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    • 专利摘要:
    PURPOSE: Provided are resist compositions of the negative chemical amplification type for electron beams or X-rays with various properties including sensitivity, resolution, resist pattern, development defect, coating properties and solvent-solubility. CONSTITUTION: The negative resist composition to be irradiated with one of an electron beam and X ray comprises: (A) an alkali-soluble resin of the formula; (B) a compound capable of generating an acid upon irradiation with a radiation; (C) a crosslinking agent capable of crosslinking by the action of an acid; and (D) one of solvent mixtures (DI) and (DII): (DI) a solvent mixture containing at least one solvent selected from the group A below and at least one solvent selected from the group B below; and (DII) a solvent mixture containing at least one solvent selected from the group A below and at least one solvent selected from the group C below, wherein group A is a propylene glycol monoalkyl ether carboxylate; group B is a propylene glycol monoalkyl ether, an alkyl lactate, an acetic ester, a chain ketone and an alkyl alkoxypropionate; and group C is a gamma -butyrolactone, an ethylene carbonate and a propylene carbonate.
    公开号:KR20020018584A
    申请号:KR1020010053138
    申请日:2001-08-31
    公开日:2002-03-08
    发明作者:우에니시가즈야
    申请人:무네유키 가코우；후지 샤신 필름 가부시기가이샤；
    IPC主号:
    专利说明:

    Negative resist composition {NEGATIVE RESIST COMPOSITION}
    [1] The present invention relates to a negative resist composition which is preferably used in, for example, ultramicrolithography processes and other photographic processes for manufacturing VLSI (large capacity integrated circuits) or microchips. More specifically, the present invention relates to a negative resist composition capable of forming a very precise pattern using X-rays, electron beams, etc., and is particularly preferably used for microfabrication of semiconductor devices using high-energy rays such as electron beams. It relates to a negative resist composition.
    [2] The degree of integration of integrated circuits has been improved year after year, and in manufacturing semiconductor substrates such as VLSI, it is required to process ultrafine patterns to have line widths of 1/2 micron or less. In order to satisfy the necessity, the wavelength of use of the exposure apparatus used for photolithography is shorter, and far ultraviolet rays and excimer laser light (Xe Cl, KrF, ArF, etc.) are being examined. In addition, finer pattern formation has been reached using electron beams or X-rays.
    [3] In particular, the use of electron beams or X-rays, which are expected to be used in the next generation or the next generation of pattern forming technology, requires the development of negative resists for forming rectangular patterns with high resolution and high sensitivity.
    [4] In electron beam lithography, a resist material is exposed to an energy beam emitted from an electron beam accelerated in the process of colliding with atoms constituting the resist material to cause scattering. By using a highly accelerated electron beam, straightness is increased, the influence of electron scattering is reduced, and although a high resolution and rectangular pattern can be formed, on the other hand, the permeability of the electron beam is increased, and the sensitivity is lowered. Therefore, in electron beam lithography, the sensitivity and resolution / resist pattern are complementary, and therefore, it was a problem to make these factors somehow compatible.
    [5] In order to cope with such a situation, a chemical amplification resist using an acid catalyst reaction is mainly used for the purpose of improving the sensitivity. Such a negative resist includes a chemical amplification system containing an alkali-soluble resin, an acid generator and an acid crosslinking agent as main components. The composition is being used effectively.
    [6] Conventionally, various alkali-soluble resins have been proposed as chemical amplification negative resists. For example, Japanese Patent Application Laid-open No. Hei 8-152717 discloses a polyalkyl phenol which is partially alkyl ethered, and Japanese Patent Application Laid-open No. Hei 6-67431 and 10-10733 disclose a copolymer of vinylphenol and styrene. Novolak resin is disclosed in No. 2505033, and monodisperse polyvinylphenol is disclosed in Japanese Patent Application Laid-Open Nos. 7-311463 and 8-292559, respectively. However, in such alkali-soluble resins, sensitivity and resolution under irradiation with electron beams or X-rays Both sex / resist patterns could not be compatible.
    [7] In addition, various acid generators have been conventionally proposed as chemical amplification negative resists. For example, Japanese Patent Application Laid-open No. Hei 8-3635 discloses an organohalogen compound, Japanese Patent Application Laid-open No. Hei 2-150848, Japanese Patent Application Laid-Open No. 6-199770, iodonium salt and sulfonium salt, Japanese Patent Application Laid-open No. Hei 2-52348, In 4-367864 and 4-367865, acid generators containing Cl and Br are disclosed in Japanese Patent Application Laid-Open No. 4-210960, and 4-217249 are diazodisulfone, diazosulfone compound, and Japanese Patent Publication No. 4-210960. 226454 discloses a triazine compound, Japanese Patent Application Laid-Open No. 3-87746, 4-291259, 6-236024, and U.S. Patent 5344742, respectively, but a sulfonate compound is also disclosed. It was not possible to solve the trade-off of resolution / resist pattern.
    [8] In addition, as a crosslinking agent, conventionally, metharolmelamine, resol resin, epoxidized novolac resin, urea resin, and the like are used, but such crosslinking agents are unstable against heat and have poor storage stability when stored in the form of a resist solution. Also, under the electron beam irradiation, the required characteristics of the highly sensitive, high resolution and rectangular resist pattern could not be satisfied.
    [9] That is, a negative chemical amplification resist composition for electron beams or X-rays that satisfies all characteristics such as sensitivity, resolution, resist pattern, development defect, coatability, and solvent solubility is desired.
    [10] Accordingly, an object of the present invention is to solve the performance improvement and technical problems in the microfabrication of semiconductor devices using electron beams or X-rays, and also when using electron beams or X-rays, sensitivity and resolution, resist patterns, development defects, and coatings. It is to provide a negative chemical amplification resist composition for electron beams or X-rays that satisfies the properties of the properties and solvent solubility.
    [11] MEANS TO SOLVE THE PROBLEM The present inventors discovered that the objective of this invention was achieved by using the following specific composition, and completed this invention. That is, this invention has the following structures.
    [12] (1) (A) alkali-soluble resin, (B) a compound which can generate an acid when irradiated with radiation, (C) a crosslinking agent which can be crosslinked by the action of an acid, and (D) a mixed solvent (DI) A negative resist composition containing a mixed solvent of any one of (DII) and irradiated with any one of electron beams and X-rays:
    [13] (DI) a mixed solvent containing at least one solvent selected from the following group A and at least one solvent selected from the following group B, and
    [14] (DII) Mixed solvent containing at least one solvent selected from group A and at least one solvent selected from group C
    [15] Group A: propylene glycol monoalkyl ether carboxylate
    [16] Group B: propylene glycol monoalkyl ether, alkyl lactate, acetate ester, chain ketone and alkylalkoxypropionate
    [17] Group C: γ-butyrolactone, ethylene carbonate and propylene carbonate
    [18] (2) (A) an alkali-soluble resin, (B) a compound capable of generating an acid when irradiated with radiation, (C) a crosslinking agent that can be crosslinked by the action of an acid, and (D) a member selected from group A A negative resist composition containing a mixed solvent comprising at least one solvent, at least one solvent selected from group B, and at least one solvent selected from group C below, and irradiated with any one of electron beams and X-rays:
    [19] Group A: propylene glycol monoalkyl ether carboxylate
    [20] Group B: propylene glycol monoalkyl ether, alkyl lactate, acetate ester, chain ketone and alkylalkoxypropionate
    [21] Group C: γ-butyrolactone, ethylene carbonate and propylene carbonate
    [22] (3) The negative resist composition according to the above (1) or (2), wherein the resin (A) contains a structural unit represented by the following formula (1):
    [23]
    [24] In formula (1), R <1a> represents a hydrogen atom or a methyl group.
    [25] (4) The negative resist composition as described in said (1) or (2) whose said (A) resin is resin represented by following formula (2):
    [26]
    [27] In formula (2), R <1a> -R <5a> respectively independently represents a hydrogen atom or a methyl group. R 6a to R 11a are each independently a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, a hydroxy group or a -C (= O) OR 14a (R 14a is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms) Indicates a). R 12a represents —COOR 15a (R 15a represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms). 0 <l ≦ 100, 0 ≦ m <100, 0 ≦ n <100, 0 ≦ o <100, 0 ≦ p <100 and l + m + n + o + p = 100.
    [28] (5) The negative resist composition according to the above (1) or (2), wherein the compound (B) contains at least one compound represented by formulas (I) to (III):
    [29]
    [30] [In the general formula (I) ~ (III), R 1 ~ R 37 is a group represented by each individually a hydrogen atom, an alkyl group, an alkoxy group, a hydroxy group, a halogen atom, or -SR 38. R 38 represents an alkyl group or an aryl group. Two or more groups selected from R 1 to R 15 are bonded to each other by any one method of directly bonding at the terminal or indirectly through an atom selected from oxygen, sulfur, and nitrogen to form a ring structure. Also good. R 16 to R 37 may also form a ring structure in the same manner as described above, and R 28 to R 37 may also form a ring structure in the same manner as described above. X − is an anion of an acid selected from benzenesulfonic acid, naphthalenesulfonic acid and anthracenesulfonic acid, which are alkyl, alkoxy, acyl, acyloxy, sulfonyl, sulfonyloxy, sulfonylamino, aryl, aralkyl and alkoxy Having at least one organic group selected from the group consisting of carbonyl groups.]
    [31] (6) Said (1) or (2), The said (C) crosslinking agent contains 3-5 benzene ring atom groups in a molecule | numerator, molecular weight is 1200 or less, and hydroxymethyl in said 3-5 benzene ring atom groups And a phenol derivative having two or more substituents selected from the group consisting of alkoxymethyl groups.
    [32] (7) The negative resist composition according to the above (1) or (2), further comprising an organic basic compound.
    [33] (8) The negative resist composition according to the above (1) or (2), further comprising a surfactant containing at least one of a fluorine atom and a silicon atom.
    [34] (9) The negative resist composition as described in said (1) or (2) whose molecular weight distribution (Mw / Mn) of the said (A) resin is 1.0-1.4.
    [35] (10) The negative resist composition as described in said (1) or (2) whose weight average molecular weights (Mw) of the said (A) resin are 2000-9000.
    [36] (11) forming a resist film by applying the negative resist composition according to (1) or (2) on a substrate, irradiating any one of electron beams and X-rays to the resist film, and developing the resist film Pattern formation method comprising.
    [37] Hereinafter, the compound used for this invention is demonstrated.
    [38] [1] alkali-soluble resins used in the present invention
    [39] In this invention, alkali-soluble resin is used with a radiation sensitive acid generator etc. Alkali-soluble resin used with a radiation sensitive acid generator is resin insoluble in water and soluble in aqueous alkali solution.
    [40] As alkali-soluble resin used together with a radiation sensitive acid generator, a novolak resin, a hydrogenated novolak resin, acetone pyrogarol resin, poly-o-hydroxy styrene, poly-m-hydroxy styrene, Poly-p-hydroxystyrene, hydrogenated polyhydroxystyrene, halogenated or alkylated polyhydroxystyrene, hydroxystyrene-N-substituted maleimide copolymers, o / p- and m / p-hydroxystyrene copolymers, Some O-alkylates (e.g., 5-30 mole% O-methylated, O- (1-methoxy) ethylated, O- (1-ethoxy) ethylated to the hydroxy groups of polyhydroxystyrene , O-2-tetrahydropyranylide, O- (t-butoxycarbonyl) methylate, etc.) or some O-acylates (e.g., 5-30 mole%) to the hydroxy group of polyhydroxystyrene o-acetylate, (O- (t-butoxy) carbonylate, etc.), styrene-maleic anhydride copolymer, styrene-hydroxystyrene copolymer, α- Butyl styrene, but include a hydroxystyrene copolymer, carboxylated methacrylic resins, and derivatives thereof, but is not limited in this respect.
    [41] Particularly preferred other alkali-soluble resins are novolak resins and poly-o-hydroxystyrenes, poly-m-hydroxystyrenes, poly-p-hydroxystyrenes and copolymers thereof, alkylated polyhydroxystyrenes, polyhydrides. Some O-alkylated or O-acylates of oxystyrene, styrene-hydroxystyrene copolymers, or α-methylstyrene-hydroxystyrene copolymers.
    [42] The said novolak resin is obtained by carrying out addition condensation with aldehydes in the presence of an acidic catalyst with the following predetermined monomer as a main component.
    [43] Predetermined monomers include cresols such as phenol, m-cresol, p-cresol and o-cresol, 2,5-xylenol, 3,5-xylenol, 3,4-xylenol, 2, Alkyl phenols such as xylenols such as 3-xylenol, m-ethylphenol, p-ethylphenol, o-ethylphenol, pt-butylphenol, p-octylphenol and 2,3,5-trimethylphenol, p -Methoxyphenol, m-methoxyphenol, 3,5-dimethoxyphenol, 2-methoxy-4-methylphenol, m-ethoxyphenol, p-ethoxyphenol, m-propoxyphenol, p-prop Alkoxyphenols such as foxyphenol, m-butoxyphenol and p-butoxyphenol, bisalkylphenols such as 2-methyl-4-isopropylphenol, m-chlorophenol, p-chlorophenol, o-chlorophenol, di Although aromatic hydroxy compounds, such as hydroxy biphenyl, bisphenol A, phenylphenol, resorcinol, and naphthol, can be used individually or in mixture of 2 or more types, it is not limited to these.
    [44] Examples of the aldehydes include formaldehyde, paraformaldehyde, acetaldehyde, propionaldehyde, benzaldehyde, phenylacetaldehyde, α-phenylpropylaldehyde, β-phenylpropylaldehyde, o-hydroxybenzaldehyde, m-hydroxybenzaldehyde, and the like. p-hydroxybenzaldehyde, o-chlorobenzaldehyde, m-chlorobenzaldehyde, p-chlorobenzaldehyde, o-nitrobenzaldehyde, m-nitrobenzaldehyde, p-nitrobenzaldehyde, o-methylbenzaldehyde, m-methylbenzaldehyde, p-hydroxybenzaldehyde and acetal derivatives thereof such as p-ethylbenzaldehyde, pn-butylbenzaldehyde, perfural, chloroacetaldehyde and chloroacetaldehyde diethylacetal, and the like, but among these aldehydes, it is preferable to use formaldehyde.
    [45] These aldehydes are used individually or in combination of 2 or more types. As the acidic catalyst, hydrochloric acid, sulfuric acid, formic acid, acetic acid, oxalic acid and the like can be used.
    [46] The weight average molecular weight of the novolak resin thus obtained is preferably in the range of 1,000 to 30,000. If it is less than 1,000, the film decreases in the exposed portion, and if it exceeds 30,000, the developing speed decreases. Especially preferable is the range of 2,000-20,000.
    [47] Moreover, the weight average molecular weights of said polyhydroxy styrene, its derivatives, and copolymers other than a novolak resin are 2,000 or more, Preferably it is 2000-30000, More preferably, it is 2000-20000.
    [48] Here, "weight average molecular weight: is defined by the polystyrene conversion value of gel permeation chromatography.
    [49] The alkali dissolution rate of alkali-soluble resin is measured by 0.261N tetramethylammonium hydroxide (TMAH) (23 degreeC), and it is preferable that it is 20 microseconds / sec or more. It is especially preferable that it is 200 microseconds / sec or more.
    [50] Alkali-soluble resin especially preferable as alkali-soluble resin in this invention is resin containing the structural unit represented by the said General formula (1). In addition to the structural unit represented by General formula (1), the said alkali-soluble resin may also contain other repeating units. As such other copolymerization component, the repeating unit corresponding to the following monomer (4)-(7) is preferable.
    [51] Alkali-soluble resin containing the structural unit represented by General formula (1) used for this invention is radically polymerized with the following monomer (3) and (4)-(7) as needed, or obtained by the living anion polymerization method. Can be.
    [52]
    [53] In the above formula, R 1a to R 12a have the same meaning as described above.
    [54] Among the above monomers, when using a monomer having a hydroxyl group in a molecule, a method of protecting the hydroxyl group in advance and removing the protecting group after polymerization is preferable.
    [55] In the present invention, the content in the resin of the structural unit represented by the general formula (1) may be any amount as long as the effect of the present invention can be achieved. More specifically, it is preferably 30 to the total repeating unit. It is 100 mol%, More preferably, it is 50-90 mol%.
    [56] In the present invention, the alkali-soluble resin is preferably a resin represented by the general formula (2), but the effect of the present invention becomes more remarkable.
    [57] R <1a> -R <5a> of General formula (2) is a hydrogen atom or a methyl group. The alkyl group or alkoxy group having 1 to 4 carbon atoms represented by R 6a to R 11a , R 14a and R 15a may be linear or branched. Examples of the alkyl group include methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group and t-butyl group, and alkoxy group includes methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, Isobutoxy group and t-butoxy group.
    [58] R 16a may be substituted with 1 to 10 carbon atoms, and a branched or cyclic alkyl group (specifically, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, t-butyl group, cyclohexyl group and cyclohexylethyl group) , Phenoxyethyl group, etc.), an aryl group which may be substituted with 6 to 20 carbon atoms (specifically, there are phenyl group, toryl group, xylyl group, biphenyl group, naphthyl group, halogenated phenyl group, nitrophenyl group, etc.), or Aralkyl groups which may be substituted with 7 to 20 carbon atoms (specifically, benzyl group, phenethyl group, phenylpropyl group, etc.) are shown.
    [59] In general formula (2), l, m, o, and p each independently represent a molar ratio of the structural unit, although 0 <l ≤ 100, preferably 30 <l ≤ 100, more preferably 50 <l ≤90. For m, n, o, and p, 0 ≦ m, n, o, and p <100, preferably 20 ≦ m, n, o, p <70, and more preferably 30 ≦ m, n, o , p <50, and l + m + n + o + p = 100.
    [60] It is preferable that the weight average molecular weight of alkali-soluble resin obtained in this way is 1,000 to 30,000. If it is less than 1,000, the film | membrane reduction after development of an exposure part is large, and when it exceeds 30,000, the developing speed will fall. Moreover, the preferable thing is the range of 2,000-20,000.
    [61] The weight average molecular weight of alkali-soluble resin which is especially preferable at the point which a sensitivity becomes especially excellent is the range of 2,000-9,000, More preferably, it is the range of 2,500-9,000, More preferably, it is the range of 3,000-9,000.
    [62] The molecular weight distribution (Mw / Mn) of the alkali-soluble resin is preferably 1.0-1.5 (monodisperse polymer) because the developing residue becomes smaller. In particular, since the sensitivity becomes especially excellent, the molecular weight distribution (Mw / Mn) of alkali-soluble resin is 1.0-1.4, More preferably, it is 1.0-1.3, More preferably, it is 1.0-1.2.
    [63] Here, a weight average molecular weight is defined by the polystyrene conversion value of gel permeation chromatography.
    [64] In this invention, molecular weight distribution is 1.0-1.4. Alkali-soluble resin which is preferably 1.0-1.3, More preferably, 1.0-1.2 can be synthesize | combined by well-known living anion polymerization, and can also be obtained by molecular weight fractionation.
    [65] The living anion polymerization method is described in New Experimental Chemistry Lecture 19 (Maruzen) Polymer Chemistry (I) pages 59-73, and the molecular weight fractionation is in the New Experimental Chemistry Lecture 19 (Round) polymer chemistry (II) pages 522-527. It is described.
    [66] The alkali dissolution rate of alkali-soluble resin is measured by 0.261N tetramethylammonium hydroxide (TMAH) (23 degreeC), and it is preferable that it is 20 microseconds / sec or more. It is especially preferable that it is 200 microseconds / sec or more.
    [67] Although alkali-soluble resin which has a structural unit represented by said formula (1) may be used independently, it can be used together with other alkali-soluble resin. The use ratio can use up to 100 weight part of other alkali-soluble resin with respect to 100 weight part of alkali-soluble resin which has a structural unit represented by Formula (1). Below, the other alkali-soluble resin which can be used together is illustrated.
    [68] For example, novolac resins, hydrogenated novolac resins, acetone-pyrogarol resins, poly-o-hydroxystyrenes, poly-p-hydroxystyrenes, hydrogenated polyhydroxystyrenes, halogenated or alkylated polyhydroxystyrenes, Hydroxystyrene-N-substituted maleimide copolymers, o / p-hydroxystyrene copolymers, some O-alkylates (e.g., 5-30 mole% O-methylated to the hydroxy groups of polyhydroxystyrene) , O- (1-methoxy) ethylate, O- (1-ethoxy) ethylate, O-2-tetrahydropyranylide, O- (t-butoxycarbonyl) methylate, etc.), polyhydrate Some O-acylates (e.g., 5-30 mole% o-acetylate, (O- (t-butoxy) carbonylate, etc.), to oxystyrene, styrene-maleic anhydride copolymer, styrene-hydride Hydroxystyrene copolymers, α-methylstyrene-hydroxystyrene copolymers, carboxyl group-containing methacrylic resins and derivatives thereof, It is not limited to this.
    [69] The total content of the alkali-soluble resin is generally 30 to 90% by weight, preferably 50 to 80% by weight based on the total weight of the resist composition excluding the solvent.
    [70] [2] compounds that can generate acids when irradiated with radiation (radiation-sensitive acid generators; hereinafter referred to as acid generators)
    [71] Acid generators are used with alkali-soluble resins. Any compound can be used as long as it is a compound which generate | occur | produces an acid by radiation irradiation as an acid generator used together with alkali-soluble resin.
    [72] Such acid generators include compounds known to generate acid by irradiation light used in photoinitiators of photocationic polymerization, photoinitiators of photoradical polymerization, photochromic agents of pigments, photochromic agents, or microresists, and the like. Mixtures may be selected as appropriate.
    [73] For example, onium salts such as diazonium salts, phosphonium salts, iodonium salts, sulfonium salts, selenium salts, and arzonium salts, organic halogen compounds, organometallic / organohalides, and acids having o-nitrobenzyl-type protecting groups The compound which photodecomposes and produces a sulfonic acid represented by a generator, an imino sulfonate, etc., a disulfone compound, etc. are mentioned.
    [74] In addition, a compound in which such an acid generator or a compound is introduced into the main chain or the side chain of a polymer, for example, Japanese Patent Application Laid-Open No. 63-26653, 55-164824, 62-69263, 63-146083, The compound described in the 63-163452, 62-153853, 63-146029, etc. can be used.
    [75] In addition, a compound which generates an acid by irradiated light described in US Pat.
    [76] In this invention, it is preferable to use the onium salt compound represented by said general formula (I)-(III), and to use the onium salt compound which produces the organic acid which has a fluorine atom.
    [77] In formulas (I) to (III), R 1 to R 37 are each represented by a hydrogen atom, an alkyl group, an alkoxy group, a hydroxy group, a halogen atom, or -SR 38 .
    [78] The alkyl group represented by R 1 to R 37 may be linear, branched or cyclic. Examples of the linear or branched alkyl group include alkyl groups having 1 to 4 carbon atoms such as methyl group, ethyl group, propyl group, n-butyl group, sec-butyl group and t-butyl group. As a cyclic alkyl group, there exists a C3-C8 thing, such as a cyclopropyl group, a cyclopentyl group, and a cyclohexyl group, for example.
    [79] The alkoxy group represented by R 1 to R 37 may be linear, branched or cyclic. Examples of the linear or branched alkoxy group include methoxy, ethoxy, hydroxyethoxy, propoxy group, n-butoxy group, isobutoxy group, sec-butoxy group and t-butoxy group having 1 to 8 carbon atoms And alkyl groups such as octyloxy groups. Examples of the cyclic alkoxy group include a cyclopentyloxy group and a cyclohexyloxy group.
    [80] Examples of the halogen atom represented by R 1 to R 37 include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
    [81] -SR 38 R 38 in which is represented by R 1 ~ R 37 is an alkyl group or an aryl group. In the range of the alkyl group represented by R 38 may, for example, the above-listed examples of the alkyl group represented by R 1 ~ R 37.
    [82] The aryl group represented by R 38 has a phenyl group, a toryl group, a methoxyphenyl group, a naphthyl group and a fine carbon number of 6-14.
    [83] The alkyl group represented by R <1> -R <37> may carry out further coupling | bonding with a part of a certain group, may increase carbon number, and does not need to have a substituent. Moreover, as a substituent which may be couple | bonded, Preferably, a C1-C4 alkoxy group, a C6-C10 aryl group, a C2-C6 alkenyl group is mentioned, A cyano group, a hydroxyl group, a carboxyl group, and an alkoxycarbonyl group And nitro groups. In addition, for example, halogen atoms such as fluorine atom, chlorine atom and iodine atom may be mentioned.
    [84] Two or more of the groups represented by R 1 to R 15 in General Formula (I) may combine with each other to form a ring. The ring may be formed by directly bonding the terminals of the groups represented by R 1 to R 15 . You may form a ring by indirectly bonding with each other through one or more atoms selected from carbon, oxygen, sulfur and nitrogen. As a ring structure formed by combining two or more of the groups represented by R 1 to R 15 , the same ring structure as furan ring, dihydrofuran ring, pyran ring, trihydropyran ring, thiophene ring, pyrrole ring and the like Can be mentioned. The same applies to the group represented by R 16 to R 27 in General Formula (II). That is, two or more of these groups may be bonded directly or indirectly to form a ring. The same applies to the groups represented by R 28 to R 37 in General Formula (III).
    [85] General formulas (I) to (III) have X − . In General Formulas (I) to (III), X − is an anion of an acid. The acid forming the anion is an acid selected from benzenesulfonic acid, naphthalenesulfonic acid, or anthracenesulfonic acid. One or more fluorine atoms may be substituted for such acid. The acid also has at least one organic group selected from the group consisting of alkyl, alkoxy, acyl, acyloxy, sulfonyl, sulfonyloxy, sulfonylamino, aryl, aralkyl and alkoxycarbonyl groups The above fluorine atoms may be further substituted. The benzene sulfonic acid, naphthalene sulfonic acid or anthracene sulfonic acid may be substituted with a halogen atom other than fluorine, a hydroxy group, a nit group, or the like.
    [86] The alkyl group bonded to the benzenesulfonate etc. which form X <-> is a C1-C12 alkyl group. The alkyl group may be linear, branched, cyclic or may be substituted with 1 to 25 fluorine atoms. Specifically, trifluoromethyl group, pentafluoroethyl group, 2,2,2-trifluoroethyl group, heptafluoroethyl group, heptafluoroisopropyl group, perfluorobutyl group, perfluorooctyl group, purple Luorododecyl group and a perfluoro cyclohexyl group are mentioned. Especially, the C1-C4 perfluoroalkyl group substituted by all the fluorine atoms is preferable.
    [87] The alkoxy group bonded to the benzenesulfonic acid or the like together with the alkyl group or alone is an alkoxy group having 1 to 12 carbon atoms. The alkoxy group may be linear, may be branched, may be cyclic, and is preferably substituted with 1 to 25 fluorine atoms. Specifically, trifluoromethoxy group, pentafluoroethoxy group, heptafluoroisopropyloxy group, perfluorobutoxy group, perfluorooctyloxy group, perfluorododecyloxy group, perfluorocyclohex A siloxy group etc. are mentioned. Among these, a C 1-4 perfluoroalkoxy group substituted with all fluorine is preferable.
    [88] It is preferable that the acyl group couple | bonded with the said benzene sulfonic acid etc. together with an alkyl group or alone is substituted by C2-C12, 1-23 fluorine atoms. Specifically, a trifluoroacetyl group, a fluoroacetyl group, a pentafluoropropionyl group, a pentafluorobenzoyl group, etc. are mentioned.
    [89] It is preferable that the acyloxy group couple | bonded with the said benzene sulfonic acid etc. together with an alkyl group or alone is substituted by 2-12 and 1-23 fluorine atoms. Specifically, a trifluoroacetoxy group, a fluoroacetoxy group, a pentafluoro propionyloxy group, a pentafluorobenzoyloxy group, etc. are mentioned.
    [90] It is preferable that the sulfonyl group couple | bonded with the said benzene sulfonic acid etc. together with an alkyl group or alone is substituted with 1-12 carbon atoms and 1-25 fluorine atoms. Specifically, trifluoromethanesulfonyl group, pentafluoroethanesulfonyl group, perfluorobutanesulfonyl group, perfluorooctanesulfonyl group, pentafluorobenzenesulfonyl group, 4-trifluoromethylbenzenesulfonyl group, etc. Can be mentioned.
    [91] It is preferable that the sulfonyloxy group couple | bonded with the said benzene sulfonic acid etc. together with an alkyl group or alone is substituted by 1-12 and 1-25 fluorine atoms. Specifically, there are a trifluoromethanesulfonyloxy group, a perfluorobutanesulfonyloxy group, a 4-trifluoromethylbenzenesulfonyloxy group, and the like.
    [92] It is preferable that the sulfonylamino group couple | bonded with the said benzene sulfonic acid etc. together with an alkyl group or alone is substituted by 1-12 and 1-25 fluorine atoms. Specifically, there are a trifluoromethanesulfonylamino group, a perfluorobutanesulfonylamino group, a perfluorooctanesulfonylamino group, a pentafluorobenzenesulfonylamino group, and the like.
    [93] As the aryl group which is bonded to the benzenesulfonic acid or the like together with the alkyl group or alone, it is preferable that carbon atoms are substituted with 6 to 14 and 1 to 9 fluorine atoms. Specifically, there are pentafluorophenyl group, 4-trifluoromethylphenyl group, heptafluoronaphthyl group, nonafluoroanthranyl group, 4-fluorophenyl group, 2,4-difluorophenyl group and the like.
    [94] As the aralkyl group bonded to the benzenesulfonic acid or the like together with the alkyl group or alone, it is preferable that the carbon number is substituted with 7 to 10 and 1 to 15 fluorine atoms. Specifically, there are pentafluorophenylmethyl group, 4-trifluorophenylethyl group, perfluorobenzyl group, perfluorophenethyl group and the like.
    [95] As an alkoxycarbonyl group couple | bonded with the said benzene sulfonic acid etc. independently or together with an alkyl group, it is preferable that carbon number is substituted by 2-13 and 1-25 fluorine atoms. Specifically, there are a trifluoromethoxycarbonyl group, pentafluoroethoxycarbonyl group, pentafluorophenoxycarbonyl group, perfluorobutoxycarbonyl group, perfluorooctyloxycarbonyl group, and the like.
    [96] Of these anions, most preferred X − is fluorine-substituted benzenesulfonate anion, and among these, pentafluorobenzenesulfonate anion is particularly preferred.
    [97] In addition, the fluorinated benzene sulfonic acid, naphthalene sulfonic acid, or anthracene sulfonic acid may be a linear, branched or cyclic alkoxy group, acyl group, acyloxy group, sulfonyl group, sulfonyloxy group, sulfonylamino group, aryl group, aralkyl group, or The alkoxycarbonyl group (the carbon number range is the same as described above), halogen (except fluorine), hydroxyl group, nitro group and the like may be further substituted.
    [98] Although the compound represented by the said General formula (I)-(III) and other specific examples are shown below, it is not limited to these.
    [99]
    [100]
    [101]
    [102]
    [103]
    [104]
    [105] The compound of general formula (I) and (II) can be synthesize | combined by the following method. For example, a method of reacting an aryl Grignard reagent such as aryl magnesium bromide with phenyl sulfoxide to salt-exchange the obtained triarylsulfonium halide with a corresponding sulfonic acid, and an aromatic compound corresponding to phenyl sulfoxide with methanesulfonic acid / dioxide Or it can synthesize | combine by the method of condensation and salt exchange using acid catalysts, such as aluminum chloride, or the method of condensation and salt exchange of a diarylionium salt and a diaryl sulfoxide using a catalyst, such as copper acetate.
    [106] The compound of general formula (III) can be synthesized by reacting an aromatic compound using a periodate.
    [107] In the present invention, the amount of the acid generator is preferably 0.1 to 20% by weight, preferably 0.5 to 10% by weight, more preferably 1 to 7% by weight, based on the solids content of the entire negative resist composition. to be.
    [108] (Other photoacid generator)
    [109] In the present invention, in addition to the compounds represented by the general formulas (I) to (III), other acid generators may be used together with these compounds. When other compounds which can be decomposed upon irradiation and generate an acid are used together with a compound represented by one of general formulas (I) to (III), the amount of the compound that can be decomposed and generated during irradiation is The molar ratio is 100/0 to 20/80, preferably 90/10 to 40/60, and more preferably 80/20 to 50/50.
    [110] [3] crosslinking agents which can be crosslinked by the action of an acid (compounds crosslinking under the action of an acid;
    [111] In the negative resist composition of this invention, a crosslinking agent is used with alkali-soluble resin and an acid generator.
    [112] A phenol derivative can be used as a crosslinking agent.
    [113] Preferably, the molecular weight is 1,200 or less, contains 3 to 5 benzene ring atom groups per molecule, and retains two or more hydroxymethyl groups or alkoxymethyl groups in total, and all of the hydroxymethyl groups or alkoxymethyl groups are present in the benzene ring. Or a phenol derivative formed by concentrating or dividing and bonding to a plurality of benzene rings. By using such a phenol derivative, the effect of this invention can be made more remarkable.
    [114] It is preferable that it is C6 or less of alkoxy methyl group couple | bonded with the said benzene ring. Specifically, methoxymethyl group, ethoxymethyl group, n-propoxymethyl group, i-propoxymethyl group, n-butoxymethyl group, i-butoxymethyl group, sec-butoxymethyl group, t-butoxymethyl group are preferable. All. Further, alkoxylated alkoxy groups are also preferable, such as 2-methoxyethoxy and 2-methoxy-1-propyl groups. Among these phenol derivatives, particularly preferred ones are listed below.
    [115]
    [116]
    [117]
    [118]
    [119]
    [120] (In the above formula, L 1 to L 8 may be the same or different, and each represents a hydroxymethyl group, methoxymethyl group, or ethoxymethyl group.)
    [121] The phenol derivative having a hydroxymethyl group can be obtained by reacting a corresponding phenol compound (a compound represented by any one of the above formulas wherein L 1 to L 8 is a hydrogen atom) without a hydroxymethyl group with formaldehyde under a basic catalyst. . At this time, in order to prevent resination or gelation, it is preferable to make reaction temperature 60 degrees C or less. More specifically, it can synthesize | combine by the method described in Unexamined-Japanese-Patent No. 6-282067, Unexamined-Japanese-Patent No. 7-64285, etc.
    [122] A phenol derivative having an alkoxymethyl group can be obtained by reacting a corresponding phenol derivative having an hydroxymethyl group with an alcohol under an acidic catalyst. At this time, in order to prevent resination and gelation, it is preferable to make reaction temperature 100 degrees C or less. More specifically, it can synthesize | combine by the method described in European patent EP632003A1 etc.
    [123] The phenol derivative having a hydroxymethyl group or an alkoxymethyl group thus synthesized is preferable in view of stability in storage, but the phenol derivative having an alkoxymethyl group is particularly preferred in view of stability in storage.
    [124] These phenol derivatives obtained by combining two or more hydroxymethyl groups or alkoxymethyl groups and concentrating or dividing all of these hydroxymethyl groups or alkoxymethyl groups in the benzene ring may be used alone, or two or more kinds thereof. You may use in combination.
    [125] In addition to the phenol derivatives, the following compounds (i) and (ii) can be used as the crosslinking agent.
    [126] (i) a compound having an N-hydroxymethyl group, an N-alkoxymethyl group, or an N-acyloxymethyl group, and
    [127] (ii) epoxy compounds
    [128] Next, such a crosslinking agent is demonstrated in detail below.
    [129] (i) As a compound having N-hydroxymethyl group, N-alkoxymethyl group, or N-acyloxymethyl group, European Patent Publication No. 0,133,216 (hereinafter referred to as EP-A), German Patent No. 3,634, 671, Monomers and oligomer-melamine-formaldehyde condensates and urea-formaldehyde condensates described in US Pat. No. 3,711,264, and alkoxylated compounds and benzoguanamine-formaldehyde condensates described in EP-A 0,212,482 and the like.
    [130] More preferred examples include melamine-formaldehyde derivatives having, for example, two or more free N-hydroxymethyl groups, N-alkoxymethyl groups, or N-acyloxymethyl groups, among which N-alkoxymethyl derivatives are particularly preferred. Do.
    [131] (ii) As an epoxy compound, an epoxy monomer, a dimer, an oligomer, and a polymeric compound containing 1 or more epoxy groups are mentioned. For example, the reaction product of bisphenol A and epicrohydrin, the reaction product of low molecular weight phenol-formaldehyde resin and epicrohydrin, etc. are mentioned. In addition, the epoxy resin described in US Pat. No. 4,026,705 and British Pat. No. 1,539,192 is technically used.
    [132] In this invention, the said phenol derivative is preferable.
    [133] In addition to the said phenol derivative, the other crosslinking agents (i) and (ii) mentioned above can be used together, for example.
    [134] The content of the other crosslinking agent which can be used in addition to the phenol derivative is 100/0 to 20/80, preferably 10/90 to 60/40, more preferably 20/80 to 50/50 in molar ratio.
    [135] The crosslinking agent is used in the range of 3 to 70% by weight, preferably 5 to 50% by weight, based on the solids content of the entire negative resist composition. When the addition amount of the crosslinking agent is less than 3% by weight, the residual film ratio is lowered, while when the amount of the crosslinking agent is more than 70% by weight, the resolution is lowered, and it is not very preferable in terms of stability during storage of the resist liquid.
    [136] [4] solvents for use in the present invention
    [137] The composition of this invention dissolves the said component in the solvent, respectively, and apply | coats on a support body.
    [138] The negative photoresist composition of this invention contains the (D) mixed solvent.
    [139] At least one selected from propylene glycol monoalkyl ether carboxylates (called a solvent of group A), and at least one selected from propylene glycol monoalkyl ethers, lactic acid alkyl, acetate esters, chain ketones and alkylalkoxypropionates (Called a group B solvent) and / or γ-butyrolactone, ethylene carbonate and propylene carbonate (called a group C solvent).
    [140] Therefore, as (D) component, group A solvent and group B solvent are combined, group A solvent and group C solvent are combined, and group A solvent, group B solvent, and group C solvent are used in combination.
    [141] As propylene glycol monoalkyl ether carboxylate, a propylene glycol monomethyl ether acetate, a propylene glycol monomethyl ether propionate, a propylene glycol monoethyl ether acetate, and propylene glycol monoethyl ether propionate are mentioned preferably.
    [142] As propylene glycol monoalkyl ether, propylene glycol monomethyl ether and propylene glycol monoethyl ether are mentioned preferably.
    [143] Examples of the alkyl lactate include methyl lactate and ethyl lactate.
    [144] As acetate acetate, butyl acetate, pentyl acetate, and hexyl acetate are mentioned preferably, More preferably, it is butyl acetate.
    [145] Heptanone is a chain ketone, and heptanone includes 2-heptanone, 3-heptanone, and 4-heptanone, and 2-heptanone is preferable.
    [146] As alkyl alkoxy propionate, ethyl 3-ethoxy propionate, methyl 3-methoxy propionate, ethyl 3-methoxy propionate, and methyl 3-ethoxy propionate are mentioned preferably.
    [147] 90: 10-15: 85 are preferable, as for the weight ratio (A: B) of the said group A solvent and group B solvent, More preferably, it is 85: 15-20: 80, More preferably, it is 80:20 25:75.
    [148] 99.9: 0.1-75:25 are preferable, as for the weight ratio (A: C) of the said group A solvent and group C solvent, More preferably, it is 99: 1-80:20, More preferably, it is 97: 3 ˜85: 15.
    [149] In the case of combining these three solvents, the use weight ratio of the Group C solvent is preferably 0.1 to 25% by weight, more preferably 1 to 20% by weight, even more preferably 3 to 17 based on the total solvent. Weight percent.
    [150] In this invention, it is preferable to melt | dissolve solid content of the resist composition containing the said component in the said mixed solvent in solid content concentration 3 to 25 weight%, More preferably, it is 5 to 22 weight%, More preferably, 7 to 20% by weight.
    [151] The composition of this invention dissolves the said component in the mixed solvent of (D) component of this invention, respectively, and apply | coats on a support body. In this invention, you may mix suitably another solvent further with the mixed solvent of (D) component. Such other solvents include ethylene chloride, cyclohexanone, cyclopentanone, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, 2-methoxyethyl acetate, ethylene glycol monoethyl ether acetate, toluene, methyl pyruvate , Ethyl pyruvate, propyl pyruvate, N, N-dimethylformamide, N, N-dimethylacetamide, dimethyl sulfoxide, N, N, N ', N'-tetramethylurea, N-methylpyrroli Phenol, tetrahydrofuran, β-methoxyisobutyrate, ethyl butyrate, and propyl butyrate are preferable, and one or more of these solvents may be mixed with the mixed solvent of the component (D). The amount of such a solvent added is generally 100 parts by weight or less based on 100 parts by weight of the mixed solvent of the component (D).
    [152] [5] other ingredients used in the composition of the present invention
    [153] The negative resist composition of this invention can contain an organic basic compound, surfactant, dye, etc. further as needed.
    [154] 1.Organic Basic Compounds
    [155] Preferable organic basic compounds which can be used in the present invention are compounds which are more basic than phenol. Of these, nitrogen-containing basic compounds are preferred.
    [156] From the viewpoint of the chemical environment, a nitrogen-containing basic compound having a structure represented by the following (A) to (E) is preferable.
    [157]
    [158] In which R is250, R251And R252May be the same or different, and each represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aminoalkyl group having 1 to 6 carbon atoms, a hydroxyalkyl group having 1 to 6 carbon atoms or a substituted or unsubstituted aryl group having 6 to 20 carbon atoms, Where R251And R252May combine with each other to form a ring.
    [159] R 253 , R 254 , R 255 and R 256 may be the same or different and represent an alkyl group having 1 to 6 carbon atoms.
    [160] Particularly preferred compounds are nitrogen-containing basic compounds having two or more nitrogen atoms having different chemical environments in one molecule, particularly preferred are compounds containing both substituted and unsubstituted amino and nitrogen-containing atoms and alkylamino groups Compound.
    [161] Preferred detailed examples include substituted or unsubstituted guanidine, substituted or unsubstituted aminopyridine, substituted or unsubstituted aminoalkylpyridine, substituted or unsubstituted aminopyrrolidine, substituted or unsubstituted imidazole, substituted or substituted Unsubstituted pyrazole, substituted or unsubstituted pyrazine, substituted or unsubstituted pyrimidine, substituted or unsubstituted purine, substituted or unsubstituted imidazoline, substituted or unsubstituted pyrazoline, substituted or unsubstituted blood Ferridine, substituted or unsubstituted aminomorpholine, substituted or unsubstituted aminoalkylmorpholine, and the like. Preferable substituents are amino group, aminoalkyl group, alkylamino group, aminoaryl group, arylamino group, alkyl group, alkoxy group, acyl group, acyloxy group, aryl group, aryloxy group, nitro group, hydroxy group and cyano group.
    [162] Particularly preferred compounds include guanidine, 1,1-dimethylguanidine, 1,1,3,3-tetramethylguanidine, imidazole, 2-methylimidazole, 4-methylimidazole, N-methylimidazole, 2-phenylimidazole, 4,5-diphenylimidazole, 2,4,5-triphenylimidazole, 2-aminopyridine, 3-aminopyridine, 4-aminopyridine, 2-dimethylaminopyridine, 4-dimethylaminopyridine, 2-diethylaminopyridine, 2- (aminomethyl) pyridine, 2-amino-3-methylpyridine, 2-amino-4-methylpyridine, 2-amino-5-methylpyridine, 2- Amino-6-methylpyridine, 3-aminoethylpyridine, 4-aminoethylpyridine, 3-aminopyrrolidine, piperazine, N- (2-aminoethyl) piperazine, N- (2-aminoethyl) piperi Dine, 4-amino-2,2,6,6-tetramethylpiperidine, 4-piperidinopiperidine, 2-iminopiperidine, 1- (2-aminoethyl) -pyrrolidine, pyra Sol, 3-amino-5-methylpyrazole, 5-amino-3-methyl-1-p-tolylpyrazole, pyrazine, 2- (ami Methyl) -5-methylpyrazine, pyrimidine, 2,4-diaminopyrimidine, 4,6-dihydroxypyrimidine, 2-pyrazoline, 3-pyrazoline, N-aminomorpholine, N- (2 -Aminoethyl) morpholine, etc., but it is not limited to these.
    [163] These nitrogen-containing basic compounds are used singly or in combination of two or more kinds. The molar ratio of the acid generator to the organic base compound in the composition is preferably (acid generator) / (organic base compound) (molar ratio) = 2.5 to 300. If the molar ratio is less than 2.5, the sensitivity is lowered and resolution is often lowered, whereas if it exceeds 300, the resist pattern becomes very thick over time until the post-exposure heat treatment. The molar ratio of (acid generator) / (organic basic compound) is preferably 5.0 to 200, and more preferably 7.0 to 150. The addition of such a nitrogen-containing basic compound has the effect of improving the stability (PCD stability and PED stability) over time of the resist film.
    [164] Here, the PCD (Post Coating Delay) stability is the coating film stability when the resist composition is applied to the substrate and then left inside or outside the irradiation apparatus, and the PED (Post Exposure Delay) is a heating operation after irradiation. In the meantime, it is the stability of the film when it is left in the irradiation apparatus or the apparatus until it is carried out.
    [165] 2. Surfactant
    [166] Surfactant can be added to the negative resist composition of this invention. Specifically, polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene cetyl ether, polyoxyethylene oleyl ether, polyoxyethylene octyl phenol ether, polyoxyethylene nonyl Polyoxyethylene alkylaryl ethers such as phenol ethers, polyoxyethylene polyoxypropylene block copolymers, sorbitan monolaurate, sorbitan monopalmitate, sorbitan monostearate, sorbitan monooleate, sorbitan tri Sorbitan fatty acid esters such as oleate and sorbitan tristearate, polyoxyethylene sorbitan monolaurate, polyoxyethylene sorbitan monopalmitate, polyoxyethylene sorbitan monostearate, polyoxyethylene sorbitan triolee Eight, polyoxyethylene sorbitan tris Nonionic surfactants such as polyoxyethylene sorbitan fatty acid esters such as tearate, Ef top EF301, EF303, EF303, EF352 (manufactured by Shin-Akita Kasei Co., Ltd.), Megafac F171, F173 (manufactured by Dainippon Ink & Chemicals Co., Ltd.) , Fluorine-based surfactants and organosiloxane polymers such as Florad FC430 and 431 (manufactured by Sumimoto 3M Corporation), Asahigard AG 710, Surflon S-382, SC101, SC102, SC103, SC104, SC105, SC106 (manufactured by Asahi Glass Co., Ltd.) KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), acrylic acid or methacrylic acid (co) polymerized polyflow No. 75, no. 95 (manufactured by Kyoe Oil Chemicals Co., Ltd.).
    [167] Moreover, one or more surfactant of a fluorine type and a silicone type surfactant may be mix | blended. It is also preferable to blend a surfactant containing both a fluorine atom and a silicon atom. As such surfactant, for example, Patent Publication Nos. 62-36663, 61-226746, 61-226745, 62-170950, 63-34540, Patent Publication No. 7-230165, 8 -62834, 9-54432, 9-5988, U.S. Patent 5405720, 5294511, 5529881, 5296330, 5436098, 5576143, 5294511, 5824451 Although surfactant is mentioned, the following commercially available surfactant can also be used as it is. Commercially available surfactants include, for example, Eftop EF301 and EF303 (manufactured by Shin Akita Kasei Co., Ltd.), Florad FC430 and 431 (manufactured by Sumimoto 3M Company), Megafac F171, F173, F176, F189, and R08 (Dainippon Ink & Chem. Company products), and fluorine-based surfactants or silicone-based surfactants such as Surflon S-382, SC101, 102, 103, 104, 105, and 106 (manufactured by Asahi Glass, Inc.), Torosol S-366 (manufactured by Toroy Chemical Co., Ltd.). . In addition, polysiloxane polymer KP-341 (manufactured by Shin-Etsu Chemical Co., Ltd.) may also be used as the silicone surfactant.
    [168] The compounding quantity of such surfactant is generally 0.001-2 weight part, Preferably it is 0.01-1 weight part per 100 weight part of solid content in the composition of this invention. Although these surfactants may be added alone, some of them may be added in combination. By the addition of such a surfactant, the in-plane uniformity of the resist film is increased, and the resolution is improved.
    [169] 3. Dye
    [170] Suitable dyes are oil dyes and basic dyes. Specifically, Oil Yellow # 101, Oil Yellow # 103, Oil Pink # 312, Oil Green BG, Oil Blue BOS, Oil Blue # 603, Oil Black BY, Oil Black BS, Oil Black T-505 (above, Orient Chemical Industries, Ltd.) Co., Ltd.), crystal violet (CI42555), methyl violet (CI42535), rhodamine B (CI45170B), malachite green (CI42000), methylene blue (CI52015), and the like.
    [171] The process of forming a pattern on a resist film in the manufacture of precision integrated circuit elements, etc., applies the negative photoresist composition of the present invention onto a substrate (e.g., a silicon / silicon dioxide coating, a glass substrate, a transparent substrate such as an ITO substrate, etc.). After that, it is irradiated using an electron beam or an X-ray drawing apparatus, and heated, developed, washed and dried to form a good resist pattern.
    [172] As a developing solution used for the negative resist composition of this invention, inorganic alkalis, such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, ammonia water, 1st amines, such as ethylamine and n-propylamine, diethyl Second amines such as amines and di-n-butylamine, third amines such as triethylamine and methyldiethylamine, alcohol amines such as dimethylethanolamine and triethanolamine, tetramethylammonium hydroxide and tetraethylammonium hydroxide Alkaline aqueous solutions, such as cyclic amines, such as quaternary ammonium salts, such as a lock seed and choline, pyrrole, and piperidine, can be used. Moreover, alcohol, such as isopropyl alcohol, surfactant, such as nonionics, can be added and used for the said aqueous solution of alkalis.
    [173] Among these developers, preferred are quaternary ammonium salts, particularly preferred are tetramethylammonium hydroxide and choline.
    [174] Hereinafter, although an Example demonstrates this invention in detail, the content of this invention is not limited to this.
    [175] 1. Synthesis Example of Constituent Material
    [176] (1) alkali-soluble resin
    [177] 1) 17.6 g of 3-t-butoxystyrene was added to 27 g of dry THF, and then heated to 70 ° C. under a stream of nitrogen. When the reaction temperature was stabilized, an azo radical initiator V-601 manufactured by Wako Pure Chemical Co., Ltd. was added at 2 mol% of the monomer to start the reaction. After reacting for 3 hours, 2 mol% of V-601 was added again, and further reacted for 3 hours. The reaction mixture was diluted with THF and poured into a large amount of methanol to precipitate. The polymer thus precipitated was decomposed under acidic hydrochloric acid in a general manner, precipitated in hexane, and reprecipitation purification was repeated twice, followed by drying under reduced pressure to obtain polymer (P-1). The molecular weight (Mw: polystyrene conversion) and molecular weight dispersion degree (Mw / Mn) were calculated | required by GPC measurement using the THF solvent.
    [178] 2) Polymers (P-2) to (P-4), (P-6), (P-7) and (P-11) were obtained in almost the same manner except for using other monomers.
    [179] 3) 16.2 g of 3-acetoxystyrene was added to 24 g of dry THF, and then heated to 70 under a stream of nitrogen. When the reaction temperature was stable, 2 mol% of the azo radical initiator V-60 manufactured by Wako Pure Chemical Co., Ltd. was added to initiate the reaction. After reacting for 3 hours, 2 mol% of V-60 was added again, and further reacted for 3 hours. The reaction mixture was diluted with THF and poured into a large amount of methanol. The obtained polymer was hydrolyzed under basic condition solution in a general manner, precipitated in hexane, and then reprecipitation purification was repeated two more times, and dried under reduced pressure to obtain a polymer (P-5).
    [180] 4) 12 g of the polymer (P-1) obtained in the same manner as in the above 1) was dissolved in dry propylene glycol monomethyl ether acetate, 1.0 g of β-cyclohexylethyl vinyl ether and 10 mg of p-toluenesulfonic acid were added thereto at room temperature. The mixture was stirred for 1 hour to add triethylamine.
    [181] The liquid reaction mixture was poured into water, and the precipitated powder was collected by filtration and dried under reduced pressure to obtain a polymer (P-9).
    [182] 5) In the same manner as in 4) above, (P-8) and (P-10) were obtained by methods compatible with the reagents.
    [183] 6) 11.3 g of 3-hydroxystyrene and 5.3 g of 4-t-butoxystyrene were added to 30 g of dry THF, and then heated to 70 ° C. under a stream of nitrogen. When the reaction temperature was stable, 2 mol% of the azo radical initiator V-601 manufactured by Wako Pure Chemical Co., Ltd. was added to initiate the reaction. After reacting for 3 hours, 2 mol% of V-601 was added again, and further reacted for 3 hours. The reaction mixture was diluted with THF and poured into a large amount of methanol to precipitate a polymer. Then, reprecipitation purification was repeated twice, followed by drying under reduced pressure to obtain a polymer (P-12).
    [184] 7) A polymer (P-13) was obtained in the same manner as in the above 6).
    [185] 8) 17.6 g of 3-t-butoxystyrene was subjected to living anion polymerization with s-butyllithium as an initiator in degassed dry THF at -78 ° C. After reacting for 3 hours, the reaction was terminated in degassed methanol. Then, the mixture was thrown into a large amount of methanol, and the precipitated powder was collected by filtration, and again, reprecipitation purification was repeated twice, followed by drying under reduced pressure to obtain a resin. After repeating the precipitation and purification twice, the t-butoxy group of this resin was decomposed in a general manner under acidic conditions using hydrochloric acid to obtain a polymer (P-21).
    [186] 9) Polymer (P-22) was obtained by performing the same operation except adjusting the amount of initiators.
    [187] 10) As the monomer, polymer (P) was used in the same manner as in 8), except that 10 wt%, 20 wt%, and 30 wt% of 4-t-butoxystyrene were respectively used and the amount of initiator was adjusted. -23) to (P-28).
    [188] 11) A polymer was obtained in the same manner as in 1) except that 3-t-butoxystyrene / 4-t-butoxystyrene (60/40 (weight ratio)) mixture was used as the monomer raw material. Then, this polymer was separated and precipitated from an acetone lean solution to obtain a polymer (P-29).
    [189] 12) Except adjusting the amount of initiator, polymer (P-30) was obtained by the same operation as 11).
    [190] 13) Polymer (P-31), (P-32) by the same operation as 8), except that 20 mol% of the monomer is replaced with 3,4-di-t-butoxystyrene and the amount of initiator is controlled. )
    [191] 14) Except for adjusting the amount of the initiator, the polymers obtained by the same operations as in 8) were protected in the usual manner, respectively, and the polymers (P-33), (P-34), (P-37) to (P-) 40) was obtained.
    [192] 15) Polymers (P-35), (P-36), (P-41) to () in the same operation as in 8) except that the monomers are replaced and the amount of initiator is adjusted as in 10). P-44) was obtained.
    [193]
    [194]
    [195]
    [196]
    [197]
    [198]
    [199]
    [200] (2) acid generators
    [201] 1) Synthesis of pentafluorobenzenesulfonate tetramethylammonium salt
    [202] 25 g of pentafluorobenzenesulfonyl chloride was dissolved in 100 ml of methanol under ice cooling, and 100 g of 25% aqueous tetramethylammonium hydroxide solution was slowly added thereto. It stirred at room temperature for 3 hours and obtained the solution of pentafluorobenzene sulfonate tetramethylammonium salt. This solution was used for salt exchange with sulfonium salts and iodonium salts.
    [203] 2) Synthesis of triphenylsulfonium pentafluorobenzenesulfonate
    [204] 50 g of diphenyl sulfoxide was dissolved in 800 ml of benzene, and 200 g of aluminum chloride was added thereto, and the mixture was refluxed for 24 hours. The reaction solution was slowly poured into 2 l of ice, and 400 ml of concentrated hydrochloric acid was added thereto, and the mixture was heated to 70 deg. C for 10 minutes. The resulting aqueous solution was washed with 500 ml of ethyl acetate and filtered, and then dissolved by dissolving 200 g of ammonium iodide in 400 ml of water was added. The precipitated powder was collected by filtration, washed with water, washed with ethyl acetate and dried to obtain 70 g of triphenylsulfonium iodide.
    [205] 30.5 g of triphenylsulfonium iodide was dissolved in 1000 ml of methanol, 19.1 g of silver oxide was added to this solution, and the mixture was stirred at room temperature for 4 hours. The solution was filtered and an excess of pentafluorobenzenesulfonic acid tetramethylammonium salt solution was added thereto. The liquid reaction mixture was concentrated and dissolved in 500 ml of dichloromethane, and the resulting solution was washed with 5% aqueous tetramethylammonium hydroxide solution and water. The organic phase was dried over anhydrous sodium sulfate and then concentrated to give triphenylsulfonium pentafluorobenzenesulfonate (I-1).
    [206] 3) Synthesis of di (4-t-amylphenyl) iodonium pentafluorobenzenesulfonate
    [207] 60 g of t-amylbenzene, 39.5 g of potassium iodide, 81 g of acetic anhydride, and 170 ml of dichloromethane were mixed, and 66.8 g of concentrated sulfuric acid was slowly added dropwise thereto under ice cooling. After stirring for 2 hours under ice cooling, the mixture was stirred for 10 hours at room temperature. 500 ml of water was added to the liquid reaction mixture while cooling with ice, and the mixture was extracted with dichloromethane, the organic phase was washed with sodium bicarbonate and water, and then concentrated to give di (4-t-amylphenyl) iodium sulfate. This sulfate was added to the solution of the excess amount of pentafluorobenzenesulfonate tetramethylammonium salt. 500 ml of water was added to the solution, which was extracted with dichloromethane, the organic phase was washed with 5% aqueous tetramethylammonium hydroxide solution, and washed with water and concentrated to give (4-t-amylphenyl) iodiumpentafluorobenzenesulfo. Nate (III-1) was obtained.
    [208] Other compounds can also be synthesized using the same method as described above.
    [209] (3) crosslinking agent
    [210] Synthesis of Crosslinking Agent [HM-1]
    [211] 20 g of 1- [α-methyl-α- (4-hydroxyphenyl) ethyl] -4- [α, α-bis (4-hydroxyphenyl) ethyl] benzene (Tris-PA manufactured by Honshu Chemical Co., Ltd.) It was added to a% aqueous potassium hydroxide solution and dissolved by stirring. Then, 60 ml of 37% aqueous formalin aqueous solution was slowly added at room temperature over 1 hour while stirring the solution. After stirring for further 6 hours at room temperature, the solution was poured into a dilute sulfuric acid aqueous solution. The precipitate was filtered, sufficiently washed with water, and then recrystallized with 30 ml of methanol to obtain 20 g of a white powder of phenol derivative [HM-1] having a hydroxymethyl group having the following structure. Purity was 92% (liquid chromatography).
    [212]
    [213] Synthesis of Crosslinking Agent [MM-1]
    [214] 20 g of a phenol derivative [HM-1] having a hydroxymethyl group obtained in the above synthesis example was added to 1 L of methanol, and stirred by heating to dissolve it. Then, 1 ml of concentrated sulfuric acid was added to this solution, and the mixture was heated to reflux for 12 hours. After the reaction was completed, the reaction solution was cooled and 2 g of potassium carbonate was added. After the mixture was sufficiently concentrated, 300 ml of ethyl acetate was added. The solution was washed with water, concentrated to dryness and solidified to obtain 22 g of a white solid of phenol derivative [MM-1] having a methoxymethyl group having the following structure. Purity was 90% (liquid chromatography).
    [215]
    [216] In the same manner, the phenol derivatives shown below were synthesized.
    [217]
    [218]
    [219]
    [220] 2. Example
    [221] (1) resist drawing
    [222] Using the compound constituting the present invention selected from the above synthesis examples and the comparative compound, a photoresist composition solution having the composition shown in Table 1 below was prepared.
    [223] Each sample solution was filtered through a 0.1 µm filter, coated on a silicon wafer using a spin coater, dried on a vacuum suction hotplate at 110 ° C. for 90 seconds to obtain a resist film having a thickness of 0.3 µm.
    [224]
    [225] In Table 1, the symbols used represent the following.
    [226] <Suzy>
    [227] Polymer-1: Poly (p-hydroxystyrene)
    [228] Mw = 10,000, Mw / Mn = 1.4
    [229] Polymer-2: Novolak Resin
    [230] m-cresol / p-cresol = 45/55 (molar ratio)
    [231] Mw = 6,500
    [232] <Acid generator>
    [233] PAG-1: Ph 3 S + CF 3 SO 3 -
    [234] P2:
    [235] The solvent is as follows.
    [236] a1: propylene glycol monomethyl ether acetate
    [237] a2: propylene glycol monomethyl ether propionate
    [238] b1: ethyl lactate
    [239] b2: butyl acetate
    [240] b3: 2-heptanone
    [241] b4: propylene glycol monomethyl ether
    [242] b5: ethyl 3-ethoxypropionate
    [243] c1: γ-butyrolactone
    [244] c2: ethylene carbonate
    [245] c3: propylene carbonate
    [246] About an organic basic compound, it is as follows.
    [247] 1: 2,4,5-triphenylimidazole
    [248] 2: 1,5-diazabicyclo [4.3.0] nona-5-ene
    [249] 3: 4-dimethylaminopyridine
    [250] 4: 1,8-diazabicyclo [5.4.0] undeca-7-ene
    [251] 5: N-cyclohexyl-N'-morpholinothiourea
    [252] About surfactant, it is as follows.
    [253] S-1: Toroidol S-366 (Toroid Chemical Co., Ltd. product)
    [254] S-2: Megafac F176 (product of Dainippon Ink Corporation)
    [255] S-3: Megafac R08 (product of Dainippon Ink Corporation)
    [256] S-4: polysiloxane KP-341 (manufactured by Shin-Etsu Chemical Co., Ltd.)
    [257] S-5: surflon s-382 (product of asahi glass)
    [258] (2) formation of a resist pattern
    [259] This resist film was irradiated using an electron beam drawing apparatus (acceleration voltage 50 KeV). After irradiation, each was heated for 90 seconds on a vacuum adsorption hot plate at 110 ° C., then immersed in a 2.38% by weight aqueous tetramethylammonium hydroxide (TMAH) solution for 60 seconds, washed with water for 30 seconds, and dried. The cross-sectional shape of the obtained pattern was observed with a scanning electron microscope.
    [260] Sensitivity was made into the minimum exposure amount at the time of resolving a 0.20 micrometer line (line: space = 1: 1), and the limit resolution power (separate resolution of a line and space) in the irradiation amount was made into resolution. When the 0.20 µm line (line: space = 1: 1) was not resolved, the limit resolution was regarded as resolution, and the irradiation dose at that time was regarded as sensitivity.
    [261] Evaluation of development defect, applicability, and solvent solubility were evaluated as follows.
    [262] [Development function]
    [263] The development defect function of the resist pattern obtained as described above was measured with KLA-2112, manufactured by KLA Tencol, Inc., and the obtained primary data value was defined as the development defect function.
    [264] [Coating property (in-plane uniformity)]
    [265] Each resist solution was applied onto an 8-inch silicon wafer, and the above-described resist layer was coated to obtain a resist film for in-plane uniformity measurement. This was measured by LambdaA manufactured by Dainippon Screen, Inc., and the thickness of the coating film was measured equally at 36 places so as to cross along the wafer diameter direction. The standard deviation of the obtained measured value was calculated | required, and the thing of three times its less than 50 was evaluated by A and the thing 50 or more.
    [266] Solvent Solubility
    [267] Solvent solubility was evaluated by particle initial value and the number of particle increase after time-lapse | storage by the following method. For the negative photoresist composition solution (plating solution) prepared as described above, the number of particles in the liquid immediately after the preparation (the particle initial value) and after being left at 23 ° C. for one week (the number of particles added after the passage of time) was manufactured by Leon Corporation. Calculated with a particle calculator. Along with the particle initial value, the particle increase number calculated in (number of particles after time)-(initial particle value) was evaluated. In addition, the particle counted the number of particles which is 0.3 micrometer or more in 1 ml of resist composition liquids.
    [268] Table 2 shows the results of the performance evaluation of the resists in Table 1.
    [269]
    [270] From the result of Table 2, it turns out that the negative resist composition of this invention is excellent in a characteristic compared with the comparative example.
    [271] In the examples, the organic basic compound was changed from 1 to 2, 3, 4, and 5, respectively, to obtain the same performance.
    [272] In addition, even if surfactant was changed into S-2, S-3, S-4, and S-5 from S-1 in Example, the same performance was obtained.
    [273] <Patterning by Equally X-ray Exposure>
    [274] Using the resist compositions of Example 1 and Comparative Examples 1 and 2, a resist film having a film thickness of 0.40 μm was obtained in the same manner as in Example 1. Subsequently, the patterning was carried out in the same manner as in the above example except that an equal magnification X-ray exposure apparatus (gap value; 20 nm) was used, and the resist performance (sensitivity, resolution, and pattern shape) was evaluated in the same manner as in the above example. The evaluation results are shown in Table 3.
    [275] Resist compositionSensitivity (mJ / ㎠)Resolution (μm)Pattern shape Example 1950.09Rectangle Comparative Example 11400.16Reverse taper shape Comparative Example 21700.14Reverse taper shape
    [276] From Table 3, it can be seen that the resist composition of the present invention shows very excellent performance even in X-ray exposure.
    [277] According to the present invention, it is possible to provide a negative photosensitive composition that is excellent in sensitivity, resolution, and has a rectangular profile, and also has excellent performance defects, coating properties (wafer in-plane uniformity), and solvent solubility.
    权利要求:
    Claims (20)
    [1" claim-type="Currently amended] (A) alkali-soluble resin, (B) a compound which can generate an acid when irradiated, (C) a crosslinking agent which can be crosslinked by the action of an acid, and (D) a mixed solvent (DI) and (DII) A negative resist composition containing any one of mixed solvents and irradiated with any one of an electron beam and an X-ray:
    (DI) a mixed solvent containing at least one solvent selected from the following group A and at least one solvent selected from the following group B, and
    (DII) Mixed solvent containing at least one solvent selected from the following group A and at least one solvent selected from the following group C
    Group A: propylene glycol monoalkyl ether carboxylate
    Group B: propylene glycol monoalkyl ether, alkyl lactate, acetate ester, chain ketone and alkylalkoxypropionate
    Group C: γ-butyrolactone, ethylene carbonate and propylene carbonate
    [2" claim-type="Currently amended] (A) an alkali-soluble resin, (B) a compound capable of generating an acid when irradiated with radiation, (C) a crosslinking agent that can be crosslinked by the action of an acid, and (D) at least one solvent selected from group A A negative resist composition comprising a mixed solvent comprising at least one solvent selected from group B and at least one solvent selected from group C below, wherein any one of an electron beam and an X-ray is irradiated:
    Group A: propylene glycol monoalkyl ether carboxylate
    Group B: propylene glycol monoalkyl ether, alkyl lactate, acetate ester, chain ketone and alkylalkoxypropionate
    Group C: γ-butyrolactone, ethylene carbonate and propylene carbonate
    [3" claim-type="Currently amended] The negative resist composition according to claim 1, wherein the resin (A) contains a structural unit represented by the following formula (1):

    In formula (1), R <1a> represents a hydrogen atom or a methyl group.
    [4" claim-type="Currently amended] The negative resist composition according to claim 1, wherein the resin (A) is a resin represented by the following formula (2):

    In formula (2), R <1a> -R <5a> respectively independently represents a hydrogen atom or a methyl group. R 6a to R 11a are each independently a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, a hydroxy group or a -C (= O) OR 14a (R 14a is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms) Indicates a). R 12a represents —COOR 15a (R 15a represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms). 0 <l ≦ 100, 0 ≦ m <100, 0 ≦ n <100, 0 ≦ o <100, 0 ≦ p <100 and l + m + n + o + p = 100.
    [5" claim-type="Currently amended] The negative resist composition of claim 1, wherein the compound (B) contains at least one compound represented by formulas (I) to (III):

    [In the general formula (I) ~ (III), R 1 ~ R 37 is a group represented by each individually a hydrogen atom, an alkyl group, an alkoxy group, a hydroxy group, a halogen atom, or -SR 38. R 38 represents an alkyl group or an aryl group. Two or more groups selected from R 1 to R 15 may be bonded directly to each other at the terminal or indirectly by an atom selected from oxygen, sulfur, and nitrogen to form a ring structure. good. R 16 to R 37 may also form a ring structure in the same manner as described above, and R 28 to R 37 may also form a ring structure in the same manner as described above. X − is an anion of an acid selected from benzenesulfonic acid, naphthalenesulfonic acid and anthracenesulfonic acid, which are alkyl, alkoxy, acyl, acyloxy, sulfonyl, sulfonyloxy, sulfonylamino, aryl, aralkyl and alkoxy Having at least one organic group selected from the group consisting of carbonyl groups.] [6" claim-type="Currently amended] The crosslinking agent according to claim 1, wherein the crosslinking agent (C) contains 3 to 5 benzene ring atom groups in a molecule, has a molecular weight of 1200 or less, and is selected from the group consisting of hydroxymethyl and alkoxymethyl groups in the 3 to 5 benzene ring atom groups. Negative resist composition, characterized in that the phenol derivative having two or more substituents.
    [7" claim-type="Currently amended] The negative resist composition of claim 1, further comprising an organic basic compound.
    [8" claim-type="Currently amended] The negative resist composition of claim 1, further comprising a surfactant containing at least one of a fluorine atom and a silicon atom.
    [9" claim-type="Currently amended] The negative resist composition according to claim 1, wherein the molecular weight distribution (Mw / Mn) of the resin (A) is 1.0 to 1.4.
    [10" claim-type="Currently amended] The negative resist composition according to claim 1, wherein the weight average molecular weight (Mw) of the resin (A) is 2000 to 9000.
    [11" claim-type="Currently amended] The negative resist composition according to claim 2, wherein the resin (A) contains a structural unit represented by the following formula (1):

    In formula (1), R <1a> represents a hydrogen atom or a methyl group.
    [12" claim-type="Currently amended] The negative resist composition according to claim 2, wherein the resin (A) is a resin represented by the following formula (2):

    In formula (2), R 1a to R 5a each independently represent a hydrogen atom or a methyl group. R 6a to R 11a each independently represent a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, and a hydroxyl group. Or —C (═O) OR 14a (R 14a represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms). R 12a represents —COOR 15a (R 15a represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms). 0 <l ≦ 100, 0 ≦ m <100, 0 ≦ n <100, 0 ≦ o <100, 0 ≦ p <100 and l + m + n + o + p = 100.
    [13" claim-type="Currently amended] The negative resist composition according to claim 2, wherein the compound (B) contains at least one compound represented by formulas (I) to (III):

    [In the general formula (I) ~ (III), R 1 ~ R 37 is a group represented by each individually a hydrogen atom, an alkyl group, an alkoxy group, a hydroxy group, a halogen atom, or -SR 38. R 38 represents an alkyl group or an aryl group. Two or more groups selected from R 1 to R 15 may be bonded directly to each other at the terminal or indirectly by an atom selected from oxygen, sulfur, and nitrogen to form a ring structure. good. R 16 to R 37 may also form a ring structure in the same manner as described above, and R 28 to R 37 may also form a ring structure in the same manner as described above. X − is an anion of an acid selected from benzenesulfonic acid, naphthalenesulfonic acid and anthracenesulfonic acid, which are alkyl, alkoxy, acyl, acyloxy, sulfonyl, sulfonyloxy, sulfonylamino, aryl, aralkyl and alkoxy Having at least one organic group selected from the group consisting of carbonyl groups.] [14" claim-type="Currently amended] The crosslinking agent according to claim 2, wherein the crosslinking agent (C) contains 3 to 5 benzene ring atom groups in a molecule, has a molecular weight of 1200 or less, and is selected from the group consisting of hydroxymethyl and alkoxymethyl groups in the 3 to 5 benzene ring atom groups. Negative resist composition, characterized in that the phenol derivative having two or more substituents.
    [15" claim-type="Currently amended] The negative resist composition of claim 2, further comprising an organic basic compound.
    [16" claim-type="Currently amended] The negative resist composition according to claim 2, further comprising a surfactant containing at least one of a fluorine atom and a silicon atom.
    [17" claim-type="Currently amended] The negative resist composition according to claim 2, wherein the molecular weight distribution (Mw / Mn) of the resin (A) is 1.0 to 1.4.
    [18" claim-type="Currently amended] The negative resist composition according to claim 2, wherein the weight average molecular weight (Mw) of the resin (A) is 2000 to 9000.
    [19" claim-type="Currently amended] Forming a resist film by applying the negative resist composition according to claim 1 onto a substrate, irradiating any one of electron beams and X-rays to the resist film, and developing the resist film. Way.
    [20" claim-type="Currently amended] Forming a resist film by applying the negative resist composition according to claim 2 onto a substrate; irradiating any one of electron beams and X-rays to the resist film; and developing the resist film. Way.
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    同族专利:
    公开号 | 公开日
    JP4194259B2|2008-12-10|
    JP2002148806A|2002-05-22|
    KR100851842B1|2008-08-13|
    KR20080053455A|2008-06-13|
    US6887645B2|2005-05-03|
    TW536662B|2003-06-11|
    EP1193555A1|2002-04-03|
    US20020061462A1|2002-05-23|
    KR100895455B1|2009-05-07|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    2000-08-31|Priority to JP2000263815
    2000-08-31|Priority to JPJP-P-2000-00263815
    2001-08-31|Application filed by 무네유키 가코우, 후지 샤신 필름 가부시기가이샤
    2002-03-08|Publication of KR20020018584A
    2008-08-13|Application granted
    2008-08-13|Publication of KR100851842B1
    优先权:
    申请号 | 申请日 | 专利标题
    JP2000263815|2000-08-31|
    JPJP-P-2000-00263815|2000-08-31|
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