Sticking method of display panel substrate and device thereof

专利摘要:
PURPOSE: A method and device for connecting display panel substrates are provided to set a cell gap readily and precisely to a high degree of accuracy, in a connecting process for fabricating a display panel. CONSTITUTION: A method for connecting display panel substrates comprises the following steps. Firstly, a first substrate(10) and a second substrate(12), whereon sealant material(14) is disposed so as to form a waste region(30) in the inner side region of the edges of the first and second substrates, are aligned. Thereupon, a spacer(20) with a thickness substantially equal to a prescribed cell gap(d) is inserted into the waste region between the first and second substrates. Next, the cell gap is determined by pressing the first and second substrates. The sealant material is then hardened, whereupon the spacer is withdrawn.
公开号:KR20020062851A
申请号:KR1020020004173
申请日:2002-01-24
公开日:2002-07-31
发明作者:마츠모토요시이에
申请人:랜 테크니컬 서비스 가부시키가이샤；
IPC主号:

专利说明:

Display Panel Substrate Attachment Method and Device {STICKING METHOD OF DISPLAY PANEL SUBSTRATE AND DEVICE THEREOF}
[31] The present invention relates to a method for attaching a display panel substrate and an apparatus for implementing the same.
[32] The display panel is manufactured by attaching two substrates. Referring to FIG. 11, a process of attaching a substrate conventionally performed will be described. As shown in the figure, the first substrate 110 is held by a first surface plate (also referred to as an upper surface plate) 142 provided with the y-axis drive mechanism 132. Similarly, the second substrate 112 on which the sealing material is arranged is held by a second surface plate (also referred to as a lower surface plate) 144 provided with the Y-axis drive mechanism 134. Θ in the θ table 162 located further below the X-axis, Y-axis, and the second surface plate 144 while observing the merge marks attached to the first substrate 110 and the second substrate 112. Adjust the axis. That is, the 2nd board | substrate 112 is rotated in the horizontal plane by the rotation drive mechanism 136, and alignment with a 1st board | substrate is performed. Thereafter, the first surface plate 142 or the second surface plate 144 may be operated in the direction of the arrow A. FIG. Attachment is performed by pressurizing the substrate as a result by the upper and lower lifting means 138 and the pressure cylinder 160 of the surface plate. If the distance between the two substrates (hereinafter referred to as cell gap) is not constant, display unevenness occurs. Therefore, in order to maintain the display quality, it is necessary to appropriately maintain the cell gap. This technique is called cell gap control. In addition, the substrate pressurization mechanism by the X-axis drive mechanism 132, the Y-axis drive mechanism 134, the rotary drive mechanism 136, the vertical lifting means 138, and the pressure cylinder 160 has various mechanisms than before. Note that For this reason, those skilled in the art can easily configure these mechanisms, and the detailed description thereof will be omitted.
[33] For example, in a liquid crystal display device manufacturing process using a glass substrate or the like, a spacer made of glass fiber or the like is mixed with a sealing agent, and a spacer made of resin, silica or the like is sprayed on the entire surface of the cell between the substrates. It is done. However, a negative effect such as deterioration of the controller due to the spacer occurs. In order to improve the display quality, a so-called spacerless liquid crystal display, which performs precise cell gap control without disposing a spacer in a cell, is expected.
[34] In addition, in organic EL panels and the like, where demand is increasing recently, spacers cannot be disposed over the entire inside of a cell, so precise cell gap control has not been realized.
[35] In addition, in the case of a liquid crystal display device using a substrate such as glass, in order to completely seal the inside of the cell, a process of initially providing a sealing material and an opening for injecting a liquid crystal medium later are provided in the sealing material. Since a process of encapsulating is required, the sealing material could not be disposed to completely encapsulate the inside of the cell in a single process. Therefore, it is difficult to secure the adhesive strength of the encapsulation part after the step of encapsulating the opening part after the liquid crystal medium is injected, so that the liquid crystal medium leaks after encapsulation.
[36] Also in the case of the organic EL panel, since the air inside the cell needs to be removed when the substrate is attached, a small gap is provided in a part of the panel without completely encapsulating the panel with a sealing material, and the substrate is pressurized to press the cell gap. At the same time, the process of sealing this gap is often adopted. However, a problem often arises in the adhesive strength of the gap encapsulation, and as a result, the display quality of the panel is deteriorated, resulting in a short product life.
[37] The object of the present invention has been made in view of the above-mentioned conventional problems, and in the process of attaching the substrate, it is possible to set the cell gap easily, accurately and with high accuracy, and at the same time, one sealing step using a sealing material, that is, a single sealing step. The entire circumference of the cell can be encapsulated in. The present invention provides a method for attaching a display panel substrate and an apparatus for implementing the same.
[1] 1A and B are explanatory views of a first embodiment of the present invention, a is a schematic plan view of a main part of an attachment device for a display substrate of the present invention, b is a sectional view taken along the line B-B in FIG.
[2] 2A and 2B are explanatory views of a second embodiment of the present invention, where a is a schematic plan view of an essential part of an attachment device for a display substrate of the present invention, b is a sectional view taken along the line B-B in FIG.
[3] 3A and 3B are explanatory views of a modification of the second embodiment of the present invention, in which a is a schematic plan view of an essential part of the attachment device for a display substrate of the present invention, b is a sectional view taken along line B-B in FIG.
[4] 4 is an explanatory diagram of a third embodiment of the present invention, which is a schematic cross-sectional view useful for explaining an example of a spacer;
[5] 5A and 5B are explanatory views of a modification of the third embodiment of the present invention, and are schematic sectional views to help explain another configuration example of the spacer;
[6] 6A and 6B are views showing a modification of the fourth embodiment of this invention, and are schematic sectional views to help explain another configuration example of the spacer;
[7] 7A, 7B and 7C are explanatory diagrams for explaining the fifth embodiment of the present invention, and are schematic cross-sectional views for explaining another structural example of the spacer;
[8] 8a and b are schematic plan views for explaining the spacers of FIGS. 7a and b;
[9] 9 is a view helpful in explaining a cell gap of an attached substrate obtained using a spacer according to the present invention;
[10] FIG. 10 is a view useful for explaining a cell gap of an attached substrate obtained by a conventional method without using a spacer; and
[11] Fig. 11 is a schematic schematic view of principal parts for explaining a conventional substrate attaching process and attachment device.
[12] (Explanation of the sign)
[13] 10, 110: first substrate 12, 112: second substrate
[14] 14, 114: sealing material 20: spacer
[15] 20a: first spacer member 20b: second spacer member
[16] 20c: third spacer member 21: auxiliary spacer member
[17] 22 spacer operation mechanism 22a first spacer member operating mechanism
[18] 22b: second spacer member operating mechanism 22c: third spacer member operating mechanism
[19] 23; Auxiliary spacer member actuator 24: Wedge-shaped spacer
[20] 26: variable thickness spacer 26a: rotating head
[21] 26b: rotary head operating mechanism 26c: rotary head support
[22] 30: leaving area 32: inside the cell
[23] 40: processing chamber 42, 142: upper surface plate
[24] 44, 144: lower surface plate 46: supply and discharge mechanism for holding the substrate
[25] 48: supply and discharge mechanism for the processing chamber 50: vacuum pump for holding the substrate
[26] 52 processing chamber vacuum pump 60 substrate holding means
[27] 62: pressure adjusting means 132: X axis drive mechanism
[28] 134: Y-axis drive mechanism 136: rotation drive mechanism
[29] 138: up and down lifting means 160: pressure cylinder
[30] 162: θ table
[38] In order to solve the said subject, according to the attachment method of this invention,
[39] (1) A step of aligning and holding a second substrate on which a sealing material is arranged so as to form an idle area between the first substrate and the inner edge regions of the first and second substrates. ,
[40] (2) inserting a spacer into the leaving area between the first and second substrates,
[41] (3) pressing the first and second substrates to determine the cell gap,
[42] (4) a step of curing the sealing material, and
[43] (5) process of extracting the spacer
[44] It includes.
[45] Thus, according to this invention, the sealing material is hardened by adjusting the cell gap between both board | substrates with a spacer, and determining. Therefore, the cell gap can be easily and accurately and accurately set. Therefore, the present invention is particularly suitable for use in the manufacture of organic EL panels and the like, in addition to liquid crystal panels employing a so-called pre-attachment injection step.
[46] In the practice of the present invention, when the adhesion is carried out in an airtight processing chamber, it is preferable to include a step of bringing the processing chamber from normal pressure to vacuum between the above steps (1) and (2).
[47] In this way, the adhesion between the substrates in the vacuum processing chamber makes it possible to particularly influence these factors that greatly affect the panel quality in the manufacturing process of the organic EL panel in which the material used for its manufacture is weak to moisture and oxygen. Excluding it, it becomes possible to perform accurate cell gap control by a simple process.
[48] In a preferred embodiment of the present invention, between the above-described processes (2) and (3), the pressure difference between the predetermined space inside the cell in the processing chamber and the space outside the predetermined space is substantially reduced. It may be desirable to include a step of returning to normal pressure while keeping it at zero.
[49] With such a configuration, since the occurrence of warpage of the substrate can be suppressed, accurate cell gap control can be performed. Therefore, this method is especially suitable for use in the manufacturing process of a display panel using a flexible substrate, for example.
[50] Further, according to a preferred embodiment of the present invention, between the above-described steps (1) to (4), the first and second substrates are formed on the outer surfaces on the opposite sides of the inner surfaces facing each other and on the outer surfaces thereof. It is good to hold | maintain the 1st and 2nd board | substrate in close contact with a 1st and a 2nd surface plate, respectively, while vacuuming between the contact surfaces of the 1st and 2nd surface plates which face, respectively.
[51] In this case, in particular, in the case where the adhesion is performed in the processing chamber, it is preferable to make the suction force of the air for making the entire process chamber into a vacuum smaller than that of the air for bringing the first and second substrates into close contact.
[52] In such a configuration, since the first and second substrates do not fall or the displacement of these substrates against the surface plate can be stably supported, it is possible to control the cell gap accurately and highly precisely. Done.
[53] Further, in a preferred embodiment of the present invention, when the spacers are configured to be separated from each other by three or more plurality of spacer members, the cell gap determined in the step (3) described above is determined by the thickness of the plurality of spacer members. Adjust to total. After the hardening of the sealing material, in the above-described step (5), first, the spacer member which contacts and supports the first and second substrates is left, and the spacer member substantially positioned at the center is pulled out, and then the remaining spacers are removed. Pull out the member to remove the spacer.
[54] In this way, the spacer thickness of the overlapping structure can be adjusted more accurately to the value of the cell gap in the design. Moreover, when using such a spacer, a spacer can be controlled without damaging a board | substrate surface, and the panel excellent in quality can be obtained.
[55] According to a preferred embodiment of the present invention, when the spacer is composed of a tapered block-shaped spacer member that changes in thickness at a constant rate, the cell gap determined in step (3) described above is inserted in the spacer. It is good to adjust while pulling out.
[56] In addition, when further auxiliary spacer members are added to the spacer and the total thickness of the spacer and the auxiliary spacer member is set to be larger than a predetermined cell gap, the spacer with the auxiliary spacer member is removed in the above-described step (2). It is good to make fine adjustment so that it may become a predetermined cell gap by inserting between a 1st and 2nd board | substrate, and after that, and pulling out an auxiliary spacer member before the process (3) mentioned above.
[57] As described above, since the cell gap can be finely adjusted by taking out the tapered spacer or the auxiliary spacer member, the adjustment can be performed with higher accuracy.
[58] Moreover, in a suitable Example of this invention, you can also do as follows. First, more auxiliary spacer members are added to the spacers, and the total thickness of the spacers and the auxiliary spacer members is set larger than a predetermined cell gap. The first and second substrates are then vacuumed between each of the outer surfaces on opposite sides of the inner surfaces of the first and second substrates facing each other and the contact surfaces of the first and second surface plates respectively facing the outer surfaces. Are maintained in close contact with the first and second surface plates, respectively. Next, the processing chamber is vacuumed from normal pressure. In this vacuum state, instead of the spacer in the above-described step (2), the spacer with the auxiliary spacer member is inserted between the first and second substrates to bring the auxiliary spacer member into contact with the first substrate.
[59] In this case, the auxiliary spacer member supports the substrate provided on the upper side in the gravity direction, thereby assisting the holding of the substrate by the surface plate, and as a result, the substrate can be prevented from falling. In addition to this, by setting the vacuum between the substrate and the surface plate, not only the substrate can be held but also the curvature of the substrate itself can be suppressed, so that more stable cell gap control can be realized.
[60] More preferably, in the method for attaching the display panel substrate, the sealing material may be cured by ultraviolet irradiation.
[61] Alternatively, the sealing material may be cured by heating.
[62] In addition, according to a preferred embodiment of the attaching device for a display panel substrate of the present invention, it is preferable to include the following components. That is, the apparatus is provided with first and second surface plates, spacers, spacer operating means, and sealing hardening means, each holding first and second substrates therein. This spacer has a thickness substantially equal to a given cell gap. The spacer actuation means actuates the spacer to insert or pull the spacer between the substrates. The sealing hardening means functions to cure the sealing material.
[63] According to this device configuration, the cell gap value can be determined by the thickness of the spacer inserted between the substrates, and the spacer can be pulled out after curing the seal while maintaining the determined cell gap value. As a result, it is possible to control the cell gap accurately and with high accuracy, thus providing a high quality display.
[64] According to another suitable embodiment of the attachment device of the present invention, it is preferable to further include substrate holding means for holding the substrate by bringing the substrate into close contact with the surface plate. The substrate holding means vacuum-extracts between the outer surfaces on the opposite sides of the inner surfaces of the first and second substrates facing each other and the contact surfaces of the first and second surface plates facing the outer surfaces, respectively, by vacuum. And a second substrate can be brought into close contact with the first and second surface plates, respectively.
[65] In the implementation of the attachment apparatus of the present invention, preferably, treatment chamber compartment forming means for compartmentalizing the treatment chamber for attachment and pressure adjusting means for arbitrarily freely changing the treatment chamber from normal pressure to vacuum or from vacuum to normal pressure. Moreover, it is preferable that the process chamber partition forming means mainly constitute the first and second surface plates.
[66] In this way, the above-described high precision control of the cell gap is possible and the device itself can be compactly configured.
[67] Further, according to the attachment device of the present invention, preferably, when the spacer is constituted as a laminated structure with a plurality of three or more spacer members, each spacer member is operated independently of each other, thereby adjusting the total thickness of the spacer. It is good to laminate so that.
[68] When the spacer is configured as the laminated structure in this manner, the cell gap can be easily fine-tuned by pulling out the spacer member, so that the cell gap can be controlled with higher precision.
[69] Further, according to a preferred embodiment of the attachment device of the present invention, when the spacer is composed of one lump shaped spacer member, it is preferable that the spacer member has a shape capable of changing the cell gap.
[70] According to the structure of such a spacer, for example, when one end of the side into which the spacer is inserted between the substrates of the spacer is a wedge shaped block body, that is, a tapered block body, the thickness decreases toward the tip end thereof. Since the cell gap can be determined by the thickness according to the amount (distance or length) taken out so that the thickness of the spacer member inserted into the outside, the cell gap can be finely adjusted with high precision.
[71] Alternatively, according to the attachment device of the present invention, the spacer member preferably includes a rotating head having a smooth elliptical curve in its longitudinal section, and the rotating head rotates within the voids of the unattended region. It is preferable to have a shape that can be in contact with the substrate of 2 to control the cell gap.
[72] Moreover, when both or one of the 1st and 2nd surface plates is used as a quartz surface plate, it is suitable for the hardening means to be an ultraviolet irradiation device. In this case, a sealing material can be hardened by irradiating an ultraviolet-ray to a sealing material directly from the exterior of a surface plate.
[73] Moreover, it is suitable to set it as the heating surface plate in which a 1st surface plate and a 2nd surface plate consist of metal. In this case, the sealing material can be heat cured through heating of the surface plate.
[74] Embodiment of the Invention
[75] EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to drawings. In addition, the drawings are only schematically shown to the extent that the present invention can be understood, and the present invention is not particularly limited thereto. In addition, in each figure used for the following description, the same component is shown with the same code | symbol, and it is understood that the overlapping description may be abbreviate | omitted.
[76] Moreover, in implementing this invention, the plate press, the X-axis drive mechanism, the Y-axis drive mechanism, the rotation drive mechanism, the up-down lifting means, and the board | substrate pressurization mechanism by the pressure cylinder which were already demonstrated with reference to FIG. 11 are used suitably, Since the structure and function are well known in the art and are not the gist of the present invention, detailed description thereof will be omitted.
[77] Moreover, in description of the following embodiment, the example which applies this invention to both a liquid crystal display device and an organic electroluminescence display is demonstrated. In the case of an organic electroluminescence display, the organic electroluminescent layer is previously formed in one board | substrate to which it adheres. In the case of a liquid crystal display, however, liquid crystal is injected into the cell space before or after encapsulation of the substrate. Since injection of these liquid crystals is common to each structural example, it demonstrates here.
[78] In the method of inject | pouring a liquid crystal after sealing, the sealing material is apply | coated to one board | substrate of two board | substrates to which it adheres, after attaching both board | substrates, the cell gap of a cell space is determined, and a sealing material is hardened. After hardening of a sealing material, the sealing material is cut | disconnected, liquid crystal is inject | poured from the cutting opening (liquid crystal injection opening), and the cutting opening is sealed. In addition, you may provide a liquid crystal injection opening in advance, when apply | coating a sealing material.
[79] On the other hand, the liquid crystal injection before encapsulation is possible because a sealing material is developed that does not adversely affect the liquid crystal even when it comes into contact with the liquid crystal. As such a sealing material, for example, the trade name "World Lock No." sold by Kyoritsu Chemical Co., Ltd. 717 ”. This shielding material contains a special modified acrylate as a main component and has a moderate degree of viscosity. This sealing material is apply | coated to one board | substrate, the closed loop wall for cell space is formed, and a liquid crystal is dripped in the inner region of the wall. After the liquid crystal is filled in the cell space region surrounded by the wall of the sealing material, the cell gap is determined and the two substrates are attached. Thereafter, the sealing material is cured. According to this pre-sealing injection method, there is a merit that the sealing material does not require the formation of the liquid crystal injection hole or the sealing of the injection hole.
[80] In addition, the figure of the liquid crystal injection apparatus required for the liquid crystal injection process, and the figure which shows the process of forming an injection hole, sealing, etc. are abbreviate | omitted.
[81] <1> explanation about attachment method
[82] <1st embodiment>
[83] 1 is a diagram illustrating a first embodiment of the present invention. FIG. 1A is a schematic plan view showing a state of looking down a substrate in a display panel substrate attaching apparatus (hereinafter abbreviated as attaching apparatus) from above. It is a figure which shows the cut surface of the cross section by the B-B broken line. The first (upper) and second (lower) plates, and their operating mechanisms, which are actually present to explain the arrangement relationship between the substrate and the spacer and are also used in the attachment process, are not shown unless specifically required. (It is the same also in each following drawing.)
[84] With reference to FIG. 1A and 1B, 1st Embodiment of this invention is described. The 1st board | substrate 10 and the 2nd board | substrate 12 are faced and aligned, similarly conventionally. While maintaining this alignment state, these board | substrates are hold | maintained opposingly spaced apart. In order to form the unattended region 30 between the inner edge region between the first substrate 10 and the second substrate 12, the second substrate is prepared in advance as before. The flexible sealing material 14 is arrange | positioned. The leaving area 30 is an empty space which is not used for display. In this case, as is well known, the opposing surfaces of the substrates 10 and 12 are substantially parallel to each other.
[85] On the other hand, the spacer 20 is attached to the spacer operating mechanism 22 in advance. In the left area 30 between the first substrate 10 and the second substrate 12, a spacer 20 having a thickness substantially equal to a predetermined cell gap d is preferably provided. It is operated by 22) and inserted. After that, a conventionally known pressing means, for example, a servomotor or a pressure cylinder (not shown), is used in the same manner as the conventional one, so that the first substrate 10 and the second substrate 12 are disposed between opposite parallel surfaces. Press to access. By this pressing, both substrates 10 and 12 are parallel with the spacers 20, and the height of the sealing material becomes equal to the predetermined cell gap d so that the cell gap d is determined. Subsequently, after hardening the sealing material in the same manner as before, the spacer operating mechanism 22 is operated to pull out the spacer 20.
[86] In the structural example of FIG. 1, the cell inner part 32 is a rectangular space area | region, the sealing material 14 is formed as a rectangular wooden fence or wall which encloses this cell inner part 32, and is left unattended area | region 30 is a space area around the outer side of this sealing material 14.
[87] In this configuration example, the spacer 20 is a block-shaped tetrahedron block, and the thickness for determining the distance between the substrates is constant. In this structural example, since a rectangular board | substrate is used, the spacer of the same magnitude | size is inserted simultaneously from four directions of north, west, north, and west between board | substrates with a space | interval wider than the thickness of a spacer.
[88] In this embodiment, a glass substrate, a plastic substrate, an epoxy resin substrate, etc. can be applied to the 1st board | substrate 10 and the 2nd board | substrate 12, For example, it is not limited to these at all.
[89] In particular, in the case where the first substrate 10 and the second substrate 12 are glass substrates commonly used, conventionally, granular spacers made of resin, silica, or the like are sprayed on the entire surface of the cell inner 32 region. The process was needed. However, such a process is not necessary if the properties of the glass substrate, the liquid crystal medium, etc. are improved in the future due to the demand for improving the display quality of the liquid crystal, and the arrangement by spraying the spacer into the cell is not essential. Will not.
[90] Therefore, this embodiment is suitable not only for attaching the organic EL panel substrate but also for attaching the liquid crystal panel substrate without spacers inside the cell. Moreover, although the example which manufactures one display panel from a set of board | substrate was shown in figure, it is not limited to this, For example, acquire 4 sheets, acquire 8 sheets,. It can also be applied to multi-sided acquisition such as acquisition of 80 sheets (the same applies to the drawings below).
[91] Moreover, although the example which provided the sealing material 14 to the 2nd board | substrate 12 was demonstrated in this example, it is not limited to this, You may arrange | position and install on the 1st board | substrate 10. FIG.
[92] As the sealing material 14, it is preferable to use an ultraviolet curable and / or thermosetting sealing material which has been used conventionally, for example, glass fiber fibers as a spacer, but is limited to these within a range that does not impair the object of the present invention. It is not.
[93] As described above, the sealing material 14 is arranged in such a manner as to form a continuous wall without partitioning the cell inner portion 32 (see FIGS. 1A and B). In addition, in consideration of the fact that the sealing material is pressurized and the cell gap is determined, it is preferable that the sealing material be arranged with a thickness slightly larger than the predetermined cell gap d. However, if it is known in advance that the sealing material has properties such as expansion in the curing step, it is absent in the limit.
[94] The hardening of the sealing material 14 is carried out by ultraviolet irradiation in the case of an ultraviolet curable sealing material according to a conventional method, heating in the case of a thermosetting sealing material, and in the case where it is necessary to combine two or three or more kinds of sealing materials, respectively, necessary means and processes. May be performed in combination.
[95] In the case of manufacturing a liquid crystal display device using a glass substrate or the like, spacer particles are first sprayed on the inner surface of the substrate to be the cell inner portion 32 in advance. After that, the first and second substrates are placed facing each other for positioning. Subsequently, before attaching the first substrate 10 and the second substrate 12, the substrate in which the liquid crystal medium becomes the cell inner portion 32 of the second substrate 12 in a liquid crystal injection device (not shown). Inject inside. Thereafter, each step of inserting the spacers used in the present invention between the substrates, cell gap crystals, hardening of the sealing material, and extracting the spacers is performed. Embodiments in this case are particularly suitable for being applied to a liquid crystal panel manufacturing process including a so-called "pre-attachment injection" process, which is expected to become mainstream in the liquid crystal panel manufacturing process in the future. However, it goes without saying that the liquid crystal medium is also suitable for use in the conventional substrate attaching process in which the liquid crystal medium is injected after the adhesion of the first and second substrates.
[96] The spacer 20 has a thickness substantially equal to a predetermined cell gap d. Here, the term "substantially equivalent to a predetermined cell gap" means that the cell gap is equivalent to the cell gap when used in the above-described substrate attaching process, for example, under conditions such as atmospheric pressure, humidity, temperature and self-irradiation. It means.
[97] That is, for example, it does not mean that the cell gap d must be completely equivalent to the conditions in the manufacturing step of the spacer 20 itself. Therefore, in the manufacture of the spacer 20 itself, the cell gap d and the predetermined cell gap d under the environmental conditions such as atmospheric pressure, humidity, and temperature, and the ultraviolet ray irradiation conditions, etc., which the spacer 20 is used in the attachment process. It is necessary to design and manufacture the spacer 20 itself in order to be equal. In other words, the thickness of the spacer is such that the cell gap after the spacer is hardened and the cell gap after pulling out the spacer becomes a value as designed.
[98] Preferably, since the thickness of this spacer depends on the value of the cell gap, a suitable value may be determined according to the design. In the case of the cell gap of the present display device, for example, the thickness is suitably set to 30 µm or so. .
[99] The shape of the spacer 20 in this specification can be suitably changed in the range which does not impair the objective of this invention. For example, in the drawing, the spacer 20 is shown as a representative state of supporting the first substrate 10 and the second substrate 12 in the plane, respectively, for example, having a plurality of teeth in the shape of a comb. It is also possible to take a state of supporting the upper and lower substrates by lines or dots. For example, it is also possible to take a state in which these plurality of teeth are operated independently of each other.
[100] The material of the spacer 20 can be appropriately selected within a range not impairing the object of the present invention. Preferably, the material is, for example, pure nickel.
[101] And the manufacturing method of the spacer 20 is preferably by electroforming.
[102] The spacer operating mechanism 22 is shown in Figs. 1A and 1B as a block, and the mechanism 22 is configured to operate the spacer 20 in the direction of inserting or extracting the spacer 20. In this case, any suitable configuration suitable for the design may be used. For example, the spacer operating mechanism 22 may be appropriately selected within a range that does not impair the object of the present invention. Preferably, for example, a micromotor, a micro manipulator, and the like can be given.
[103] 1A and 1B illustrate a state in which the spacer 20 is inserted from four directions of east, south, west and north in the vertical direction with respect to the end edge of the substrate to support the first substrate 10 and the second substrate 12. As long as the quality of the display panel is not impaired, for example, the substrate may be supported by inserting the spacer only from two opposite directions. Alternatively, the substrate may be supported by inserting a spacer into a plurality of corner portions of the substrate, for example, four or two opposing standing regions.
[104] As a means for determining the cell gap, a means for pressurizing the substrate is used. In the above configuration example, a method of mechanically pressurizing a substrate with a servomotor or a pressurized cylinder to be brought into contact with the spacer is used. Instead of the servomotor or the pressurized cylinder, for example, pneumatic pressure by compressed air or any other suitable means is used. Also good.
[105] By this structure, a cell gap can be controlled correctly by a simple process. In addition, in the case of injecting before attaching the liquid crystal medium, there is no need for the sealing step of the injection hole, which is conventionally required. In addition, since the airtightness is increased in the cell, leakage of the liquid crystal medium can be prevented, and as a result, an improvement in the production rate is expected.
[106] <2nd embodiment>
[107] Fig. 2 is a diagram showing a second embodiment of this invention. 2A is a schematic plan view showing a state where the substrate attaching apparatus is viewed from above. It is a figure which shows the cut surface of the cross section by the B-B broken line in FIG. 2A.
[108] With reference to FIG. 2A and FIG. 2B, 2nd Embodiment of this invention is described. The example described here is a method of attaching the display panel substrate in the airtight processing chamber 40. That is, this processing chamber 40 is mainly comprised by the 1st (upper) surface plate 42 and the 2nd (lower) surface plate 44. As shown in FIG. The second surface plate 44 has a container shape. The first surface plate serves as a cover of the container, and both of them are hermetically sealed. A vacuum exhaust machine is coupled to the first surface plate, so that the inside of the processing chamber can be evacuated. Moreover, the process chamber is comprised so that various board | substrate drive and spacer drive which were already demonstrated inside can be performed.
[109] In this processing chamber, the spacer 20 is attached to the spacer operating mechanism 22 in advance.
[110] In the processing chamber 40 including the first (upper) surface plate 42, the processing chamber 40 is similar to the first substrate 10 and the second substrate (as described in the first embodiment). After the alignment of 12), both substrates are held. The sealing material 14 is arrange | positioned previously in advance so that the leaving area | region 30 may be formed between the inside of the edge part on one of the 1st board | substrate 10 and the 2nd board | substrate 12.
[111] After such extension, in this embodiment, the inside of the process chamber 40 is evacuated and vacuum is set from normal pressure. This vacuum evacuation process is performed using the process chamber vacuum pump 52 connected to the process chamber air supply and exhaust mechanism 48 provided in the 1st table via the piping provided with the pressure control valve not shown. As in the case of the first embodiment, a spacer having a thickness substantially equal to the predetermined cell gap d in the leaving area 30 between the first substrate 10 and the second substrate 12. After inserting (20), the cell gap d is determined by pressing the first surface plate 42 or the second surface plate 44 by operating a servomotor or a pressure cylinder (not shown). Subsequently, after hardening the sealing material 14 similarly to the case of 1st Embodiment, the spacer 20 is pulled out.
[112] In the present specification, the process chamber 40 also includes a space (hereinafter, referred to as a cell internal predetermined space) that is supposed to be the cell interior 32 before the sealing material 14 is cured, before the substrate is sealed.
[113] In this embodiment, although the process chamber 40 is formed with the 1st surface plate 42 and the 2nd surface plate 44, the 1st surface plate 42 and the 2nd surface plate 44 are connected. The part to be mentioned may be arbitrary suitable adhesive agents, such as resin, and may use other members, such as O-rings, for example.
[114] Moreover, in this embodiment, the process chamber 40, i.e., the state in which the predetermined space inside the cell and the outside processing chamber space is shown as a vacuum, the purpose is to vacuum the predetermined space inside the cell, so that only the predetermined space inside the cell is made vacuum. You may take some means to do it.
[115] Here, in this specification, "normal pressure" shows the atmospheric pressure surrounding the apparatus of this invention, and the term "vacuum" means that pressure was lower than atmospheric pressure by sucking air. The degree of vacuum is compared by the suction force when exhausting air. The degree of vacuum is appropriately selected according to the purpose.
[116] With this configuration, in particular, in the manufacturing process of an organic EL panel in which the material used for its manufacture is weak to moisture and oxygen, it is possible to perform accurate cell gap control in a simple process while excluding these factors that have a great influence on the panel quality. It becomes possible. In addition, since the sealing material is not required to be installed by installing air holes as in the prior art, it becomes possible to reduce the time, cost, and the like required for quality control of the manufactured panel. In addition, the airtightness of the panel itself increases, contributing to improvement of display quality and product life.
[117] 3 is a diagram illustrating a modification of the second embodiment of the present invention. 3A is a schematic plan view showing a state where the substrate attaching apparatus is viewed from above. It is a figure which shows the cut surface of the cross section by the B-B broken line in FIG. 3A.
[118] It demonstrates with reference to FIG. 3A and b. As in the case of the second embodiment, the spacer 20 is attached to the spacer operating mechanism 22 in advance in the processing chamber 40. The sealing material 14 is arrange | positioned so that the leaving area 30 may be formed between the 1st board | substrate 10 and the inner side of the edge part of the 1st board | substrate 10 and the 2nd board | substrate 12. The substrate 12 of 2 is aligned and maintained. After that, the processing chamber 40 including the first surface plate 42 and the second surface plate 44 is connected to the processing chamber exhaust port 48 via a pipe having a pressure regulating valve (not shown). By using the pump 52 to suck air, the process chamber 40 is vacuumed from normal pressure. Subsequently, a spacer 20 having a thickness substantially equal to a predetermined cell gap d is inserted into the leaving area 30 between the first substrate 10 and the second substrate 12.
[119] In this modification, in particular, the processing chamber 40 which becomes a vacuum, ie, the space inside the cell and the space other than the predetermined space, is returned to the normal pressure while maintaining the pressure difference between these spaces to be substantially zero.
[120] As in the case of the second embodiment, the cell gap d is determined by pressing the first substrate 10 and the second substrate 12 with a servomotor or a pressure cylinder (not shown), and subsequently, the sealing material. After hardening (14), the spacer 20 is pulled out.
[121] In this modification, the reason for adding the step of returning to normal pressure while maintaining the atmospheric pressure of the predetermined space inside the cell and the processing chamber space outside thereof is substantially equal is as follows. The rapid inflow of air into the processing chamber 40 causes a difference in atmospheric pressure between the predetermined space inside the cell and the processing chamber space outside the cell. When the gap between the substrates is sealed while the pressure difference remains, the substrate is bent, and therefore, the cell gap d becomes different from, for example, the cell center portion and the peripheral edge portion. Therefore, it is in order to prevent this pressure difference from leaking, and to return to normal pressure in order to prevent the occurrence of the curvature of this board | substrate.
[122] It is preferable that the process of returning from a vacuum to normal pressure is performed in the state which the 1st board | substrate 10 and the 2nd board | substrate 12 approached.
[123] At this time, the air supplied is preferably purified through a filter or the like.
[124] As described in the description of FIG. 2, any means for vacuuming only the predetermined space inside the cell may be provided.
[125] This configuration makes it possible to perform accurate cell gap control in a simple process even in a manufacturing process of a display panel using a flexible substrate, for example.
[126] Moreover, in the structural example shown to FIG. 3A and B, the 1st board | substrate 10 and the 1st board | substrate during the process from alignment of the 1st board | substrate 10 and the 2nd board | substrate 12 to completion of hardening of a sealing material are completed. The second substrate 12 is held in close contact with the first surface plate 42 and the second surface plate 44, respectively. The close contact between the substrate and the surface plate is performed between the outer surfaces on the opposite sides of the inner surfaces of the substrates facing each other and the respective contact surfaces of the surface plates 42 and 44 respectively facing the outer surfaces. In order to achieve this close contact, the substrate holding supply and discharge mechanism 46 provided on the surface plates 42 and 44 passes through a pipe having a pressure regulating valve (not shown here) to the substrate holding vacuum pump 50. The substrate is evacuated and evacuated by a vacuum exhaust machine. These substrate holding supply / exhaust mechanisms 46 are vacuum exhaust mechanisms for sucking and holding the first and second substrates 10 and 12, respectively, on the surface plates 42 and 44, respectively.
[127] The degree of vacuum for holding the substrate may be sufficient to hold the substrate, regardless of the need for vacuum exhaust of the processing chamber 40. When it is necessary to make the process chamber 40 into a vacuum, the degree of vacuum is adjusted so that the suction force for exhausting air is disposed upward in the gravity direction, and in this configuration example, the first substrate 10 is not particularly dropped. It needs to be adjusted.
[128] This configuration can be applied to all of the embodiments of the present invention as well as the modification of the second embodiment.
[129] In addition, the size and installation quantity of the supply and discharge mechanism can be arbitrarily changed by the desired panel specification.
[130] This configuration can effectively prevent warpage of the substrate itself while holding the substrate.
[131] However, as shown in FIGS. 3A and 3B, when the process chamber 40 is vacuumed, the suction force of air for vacuuming the process chamber 40 is determined by the first substrate 10 and the second substrate 12. It is preferable to set smaller than the suction force of the air for bringing the) into close contact.
[132] By this structure, the 1st board | substrate 10 and the 2nd board | substrate 12 can be stably supported, Furthermore, the 1st board | substrate 10 supported by the 1st surface plate 42 falls, Since the second substrate supported by the second surface plate 44 can be prevented from shifting, it is possible to accurately control the cell gap.
[133] <Third embodiment>
[134] 4 is a diagram for explaining a third embodiment of the present invention, and is a schematic diagram showing a cut surface of a cross section of a substrate in the attachment device. The plan view of the substrate overlooking from above is omitted as it becomes the same as in FIG. 1A.
[135] A third embodiment of this invention will be described with reference to FIG. 4. In this configuration example, the spacer 20 is a stacked spacer composed of three or more spacer members, that is, the first spacer member 20a, the second spacer member 20b, the third spacer member 20c, or the like. . These laminated spacers preferably have the same thickness, but may be different. Each spacer member is superimposed so as to be separated from each other. However, before the spacer insertion step, the end portions of the first spacer member 20a, the second spacer member 20b, and the third spacer member 20c are separately attached to each spacer operating mechanism 22a, 22b, 22c in advance. Let it be.
[136] These spacer members 20a, 20b, and 20c are inserted between the substrates in an overlapping state. As mentioned above, after hardening of the sealing material, the cell gap d is kept constant. Therefore, after sealing hardening, it is possible to pull out the spacer member located in the middle of the spacer obtained by overlapping the spacer member to the cell gap d without interruption.
[137] Therefore, in this configuration example, the spacer member, i.e., the first spacer member 20a and the third spacer member 20c, which are supported in contact with the first substrate 10 and the second substrate 12, is left, that is, In a state where the upper and lower substrates are supported by the spacer member, the spacer member positioned in the center portion, that is, the second spacer member 20b, is pulled out by operating the second spacer member operating mechanism 22b. Subsequently, by operating the remaining spacer member, that is, the first spacer member 20a and the third spacer member 20c, by operating the first spacer member operating mechanism 22a and the third spacer member operating mechanism 22c, Pull out each one. In this way, the cell gap can be controlled by the total of the thicknesses of the plurality of spacer members before being pulled out.
[138] Here, in the process of extracting a part of the spacer member, the spacer member supporting the substrate is not limited to one sheet but may be supported by two or three or more spacer members. The same applies to the spacer member substantially positioned at the center. Therefore, "substantially positioned at the center" means not only a spacer member including a center line as a whole spacer, but also a spacer member not supported in contact with upper and lower substrates.
[139] When pulling out the spacer member located at the center portion, that is, the second spacer member 20b, it is necessary to pay close attention to the substrate in a horizontal direction with respect to the substrate.
[140] When the other spacer member, i.e., the first spacer member 20a and the third spacer member 20c, is pulled out, the sealing member is already cured, so it may be pulled out horizontally with respect to the substrate so as not to damage the substrate. The second spacer member 20a supporting the first substrate 10 positioned on the upper side is located at the lower side in the space of the unattended region 30 at the lower side or the pulling direction at an oblique lower side and the second side positioned below the same side. The third spacer member 20c supporting the substrate 12 may be taken out after offsetting upward or obliquely upward in the space of the left area 30, respectively.
[141] In the spacer or the plurality of spacer members of the present invention, a coating such as a silicon thin film or the like is devised to protect the substrate or to improve the sliding of the spacer members within a range that does not impair the object of the present invention. You may be.
[142] In manufacturing the spacer member itself, the precautions are the same as in the above-described embodiment. That is, it may be designed and manufactured to have a predetermined thickness under the conditions actually used.
[143] In the case of the laminated spacer formed by the overlap of the spacer members, the thickness of each spacer member is measured in advance, and the total thickness of the overlap is also determined. The total thickness is configured to match the design cell gap. This allows the spacer thickness to be more accurately adjusted to the value of the cell gap in the design.
[144] In addition, in the case of using a stacked spacer, the spacer can be pulled out without damaging the substrate surface, so that the cell gap can be precisely controlled by a simple process, thereby obtaining a panel having excellent quality.
[145] In addition, as shown in Fig. 4, in the embodiment of the present invention, it is preferable that the spacer is composed of three spacer members, and the cell gap is controlled by the total of the thicknesses of the three spacer members before being pulled out.
[146] 5A and 5B are schematic views showing a modification of the third embodiment of this invention. In addition, since the top view which looks down the board from the upper surface becomes substantially the same as FIG. 1A, it abbreviate | omits.
[147] This will be described with reference to FIGS. 5A and 5B. This embodiment is an example of using a spacer with an auxiliary spacer in which an auxiliary spacer member 21 is added to a spacer having a thickness substantially equal to a predetermined cell gap d. When the thickness of the auxiliary spacer member 21 is, for example, H, the spacer with the auxiliary spacer is inserted between the substrates, thereby securing a substrate gap, i.e., d + H, larger than the predetermined cell gap d. Subsequently, the auxiliary spacer member 21 is pulled out before hardening of the sealing material 14, and the substrate is pressed to finely adjust to a predetermined cell gap d. After that, the sealing material 14 is cured to control the cell gap.
[148] In this case, the spacer with the auxiliary spacer may be one lump-shaped spacer whose thickness is substantially equal to the cell gap d. Alternatively, two or more spacer members whose total thickness is substantially equal to the predetermined cell gap d, that is, the first spacer member 20a, the second spacer member 20b, the third spacer member 20c, and the like overlap. It may be a laminated spacer formed from joining.
[149] This auxiliary spacer member is preferably arranged so as not to contact the upper and lower substrates as shown in Fig. 5A.
[150] However, the state of this invention is not limited to this. In particular, in the manufacturing process of the liquid crystal display device, when this state is applied to a deposition method including a pre-injection injection process of the liquid crystal medium, it is necessary to maintain the predetermined space inside the cell at a high vacuum.
[151] Here, high vacuum refers to the degree of vacuum sufficient to inject the liquid crystal medium before attachment.
[152] At this time, when the first substrate 10 is held by bringing the contact surface between the first substrate 10 and the first surface plate 42 into a vacuum, the suction force of the air for holding the same is applied to the process chamber 40, that is, If it is equal to the suction force of air for making a predetermined space inside a cell into a vacuum, or it becomes small, there exists a possibility that the fall of the 1st board | substrate 10 may be induced. Thus, in this case, as shown in Fig. 5B, the holding means for arranging the auxiliary spacer member 21 at a position that can be supported in contact with the first substrate 10 and vacuuming between the substrate and the surface plate; It is good to make it the structure used together.
[153] This configuration example is shown in Fig. 5B. According to the structural example of this embodiment, the total thickness of the spacer with an auxiliary space is made larger than a cell gap first. The spacer with the auxiliary spacer is set at a predetermined position in the processing chamber. On the other hand, the first and second substrates are vacuum-extracted between the outer surfaces on opposite sides of the inner surfaces of the first and second substrates facing each other and the contact surfaces of the first and second surface plates respectively facing the outer surfaces. Are maintained in close contact with the first and second surface plates, respectively. Next, the processing chamber is vacuumed from normal pressure. An auxiliary spacer member is inserted between the substrates so that the auxiliary spacer member contacts the first substrate to support the substrate.
[154] The auxiliary spacer member added here is not limited to one but may be plural.
[155] Therefore, when arranging a plurality of auxiliary spacer members to support the upper substrate, it is necessary to pull out the auxiliary spacer member not in contact with the upper substrate, and finally pull out the auxiliary spacer member in contact with the upper substrate. desirable.
[156] In FIG. 5B, the auxiliary spacer member 21 is shown to be shorter than the other spacer members for easy understanding, but the present invention is not limited to this and may be the same as or longer than the other spacer members within the scope of not impairing the object of the present invention.
[157] In the state where the cell internal predetermined space needs to be vacuum, the auxiliary spacer member 21 may be shaped like a comb comb, for example, to secure the gap as a supply / exhaust mechanism.
[158] In this way, the structure using the auxiliary spacer can keep the upper and lower substrates close to each other, so that the attachment position can be determined more accurately.
[159] In particular, in the case where the contact surface between the substrate and the surface plate is kept in a vacuum, and a predetermined space inside the cell is applied in a vacuum, particularly in a high vacuum, the substrate is firmly supported in a state where the space between the substrates is narrowed by the spacer and the surface plate. Since it can be set as this, especially the precision of the attachment of a flexible board | substrate can be improved.
[160] In addition, in order to manufacture a liquid crystal display device requiring a high vacuum in a predetermined space inside a cell, when a pre-attachment injection process is applied, an auxiliary spacer member disposed in contact with the upper substrate in the direction of gravity may be used. By supporting the holding, it is possible to prevent the substrate from falling. In addition to this, not only the substrate is held but also the curvature of the substrate itself can be suppressed by making the vacuum between the substrate and the surface plate more stable cell gap control can be realized.
[161] Moreover, in embodiment of this invention, it is preferable that a sealing material is an ultraviolet curing sealing material, and the process of hardening a sealing material is performed by ultraviolet irradiation.
[162] Moreover, in embodiment of this invention, it is preferable that a sealing material is a thermosetting sealing material, and the process of hardening a sealing material is performed by heating.
[163] As described above, in the case where the sealing material is an ultraviolet curable type, an ultraviolet irradiation device may be provided using the first surface plate and / or the second surface plate as a quartz surface plate.
[164] <2> Description of attachment device
[165] Hereinafter, the structural example of the apparatus for implementing the above-mentioned method is demonstrated.
[166] The attaching device of the present invention is an attaching device for a display panel substrate having a first surface plate 42 and a second surface plate 44 holding the first substrate 10 and the second substrate 12, respectively. . The apparatus comprises a spacer 20 having a thickness substantially equal to a predetermined cell gap d, and an actuating means for operating the spacer 20 to insert or pull the spacer 20 between the substrates, that is, the spacer. It has an actuating mechanism 22 and further comprises as hardening means for hardening the sealing material 14, not shown.
[167] Here, as in the case of the prior art described with reference to FIG. 11, the apparatus of the present invention has a first drive plate and a second plate, each having a drive mechanism for adjusting the θ axis in addition to the X axis and the Y axis. Lifting means for raising and lowering the first surface plate 42 and / or the second surface plate 44 is provided. Furthermore, in order to determine the cell gap d, it has means for pressurizing a substrate such as a pressurized cylinder or a servomotor and a surface plate. Since each of these means is a rubbing means, the detailed structure and operation | movement abbreviate | omit the description.
[168] In the attaching device of the present invention, in order to prevent the substrate from being charged and destroyed, it is preferable that all of the portions in contact with the substrate are formed of an insulating material.
[169] Moreover, it is preferable to equip the attachment device of this invention with an electrostatic removal means such as an ion shower. Alternatively, charging of the substrate can be effectively prevented by applying, for example, a solvent such as alcohol to the inner wall of the processing chamber.
[170] Moreover, according to the attachment apparatus of this invention, it is preferable to include the board | substrate holding means 60 which keeps a board | substrate in close contact with a surface plate, respectively, as shown in FIG. 3B. The substrate holding means 60 is, for example, an outer surface of the first substrate 10 and the second substrate 12 and a first surface plate, that is, the upper surface 42 and the first surface, respectively, facing the outer surface. The first substrate 10 and the second substrate 12 can be brought into close contact with the surface plate while the two surface plates, that is, the contact surfaces of the lower surface plate 44 are vacuumed, so that these substrates can be held. The substrate holding means 60 is a platen 42 and 44 and a vacuum exhaust machine. The through hole 46 provided in each plate 42 and 44 serves as a supply / exhaust mechanism, for example, a pressure regulating valve. And a substrate holding vacuum pump 50 connected through a pipe (not shown) provided.
[171] Moreover, according to the attachment apparatus corresponding to FIG. 3 of this invention, the process chamber compartment forming means 58 for partitioning the process chamber 40 for attachment, and the process chamber 40 from normal pressure to vacuum, or from vacuum to atmospheric pressure It is preferable to include the pressure adjusting means 62 for arbitrarily changing freely. This process chamber division means 58 is mainly comprised by the 1st and 2nd surface plates 42 and 44 in this structural example. Thus, the structure of the apparatus can be made compact by comprised the process chamber 40 by the platen 42 and 44. As shown in FIG.
[172] In this configuration example, the pressure regulating means 62 is a vacuum exhaust machine, and a through hole 48 provided in one surface plate, for example, the surface plate 42 is used as an air supply / exhaust mechanism. The process chamber vacuum pump 52 etc. which were connected through the provided piping (not shown) are included. The vacuum exhaust machine as this pressure adjusting means preferably shares a part of the configuration with the substrate holding means 60 described above.
[173] In addition, it is preferable that a means such as a filter is provided near the vacuum pump, for example, for removing dust, water, organic solvents, and the like.
[174] Furthermore, according to the attachment device corresponding to Fig. 4 of the present invention, the spacer 20 is formed of three or more spacer members, that is, a first spacer member 20a, a second spacer member 20b, and a third spacer member ( 20c) or the like to form a laminated structure. By operating each spacer member independently of one another, the total thickness of this spacer can be adjusted. In this case, the portions of the spacer members inserted between the substrates overlap each other, but the portions of the spacer member operating mechanisms 22a, 22b, and 22c are preferably spaced apart so that the respective spacer members can be taken out individually. . Moreover, you may contact each other, without spacing each other, but what is necessary is just to be able to pull out each sheet one by one.
[175] This spacer is preferably composed of three spacer members.
[176] Moreover, according to the attachment device of this invention, Preferably, a spacer can be comprised by one spacer member. In that case, the spacer may have a shape capable of changing the cell gap. A configuration example in this case will be described with reference to Figs. 6A and 6B.
[177] <4th embodiment>
[178] 6A and 6B are schematic views illustrating a fourth embodiment of the present invention, and are shown in a cut section of a cross section including a substrate and a spacer in the attachment device. In addition, since the figure which looks down on a board | substrate from upper direction becomes substantially the same as FIG. 1A, it abbreviate | omits.
[179] Referring to FIGS. 6A and 6B, the apparatus according to the fourth embodiment of the present invention has a thickness toward one of the ends of the side where the shape of the spacer is inserted between the substrate 10 and the substrate 12. It is provided with the wedge-shaped spacer 24 which is a wedge shape which decreases.
[180] 6A shows a plate-shaped spacer shape having a wedge shape in cross section as an example. According to this structural example, the spacer 24 is a tapered block-shaped block body. This block body is comprised integrally as the form of a triangular block combined with the block of a rectangular parallelepiped. The leading end of the triangular ridge is the insertion end of the block body, and the side opposite to the triangular square of the tetrahedron is attached to the spacer operating mechanism 22. In the structural example shown in FIG. 6A, the cross section of the triangular column may be a regular triangle or an isosceles triangle.
[181] As the spacer, the spacer shape can be changed within a range that does not impair the object of the present invention, such as using a plurality of pencil-shaped spacer members.
[182] For example, in the structural example of the spacer 24 shown to FIG. 6B, the side surface which contact | connects the 1st board | substrate 10 is a surface inclined so that the thickness of the spacer 24 may decrease as it goes to the front end. The side surface which contacts 2 board | substrates 12 is a horizontal plane.
[183] By the configuration of the tapered spacer, a plurality of desired cell gap control can be supported by one type of spacer. Since the spacer actuating mechanism 22 is also solved by one, the effect of excellent cost performance with respect to the manufacturing cost of a spacer itself and an operation cost can be acquired.
[184] <5th embodiment>
[185] 7 and 8 are schematic diagrams for describing the fifth embodiment of the present invention. 7A and 7B are views showing the substrate and the spacer in the attachment device in a cross section, and FIG. 7C is a schematic view showing a cross section for explaining the operating state of the rotating head 26a alone.
[186] FIG. 8A is a schematic plan view seen from above the variable thickness spacer 26 corresponding to FIG. 7A, and likewise FIG. 8B is a schematic plan view seen from above the variable thickness spacer 26 corresponding to FIG. 7B. C-C broken line in FIGS. 8A and 8B is a broken line for obtaining the cross section of FIGS. 7A and 7B.
[187] According to the apparatus of this embodiment, the thickness-variable spacer 26 includes a rotating head 26a whose longitudinal section is formed of a smooth elliptic curve. The rotary head 26a is configured to rotate about an appropriate point on the inside or the surface thereof. In the structural example shown to FIG. 7A and 7B, this rotating head part 26a has the shape of an ellipsoid column or a spheroid body. Moreover, this rotating head part 26a is comprised so that the periphery of a long axis or a short axis may be made centering on the long axis and short axis points of an ellipse.
[188] As the rotary head 26a rotates within the gap between the idle zones 30, the position of the surface of the rotary head 26a is in contact with the first substrate 10 and the second substrate 12. Since it changes, the cell gap d can be controlled.
[189] In the variable thickness spacer 26, the long axis of the longitudinal section of the rotary head 26a is freely rotated in the direction of the arrow shown in Fig. 7C by the rotary head operating mechanism 26b within the gap between the idle regions. Or, the structure which can mutually exchange short axis is preferable.
[190] As used herein, the &quot; terminated cross section &quot; refers to a cross section obtained by cutting the CCC dashed line from the upper direction downward to the spacer head 26a of the variable thickness spacer 26 in the upper direction as shown in FIGS. 8A and 8B. Display.
[191] Moreover, in this embodiment, not only the case where the long axis and the short axis of the cross section of the rotating head part 26a are completely replaced, but also the state in which the short axis or the long axis of the rotation head part is not perpendicular to the substrate but is inclined with respect to the substrate. Include.
[192] Here, the state in which the rotating head part 26a is a rugby ball-shaped three-dimensional member, and it makes them contact with a board | substrate by rotating is also included in the range which does not impair the objective of this invention.
[193] This configuration minimizes the contact surface between the substrate and the spacer, thereby reducing the possibility of damaging the substrate surface. If the rotating head 26a is capable of supporting the substrate in an inclined state, it is possible to cover a plurality of desired cell gaps in one type of spacer shape, thereby exhibiting excellent cost performance with respect to manufacturing cost and operation cost. .
[194] Furthermore, according to the attachment device of this invention, it is preferable that the upper surface plate and / or the lower surface plate are quartz plates, and further include an ultraviolet irradiation device as the curing means.
[195] Furthermore, according to the attachment device of the present invention, the upper surface plate and the lower surface plate may be a heating surface plate composed of metal.
[196] As described above, in each of the above-described embodiments, an example of manufacturing one display panel from one set of attachment substrates has been described, but the present invention is capable of separating a plurality of display panels from one set of attachment substrates. It can be easily understood that the substrate can be applied to the substrate.
[197] FIG. 9 is a diagram useful in explaining a cell gap when the present invention is applied to a multi-sided substrate.
[198] FIG. 10 is a diagram useful for explaining a cell gap when a conventional technique is applied to the same multi-sided substrate for comparison.
[199] The multifaceted substrate used here was, as one example, a square glass substrate of 400 mm x 400 mm. Eighty individual cells (or display areas (windows)) were partitioned, for example, from the substrates attached to these substrates. This cell is represented by 70. Each cell region is surrounded by a sealing material provided in a lattice shape. It represents 72 on behalf of sealing material. In this example, the cell shape was rectangular, the long side was 34.54 mm, and the short side was 25, 91 mm. These cells were arranged in a matrix of, for example, eight rows and ten columns, and the distance between the centers of the adjacent cells in the row and column directions was 40 mm.
[200] By measuring the cell gaps at a number of places of the one set of the attached substrates, an average value of each of the outer periphery (peripheral) region, the central region including the center point, and the four left, right, up and down regions on the center side was obtained.
[201] In FIG. 9 and FIG. 10, the outer circumferential region is a region surrounded by a dashed line and a broken line, the central region including the center point is an region surrounded by a two-dot dashed line, and each region of the four regions on the center side is broken and 2. Areas surrounded by dotted lines. The average value of the outer circumferential region is a, the average value of the central region is b, the average value of the upper right region is c, the average value of the upper left region is d, the average value of the lower right region is e, and the average value of the lower left region. Let f be
[202] In the case of the substrate (substrate shown in Fig. 9) attached with the spacer according to the present invention, a = 1.33mm, b = 1.32mm, c = 1.32mm, d = 1.32mm, e = 1.31mm and f = 1.31 mm. As can be understood from this result, the difference between the maximum cell gap and the minimum cell gap is 0,02 mm, and from this, the cell gap precision is extremely good. In this case, the spacers used were used as spacers of a single mechanism, as shown in FIG.
[203] On the other hand, in the case of the attached substrate (substrate shown in Fig. 10) obtained by a conventional method without using a spacer, a = 1.43mm, b = 1.31mm, c = 1.33mm, d = 1.34mm, e = 1.32 mm and f = 1.32 mm. As can be understood from this result, the difference between the maximum cell gap and the minimum cell gap is 0.11 mm, and from this, the cell gap precision is extremely poor.
[204] According to the method for attaching the display panel substrate of the present invention and the apparatus for implementing the same, the cell gap can be accurately controlled by a simple process. In addition, it is suitable for application to the attachment process including the process of injecting and transferring the liquid crystal medium and the organic EL panel attachment process, and eliminates the need for the conventional liquid crystal injection port encapsulation process, thereby contributing to the reduction of manufacturing cost and the improvement of panel quality. .

权利要求:
Claims (21)
[1" claim-type="Currently amended] In the method of attaching the display panel substrate,
(1) a step of aligning and holding the second substrate having the sealing material arranged so as to form an idle area between the first substrate and the inner edge regions of the end portions of the first and second substrates,
(2) inserting a spacer into the leaving area between the first and second substrates,
(3) pressing the first and second substrates to determine the cell gap,
(4) a step of curing the sealing material, and
(5) process of extracting the spacer
Method of attaching the display panel substrate comprising a.
[2" claim-type="Currently amended] The display panel according to claim 1, further comprising a step of bringing the processing chamber from normal pressure to vacuum between the step (1) and the step (2) when the attachment is performed in an airtight processing chamber. Attachment method of the substrate.
[3" claim-type="Currently amended] 3. The pressure difference between the predetermined space inside the cell in the processing chamber and the space outside the predetermined space is defined in the process chamber according to claim 2, wherein the process chamber in vacuum is formed between the process (2) and the process (3). A method for attaching a display panel substrate comprising the step of returning to normal pressure while maintaining substantially zero.
[4" claim-type="Currently amended] The method according to any one of claims 1 to 3,
Between the said process (1) and the said process (4), the outer surface on the opposite side of each of the inner side surfaces of the said 1st and 2nd board | substrate which mutually opposes, and the 1st and 2nd surface which face these outer surfaces, respectively, A method of attaching a display panel substrate, wherein the first and second substrates are held in close contact with the first and second surfaces, respectively, while the vacuum is removed between the contact surfaces of the surface plates.
[5" claim-type="Currently amended] 5. The method of claim 4, wherein when the adhesion is performed in the processing chamber, the suction force of air for making the entire process chamber into a vacuum is smaller than the suction force of air for bringing the first and second substrates into close contact. A method of attaching a display panel substrate.
[6" claim-type="Currently amended] The method according to any one of claims 1 to 5,
When the spacers are constituted by being separated from each other by three or more plural spacer members, the cell gap determined in the step (3) is adjusted by the total of the thicknesses of the plural spacer members.
The step (5) is carried out by first leaving a spacer member in contact with and supporting the first and second substrates, extracting the spacer member located substantially at the center, and then pulling out the remaining spacer member. A method of attaching a display panel substrate.
[7" claim-type="Currently amended] The cell gap according to any one of claims 1 to 6, wherein the spacer is formed of a tapered block-shaped spacer member whose thickness varies at a constant rate. A method of attaching a display panel substrate, wherein the display panel substrate is adjusted while being pulled out from the state where the spacer is inserted.
[8" claim-type="Currently amended] The method according to any one of claims 1 to 7,
By adding more auxiliary spacer members to the spacer, the total thickness of the spacer and the auxiliary spacer member is set to be larger than a predetermined cell gap,
In the step (2), the spacer with the auxiliary spacer member is inserted between the first and second substrates, and
After the step (2), before the step (3), by removing the auxiliary spacer member, fine adjustment is made to a predetermined cell gap.
[9" claim-type="Currently amended] The method of claim 2,
By adding more auxiliary spacer members to the spacer, the total thickness of the spacer and the auxiliary spacer member is set to be larger than a predetermined cell gap,
The first and second substrates are vacuum-extracted between the outer surfaces on opposite sides of the inner surfaces of the first and second substrates facing each other and the contact surfaces of the first and second surface plates facing the outer surfaces, respectively, by vacuum. The substrate is held in close contact with the first and second surface plates, respectively,
Performing the process of setting the process chamber to vacuum from normal pressure,
In the step (2), the spacer with the auxiliary spacer member is inserted between the first and second substrates so that the auxiliary spacer member is brought into contact with the first substrate. .
[10" claim-type="Currently amended] 10. The method of attaching a display panel substrate according to any one of claims 1 to 9, wherein the sealing material is cured by ultraviolet irradiation.
[11" claim-type="Currently amended] The method of attaching a display panel substrate according to any one of claims 1 to 10, wherein curing of the sealing material is performed by heating.
[12" claim-type="Currently amended] An apparatus for attaching a display panel substrate, comprising: a first surface plate and a second surface plate holding the first and second substrates, respectively;
A spacer having a thickness substantially equal to a predetermined cell gap,
And an actuating means for operating the spacer to insert the spacer between or between the substrates and a hardening means for curing the sealing material.
[13" claim-type="Currently amended] The vacuum cleaner according to claim 12, wherein the first and second substrates are vacuum-extracted between the outer surfaces on opposite sides of the inner surfaces facing each other and the contact surfaces of the first and second surface plates respectively facing the outer surfaces. And substrate holding means for holding the first and second substrates in close contact with the first and second surface plates, respectively.
[14" claim-type="Currently amended] The method according to claim 12 or 13,
Process chamber compartment forming means for compartmentalizing the process chamber for attachment;
A pressure adjusting means for arbitrarily changing the processing chamber from normal pressure to vacuum or from vacuum to atmospheric pressure, the process chamber compartment forming means being mainly constituted by first and second surface plates. Attachment device.
[15" claim-type="Currently amended] The method according to any one of claims 12 to 14,
When the spacer is composed of three or more spacer members,
The spacer has a lamination structure in which each spacer member is operated independently from each other so that the total thickness of the spacer can be adjusted.
[16" claim-type="Currently amended] The display panel substrate mounting apparatus according to any one of claims 12 to 15, wherein the spacer is composed of three spacer members.
[17" claim-type="Currently amended] The display panel substrate according to any one of claims 12 to 16, wherein the spacer has a shape capable of changing the cell gap when the spacer is constituted by one spacer member. Device.
[18" claim-type="Currently amended] 18. The display panel substrate attaching apparatus according to claim 17, wherein one end of the spacer inserted between the substrates has a wedge shape whose thickness decreases toward the tip.
[19" claim-type="Currently amended] 19. The spacer member according to any one of claims 12 to 18, wherein the spacer member comprises a rotating head having a longitudinal elliptic curve whose longitudinal section is smooth.
The rotating head portion has a shape in which the cell gap can be controlled in contact with the first and second substrates by rotating within the gaps in the unattended region.
[20" claim-type="Currently amended] 20. The display panel substrate according to any one of claims 12 to 19, wherein both or one of the first and second plates is a quartz plate, and the curing means is an ultraviolet irradiation device. Attachment device.
[21" claim-type="Currently amended] 21. The display panel substrate mounting apparatus according to any one of claims 12 to 20, wherein the first and second plates are heating plates made of metal.

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JP2002297049A|2002-10-09|

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JP3560587B2|2004-09-02|

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US20040227868A1|2004-11-18|

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引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
2001-01-25|Priority to JP2001016691

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2001-01-25|Priority to JPJP-P-2001-00016691

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2002-01-10|Priority to JPJP-P-2002-00003066

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2002-01-10|Priority to JP2002003066A

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2002-01-24|Application filed by 랜 테크니컬 서비스 가부시키가이샤

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2002-07-31|Publication of KR20020062851A

优先权:

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申请号 | 申请日 | 专利标题

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JP2001016691|2001-01-25|

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JPJP-P-2001-00016691|2001-01-25|

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JPJP-P-2002-00003066|2002-01-10|

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JP2002003066A|JP3560587B2|2001-01-25|2002-01-10|Display panel substrate bonding method and apparatus|