nonionic surfactants of fatty acid esters; EFTOP EP301, EF303, EF352 (manufactured by Tochem Products, Inc.), Megaface F171, F172, F173 (manufactured by Nippon Ink Chemical Co., Ltd.), Fluorad FC430, FC431 (manufactured by Sumitomo Srim Corporation), Asahiguard AG710, Surflon S-381, S-382 , Fluorine-based surfactants such as SC101, SC1O2, SC103, SC104, SC105, SC106, Surfynol E10O4, KH-10, KH-20, KH-30, KH-40 (manufactured by Asahi Glass), organosiloxane polymer KP-341, X -70-092, X-70-093 (manufactured by Shin-Etsu Chemical Co., Ltd.), acrylic acid or methacrylic acid-based Polyflow No. 75, No. 95 (manufactured by Kyoisei Oil & Chemical Co., Ltd.), among which FC430, Surflon S-381, Surfynol E1004, KH-20, KH-30 are very suitable. These surfactants can be used alone or in combination of two or more.
[322] Patterning using the resist composition of the present invention can be performed by known lithography techniques. For example, the resist composition is applied onto a substrate such as a silicon wafer by spin coating or the like to form a resist film having a thickness of 0.1 to 1.0 mu m, which is then used for 10 seconds to 10 minutes at 60 to 200 DEG C on a hot plate, preferably 80 Prebaking is carried out at -150 degreeC for 30 second-5 minutes. Next, a patterning mask having a desired pattern is placed on the resist film, and the film is placed at about 1 to 200 mJ / cm ² , preferably about 10 to 10 mJ, on high-energy or electron beams such as far ultraviolet rays, excimer laser beams, or x-rays. After exposure at an exposure dose of / cm ² , a post-exposure bake (PEB) is carried out on a hot plate at 60 to 150 ° C. for 10 seconds to 5 minutes, preferably at 80 to 130 ° C. for 30 to 3 minutes. Finally, the immersion method is used for 10 seconds to 3 minutes, preferably 30 seconds to 2 minutes, using a developing solution of an alkaline aqueous solution such as tetramethylammonium hydroxide (TMAH) at 0.1 to 5%, preferably 2 to 3%. The development can be performed by a conventional method such as a paddle method or a spray method. As a result of these steps, a desired pattern is formed on the substrate.
[323] Among the high-energy rays, the resist composition of the present invention is particularly a laser of 254-120 nm deep ultraviolet or excimer laser, in particular 193 nm ArF, 157 nm F ₂ , 146 nm Kr ₂ , 134 nm KrAr, 126 nm Ar _2, etc. It is most suitable for the formation of fine patterns by -lines and electron beams. In particular, it is preferable to expose with high energy rays (F ₂ laser, Ar ₂ laser, soft x-ray laser) in the range of 100 to 180 nm or 1 to 3 nm. In addition, when it deviates from the upper limit and the lower limit of the said range, a desired pattern may not be obtained.
[324] Example
[325] Embodiments of the present invention are provided by way of example and not by way of limitation. Abbreviations used here are AIBN for 2,2-azobisisobutyronitrile, GPC for gel permeation chromatography, NMR for nuclear magnetic resonance, Mw for weight average molecular weight, Mn for number average molecular weight, molecular weight Mw / Mn for distribution or dispersion, THF for tetrahydrofuran, and PGMEA for propylene glycol monoethyl ether acetate.
[326] Monomer Synthesis Example 1
[327] Synthesis of Monomer 1
[328] 40 g of dichloromethane, 10.0 g of alcohol 1 shown below, and 13.0 g of pyridine were added to the flask, and 13.36 g of chloroethanesulfonyl chloride was added dropwise to the flask from the dropping funnel while the flask was immersed in an ice bath and kept at an internal temperature of 10 ° C. It stirred for 2 hours as it is after completion | finish of dripping. After normal reaction post-treatment, the obtained oily substance was purified by silica gel chromatography to obtain 10.9 g of monomer 1. Yield 64%.
[329]
[330] Monomer Synthesis Example 2
[331] Synthesis of Monomer 2
[332] 40 g of dichloromethane, 10,0 g of alcohol 2 shown below, and 10.8 g of pyridine were added into the flask, and 11.11 g of chloroethanesulfonyl chloride was added dropwise to the flask from the dropping funnel while the flask was immersed in an ice bath and kept at an internal temperature of 10 ° C. It stirred for 2 hours as it is after completion | finish of dripping. After normal reaction post-treatment, the oily substance obtained was purified by silica gel chromatography to obtain 11.4 g of monomer 2. Yield 72%.
[333]
[334] Polymer Synthesis Example 1
[335] Copolymerization of Monomer 1, Monomer 3 and Monomer 4 (0.4: 0.2: 0.4)
[336] 5.47 g of monomer 1, 6.55 g of monomer 3 shown below, and 7.98 g of monomer 4 shown below were added into a 300 mL flask, dissolved in 5,0 g of 1,4-dioxane, and the oxygen in the system was sufficiently removed. 0.51g of AIBN was thrown in, and it heated to 65 degreeC and performed the polymerization reaction for 24 hours.
[337]
[338] The reaction mixture was poured into 1 L of hexane to work up the polymer obtained to precipitate the polymer. The polymer was dissolved in THF, poured into 1 L of hexane, and the polymer precipitation was repeated twice, after which the polymer was separated and dried. 12.5 g of a white polymer was obtained, and the polymer was found to have a Mw of 6,100 and a degree of dispersion (Mw / Mn) determined from the GPC elution curve, measured by the light scattering method, of 1.4. ¹ H-NMR analysis revealed that the polymer had a molar ratio of 0.37: 0.19: 0.44 for each unit derived from Monomer 1, Monomer 3 and Monomer 4.
[339] Polymer Synthesis Example 2
[340] Copolymerization of Monomer 1, Monomer 5 and Monomer 6 (0.3: 0.3: 0.4)
[341] 5.60 g of monomer 1, 5.30 g of monomer 5 shown below, and 9.47 g of monomer 6 shown below were added to a 300 mL flask, dissolved in 5,0 g of 1,4-dioxane, and the oxygen in the system was sufficiently removed. 0.70g of AIBN was added, and it heated to 65 degreeC and performed the polymerization reaction for 24 hours.
[342]
[343] The reaction mixture was poured into 1 L of hexane to work up the polymer obtained to precipitate the polymer. The polymer was dissolved in THF, poured into 1 L of hexane, and the polymer precipitation was repeated twice, after which the polymer was separated and dried. 11.7 g of a white polymer was obtained, and the polymer was found to have a Mw of 6,800 measured by the light scattering method and a dispersion degree (Mw / Mn) of 1.4 determined from the GPC elution curve. ¹ H-NMR analysis showed that the polymer had a molar ratio of 0.29: 0.31: 0.40 for each unit derived from monomer 1, monomer 5 and monomer 6.
[344] Polymer Synthesis Example 3
[345] Copolymerization of Monomer 1, Monomer 5 and Monomer 7 (0.3: 0.3: 0.4)
[346] In a 300 mL flask, 4.38 g of monomer 1, 3.94 g of monomer 5, and 11.7 g of monomer 7, shown below, were dissolved in 5,0 g of 1,4-dioxane, and the oxygen in the system was sufficiently removed. 0.55g was thrown in, and it heated to 65 degreeC and performed the polymerization reaction for 24 hours.
[347]
[348] The reaction mixture was poured into 1 L of hexane to work up the polymer obtained to precipitate the polymer. The polymer was dissolved in THF, poured into 1 L of hexane, and the polymer precipitation was repeated twice, after which the polymer was separated and dried. 12.9 g of a white polymer was obtained, and the polymer was found to have a dispersion degree (Mw / Mn) of 1.4 at M, determined from the light scattering method and 9,800, and a GPC elution curve. ¹ H-NMR analysis revealed that the polymer had a molar ratio of 0.30: 0.31: 0.39 for each unit derived from Monomer 1, Monomer 5 and Monomer 7.
[349] Polymer Synthesis Example 4
[350] Copolymerization of Monomer 2, Monomer 3 and Monomer 4 (0.4: 0.2: 0.4)
[351] 5.93 g of monomer 2, 6.34 g of monomer 3, and 7.73 g of monomer 4 were added into a 300 mL flask, dissolved in 5,0 g of 1,4-dioxane, and oxygen was completely removed from the system, followed by 0.50 g of initiator AIBN. It injected | thrown-in, it heated to 65 degreeC, and performed the polymerization reaction for 24 hours.
[352] The reaction mixture was poured into 1 L of hexane to work up the polymer obtained to precipitate the polymer. The polymer was dissolved in THF, poured into 1 L of hexane, and the polymer precipitation was repeated twice, after which the polymer was separated and dried. A white polymer of 13.9 g was obtained, and the polymer was found to have a Mw of 6,800 measured by the light scattering method and a dispersion degree (Mw / Mn) of 1.4 determined from the GPC elution curve. ¹ H-NMR analysis showed that the polymer had a molar ratio of 0.36: 0.19: 0.45 of each unit derived from monomer 2, monomer 3 and monomer 4.
[353] Polymer Synthesis Example 5
[354] Copolymerization of Monomer 2, Monomer 5 and Monomer 6 (0.3: 0.3: 0.4)
[355] 6.60 g of monomer 2, 4.87 g of monomer 5, and 9.07 g of monomer 6 were added into a 300 mL flask, dissolved in 5,0 g of 1,4-dioxane, and the oxygen in the system was sufficiently removed, followed by 0.68 g of initiator AIBN. It injected | thrown-in, it heated to 65 degreeC, and performed the polymerization reaction for 24 hours.
[356] The reaction mixture was poured into 1 L of hexane to work up the polymer obtained to precipitate the polymer. The polymer was dissolved in THF, poured into 1 L of hexane, and the polymer precipitation was repeated twice, after which the polymer was separated and dried. 14.2 g of a white polymer was obtained, and the polymer was found to have a dispersion degree (Mw / Mn) of 1.4, determined from the GPC elution curve, Mw of 6,900 measured by the light scattering method. ¹ H-NMR analysis revealed that the polymer had a molar ratio of 0.28: 0.32: 0.40 for each unit derived from monomers 2, 5 and 6.
[357] Polymer Synthesis Example 6
[358] Copolymerization of Monomer 2, Monomer 5 and Monomer 7 (0.3: 0.3: 0.4)
[359] 4.78 g of monomer 2, 3.84 g of monomer 5, and 11.38 g of monomer 7 were added into a 300 mL flask, dissolved in 5,0 g of 1,4-dioxane, and oxygen was completely removed from the system, followed by 0.54 g of initiator AIBN. It injected | thrown-in, it heated to 65 degreeC, and performed the polymerization reaction for 24 hours.
[360] The reaction mixture was poured into 1 L of hexane to work up the polymer obtained to precipitate the polymer. The polymer was dissolved in THF, poured into 1 L of hexane, and the polymer precipitation was repeated twice, after which the polymer was separated and dried. A white polymer of 13.6 g was obtained, and the polymer was found to have a dispersion degree (Mw / Mn) of 1.4, determined from the GPC elution curve, Mw of 9,600 measured by the light scattering method. ¹ H-NMR analysis revealed that the polymer had a molar ratio of 0.29: 0.30: 0.41 for each unit derived from monomers 2, 5 and 7.
[361] evaluation
[362] Polymer transmittance measurement
[363] Polymer Synthesis The polymers obtained in Examples 1 to 6 were designated as Polymers 1 to 6, respectively, and the transmittance was measured. Three different polymers were prepared for comparison. Comparative polymer 1 is a monodisperse polyhydroxystyrene having a molecular weight of 10,000 and a dispersity (= Mw / Mn) of 1.1, in which 30% of the hydroxyl groups are substituted with a tetrahydropyranyl group. Similarly, Comparative Polymer 2 is a polymethyl methacrylate having a molecular weight of 15,000, Dispersion (Mw / Mn) 1.7, and Comparative Polymer 3 has a Meta / Parrabi 40/60, a Molecular Weight of 9,000, Dispersion (Mw / Mn) 2.5 Novolac polymer.
[364] 1 g of each polymer was completely dissolved in 20 g of PGMEA, and filtered through a 0.2 μm filter to obtain a polymer solution. The polymer solution was spin-coated onto an MgF ₂ substrate and baked at 100 ° C. for 90 seconds on a hotplate to form a polymer film having a thickness of 100 nm on the substrate. The transmittance | permeability of a polymer film was measured at 248 nm, 193 nm, and 157 nm using the vacuum ultraviolet photometer (VUV-200S by the Japan spectroscopy company). The results are shown in Table 1.
[365]
[366] It is demonstrated from Table 1 that the resist material using the polymer of the present invention maintains sufficient transparency at the F ₂ laser wavelength (157 nm).
[367] Resist Manufacturing and Exposure
[368] The resist solution was prepared in a conventional manner by dissolving the polymer, photoacid generator (PAG1 or PAG2), basic compound, and dissolution inhibitor (DRI1) in the amounts shown in Table 2 in 1,000 parts of PGMEA.
[369]
[370] A resist solution was spin-coated on a silicon wafer on which DUV-30 (manufactured by Breer Science, Inc.) was formed at a thickness of 85 nm, and then baked at 120 ° C. for 90 seconds on a hot plate to obtain a resist film having a thickness of 100 nm.
[371] The resist film was exposed while varying the exposure amount by an F ₂ excimer laser exposure tool (VUVES-4500; manufactured by Liso Tech Japan). Immediately after exposure, the resist film was baked (PEB) at 120 ° C. for 90 seconds, and then developed for 60 seconds with an aqueous solution of 2.38% tetramethylammonium hydroxide. Film thicknesses were measured at different dose areas. From the remaining film thickness-to-capacity relationship, sensitivity (Eth) was determined as the exposure amount of which the film thickness became zero, and γ value, which is the slope (tanθ) of the characteristic curve, was determined.
[372] Separately, through a mask pattern formed on the Cr MgF ₂ substrate, by exposing the resist film in close contact with the surface with Cr pattern F ₂ laser was subjected to contact exposure. PEB and image development were performed similarly to the above after exposure, and the pattern was formed. The cross section of the pattern was observed by SEM, and the minimum visible pattern size was referred to as resolution.
[373]
[374] As a result of the VUVES exposure, the resist composition within the scope of the present invention showed high gamma value and high contrast, and showed a positive effect of decreasing the film thickness with the increase of the exposure amount. The resolution at the time of close exposure was high.
[375] Dry etching test
[376] A polymer solution was prepared by completely dissolving 1 to 6 polymers of 2 g each in 10 g of PGMEA and passing this solution through a 0.2 micron size filter. The polymer solution was spin-coated and baked on a silicon substrate to form a 300 nm thick polymer film. The wafer on which the polymer film was formed was dry etched under the following two sets of conditions. The first etching test was performed using a dry etching apparatus TE-8500P (manufactured by Tokyo Electronics Co., Ltd.) with CHF ₃ / CF ₄ gas. The second etching test was performed using a dry etching apparatus L-507D-L (manufactured by Anerva Co.) with Cl ₂ / BCl ₃ gas. The thickness difference of the polymer film before and after the etching test was measured. Etching conditions are shown in Table 3, and the results are shown in Table 4.
[377]
[378]
[379] It is demonstrated from Table 4 that the resist composition within the scope of the present invention is sufficiently resistant to dry etching.
[380] The resist composition of the present invention has been found to be sensitive to high energy rays and have alkali soluble contrast and excellent plasma etch resistance without compromising transparency at wavelengths below 200 nm. Therefore, the resist composition of the present invention can easily form a vertical pattern which is fine in F ₂ laser exposure and also has a high aspect ratio with respect to the substrate due to such characteristics, and therefore, fine pattern formation for ultra high density integrated circuit manufacturing It is characterized by being very suitable as a material.

权利要求:
Claims (15)
[1" claim-type="Currently amended] The sulfonic acid ester compound which has following General formula (1).

Wherein R ¹ to R ³ are each a hydrogen atom, a fluorine atom or a linear, branched or cyclic alkyl group or a fluorinated alkyl group having 1 to 20 carbon atoms, and at least one of R ¹ to R ³ contains a fluorine atom , R ¹ and R ² , R ¹ and R ³ , or R ² and R ³ may be bonded to each other to form a ring. When a ring is formed, R ¹ to R ³ each have 1 to 18 carbon atoms, preferably Is a linear or branched alkylene group or a fluorinated alkylene group of 1 to 10)
[2" claim-type="Currently amended] A polymer containing a repeating unit of the following general formula (2) and having a weight average molecular weight of 1,000 to 500,0OO.

Wherein R ¹ to R ³ are each a hydrogen atom, a fluorine atom or a linear, branched or cyclic alkyl group or a fluorinated alkyl group having 1 to 20 carbon atoms, and at least one of R ¹ to R ³ contains a fluorine atom , R ¹ and R ² , R ¹ and R ³ , or R ² and R ³ may be bonded to each other to form a ring. When a ring is formed, R ¹ to R ³ each have 1 to 18 carbon atoms, preferably Is 1 to 10 straight or branched alkylene groups or fluorinated alkylene groups)
[3" claim-type="Currently amended] The polymer according to claim 2, further comprising at least one repeating unit selected from the following general formulas (3a) to (3f).

Wherein R ⁴ , R ⁵ , R ⁷ , R ⁸ and R ¹⁵ are each a single bond or a straight, branched or cyclic alkylene group or fluorinated alkylene group having 1 to 20 carbon atoms, and R ⁶ , R ⁹ , R ¹² and R ¹⁸ are each a hydrogen atom or an acid labile group, and R ¹⁰ , R ¹¹ , R ¹³ , R ¹⁴ , R ¹⁶ and R ¹⁷ are each a hydrogen atom, a fluorine atom, linear, branched or cyclic having 1 to 20 carbon atoms. An alkyl group or a fluorinated alkyl group, at least one of R ¹⁶ and R ¹⁷ contains one or more fluorine atoms, R ¹⁹ is a linear, branched, or cyclic fluorinated alkyl group having 1 to 20 carbon atoms, and "a" and "b" is 1 or 2 respectively)
[4" claim-type="Currently amended] The polymer according to claim 2 or 3, further comprising a repeating unit of the following general formula (4).

Wherein R ²⁰ is a methylene group, an oxygen atom or a sulfur atom, and R ²¹ to R ²⁴ each represent a hydrogen atom, a fluorine atom, -R ²⁵ -OR ²⁶ , -R ²⁵ -CO ₂ R ^26, or 1 to 20 carbon atoms. Is a linear, branched or cyclic alkyl group or a fluorinated alkyl group, wherein at least one of R ²¹ to R ²⁴ contains -R ²⁵ -OR ²⁶ or -R ²⁵ -CO ₂ R ²⁶ , and R ²⁵ is a single bond or carbon number A linear, branched or cyclic alkylene group or a fluorinated alkylene group having 1 to 20, R ²⁶ is a straight chain having 1 to 20 carbon atoms which may contain a hydrophilic group such as a hydrogen atom, an acid labile group, an adhesive group, or a hydroxyl group, A branched or cyclic fluorinated alkyl group, c is 0 or 1)
[5" claim-type="Currently amended] The polymer according to claim 4, wherein the repeating unit of the general formula (4) has a structure of the following general formula (4a) or (4b).

Wherein R ²⁶ is as defined above, R ²⁷ to R ³⁰ are each a hydrogen atom, a fluorine atom or an alkyl group having 1 to 4 carbon atoms or a fluorinated alkyl group, and at least one of R ²⁷ and R ²⁸ is one Or more fluorine atoms, at least one of R ²⁹ and R ³⁰ contains one or more fluorine atoms)
[6" claim-type="Currently amended] The polymer according to any one of claims 2 to 5, further comprising a repeating unit of the following general formula (5).

Wherein R ³¹ is a hydrogen atom, a fluorine atom or a straight, branched or cyclic alkyl group having 1 to 20 carbon atoms or a fluorinated alkyl group, and R ³² is a single bond or a straight, branched or cyclic alkyl group having 1 to 20 carbon atoms A ethylene group or a fluorinated alkylene group, R ³³ is a hydrogen atom or an acid labile group, R ³⁴ is a fluorine atom or a linear, branched or cyclic fluorinated alkyl group having 1 to 20 carbon atoms, d is 1 or 2, e Is an integer of 0 to 4, and satisfies 1≤d + e≤5)
[7" claim-type="Currently amended] 7. The polymer according to claim 6, wherein the repeating unit of the general formula (5) has the following general formula (5a) or (5b).

Wherein R ³³ is as defined above, R ³⁵ to R ⁴⁰ are each a hydrogen atom, a fluorine atom or an alkyl group having 1 to 4 carbon atoms or a fluorinated alkyl group, and at least one of R ³⁵ and R ³⁶ is one Containing at least one fluorine atom, at least one of R ³⁷ and R ³⁸ contains one or more fluorine atoms, and at least one of R ³⁹ and R ⁴⁰ contains one or more fluorine atoms)
[8" claim-type="Currently amended] The polymer as described in any one of Claims 2-7 which further contains a repeating unit of following General formula (6).

Wherein R ⁴¹ to R ⁴³ each represent a hydrogen atom, a fluorine atom or a linear, branched or cyclic alkyl group or a fluorinated alkyl group having 1 to 20 carbon atoms, and R ⁴⁴ is a hydrogen atom, an acid labile group, an adhesive group, or a hydroxyl group C1-C20 linear, branched or cyclic fluorinated alkyl groups which may contain a hydrophilic group such as
[9" claim-type="Currently amended] 9. A polymer according to claim 8, wherein in formula (6), R ⁴³ is a trifluoromethyl group.
[10" claim-type="Currently amended] 10. A resist composition comprising the polymer of claim 2.
[11" claim-type="Currently amended] (A) the polymer of any one of claims 2 to 9,
(B) an organic solvent, and
(C) photoacid generator
Chemically amplified positive resist composition comprising a.
[12" claim-type="Currently amended] The resist composition according to claim 11, further comprising (D) a basic compound.
[13" claim-type="Currently amended] The resist composition according to claim 11 or 12, further comprising (E) a dissolution inhibiting agent.
[14" claim-type="Currently amended] Applying a resist composition of any one of claims 10 to 13 onto a substrate to form a coating,
Heat-treating the coating and then exposing it to high energy rays in a wavelength range of 100 to 180 nm or 1 to 30 nm through a photo mask, and
Heat-treating the exposed coating, if necessary, and then developing it using a developer;
Resist pattern forming method comprising a.
[15" claim-type="Currently amended] 15. The method of claim 14, wherein the high energy ray is an F ₂ laser beam, an Ar ₂ laser beam or a soft x-ray.

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同族专利:

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公开号 | 公开日

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TWI266954B|2006-11-21|

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US20040157156A1|2004-08-12|

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KR100805162B1|2008-02-21|

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JP2004244436A|2004-09-02|

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JP4240202B2|2009-03-18|

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US7125642B2|2006-10-24|

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TW200421033A|2004-10-16|

引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
2003-02-10|Priority to JPJP-P-2003-00032584

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2003-02-10|Priority to JP2003032584A

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2004-02-10|Application filed by 신에쓰 가가꾸 고교 가부시끼가이샤, 마쯔시다덴기산교 가부시키가이샤, 센트럴가라스 가부시기가이샤

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2004-08-18|Publication of KR20040072479A

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2008-02-21|Application granted

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2008-02-21|Publication of KR100805162B1

优先权:

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申请号 | 申请日 | 专利标题

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JPJP-P-2003-00032584|2003-02-10|

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JP2003032584A|JP4240202B2|2003-02-10|2003-02-10|Polymer compound having sulfonate group, resist material, and pattern forming method|