• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:

    公开号:NL1037228A
    申请号:NL1037228
    申请日:2009-08-26
    公开日:2010-08-11
    发明作者:Juan Manuel Campaneria Iv；Todd Steven Nitsche；Steven Scott Wolthuis
    申请人:Xycarb Ceramics B V；
    IPC主号:
    专利说明:

    Brief indication: Support assembly for a substrate holder, as well as a device for layer-depositing different semiconductor materials on a semiconductor substrate, provided with such a support assembly.
    DESCRIPTION
    The invention relates to a support assembly for a substrate holder on which a semiconductor substrate can be placed for the purpose of depositing different semiconductor materials on the semiconductor substrate in layers, the support assembly comprising: at least one vertically arranged and rotatably driven support shaft, and substrate holder support which can be placed on the support axis and which supports the substrate holder, as well as fixation means adapted for mutually fixing the support axis and the substrate holder support.
    The invention also has a device for the layered deposition of various hemicidal conductors on a semiconductor substrate, comprising at least one processing space including at least one substrate holder on which the semiconductor substrate can be placed, means for feeding the various semiconductor materials into the processing space wherein the substrate holder is operable during operation by at least one support assembly according to the invention.
    In semiconductor position processes, a semiconductor substrate is placed on a substrate holder, after which all kinds of semiconductor materials are deposited on a semiconductor substrate in layers. To properly control this deposition process, the semiconductor substrate and the supporting substrate holder must be rotated. To this end, the substrate holder is placed on a support assembly whose support shaft is rotatably driven.
    Since the substrate holder support is often specifically constructed for a specific type of substrate holder, it must simply be removed from the support shaft, for example in order to be able to adjust the device.
    A drawback of this construction is that during the rotatable driving of the support shaft and in particular when the rotation movement between the support shaft and the substrate holder support is interrupted, slip occurs, which results in wear on both parts. The wear again results in the release of all kinds of contaminants which adversely affect or disrupt the deposition process.
    A support assembly according to the aforementioned preamble is disclosed in U.S. Patent Publication No. US 2007/0056150 A1. In this publication, a support assembly is disclosed, wherein the rotatably driven support shaft is provided with a keyway, in which a blocking spike can be received, in order to form-fit the substrate holder support placed on the support shaft.
    A disadvantage of the support assembly described in this US patent publication is the complex assembly, wherein an additional component, being the key, must be used to fix the support shaft and the substrate holder support relative to each other.
    The present invention has for its object to provide a simplified construction with a reduced number of parts, with which on the one hand a more reliable, mutual fixation of the two parts is realized and also wear and the corresponding release of contaminants is prevented.
    According to the invention, the support assembly is characterized in that the fixation means comprise at least one cam-slot assembly arranged on the support shaft and substrate holder support. The use of a cam-slot assembly makes an additional separate component superfluous. In addition, this cam-slot assembly provides a more simple assembly and an improved mutual fixation during rotation of the support assembly during operation.
    In a specific embodiment it is characterized for this purpose in that the substrate holder support comprises a hollow foot, which can be placed over the free end of the support shaft, while in another functional embodiment the support shaft comprises a hollow free end, in which a foot of the substrate holder support can be placed.
    More specifically, the invention is characterized for this purpose in that the cam-slot assembly comprises at least one protruding cam arranged on the support shaft or the substrate holder support and a corresponding slot arranged in the substrate holder support or in the support shaft.
    For this purpose, adequate mutual fixation between the support axis and the substrate holder support is not only achieved. As a result, additional loose parts are also omitted, which simplifies assembly and disassembly, since a reduced number of adjusting operations must be performed.
    In specific exemplary embodiments, the cam slot assembly may comprise at least one protruding cam disposed on the support shaft and a slot disposed in the substrate holder support, while in another embodiment the cam slot assembly may include at least one protruding cam mounted in the support shaft support and a protruding cam mounted on the substrate holder support. include.
    In another functional embodiment, the support assembly is characterized for this purpose in that the slot does not support the protruding cam. This embodiment has the advantage that during placement of the substrate holder support on the support axis the projecting cam only partially extends into the slot (seen in the longitudinal direction of the slot) and therefore not on the end edge of the slot and therefore not on the substrate holder support supports. In this way contact between the two parts is avoided as much as possible, which prevents wear and also the release of contaminated particles.
    The invention will be explained in more detail with reference to a drawing, which drawing successively shows in:
    Figure 1 shows a first embodiment of a support assembly according to the invention;
    Figure 2 shows another embodiment of a support assembly according to the invention.
    For a better understanding of the invention, the corresponding parts in the figures are indicated in the figures with identical reference numerals.
    Reference numeral 1 shows an embodiment of a support assembly according to the invention. A support assembly, as shown in Figure 1, is used in a device for layer-depositing the various semiconductor materials on a semiconductor substrate. For this purpose, a semiconductor substrate is usually placed on a substrate holder, which is then supported by a support assembly known per se.
    The support assembly 1 shown in Figure 1 is composed of only two parts, being a vertically oriented support shaft 10 and a substrate holder support 20 which can be placed on the support shaft 10. The substrate holder support 20 is made up of central part 21, and several, here three, are situated in a substantially supporting arms 22a-22b-22c extending horizontally. Each support arm 22a-22c is provided near the free end with a support point 23a-23c on which the substrate holder to be supported can be placed.
    In such a device, all kinds of semiconductor materials are deposited in extremely thin layers on a semiconductor substrate in semiconductor position processes.
    In order to accurately control and if necessary adjust the deposition processes, a support assembly according to the state of the art is rotatably driven. To this end, the support shaft 10 is usually connected in a known but not shown manner to suitable drive means which force a direction of rowing on the support shaft 10.
    The substrate holder (not shown) herein rests on the support points 23a-23c. The support assembly, the substrate holder and the semiconductor substrate are thereby rotated by the elongated, vertically oriented support axis, which is rotated in a known manner.
    Due to the rotating movement of the support assembly 1, the substrate holder (not shown) and the semiconductor substrate placed on the substrate holder, the deposition of the different semiconductor materials can be better dosed and controlled.
    A drawback with the currently known support assemblies is that, after the rotation movement has elapsed, slip can occur between the two parts, being the support shaft and the substrate holder support 20. Mutual slip between the two parts leads in the first place to wear. Moreover, contaminants can thus be released from the support shaft 10 or the substrate holder support 20, which, in turn, adversely affect the deposition process.
    In order to avoid slippage which may occur during the rotation of the support shaft and the substrate holder support, the support assembly is provided with specific fixing means, which comprise at least one cam-slot assembly 30-31 arranged on the support shaft 10 / the substrate holder support 20.
    In the embodiment shown in Figure 1, the support shaft 10 is provided with a protruding cam 30, which can be received in the slot 31 which is arranged in the peripheral edge 21a of the hollow-shaped substrate holder support end 21. This substrate holder end 21 is hollow and falls over the support shaft 10 when the substrate holder support 20 is placed on the support shaft. By adequately aligning the substrate holder support 20 with respect to the support shaft 10, the slot 31 arranged in the peripheral edge 21a falls over the cam 30. Thus, a rotation fixation between the two parts is achieved.
    The latter guarantees that no slip occurs between the support shaft 10 and the substrate holder support 20 during the rotational movement of the support shaft 10 and in particular during the start-up and ending of this rotational movement. Thus, it is prevented that as a result of this slip wear or other types of damage occur to the material of both parts. This optimum rotation fixation which is realized with the cam-slot assembly 30-31 prevents an unexpected release of all kinds of contaminants, so that the semiconductor position process is not disturbed by this.
    Although only one cam-slot assembly 30-31 is disclosed in Figure 1, it will be readily apparent that a plurality of cam-slot assemblies, for example two or three, may also be provided. For this purpose, the support shaft 10 can be provided with a plurality of cams 30 which are arranged around the circumference of the support shaft and which co-act with corresponding slots arranged in the free peripheral edge 21a of the substrate support holder shaft 21.
    In another embodiment, the cam 30 of the cam slot assembly is disposed on the inside of the hollow-substrate substrate holder support shaft 21. This inwardly directed cam can be received in a corresponding slot extending longitudinally from the free end 10a of the support shaft 10. Here too, a plurality of cam-slot assemblies can be provided for optimum rotation fixation of substrate holder support 20 relative to the rotating support shaft 10.
    In order to prevent damage to the two parts and to prevent the undesired release of particles which might otherwise disturb the deposition process, the slot 31 does not bear on the cam 30, since the projecting cam 30 does not rest on the end edge of the slot 31, continuous contact between the two components is prevented and disruption of the deposition process (due to particles released) is avoided.
    Figure 2 shows another embodiment of a support assembly according to the invention. In this embodiment, the support shaft 10 is provided with a longitudinal slot 31 ', in which a protruding cam 30' can be accommodated, which is arranged on the peripheral edge 21a of the substrate holder support end 21 of the substrate holder support 20. "
    In this embodiment too, the substrate holder support is hollow, so that it falls over the support shaft 10 when the substrate holder support 20 is placed on the support shaft. By analogously aligning the substrate holder support 20 with respect to the support shaft 10 analogously to the embodiment in Figure 1, the projection 30 'projecting from the peripheral edge 21a falls into the slot 31' which is arranged in the support shaft 10.
    Here too, a rotation fixation between the two parts 10-20 is effected, so that during the rotational movement of the support shaft 10, and in particular during the start-up and the end of this rotational movement, no slip is created between the support shaft 10 and the substrate holder support 20. Thus, wear prevent damage to the material of the two components and prevent the unexpected release of all kinds of contaminants, so that the semiconductor position process is not disturbed by this. .
    It is further noted that in both embodiments a plurality of cam-slot assemblies 30-31 (and 30'-31 ') can be used to promote a better rotation fixation. The slots can herein be made wider, in which an equally wide cam can be accommodated.
    权利要求:
    Claims (8)
    [1]
    A support assembly for a substrate holder on which a semiconductor substrate can be placed for the purpose of depositing different semiconductor materials on the semiconductor substrate in layers, the support assembly comprising: at least one vertically arranged and rotatably drivable support shaft, and a support shaft which can be placed on the free end of the support shaft and the substrate holder bearing the substrate holder support, as well as fixation means arranged for mutually fixing the support shaft and the substrate holder support, characterized in that the fixation means comprise at least one cam-slot assembly arranged on the support shaft and substrate holder support.
    [2]
    2. Support assembly as claimed in claim 1, characterized in that the substrate holder support comprises a hollow foot which can be placed over the free end of the support shaft.
    [3]
    3. Support assembly as claimed in claim 1, characterized in that the support shaft comprises a hollow free end, in which a foot of the substrate holder support can be placed.
    [4]
    Support assembly according to one or more of claims 1 to 3, characterized in that the cam slot assembly comprises at least one protruding cam arranged on the support shaft or the substrate holder support and a corresponding slot arranged in the substrate holder support or in the support shaft.
    [5]
    5. Supporting assembly as claimed in claim 4, characterized in that the cam-slot assembly comprises at least one protruding cam arranged on the support shaft and a slot arranged in the substrate holder support.
    [6]
    A support assembly according to claim 4, characterized in that the cam-slot assembly comprises at least one slot arranged in the support shaft and a protruding cam arranged on the substrate holder support.
    [7]
    Support assembly according to one or more of the preceding claims, characterized in that the slot does not rest on the protruding cam.
    [8]
    Device for depositing different semiconductor materials layerwise on a semiconductor substrate, comprising at least one processing space including at least one substrate holder on which the semiconductor substrate can be placed, means for supplying the various semiconductor materials in gas form into the processing space, substrate holder is supportable by at least one support assembly according to one or more of the preceding claims. i
    类似技术:
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    同族专利:
    公开号 | 公开日
    EP2216810A3|2012-03-28|
    TW201112350A|2011-04-01|
    EP2216810A2|2010-08-11|
    NL1037228C2|2011-05-25|
    US20100212595A1|2010-08-26|
    SG164332A1|2010-09-29|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US7070661B2|2003-08-22|2006-07-04|Axcelis Technologies, Inc.|Uniform gas cushion wafer support|
    US7169234B2|2004-01-30|2007-01-30|Asm America, Inc.|Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder|
    CN101007298B|2006-01-24|2011-06-29|深圳富泰宏精密工业有限公司|Support fixing device|
    KR100754244B1|2006-05-22|2007-09-03|삼성전자주식회사|Apparatus for sensing spin chuck of for spin coating unit|US8943661B2|2010-11-23|2015-02-03|Rockler Companies, Inc.|Non-slip spacer support system|
    US9816184B2|2012-03-20|2017-11-14|Veeco Instruments Inc.|Keyed wafer carrier|
    US10811299B2|2018-05-04|2020-10-20|Lam Research Corporation|Wafer chuck assembly|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    US15145609P| true| 2009-02-10|2009-02-10|
    US15145609|2009-02-10|
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