专利摘要:
A device for positioning substrate wafers with a flat zone on their periphery comprises a support in which a tilting member is tiltably mounted by means of a pinion. The tilting member is provided with two rollers rotatably seated thereon for guiding a belt in the longitudinal direction of said tilting member. At least one of said rollers is driven by a respective drive means. A support track is arranged on the longitudinal side of the tilting member for receiving said substrate wafers.
公开号:SU881897A1
申请号:SU752305153
申请日:1975-12-30
公开日:1981-11-15
发明作者:Якш Эрхард
申请人:За витель;
IPC主号:
专利说明:

one
The invention relates to electronics, in particular, to devices for orienting circular integrated circuit substrates relative to a receiving device.
A device for orienting subcooled substrates, preferably with a flush around the perimeter, is known, which contains an orientation unit, mounted to the frame and consisting of a conveyor, guide, drive mechanism and rollers 1.
However, the known device does not provide a reliable orientation of the substrates due to the technical complexity and significant stresses arising in the substrates.
The purpose of the invention is to increase the reliability of the orientation of the substrates.
The goal is achieved by the fact that the device for orienting round substrates, mainly with a flush around the perimeter, containing a frame with an orientation unit installed on it, filled with vice placed at a fixed angle of the conveyor and guide, and a translation mechanism, is equipped with an additional drive mechanism and axis, fixed 30
longitudinally to the conveyor in the frame, and the orientation unit is installed with the possibility of turning around the axis at a predetermined angle within O - 90 and fixing it in this position.
FIG. 1 shows the device, a general view; in fig. 2 - the same, side view.
The device comprises a frame 1 with an axis 2 located therein, around which the orientation unit 3 rotates, comprising a guide 4, a drive mechanism 5, a conveyor with rollers b and 7 and a conveyor belt made in the form of a support 8 for substrates 9. The roller 6 rotates from the drive mechanism 5 through the belt transmission 10, as a result of which the support 8 moves longitudinally in the direction of the arrow C. The orientation unit 3 rotates around the axis 2 with the aid of the additional mechanism 11 by an angle O - 90 °. At the ends defining the guide 4, in the longitudinal direction there are openings 12 and 13.
The device works as follows.
Substrates 9, which are to be oriented, and having a lip 14 on the edge, are placed in any position on the support 8 at the left end of the guide, so that the edge is placed on the support, and the bald spot is on the guide 4. Support 8 by means of the drive mechanism 5 via a belt drive 10 and the roller 6 moves linearly in the direction shown by the arrow with, relative to the guide 4. The friction forces occurring at the point of contact between the support 8 and the edge of the substrate 9 move the latter in the direction of movement of the support 8. And on the surface of the substrate 9 to the directionrelative movement, relative to the forces of friction between the support 8 and the edge (. of the substrate 9, because of which the movement of the latter slows down.) Thus, in addition to the straight forward movement of the substrates 9, its relative rotational movement, which continues until the lip 14 of the substrate 9 does not fall onto the support 8. From this moment, the friction 9 formed between the substrate 9 and the 4 m guide is no longer sufficient to cause the VO to rotate the substrate 9, so Next, but without additional rotation, it moves along support 8 to the right end of guide 4 until it comes into contact with lugs 1. At this time, substrates 9 are in an oriented position and, with the rotation of node 3, orientations can move from one position to another. using capture 16 they move through the opening 13. The angle of the wind ////////////////////
权利要求:
Claims (1)
[1]
/ 3 Fie. The 1 rota of the orientation unit 3, in which the described friction conditions in a given direction operate, depends on the friction between the substrate 9 and the guide 4, as well as between the substrate 9 and the support 8, and therefore this angle must be adjusted using an additional drive mechanism 11 The stop 15 mounted on the right end of the guide 4 comprises elements 17 holding the substrates 9 in an oriented position. Apparatus of the invention for orienting round substrates, preferably with a flush around the perimeter, comprising a frame with an orientation unit installed on it, made in the form of a conveyor and a guide installed at a fixed angle, and a drive mechanism, characterized in that, in order to increase the reliability of the orientation of the substrates , it is equipped with an additional drive mechanism and an axis fixed longitudinally to the conveyor in the frame, with the orientation assembly installed with. the possibility of turning around the axis at a given angle in the range of O - 90 ° and fixing it in this position. Sources of information taken into account during the examination 1. USSR Author's Certificate No. 23202, cl. B 65 B 35/56, 03/24/30.
At //// 7 M / ZhU
Fig.i
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同族专利:
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引用文献:
公开号 | 申请日 | 公开日 | 申请人 | 专利标题

US3297134A|1966-02-10|1967-01-10|Ronald F Pastuszak|Orienting device for discs and the like articles|
JPS5756025B2|1972-05-02|1982-11-27|
US3890508A|1973-12-28|1975-06-17|Texas Instruments Inc|Workpiece alignment system|FR2367610B1|1976-10-15|1983-01-28|Dubuit Jean Louis|
US4662811A|1983-07-25|1987-05-05|Hayden Thomas J|Method and apparatus for orienting semiconductor wafers|
US4609094A|1984-11-01|1986-09-02|Rca Corporation|Apparatus for sorting cylindrical work pieces having a longitudinal flat according to their rotational orientation|
DE3530955A1|1985-08-29|1987-03-05|Heimann Gmbh|LUGGAGE TEST SYSTEM|
US4711980A|1986-02-18|1987-12-08|Sigma Tool & Machine Limited|Nail collator and welder|
DE3702775A1|1987-01-30|1988-08-11|Leybold Ag|DEVICE FOR QUASI-CONTINUOUS TREATMENT OF SUBSTRATES|
US5551829A|1995-10-11|1996-09-03|H-Square Corporation|Notch finder having a flexible alignment rod|
US5857672A|1995-10-20|1999-01-12|Stone Container Corporation|Apparatus for rotating substantially flat articles|
US5662452A|1996-08-26|1997-09-02|H-Square Corporation|Apparatus and method of aligning notches using a free-floating rod|
JP3437812B2|2000-02-07|2003-08-18|タツモ株式会社|Substrate transfer device|
CN111924474B|2020-08-31|2021-01-15|苏州鼎纳自动化技术有限公司|Quick rotating mechanism for products in motion|
法律状态:
优先权:
申请号 | 申请日 | 专利标题
DD184533A|DD121309A1|1975-03-04|1975-03-04|
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