专利摘要:
PURPOSE: A vertical type test handler and a method for testing by using the same are provided to improves the productivity by reducing the supply time and the waiting time of the device. CONSTITUTION: A vertical type test handler includes a driving member(120) rotated by a hydraulic or an air pressure, a first and a second loading tracks(50,60) supplied thereto the device, a test site(70) alternatively testing each of the devices loaded from the first and the second loading tracks(50,60), a first and a second unloading track(90,100) for unloading the device tested from the test site(70) and an up and down transfer cam(130) and a left and right transfer cam(140) rotated by the rotation force from the driving block(120). A motor or a cylinder can be the driving block(120) which is installed on the supporting frame(112) and periodically rotated by a hydraulic or an air pressure.
公开号:KR20030080121A
申请号:KR1020020018151
申请日:2002-04-03
公开日:2003-10-11
发明作者:박준식;정태진
申请人:유일반도체 주식회사;
IPC主号:
专利说明:

TEST HANDLER OF VERTICAL TYPE AND METHOD OF TESTING USING THE SAME}
[21] The present invention relates to a vertical test handler and a test method using the same. In particular, a vertical test handler which can improve productivity by supplying and discharging a device at a test time of a packaged device and reducing a supply time and a waiting time of the device; It relates to a test method using the same.
[22] The vertical test handler refers to a method of transporting a device by gravity, and a track is formed for the device to flow. In such a general contact method for testing a device, when a device is supplied to a test site, which is a test site, a physical force is applied to the lead portion of the device and the socket of the test site. Electrical signals are applied from the socket at the test site to the device and the lead area to test the device.
[23] Referring to FIG. 1, a conventional vertical test handler includes a loading track 10 for supplying a packaged device 2 and a test site 30 for testing a device 2 loaded from the loading track 10. And an unloading track 20 for unloading the tested device 2 from the test site 30.
[24] The loading track 10 is provided with a track for flowing the device 2 downward by gravity. These tracks are supplied with a plurality of devices 2 by an external loading device, not shown. In addition, a loading track stopper 12 for stopping the device 2 flowing downward by gravity is installed at the lower end of the loading track 10. The loading track stopper 12 loads the devices 2 flowing in the track of the loading track 10 by the driving device (not shown) one by one into the test site 30. That is, the loading track stopper 12 loads or waits for the device 2 to the test site 30.
[25] The test site 30 is a test site track 34 in which the device 2 is loaded by the loading track stopper 12 and a device 2 installed and loaded at a lower end of the test site track 34 in a test position. And a test site track stopper 32 for stopping at and a socket (not shown) in contact with the leads of the device 2 to apply an electrical signal.
[26] The test site track 34 is loaded with the device 2 flowing by the driving of the loading track stopper 12. The test site track stopper 32 stops the device 2 loaded on the test site track 34 or allows it to be discharged after completion of the test. That is, the test site track stopper 32 supports the device 2 loaded at the test site 30 during the test, and unloads the tested device 2 into the unloading track 20. The socket contacts the lead of the device 2 to supply an electrical signal to the device 2.
[27] When the test site 30 is loaded with the device 2, the test site 30 is driven in a horizontal direction or a horizontal direction by a driving device (not shown), so that the socket contacts the lead portion of the device 2. When the socket contacts the lead portion of the device 2, an electrical signal is supplied from a driving circuit (not shown) and supplied to the device 2 to test whether the device 2 has a poor electrical characteristic.
[28] The unloading track 20 receives the device 2 that has been tested at the test site 30 by driving the test site track stopper 32 to unload the device 2.
[29] Referring to FIG. 2, the conventional vertical test handler will be described with reference to the test method using the conventional vertical test handler.
[30] In the test method using the vertical test handler, the device 2 is first supplied to the loading track 10 from the outside. (Step 2S1) Then, the device 2 which is supplied to the loading track 10 and flows downward is stopped by the driving of the loading track stopper 12 and waits for loading to the test site 30. (2S2 step)
[31] The device 2 waiting to be loaded by the loading track stopper 12 flows to the test site 30 by the driving of the loading track stopper 12 and is loaded. (2S3 step) The device 2 which flows to the test site 30 is stopped and supported by the drive of the test site track stopper 32. At this time, the device 2 supplied to the loading track 10 waits for loading to the test site 30 by driving the loading track stopper 12.
[32] The device 2 loaded at the test site 30 is contacted with the socket by the test site 30 being driven horizontally or horizontally, and the electrical signal is applied from the socket and tested. (2S5 step)
[33] The tested device 2 flows to the unloading track 20 by the driving of the test site track stopper 32 and is unloaded. (2S6 step)
[34] Such a test method using a vertical test handler according to the related art tests a device 2 and then discharges the tested device 2 to test the next device 2 that is waiting and then the next device 2. To test by supplying to the test site (30). That is, a conventional vertical test handler and a test method using the same test device sequentially repeats the cycle of supplying the device 2, testing the device 2, discharging the device 2, and supplying the device 2. Testing requires a lot of processing time due to device (2) latency. In fact, since the device has a wait time of about 0.7 to 0.8 seconds according to a conventional vertical test handler and a test method using the same, it is difficult to improve the performance and productivity of the device.
[35] Accordingly, an object of the present invention is to provide a vertical test handler and a test method using the same, which can improve productivity by supplying and discharging a device at a test time of a packaged device, thereby reducing supply time and waiting time of the device.
[1] 1 is a block diagram schematically illustrating a conventional vertical test handler.
[2] 2 is a flowchart illustrating a test method using a conventional vertical test handler.
[3] 3 is a perspective view illustrating a vertical test handler according to an exemplary embodiment of the present invention.
[4] 4 is a side view schematically showing a vertical test handler according to an embodiment of the present invention shown in FIG. 3.
[5] FIG. 5 is a perspective view of the test site shown in FIG. 3. FIG.
[6] 6 is a side perspective view of a vertical test handler according to an embodiment of the present invention.
[7] 7 is a plan view illustrating a vertical test handler according to an exemplary embodiment of the present invention.
[8] 8 is a plan view showing a driving unit using a cylinder in a vertical test handler according to another embodiment of the present invention.
[9] 9 is a block diagram schematically illustrating a vertical test handler according to an embodiment of the present invention.
[10] 10 is a flowchart illustrating step by step a test method using a vertical test handler according to an embodiment of the present invention.
[11] <Description of Symbols for Main Parts of Drawings>
[12] 2, 42: device 10, 50, 60: loading track
[13] 12, 52, 62: loading track stopper 20, 90, 100: unloading track
[14] 30, 70: test site 32, 72, 82: test site track stopper
[15] 34, 74, 64: test site track 69: socket
[16] 80: transfer block 110: timing belt
[17] 120: drive unit 124: pusher
[18] 130: up and down transfer cam 131, 132, 192: rack gear
[19] 134: pinion 140: left and right transfer cam
[20] 190: cylinder
[36] In order to achieve the above object, the vertical test handler according to an embodiment of the present invention is provided with a first and second loading tracks to which the device on which the chip is mounted and freely drop the device, and the first loading track. The device from the second loading track is placed adjacent to the inspection position for inspection of the electrical failure of the free-falling device at a predetermined inspection position and at the same time for the inspection of the free-falling device along the second loading track. And a unloading track for discharging the device inspected by the test module and stopping at the standby position.
[37] In the vertical test handler, the test module transfers the device to the inspection position after receiving the device freely falling along the first loading track before inspecting the device supplied to the first loading track. It is done.
[38] Each of the first and second loading tracks of the vertical test handler is provided with stoppers for restraining free fall of the device.
[39] In the vertical test handler, the test module includes: a first test track supplied with the device falling free from the first loading track; a second test track supplied with the device free falling from the second loading track; And a transport block on which the first and second test tracks are installed adjacent to each other, and a socket contacting the device located at the inspection position and supplying an electrical signal to the contacted device.
[40] Each of the first and second test tracks of the vertical test handler is provided with stoppers for restraining free fall of the device.
[41] The vertical test handler transfers the transfer block to either the left or the right side so that any one of the first and second test tracks is positioned at the inspection position, and the other one is a position for receiving the module device. And a horizontal drive unit for transferring the transfer block, a vertical drive unit for contacting the device and the socket to the inspection position by raising and lowering the transfer block, and a driving source for driving the horizontal drive unit and the vertical drive unit. It features.
[42] In the vertical test handler, the horizontal driving unit includes a first guider installed on the transfer block, a first rack gear installed on one side of the first guider, a second rack gear installed on the test module, and the first guider. And a pinion engaged between the rack gear and the second rack gear, and a first cam interlocked with the rotation of the drive source to rotate the pinion.
[43] In the vertical test handler, the vertical driving unit includes a pusher having a cam groove of a predetermined inclined surface, a second cam linked to the rotation of the driving source, and a linear movement along the cam groove linked to the rotation of the second cam to move the pusher. A second drive bar for vertical movement, a first plate installed with the pusher and interlocked with the vertical movement of the pusher, and installed on a rear surface of the first plate and interlocked with a vertical motion of the first plate to vertically transfer the transfer block. A plurality of first pressure pins to move, a second plate installed between the transfer block and the first plate to pass through the plurality of pressure pins and to support the first plate, and a rear surface of the second plate. A pushing block installed with the plurality of pressure pins and installed on the first and second test tracks. A plurality of second pressure pins interlocked with the pressure to lower the first and second test tracks, and an elastic member inserted into the second pressure pins to raise the first and second test tracks pressed by the elastic force. It is characterized by including.
[44] The unloading track of the vertical test handler may include first and second unloading tracks disposed parallel to the first and second loading tracks with the test module therebetween.
[45] According to an embodiment of the present invention, a vertical test handler and a test method using the same include supplying a chip-mounted device to each of the first and second loading tracks to free-fall, and free-falling along the first loading track. Transferring the device to a predetermined inspection position for stopping the device and inspecting whether the device is electrically defective; and for the device freely dropped along the first loading track transferred to the inspection position. Stopping the device from the second loading track on a standby position adjacent to the inspection position for inspection of electrical failure and for inspection of the device freely falling along the second loading track during the period; The device from the second loading track waiting at a standby position adjacent to the inspection position. Transferring the vise to the inspection position, and inspecting whether the electrical failure is complete during the inspection of the electrical failure of the device freely falling along the second loading track transferred to the inspection position; And discharging the freefalling device along the track and stopping the other freefalling device along the first loading track.
[46] The test method using a vertical test handler frees the devices one by one in order to stop the devices that are supplied to each of the first and second loading tracks and freely drop the device, and to check whether the devices are stopped. It characterized in that it further comprises the step of falling.
[47] Other objects and features of the present invention in addition to the above objects will become apparent from the description of the embodiments with reference to the accompanying drawings.
[48] A preferred embodiment of the present invention will be described with reference to FIGS. 3 to 10.
[49] Referring to FIG. 3, the vertical test handler according to an exemplary embodiment of the present invention may include a drive unit 120 that is rotated by hydraulic or pneumatic pressure, and is vertically arranged side by side to mount a chip to supply a packaged device 42. A test site 70 for alternating testing of the first and second loading tracks 50, 60, and each device 42 loaded from the first and second loading tracks 50, 60, and a test First and second unloading tracks 90 and 100 for unloading the tested device 42 from the site 70, a vertical feed cam 130 and a left and right transfer cam rotated by receiving rotational force from the driver 120. Cam 140 is provided.
[50] The driving unit 120 may be installed on the support frame 112 and may be a motor or a cylinder that repeats forward and reverse rotation periodically by hydraulic or pneumatic pressure.
[51] The left and right feed cam 140 and the vertical feed cam 130 are installed on one drive shaft and have different circumferences. The upper and lower feed cam 130 is installed between the upper bracket 152 and the lower bracket 154 installed in the vertical frame 150, as shown in Figure 4, the left and right feed cam 140 and the lower bracket 154 and It is installed between the vertical conveying cam 130. In addition, a pulley 142 is installed at the end of the driving shaft to receive the rotational force of the driving unit 120 through the timing belt 110.
[52] Each of the first and second loading tracks 50 and 60 is provided with a track for flowing the device 42 downward by gravity. One side of each of the first and second loading tracks 50, 60 includes a flat plate 51, 61 91, for preventing the device 42 from being released from the track in the free fall of the device 42 due to gravity. 93) is installed. These tracks are supplied with a plurality of devices 42 by an external loading device (not shown). At the lower ends of each of the first and second loading tracks 50, first and second loading track stoppers 52 and 62 for stopping the device 42 flowing downward by gravity, respectively, are provided. The first and second loading track stoppers 52 and 62 load the test sites 70, one by one, the devices 42 flowing from the first and second loading tracks 50 and 60, respectively, by a driving device (not shown). Let's do it. That is, the first and second loading track stoppers 52, 62 load or wait the device 42 at the test site 70.
[53] The test site 70 alternately tests the device 42 loaded from the first and second loading tracks 50, 60. To this end, the test site 70 and the transfer block 80 to move left and right, as shown in Figure 5, and the first and second test site tracks 74, 64 installed in the transfer block 80 and The first and second test site tracks 74 and 64 are installed in the first and second test site tracks 74 and 64 to pass through the transfer block 80, respectively. Pressure pins 88;
[54] A first test site track stopper 72 is installed on the left side of the transfer block 80 to stop and support the device 42 loaded from the first loading track 50. It is provided. Accordingly, the first test site track 74 receives the device 42 from the first loading track 50 by driving the first loading track stopper 52.
[55] A second test site track stopper 82 is installed on the right side of the transfer block 80 to stop and support the device 42 loaded from the second loading track 60. It is provided. Accordingly, the second test site track 64 receives the device 42 from the second loading track 60 by driving the second loading track stopper 62.
[56] Each of the plurality of first pressure pins 88 is installed through the transfer block 80. A spring 89 is inserted into each of the plurality of first pressure pins 88 passing through the transfer block 80. The spring 89 serves to return the original position by the elastic force when the plurality of first pressure pins 88 are lowered.
[57] The transfer block 80 is installed in the first LM guider 92 provided at the test site 70 and is transferred left and right in the test site 70 by the first LM guider 92. The first LM guider 92 is composed of a guide rail and a slide block coupled to the transfer block 80 provided in the upper case of the test site 70.
[58] One side of the transfer block 80 is provided with a first gear (132 gear) 132 for linearly reciprocating the transfer block 80 to the left and right. The first leggear 132 linearly reciprocates by the rotation of the pinion 134. As shown in FIG. 6, the pinion 134 rotates along the trajectory formed on the left and right transport cams 140 when the left and right transport cams 140 are rotated.
[59] In order to increase the linear reciprocation of the first leggear 132, as illustrated in FIG. 7, a second leggear 131 is installed at one side of the test site 70. The second rack gear 131 is installed and fixed to the test site 70 by the fixing bolt 137.
[60] The pinion 134 is engaged between the first and second leg gears 132 and 131.
[61] In addition, a first plate 128 is installed on the test site 70, and a plurality of second pressure pins 101 for transferring the transfer block 80 up and down through the first plate 128, and the first plate 128. The push block 125 disposed on the rear surface of the plate 128 and commonly coupled to the plurality of second pressure pins 101, and the second plate 127 on which the plurality of second pressure pins 101 are installed on the rear surface of the plate 128. And a pusher 124 installed on the second plate 127 and having a predetermined slope.
[62] The first plate 128 is mounted on the upper case of the test site 70 and has a plurality of holes through which the plurality of second pressure pins 101 pass. The second pressure pins 101 are installed on the rear surface of the second plate 127. A buffer pin 103 is provided between the first and second plates 128 and 127 to cushion the impact of the second plate 127 that is conveyed up and down, and a spring is inserted into the buffer pin 103. The plurality of second pressure pins 101 penetrating the second plate 127 are coupled to the push block 125.
[63] The push block 125 is interlocked with the lowering of the second pressure pin 101 to press the plurality of first pressure pins 88 installed on the transfer block 80 to press the first and second test site tracks 74 and 64. One of them will be lowered. That is, the push block 125 serves to raise and lower the first and second test site tracks 74 and 64.
[64] A cam groove having a predetermined slope is formed in the pusher 124, and a second roller 126 is inserted into the cam groove. The second roller 126 is installed on the drive bar 122 to linearly move in accordance with the rotation of the vertical feed cam 130. That is, it is coupled with a pin inserted into a pin hole formed at one end of the driving bar 122. A third roller 151 is installed at one end opposite to the driving bar 122. The third roller 151 is coupled with a pin inserted into a pin hole formed at one end opposite to the driving bar 122. The driving bar 122 is provided with a second LM guider 153 on the rear surface. The second LM guider 153 includes a guide rail provided on the first plate 128 and a slide block formed on the rear surface of the driving bar 122.
[65] The pusher 124 is vertically conveyed by the driving bar 122 linearly moving along the second LM guider 153. That is, the second roller 126 installed on the drive bar 122 presses the pusher 124 along the inclined surface of the pusher 124 by the linear movement of the drive bar 122, so that the transfer block 80 is moved up and down. do.
[66] As described above, the left and right transfer of the transfer block 80 in detail, when the drive unit 120 rotates first, the left and right transfer cam 140 is rotated. As the left and right feed cam 140 rotates, the pinion 134 is rotated along the trajectory formed in the left and right feed cam 140. As a result, the pinion 134 is transported to the left along the first rack gear 132 and the second rack gear 131 is transported to the left. At this time, the transfer distance of the first rack gear 132 is added to the transfer distance of the second rack gear (131). The transfer block 80 is linked to the left transfer of the first rack gear 132 and is transferred to the left along the first LM guider 92.
[67] In addition, the transfer block 80 is transferred to the right side as the left and right transfer cam 140 rotates once. That is, as the left and right feed cam 140 rotates once, the pinion 134 is moved to the right by the trajectory formed in the left and right feed cam 140, and the first block gear 132 is transferred to the right to transfer the transfer block 80. Is moved to the right. As a result, when the left and right conveying cam 140 is rotated once, the conveying block 80 is conveyed to the left and then conveyed to the right again to return to its original position.
[68] On the other hand, as the driving unit 120 rotates, the vertical feed cam 130 is rotated. As the vertical feed cam 130 rotates, the third roller 151 rotates and simultaneously transfers the driving bar 122 to the left side. As the driving bar 122 moves to the left along the second LM guider 153, the second roller 126 presses the inclined surface of the pusher 124. As a result, the second plate 127 is lowered and the second pressure pin 101 is lowered to lower the pushing block 125 to lower one of the first and second test site tracks 74 and 64. .
[69] In addition, as the driving unit 120 rotates once, the vertical feed cam 130 rotates, and the driving bar 122 is transferred to the right along the circumferential surface of the vertical feed cam 130. As the driving bar 122 is transferred to the right side, the second roller 126 is lowered along the inclined surface of the pusher 124 to raise the second plate 127 to raise the plurality of pressure pins 101. Accordingly, the first and second test site tracks 74 and 64 are raised by the spring force of the spring.
[70] In this way, the transfer block 80 is transported to the left side, and by lowering any one of the first and second test site tracks 74, 64, the lowered first and second test site tracks 74, 64 of the One is in contact with the socket 69, and the other of the first and second test site tracks 74, 64 faces one of the first and second loading tracks 50, 60.
[71] Each of the first and second unloading tracks 90 and 100 flows out of the tested device 42 to the outside at the test site 70. That is, the first unloading track 90 is supplied from the first loading track 50 to the test site 70 to unload the tested device 42, and the second unloading track 100 is loaded with the second loading. The test site 70 is supplied from the track 60 to unload the tested device 42.
[72] On the other hand, referring to Figure 8, the driving unit for rotating the vertical feed cam 130 and the left and right transfer cam 140 is composed of a cylinder 190 driven by hydraulic or pneumatic pressure.
[73] The cylinder 190 is linearly moved by hydraulic or pneumatic pressure. A rack gear 192 is installed in the drive shaft of the cylinder 190 that performs the linear motion. Such a linear motion of the rack gear 192 is transmitted to the drive shaft 194 in which the vertical feed cam 130 and the left and right feed cams 140 are installed. To this end, the drive shaft 194 is provided with a pinion (not shown) to be engaged with the rack gear 192. The pinion is rotated by the linear motion of the lag gear 192.
[74] Therefore, when the drive shaft of the cylinder 190 is moved forward by the hydraulic or pneumatic pressure, the rack gear 192 is advanced to rotate the pinion forward to rotate the vertical feed cam 130 and the left and right feed cam 140 forward. . In addition, when the driving shaft of the cylinder 190 is reversed by the hydraulic or pneumatic pressure, the rake gear 192 is reversed to reverse the pinion to reversely rotate the vertical feed cam 130 and the left and right feed cam 140. do.
[75] The test method using the vertical test handler according to the present invention will be described with reference to FIGS. 9 and 10 as follows.
[76] First, a plurality of devices 42 are supplied by a device loading apparatus not shown to each of the first and second loading tracks 50 and 60. (Step 10S1)
[77] The devices 42 supplied to each of the first and second loading tracks 50, 60 are stopped at the first and second loading track stoppers 52, 62 and wait for supply to the test site 70. That is, the device 42 supplied to the first loading track 50 is stopped by the first loading track stopper 52 during free fall. The device 42 supplied to the second loading track 60 is stopped by the second loading track stopper 62 during free fall. (Step 10S2)
[78] Then, the first loading track stopper 52 is driven to load the device 42 waiting on the first loading track 50 to the first test site track 74. That is, by driving the first loading track stopper 52, the device 42 waiting on the first loading track 50 falls freely on the first test site track 74 on the transport block 80. (Step 10S3) The free fall causes the device 42 to be stopped by the first test site track stopper 72 and loaded in the first test site track 74. (Step 10S4)
[79] When the device 42 is loaded on the first test site track 74, the driving unit 120 illustrated in FIG. 3 is driven to rotate the left and right transfer cams 140 so that the transfer block 80 is transferred to the right side and to the right side. The first test site track 74 of the transferred transfer block 80 is lowered by the driving of the up and down transfer cam 130. Accordingly, the second test site track 64 of the transport block 80 faces the second loading track 60 and is loaded on the first test site track 74 of the transport block 80. The device 42 is in contact with the socket 69 shown in FIG. 4.
[80] The electrical signal is applied to the device 42 of the first test site track 74 in contact with the socket 69 from a driving circuit (not shown). Accordingly, the electrical failure of the device 42 loaded on the first test site track 74 is checked. (Step 10S6-1)
[81] While the device 42 loaded on the first test site track 74 is being tested, the device 42 is loaded on the second test site track 64 of the transfer block 80. (Step 10S6-2) That is, the second loading track stopper 62, which restrains free fall of the device 42 loaded on the second loading track 60, is driven. (Step ST1) As the second loading track stopper 62 is driven, the device 42 waiting on the second loading track 60 falls to the second test site track 64, and the falling device 42 It is loaded by the second test site track 64 by being stopped by the second test site track stopper 82. That is, while the device 42 loaded on the first test site track 74 is tested, the second test site track 64 is loaded with another device 42 waiting. (ST2 stage)
[82] When the test of the device 42 loaded on the first test site track 74 is completed and the loading of another device 42 on the second test site track 64 is completed, the driving unit 120 illustrated in FIG. 3 is completed. Is driven to rotate the left and right transfer cam 140, the transfer block 80 is transferred to the left, when the transfer block 80 is transferred to the left the second test site track 64 of the transfer block 80 is transferred up and down It is lowered by the drive of the cam 130. Accordingly, the first test site track 74 of the transport block 80 faces the first loading track 50 and is loaded on the second test site track 64 of the transport block 80. The device 42 is in contact with the socket 69 shown in FIG. 4.
[83] An electrical signal is applied from a driving circuit (not shown) to the device 42 loaded in the second test site track 64 in contact with the socket 69. Accordingly, the electrical failure of the device 42 loaded on the second test site track 64 is tested. (Step 10S8-2)
[84] While the other device 42 loaded on the second test site track 64 is being tested, the device 42 loaded and tested on the first test site track 74 is unloaded and the first test site track 74 is loaded. Is loaded with another device 42. (Step 10S8-1) That is, the first test site track stopper 72 is loaded onto the first test site track 74 and restrains the free fall of the tested device 42. (Step ST3) The first test site track stopper 72 is driven so that the device 42 loaded on the first test site track 74 and tested is dropped to the first unloading track 90 and unloaded. (Step ST4) Then, the first loading track stopper 52 which is supplied to the first loading track 50 and restrains free fall of the other device 42 that is waiting, is driven. (Step ST5) As the first loading track stopper 52 is driven, another device 42 supplied to the first loading track 50 falls to the first test site track 74 and the first test site track ( Another device 42 that has dropped to 74 is stopped by the first test sitetrack stopper 72 and loaded into the first test sitetrack 74. That is, while the device 42 loaded on the second test site track 64 is tested, the device 42 loaded and tested on the first test site track 74 is unloaded and the first test site track 74 is loaded. ) Is loaded with another device 42 from the first loading track 50. (ST6 stage)
[85] Subsequently, the test of the other device 42 loaded on the second test site track 64 is completed, and the unloading and the first test site of the device 42 loaded and tested on the first test site track 74 are completed. When the loading of another device 42 on the track 74 is completed, the driving unit 120 shown in FIG. 3 is driven to rotate the left and right transfer cams 140 so that the transfer block 80 is transferred to the right side. When the 80 is transferred to the right side, the first test site track 74 is lowered by the driving of the up and down feed cam 130. Accordingly, the second test site track 64 of the transport block 80 faces the second loading track 60 and is loaded on the first test site track 74 of the transport block 80. Another device 42 is in contact with the socket 69 shown in FIG. 4.
[86] Another device 42 loaded in the first test site track 74 in contact with the socket 69 is supplied with an electrical signal from a drive circuit not shown. Accordingly, the electrical failure of the device 42 loaded on the first test site track 74 is tested. (Step 10S10-1)
[87] While another device 42 loaded on the first test site track 74 is being tested, another device 42 loaded and tested on the second test site track 64 is unloaded and a second test site track ( 64 is loaded with another device 42. That is, the second test site track stopper 82 is loaded onto the second test site track 64 and restrains free fall of the tested device 42 (step 10S10-2). (Step ST7) As the second test site track stopper 82 is driven, the device 42 loaded on the second test site track 64 and tested is dropped to the second unloading track 100 and unloaded. (Step ST8) Then, the second loading track stopper 62, which is supplied to the second loading track 60 and restrains free fall of another device 42, which is waiting, is driven. (Step ST9) As the second loading track stopper 62 is driven, another device 42 supplied to the second loading track 60 falls to the second test site track 64, and the second test site track ( Another device 42 that has fallen to 64 is stopped by the first test sitetrack stopper 72 and loaded into the first test sitetrack 74. (ST10 step)
[88] As such, while testing another device 42 loaded on the first test site track 74, the other device 42 loaded and tested on the second test site track 64 is unloaded and a second test is performed. The site track 64 is loaded with another device 42 from the second loading track 60.
[89] Then, the test method using the vertical test handler according to an embodiment of the present invention is to test the device 42 by repeating the above-described steps 10S7, 10S8, 10S9 and 10S10.
[90] As such, the vertical test handler and the test method using the vertical test handler according to the embodiment of the present invention can minimize the waiting time of the device 42 by supplying and discharging the other device 42 while testing one device 42. Can be. In fact, the wait time of the device in the vertical test handler and the test method using the same according to an embodiment of the present invention is about 0.3 ~ 0.4 seconds.
[91] As described above, in the vertical test handler and the test method using the vertical test handler according to the present invention, two loading tracks are disposed adjacent to each other, and a test site track for testing a device using a vertical transfer cam and a left and right transfer cam is tested vertically and horizontally. By transporting the device, the device can be supplied while another device is tested to minimize device latency, thereby greatly improving the performance and productivity of the device.
[92] Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.
权利要求:
Claims (11)
[1" claim-type="Currently amended] First and second loading tracks to which devices mounted with chips are supplied, respectively, for freely dropping the devices;
The inspection from the second loading track for inspection of the electrical failure of the device freely falling along the first loading track at a predetermined inspection position and the inspection of the device freely falling along the second loading track. A test module for stopping the device on a standby position adjacent to the inspection position;
And an unloading track for discharging the device inspected by the test module.
[2" claim-type="Currently amended] The method of claim 1,
The test module is a vertical test, characterized in that for transporting the device to the test position after receiving the device that is freely dropped along the first loading track before examining the device supplied to the first loading track Handler.
[3" claim-type="Currently amended] The method of claim 1,
Each of the first and second loading tracks has stoppers for restraining free fall of the device.
[4" claim-type="Currently amended] The method of claim 1,
The test module,
A first test track supplied with the device falling free from the first loading track,
A second test track supplied with the device falling free from the second loading track;
A transfer block in which the first and second test tracks are adjacently installed;
And a socket for contacting the device located at the test position and supplying an electrical signal to the contacted device.
[5" claim-type="Currently amended] The method of claim 4, wherein
Each of the first and second test tracks includes stoppers for restraining free fall of the device.
[6" claim-type="Currently amended] The method of claim 4, wherein
The transfer block is transferred to either one of the left and the right sides so that any one of the first and second test tracks is positioned at the inspection position, and the other transfers the transfer block to a position for receiving the module device. A horizontal drive unit,
A vertical drive unit which contacts the device and the socket to the inspection position by raising and lowering the transfer block;
And a drive source for driving the horizontal driver and the vertical driver.
[7" claim-type="Currently amended] The method of claim 6,
The horizontal drive unit,
A first guider installed on the transfer block;
A first rack gear installed at one side of the first guider,
A second rack gear installed in the test module;
A pinion engaged between the first and second leg gears,
And a first cam interlocked with the rotation of the drive source to rotate the pinion.
[8" claim-type="Currently amended] The method of claim 6,
The vertical drive unit,
A pusher having a cam groove of a predetermined inclined surface,
A second cam that cooperates with rotation of the drive source,
A second drive bar interlocked with the rotation of the second cam to linearly move the pusher by linearly moving along the cam groove;
A first plate on which the pusher is installed and linked to the vertical movement of the pusher;
A plurality of first pressure pins installed on a rear surface of the first plate and linked to a vertical movement of the first plate to vertically move the transfer block;
A second plate installed between the transfer block and the first plate to support the first plate while passing through the plurality of pressure pins;
A pushing block installed on a rear surface of the second plate and provided with the plurality of pressure pins;
A plurality of second pressure pins installed on the first and second test tracks and linked to pressurization of the pushing block to lower the first and second test tracks;
And an elastic member inserted into the second pressure pins to raise the first and second test tracks pressed by the elastic force.
[9" claim-type="Currently amended] The method of claim 1,
The unloading track is
And a first and a second unloading track disposed side by side with the first and second loading tracks with the test module interposed therebetween.
[10" claim-type="Currently amended] Supplying a chip-mounted device to each of the first and second loading tracks to free-fall;
Moving the device to a predetermined inspection position to stop the device falling freely along the first loading track and inspect whether the device is electrically defective;
The second loading track for checking whether the device is freely dropped along the first loading track transferred to the inspection position and for inspecting the device freely falling along the second loading track during the period. Stopping the device from a standby position adjacent to the inspection position;
Transferring the device from the second loading track waiting in a standby position adjacent to the inspection position to the inspection position;
Ejecting the free-falling device along the first loading track which has been inspected for electrical failure during the period of checking whether the device is free-falling along the second loading track transferred to the inspection position. And stopping the other device falling freely along the first loading track.
[11" claim-type="Currently amended] The method of claim 10,
And freely dropping the devices one by one to stop the devices that are supplied to each of the first and second loading tracks and to freely drop the devices, and to check whether the devices are stopped. Test method using a vertical test handler.
类似技术:
公开号 | 公开日 | 专利标题
JP2015057828A|2015-03-26|Workpiece processing system and method
KR100291109B1|2001-06-01|Probe inspection and repair apparatus having burr-in inspection function of semiconductor wafer, burr-in inspection apparatus of semiconductor wafer
KR101378326B1|2014-03-27|Transfer apparatus for handling electronic components
TWI579935B|2017-04-21|A flip chip bonding device
KR102000950B1|2019-07-17|Semiconductor device inspection apparatus
KR100560729B1|2006-03-14|Handler for testing semiconductor
US6460755B1|2002-10-08|Bump forming method and apparatus therefor
JP3339344B2|2002-10-28|Electronic component mounting device
KR100221949B1|1999-10-01|Semiconductor device transfer apparatus
JP5911820B2|2016-04-27|Substrate manufacturing apparatus and substrate manufacturing method
EP1042201B1|2003-09-10|Method and apparatus for inverting a tray
KR100671069B1|2007-01-17|Transferring mechanism, movable probe card transferring apparatus, probe device, and method for transferring a probe card into a probe apparatus
KR100274310B1|2001-01-15|Inspection device, conveying device and temperature controller
KR101240345B1|2013-03-08|Automated polaroid film attaching apparatus
CN104678285B|2018-05-04|Transport carrier and device transferring device
US8240541B2|2012-08-14|Apparatus for mounting semiconductor chip
KR100936903B1|2010-01-15|Inspecting apparatus and inspecting method
KR20090096706A|2009-09-14|An improved ball mounting apparatus and method
TWI465746B|2014-12-21|Electronic component testing device
KR200341202Y1|2004-02-11|Automatic inspection system for industrial printed circuit board
US6891341B2|2005-05-10|Aligning apparatus in semiconductor device test handler
US20030188997A1|2003-10-09|Semiconductor inspection system and method
US20050045914A1|2005-03-03|Flip chip device assembly machine
US20030213832A1|2003-11-20|Solder ball attaching system and method
CN201449997U|2010-05-05|Full automatic ic marking machine
同族专利:
公开号 | 公开日
KR100445034B1|2004-08-21|
引用文献:
公开号 | 申请日 | 公开日 | 申请人 | 专利标题
法律状态:
2002-04-03|Application filed by 유일반도체 주식회사
2002-04-03|Priority to KR20020018151A
2003-10-11|Publication of KR20030080121A
2004-08-21|Application granted
2004-08-21|Publication of KR100445034B1
优先权:
申请号 | 申请日 | 专利标题
KR20020018151A|KR100445034B1|2002-04-03|2002-04-03|Test handler of vertical type and method of testing using the same|
[返回顶部]