Acetal Compound, Polymer, Resist Composition and Patterning Process

专利摘要:
PURPOSE: A novel acetal compound, a macromolecule compound, a resist material, and a method for forming a pattern using the same resist material are provided. The resist material can have improved high energy response, sensitivity, resolution and etching resistance, so that it can be useful in a minute processing. CONSTITUTION: The novel acetal compound is represented by formula(1), wherein R is hydrogen, or linear, branched or cyclic chain alkyl having carbon number of 1 to 6; X is -(CH2)m- in which one hydrogen may be substituted with hydroxy or acetoxy; k is 0 or 1; m is an integer of 1 to 8; and n is 2 or 3. The macromolecule compound having average molecular weight of 1,000 to 500,000 contains a repeated unit of the novel acetal compound.
公开号:KR20020013413A
申请号:KR1020010047366
申请日:2001-08-07
公开日:2002-02-20
发明作者:다께루 와따나베；다께시 긴쇼；고지 하세가와；쯔네히로 니시；무쯔오 나까시마；세이이찌로 다찌바나；준 하따게야마
申请人:카나가와 치히로；신에쓰 가가꾸 고교 가부시끼가이샤；
IPC主号:

专利说明:

Acetal Compound, Polymer Compound, Resist Material and Pattern Forming Method {Acetal Compound, Polymer, Resist Composition and Patterning Process}
[1] The present invention relates to (1) a novel acetal compound useful as a monomer for forming a base resin of a resist material suitable for fine processing technology, (2) a polymer compound containing a specific repeating unit, and (3) containing this polymer compound as a base resin. The resist material mentioned above, and (4) It is related with the pattern formation method using this resist material.
[2] In recent years, finer pattern rule has been required due to higher integration and higher speed of LSI, and far ultraviolet lithography has been promising as a next generation fine processing technology. Among them, photolithography using KrF excimer laser light and ArF excimer laser light as a light source is regarded as an indispensable technique for ultrafine processing of 0.3 μm or less.
[3] In the resist material for KrF excimer laser, polyhydroxystyrene, which has a practical level of transparency and etching resistance, has become a standard base resin. In the resist material for ArF excimer laser, materials such as polyacrylic acid or polymethacrylic acid derivatives and polymer compounds containing aliphatic cyclic compounds in the main chain have been studied. .
[4] That is, in the case of a resist material using a polyacrylic acid or a polymethacrylic acid derivative, there are advantages such as high reactivity of the acid-decomposable group and excellent substrate adhesiveness, and relatively good results can be obtained in sensitivity and resolution. Because of the weak main chain, the etching resistance was very low and not practical. On the other hand, in the case of a resist material using a polymer compound containing an aliphatic cyclic compound in the main chain, since the main chain of the resin is sufficiently rigid, the etching resistance is practical, but since the reactivity of the acid-decomposable protecting group is significantly lower than that of the acrylic system, Since the resolution is low and the main chain of the resin is too rigid, the substrate adhesion is low and is not suitable. While further miniaturization of pattern rules is required, there is a need for a resist material that exhibits excellent performance in all of sensitivity, resolution, and etching resistance.
[5] The present invention has been made in view of the above circumstances, and (1) a novel acetal compound useful as a monomer for preparing a photoresist material having excellent adhesion and transparency in photolithography using a wavelength of 300 nm or less, particularly KrF and ArF excimer laser light as a light source. (2) a polymer compound having excellent reactivity, rigidity and substrate adhesion, (3) a resist material having this polymer compound as a base resin and having a resolution and etching resistance greatly exceeding that of conventional products, and (4) this resist material It is an object to provide a pattern formation method used.
[6] MEANS TO SOLVE THE PROBLEM The present inventors earnestly examined in order to achieve the said objective, As a result, the acetal compound represented by following formula (1)-(3) can be obtained easily in high yield, and the resin obtained using this acetal compound It was found that the transparency at the exposure wavelength of an excimer laser was high, and the resist material using this as a base resin was excellent in substrate adhesiveness. Further, a novel high molecular weight compound having a weight average molecular weight of 1,000 to 500,000 containing a repeating unit represented by the following formula (4-1) or (4-2) obtained by the method described below is excellent in reactivity, rigidity and substrate adhesion, It has been found that the resolution and etching resistance of the resist material using the base resin obtained are high, and that the resist material is very effective for precise microfabrication.
[7] That is, the present invention provides an acetal compound represented by the following formula (1).
[8] <Formula 1>
[9]
[10] In the formula,
[11] R is a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 6 carbon atoms,
[12] X represents-(CH ₂ ) _m -in which one hydrogen atom may be substituted with a hydroxy group or an acetoxy group,
[13] k is 0 or 1,
[14] m is an integer satisfying 1≤m≤8,
[15] n is 2 or 3.
[16] The present invention also provides an acetal compound represented by the following formula (2).
[17]
[18] In the formula,
[19] R represents a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 6 carbon atoms,
[20] k is 0 or 1,
[21] m is an integer satisfying 1≤m≤8,
[22] n is 2 or 3.
[23] The present invention also provides an acetal compound represented by the following formula (3).
[24]
[25] In the formula,
[26] R is a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 6 carbon atoms,
[27] Y represents a hydroxy group or an acetoxy group,
[28] k is 0 or 1,
[29] p and q are zero or positive integers satisfying 0 ≦ p + q ≦ 7,
[30] n is 2 or 3.
[31] In addition, the present invention provides the following polymer compound.
[32] [I] A polymer compound having a weight average molecular weight of 1,000 to 500,000, comprising a repeating unit represented by the following formula (4-1) or (4-2).
[33] <Formula 4-1>
[34]
[35] <Formula 4-2>
[36]
[37] In the formula,
[38] R is a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 6 carbon atoms,
[39] W represents — (CH ₂ ) _m — in which a single bond or one hydrogen atom may be substituted with a hydroxy group or an acetoxy group,
[40] k is 0 or 1,
[41] m is an integer from 1 to 8,
[42] n is 2 or 3.
[43] [II] The polymer compound according to [I], further comprising a repeating unit represented by the following formula (5-1) in addition to the repeating unit represented by the formula (4-1).
[44] <Formula 5-1>
[45]
[46] In the formula,
[47] k is the same as above,
[48] R ¹ represents a hydrogen atom, a methyl group or CH ₂ CO ₂ R ³ ,
[49] R ² represents a hydrogen atom, a methyl group or CO ₂ R ³ ,
[50] R ³ represents a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms,
[51] R ⁴ represents an acid labile group,
[52] R ⁵ is a halogen atom, a hydroxy group, a straight, branched or cyclic alkoxy group having 1 to 15 carbon atoms, an acyloxy group, an alkoxycarbonyloxy group or an alkylsulfonyloxy group, or a straight, branched or cyclic alkoxy group having 2 to 15 carbon atoms An alkoxy group, some or all of the hydrogen atoms on the constituent carbon atoms may be substituted with halogen atoms,
[53] Z represents a single bond or a linear, branched, or cyclic (h + 2) carbon group having 1 to 5 carbon atoms, and in the case of a hydrocarbon group, at least one methylene is substituted with oxygen to form a chain or cyclic ether, or Two hydrogens on carbon may be substituted with oxygen to form a ketone,
[54] h is 0, 1 or 2.
[55] [III] The polymer compound according to the above [I], further comprising a repeating unit represented by the following formulas 5-1 and 6 in addition to the repeating unit represented by the formula (4-1).
[56] <Formula 5-1>
[57]
[58]
[59] In the formula, k, h and R ¹ to R ⁵ are the same as above.
[60] [IV] In the above [I], in addition to the repeating unit represented by Chemical Formula 4-1, the repeating unit represented by the following Chemical Formula 5-1 and / or the repeating unit represented by the following Chemical Formula 7 and the following Chemical Formula 6 A high molecular compound characterized by containing a repeating unit represented by.
[61] <Formula 5-1>
[62]
[63] <Formula 6>
[64]
[65]
[66] In the formula, k, h and R ¹ to R ⁵ are the same as above.
[67] [V] The polymer compound according to [I], further comprising a repeating unit represented by the following Formula 5-2 in addition to the repeating unit represented by the above Formula 4-2.
[68] <Formula 5-2>
[69]
[70] In the formula, k, h and R ¹ to R ⁵ are the same as above.
[71] In addition, the present invention provides the following resist material.
[72] [VI] A resist material comprising the polymer compound according to any one of [I] to [V].
[73] Moreover, this invention provides the following pattern formation method.
[74] [VII] A step of applying the resist material according to [VI] on a substrate,
[75] Exposing to high energy or electron beams through a photomask after heat treatment, and
[76] Process of developing using a developer after heat treatment if necessary
[77] Pattern forming method comprising a.
[78] The high molecular compound containing the repeating unit represented by the said Formula (4-1) or (4-2) has high rigidity since it contains the alicyclic which has bridge | crosslinking in a main chain. Moreover, since it has a highly polar 5-membered ring or 6-membered ring cyclic acetal structure, it is also excellent in board | substrate adhesiveness. In addition, conventional excessive stiffness is adequately alleviated by spacers of suitable length introduced between the cyclic acetal structure and the rigid main chain, and the cyclic acetal structure portions are disposed away from the main chain, resulting in more effective functioning as a polar group. As a result, the substrate adhesiveness significantly exceeds the conventional product. In addition, the low reactivity, which has been a major problem in the past, has been improved by increasing the acid diffusion caused by the introduction effect of the spacer, and at the same time, the reduction of the line edge roughness has also been achieved. Therefore, the resist material using this polymer compound as a base resin has excellent performance in all of sensitivity, resolution, and etching resistance, and is very useful for fine pattern formation.
[79] Hereinafter, the present invention will be described in more detail.
[80] In the acetal compound represented by Chemical Formulas 1 to 3 according to the present invention, the alkyl group of R is methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tert-butyl, n-pentyl, cyclopentyl , n-hexyl, cyclohexyl and the like are exemplified.
[81] Specific examples of the acetal compound of the present invention include the following. In the following chemical formula, Ac represents an acetyl group (CH ₃ CO-).
[82]
[83]
[84] According to the present invention, in a resist polymer using such a compound as a monomer, a dioxane or dioxolane moiety, which is considered to be a polar group for expression of adhesion, may be replaced from a polymer main chain with one hydrogen atom of the linking group [Formula 1] being a hydroxyl group or an acetoxy group. also with - (CH _{2) m} -] can be located away from the part as it is considered to exert a good substrate adhesion. In addition, by selecting the most suitable from the possible combinations of these linking groups (the number m of methylene, the presence of a hydroxy group and the acetoxy group) and the side chain [R in Formula 1] and using them as polymer raw materials, the fat solubility of the entire polymer is appropriately adjusted. It is thought that the dissolution characteristics of the polymer can be controlled.
[85] Although the acetal compound of this invention can be manufactured, for example by the following method, it is not limited to this. It will be described in detail below.
[86] First, the case where the linking group is an unsubstituted alkylene group, that is, the case where the hydrogen atom is-(CH ₂ ) m-not substituted with a hydroxy group or an acetoxy group, will be described in detail. In this case, the target is represented by the formula (2).
[87] If the corresponding carbonyl compound (8) is available or can be easily synthesized, the acetalization reaction of the carbonyl compound (8) with the diol compound (ethylene glycol or 1,3-propanediol), i.e., by acid catalyst dehydration reaction The desired acetal compound (2) can be synthesized.
[88]
[89] In the formula, R, k, m and n are the same as above.
[90] The amount of the diol compound, ie, ethylene glycol or 1,3-propanediol, is preferably from 0.9 to 10 moles, in particular from 1.0 to 1.8 moles, per mole of carbonyl compound. The reaction is carried out in the absence of solvent or in the presence of an acid catalyst. As an acid used as a catalyst, inorganic acids, such as hydrochloric acid, hydrobromic acid, sulfuric acid, nitric acid, and perchloric acid, or these salts, organic acids, such as oxalic acid, p-toluenesulfonic acid, benzenesulfonic acid, or these salts can be illustrated. The amount of acid to be used is preferably 0.01 to 10 moles, particularly 0.01 to 0.5 moles, per mole of carbonyl compound. Examples of the solvent used may include hydrocarbons such as ethylene glycol or 1,3-propanediol, which is a diol compound to react, or n-hexane, n-heptane, benzene, toluene, xylene, cumene, tetrahydrofuran, diethyl ether, Ethers, such as di-n-butyl ether and 1, 4- dioxane, can be selected according to reaction conditions and used individually or in mixture. The reaction temperature is in the range from room temperature to the reflux temperature of the solvent, preferably from room temperature to 100 ° C. In order to remove the water generated during the formation of the dioxolane or dioxane ring, hydrocarbons such as n-hexane, n-heptane, benzene, toluene, xylene, cumene and the like are reacted at reflux temperature and actively reacted by azeotropy. Particularly preferred is a method of accelerating the reaction by removing the out of the system. The reaction time is preferably in terms of the yield in order to complete the reaction by tracking the reaction by gas chromatography (GC) and silica gel thin layer chromatography (TLC), but usually about 0.2 to 2 hours. From the reaction mixture, the desired acetal compound (2) is obtained by usual aqueous work-up. Compound (1) is purified in accordance with conventional methods such as distillation, chromatography, recrystallization.
[91] In addition to the carbonyl compound (8) itself, for example, as shown below, equivalents of carbonyl compounds such as acetal compound (9) and enolether compound (10) can also be used as raw materials.
[92]
[93]
[94] In the formula,
[95] R, k, m and n are the same as above,
[96] R 'represents an alkyl group, such as a methyl group, an ethyl group, or a trialkylsilyl group.
[97] In the case of using these as raw materials, the target object (2) is induced by a so-called acetal exchange reaction (in this case, a de-R'OH reaction in response to the dehydration reaction). Also in this case, the synthesis of the target object (2) can be realized under the same conditions as the above-described acid catalyst dehydration reaction.
[98] For example, when the alkylene side chain of the target is relatively long, i.e., when m≥3 in the general formula (2), the enolether compound (10) can be obtained by the following reaction, followed by derivation of the target acetal compound (2). It is especially valid.
[99]
[100] In the formula,
[101] Z represents a halogen atom,
[102] R, R ', k, m and n are the same as above.
[103] The enolether compound (10) can be obtained by reacting the Grignard reagent (11), which can be prepared by conventional methods from the corresponding halogen compound, with an acrolein acetal derivative in the presence of a copper catalyst. The acrolein acetal derivative is preferably used 1.0 to 5.0 moles, preferably 1.0 to 2.0 moles per 1 mole of Grignard reagent. Ethers such as tetrahydrofuran, diethyl ether, di-n-butyl ether, 1,4-dioxane, and hydrocarbons such as n-hexane, n-heptane, benzene, toluene, xylene, cumene as reaction solvents; It can be used alone or in combination depending on the selection. As a copper catalyst, monovalent copper salts, such as copper chloride (I), copper bromide (I), copper iodide (I), and copper acetate (I), or copper chloride (II), copper bromide (II), and copper iodide (II) , Divalent copper salts such as copper acetate (II), or a copper catalyst in which an additive is added thereto, for example, dilithium tetrachloro cuprate (Li ₂ CuCl ₄ ) prepared from copper chloride (II) chloride and lithium chloride Copper complex compounds, such as these, can be illustrated. The amount of copper catalyst to be used is preferably 0.01 to 1.0 moles, particularly 0.01 to 0.5 moles, per 1 mole of Grignard reagent. The reaction temperature is carried out at -50 to 80 ° C, preferably 0 to 50 ° C. The reaction time is preferably in terms of the yield in order to complete the reaction by tracking the reaction by gas chromatography (GC) or silica gel thin layer chromatography (TLC), but it is usually about 0.5 to 20 hours. From the reaction mixture, an enolether compound (10) is obtained by conventional aqueous work-up. If necessary, compound (10) may be purified according to conventional methods such as distillation, chromatography, recrystallization, etc., but if it has sufficient purity, it can be used as a substrate of the acetal exchange reaction described above in the form of a crude product.
[104] Then, when the alkylene of the linking group which is substituted with a hydroxy group, that is, the connection of one group which is substituted with a hydrogen atom of a hydroxy group-be described in detail when the - (CH _{2) m.} In this case, the target corresponds to the case where Y = OH in the general formula (3).
[105] For example, as shown below, the addition reaction of the Grignard reagent (13) to the corresponding aldehyde compound (12), or the addition reaction of the Grignard reagent (16) to the aldehyde compound (15) (14) ) Can be synthesized.
[106]
[107] In the formula,
[108] Z represents a halogen atom,
[109] R, k, p and q are the same as above.
[110]
[111] In the formula,
[112] Z represents a halogen atom,
[113] R, k, p and q are the same as above.
[114] In any case, the aldehyde compound is reacted with a Grignard reagent prepared by conventional methods from the corresponding halogen compound in the solvent. Ethers such as tetrahydrofuran, diethyl ether, di-n-butyl ether, 1,4-dioxane, and hydrocarbons such as n-hexane, n-heptane, benzene, toluene, xylene, cumene as reaction solvents; It can be used alone or in combination depending on the selection. The Grignard reagent is preferably used in the range of 1.0 to 5.0 moles, preferably 1.0 to 2.0 moles, per 1 mole of the aldehyde compound. The reaction temperature is carried out at -50 to 80 ° C, preferably 0 to 50 ° C. The reaction time is preferably in terms of the yield in order to complete the reaction by tracking the reaction by gas chromatography (GC) or silica gel thin layer chromatography (TLC), but it is usually about 0.5 to 20 hours. The usual aqueous work-up from the reaction mixture gives the desired product 14 in which the linking group is substituted with a hydroxy group. If necessary, compound (14) can be purified according to conventional methods such as distillation, chromatography, recrystallization, and the like.
[115] Further, if it is an alkylene of the linking group is substituted with an acetoxy group, i.e., in connection groups are substituted by one hydrogen atom of the acetoxy group - will be described in detail with respect to the case of - (CH _{2) m.} In this case, the target substance corresponds to the case where Y = OAc in the formula (3). In this case, the target object (17) can be synthesize | combined by acetylating the compound (14) obtained by said reaction.
[116]
[117] Typically, the reaction is effected with an acetylating agent such as acetic anhydride, acetyl chloride, acetyl bromide, p-nitrophenyl acetate in the presence of a base. The acetylating agent is used in the range of 1.0 to 5.0 moles, preferably 1.0 to 2.0 moles, per 1 mole of the hydroxy compound (14). As the base to be used, tertiary amines such as triethylamine, diethylisopropylamine, pyridine, N, N-dimethylaniline and 4-dimethylaminopyridine can be preferably exemplified, and these may be used alone or in combination. Can be. The base is used in an amount of 1.0 to 20 mol, preferably 1.0 to 2.0 mol, based on 1 mol of the hydroxy compound (14). Although the base itself can be used as a solvent, ethers, such as tetrahydrofuran, diethyl ether, di-n-butyl ether, and 1, 4- dioxane, n-hexane, n-heptane, benzene, toluene, xylene, Hydrocarbons, such as cumene, Chlorination solvents, such as methylene chloride, chloroform, and dichloroethylene, can also be used. The reaction temperature is carried out at -50 to 80 ° C, preferably 0 to 50 ° C. The reaction time is preferably in terms of the yield in order to complete the reaction by tracking the reaction by gas chromatography (GC) or silica gel thin layer chromatography (TLC), but it is usually about 0.5 to 40 hours. The usual aqueous work-up from the reaction mixture gives the desired product (17) in which the linking group is substituted with an acetoxy group. If necessary, compound (17) can be purified according to conventional methods such as distillation, chromatography, recrystallization and the like.
[118] When the polymer is prepared using the acetal compound of the present invention prepared as described above as a monomer, generally, the monomer is mixed with a solvent, a catalyst or a polymerization initiator is added, and in some cases, a polymerization reaction while heating or cooling. Is done. Such polymerization can be performed according to a conventional method. Examples of the above polymerization include ring-opening metathesis polymerization, addition polymerization, alternating copolymerization with maleic anhydride or maleimide, and the like, and other norbornene-type monomers may be copolymerized.
[119] Next, the novel high molecular compound of the present invention has a weight average molecular weight of 1,000 to 500,000, characterized by containing a repeating unit represented by the following formula (4-1) or (4-2).
[120] <Formula 4-1>
[121]
[122] <Formula 4-2>
[123]
[124] In the formula,
[125] R represents a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 6 carbon atoms, specifically, a hydrogen atom, a methyl group, an ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, tert-amyl group, n-pentyl group, n-hexyl group, cyclopentyl group, cyclohexyl group, etc. can be illustrated,
[126] W represents — (CH ₂ ) _m — in which a single bond or one hydrogen atom may be substituted with a hydroxy group or an acetoxy group,
[127] m represents an integer of 1 to 8, preferably 1 to 6,
[128] Specific examples of W include a single bond, methylene group, ethylene group, n-propylene group, n-butylene group, n-pentylene group, n-hexylene group, n-heptylene group, n-octylene group, 1-hydroxy -n-propylene group, 1-acetoxy-n-propylene group, 2-hydroxy-n-propylene group, 2-acetoxy-n-propylene group, 1-hydroxy-n-butylene group, 1-acetoxy -n-butylene group, 2-hydroxy-n-butylene group, 2-acetoxy-n-butylene group, 1-hydroxy-n-pentylene group, 1-acetoxy-n-pentylene group, 2-hydroxy -n-pentylene group, 2-acetoxy-n-pentylene group, 4-hydroxy-n-pentylene group, 4-acetoxy-n-pentylene group, 1-hydroxy-n-hexylene group, 1-acene Oxy-n-hexylene group, 2-hydroxy-n-hexylene group, 2-acetoxy-n-hexylene group, 4-hydroxy-n-hexylene group, 4-acetoxy-n-hexylene Groups and the like,
[129] k is 0 or 1,
[130] n is 2 or 3.
[131] In addition, the polymer compound of this invention can be made into the following four types more specifically.
[132] (1) In addition to the repeating unit represented by the said Formula (4-1), the thing containing the repeating unit represented by the following Formula (5-1).
[133] <Formula 5-1>
[134]
[135] In the formula,
[136] k is the same as above,
[137] R ¹ represents a hydrogen atom, a methyl group or CH ₂ CO ₂ R ³ ,
[138] R ² represents a hydrogen atom, a methyl group or CO ₂ R ³ ,
[139] R ³ represents a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms,
[140] R ⁴ represents an acid labile group,
[141] R ⁵ is a halogen atom, a hydroxy group, a straight, branched or cyclic alkoxy group having 1 to 15 carbon atoms, an acyloxy group, an alkoxycarbonyloxy group or an alkylsulfonyloxy group, or a straight, branched or cyclic alkoxy group having 2 to 15 carbon atoms An alkoxy group, some or all of the hydrogen atoms on the constituent carbon atoms may be substituted with halogen atoms,
[142] Z represents a single bond or a straight, branched or cyclic (h + 2) carbon group having 1 to 5 carbon atoms, and in the case of a hydrocarbon group, at least one methylene is substituted with an oxygen atom to form a chain or cyclic ether, or Two hydrogen atoms on the carbon may be substituted with oxygen atoms to form a ketone,
[143] h is 0, 1 or 2.
[144] (2) In addition to the repeating unit represented by the said General formula (4-1), the thing containing the repeating unit represented by following formula (5-1) and (6).
[145] <Formula 5-1>
[146]
[147] <Formula 6>
[148]
[149] In the formula, k, h and R ¹ to R ⁵ are the same as above.
[150] (3) In addition to the repeating unit represented by Formula 4-1, the repeating unit represented by the following Formula 5-1 and / or the repeating unit represented by the following Formula 7 and the repeating unit represented by the following Formula 6 To do.
[151] <Formula 5-1>
[152]
[153] <Formula 6>
[154]
[155] <Formula 7>
[156]
[157] In the formula, k, h and R ¹ to R ⁵ are the same as above.
[158] (4) In addition to the repeating unit represented by the said Formula (4-2), the thing containing the repeating unit represented by the following Formula (5-2).
[159] <Formula 5-2>
[160]
[161] In the formula, k, h and R ¹ to R ⁵ are the same as above.
[162] Here, R ¹ represents a hydrogen atom, a methyl group or CH ₂ CO ₂ R ³ . Specific examples of R ³ will be described later. R ² represents a hydrogen atom, a methyl group or CO ₂ R ³ . R ³ represents a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms, specifically, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, tert -Amyl group, n-pentyl group, n-hexyl group, cyclopentyl group, cyclohexyl group, ethylcyclopentyl group, butylcyclopentyl group, ethylcyclohexyl group, butylcyclohexyl group, adamantyl group, ethyl adamantyl group And a butyl adamantyl group etc. can be illustrated. R <^4> represents an acid labile group, The specific example is mentioned later. R ⁵ is a halogen atom, a hydroxy group, a straight, branched or cyclic alkoxy group having 1 to 15 carbon atoms, an acyloxy group, an alkoxycarbonyloxy group or an alkylsulfonyloxy group, or a straight, branched or cyclic alkoxy group having 2 to 15 carbon atoms An alkoxy group, and some or all of the hydrogen atoms on the constituent carbon atoms may be substituted with halogen atoms, specifically, fluorine, chlorine, bromine, methoxy group, ethoxy group, n-propoxy group, isopropoxy group, n- Butoxy group, sec-butoxy group, tert-butoxy group, tert-amyloxy group, n-pentoxy group, n-hexyloxy group, cyclopentyloxy group, cyclohexyloxy group, ethylcyclopentyloxy group, butylcyclopentyl octa Period, ethylcyclohexyloxy group, butylcyclohexyloxy group, adamantyloxy group, ethyl adamantyloxy group, butyl adamantyloxy group, formyloxy group, acetoxy group, ethylcarbonyloxy group, pivaloyloxy group, Methoxy A carbonyloxy group, ethoxycarbonyloxy group, tert-butoxycarbonyloxy group, methanesulfonyloxy group, ethanesulfonyloxy group, n-butanesulfonyloxy group, trifluoroacetoxy group, trichloroacetoxy group, 3,3,3-trifluoroethylcarbonyloxy group, methoxymethoxy group, 1-ethoxyethoxy group, 1-ethoxypropoxy group, 1-tert-butoxyethoxy group, 1-cyclohexyl An oxyethoxy group, 2-tetrahydrofuranyloxy group, 2-tetrahydropyranyloxy group, etc. can be illustrated. Z represents a single bond or a linear, branched or cyclic (h + 2) carbon group having 1 to 5 carbon atoms, and in the case of a hydrocarbon group, at least one methylene is substituted with oxygen to form a chain or cyclic ether, or Two hydrogens on carbon may be substituted with oxygen to form a ketone, for example when m = 0, specifically methylene, ethylene, trimethylene, tetramethylene, pentamethylene, hexamethylene, 1,2-propane Diyl, 1,3-butanediyl, 1-oxo-2-oxapropane-1,3-diyl, 3-methyl-1-oxo-2-oxabutane-1,4-diyl and the like can be exemplified, and h When it is other than 0, the (h + 2) valence group etc. which removed 1 or 2 hydrogen atoms from the said specific example can be illustrated.
[163] Various acid labile groups of R ⁴ can be used, but specifically, groups represented by the following formulas L1 to L4, C4-20, preferably 4-15 tertiary alkyl groups, and each alkyl group each have 1-6 carbon atoms. A phosphorus trialkyl silyl group, a C4-C20 oxoalkyl group, etc. are mentioned.
[164]
[165] Here, the dotted line represents a bonding hand (hereinafter same). In the formula, R ^L01 and R ^L02 represent a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 18 carbon atoms, preferably 1 to 10 carbon atoms, specifically, methyl group, ethyl group, n-propyl group, isopropyl group , n-butyl group, sec-butyl group, tert-butyl group, cyclopentyl group, cyclohexyl group, 2-ethylhexyl group, n-octyl group and the like can be exemplified. R ^L03 represents a monovalent hydrocarbon group having 1 to 18, preferably 1 to 10, carbon atoms which may have a hetero atom such as an oxygen atom, and a linear, branched or cyclic alkyl group, and some of these hydrogen atoms are hydroxy, alkoxy, The thing substituted by the oxo group, an amino group, an alkylamino group, etc. are mentioned, Specifically, the following substituted alkyl group etc. can be illustrated.
[166]
[167] R ^L01 and R ^L02 , R ^L01 and R ^L03 , R ^L02 and R ^L03 may combine with each other to form a ring, and when forming a ring, R ^L01 , R ^L02 and R ^L03 each have 1 to 18 carbon atoms, preferably Preferably 1 to 10 straight or branched chain alkylene groups.
[168] R ^L04 represents a C4-C20, preferably a C3- ^C15 tertiary alkyl group, each alkyl group has a C1-C6 trialkylsilyl group, a C4-C20 oxoalkyl group, or a group represented by the above formula L1, Specific examples of tertiary alkyl groups include tert-butyl group, tert-amyl group, 1,1-diethylpropyl group, 2-cyclopentylpropan-2-yl group, 2-cyclohexylpropan-2-yl group, and 2- (non Cyclo [2.2.1] heptan-2-yl) propan-2-yl group, 2- (adamantan-1-yl) propan-2-yl group, 1-ethylcyclopentyl group, 1-butylcyclopentyl group, 1 -Ethylcyclohexyl group, 1-butylcyclohexyl group, 1-ethyl-2-cyclopentenyl group, 1-ethyl-2-cyclohexenyl group, 2-methyl-2-adamantyl group, 2-ethyl-2- Adamantyl group etc. can be illustrated, A trialkylsilyl group can specifically illustrate a trimethylsilyl group, a triethylsilyl group, a dimethyl- tert- butyl silyl group, etc., and an oxoalkyl group specifically, 3-oxocyclo There can be mentioned a group, such as 4-methyl-2-oxo-dioxane-4-yl group, 5-methyl-2-oxo-5-oxide solran weather. y is an integer of 0-6.
[169] R ^L05 represents a monovalent hydrocarbon group having 1 to 8 carbon atoms or optionally substituted aryl group having 6 to 20 carbon atoms which may include a hetero atom, and specific examples of the monovalent hydrocarbon group which may include a hetero atom include a methyl group and an ethyl group. straight chains such as n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, tert-amyl group, n-pentyl group, n-hexyl group, cyclopentyl group and cyclohexyl group Branched or cyclic alkyl groups, those in which some of their hydrogen atoms are substituted with hydroxy groups, alkoxy groups, carboxyl groups, alkoxycarbonyl groups, oxo groups, amino groups, alkylamino groups, cyano groups, mercapto groups, alkylthio groups, sulfo groups, and the like. Illustrative examples of the aryl group which may be substituted include phenyl group, methylphenyl group, naphthyl group, anthryl group, phenanthryl group, pyrenyl group and the like. p is 0 or 1, q is 0, 1, 2 or 3, and is a number which satisfy | fills 2p + q = 2 or 3.
[170] R ^L06 represents a monovalent hydrocarbon group having 1 to 8 carbon atoms or an optionally substituted aryl group having 6 to 20 carbon atoms, which may include a hetero atom, and specifically, the same as those for R ^L05 can be exemplified. R ^L07 to R ^L16 each independently represent a hydrogen atom or a monovalent hydrocarbon group having 1 to 15 carbon atoms that may contain a hetero atom, and specifically, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl Group, sec-butyl group, tert-butyl group, tert-amyl group, n-pentyl group, n-hexyl group, n-octyl group, n-nonyl group, n-decyl group, cyclopentyl group, cyclohexyl group, Linear, branched or cyclic alkyl groups such as cyclopentylmethyl group, cyclopentylethyl group, cyclopentylbutyl group, cyclohexylmethyl group, cyclohexylethyl group and cyclohexylbutyl group, and some of these hydrogen atoms are hydroxy group, alkoxy group, carboxy group, alkoxy And carbonyl group, oxo group, amino group, alkylamino group, cyano group, mercapto group, alkylthio group, sulfo group and the like. R ^L07 to R ^L16 may combine with each other to form a ring (for example, R ^L07 and R ^L08 , R ^L07 and R ^L09 , R ^L08 and R ^L10 , R ^L09 and R ^L10 , R ^L11 and R ^L12 , R ^L13 , R ^L14, and the like), in which case a divalent hydrocarbon group having 1 to 15 carbon atoms that may contain a hetero atom, specifically, one hydrogen atom removed from the one exemplified in the monovalent hydrocarbon group; Can be illustrated. In addition, R ^L07 to R ^L16 may be bonded directly to one another bonded to adjacent carbons to form a double bond (for example, R ^L07 and R ^L09 , R ^L09 and R ^L15 , R ^L13 and R ^L15, etc.). .
[171] Specific examples of the linear or branched chain among the acid labile groups represented by the above formula (L1) include the following groups.
[172]
[173] Among the acid labile groups represented by the above formula (L1), cyclic ones specifically include a tetrahydrofuran-2-yl group, 2-methyltetrahydrofuran-2-yl group, tetrahydropyran-2-yl group, and 2-methyltetrahydropyran- 2- diyl group etc. can be illustrated.
[174] Specific examples of the acid labile groups of the formula L2 include tert-butoxycarbonyl group, tert-butoxycarbonylmethyl group, tert-amyloxycarbonyl group, tert-amyloxycarbonylmethyl group, 1,1-diethylpropyloxycarbonyl group, 1, 1-diethylpropyloxycarbonylmethyl group, 1-ethylcyclopentyloxycarbonyl group, 1-ethylcyclopentyloxycarbonylmethyl group, 1-ethyl-2-cyclopentenyloxycarbonyl group, 1-ethyl-2-cyclopentenyloxy Carbonylmethyl group, 1-ethoxyethoxycarbonylmethyl group, 2-tetrahydropyranyloxycarbonylmethyl group, 2-tetrahydrofuranyloxycarbonylmethyl group, etc. can be illustrated.
[175] Specific examples of the acid labile groups of Formula L3 include 1-methylcyclopentyl, 1-ethylcyclopentyl, 1-n-propylcyclopentyl, 1-isopropylcyclopentyl, 1-n-butylcyclopentyl, and 1-sec-butyl Cyclopentyl, 1-methylcyclohexyl, 1-ethylcyclohexyl, 3-methyl-1-cyclopenten-3-yl, 3-ethyl-1-cyclopenten-3-yl, 3-methyl-1-cyclohexene- 3-yl, 3-ethyl-1-cyclohexen-3-yl and the like can be exemplified.
[176] Specific examples of the acid labile group represented by Chemical Formula L4 include the following groups.
[177]
[178] Examples of the tertiary alkyl group having 4 to 20 carbon atoms, the trialkylsilyl group having 1 to 6 carbon atoms each, and the oxoalkyl group having 4 to 20 carbon atoms may specifically include the same ones as those mentioned for R ^L04 . .
[179] Although the specific example of the repeating unit represented by the said General formula (4-1) is shown below, this invention is not limited to this.
[180]
[181]
[182] Although the specific example of the repeating unit represented by the said General formula (4-2) is shown below, this invention is not limited to this.
[183]
[184]
[185] Although the specific example of the repeating unit represented by the said General formula (5-1) is shown below, this invention is not limited to this.
[186]
[187] Although the specific example of the repeating unit represented by the said General formula (5-2) is shown below, this invention is not limited to this.
[188]
[189] Although the specific example of the repeating unit represented by the said General formula (7) is shown below, this invention is not limited to this.
[190]
[191] The high molecular compound of this invention may also contain 1 type (s) or 2 or more types chosen from the repeating unit represented by the following general formula (M1-M8-2) as needed.
[192]
[193] In the formula,
[194] R ⁰⁰¹ represents a hydrogen atom, a methyl group or CH ₂ CO ₂ R ⁰⁰³ ,
[195] R ⁰⁰² represents a hydrogen atom, a methyl group or CO ₂ R ⁰⁰³ ,
[196] R ⁰⁰³ represents a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms,
[197] R ⁰⁰⁴ represents a hydrogen atom or a C1-C15 monovalent hydrocarbon group containing a carboxyl group or a hydroxy group,
[198] At least one of R ⁰⁰⁵ to R ⁰⁰⁸ represents a monovalent hydrocarbon group having 1 to 15 carbon atoms containing a carboxyl group or a hydroxyl group, and the others each independently represent a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms. Or
[199] R ⁰⁰⁵ to R ⁰⁰⁸ may be bonded to each other to form a ring, in which case at least one of R ⁰⁰⁵ to R ⁰⁰⁸ represents a divalent hydrocarbon group having 1 to 15 carbon atoms containing a carboxyl group or a hydroxyl group, and the others are each independently A single bond or a straight, branched or cyclic alkylene group having 1 to 15 carbon atoms;
[200] R ⁰⁰⁹ represents a C3-C15 monovalent hydrocarbon group containing a -CO ₂ -partial structure,
[201] At least one of R ⁰¹⁰ to R ⁰¹³ represents a monovalent hydrocarbon group having 2 to 15 carbon atoms containing a -CO ₂ -partial structure, and the rest are each independently a hydrogen atom or a straight, branched or cyclic ring having 1 to 15 carbon atoms. Represents an alkyl group,
[202] R ⁰¹⁰ to R ⁰¹³ may combine with each other to form a ring, in which case at least one of R ⁰¹⁰ to R ⁰¹³ represents a divalent hydrocarbon group having 1 to 15 carbon atoms containing a -CO ₂ -partial structure, and the rest Each independently represent a single bond or a straight, branched or cyclic alkylene group having 1 to 15 carbon atoms,
[203] R ⁰¹⁴ represents an alkyl group containing a polycyclic hydrocarbon group or a polycyclic hydrocarbon group having 7 to 15 carbon atoms,
[204] R ⁰¹⁵ represents an acid labile,
[205] X represents CH ₂ or an oxygen atom,
[206] k is 0 or 1;
[207] Here, R ⁰⁰¹ represents a hydrogen atom, a methyl group or CH ₂ CO ₂ R ⁰⁰³ . Specific examples of R ⁰⁰³ will be described later. R ⁰⁰² represents a hydrogen atom, a methyl group or CO ₂ R ⁰⁰³ . R ⁰⁰³ represents a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms, and specifically, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, tert -Amyl group, n-pentyl group, n-hexyl group, cyclopentyl group, cyclohexyl group, ethylcyclopentyl group, butylcyclopentyl group, ethylcyclohexyl group, butylcyclohexyl group, adamantyl group, ethyl adamantyl group And a butyl adamantyl group etc. can be illustrated. R ⁰⁰⁴ represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 15 carbon atoms containing a carboxyl group or a hydroxy group, specifically, carboxyethyl, carboxybutyl, carboxycyclopentyl, carboxycyclohexyl, carboxynorbornyl, and carboxyadamantyl , Hydroxyethyl, hydroxybutyl, hydroxycyclopentyl, hydroxycyclohexyl, hydroxynorbornyl, hydroxyadamantyl group, and the like. At least one of R ⁰⁰⁵ to R ⁰⁰⁸ represents a monovalent hydrocarbon group having 1 to 15 carbon atoms containing a carboxyl group or a hydroxyl group, and the others each independently represent a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms. . Examples of the monovalent hydrocarbon group having 1 to 15 carbon atoms containing a carboxyl group or a hydroxy group include carboxy, carboxymethyl, carboxyethyl, carboxybutyl, hydroxymethyl, hydroxyethyl, hydroxybutyl, 2-carboxyethoxycarbonyl, 4 -Carbonylbutoxycarbonyl, 2-hydroxyethoxycarbonyl, 4-hydroxybutoxycarbonyl, carboxycyclopentyloxycarbonyl, carboxycyclohexyloxycarbonyl, carboxynorbornyloxycarbonyl, carboxy Adamantyloxycarbonyl, hydroxycyclopentyloxycarbonyl, hydroxycyclohexyloxycarbonyl, hydroxynorbornyloxycarbonyl, hydroxyadamantyloxycarbonyl, and the like. Examples of the linear, branched and cyclic alkyl groups having 1 to 15 carbon atoms include the same ones as those exemplified for R ⁰⁰³ . R ⁰⁰⁵ to R ⁰⁰⁸ may be bonded to each other to form a ring, in which case at least one of R ⁰⁰⁵ to R ⁰⁰⁸ represents a divalent hydrocarbon group having 1 to 15 carbon atoms containing a carboxyl group or a hydroxyl group, and the others are each independently Single bond or a C1-C15 linear, branched, or cyclic alkylene group is represented. As a C1-C15 bivalent hydrocarbon group containing a carboxyl group or a hydroxyl group, the thing etc. which removed one hydrogen atom from what was illustrated by the monovalent hydrocarbon group containing the said carboxyl group or a hydroxyl group specifically, etc. can be illustrated. As a C1-C15 linear, branched chain, and cyclic alkylene group, what specifically removed one hydrogen atom from what was illustrated by R <^3> can be illustrated.
[208] R ⁰⁰⁹ represents a C3-C15 monovalent hydrocarbon group containing a -CO ₂ -partial structure, specifically 2-oxooxolan-3-yl, 4,4-dimethyl-2-oxooxolane-3- One, 4-methyl-2-oxooxan-4-yl, 2-oxo-1,3-dioxolan-4-ylmethyl, 5-methyl-2-oxooxolan-5-yl and the like can be exemplified. . At least one of R ⁰¹⁰ to R ⁰¹³ represents a monovalent hydrocarbon group having 2 to 15 carbon atoms containing a -CO ₂ -partial structure, and the others are each independently a hydrogen atom or a straight, branched or cyclic ring having 1 to 15 carbon atoms. An alkyl group is shown. Examples of the monovalent hydrocarbon group having 2 to 15 carbon atoms containing a -CO ₂ -partial structure include 2-oxooxolane-3-yloxycarbonyl, 4,4-dimethyl-2-oxooxolane-3-yloxyka Levonyl, 4-methyl-2-oxooxane-4-yloxycarbonyl, 2-oxo-1,3-dioxolan-4-ylmethyloxycarbonyl, 5-methyl-2-oxooxolane-5- Iloxycarbonyl etc. can be illustrated. Examples of the linear, branched and cyclic alkyl groups having 1 to 15 carbon atoms include the same ones as those exemplified for R ⁰⁰³ . R ⁰¹⁰ to R ⁰¹³ may form a ring with each other, in which case at least one of R ⁰¹⁰ to R ⁰¹³ represents a divalent hydrocarbon group having 1 to 15 carbon atoms containing a -CO ₂ -partial structure, and the remaining ones are each independently And a single bond or a linear, branched or cyclic alkylene group having 1 to 15 carbon atoms. Examples of the divalent hydrocarbon group having 1 to 15 carbon atoms containing a -CO ₂ -partial structure include 1-oxo-2-oxapropane-1,3-diyl, 1,3-dioxo-2-oxapropane-1, Monovalent containing the above-CO ₂ -partial structure in addition to 3-diyl, 1-oxo-2-oxabutane-1,4-diyl, 1,3-dioxo-2-oxabutane-1,4-diyl and the like The thing remove | excluding one hydrogen atom from what was illustrated by the hydrocarbon group, etc. can be illustrated. Examples of the linear, branched, cyclic alkylene group having 1 to 15 carbon atoms include those in which one hydrogen atom is removed from the one specifically exemplified in R ⁰⁰³ .
[209] R ⁰¹⁴ represents a polycyclic hydrocarbon group having 7 to 15 carbon atoms or an alkyl group containing a polycyclic hydrocarbon group, and specifically, norbornyl, bicyclo [3.3.1] nonyl, tricyclo [5.2.1.0 ^2,6 ] decyl , Adamantyl, ethyl adamantyl, butyl adamantyl, norbornylmethyl, adamantylmethyl and the like. R ⁰¹⁵ represents an acid labile group, and specifically, the same as those exemplified in the above description may be mentioned. X represents CH ₂ or an oxygen atom. k is 0 or 1;
[210] The repeating units represented by the formulas M1 to M8-2 impart various characteristics such as developer affinity, substrate adhesion, and etching resistance when manufactured with a resist material, and the resist is appropriately adjusted by adjusting the content of these repeating units. Fine tune the performance of the material.
[211] In addition, the weight average molecular weight of the high molecular compound of this invention is 1,000-500,000, Preferably it is 3,000-100,000. If it is out of this range, etching resistance may fall extremely, or the dissolution rate difference before and after exposure may not be secured, and resolution may fall.
[212] In the preparation of the polymer compound of the present invention, the compound represented by the following general formula (4a) may be used as the first monomer, the one to three selected from the compounds represented by the following general formulas (5a to 7a) as the second to fourth monomers, and Therefore, it can carry out by the copolymerization reaction which used the 1 type (s) or 2 or more types chosen from the compound represented by the following general formula (M1a)-M8a as a monomer after that.
[213]
[214] Wherein, k, h, w, z , m, n, R and R ¹ to R ⁵ are defined as above.
[215]
[216] In the formula, k, R ⁰⁰¹ to R ⁰¹⁵ and X are the same as above.
[217] In a copolymerization reaction, it can manufacture with the high molecular compound which can exhibit the favorable performance when it sets as a resist material by adjusting the presence ratio of each monomer suitably.
[218] In this case, the polymer compound of the present invention
[219] (i) the monomer of Formula 4a
[220] (ii) monomers of Chemical Formulas 5a to 7a
[221] (iii) in addition to the monomers of Formulas M1a to M8a,
[222] (iv) Substituted acrylic esters such as monomers containing carbon-carbon double bonds other than the above (i) to (iii), for example, methyl methacrylate, methyl crotonate, dimethyl maleate, dimethyl itaconate, etc. Unsaturated carboxylic acids such as maleic acid, fumaric acid and itaconic acid; substituted norbornenes such as norbornene and methyl norbornene-5-carboxylic acid; unsaturated acid anhydrides such as itaconic anhydride and other monomers are added. It can also copolymerize with.
[223] In the high molecular compound of this invention, although the preferable content rate of each repeating unit based on each monomer can be made into the range shown below, for example, it is not limited to this.
[224] (I) when the polymer compound contains a repeating unit represented by the above formula (4-1) and a repeating unit represented by 5-1
[225] ① 1 to 90%, preferably 5 to 80%, more preferably 10 to 70%, of the repeating unit represented by Formula 4-1 based on the monomer of Formula 4a,
[226] ② 1 to 90%, preferably 5 to 80%, more preferably 10 to 70%, of the repeating unit represented by the formula 5-1 based on the monomer of the formula 5a,
[227] ③ 0 to 50%, preferably 0 to 40%, more preferably 0 to 30%, of the repeating units represented by the formulas M5-1 to M8-1 based on the monomers of the formulas M5a to M8a,
[228] ④ 0 to 50%, preferably 0 to 40%, more preferably 0 to 30% of repeating units based on other monomers
[229] It may contain respectively.
[230] (II) When the polymer compound contains a repeating unit represented by the above formula 4-1, a repeating unit represented by 5-1 and a repeating unit represented by 6
[231] ① 1 to 49%, preferably 3 to 45%, more preferably 5 to 40%, of the repeating unit represented by the formula (4-1) based on the monomer of the formula (4a),
[232] ② 1 to 49%, preferably 3 to 45%, more preferably 5 to 40%, of the repeating unit represented by the formula (5-1) based on the monomer of the formula (5a),
[233] ③ 50 mol% of the repeating unit represented by the formula (6) based on the monomer of the formula (6a),
[234] ④ 0 to 25%, preferably 0 to 20%, more preferably 0 to 15%, of the repeating units represented by the formulas M5-1 to M8-1 based on the monomers of the formulas M5a to M8a,
[235] ⑤ 0 to 25%, preferably 0 to 20%, more preferably 0 to 15% of repeating units based on other monomers
[236] It may contain respectively.
[237] (III) when the polymer compound contains a repeating unit represented by Formula 4-1 and a repeating unit represented by 5-1 and / or a repeating unit represented by 7 and a repeating unit represented by 6
[238] ① 1 to 49%, preferably 3 to 45%, more preferably 5 to 40%, of the repeating unit represented by the formula (4-1) based on the monomer of the formula (4a),
[239] ② 0 to 40%, preferably 0 to 35%, more preferably 0 to 30%, of the repeating unit represented by the formula 5-1 based on the monomer of the formula 5a,
[240] ③ 1 to 80%, preferably 1 to 70%, more preferably 1 to 50%, of the repeating unit represented by the formula (7) based on the monomer of the formula (7a),
[241] ④ 1 to 49%, preferably 5 to 45%, more preferably 10 to 40%, of the repeating unit represented by the formula (6) based on the monomer of the formula (6a),
[242] ⑤ 0 to 25%, preferably 0 to 20%, more preferably 0 to 15%, of the repeating units represented by the formulas M1 to M8-1 based on the monomers of the formulas M1a to M8a,
[243] ⑥ 0 to 25%, preferably 0 to 20%, more preferably 0 to 15% of repeating units based on other monomers
[244] It may contain respectively.
[245] (IV) when the polymer compound contains a repeating unit represented by the above formula 4-2 and a repeating unit represented by 5-2
[246] ① 1 to 90%, preferably 5 to 80%, more preferably 10 to 70%, of the repeating unit represented by the formula (4-2) based on the monomer of the formula (4a),
[247] ② 1 to 90%, preferably 5 to 80%, more preferably 10 to 70%, of the repeating unit represented by the formula (5-2) based on the monomer of the formula (5a),
[248] ③ 0 to 50%, preferably 0 to 40%, more preferably 0 to 30%, of the repeating units represented by the formulas M5-2 to M8-2 based on the monomers of the formulas M5a to M8a,
[249] ④ 0 to 50%, preferably 0 to 40%, more preferably 0 to 30% of repeating units based on other monomers
[250] It may contain respectively.
[251] Although the copolymerization reaction which produces the high molecular compound of this invention can illustrate various things, radical polymerization, anionic polymerization, or coordination polymerization is preferable.
[252] The reaction conditions of the radical polymerization reaction include (a) hydrocarbons such as benzene, ethers such as tetrahydrofuran, alcohols such as ethanol, ketones such as methyl isobutyl ketone, and esters such as propylene glycol monomethyl ether acetate (B) Azo compounds, such as 2,2'- azobisisobutyronitrile, or peroxides, such as benzoyl peroxide and lauroyl peroxide, are used as a polymerization initiator, (a) Reaction temperature is 0 degreeC- It is preferable to keep it at about 100 degreeC, and to make (d) reaction time about 0.5 to 48 hours, but the case outside this range is not excluded.
[253] The reaction conditions for the anionic polymerization reaction include (a) hydrocarbons such as benzene, ethers such as tetrahydrofuran, or liquid ammonia, and (b) metals such as sodium and potassium as the polymerization initiator, n-butyllithium and alkyl metals such as sec-butyllithium, ketyl, or Grignard reactants, (c) the reaction temperature is maintained at -78 ° C to 0 ° C, and (d) the reaction time is 0.5 hour to 48 hours. , (E) Proton donor compounds such as methanol, halides such as methyl iodide, and other electrophilic substances are preferably used as the terminator, but the case outside this range is not excluded.
[254] Reaction conditions for coordination polymerization include (a) using hydrocarbons such as n-heptane and toluene as solvents, and (b) a Ziegler-Natta catalyst consisting of transition metals such as titanium and alkylaluminum, chromium and nickel compounds as catalysts. Using an olefin-methacesis mixed catalyst represented by a Phillips catalyst supported on an oxide, a tungsten and rhenium mixed catalyst, and the like, (c) the reaction temperature is maintained at 0 ° C. to 100 ° C., and (d) the reaction time is 0.5 hour. Although it is preferable to set it as about 48 hours, it does not exclude the case out of this range.
[255] The polymer compound of the present invention is effective as a base polymer of a resist material, and the present invention provides a resist material comprising the polymer compound.
[256] The resist material of this invention can contain the compound which generate | occur | produces an acid in response to a high energy ray or an electron beam (henceforth an acid generator), an organic solvent, and other components as needed.
[257] As the acid generator used in the present invention
[258] i. An onium salt of the formula P1a-1, P1a-2 or P1b,
[259] ii. A diazomethane derivative of the formula P2,
[260] iii. Glyoxime derivatives of the formula
[261] iv. A bissulphone derivative of the formula P4,
[262] v. Sulfonic acid esters of N-hydroxyimide compounds of formula P5,
[263] vi. β-ketosulfonic acid derivatives,
[264] vii. Disulfone derivatives,
[265] viii. Nitrobenzylsulfonate derivatives,
[266] ix. Sulfonic acid ester derivatives;
[267]
[268] In the formula,
[269] R ^101a , R ^101b and R ^101c each represent a linear, branched or cyclic alkyl group, alkenyl group, oxoalkyl group or oxoalkenyl group, 6 to 20 carbon atoms, or an aralkyl group having 7 to 12 carbon atoms, or An aryloxoalkyl group, some or all of the hydrogen atoms of such a group may be substituted by an alkoxy group, or the like,
[270] R ^101b and R ^101c may form a ring, and when forming a ring, R ^101b and R ^101c each represent an alkylene group having 1 to 6 carbon atoms,
[271] K ⁻ represents a nonnucleophilic counter ion.
[272] R ^101a , R ^101b and R ^101c may be the same as or different from each other, and specifically, as an alkyl group, methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, pen And a methyl group, hexyl group, heptyl group, octyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclopropylmethyl group, 4-methylcyclohexyl group, cyclohexylmethyl group, norbornyl group and adamantyl group. . Examples of the alkenyl group include vinyl group, allyl group, propenyl group, butenyl group, hexenyl group, cyclohexenyl group and the like. Examples of the oxoalkyl group include 2-oxocyclopentyl group, 2-oxocyclohexyl group, and the like. 2-oxopropyl group, 2-cyclopentyl-2-oxoethyl group, 2-cyclohexyl-2-oxoethyl group, 2 -(4-methylcyclohexyl) -2-oxoethyl group etc. are mentioned. As an aryl group, alkoxy, such as a phenyl group, a naphthyl group, and p-methoxyphenyl group, m-methoxyphenyl group, o-methoxyphenyl group, an ethoxyphenyl group, p-tert-butoxyphenyl group, m-tert-butoxyphenyl group, etc. Alkyl naph, such as alkylphenyl groups, such as a phenyl group, 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, ethylphenyl group, 4-tert- butylphenyl group, 4-butylphenyl group, and dimethylphenyl group, methylnaphthyl group, and ethyl naphthyl group, etc. Dialkoxy naphthyl groups, such as an alkoxy naphthyl group, such as a methyl group, a methoxy naphthyl group, and an ethoxy naphthyl group, a dimethyl naphthyl group, a diethyl naphthyl group, dialkoxy naphthyl groups, such as a dialkyl naphthyl group, a dimethoxy naphthyl group, and a diethoxy naphthyl group, etc. are mentioned. Can be. Examples of the aralkyl group include benzyl group, phenylethyl group and phenethyl group. As the aryl oxoalkyl group, 2-aryl-2-oxo such as 2-phenyl-2-oxoethyl group, 2- (1-naphthyl) -2-oxoethyl group, 2- (2-naphthyl) -2-oxoethyl group Ethyl group etc. are mentioned. Non ^- nucleophilic counter ions of K ⁻ include halide ions such as chloride ions and bromide ions, triflate, fluoroalkylsulfonates such as 1,1,1-trifluoroethanesulfonate and nonafluorobutanesulfonate, and tosyl Alkyl sulfonates, such as aryl sulfonates, a mesylate, butane sulfonate, such as a late, a benzene sulfonate, 4-fluorobenzene sulfonate, a 1,2,3,4,5-pentafluorobenzene sulfonate, are mentioned. have.
[273]
[274] In the formula,
[275] R ^102a and R ^102b each represent a straight, branched or cyclic alkyl group having 1 to 8 carbon atoms,
[276] R ¹⁰³ represents a straight, branched or cyclic alkylene group having 1 to 10 carbon atoms,
[277] R ^104a and R ^104b each represent a C3-C7 2-oxoalkyl group,
[278] K ⁻ represents a nonnucleophilic counter ion.
[279] Specific examples of the R ^102a and R ^102b include a methyl group, an ethyl group, a propyl group, an isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group and cyclopentyl group , A cyclohexyl group, a cyclopropylmethyl group, a 4-methylcyclohexyl group, a cyclohexylmethyl group, etc. are mentioned. ^Examples of R ¹⁰³ include methylene group, ethylene group, propylene group, butylene group, pentylene group, hexylene group, heptylene group, octylene group, nonylene group, 1,4-cyclohexylene group, 1,2-cyclohexylene group, 1,3-cyclopentylene group, a 1, 4- cyclooctylene group, a 1, 4- cyclohexane dimethylene group, etc. are mentioned. ^{Examples of} R ^104a and R ^104b include a 2-oxopropyl group, a 2-oxocyclopentyl group, a 2-oxocyclohexyl group, a 2-oxocycloheptyl group, and the like. K <^-> can mention the same thing as what was demonstrated by the said general formula P1a-1 and P1a-2.
[280]
[281] In the formula,
[282] R ¹⁰⁵ and R ¹⁰⁶ represent a straight, branched or cyclic alkyl group or a halogenated alkyl group having 1 to 12 carbon atoms, an aryl group or halogenated aryl group having 6 to 20 carbon atoms, or an aralkyl group having 7 to 12 carbon atoms.
[283] ^Examples of the alkyl group of R ¹⁰⁵ and R ¹⁰⁶ include methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, pentyl, hexyl, heptyl, octyl, amyl, A cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a norbornyl group, an adamantyl group etc. are mentioned. Examples of the halogenated alkyl group include trifluoromethyl group, 1,1,1-trifluoroethyl group, 1,1,1-trichloroethyl group, and nonafluorobutyl group. Examples of the aryl group include alkoxyphenyl groups such as phenyl group, p-methoxyphenyl group, m-methoxyphenyl group, o-methoxyphenyl group, ethoxyphenyl group, p-tert-butoxyphenyl group, and m-tert-butoxyphenyl group, and 2-methylphenyl. Alkylphenyl groups, such as group, 3-methylphenyl group, 4-methylphenyl group, ethylphenyl group, 4-tert- butylphenyl group, 4-butylphenyl group, and a dimethylphenyl group, are mentioned. Examples of the halogenated aryl group include fluorophenyl group, chlorophenyl group, 1,2,3,4,5-pentafluorophenyl group and the like. As an aralkyl group, a benzyl group, a phenethyl group, etc. are mentioned.
[284]
[285] In the formula,
[286] R ¹⁰⁷ , R ¹⁰⁸ and R ¹⁰⁹ represent a straight, branched or cyclic alkyl group or a halogenated alkyl group having 1 to 12 carbon atoms, an aryl group or a halogenated aryl group having 6 to 20 carbon atoms, or an aralkyl group having 7 to 12 carbon atoms, or
[287] R ¹⁰⁸ and R ¹⁰⁹ may be bonded to each other to form a cyclic structure. When forming a cyclic structure, R ¹⁰⁸ and R ¹⁰⁹ each represent a linear or branched alkylene group having 1 to 6 carbon atoms.
[288] Examples of the alkyl group, halogenated alkyl group, aryl group, halogenated aryl group and aralkyl group of R ¹⁰⁷ , R ¹⁰⁸ and R ¹⁰⁹ include the same groups as described for R ¹⁰⁵ and R ¹⁰⁶ . Further, the alkylene group of R ¹⁰⁸ and R ^109, may be mentioned methylene group, ethylene group, propylene group, butylene group, hexylene group and the like.
[289]
[290] In formula, ^R101a and ^R101b are the same as the above.
[291]
[292] In the formula,
[293] R ¹¹⁰ represents an arylene group having 6 to 10 carbon atoms, an alkylene group having 1 to 6 carbon atoms or an alkenylene group having 2 to 6 carbon atoms, and some or all of the hydrogen atoms of these groups are linear or branched alkyl groups having 1 to 4 carbon atoms or It may be further substituted with an alkoxy group, nitro group, acetyl group, or phenyl group,
[294] R ¹¹¹ represents a linear, branched or substituted alkyl, alkenyl or alkoxyalkyl, phenyl or naphthyl group having 1 to 8 carbon atoms, and some or all of the hydrogen atoms of these groups are alkyl or alkoxy groups having 1 to 4 carbon atoms. ; Phenyl group which may be substituted by the C1-C4 alkyl group, an alkoxy group, a nitro group, or an acetyl group; Hetero aromatic groups having 3 to 5 carbon atoms; Or a chlorine atom or a fluorine atom.
[295] Here, as the arylene group of R ¹¹⁰ , a 1,2-phenylene group, a 1,8-naphthylene group, and the like, and as an alkylene group, a methylene group, a 1,2-ethylene group, a 1,3-propylene group, 1, 4-butylene group, 1-phenyl-1,2-ethylene group, norbornane-2,3-diyl group, and the like as alkenylene group, 1,2-vinylene group, 1-phenyl-1,2-vinylene group And 5-norbornene-2,3-diyl group. ^Examples of the alkyl group of R ¹¹¹ are the same as those of R ^101a to R ^101c, and the alkenyl group includes a vinyl group, 1-propenyl group, allyl group, 1-butenyl group, 3-butenyl group, isoprenyl group, 1-pentenyl group, 3 -Pentenyl, 4-pentenyl, dimethylallyl, 1-hexenyl, 3-hexenyl, 5-hexenyl, 1-heptenyl, 3-heptenyl, 6-heptenyl, 7-octenyl Examples of the alkoxyalkyl group include methoxymethyl group, ethoxymethyl group, propoxymethyl group, butoxymethyl group, pentyloxymethyl group, hexyloxymethyl group, heptyloxymethyl group, methoxyethyl group, ethoxyethyl group, propoxyethyl group and butoxyethyl group. , Pentyloxyethyl group, hexyloxyethyl group, methoxypropyl group, ethoxypropyl group, propoxypropyl group, butoxypropyl group, methoxybutyl group, ethoxybutyl group, propoxybutyl group, methoxypentyl group, A methoxypentyl group, a methoxyhexyl group, a methoxyheptyl group, etc. are mentioned.
[296] In addition, examples of the alkyl group having 1 to 4 carbon atoms which may be further substituted include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group and the like. As a group, a methoxy group, an ethoxy group, a propoxy group, isopropoxy group, n-butoxy group, isobutoxy group, tert-butoxy group, etc. are substituted by the C1-C4 alkyl group, an alkoxy group, a nitro group, or an acetyl group. Examples of the phenyl group that may be used include a phenyl group, a tolyl group, a p-tert-butoxyphenyl group, a p-acetylphenyl group, a p-nitrophenyl group, and the like. As a hetero aromatic group having 3 to 5 carbon atoms, a pyridyl group and a furyl group may be mentioned.
[297] Specifically, for example, trifluoromethanesulfonic acid diphenyliodium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) phenyliodium, p-toluenesulfonic acid diphenyliodium, p-toluenesulfonic acid (p -tert-butoxyphenyl) phenyliodonium, trifluoromethanesulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, trifluoromethanesulfonic acid bis (p-tert -Butoxyphenyl) phenylsulfonium, trifluoromethanesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, p-toluenesulfonic acid triphenylsulfonium, p-toluenesulfonic acid (p-tert-butoxyphenyl) di Phenylsulfonium, p-toluenesulfonic acid bis (p-tert-butoxyphenyl) phenylsulfonium, p-toluenesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, nonafluorobutanesulfonic acid triphenylsulfonium, butane Sulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid trimethylsulfonium, p-toluenesulfonic acid trimethyl Sulfonium, trifluoromethanesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, p-toluenesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, trifluoromethanesulfonic acid dimethylphenylsulfonium, p- Toluenesulfonic acid dimethylphenylsulfonium, trifluoromethanesulfonic acid dicyclohexylphenylsulfonium, p-toluenesulfonic acid dicyclohexylphenylsulfonium, trifluoromethanesulfonic acid trinaphthylsulfonium, trifluoromethanesulfonic acid cyclohexylmethyl (2 -Oxocyclohexyl) sulfonium, trifluoromethanesulfonic acid (2-norbornyl) methyl (2-oxocyclohexyl) sulfonium, ethylene bis [methyl (2-oxocyclopentyl) sulfonium trifluoromethanesulfonate] , Onium salts such as 1,2'-naphthylcarbonylmethyl tetrahydrothiophenium triplate, bis (benzenesulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane, bis (xylenesulfonyl Diazomethane, Bis (Cicle) Hexylsulfonyl) diazomethane, bis (cyclopentylsulfonyl) diazomethane, bis (n-butylsulfonyl) diazomethane, bis (isobutylsulfonyl) diazomethane, bis (sec-butylsulfonyl) Diazomethane, bis (n-propylsulfonyl) diazomethane, bis (isopropylsulfonyl) diazomethane, bis (tert-butylsulfonyl) diazomethane, bis (n-amylsulfonyl) diazomethane , Bis (isoamylsulfonyl) diazomethane, bis (sec-amylsulfonyl) diazomethane, bis (tert-amylsulfonyl) diazomethane, 1-cyclohexylsulfonyl-1- (tert-butylsul Diazo, such as fonyl) diazomethane, 1-cyclohexylsulfonyl-1- (tert-amylsulfonyl) diazomethane, and 1-tert-amylsulfonyl-1- (tert-butylsulfonyl) diazomethane Methane derivatives, bis-0- (p-toluenesulfonyl) -α-dimethylglyoxime, bis-0- (p-toluenesulfonyl) -α-diphenylglyoxime, bis-0- (p-toluenesulfonyl ) -α-dicyclohexylglyoxime, bis-O- (p-toluenesulfonyl) -2,3-pentanedione Oxime, bis-O- (p-toluenesulfonyl) -2-methyl-3,4-pentanedioneglyoxime, bis-O- (n-butanesulfonyl) -α-dimethylglyoxime, bis-O- ( n-butanesulfonyl) -α-diphenylglyoxime, bis-O- (n-butanesulfonyl) -α-dicyclohexylglyoxime, bis-O- (n-butanesulfonyl) -2,3- Pentanedionoglyoxime, bis-O- (n-butanesulfonyl) -2-methyl-3,4-pentanedioneglyoxime, bis-0- (methanesulfonyl) -α-dimethylglyoxime, bis-0- (Trifluoromethanesulfonyl) -α-dimethylglyoxime, bis-0- (1,1,1-trifluoroethanesulfonyl) -α-dimethylglyoxime, bis-O- (tert-butanesulfonyl ) -α-dimethylglyoxime, bis-0- (perfluorooctanesulfonyl) -α-dimethylglyoxime, bis-0- (cyclohexanesulfonyl) -α-dimethylglyoxime, bis-0- (benzene Sulfonyl) -α-dimethylglyoxime, bis-0- (p-fluorobenzenesulfonyl) -α-dimethylglyoxime, bis-O- (p-tert-butylbenzenesulfonyl) -α-dimethylglyoxime , Bis-0- (xylenesulfonyl) -α-dimeth Glyoxime derivatives such as glyoxime and bis-0- (camphorsulfonyl) -α-dimethylglyoxime, bisnaphthylsulfonylmethane, bistrifluoromethylsulfonylmethane, bismethylsulfonylmethane, bisethylsulfonylmethane , Bissulfon derivatives such as bispropylsulfonylmethane, bisisopropylsulfonylmethane, bis-p-toluenesulfonylmethane and bisbenzenesulfonylmethane, 2-cyclohexylcarbonyl-2- (p-toluenesulfonyl) Β-ketosulfone derivatives such as propane and 2-isopropylcarbonyl-2- (p-toluenesulfonyl) propane, disulfone derivatives such as diphenyl disulfone and dicyclohexyl disulfone, p-toluene sulfonic acid 2,6 -Nitrobenzylsulfonate derivatives such as dinitrobenzyl and p-toluenesulfonic acid 2,4-dinitrobenzyl, 1,2,3-tris (methanesulfonyloxy) benzene, 1,2,3-tris (trifluoro Sulfonic acid ester derivatives such as methanesulfonyloxy) benzene, 1,2,3-tris (p-toluenesulfonyloxy) benzene, N-hydroxysuccinate Mid methanesulfonic acid ester, N-hydroxysuccinimide trifluoromethanesulfonic acid ester, N-hydroxysuccinimide ethanesulfonic acid ester, N-hydroxysuccinimide 1-propanesulfonic acid ester, N-hydroxysuccinimide 2-propanesulfonic acid ester, N-hydroxysuccinimide 1-pentanesulfonic acid ester, N-hydroxysuccinimide 1-octanesulfonic acid ester, N-hydroxysuccinimide p-toluenesulfonic acid ester, N-hydroxysuccinate Imide p-methoxybenzenesulfonic acid ester, N-hydroxysuccinimide 2-chloroethanesulfonic acid ester, N-hydroxysuccinimide benzenesulfonic acid ester, N-hydroxysuccinimide-2,4,6-trimethyl Benzenesulfonic acid ester, N-hydroxysuccinimide 1-naphthalenesulfonic acid ester, N-hydroxysuccinimide 2-naphthalenesulfonic acid ester, N-hydroxy-2-phenylsuccinimide methanesulfonic acid ester, N-hydroxymale Imide methanesulfonic acid ester, N-hydroxymaleimide ethanesulfonic acid ester, N-hydroxy-2-phenylmaleimide methanesulfonic acid ester, N-hydroxyglutalimide methanesulfonic acid ester, N-hydroxyglutarimide benzenesulfonic acid Ester, N-hydroxyphthalimide methanesulfonic acid ester, N-hydroxyphthalimide benzenesulfonic acid ester, N-hydroxyphthalimide trifluoromethanesulfonic acid ester, N-hydroxyphthalimide p-toluenesulfonic acid ester , N-hydroxynaphthalimide methanesulfonic acid ester, N-hydroxynaphthalimide benzenesulfonic acid ester, N-hydroxy-5-norbornene-2,3-dicarboxyimidemethanesulfonic acid ester, N-hydride N-hydroxys such as oxy-5-norbornene-2,3-dicarboxyimide trifluoromethanesulfonic acid ester and N-hydroxy-5-norbornene-2,3-dicarboxyimide p-toluenesulfonic acid ester Sulfonic acid ester derivatives of oxylimide compounds; trifluoromethanesulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, trifluoromethanesulfonic acid tris (p -tert-butoxyphenyl) sulfonium, p-toluenesulfonic acid triphenylsulfonium, p-toluenesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, p-toluenesulfonic acid tris (p-tert-butoxyphenyl Sulfonium, trifluoromethanesulfonic acid trinaphthylsulfonium, trifluoromethanesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, trifluoromethanesulfonic acid (2-norbornyl) methyl (2-oxocyclohexyl Onium salts such as sulfonium and 1,2'-naphthylcarbonylmethyl tetrahydrothiophenium triplate, bis (benzenesulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane and bis ( Cyclohexylsulfonyl) diazomethane, bis (n-butylsulfonyl) diazomethane, b (Isobutylsulfonyl) diazomethane, bis (sec-butylsulfonyl) diazomethane, bis (n-propylsulfonyl) diazomethane, bis (isopropylsulfonyl) diazomethane, bis (tert-butyl Diazomethane derivatives such as sulfonyl) diazomethane, bis-0- (p-toluenesulfonyl) -α-dimethylglyoxime, bis-O- (n-butanesulfonyl) -α-dimethylglyoxime Glyoxime derivatives, bissulphone derivatives such as bisnaphthylsulfonylmethane, N-hydroxysuccinimide methanesulfonic acid ester, N-hydroxysuccinimide trifluoromethanesulfonic acid ester, N-hydroxysuccinimide 1-propane Sulfonic acid ester, N-hydroxysuccinimide 2-propanesulfonic acid ester, N-hydroxysuccinimide 1-pentanesulfonic acid ester, N-hydroxysuccinimide p-toluenesulfonic acid ester, N-hydroxynaphthalimide N-hydrides, such as methanesulfonic acid ester and N-hydroxy naphthalimide benzene sulfonic acid ester The sulfonic acid ester derivative of the Shi imide compound is preferably used. In addition, the said acid generator can be used individually by 1 type or in combination of 2 or more type. The onium salt is excellent in the rectangularity improving effect, and the diazomethane derivative and the glyoxime derivative are excellent in the standing wave reduction effect, so that fine adjustment of the profile can be performed by combining the two.
[298] The addition amount of the acid generator is preferably 0.1 to 15 parts, more preferably 0.5 to 8 parts with respect to 100 parts by weight of the base resin (the same by weight or less). When less than 0.1 part, a sensitivity may fall, and when more than 15 parts, transparency may become low and resolution may fall.
[299] The organic solvent used in the present invention may be any organic solvent which can dissolve a base resin, an acid generator, and other additives. As such an organic solvent, for example, ketones such as cyclohexanone and methyl-2-n-amyl ketone, 3-methoxybutanol, 3-methyl-3-methoxybutanol, 1-methoxy-2-propanol, 1 Alcohols such as ethoxy-2-propanol, ethers such as propylene glycol monomethyl ether, ethylene glycol monomethyl ether, propylene glycol monoethyl ether, ethylene glycol monoethyl ether, propylene glycol dimethyl ether, diethylene glycol dimethyl ether, Propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, ethyl lactate, ethyl pyruvate, butyl acetate, methyl 3-methoxypropionate, ethyl 3-ethoxypropionate, tert-butyl acetate, tert-butyl propionate, propylene glycol mono esters such as -tert-butyl ether acetate, and the like can be used alone or in combination of two or more thereof. It is, but not limited to these. In the present invention, among these organic solvents, propylene glycol monomethyl ether acetate and a mixed solvent which is a safe solvent other than diethylene glycol dimethyl ether or 1-ethoxy-2-propanol having the highest solubility of the acid generator in the resist component are preferably used. do.
[300] The amount of the organic solvent to be used is preferably 200 to 1,000 parts, particularly 400 to 800 parts, based on 100 parts of the base resin.
[301] To the resist material of the present invention, a polymer compound separate from the polymer compound containing the repeating unit represented by Formula 4-1 or 4-2 may be added.
[302] Specific examples of the polymer compound include, but are not limited to, those having a weight average molecular weight of 1,000 to 500,000, preferably 5,000 to 100,000, represented by the following general formula R1 and / or the following general formula R2.
[303]
[304] In the formula,
[305] R ⁰⁰¹ represents a hydrogen atom, a methyl group or CH ₂ CO ₂ R ⁰⁰³ ,
[306] R ⁰⁰² represents a hydrogen atom, a methyl group or CO ₂ R ⁰⁰³ ,
[307] R ⁰⁰³ represents a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms,
[308] R ⁰⁰⁴ represents a hydrogen atom or a C1-C15 monovalent hydrocarbon group containing a carboxyl group or a hydroxy group,
[309] One or more of R ⁰⁰⁵ to R ⁰⁰⁸ represents a C 1 to C 15 monovalent hydrocarbon group containing a carboxyl group or a hydroxyl group, and the remaining ones each independently represent a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms. Or
[310] R ⁰⁰⁵ to R ⁰⁰⁸ may be bonded to each other to form a ring, in which case at least one of R ⁰⁰⁵ to R ⁰⁰⁸ represents a divalent hydrocarbon group having 1 to 15 carbon atoms containing a carboxyl group or a hydroxyl group, and the others are each independently A single bond or a straight, branched or cyclic alkylene group having 1 to 15 carbon atoms;
[311] R ⁰⁰⁹ represents a C3-C15 monovalent hydrocarbon group containing a -CO ₂ -partial structure,
[312] At least one of R ⁰¹⁰ to R ⁰¹³ represents a monovalent hydrocarbon group having 2 to 15 carbon atoms containing a -CO ₂ -partial structure, and the others are each independently a hydrogen atom or a straight, branched or cyclic ring having 1 to 15 carbon atoms. Represents an alkyl group,
[313] R ⁰¹⁰ to R ⁰¹³ may form a ring with each other, in which case at least one of R ⁰¹⁰ to R ⁰¹³ represents a divalent hydrocarbon group having 1 to 15 carbon atoms containing a -CO ₂ -partial structure, and the remaining ones are each independently Represents a single bond or a straight, branched or cyclic alkylene group having 1 to 15 carbon atoms,
[314] R ⁰¹⁴ represents an alkyl group containing a polycyclic hydrocarbon group or a polycyclic hydrocarbon group having 7 to 15 carbon atoms,
[315] R ⁰¹⁵ represents an acid labile,
[316] R ⁰¹⁶ represents a hydrogen atom or a methyl group,
[317] R ⁰¹⁷ represents a straight, branched or cyclic alkyl group having 1 to 8 carbon atoms,
[318] X represents CH ₂ or an oxygen atom,
[319] k 'is 0 or 1,
[320] a1 ', a2', a3 ', b1', b2 ', b3', c1 ', c2', c3 ', d1', d2 ', d3' and e 'are numbers of 0 or more and less than 1, a1' + a2 satisfies '+ a3' + b1 '+ b2' + b3 '+ c1' + c2 '+ c3' + d1 '+ d2' + d3 '+ e' = 1
[321] f ', g', h ', i' and j 'satisfy the number f' + g '+ h' + i '+ j' = 1 in a number of 0 or more and less than 1.
[322] In addition, the specific example of each group is the same as that of the said description.
[323] The blending ratio of the polymer compound containing the repeating unit represented by Formula 4-1 or 4-2 and the other polymer compound is in the weight ratio range of 100: 0 to 10:90, particularly 100: 0 to 20:80. desirable. When the compounding ratio of the high molecular compound containing the repeating unit represented by the said Formula (4-1) or (4-2) is less than this, the performance which is preferable as a resist material may not be obtained. The performance of a resist material can be adjusted by suitably changing the said compounding ratio.
[324] In addition, the said high molecular compound is not limited to 1 type, It can add 2 or more types. By using a plurality of high molecular compounds, the performance of the resist material can be adjusted.
[325] The dissolution control agent may be further added to the resist material of the present invention. As the dissolution control agent, the average molecular weight of the compound is 100 to 1,000, preferably 150 to 800, and at the same time, the hydrogen atom of the phenolic hydroxy group of the compound containing two or more phenolic hydroxy groups in the molecule is averaged from 0 to 100 mol as a whole by an acid labile group. A compound in which the hydrogen atom of the carboxyl group of the compound substituted at the ratio of% or the compound having a carboxyl group in the molecule is substituted at an average of 50 to 100 mol% in total by an acid labile group.
[326] The substitution rate of the phenolic hydroxyl group hydrogen atom by the acid labile group is, on average, 0 mol% or more, preferably 30 mol% or more, and the upper limit thereof is 100 mol%, more preferably 80 mol% of the entire phenolic hydroxy group. . The substitution rate of an acid labile group of a carboxyl hydrogen atom is 50 mol% or more, preferably 70 mol% or more of the whole carboxyl group on average, and the upper limit is 100 mol%.
[327] In this case, the compound having two or more such phenolic hydroxy groups or the compound having a carboxyl group is preferably represented by the following general formulas (D1) to (D14).
[328]
[329] In the formula,
[330] R ²⁰¹ and R ²⁰² each represent a hydrogen atom or a straight or branched chain alkyl group or alkenyl group having 1 to 8 carbon atoms,
[331] R ²⁰³ represents a hydrogen atom or a straight or branched chain alkyl group or alkenyl group having 1 to 8 carbon atoms, or-(R ²⁰⁷ ) _h COOH,
[332] R ²⁰⁴ represents-(CH ₂ ) _i- (i = 2 to 10), an arylene group, carbonyl group, sulfonyl group, oxygen atom or sulfur atom having 6 to 10 carbon atoms,
[333] R ²⁰⁵ represents an alkylene group having 1 to 10 carbon atoms, an arylene group having 6 to 10 carbon atoms, a carbonyl group, a sulfonyl group, an oxygen atom or a sulfur atom,
[334] R ²⁰⁶ represents a hydrogen atom, a straight or branched chain alkyl group having 1 to 8 carbon atoms, an alkenyl group, or a phenyl group or a naphthyl group each substituted with a hydroxy group,
[335] R ²⁰⁷ represents a straight or branched chain alkylene group having 1 to 10 carbon atoms,
[336] R ²⁰⁸ represents a hydrogen atom or a hydroxy group,
[337] j is an integer from 0 to 5,
[338] u and h are 0 or 1,
[339] s, t, s ', t', s '' and t '' satisfy s + t = 8, s '+ t' = 5 and s '' + t '' = 4, respectively, and at the same time Is a number to have at least one hydroxyl group,
[340] α is a number such that the molecular weights of the compounds of the formulas D8 and D9 are from 100 to 1,000.
[341] In the formula, R ²⁰¹ and R ²⁰² include, for example, a hydrogen atom, a methyl group, an ethyl group, a butyl group, a propyl group, an ethynyl group, a cyclohexyl group, and as R ²⁰³ , for example, R ²⁰¹ and R ²⁰² and there may be mentioned the same ones, or -COOH, -CH ₂ COOH, R ²⁰⁴ roneun for example may be made of an ethylene group, a phenylene group, a carbonyl group, a sulfonyl group, an oxygen atom, a sulfur atom, R ²⁰⁵ roneun e.g. The same thing as methylene group or R <^204> is mentioned, As R <^206> , a hydrogen atom, a methyl group, an ethyl group, a butyl group, a propyl group, an ethynyl group, a cyclohexyl group, the phenyl group substituted with the hydroxy group, the naphthyl group, etc., respectively, etc. are mentioned, for example. Can be mentioned.
[342] As an acid labile group of a dissolution control agent, various things can be used, Specifically, the group represented by the following general formula L1-L4, the C4-C20 tertiary alkyl group, the trialkylsilyl group of C1-C6 of each alkyl group, respectively And an oxoalkyl group having 4 to 20 carbon atoms.
[343]
[344] In the formula,
[345] R ^L01 and R ^L02 represent a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 18 carbon atoms,
[346] R ^L03 represents a C1-C18 monovalent hydrocarbon group which may contain a hetero atom such as an oxygen atom,
[347] R ^L01 and R ^L02 , R ^L01 and R ^L03 , R ^L02 and R ^L03 may combine with each other to form a ring, and when forming a ring, R ^L01 , R ^L02 and R ^L03 may each be a straight chain having 1 to 18 carbon atoms or Branched alkylene groups,
[348] R ^L04 represents a ^C4-20 tertiary alkyl group, each alkyl group has a C1-6 trialkylsilyl group, a C4-20 oxoalkyl group, or a group represented by the above formula L1,
[349] R ^L05 represents a monovalent hydrocarbon group having 1 to 8 carbon atoms which may include a hetero atom or an aryl group which may be substituted with 6 to 20 carbon atoms,
[350] R ^L06 represents a monovalent hydrocarbon group having 1 to 8 carbon atoms which may include a hetero atom or an aryl group which may be substituted with 6 to 20 carbon atoms,
[351] R ^L07 to R ^L16 each independently represent a hydrogen atom or a monovalent hydrocarbon group having 1 to 15 carbon atoms that may include a hetero atom, or
[352] R ^L07 to R ^L16 may be bonded to each other to form a ring, in which case a divalent hydrocarbon group having 1 to 15 carbon atoms that may include a hetero atom,
[353] In addition, R ^L07 to R ^L16 may be directly bonded to those bonded to adjacent carbon to form a double bond,
[354] y is an integer from 0 to 6,
[355] m is 0 or 1,
[356] n is 0, 1, 2 or 3,
[357] It is a number which satisfies 2m + n = 2 or 3.
[358] In addition, the specific example of each group is the same as that of the said description.
[359] The compounding quantity of the said dissolution control agent is 0-50 parts with respect to 100 parts of base resins, Preferably it is 0-40 parts, More preferably, it is 0-30 parts, can be used individually or in mixture of 2 or more types. When the compounding quantity exceeds 50 parts, the film may be reduced in pattern and the resolution may decrease.
[360] Further, such dissolution control agents are synthesized by introducing an acid labile group to a compound having a phenolic hydroxy group or a carboxyl group using an organic chemical method.
[361] In addition, a basic compound can be mix | blended with the resist material of this invention.
[362] As the basic compound, a compound capable of suppressing the diffusion rate when the acid generated from the acid generator is diffused into the resist film is suitable. By compounding the basic compound, the diffusion rate of the acid in the resist film is suppressed, so that the resolution can be improved, and the change in sensitivity after exposure can be suppressed, or the exposure margin and pattern profile can be improved by reducing the substrate and the environmental dependence.
[363] Such basic compounds include primary, secondary and tertiary aliphatic amines, hybrid amines, aromatic amines, heterocyclic amines, nitrogen-containing compounds having a carboxyl group, nitrogen-containing compounds having a sulfonyl group, nitrogen-containing compounds having a hydroxy group, and hydroxy Nitrogen containing compound which has a phenyl group, alcoholic nitrogen containing compound, an amide derivative, an imide derivative, etc. are mentioned.
[364] Specifically, the primary aliphatic amines are ammonia, methylamine, ethylamine, n-propylamine, isopropylamine, n-butylamine, isobutylamine, sec-butylamine, tert-butylamine, pentylamine, tert-amyl Amine, cyclopentylamine, hexylamine, cyclohexylamine, heptylamine, octylamine, nonylamine, decylamine, dodecylamine, cetylamine, methylenediamine, ethylenediamine, tetraethylenepentamine and the like are exemplified, and secondary aliphatic Examples of the amines include dimethylamine, diethylamine, di-n-propylamine, diisopropylamine, di-n-butylamine, diisobutylamine, di-sec-butylamine, dipentylamine, dicyclopentylamine, Dihexylamine, dicyclohexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, didodecylamine, dicetylamine, N, N-dimethylmethylenediamine, N, N-dimethylethylenediamine, N , N-dimethyltetraethylenepentamine and the like are exemplified, and as tertiary aliphatic amines Trimethylamine, triethylamine, tri-n-propylamine, triisopropylamine, tri-n-butylamine, triisobutylamine, tri-sec-butylamine, tripentylamine, tricyclopentylamine, trihexylamine , Tricyclohexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, tridodecylamine, tricetylamine, N, N, N ', N'-tetramethylmethylenediamine, N, N, N ', N'- tetramethylethylenediamine, N, N, N', N'-tetramethyltetraethylenepentamine, etc. are illustrated.
[365] In addition, examples of the mixed amines include dimethylethylamine, methylethylpropylamine, benzylamine, phenethylamine, benzyldimethylamine, and the like. Specific examples of aromatic amines and heterocyclic amines include aniline derivatives (eg, aniline, N-methylaniline, N-ethylaniline, N-propylaniline, N, N-dimethylaniline, 2-methylaniline, 3-methyl Aniline, 4-methylaniline, ethylaniline, propylaniline, trimethylaniline, 2-nitroaniline, 3-nitroaniline, 4-nitroaniline, 2,4-dinitroaniline, 2,6-dinitroaniline, 3,5 -Dinitroaniline, N, N-dimethyltoluidine, etc.), diphenyl (p-tolyl) amine, methyldiphenylamine, triphenylamine, phenylenediamine, naphthylamine, diaminonaphthalene, pyrrole derivatives (e.g. , Pyrrole, 2H-pyrrole, 1-methylpyrrole, 2,4-dimethylpyrrole, 2,5-dimethylpyrrole, N-methylpyrrole and the like), oxazole derivatives (e.g., oxazole, isoxazole, etc.), Thiazole derivatives (e.g. thiazole, isothiazole, etc.), imidazole derivatives (e.g., imidazole, 4-methylimidazole, 4-methyl-2-phenylimidazole, etc.) , Pyrazole derivatives, furazane derivatives, pyrroline derivatives (e.g., pyrroline, 2-methyl-1-pyrroline, etc.), pyrrolidine derivatives (e.g., pyrrolidine, N-methylpyrrolidine , Pyrrolidinone, N-methylpyrrolidone, etc.), imidazoline derivatives, imidazolidine derivatives, pyridine derivatives (e.g. pyridine, methylpyridine, ethylpyridine, propylpyridine, butylpyridine, 4- (1) -Butylpentyl) pyridine, dimethylpyridine, trimethylpyridine, triethylpyridine, phenylpyridine, 3-methyl-2-phenylpyridine, 4-tert-butylpyridine, diphenylpyridine, benzylpyridine, methoxypyridine, butoxypyridine, Dimethoxypyridine, 1-methyl-2-pyridine, 4-pyrrolidinopyridine, 1-methyl-4-phenylpyridine, 2- (1-ethylpropyl) pyridine, aminopyridine, dimethylaminopyridine, etc.), pyridazine derivatives , Pyrimidine derivatives, pyrazine derivatives, pyrazoline derivatives, pyrazolidine derivatives, piperidine derivatives, piperazine oil Sieve, morpholine derivatives, indole derivatives, isoindole derivatives, 1H-indazole derivatives, indolin derivatives, quinoline derivatives (e.g. quinoline, 3-quinolinecarbonitrile, etc.), isoquinoline derivatives, cinnaline derivatives, quinazoline Derivatives, quinoxaline derivatives, phthalazine derivatives, purine derivatives, pteridine derivatives, carbazole derivatives, phenanthridine derivatives, acridine derivatives, phenadine derivatives, 1,10-phenanthroline derivatives, adenine derivatives, adenosine Derivatives, guanine derivatives, guanosine derivatives, uracil derivatives, uridine derivatives and the like.
[366] In addition, examples of the nitrogen-containing compound having a carboxyl group include aminobenzoic acid, indolecarboxylic acid, and amino acid derivatives (for example, nicotinic acid, alanine, arginine, aspartic acid, glutamic acid, glycine, histidine, isoleucine, glycylosin, leucine , Methylronine, phenylalanine, threonine, lysine, 3-aminopyrazine-2-carboxylic acid, methoxyalanine) and the like, and examples of the nitrogen-containing compound having a sulfonyl group include 3-pyridine sulfonic acid and p-toluene sulfonic acid pyridinium. Examples thereof include a nitrogen-containing compound having a hydroxy group, a nitrogen-containing compound having a hydroxyphenyl group, an alcoholic nitrogen-containing compound, 2-hydroxypyridine, aminocresol, 2,4-quinolinediol, 3-indolemethanol hydrate, Monoethanolamine, diethanolamine, triethanolamine, N-ethyl diethanolamine, N, N-diethylethanolamine, triisopropanolamine, 2,2'-imino diethanol, 2-aminoethanol, 3-amino-1-propanol, 4-amino-1-butanol, 4- (2-hydroxyethyl) morpholine, 2- (2-hydroxyethyl) pyridine, 1- (2-hydroxy Hydroxyethyl) piperazine, 1- [2- (2-hydroxyethoxy) ethyl] piperazine, piperidineethanol, 1- (2-hydroxyethyl) pyrrolidine, 1- (2-hydroxyethyl ) -2-pyrrolidinone, 3-piperidino-1,2-propanediol, 3-pyrrolidino-1,2-propanediol, 8-hydroxyurolidine, 3-quinuclidinol, 3- Tropanol, 1-methyl-2-pyrrolidineethanol, 1-aziridineethanol, N- (2-hydroxyethyl) phthalimide, N- (2-hydroxyethyl) isonicotinamide, etc. are illustrated. Examples of the amide derivatives include formamide, N-methylformamide, N, N-dimethylformamide, acetamide, N-methylacetamide, N, N-dimethylacetamide, propionamide, benzamide and the like. Phthalimide, succinimide, maleimide, etc. are illustrated as an imide derivative.
[367] Moreover, 1 type, or 2 or more types chosen from the basic compound represented by following formula (B-1) can also be added.
[368] <Formula B-1>
[369] N (X) _n (Y) _3-n
[370] In the formula,
[371] n = 1, 2 and 3,
[372] Side chain X may be the same or different, and may be represented by the formula X-1 to X-3,
[373] Side chain Y represents the same or different hydrogen atom, or a straight, branched or cyclic alkyl group having 1 to 20 carbon atoms, and may include an ether group or a hydroxyl group,
[374] In addition, X may be bonded to each other to form a ring.
[375]
[376] In the formula,
[377] R ³⁰⁰ , R ³⁰² and R ³⁰⁵ are straight or branched chain alkylene groups having 1 to 4 carbon atoms,
[378] R ³⁰¹ and R ³⁰⁴ are hydrogen atoms, straight, branched or cyclic alkyl groups having 1 to 20 carbon atoms, and may include one or more hydroxy groups, ether groups, ester groups, lactone rings,
[379] R ³⁰³ is a single bond or a linear, branched alkylene group having 1 to 4 carbon atoms,
[380] R ³⁰⁶ is a linear, branched, cyclic alkyl group having 1 to 20 carbon atoms, and may include one or a plurality of hydroxy groups, ethers, ester groups, and lactone rings.
[381] The compound represented by general formula (B-1) is specifically illustrated below.
[382] Tris (2-methoxymethoxyethyl) amine, tris {2- (2-methoxyethoxy) ethyl} amine, tris {2- (2-methoxyethoxymethoxy) ethyl} amine, tris {2- (1-methoxyethoxy) ethyl} amine, tris {2- (1-ethoxyethoxy) ethyl} amine, tris {2- (1-ethoxypropoxy) ethyl} amine, tris [2- {2 -(2-hydroxyethoxy) ethoxy} ethyl] amine, 4,7,13,16,21,24-hexaoxa-1,10-diazabicyclo [8.8.8] hexacoic acid, 4,7, 13,18-tetraoxa-1,10-diazabicyclo [8.5 .5] eichoic acid, 1,4,10,13-tetraoxa-7,16-diazabicyclooctadecane, 1-aza-12-crown -4, 1-aza-15-crown-5, 1-aza-18-crown-6, tris (2-formyloxyethyl) amine, tris (2-formyloxyethyl) amine, tris (2-ace Methoxyethyl) amine, tris (2-propionyloxyethyl) amine, tris (2-butyryloxyethyl) amine, tris (2-isobutyryloxyethyl) amine, tris (2- valeryloxyethyl) amine, Tris (2-pivaloyloxyethyl) Min, N, N-bis (2-acetoxyethyl) 2- (acetoxyacetoxy) ethylamine, tris (2-methoxycarbonyloxyethyl) amine, tris (2-tert-butoxycarbonyloxyethyl ) Amine, tris [2- (2-oxopropoxy) ethyl] amine, tris [2- (methoxycarbonylmethyl) oxyethyl] amine, tris [2- (tert-butoxycarbonylmethyloxy) ethyl] Amine, tris [2- (cyclohexyloxycarbonylmethyloxy) ethyl] amine, tris (2-methoxycarbonylethyl) amine, tris (2-ethoxycarbonylethyl) amine, N, N-bis ( 2-hydroxyethyl) 2- (methoxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- (methoxycarbonyl) ethylamine, N, N-bis (2-hydroxy Ethyl) 2- (ethoxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- (ethoxycarbonyl) ethylamine, N, N-bis (2-hydroxyethyl) 2- (2-methoxyethoxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- (2-methoxyethoxycarbonyl) ethylamine, N, N -Bis (2-hydroxyethyl) 2- (2-hydroxyethoxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- (2-acetoxyethoxycarbonyl) ethylamine , N, N-bis (2-hydroxyethyl) 2-[(methoxycarbonyl) methoxycarbonyl] ethylamine, N, N-bis (2-acetoxyethyl) 2-[(methoxycarbonyl ) Methoxycarbonyl] ethylamine, N, N-bis (2-hydroxyethyl) 2- (2-oxopropoxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- ( 2-oxopropoxycarbonyl) ethylamine, N, N-bis (2-hydroxyethyl) 2- (tetrahydrofurfuryloxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2 -(Tetrahydrofurfuryloxycarbonyl) ethylamine, N, N-bis (2-hydroxyethyl) 2-[(2-oxotetrahydrofuran-3-yl) oxycarbonyl] ethylamine, N, N -Bis (2-acetoxyethyl) 2-[(2-oxotetrahydrofuran-3-yl) oxycarbonyl] ethylamine, N, N-bis (2-hydroxyethyl) 2- (4-hydroxy Butok Carbonyl) ethylamine, N, N-bis (2-formyloxyethyl) 2- (4-formyloxybutoxycarbonyl) ethylamine, N, N-bis (2-formyloxyethyl) 2- (2-formyloxyethoxycarbonyl) ethylamine, N, N-bis (2-methoxyethyl) 2- (methoxycarbonyl) ethylamine, N- (2-hydroxyethyl) bis [2- (Methoxycarbonyl) ethyl] amine, N- (2-acetoxyethyl) bis [2- (methoxycarbonyl) ethyl] amine, N- (2-hydroxyethyl) bis [2- (ethoxycar Carbonyl) ethyl] amine, N- (2-acetoxyethyl) bis [2- (ethoxycarbonyl) ethyl] amine, N- (3-hydroxy-1-propyl) bis [2- (methoxycarbonyl ) Ethyl] amine, N- (3-acetoxy-1-propyl) bis [2- (methoxycarbonyl) ethyl] amine, N- (2-methoxyethyl) bis [2- (methoxycarbonyl) Ethyl] amine, N-butyl bis [2- (methoxycarbonyl) ethyl] amine, N-butyl bis [2- (2-methoxyethoxycarbonyl) ethyl] amine, N-methyl bis (2-ace Methoxyethyl) amine, N-ethyl bis (2-acetoxyethyl) Amine, N-methyl bis (2-pivaloyloxyethyl) amine, N-ethyl bis [2- (methoxycarbonyloxy) ethyl] amine, N-ethyl bis [2- (tert-butoxycarbonyloxy ) Ethyl] amine, tris (methoxycarbonylmethyl) amine, tris (ethoxycarbonylmethyl) amine, N-butyl bis (methoxycarbonylmethyl) amine, N-hexyl bis (methoxycarbonylmethyl) amine , (beta)-(diethylamino) -δ-valerolactone can be exemplified, but is not limited thereto.
[383] The compounding quantity of the said basic compound is 0.001-10 parts with respect to 1 part of acid generators, Preferably it is 0.01-1 part. If the blending amount is less than 0.001 part, the effect as an additive may not be sufficiently obtained, and if it exceeds 10 parts, resolution and sensitivity may be lowered.
[384] Moreover, the compound which has group represented by -C-COOH in a molecule | numerator can be mix | blended with the resist material of this invention.
[385] As a compound which has group represented by -C-COOH in a molecule | numerator, 1 type (s) or 2 or more types of compounds chosen from the following group I and II can be used, for example, It is not limited to these. By combining this component, the PED stability of the resist is improved, and the edge roughness on the nitride film substrate is improved.
[386] [Group I]
[387] Some or all of the hydrogen atoms of the phenolic hydroxy group of the compounds represented by the formulas A1 to A10 are substituted with -R ⁴⁰¹ -COOH (R ⁴⁰¹ is a straight or branched chain alkylene group having 1 to 10 carbon atoms), and at the same time a molecule The compound whose molar ratio of the phenolic hydroxy group (C) and group (D) represented by -C-COOH in this is C / (C + D) = 0.1-1.0.
[388] [Group II]
[389] Compounds represented by the following formulas A11 to A15.
[390]
[391] In the formula,
[392] R ⁴⁰⁸ represents a hydrogen atom or a methyl group,
[393] R ⁴⁰² and R ⁴⁰³ each represent a hydrogen atom or a straight or branched chain alkyl group or alkenyl group having 1 to 8 carbon atoms,
[394] R ⁴⁰⁴ represents a hydrogen atom or a straight or branched chain alkyl or alkenyl group having 1 to 8 carbon atoms, or a-(R ⁴⁰⁹ ) _h -COOR 'group (R' represents a hydrogen atom or -R ⁴⁰⁹ -COOH),
[395] R ⁴⁰⁵ represents-(CH ₂ ) _i- (i = 2 to 10), an arylene group, carbonyl group, sulfonyl group, oxygen atom or sulfur atom, having 6 to 10 carbon atoms,
[396] R ⁴⁰⁶ represents an alkylene group having 1 to 10 carbon atoms, an arylene group having 6 to 10 carbon atoms, a carbonyl group, a sulfonyl group, an oxygen atom or a sulfur atom,
[397] R ⁴⁰⁷ represents a hydrogen atom or a linear or branched alkyl group having 1 to 8 carbon atoms, an alkenyl group, a phenyl group or a naphthyl group each substituted with a hydroxy group,
[398] R ⁴⁰⁹ represents a straight or branched chain alkylene group having 1 to 10 carbon atoms,
[399] R ⁴¹⁰ represents a hydrogen atom or a straight or branched chain alkyl group or alkenyl group having 1 to 8 carbon atoms, or a -R ⁴¹¹ -COOH group,
[400] R ⁴¹¹ represents a straight or branched chain alkylene group having 1 to 10 carbon atoms,
[401] j is an integer from 0 to 5,
[402] u and h are 0 or 1,
[403] s1, t1, s2, t2, s3, t3, s4 and t4 satisfy s1 + t1 = 8, s2 + t2 = 5, s3 + t3 = 4, s4 + t4 = 6, respectively, and at the same time 1 in each phenyl skeleton Is a number that has at least two hydroxyl groups,
[404] κ is a number such that the compound of formula A6 has a weight average molecular weight of 1,000 to 5,000,
[405] λ is a number such that the compound of formula A7 has a weight average molecular weight of 1,000 to 10,00.
[406]
[407] R ⁴⁰² , R ⁴⁰³ and R ⁴¹¹ have the same meaning as described above,
[408] R ⁴¹² represents a hydrogen atom or a hydroxy group,
[409] s5 and t5 are s5≥0, t5≥0, a number satisfying s5 + t5 = 5,
[410] h 'is 0 or 1.
[411] Specific examples of the component include compounds represented by the following formulas AI-1 to AI-14 and AII-1 to AII-10, but are not limited thereto.
[412]
[413] R ″ represents a hydrogen atom or a CH ₂ COOH group, and in each compound, 10 to 100 mol% of R ″ is a CH ₂ COOH group, and α and κ represent the same meanings as described above.
[414]
[415] In addition, the compound containing the group represented by -C-COOH in the said molecule can be used individually by 1 type or in combination of 2 or more type.
[416] The amount of the compound having a group represented by ≡C-COOH in the molecule is 0 to 5 parts, preferably 0.1 to 5 parts, more preferably 0.1 to 3 parts, even more preferably 0.1 to 5 parts with respect to 100 parts of the base resin. 2 copies. When more than 5 parts, the resolution of a resist material may fall.
[417] Moreover, an acetylene alcohol derivative can be mix | blended with the resist material of this invention as an additive, and by doing so, storage stability can be improved.
[418] As the acetylene alcohol derivative, those represented by the following formulas S1 and S2 can be preferably used.
[419]
[420] In the formula,
[421] R ⁵⁰¹ , R ⁵⁰² , R ⁵⁰³ , R ⁵⁰⁴ and R ⁵⁰⁵ each represent a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 8 carbon atoms,
[422] X and Y represent 0 or a positive number, and satisfy the following values of 0 ≦ X ≦ 30, 0 ≦ Y ≦ 30, and 0 ≦ X + Y ≦ 40.
[423] As the acetylene alcohol derivatives, it is preferable that the suminol 61, the suminol 82, the suminol 104, the suminol 104E, the suminol 104H, the suminol 104A, the suminol TG, the suminol PC, the suminol 440, the suminol 465, and the suminol 485 (Manufactured by Air Products and Chemicals Inc.) and Sufinol E1004 (manufactured by Nisshin Chemical Industries, Ltd.).
[424] The amount of the acetylene alcohol derivative added is 0.01 to 2% by weight, more preferably 0.02 to 1% by weight in 100% by weight of the resist material. When less than 0.01 weight%, the effect of improving coating property and storage stability may not be fully acquired, and when more than 2 weight%, the resolution of a resist material may fall.
[425] The resist material of this invention can add the surfactant normally used for improving applicability | paintability as arbitrary components other than the said component. In addition, the addition amount of an arbitrary component can be made into the normal amount in the range which does not impair the effect of this invention.
[426] The surfactant is preferably nonionic, and includes perfluoroalkyl polyoxyethylene ethanol, fluorinated alkyl ester, perfluoroalkylamine oxide, perfluoroalkyl EO adduct, fluorine-containing organosiloxane compound, and the like. Can be mentioned. For example, fluoride "FC-430", "FC-431" (all are manufactured by Sumitomo 3M Co., Ltd.), suffrons "S-141", "S-145" (all are manufactured by Asahi Glass Co., Ltd.) , United "DS-401", "DS-403", "DS-451" (all manufactured by Daikin Kogyo Co., Ltd.), Megapack "F-8151" (manufactured by Dainippon Ink Kogyo Co., Ltd.), " X-70-092 "," X-70-093 "(all are the Shin-Etsu Chemical Co., Ltd. make), etc. are mentioned. Preferably, fluoride "FC-430" (made by Sumitomo 3M) and "X-70-093" (made by Shin-Etsu Chemical Co., Ltd.) are mentioned.
[427] In order to form a pattern using the resist material of the present invention, a well-known lithography technique may be employed and applied, for example, on a substrate such as a silicon wafer so as to have a film thickness of 0.2 to 2.0 mu m by a method such as spin coating. This is prebaked on a hot plate at 60 to 150 ° C. for 1 to 10 minutes, preferably at 80 to 130 ° C. for 1 to 5 minutes. Subsequently, a mask for forming a desired pattern is covered on the resist film, and high-energy rays or electron beams such as far ultraviolet rays, excimer lasers, X-rays, etc. are exposed at an exposure dose of about 1-20 mJ / cm 2, preferably 5-10 mJ / cm 2. After irradiation to a degree, post exposure bake (PEB) on a hot plate at 60 to 150 ° C. for 1 to 5 minutes, preferably at 80 to 130 ° C. for 1 to 3 minutes. Further, using a developing solution of an aqueous alkaline solution such as tetramethylammonium hydroxide (TMAH) at 0.1 to 5%, preferably 2 to 3%, dipping for 0.1 to 3 minutes, preferably 0.5 to 2 minutes The target pattern is formed on a substrate by developing by a conventional method such as a method, a puddle method, a spray method, or the like. In addition, the material of the present invention is particularly suitable for fine patterning by far ultraviolet rays or excimer lasers, X-rays and electron beams of 248 to 193 nm, even among high energy rays. In addition, when the said range deviates from an upper limit and a lower limit, a desired pattern may not be obtained.
[428] <Example>
[429] Hereinafter, the present invention will be described in detail with reference to synthesis examples and examples, but the present invention is not limited to the following examples.
[430] Synthesis Example 1 Synthesis of 2- (5-norbornene-2-yl) methyl-1,3-dioxolane (monomer 1)
[431] 40.0 g of (5-norbornene-2-yl) acetaldehyde, 23.0 g of ethylene glycol, 120 ml of toluene, 200 mg of p-toluenesulfonic acid are mixed and heated for 1 hour while removing the water generated using an H tube. It was refluxed. After cooling, the reaction solution was poured into 50 ml of saturated sodium bicarbonate water and separated. The organic layer was washed with water and brine, dried over anhydrous sodium sulfate, and then concentrated under reduced pressure. Purification by reduced pressure distillation gave 50.3 g of 2- (5-norbornene-2-yl) methyl-1,3-dioxolane (boiling point 63 ° C / 200 Pa, yield 95%).
[432] IR (Thin Film): ν = 3138, 3057, 2962, 2868, 2764, 2654, 2611, 1628, 1570,1434, 1408, 1336, 1251, 1227, 1136, 1078, 1032, 989, 968, 943, 906, 721 cm ^-1
[433] ¹ H-NMR of major diastereomers (270 MHz, CDCl ₃ ): δ = 0.58 (1H, ddd, J = 11.4, 4.1, 2.6 Hz), 1.15-1.55 (4H, m), 1.88 (1H, ddd, J = 11.4, 9.0, 4.0 Hz), 2.18 (1H, m), 2.74 (1H, m), 2.81 (1H, m), 3.80-4.00 (4H, m), 4.82 (1H, t, J = 5.1 Hz) , 5.92 (1 H, m), 6.11 (1 H, m).
[434] Synthesis Example 2 Synthesis of 2- (5-norbornene-2-yl) methyl-1,3-dioxane (monomer 2)
[435] 2- (5-norbornene-2-yl) methyl-1,3-dioxane was obtained by the same method as Synthesis Example 1 except that 1,3-propanediol was used instead of ethylene glycol (boiling point: 89 C / 53 Pa, yield 96%).
[436] IR (thin film): ν = 3057, 2962, 2848, 2775, 2731, 2656, 1570, 1470, 1433, 1404, 1377, 1336, 1282, 1242, 1216, 1146, 1090, 1047, 1003, 978, 933, 719 cm ^-1
[437] ¹ H-NMR of major diastereomers (270 MHz, CDCl ₃ ): δ = 0.54 (1H, ddd, J = 11.5, 4.5, 2.7 Hz), 1.10-1.60 (5H, m), 1.85 (1H, ddd, J = 11.5, 8.6, 3.8 Hz), 1.95-2.25 (2 H, m), 2.70-2.80 (2H, m), 3.74 (2H, ddd, J = 10.9, 10.6, 2.4 Hz), 4.08 (2H, ddd, J = 10.9, 4.9, 1.6 Hz), 4.48 (1H, t, J = 5.3 Hz), 5.91 (1H, m), 6.10 (1H, m)
[438] Synthesis Example 3 Synthesis of 2-methyl-2- {2- (5-norbornene-2-yl) ethyl} -1,3-dioxolane (monomer 3)
[439] Synthesis Example 1 except that 4- (5-norbornene-2-yl) -2-butanone was used in place of (5-norbornene-2-yl) acetaldehyde and the heating was refluxed for 10 hours. 2-methyl-2- {2- (5-norbornene-2-yl) ethyl} -1,3-dioxolane was obtained by the same method as the (boiling point: 63-65 ° C./27 Pa, yield 80%). ).
[440] IR (Thin Film): ν = 3057, 2962, 2941, 2866, 1570, 1454, 1377, 1348, 1252, 1221, 1132, 1093, 1068, 1045, 947, 906, 717 cm ^-1
[441] ¹ H-NMR of the main diastereomer (300 MHz, CDCl ₃ ): δ = 0.49 (1H, ddd, J = 11.3, 4.1, 2.6 Hz), 9H, m including 1.05-1.70 {1.27 (3H, s) }, 1.82 (1H, ddd, J = 11.3, 9.2, 3.9 Hz), 1.91 (1H, m), 2.70-2.80 (2H, m), 3.85-3.95 (4H, m), 5.91 (1H, m), 6.10 (1 H, m)
[442] Synthesis Example 4 Synthesis of 2-methyl-2- {2- (5-norbornene-2-yl) ethyl} -1,3-dioxane (monomer 4)
[443] 2-Methyl-2- {2- (5-norbornene-2-yl) ethyl} -1,3- in the same manner as in Synthesis Example 3, except that 1,3-propanediol was used instead of ethylene glycol. Dioxane was obtained (boiling point: 110-112 ° C./133 Pa, yield 76%).
[444] IR (Thin Film): ν = 3057, 2956, 2864, 2715, 1570, 1454, 1371, 1348, 1248, 1215, 1188, 1146, 1101, 1057, 968, 854, 717 cm ^-1
[445] ¹ H-NMR of the main diastereomer (300 MHz, CDCl ₃ ): δ = 0.50 (1H, ddd, J = 10.9, 4.1, 2.6 Hz), 7H, m including 1.05-1.50 {1.33 (3H, s) }, 1.50-2.00 (6H, m), 2.70-2.80 (2H, m), 3.80-3.95 (4H, m), 5.92 (1H, m), 6.10 (1H, m)
[446] Synthesis Example 5 Synthesis of 2- {3- (5-norbornene-2-yl) -1-propyl} -1,3-dioxolane (monomer 5)
[447] Grignard reagent was prepared by conventional methods in 500 ml of anhydrous tetrahydrofuran from 200 g of 5-bromomethyl-2-norbornene. Next, the Grignard reagent obtained in the mixture of 130 g of 3,3-diethoxy-1-propene, 1.0 g of copper bromide (I), and 300 ml of anhydrous tetrahydrofuran was added dropwise at 20 ° C. over 1 hour. After stirring for 20 hours, the reaction solution was added to a saturated aqueous ammonium chloride solution to stop the reaction. After hexane extraction, the organic layer was washed sequentially with water, saturated sodium bicarbonate water and saturated brine. After drying using anhydrous sodium sulfate, the mixture was concentrated under reduced pressure to give 5- (4-ethoxy-3-buten-1-yl) -2-norbornene.
[448] Subsequently, the obtained 5- (4-ethoxy-3-buten-1-yl) -2-norbornene, 90 g of ethylene glycol, 1.0 g of p-toluenesulfonic acid, and 300 ml of toluene were mixed and heated to reflux for 1 hour. . After cooling, the reaction solution was separated into 100 ml of saturated sodium bicarbonate water. The organic layer was washed with water and brine, dried over anhydrous sodium sulfate, and then concentrated under reduced pressure. Purification by reduced pressure distillation gave 177 g of 2- {3- (5-norbornene-2-yl) -1-propyl} -1,3-dioxolane (boiling point: 92 ° C / 27 Pa, yield 85%) ).
[449] IR (Thin Film): ν = 3138, 3057, 2941, 2866, 2764, 2611, 1570, 1460, 1410, 1336, 1134, 1090, 1038, 980, 945, 904, 717 cm ^-1
[450] ¹ H-NMR of major diastereomers (300 MHz, CDCl ₃ ): δ = 0.48 (1H, ddd, J = 11.0, 4.2, 2.6 Hz), 1.00-1.55 (6H, m), 1.55-1.70 (2H, m ), 1.82 (1H, ddd, J = 11.0, 9.0, 3.8 Hz), 1.98 (1H, m), 2.70-2.80 (2H, m), 3.80-4.00 (4H, m), 4.82 (1H, t, J = 5.0 Hz), 5.90 (1H, m), 6.09 (1H, m)
[451] Synthesis Example 6 Synthesis of 2- {3- (5-norbornene-2-yl) -1-propyl} -1,3-dioxane (monomer 6)
[452] 2- {3- (5-norbornene-2-yl) -1-propyl} -1,3-di by the same method as in Synthesis Example 5 except that 1,3-propanediol was used instead of ethylene glycol Oxane was obtained (boiling point: 104 ° C./53 Pa, yield 80%).
[453] IR (Thin Film): ν = 3138, 3057, 2960, 2848, 2775, 2731, 2656, 1570, 1460, 1403, 1240, 1146, 1093, 1053, 993, 941, 927, 717 cm ^-1
[454] ¹ H-NMR of major diastereomers (300 MHz, CDCl ₃ ): δ = 0.47 (1H, ddd, J = 11.3, 4.2, 2.6 Hz), 1.00-1.15 (2H, m), 1.15-1.20 (1H, m ), 1.20-1.50 (4H, m), 1.50-1.70 (2H, m), 1.81 (1H, ddd, J = 11.3, 9.3, 3.8 Hz), 1.90-2.20 (2H, m), 2.65-2.80 (2H , m), 3.65-3.80 (2H, m), 4.00-4.10 (2H, m), 4.48 (1H, t, J = 5.1 Hz), 5.89 (1H, m), 6.08 (1H, m)
[455] Synthesis Example 7 Synthesis of 2- {6- (5-norbornene-2-yl) -1-hexyl} -1,3-dioxolane (monomer 7)
[456] 2- {6- (5) by the same method as in Synthesis Example 5, except that 5- (6-chloro-1-hexyl) -2-norbornene was used instead of 5-bromomethyl-2-norbornene. -Norbornene-2-yl) -1-hexyl} -1,3-dioxolane was obtained (boiling point: 117 ° C / 27 Pa, yield 81%).
[457] IR (Thin Film): ν = 3138, 3057, 2926, 2856, 2761, 1570, 1464, 1410, 1336,1142, 1036, 943, 717 cm ^-1
[458] ¹ H-NMR of major diastereomers (300 MHz, CDCl ₃ ): δ = 0.46 (1H, ddd, J = 11.1, 4.2, 2.6 Hz), 0.95-1.15 (2H, m), 1.15-1.45 (10H, m ), 1.60-1.70 (2H, m), 1.80 (1H, ddd, J = 11.1, 9.1, 3.7 Hz), 1.95 (1H, m), 2.70-2.80 (2H, m), 3.80-4.00 (4H, m ), 4.83 (1H, t, J = 5.0 Hz), 5.89 (1H, m), 6.08 (1H, m)
[459] Synthesis Example 8 Synthesis of 2- {6- (5-norbornene-2-yl) -1-hexyl} -1,3-dioxane (monomer 8)
[460] 2- {6- (5-norbornene-2-yl) -1-hexyl} -1,3-di by the same method as in Synthesis Example 7 except that 1,3-propanediol was used instead of ethylene glycol Oxane was obtained (boiling point: 149-151 ° C./270 Pa, yield 78%).
[461] IR (Thin Film): ν = 3057, 2960, 2923, 2850, 2775, 2728, 2655, 1570, 1468, 1403, 1377, 1240, 1146, 1090, 1001, 717 cm ^-1
[462] ¹ H-NMR of major diastereomers (300 MHz, CDCl ₃ ): δ = 0.46 (1H, ddd, J = 11.1, 4.3, 2.6 Hz), 0.95-1.10 (2H, m), 1.51-1.45 (11H, m ), 1.50-1.65 (2H, m), 1.80 (1H, ddd, J = 11.1, 9.1, 3.8 Hz), 1.85-2.15 (2H, m), 2.65-2.80 (2H, m), 3.65-3.80 (2H , m), 4.05-4.15 (2H, m), 4.49 (1H, t, J = 5, 1 Hz), 5.89 (1H, m), 6.08 (1H, m)
[463] Synthesis Example 9 Synthesis of 3- (1,3-dioxan-2-yl) -1- (5-norbornene-2-yl) -1-propanol (monomer 9)
[464] Grignard reagent was prepared by conventional methods in 200 ml of anhydrous tetrahydrofuran from 36.2 g of 2- (2-bromoethyl) -1,3-dioxane. Subsequently, 19.5 g of 5-norbornene-2-carbaldehyde was added dropwise to the obtained Grignard reagent over 30 minutes at 20 ° C. After stirring for 30 minutes, the reaction solution was added to a saturated aqueous ammonium chloride solution to stop the reaction. After extraction with diethyl ether, the organic layer was washed sequentially with water, saturated sodium bicarbonate water and saturated brine. After drying using anhydrous sodium sulfate, the mixture was concentrated under reduced pressure. Purification by reduced pressure distillation gave 36.2 g of 3- (1,3-dioxan-2-yl) -1- (5-norbornene-2-yl) -1-propanol (boiling point: 125 ° C./27 Pa) , Yield 95%).
[465] IR (thin film): ν = 3440 (. Br ), 3056, 2962, 2860, 2731, 2657, 1570, 1448, 1404, 1377, 1336, 1284, 1240, 1146, 1093, 1047, 997, 926, 721 cm - ^One
[466] ¹ H-NMR (300 MHz, CDCl ₃ ): δ = 0.45-2.35 (12H, m), 2.55-3.50 (3H, m), 3.65-3.80 (2H, m), 4.05-4.15 (2H, m), 4.40 -4.60 (1H, m), 5.80-6.20 (2H, m)
[467] Synthesis Example 10 Synthesis of 3- (1,3-dioxan-2-yl) -1- (5-norbornene-2-yl) -1-propylacetate (monomer 10)
[468] 15.0 g of 3- (1,3-dioxan-2-yl) -1- (5-norbornene-2-yl) -1-propanol, 9.6 g of acetic anhydride, 100 mg of 4-dimethylaminopyridine, methylene chloride 10.2 g of triethylamine was added dropwise to 50 ml of the mixture at 20 ° C. over 30 minutes. After stirring for 30 minutes, 10 g of water was added to stop the reaction. After stirring for 30 more minutes, water was added, followed by hexane extraction. The organic layer was washed sequentially with water and brine, dried over anhydrous sodium sulfate, and then concentrated under reduced pressure. Purification by reduced pressure distillation gave 16.9 g of 3- (1,3-dioxan-2-yl) -1- (5-norbornene-2-yl) -1-propyl acetate (boiling point: 125 ° C./53 Pa, yield 96%).
[469] IR (Thin Film): ν = 3057, 2966, 2850, 2731, 2657, 1732, 1570, 1448, 1406, 1373, 1338, 1244, 1147, 1088, 1018, 723 cm ^-1
[470] ¹ H-NMR (300 MHz in CDCl ₃ ): δ = 0.50-2.30 {14H, including {(3H, s), m}, 2.50-2.85 (2H, m), 3.65-3.85 (2H, m), 4.00- 4.15 (2H, m), 4.30-4.95 (2H, m), 5.85-6.20 (2H, m)
[471]
[472] The high molecular compound of this invention was synthesize | combined by the method shown below.
[473] Synthesis Example 11 Synthesis of Polymer 1
[474] 45.0 g 2- (5-norbornene-2-yl) methyl-1,3-dioxolane (monomer 1), 65.0 g 5-norbornene-2-carboxylic acid 2-ethyl-2-nor Boryl and 24.5 g maleic anhydride were dissolved in 150 ml tetrahydrofuran and 1.8 g 2,2'-azobisisobutyronitrile was added. After stirring at 60 ° C. for 15 hours, the mixture was concentrated under reduced pressure. The obtained residue was dissolved in 400 ml of tetrahydrofuran and added dropwise to 10 L of n-hexane. The produced solid was filtered, further washed with 10 L of n-hexane, and vacuum dried at 40 ° C. for 6 hours to obtain 78.2 g of a polymer compound represented by the following Polymer 1. The yield was 58.1%.
[475] As a result of analyzing the polymer thus obtained by GPC, it was confirmed that the weight average molecular weight (Mw) was 8800 in terms of polystyrene, and the degree of dispersion (Mw / Mn) was a polymer of 1.79. In addition, the structural unit x, y, and z of the polymer obtained by ¹³ C-NMR measurement was x: y: z = 0.25: 0.25: 0.50.
[476] Synthesis Examples 12 to 22 Synthesis of Polymers 2 to 12
[477] Polymers 2 to 12 were synthesized in the same manner as above or by known methods.
[478]
[479]
[480]
[481] Example I
[482] The board | substrate adhesiveness at the time of mix | blending the polymeric compound of this invention with a resist material as a base resin was evaluated.
[483] <Examples I-1 to I-5, and Comparative Examples 1 and 2>
[484] An acid generator (PAG 1), a basic compound and a solvent represented by the following formulas, wherein the polymers represented by the above formulas (polymers 1 to 5) and the polymers represented by the following formulas (polymers 13 and 14) as a base resin are represented as base resins Was mixed to the composition shown in Table 1 below. Subsequently, these were filtered through a filter made of Teflon (pore size 0.2 µm) to obtain a resist material.
[485]
[486]
[487] The resist solution was spun onto a silicon wafer sprayed with hexamethyldisilazane at 90 ° C. for 40 seconds, and thermally treated at 110 ° C. for 90 seconds to form a resist film having a thickness of 0.5 μm. This was exposed using KrF excimer laser stepper (NA = 0.5, manufactured by Nikon Corporation), heat-treated at 110 ° C. for 90 seconds, and puddle development for 60 seconds using a 2.38% aqueous tetramethylammonium hydroxide solution. A line and space pattern of: 1 was formed. The wafer after image development was observed with a scanning electron microscope (scanning electron microscope), and the minimum line width (micrometer) which remained without peeling was made into the adhesion limit of an evaluation resist.
[488] The composition and evaluation results of each resist are shown in Table 1 below. In addition, the solvent and basic compound in Table 1 are as follows. In addition, the solvent used the thing containing 0.01 weight% of FC-430 (made by Sumitomo 3M Co., Ltd.).
[489] PGMEA: Propylene Glycol Methyl Ether Acetate
[490] TBA: tributylamine
[491]
[492] From the result of Table 1, it was confirmed that the high molecular compound of this invention has high substrate adhesiveness.
[493] Example II
[494] The resolution of KrF excimer laser exposure was evaluated for the resist material of the present invention.
[495] <Example II-1 to II-21> Resolution Evaluation of Resist
[496] An acid generator (PAG 1 and 2) represented by the following formula as a base resin, a polymer represented by the above formula (polymer 1 to 12), a dissolution control agent (DRR 1 to 4) represented by the following formula, and a basic compound , Compounds having a group represented by 화학식 C-COOH (ACC 1 and 2) and a solvent in a molecule represented by the following formula were mixed in the composition shown in Table 1. Subsequently, these were filtered through a filter made of Teflon (pore size 0.2 µm) to obtain a resist material.
[497]
[498]
[499]
[500] The resist solution was spun onto a silicon wafer sprayed with hexamethyldisilazane at 90 ° C. for 90 seconds, and heat-treated at 110 ° C. for 90 seconds to form a resist film having a thickness of 0.5 μm. This was exposed using KrF excimer laser stepper (NA = 0.5, manufactured by Nikon Corporation), heat-treated at 110 ° C. for 90 seconds, and puddle development for 60 seconds using a 2.38% aqueous tetramethylammonium hydroxide solution. A line and space pattern of: 1 was formed. The cross-section of the finished wafer was observed with a cross-sectional SEM (scanning electron microscope), and the line end separated at an exposure amount (optimal exposure amount = Eop, mJ / cm ² ) that resolved a 0.30 μm line and space at 1: 1. The minimum line width (mu m) of the space was taken as the resolution of the evaluation resist.
[501] The composition and evaluation results of each resist are shown in Table 2 below. In addition, the solvent and basic compound in Table 2 are as follows. In addition, the solvent used the thing containing 0.01 weight% of FC-430 (made by Sumitomo 3M Co., Ltd.).
[502] PGMEA: propylene glycol methyl ether acetate
[503] TEA: Triethanolamine
[504] TMMEA: Trismethoxymethoxyethylamine
[505] TMEMEA: trismethoxyethoxymethoxyethylamine
[506]
[507] From the results in Table 2, it was confirmed that the resist material of the present invention has high sensitivity and high resolution in KrF excimer laser exposure.
[508] Example III
[509] The resolution of ArF excimer laser exposure was evaluated for the resist material of the present invention.
[510] Example III-1 and III-2 Resolution Evaluation of Resist
[511] In the same manner as above, a resist material was prepared with the composition shown in Table 3 below.
[512] The resist liquid was spun onto a silicon wafer sprayed with hexamethyldisilazane at 90 ° C. for 90 seconds, and heat-treated at 110 ° C. for 90 seconds to form a resist film having a thickness of 0.5 μm. This was exposed using an ArF excimer laser stepper (NA = 0.55), heat-treated at 110 ° C. for 90 seconds, and puddle developed for 60 seconds using a 2.38% aqueous tetramethylammonium hydroxide solution. A line and space pattern of: 1 was formed. Observation of the cross-section of the wafer after development was carried out with a cross-sectional SEM (scanning electron microscope), and the line end separated at an exposure dose (optimal exposure dose = Eop, mJ / cm ² ) that resolved a 0.25 μm line end space at 1: 1. The minimum line width (mu m) of the space was taken as the resolution of the evaluation resist.
[513] The composition and evaluation results of each resist are shown in Table 3 below. In addition, the solvent and basic compound in Table 3 are as follows. In addition, the solvent used the thing containing 0.01 weight% of FC-430 (made by Sumitomo 3M Co., Ltd.).
[514] PGMEA: propylene glycol methyl ether acetate
[515] TEA: Triethanolamine
[516] TMMEA: Trismethoxymethoxyethylamine
[517] ExampleResin (part by weight)Acid generator (parts by weight)Basic compound (weight part)Solvent (part by weight)Optimum Exposure Amount (mJ / cm ² )Resolution (μm)shape III-1Polymer 1 (80)PAG 1 (1)TEA (0.063)PGMEA (480)17.00.15Rectangle III-2Polymer 1 (80)PAG 2 (1)TMMEA (0.118)PGMEA (480)18.00.15Rectangle
[518] From the results in Table 3, it was confirmed that the resist material of the present invention had high sensitivity and high resolution in ArF excimer laser exposure.
[519] Since the resist material using the polymer compound of the present invention as the base resin is sensitive to high energy rays and excellent in sensitivity, resolution and etching resistance, it is useful for fine processing by electron beams or far ultraviolet rays. In particular, since the absorption at the exposure wavelength of the ArF excimer laser and the KrF excimer laser is small, it is easy to form a pattern perpendicular to the substrate as well as fine.

权利要求:
Claims (10)
[1" claim-type="Currently amended] Acetal compound represented by the following formula (1).
<Formula 1>

In the formula,
R is a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 6 carbon atoms,
X represents-(CH ₂ ) _m -in which one hydrogen atom may be substituted with a hydroxy group or an acetoxy group,
k is 0 or 1,
m is an integer satisfying 1≤m≤8,
n is 2 or 3.
[2" claim-type="Currently amended] The acetal compound of Claim 1 represented by following General formula (2).
<Formula 2>

In the formula,
R represents a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 6 carbon atoms,
k is 0 or 1,
m is an integer satisfying 1≤m≤8,
n is 2 or 3.
[3" claim-type="Currently amended] The acetal compound of Claim 1 represented by following formula (3).
<Formula 3>

In the formula,
R is a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 6 carbon atoms,
Y represents a hydroxy group or an acetoxy group,
k is 0 or 1,
p and q are zero or positive integers satisfying 0 ≦ p + q ≦ 7,
n is 2 or 3.
[4" claim-type="Currently amended] A polymer compound having a weight average molecular weight of 1,000 to 500,000, comprising a repeating unit represented by the following formula (4-1) or (4-2).
<Formula 4-1>

<Formula 4-2>

In the formula,
R is a hydrogen atom or a straight, branched or cyclic alkyl group having 1 to 6 carbon atoms,
W represents — (CH ₂ ) _m — in which a single bond or one hydrogen atom may be substituted with a hydroxy group or an acetoxy group,
k is 0 or 1,
m is an integer from 1 to 8,
n is 2 or 3.
[5" claim-type="Currently amended] The polymer compound according to claim 4, further comprising a repeating unit represented by the following Chemical Formula 5-1 in addition to the repeating unit represented by the Chemical Formula 4-1.
<Formula 5-1>

In the formula,
k is the same as above,
R ¹ represents a hydrogen atom, a methyl group or CH ₂ CO ₂ R ³ ,
R ² represents a hydrogen atom, a methyl group or CO ₂ R ³ ,
R ³ represents a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms,
R ⁴ represents an acid labile group,
R ⁵ is a halogen atom, a hydroxy group, a straight, branched or cyclic alkoxy group having 1 to 15 carbon atoms, an acyloxy group, an alkoxycarbonyloxy group or an alkylsulfonyloxy group, or a straight, branched or cyclic alkoxy group having 2 to 15 carbon atoms An alkoxy group, some or all of the hydrogen atoms on the constituent carbon atoms may be substituted with halogen atoms,
Z represents a single bond or a linear, branched, or cyclic (h + 2) carbon group having 1 to 5 carbon atoms, and in the case of a hydrocarbon group, at least one methylene is substituted with oxygen to form a chain or cyclic ether, or Two hydrogens on carbon may be substituted with oxygen to form a ketone,
h is 0, 1 or 2.
[6" claim-type="Currently amended] The polymer compound according to claim 4, further comprising a repeating unit represented by the following formulas 5-1 and 6 in addition to the repeating unit represented by the formula 4-1.
<Formula 5-1>

<Formula 6>

In the formula, k, h and R ¹ to R ⁵ are the same as above.
[7" claim-type="Currently amended] According to claim 4, In addition to the repeating unit represented by the formula 4-1, the repeating unit represented by the following formula (5-1) and / or the repeating unit represented by the formula (7) and the repeat represented by the following formula (6) A high molecular compound comprising a unit.
<Formula 5-1>

<Formula 6>

<Formula 7>

In the formula, k, h and R ¹ to R ⁵ are the same as above.
[8" claim-type="Currently amended] The polymer compound according to claim 4, further comprising a repeating unit represented by the following Chemical Formula 5-2 in addition to the repeating unit represented by the Chemical Formula 4-2.
<Formula 5-2>

In the formula, k, h and R ¹ to R ⁵ are the same as above.
[9" claim-type="Currently amended] The resist material containing the high molecular compound in any one of Claims 4-8.
[10" claim-type="Currently amended] The process of apply | coating the resist material of Claim 9 on a board | substrate,
Exposing to high energy or electron beams through a photomask after heat treatment, and
Process of developing using a developer after heat treatment if necessary
Pattern forming method comprising a.

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JP2002206009A|2002-07-26|

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KR100504646B1|2005-07-29|

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TWI228131B|2005-02-21|

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JP3956089B2|2007-08-08|

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引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
2000-08-08|Priority to JPJP-P-2000-00239365

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2000-08-08|Priority to JP2000239365

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2000-11-10|Priority to JP2000343715

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2000-11-10|Priority to JPJP-P-2000-00343715

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2001-08-07|Application filed by 카나가와 치히로, 신에쓰 가가꾸 고교 가부시끼가이샤

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2002-02-20|Publication of KR20020013413A

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2005-07-29|Application granted

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2005-07-29|Publication of KR100504646B1

优先权:

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申请号 | 申请日 | 专利标题

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JPJP-P-2000-00239365|2000-08-08|

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JP2000239365|2000-08-08|

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JP2000343715|2000-11-10|

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JPJP-P-2000-00343715|2000-11-10|