Laser apparatus with compensator of laser beam

专利摘要:
The present invention relates to a laser device equipped with a laser beam compensator. A laser apparatus equipped with a laser beam compensator includes: a laser oscillator; Fixed beam expanders; Beam splitter; Mirrors; Variable beam expander; A marking laser device comprising: a scanner block and an f-theta lens, comprising: reflecting an incident laser beam at a predetermined ratio between the mirrors reflecting the laser beam divided by the beam splitter and the variable beam expander The window is provided with a correction mount that can be detached. According to this, there is an advantage that the intensity difference between the laser beams can be easily corrected even in the assembled laser device.
公开号:KR20020095718A
申请号:KR1020010033901
申请日:2001-06-15
公开日:2002-12-28
发明作者:이재신；정해세
申请人:주식회사 이오테크닉스；
IPC主号:

专利说明:

Laser apparatus with compensator of laser beam
[15] The present invention relates to a laser device equipped with a laser beam compensator, and more particularly, to a laser device equipped with a laser beam compensator for compensating intensity between laser beams divided by a laser beam splitter.
[16] In general, the laser beam may be used as it is after being optically controlled by a single optical system, but according to the application of the laser beam divided the laser beam obtained from one laser generator, each divided laser beam is a separate optical It may be used by a control apparatus. For example, a two-head marker divides one laser beam into two using a laser beam splitter to mark the same. At this time, the laser beam divided by the same intensity is marked twice as much as 1-head marking, thereby improving productivity.
[17] FIG. 1 shows an example of a laser beam splitting structure in which a beam splitter is used to split one laser beam into two parallel beams.
[18] Referring to FIG. 1, the incident laser beam 1 reflects half by the first mirror 2 and the rest passes through the first mirror 2 to obtain a first split beam 1a, and The component reflected by the first mirror 2 is reflected by the second mirror 3 to obtain a second split beam 1b parallel to the first split beam 1a. The split beams 1a, 1b are finally irradiated onto the workpiece 4. Therefore, in the laser for precise work, the intensity of the intensity between the first split beam 1a and the second split beam 1b irradiated to the workpiece 4 should be within a certain error. On the other hand, even when the laser beam is split within a predetermined error range in the laser beam splitter, cumulative loss occurs through the rear end of the optical mirror and optical lens along the path of the laser beam, and thus the intensity in the final workpiece may be out of the error range. do.
[19] Therefore, if the intensity difference between the split laser beams in the final workpiece is out of the working error range, the laser system is dismantled to replace the beam splitter to replace the beam splitter, and the calibration is performed for alignment of the laser beam. There was a problem that needs to be redone.
[20] Accordingly, the present invention has been made to solve the above problems, and an object of the present invention is to provide a laser device equipped with a laser beam compensator for easily correcting the intensity of the divided laser beam.
[1] 1 is an explanatory diagram of a laser beam splitting structure;
[2] 2 schematically shows a preferred embodiment of the present invention;
[3] 3 is a cross-sectional view showing one embodiment of the calibration mount of the present invention;
[4] 4 is a partially exploded perspective view illustrating a modification of the correction mount of the present invention;
[5] 5 is a partially cutaway perspective view showing another modified example of the correction mount of the present invention.
[6] Explanation of symbols on the main parts of the drawings
[7] 10: laser oscillator 20: fixed beam expander
[8] 30: first mirror 32: second mirror
[9] 34: beam splitter 36: third mirror
[10] 38: fourth mirror 40: correction mount
[11] 43: window support jaw 44: annular screw
[12] 46: Tightening screw 48: Fixing jaw
[13] 50: variable beam expander 60: scanner block
[14] 70: f-theta lens 80: workpiece
[21] In order to achieve the above object, a laser device equipped with a laser beam compensator of the present invention includes a laser oscillator; Fixed beam expanders; Beam splitter; Mirrors; Variable beam expander; In the marking laser device comprising a scanner block and f-theta lens,
[22] A correction mount may be mounted between the mirrors reflecting the laser beam divided by the beam splitter and the variable beam expander, and a window for reflecting the incident laser beam at a predetermined ratio may be detachable.
[23] In addition, the correction mount is a modified slot that allows the window to enter and exit the upper portion; A cover covering the slot; And a slot guide formed inside the inlet of the correction mount to support and secure the window mounted to the slot.
[24] In another modification, the correction mount is a means for rotating the window perpendicular to the incident laser beam, and includes a convex portion extending on one side of the window; A handle extending from the line opposite to the convex portion; It may be provided with; a receiving hole formed to extend in the correction mount to accommodate the convex portion.
[25] Preferably, a fixed jaw blocking the entry of the variable beam expander connected therein and / or a tightening screw fixing the outer circumference of the variable beam expander are formed at the exit side of the correction mount.
[26] The window has a reflectance of 4 to 10% on the surface where the Nd: YAG laser beam having a wavelength of 1,064 nm is incident, and the surface on which the laser beam is emitted is preferably antireflective coating.
[27] Hereinafter, with reference to the accompanying drawings will be described an embodiment according to a laser device equipped with a laser beam compensator of the present invention in detail.
[28] 2 is a view schematically showing a marking laser apparatus equipped with a laser beam compensator according to a preferred embodiment of the present invention.
[29] Referring to the drawings, the laser beam emitted from the laser oscillator 10 has a path in the first mirror 30 and the second mirror 32 via a fixed beam expander 20 that enlarges the incident laser beam at a fixed magnification. And enters the beam splitter 34. After passing through the beam splitter 34, the first beam 10a enters the third mirror 36 in the first direction, is reflected in a second direction perpendicular to the first direction, and passes through the correction mount 40. It passes through a variable beam expander 50 which variably enlarges the laser beam. Next, linearity is maintained in the f-theta lens 70 via the scanner block 60 which scans the laser beam and is irradiated to the workpiece 80. On the other hand, the beam reflected by the beam splitter 34 is reflected by the fourth mirror 38 and proceeds in parallel with the second direction so that the correction mount 40, the variable beam expander 50, the scanner block 60, and f The workpiece 80 is irradiated via the theta lens 70. In this case, if the intensity of the laser beam irradiated to the workpiece is out of the error range, the laser beam correction mount 40 is corrected to adjust the intensity of the laser beam having a strong intensity among the laser beams to be similar to that between other weaker laser beams. A window (not shown) is inserted to correct it.
[30] 3 is a cross-sectional view illustrating an example of coupling a correction mount and a variable beam expander according to an embodiment of the present invention. Referring to the drawings, there is an inlet portion 41 connected to the outlet portion of the mirror (36, 38 of FIG. 2) and an outlet portion 42 connected to the variable beam expander 50 when viewed in the path of the laser beam. Inside there is a window support jaw 43 which prevents entry to the exit side of the window 43a. The window 43a is brought into close contact with the window support jaw 43, and the outer circumference thereof has an annular screw 44 having a thread, and a thread 45 corresponding to the screw 44 is formed inside the inlet. have. Therefore, when the window 43a is to be detached from the correction mount 40, the annular screw is advanced.
[31] A through-hole 42a is formed in the outlet portion 42 and a tightening screw 46 is positioned to fix the variable beam expander inserted therein, and an inlet portion of the variable beam expander 50 is formed in the correction mount 40. When connected to the outlet 42, a fixed jaw 48 is formed to prevent entering over a predetermined distance. Even when the correction mount 40 is connected between the mirrors 36 and 38 and the variable beam expander 50, the path of the laser beam is opened so that the operation may be performed in the same manner as in the conventional art.
[32] If the laser needs to be calibrated during actual operation, loosen the tightening screw 46 and then remove only the calibration mount 40 from the mirrors 36 and 38 and the variable beam expander 50, and then mount the window 43a. After that, the window 43a is brought into close contact with the annular screw 44. Next, an outlet 42 of the correction mount is inserted into the inlet of the variable beam expander 50 to position the correction mount 40 between the variable beam expander 50 and the mirrors 36 and 38.
[33] In the window used in the above embodiment, the reflectance of the surface on which the Nd: YAG laser beam with a wavelength of 1,064 nm is incident is preferably 4 to 10%, and the surface on which the laser beam is emitted is preferably antireflective coating.
[34] 4 shows a variant of the calibration mount. Referring to the drawings, a window slot 202 is formed on the upper portion, and a cover 204 that is detachable is provided on the upper portion of the slot 202. The slot guide 206 is formed on the inner circumferential surface of the correction mount 40 so that the window 202a is upright inside the inlet 241. Therefore, there is an advantage that the window can be easily attached and detached without disassembly of the correction mount 40.
[35] 5 is a view showing another modified example of the correction mount. Referring to the drawings, a lower portion of the window 343a extends from the window 343a to provide a convex portion 303, and an upper portion of the window 343a extends from the window 343a to provide a handle 304. An inner portion of the correction mount 40 is formed with a receiving hole 302 extending therefrom to which the convex portion 303 is fixedly rotated.
[36] When the rotation of the window 343a is possible as described above, the window 343a may be tilted slightly so that the laser beam reflected from the window does not return from the path of the laser beam.
[37] As described above, the use of a laser device equipped with a laser beam compensator according to the present invention has the advantage that the laser beam can be easily corrected even in the assembled laser.
[38] Although the present invention has been described with reference to the embodiments with reference to the drawings, this is merely exemplary, it will be understood by those skilled in the art that various modifications and equivalent embodiments are possible. Therefore, the true technical protection scope of the present invention will be defined only by the appended claims.

权利要求:
Claims (6)
[1" claim-type="Currently amended] In a laser apparatus for marking comprising a laser oscillator, a fixed beam expander, a beam splitter, mirrors, a variable beam expander, a scanner block, and an f-theta lens,
And between the mirrors reflecting the laser beam divided by the beam splitter and the variable beam expander, a correction mount to which a window for reflecting the incident laser beam at a predetermined ratio can be detachable. Laser unit with correction device.
[2" claim-type="Currently amended] The method of claim 1, wherein the correction mount,
A thread formed on an inner surface of the inlet side; And
And an annular screw formed on an outer circumference of the screw thread engaged with the screw thread.
[3" claim-type="Currently amended] The method of claim 1, wherein the correction mount,
A slot through which the window can enter and exit;
A cover covering the slot;
And a slot guide formed inside the inlet of the correction mount to support and secure the window mounted to the slot.
[4" claim-type="Currently amended] The method of claim 1, wherein the correction mount is a means for rotating the window perpendicular to the incident laser beam,
A convex portion extending on one side of the window;
A handle extending from the line opposite to the convex portion;
And a receiving hole extending in the correction mount to accommodate the convex portion.
[5" claim-type="Currently amended] The method according to any one of claims 1 to 4,
A laser equipped with a laser beam compensator, characterized in that a fixing jaw blocking the entry of the variable beam expander connected therein and / or a tightening screw fixing the outer periphery of the variable beam expander are formed at the exit side of the correction mount. Device.
[6" claim-type="Currently amended] The method of claim 1,
The window has a reflectance of 4 to 10% on the surface where the Nd: YAG laser beam with a wavelength of 1,064 nm is incident, and the surface on which the laser beam is emitted is anti-reflective coating. Laser device.

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同族专利:

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引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
2001-06-15|Application filed by 주식회사 이오테크닉스

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2001-06-15|Priority to KR1020010033901A

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2002-12-28|Publication of KR20020095718A

优先权:

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申请号 | 申请日 | 专利标题

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KR1020010033901A|KR20020095718A|2001-06-15|2001-06-15|Laser apparatus with compensator of laser beam|