• 专利附录
  • 专利说明
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    • 专利摘要:
    Polishing apparatus that enables high efficiency and high-precision mirror processing of workpieces (wafers), polishing method, new work holding member for efficiently holding the work, and work bonding for attaching the work to the work holding member with high precision Provide a method. A polishing device having a polishing table 29 and a work holding member 38 and polishing a workpiece held on the work holding member 38 with the polishing solution 41 flowing therein, the surface of the polishing table 29 during the polishing operation. The amount of deformation in the normal direction of the surface and / or the amount of deformation in the normal direction of the work holding surface of the work holding member 38 is suppressed to 100 μm or less by integrating the polishing plate 29, creating a cooling water flow path, and the like. .
    公开号:KR20010108076A
    申请号:KR1020017008650
    申请日:2001-01-29
    公开日:2001-12-07
    发明作者:기우치에쓰오；하야시도시유키
    申请人:와다 다다시；신에쯔 한도타이 가부시키가이샤；
    IPC主号:
    专利说明:

    Polishing apparatus and method {APPARATUS AND METHOD FOR POLISHIING}
    [2] Reflecting the large diameter of silicon wafers and the high precision of devices fabricated using them, the demand for the finishing precision (thickness uniformity, flatness, smoothness) of the polished silicon wafer (abrasive wafer) is becoming more and more advanced. .
    [3] In order to satisfy these demands, the improvement of the polishing processing technology of the wafer is aimed at, and the development and improvement of the polishing processing apparatus has been made.
    [4] As one of them, a so-called sheet type polishing apparatus has been newly developed, in particular for the purpose of polishing a large diameter wafer having a diameter of 300 mm or more, and some of them have been provided for practical use.
    [5] However, the single wafer polishing method is difficult to cope with the demand for lowering the wafer price in terms of productivity, and cannot sufficiently meet the demand for flatness up to the edge of the recent wafer circumference (within 2 mm or less). Is occurring.
    [6] On the other hand, in the batch type polishing apparatus which simultaneously polishes a plurality of wafers widely used in the related art, as shown in FIG. 19, the outline of the configuration of the part directly involved in the polishing operation, the predetermined rotation is performed by the rotation shaft 17. Work holding for rotating one or more wafers W on the surface of the polishing cloth 16 attached to the upper surface of the polishing plate 10 rotated by the rotation shaft 18 by means of bonding or the like. Holding the lower surface of the member 13, for example, by using the upper load 15 to press the polishing surface of the wafer to a predetermined load, and at the same time the abrasive supply pipe 14 by an abrasive supply device (not shown) The polishing solution 19 (hereinafter sometimes referred to as slurry) 19 is supplied onto the polishing cloth 16 at a predetermined flow rate, and the to-be-polished surface of the wafer W is interposed therebetween. Abrasive cloth (16) surface and sliding It is conducted the polishing of the wafer (W).
    [7] This batch type polishing apparatus has a large diameter with a large diameter of the wafer, and in addition to the thermal deformation caused by the self-weight of the polishing plate or the work holding member, the movement by the polishing pressure, and the heat generation due to polishing, Since the finishing accuracy of the wafer is affected by the deformation and variation of the polishing base and the work holding member caused by various mechanical defects, it is difficult to satisfy the requirement for the accuracy of the finishing surface of the wafer.
    [8] In order to cope with such a problem, various creations have been made regarding the structure and material of the polishing apparatus, and the operating conditions and polishing conditions of the polishing apparatus. For example, in order to prevent thermal deformation of the structure of the apparatus, in particular (a) the polishing surface, as shown in FIG. 20, the back surface of the upper surface 12 having the polishing cloth 16 attached to the surface thereof. In addition, the lower surface plate 23 having a plurality of recesses 21 for circulating the cooling water H is separately provided, and ribs are formed on the rear surface of the surface plate to prevent deformation due to the polishing pressure. In order to effectively suppress thermal deformation, for example, as shown in Japanese Patent Application Laid-Open No. 7-52034 or 10-296619, the structure of the polishing plate and the cooling water flow path Creation has been done in the arrangement of the.
    [9] However, in the conventional polishing table 10 shown in FIG. 20, for example, SUS410 is used as the upper plate 12, and the lower plate 23 of the cast steel, such as FC-30, in which the cooling water flow path is formed, is placed up and down. In the conventional polishing method, the temperature difference between the upper and lower surfaces of the upper surface plate is 3 ° C. or higher and more than 5 ° C. in the conventional polishing method. The upper surface of the surface plate had a problem that high and low difference (deformation) in the vertical direction of 100 µm or more occurred depending on the place where the upper surface when there was no temperature difference between the upper and lower surfaces was used as a reference surface.
    [10] In addition, (b) using a material having a low coefficient of thermal expansion (8 × 10 −6 / ° C.) as the polishing plate material (WO 94/13847), using ceramics to provide a circulating flow path of the cooling water to almost the entire area. In addition to the integrated polishing plate (Japanese Laid-Open Patent Publication No. 59-151655) and the like, which are formed over the surface, the (c) work holding member is similarly held for the temperature control fluid for the purpose of improving the temperature uniformity of the wafer holding surface. Circulating inside the member (Japanese Patent Laid-Open No. 9-29591) has been proposed.
    [11] In order to suppress the temperature rise of the wafer or the polishing cloth due to the heat generated by the polishing action, in addition to the cooling of the work holding member and the polishing table described above, an abrasive solution directly supplied to the polishing operation surface (usually about Alkaline aqueous solution is used), and also has a cooling function, purely supplying more than the feed amount necessary for the polishing operation, and the abrasive solution discharged from the polishing site has been circulated to reduce the cost.
    [12] However, in the structure of the conventional polishing apparatus and the cooling method as described above, the temperature of the surface of the polishing cloth during polishing gradually rises from the start of polishing, especially in a part that is in sliding friction with the to-be-polished surface of the wafer. As mentioned above, the temperature of the upper surface part of the grinding | polishing surface plate just under that part also rises more than 3 degreeC.
    [13] On the other hand, the temperature of the lower surface part of the surface plate also has the effect of suppressing the temperature rise by the cooling water, and the temperature change is suppressed within 1 ° C. Therefore, a temperature difference of at least 3 ° C or more occurs not only between the upper and lower surfaces of the polishing table but also between the hot and cold portions of the upper surface of the polishing table. Therefore, the surface surface shape does not have a temperature difference due to thermal deformation. If not, a part where strain deformation occurs at least 100 μm in the normal direction of the surface occurs.
    [14] In addition, the workpiece holding member is also enlarged in response to the large diameter of the silicon wafer. For example, in a polishing workpiece holding member having an 8-inch diameter, the diameter is about 600 mm, and the weight of the workpiece holding member is also increased. It has increased.
    [15] Therefore, not only thermal deformation of the work holding member due to heat generation at the polishing processing surface, but also deformation at the time of polishing due to its own weight becomes a problem. In order to suppress this, the thickness of the work holding member is increased or ceramics (silicon carbide It has been attempted to reduce the amount of deformation by using a material having a large Young's modulus such as alumina.
    [16] In the conventional batch polishing, for example, as illustrated in FIG. 21, the wafer W to be polished is adhered to the work bonding surface 20a of the work holding member 20 through the adhesive 22. Has been used.
    [17] At that time, it is important to prevent air from remaining in the adhesive 22 layer or at the interface between the wafer or work holding member 20 and the adhesive 22. Therefore, as shown in FIG. 21, the airbag 27 installed so as to bend downward on the lower surface of the pressure head 25 by the pressure cylinder 26 is the upper surface of the wafer W (the surface opposite to the surface to be bonded). Press to contact with each other, and by being pushed by the work holding member from the center of the wafer adhered surface to the circumferential edge in order, the air at the bonding portion is pushed toward the outer edge of the wafer and bonded. However, by the push-pushing method by the wafer pressing member 24, air in the boundary layer between the wafer W and the work holding member is pushed out, but the thickness of the other adhesive layer 22 becomes thinner at the center of the wafer. There was a problem in that the wafer W was adhered in a moved state.
    [18] Conventionally, as an adhesive used for bonding a wafer, factors such as resistance to an abrasive solution at the time of polishing, non-lubrication activity, and characteristic changes due to an increase in the adhesive temperature through an increase in the wafer temperature due to polishing heat are considered. Synthetic rosin esters, beeswax, phenol resins and the like have been used, but the adhesion action by this kind of adhesive mainly depends on the physical adhesion mechanism, and the adhesion is performed as follows. That is, after dissolving the adhesive in a solvent and applying it to the adhesive surface, the solvent is evaporated and removed and the wafer is pressed to the work holding member at a predetermined pressure while maintaining the adhesive in a soft melt state by heating, and then the adhesive is cooled to room temperature. Is solidified and adhesion is performed.
    [19] In this bonding step, it is necessary to heat the wafer and the work holding member to, for example, 50 to 100 ° C., and the improvement of the processing accuracy due to the deformation of the wafer and the work holding member due to the thermal history at this time is hindered. This also caused problems in terms of cost, such as requiring special equipment and energy.
    [20] On the other hand, the existing so-called room temperature adhesives that can realize the adhesive action at room temperature are not practically used because they are difficult to withstand the abrasive solution, the peeling of the wafer from the work holding member and the removal of the adhesive from the wafer or the work holding member. It was impossible.
    [21] In addition, in order to prevent bubbles from remaining in the adhesive layer on the adhesive portion, the wafer is pushed to the work holding member through the adhesive in turn from one end thereof in a state where the surface to be bonded is inclined with respect to the work holding surface. Air interposed between the adhesive surface and the workpiece holding surface to be adhered so as to exclude from one end to the other end of the adhered surface of the wafer, or arranged on the workpiece holding member 20 as shown in FIG. A method of excluding air to the outside by allowing the convex-shaped elastic body (airbag) 27 to be pushed from the center of the wafer to the work holding member 20 one by one from the center of the wafer W, and also to the work holding member 20. ), Or each wafer W, is enclosed to maintain airtightness on the holding surface of the work holding member 20, as shown in FIG. It has the means or the like is performed not to the residual air by.
    [22] In Fig. 22, reference numeral 1 denotes a vacuum vessel, 2 denotes a bellows, 3 denotes a bellows elevating cylinder, 4 denotes a bellows pressure adjusting pipe, and 5 denotes a vacuum vessel internal pressure adjusting pipe. The vacuum suction pipe 20 is a work holding member and W is a wafer.
    [23] In the method of sequentially pushing a part of the surface to be bonded of the wafer shown in FIG. 21 to the work holding member, a drawback is that the thickness of the adhesive layer becomes uneven (0.5 µm or more), and the entire wafer or the work holding member shown in FIG. 22 is decompressed. The method of bonding in a state requires a special device and a jig, which makes the process complicated, and also causes dust from the device and the jig.
    [24] [Initiation of invention]
    [25] As described above, in the polishing finishing of the wafer, deformation and device operation due to various causes, such as a polishing apparatus, a work holding member holding a wafer, which is a workpiece, and a polishing plate which is in contact with the wafer. In addition to fluctuations in time, not only the wafer bonding method to the work holding member but also various obstacles exist to achieve a high-precision finishing corresponding to the advancement of the device manufacturing technology in the present and future.
    [26] In order to stably and efficiently produce a high-precision polishing finish wafer, particularly a high-precision wafer having a diameter of 300 mm or more, the inventors of the present invention not only have a structure, a configuration, and a material of a polishing apparatus, but also a wafer bonding apparatus and a method of bonding. As a result of fundamentally examining the factors that impede the high-precision processing for the entire wafer polishing process including wafer polishing, and conducting an experimental study on the start of the device, the configuration of the system and the operating conditions, the wafer bonding method was found. In addition, by successfully improving the function and performance of the polishing apparatus, and fundamentally improving the operation method, the inventors succeeded in stably manufacturing a high-precision polishing wafer.
    [27] Among them, in order to polish wafers with high precision (high flatness), a polishing cloth is attached and a work surface holding member, which is a base plate for holding a wafer or a base plate for holding a shape of the polishing cloth, is used during the polishing operation. Deformation is found to be a major obstacle, and the amount of deformation in the normal direction of those surfaces is 100 µm, preferably 30 µm, with respect to the upper surface of the polishing surface and the workpiece holding surface of the work holding member, respectively. Hereinafter, it was found out that it is effective to grind such that it is more preferably maintained at 10 µm or less.
    [28] According to the present invention, a polishing apparatus, a polishing method, a novel work holding member for efficiently holding a work, and a work can be bonded to the work holding member with high precision, which enables high efficiency and high precision mirror surface processing of a work (wafer, etc.). It is an object of the present invention to provide a method for bonding a workpiece.
    [29] MEANS TO SOLVE THE PROBLEM In order to solve the said subject, the 1st aspect of the grinding | polishing apparatus of this invention is a grinding | polishing apparatus which has a grinding | polishing surface and a workpiece holding member, and grind | polishes the workpiece | work held by the workpiece holding member with the abrasive solution flowing, and polishing at the time of a grinding | polishing operation | movement The amount of deformation in the normal direction of the surface of the surface plate and / or the amount of deformation in the normal direction of the work holding surface of the work holding member is suppressed to 100 µm or less. It is more preferable to suppress these deformation amounts to 30 micrometers or less.
    [30] A second aspect of the polishing apparatus of the present invention is a polishing apparatus having a polishing table and a work holding member and polishing a workpiece held on the work holding member while flowing an abrasive solution, wherein the polishing table is integrally formed by casting. The structure of the polishing table has a plurality of recesses and / or ribs on the rear surface, and the flow path for the temperature adjusting fluid is formed inside the table, and the portion not forming the flow path functions as an internal rib structure. .
    [31] That is, in a structure in which one of the major features of the polishing apparatus of the present invention has a concave portion and / or ribs in the flow path and the back surface of the temperature adjusting fluid and also has an internal rib structure in the inside of the surface plate,
    [32] (1) A structure in which the upper surface plate 12 and the lower surface plate 13 illustrated in Figs. 16 and 17, which have been conventionally used, are fastened by the fastening member 11, or in Japanese Patent Application Laid-Open No. 10-296619. Compared with the surface plate of the layer structure, the strength is high and the deformation due to the thermal deformation and the cooling water pressure can be suppressed low.
    [33] (2) Therefore, the thickness of the entire surface plate can be reduced by that much.
    [34] (3) There is no change over time such as loosening of fastening members.
    [35] (4) Since the fastening part is unnecessary, the flow path of the cooling (temperature adjustment) fluid can be widely arranged, and the heat transfer area can be largely reduced, and the pressure loss due to the flow path can be reduced, so that a large amount of fluid flow is possible. The effect is greatly improved.
    [36] (5) Since the surface of the surface can be thinned, it is possible to shorten the distance from the surface of the surface to the cooling water flow path, thereby further increasing the cooling effect.
    [37] There are advantages such as the above, and the displacement of the surface of the surface plate with respect to the reference plane can also be suppressed to 30 µm or less at any point, and to 30 µm or less in an ideal state by adopting various configurations of the present invention described below. .
    [38] It is preferable that the value of the coefficient of thermal expansion of the material of the said polishing surface is 5x10 <-6> / degrees C or less, and its corrosion resistance is substantially equivalent to stainless steel.
    [39] As the material of the polishing plate, invariant steel, i.e., stainless steel invariant such as cast steel, such as SLE-20A (manufactured by Shinkokuku Steel Co., Ltd.), has a coefficient of thermal expansion (α = 2.5 × 10 −6 / ° C., α is a linear expansion coefficient). ) Is about 1/4 compared to SUS 410 ( = 1.03 × 10 −5 / ° C.), so that a deformation amount of 30 μm or less is realized. In this way, by injecting the cast steel to produce a polished plate, an integral structure is possible, and subsequent precision machining of the platen becomes easy.
    [40] A third aspect of the polishing apparatus of the present invention is a polishing apparatus having a polishing table and a workpiece holding member for polishing a workpiece held on the workpiece holding member, wherein the polishing operation is controlled by controlling the flow rate and / or temperature of the temperature adjusting fluid. The temperature change of the polishing surface and / or the temperature change of the work holding member in the control is characterized in that it is controlled within a predetermined range.
    [41] The temperature fluctuation at any position of the polishing base and / or the work holding member during the above polishing operation is preferably within 3 ° C, more preferably within 2 ° C. In order to achieve this object, an integrated polishing table having a temperature adjusting fluid passage therein is very effective as much as possible to increase the contact area between the temperature adjusting fluid and the table as described above.
    [42] Further, when polishing, the temperature and / or flow rate of the polishing solution is controlled to change the temperature variation at any position of the polishing surface of the polishing cloth during polishing operation to 10 ° C or less, preferably 5 ° C or less. It is desirable to control.
    [43] That is, under conventional conditions for achieving a predetermined polishing rate (0.5 to L0 mu m / min) by a conventional polishing apparatus, the temperature of the surface of the polishing cloth is increased by heat generation due to the polishing action, and in particular, In the part of sliding friction, the value of the temperature change exceeds 10 ° C, and the temperature change (change) of the polishing base, the work holding member, or both during the polishing operation, which is the basic idea of the present invention, is kept within 3 ° C. The amount of deformation in the normal direction of the upper surface of the polishing surface or the holding surface of the work holding member is 100 µm or less, preferably 30 µm, more preferably 10 µm or less. It is important to change the temperature of the abrasion surface and the wafer to 10 ° C or less, preferably 5 ° C or less.
    [44] In actual polishing, as described above, the polishing cloth that is most suitable for the purpose and condition of polishing is selected and adhered to the upper surface of the polishing plate, and the abrasive solution is supplied between the polishing cloth and the wafer to-be-polished surface. Although sliding friction is caused by relative movement while pressing with a predetermined force, in general, the thermal conductivity of the polishing cloth is 1 to 3 digits lower than that of silicon, the polishing plate, or the material of the workpiece holding member. Usually, the thickness of the polishing cloth is 1 to 2 mm, which is compared with the distance between the upper surface of the polishing plate and the fluid flow path for temperature adjustment (10 to 50 mm) or the heat transfer distance between the work holding surface of the work holding member and the fluid flow path for temperature adjustment (10 to 30 mm). Since the thermal resistance from the surface of the polishing cloth through the polishing cloth to the upper surface of the polishing plate is maximized, the temperature change during the polishing operation of the surface of the polishing cloth is suppressed to the lowest possible value of 10 ° C., preferably 5 ° C. or less. The temperature change during the polishing operation of the polishing surface upper surface or the work holding surface of the work holding member can be suppressed to 3 ° C, preferably 2 ° C or less.
    [45] At this time, it is important to efficiently cool by the polishing medium or the temperature adjusting fluid of the work holding member, and it is also necessary to actively utilize the cooling effect of the abrasive solution.
    [46] In the above-described polishing apparatus and its operation (polishing), important requirements for realizing the basic idea of the present invention have been described with respect to the polishing base, the work holding member, and the abrasive solution, which are members directly involved in the polishing operation, but these are effectively suspended. In order to realize this, factors related to the mechanism and control of the polishing apparatus are also very important. In other words, it is necessary to maintain a constant level of the mechanical fluctuations and the temperature control due to the driving (rotation) of the polishing table, and specific configurations thereof will be described below.
    [47] It is preferable to suppress the rotational error of the polishing table to 1% or less. The rotational error of the polishing table means the ratio with respect to the set value of the rotational speed variation of the polishing table during polishing operation.
    [48] It is preferable to suppress the surface deviation at the time of rotation of the grinding | polishing surface of the said polishing plate to 15 micrometers or less. The surface deviation at the time of rotation of the polishing surface of the polishing plate means the variation in the substantially vertical direction at any position on the polishing surface of the polishing plate during the polishing operation.
    [49] It is preferable to suppress the rotational deviation of the rotating shaft of the said polishing plate to 30 micrometers or less. The rotational deviation of the rotating shaft of the polishing table means the variation in the substantially horizontal direction at any position of the rotation axis of the polishing table during the polishing operation. The above-described rotational error of the polishing table, the surface deviation at the time of rotation of the polishing surface of the polishing table, and the rotational deviation of the rotation axis of the polishing table can be achieved by improving the accuracy of the rotation system of the polishing table.
    [50] In addition, it is preferable that the work holding member has a concave portion formed on the rear surface or has a rib structure. In this manner, the work holding member can be reduced in weight by maintaining the strength by forming a recess or a rib structure on the rear surface of the workpiece holding member, as in the polishing table, and can also use the recess as a flow path for the temperature adjustment fluid.
    [51] As described above, in the polishing apparatus, the workpiece holding member not only physically holds the workpiece but also forms an important factor for achieving the object of the present invention, and it is particularly important to suppress deformation during polishing. . For this reason, it is preferable to use a ceramic material, especially alumina or silicon carbide (abbreviated as SiC) in consideration of the values of mechanical strength and thermal conductivity, workability, wafer adhesion, and even economic efficiency.
    [52] As the holding method of the wafer to the work holding member, a method of sucking and holding the wafer on the work holding surface of the work holding member, in addition to using an adhesive, is used to attract the work into the contact area between the wafer and the work holding member. It is useful to have a structure in which a plurality of micropores are held for holding.
    [53] A first aspect of the polishing method of the present invention is a polishing method for polishing a workpiece held by a work holding member having a polishing table and a work holding member, the deformation amount in the normal direction of the surface surface of the polishing table during the polishing operation. And / or the amount of deformation in the normal direction of the workpiece holding surface of the workpiece holding member is suppressed to 100 µm or less. It is more preferable to suppress these deformation amounts to 30 micrometers or less.
    [54] A second aspect of the polishing method of the present invention is a polishing method having a polishing table and a work holding member and polishing a workpiece held on the work holding member while flowing an abrasive solution, by the polishing cloth attached on the polishing table. When polishing the to-be-polished surface of a workpiece | work, the fluctuation | variation of the temperature in arbitrary positions of the polishing surface of the said polishing cloth at the time of a grinding | polishing operation is made into 10 degrees C or less, It is characterized by the above-mentioned. Preferably, the fluctuation is preferably 5 ° C or lower.
    [55] A third aspect of the polishing method of the present invention is a polishing method having a polishing plate and a work holding member and polishing a workpiece held on the work holding member while flowing an abrasive solution, wherein the temperature variation of the work during polishing is 10 ° C. or less. It is characterized by suppressing. Preferably, the fluctuation is preferably suppressed to 5 ° C or lower.
    [56] The fluctuation of the temperature and / or the temperature of the wafer at any position of the polishing surface of the polishing cloth during the polishing operation is controlled to control the temperature and / or flow rate of the polishing solution to 10 ° C. or less, preferably 5 ° C. or less. This is an important embodiment of the present invention.
    [57] A fourth aspect of the polishing method of the present invention is a polishing method using a polishing apparatus having a polishing table and a work holding member for polishing a work held on a work holding member, wherein a plurality of wafers are attached to the work holding member by the following formula (1): It is characterized by arranging and maintaining the relationship to satisfy as an error within 2mm.
    [58] R = {(r + x) + sin (π / N) (r + 2y)} / sin (π / N)
    [59] (In formula (1), R: workpiece holding member diameter (mm), r: wafer diameter (mm), x: distance between wafers (mm), y: end circumferential distance of the wafer and work holding member (mm)) , N: number of wafers / work holding member, π: circumferentiality, where the distance x between wafers is the closest distance between adjacent wafer outer portions.)
    [60] In the case of holding a plurality of wafers in one work holding member, finishing of their arrangement on the holding surface is very important. That is, it is important that the retained wafer is polished under the same conditions as possible even if viewed microscopically, that is, between the wafers and within the to-be-polished surface of one wafer, to achieve the same polishing conditions and polishing speeds as much as possible. For this purpose, the temperature of the surface to be polished, the pressing force to the polishing cloth, the method of supplying the abrasive solution, the relative movement distance between the polishing cloths, and the like are important factors, and these are comprehensively and experimentally examined to examine the relationship of the above formulas. Will be obtained.
    [61] When the above formula (1) is applied to a wafer of 200 mm or more, that is, when r is 200 mm or more, it is necessary to set 5N ≦ 7, 5x ≦ 20, and 7 ≦ y ≦ 22.
    [62] The diameter r of the wafer increases, and the diameter R of the workpiece holding member naturally increases for the wafer of 300 mm or more. Accordingly, in order to suppress mechanical deformation, thermal deformation due to temperature change or the like below a predetermined value, it is necessary to increase the thickness d of the work holding member corresponding to the diameter R, and as a result of various studies, In order to make the deformation amount in the normal direction of the holding surface of the work holding member during polishing operation which is the basic principle of 100 μm or less, preferably 30 μm or less, the thickness d of the work holding member is aR <d <bR (a = 0.04 It is preferable to set it as -0.08, b = 0.10-0.12).
    [63] A fifth aspect of the polishing method of the present invention is characterized by polishing a silicon wafer using the polishing apparatus of the present invention described above.
    [64] In the grinding | polishing method of the said 3rd aspect, it is preferable to carry out in the environment of temperature change within +/- 2 degreeC. That is, in the realization of such high precision polishing, it is preferable that the variation of the environmental temperature at which the polishing apparatus is operated is within a predetermined temperature of ± 2 ° C.
    [65] The method of holding the workpiece (wafer) on the workpiece holding member and the accuracy of the holding state, that is, the flatness of the workpiece holding surface, together with the consistency between the holding surface and the surface to be bonded between the wafers are important. In particular, in the case where the wafer is adhered to the work holding member using an adhesive, residual bubbles in the adhesive layer between the wafer and the work holding member, the shaking of the wafer at the time of bonding, the thickness and the uniformity of the adhesive layer are problems.
    [66] Thus, the work bonding method of the present invention uses a work holding member having a plurality of micro holes for sucking and holding the work in the bonding area, while exhausting air through the micro holes at the back side of the work holding member. It characterized in that the adhesive to the workpiece holding member with an adhesive. Such a structure makes it possible to eliminate the drawbacks of the conventional method described above, and to make the thickness of the adhesive layer between the wafer and the work holding member thin and to increase the uniformity of the thickness.
    [67] At this time, in order to easily perform the adhesion, it is preferable to perform the adhesion temperature at room temperature (20 ° C to 30 ° C), and to perform the adhesion efficiently and to uniform the thickness of the adhesive layer after adhesion (high precision) In order to increase the variation of the thickness within the wafer processing, the thickness of the adhesive is preferably within 0.015 µm) and the viscosity of the adhesive is adjusted between 1 mPa · s and 10 mPa · s at the stage of coating before application to minimize the residual air in the adhesive layer. It is desirable to.
    [68] In order to efficiently remove the polishing heat by the temperature adjusting fluid of the work holding member through the wafer, it is necessary to make the heat resistance by the adhesive layer interposed between the wafer and the work holding member very low, and again the elastic deformation of the adhesive. In order to suppress the variation in the thickness of the adhesive layer caused by the adhesive, the average thickness of the adhesive layer is preferably 0.5 µm or less, preferably 0.3 µm or less, and the variation in the thickness is preferably 0.015 µm or less.
    [69] The workpiece holding member of the present invention is characterized in that a plurality of suction holes for vacuum sucking the workpiece in the bonding region of the workpiece bonding surface of the workpiece holding member penetrates from the workpiece bonding surface to the back surface of the workpiece holding member.
    [70] By using the above-described work holding member of the present invention, it becomes possible to effectively carry out the above-mentioned work bonding method of the present invention.
    [71] It is preferable to provide a recess and a rib structure on the back surface of the work holding member.
    [72] In the above-described work bonding method of the work of the present invention, the silicon wafer is adhered to the work holding member and polished to enable high precision wafer polishing finishing. At this time, if the above-described polishing apparatus of the present invention is used, the amount of deformation in the normal direction of the surface of the surface of the polishing surface during the polishing operation and / or the amount of deformation in the normal direction of the work holding surface of the work holding member is 100. It is very effective in achieving high-precision polishing by suppressing the micrometer or less, preferably 30 micrometers or less.
    [1] The present invention provides a polishing apparatus, a polishing method, and a workpiece (eg, a wafer, etc.) that enable high efficiency and high precision mirror surface processing of a work such as a silicon wafer (sometimes referred to simply as a wafer). ) And a method for adhering the workpiece to the workpiece holding member.
    [73] 1 is a partially omitted cross-sectional explanatory view showing an example of the polishing apparatus of the present invention.
    [74] 2 is an explanatory cross-sectional view showing one example of a polishing table used in the polishing apparatus of the present invention.
    [75] 3 is an explanatory cross-sectional view showing one example of a workpiece holding member used in the polishing apparatus of the present invention.
    [76] 4 is an explanatory diagram showing an example of a bonding method of the workpiece of the present invention.
    [77] Fig. 5 is a partially cutaway plan view showing a planar shape of a temperature adjusting fluid flow passage as another example of the polishing table of the present invention.
    [78] FIG. 6 is a longitudinal cross-sectional view of the upper channel portion and the lower channel portion of the polishing table of FIG.
    [79] FIG. 7 is a rear view of the polishing table of FIG. 5.
    [80] Fig. 8 is a block diagram showing the arrangement of the devices in the total heat quantity control system according to the present invention.
    [81] 9 is a flowchart showing the control operation of the total heat quantity control system according to the present invention.
    [82] FIG. 10 is a graph showing the relationship between polishing time, polishing cloth surface temperature, abrasive solution supply temperature, and abrasive solution return temperature in Example 1. FIG.
    [83] FIG. 11 is an analysis diagram of a temperature distribution from the back surface of the work holding member in Example 1 to the bottom surface of the polishing table. FIG.
    [84] 12 is a graph showing the relationship between the polishing time, the polishing cloth surface temperature, the polishing solution supply temperature, the polishing solution return temperature, the polishing plate cooling water supply temperature, and the polishing plate cooling water return temperature in Comparative Example 1. FIG.
    [85] FIG. 13 is an analysis diagram of the temperature distribution across the lower surface of the polishing surface on the back surface of the workpiece holding member in Comparative Example 1. FIG.
    [86] 14 is a block diagram showing the arrangement of the devices in the total heat quantity control system used in Comparative Example 1. FIG.
    [87] FIG. 15 is a flowchart showing a control operation of the total heat quantity control system used in Comparative Example 1. FIG.
    [88] 16 is a plan view of the polishing table used in Comparative Example 1. FIG.
    [89] 17 is a longitudinal cross-sectional view of FIG. 16.
    [90] 18 is a longitudinal sectional view of the work holding member used in Comparative Example 1. FIG.
    [91] 19 is a side explanatory diagram showing an example of a conventional wafer polishing apparatus.
    [92] 20 is a cross-sectional explanatory view showing an example of a conventional polishing table.
    [93] Fig. 21 is a schematic explanatory view showing a conventional example of a method for bonding a wafer to a work holding member, where (a) shows before pressing and (b) shows pressing bonding.
    [94] Fig. 22 is a schematic explanatory diagram showing another conventional example of the wafer bonding method to the workpiece holding member.
    [95] Fig. 23 is a graph showing the displacement amounts in the normal direction during polishing and polishing of the polishing plates in Example 1 and Comparative Example 1, (a) showing measurement positions, and (b) in Example 1 The displacement amount and (c) represent the displacement amounts in Comparative Example 1, respectively.
    [96] Best Mode for Carrying Out the Invention
    [97] EMBODIMENT OF THE INVENTION Although embodiment of this invention is described below based on FIGS. 1-9 in an accompanying drawing, it is a matter of course that various deformation | transformation is possible besides the example of illustration, unless it deviates from the technical thought of this invention.
    [98] Brief Description of Drawings [Fig. 1] Fig. 1 is an explanatory view of a partially omitted cross-sectional view showing an example of the polishing apparatus of the present invention. 2 is an explanatory cross-sectional view of one example of the polishing table used in the polishing apparatus of the present invention. 3 is an explanatory cross-sectional view of one example of a workpiece holding member used in the polishing apparatus of the present invention. 4 is an explanatory view showing an example of a method of bonding the workpiece of the present invention.
    [99] In Fig. 1, reference numeral 28 denotes a polishing apparatus according to the present invention and has a polishing plate 29. As shown in Fig. 2, the polishing table 29 is integrally produced by casting, and a plurality of recesses 34 are formed on the back surface of the polishing table 29. The concave portion 34 is to seal the back face side by the sealing member 30 constitutes a flow path for a temperature adjusting fluid, such as water (H 1). The flow path of the cooling water H 1 is connected to a surface plate cooling water heat exchanger K 2 , which will be described later, and the cooling water H 1 is configured to allow heat exchange in the heat exchanger K 2 . Endotherm of heat generated in (29) is performed. An abrasive cloth 31 is attached to the polishing surface of the polishing plate 29.
    [100] Denoted at 32 is a rotating shaft provided at the rear center portion of the polishing plate 29, and 35 is a center roller provided at the surface center portion of the polishing plate 29. As shown in FIG. An elongated hole 33 is drilled in the longitudinal direction of the central portion of the rotary shaft 32, and the elongated hole 33 constitutes a part of a flow path of a temperature adjusting fluid, for example, cooling water H 2 , and this cooling water H 2 . The flow path is connected to the platen rotating shaft cooling water heat exchanger K 4 , which will be described later, and absorbs heat generated by mechanical friction caused by the rotation of the platen rotating shaft 32 at the time of polishing machine operation. Reference numeral 7 denotes a frame that supports the rear surface of the polishing plate 29 through the support plate 43 and the bearing member 44.
    [101] Reference numeral 14 denotes an abrasive supply pipe, in which an abrasive 41 which is adjusted to a predetermined flow rate and temperature by an abrasive supply device (not shown) is opened to the center roller 35 (guide roller is not shown). The inlet hole 42 is supplied, and the abrasive 41 is supplied onto the polishing cloth 31 through this.
    [102] Reference numeral 36 denotes an upper block, on which a work holding member 38 is mounted via an elastic body 37 such as rubber. The workpiece | work, for example, the wafer W, is adhere | attached on the adhesive surface of this workpiece | work holding member 38 with the adhesive agent 39. 40 is a rotating shaft installed on the upper block 36.
    [103] Reference numeral 47 is a long hole formed in the center of the rotary shaft 40, the long hole 47 constitutes a part of the flow path for adjusting the temperature, for example, the cooling water (H 4 ), and occurs in the rotary shaft 40 It is provided for each work holding member by absorbing heat. The flow path of the cooling water H 4 is connected to the workpiece holding member rotary shaft cooling water heat exchanger K 5 , which will be described later, and absorbs heat generated in the rotary shaft 40 when the workpiece holding member is rotated.
    [104] As shown in FIG. 3, a plurality of recesses 50 are formed in the rear surface of the work holding member 38. 45 is a suction hole for vacuum suction and penetrates from the bottom of the recess 50 located in the wafer bonding region 46 to the back surface of the work holding member 38. As described later, the suction hole 45 is bonded by vacuum suction when the wafer W is attached to the wafer bonding region 46 of the work holding member 38 by the adhesive 39. In order to grind the wafer W, the recess 50 constitutes a part of a temperature adjusting fluid, for example, a cooling water H 3 flow path. The flow path of the cooling water H 3 is connected to the work holding member cooling water heat exchanger K 3 , which will be described later, and the cooling water H 3 is capable of heat exchange in the heat exchanger K 3 , and the work holding member 38 The heat dissipation of heat generated in the heat sink) is provided to each of the workpiece holding members.
    [105] Next, a method of adhering the wafer W to the work holding member 38 described above will be described with reference to FIG. 4. In FIG. 4, 48 is an adhesive base, and is used when adhering the wafer W to the wafer bonding region 46 of the work holding member 38 with the adhesive 39. In the portion corresponding to the wafer bonding region 46 on the upper surface of the adhesive base 48, a recess 51 having a flat bottom shape is formed. A through hole 49 is formed penetrating from the bottom of the recess 51 to the lower surface of the adhesive base 48.
    [106] The through hole 49 is connected to an exhaust system by a vacuum pump or the like to depress the through hole 49, the recess 51, the recess 50 of the work holding member 38, and the suction hole 45. As a result, the wafer W can be attracted to the wafer bonding region 46 of the work holding member 38. At this time, although the adhesive 39 is interposed between the wafer W and the wafer bonding region 46, the adhesive surface of the wafer W is vacuum sucked, so that the wafer W is uniformly at atmospheric pressure. Since it is pushed down, the uniformity of the film thickness of the adhesive agent 39 is very good, and since air is sucked downward, adhesion can be performed in the state in which little air remains in an adhesive bond layer.
    [107] As an adhesive agent used when adhering the workpiece | work W to the workpiece holding member 38, adhesiveness can be exhibited between 20 degreeC-30 degreeC, and the viscosity at the time of adhesion | attachment is 1 mPa * s-10 mPa * s Phosphorus adhesives are preferably used. Moreover, it is preferable to adhere | attach uniformly so that the average value of the adhesive thickness of a workpiece | work adhesive part may be 0.1 micrometer-0.5 micrometer, and the deviation of the thickness shall be within 0.015 micrometer. As a preferable adhesive agent, a polyol-type polyurethane adhesive is illustrated, It is preferable to melt | dissolve this adhesive agent in alcohol solvents, such as methanol and ethanol, or to make it an aqueous emulsion. Moreover, you may add an isocyanate compound as a hardening | curing agent.
    [108] In this manner, a uniformly bonded wafer W having almost no residual air in the adhesive layer and having a very high thickness is formed on the holding surface of the upper block 36 as shown in FIG. 1. The wafer W is polished by attaching it and pushing it to the polishing cloth 31 surface of the polishing plate 29.
    [109] In polishing, the heat generated by the polishing plate 29 is absorbed by the cooling water H 1 , the heat generated by the rotating shaft 32 is absorbed by the cooling water H 2 , and the heat generated by the work holding member 38 is reduced by the cooling water ( H 3 ) is endothermic, and the heat generated by the rotary shaft 40 is endothermic by the cooling water H 4 .
    [110] In this way the normal to the polishing platen 29 surface at the time it is configured to supply cooling water (1 H ~H 4) of each polishing element and rotation mechanism, the abrasive action constituting the polishing apparatus 28 of the present invention Direction deformation amount is 100 μm or less, preferably 30 μm or less, more preferably 10 μm or less, and the deformation amount in the normal direction of the work holding surface of the work holding member 38 is 100 μm or less, preferably 30 μm or less. More ideally, it becomes possible to suppress it to 10 micrometers or less, respectively.
    [111] In addition, it is preferable that the value of the thermal expansion coefficient of the material of a polishing plate be 5x10 <-6> / degreeC or less, and what is called a Fe-Co-Ni-Cr type | system | group so-called stainless steel invariant material is mentioned.
    [112] In the polishing apparatus 28 of the present invention, the temperature change of the polishing base 29 and / or the temperature change of the work holding member 38 during the polishing operation by controlling the flow rate and / or temperature of the temperature adjusting fluid. To be controlled within a predetermined range is one of the characteristic configurations. The characterizing feature is, it is possible to achieve by controlling the flow rate and temperature of the cooling water, each one (H 1 ~H 4). That is, by suppressing the flow rate and temperature of each of the cooling waters H 1 to H 4 described above, the temperature change of the polishing base 29 and / or the temperature change of the work holding surface of the work holding member 38 during the polishing operation can be controlled. It is possible to control within a predetermined range, for example, preferably within 3 ° C, more preferably within 2 ° C.
    [113] The polishing table 29 shown in Figs. 1 and 2 is schematically illustrated to explain the concept of the present invention, and a more specific structure of the polishing table 29 will be described with reference to Figs. Fig. 5 is a partially cutaway plan view for showing a planar structure of a flow path of a temperature adjusting fluid therein according to another example of the polishing table. FIG. 6 is a longitudinal cross-sectional view of an upper flow path portion and a lower flow path portion, that is, an O-A line and an O-B line, respectively, of the polishing plate of FIG. 5. 7 is a rear view of the polishing table of FIG. 5.
    [114] The surface 29a of the polishing surface 29 shown in Figs. 5 to 7 is flat, and in use, the polishing cloth 31 is attached as shown in Fig. 1. 6 and 7, a plurality of annular or radial ribs 8 are provided on the back surface 29b of the polishing plate 29. Thus, by forming the large number of ribs 8 on the back, the strength can be maintained and the weight can be reduced.
    [115] Inside the polishing plate 29, flow paths 9a and 9b such as a temperature adjusting fluid, for example, cooling water, are provided. Among them, the upper flow path 9a has a meandering structure, so that heat exchange can be efficiently performed. It is.
    [116] The upper passage 9a is connected to the lower passage 9b and the peripheral portion of the polishing plate. When the temperature adjusting fluid flows into the passage 9, the lower passage 9a passes through the peripheral portion at the center of the upper passage 9a. It is possible to flow from the periphery of the flow path 9b to the center and vice versa, from the periphery of the upper flow path 9a to the center via the periphery at the center of the lower flow path 9b.
    [117] Subsequently, an example of total calorific value control, which is one of the features of the polishing apparatus and polishing method of the present invention, will be described with reference to FIGS. 8 and 9. Fig. 8 is a block diagram showing the total sum calorie control system according to the present invention. Fig. 9 is a flowchart of the total sum calorie control in the present invention.
    [118] In Figures 8 and 9, (Q) is a total heat quantity control CPU, the slurry heat the upper portion of the control CPU (Q l), the base heat control CPU (Q 2), the workpiece holding member calorie control CPU (Q 3), the base And a transducer T 1 for converting temperature signals from the temperature sensors S 2 and S 3 embedded in the lower part into electrical signals, and temperature sensors S 4 and S 5 embedded in the upper and lower parts of the work holding member. converter to convert the temperature signal into an electric signal (T 2) and the polishing cloth surface and temperature is connected with the thermal imaging device (U) that displays, a variety of commands a slurry heat quantity in response to the signals from the respective device control CPU ( Q 1 ), the surface plate calorie control CPU Q 2 and the work holding member calorie control CPU Q 3 . In addition, the converters T 1 and T 2 have a function of converting signals related to temperature information such as current, infrared rays, ultrasonic waves, etc. from the temperature sensors S 2 , S 3 , S 4 , and S 5 into electrical signals. It is preferable to employ.
    [119] The slurry calorie control CPU (Q 1 ), a slurry flow rate sensor (I 1 ), slurry outlet temperature sensor (S 6 ), slurry inlet temperature sensor (S 1 ), slurry flow rate controller (V 1 ), and slurry heat exchanger ( K 1 ), slurry flow regulator (V 1 ) and slurry heat exchanger based on information from slurry flow sensor (I 1 ), slurry outlet temperature sensor (S 6 ) and slurry inlet temperature sensor (S 1 ). Give each required command at (K 1 ).
    [120] The platen heat control CPU (Q 2 ) is a platen coolant flow sensor (I 2 ), platen outlet temperature sensor (S8), platen inlet temperature sensor (S 7 ), platen coolant flow rate controller (V 2 ) and platen coolant heat exchanger (K 2) are connected, and a surface plate cooling water flow rate sensor (I 2), the surface plate outlet temperature sensor (S 8), and the base on the basis of information of from the inlet temperature sensor (S 7) platen cooling water flow regulator (V 2) And a plate cooling water heat exchanger (K 2 ), respectively.
    [121] The work holding member calorie control CPU Q 3 is provided corresponding to each of the work holding members, the work holding member cooling water flow rate sensor I 3 , the work holding member outlet temperature sensor S 10 , and the work holding member inlet temperature. It is connected to the sensor (S 9 ), the workpiece holding member cooling water heat exchanger (K 3 ) and the workpiece holding member cooling water flow regulator (V 3 ), and the workpiece holding member cooling water flow sensor (I 3 ) and the holding member outlet temperature sensor (S 3 ). 10 ) and on the basis of the information from the work holding member inlet temperature sensor (S 9 ), the work holding member cooling water heat exchanger (K 3 ) and the work holding member cooling water flow regulator (V 3 ) are issued.
    [122] At the same time, the platen heat storage control CPU Q 4 and the work holding member rotation heat storage control CPU Q 5 are connected to the total heat quantity control CPU Q, and the polishing apparatus other than the heat generated due to the polishing action. It is configured to remove the amount of heat generated due to the mechanical action of the operation of the operation, to suppress the temperature change of the polishing apparatus to control to a predetermined temperature.
    [123] In this way, it is preferable to individually suppress the temperature fluctuation of each component of the polishing apparatus due to the various heat generated during the polishing operation for each element, but depending on the situation, the platen heat storage control system is integrally controlled with the platen heat control system. Alternatively, it is also possible to integrally control the work holding member rotating heat storage control system and the work holding member heating control system for each work holding member.
    [124] In addition, as shown in FIG. 1, the temperature adjusting fluid of the surface rotating shaft calorific control system or the work holding member rotating shaft calorific control system can be executed by an external cooling method using a gas instead of a liquid such as water.
    [125] What is important at this time is that the heat generated by the mechanical operation of the apparatus other than the heat generated by the direct polishing action can be affected by the temperature of the surface plate and the work holding member as little as possible. Therefore, the basic principle of the present invention is to carry out the calorific control (temperature control) of each system independently without having the platen rotational heat control CPU or the work holding member rotational heat storage control CPU connected to each CPU without being connected to the total heat quantity control CPU. Various modifications can be made to the temperature control of each component as long as the realization of the components cannot be prevented.
    [126] Although the content of this invention is demonstrated further in detail by an Example, the content of this invention is not limited to this, As long as it satisfy | fills the basic idea, it applies also to form other than the illustration as natural.
    [127] (Example 1)
    [128] The same basic configuration as that of the polishing apparatus shown in Fig. 1, and the batch polishing apparatus having the polishing table and the four-axis work holding member rotating mechanism were constructed as follows.
    [129] 1. Polishing plate: Invariant steel (Singo Co., Ltd. SLE-20A (Fe-Co-Ni-Cr system) is used, and the cooling water flow path shown in Figs. In addition, as shown in Fig. 5, a portion of the upper surface of the surface plate is partially cut to show a part of the flow path 9 of the temperature adjusting fluid, and the flow path 9 is formed to be serpentine, and the fluid in the flow path 9 It is designed to maintain the platen strength by acting as an internal rib structure 8a, which is easy to become turbulent, and increases the average flow velocity, so that the heat transfer coefficient can be as high as possible and at the same time does not constitute the flow path 9.
    [130] 2. Work holding member: Using alumina ceramics (manufactured by Kyocera Co., Ltd.), as shown in Fig. 3, a cooling water flow path is formed on the back surface corresponding to the wafer bonding portion, and the work holding is carried out from the work holding surface in this area. A total of 85 exhaust holes (diameter 0.3 ± 0.1 mmφ) penetrating to the back of the member were provided (17 per wafer).
    [131] 3. Polishing cloth: Suba600 manufactured by Rodel Corporation was attached to the upper surface of the polishing platen.
    [132] 4. Performance of other grinding machines:
    [133] a) Surface rotation error: ± 0.5%
    [134] b) Plate top surface deviation: 15㎛
    [135] c) Plate rotation axis deviation: 30㎛
    [136] 5. Composition of temperature controller
    [137] Like the total heat quantity control system shown in Figs. 8 and 9, the fluid flow path system for temperature control of the polishing table, the fluid flow path system for temperature control of the work holding member, the abrasive solution circulation system, the fluid flow path system for adjusting the polishing table rotation axis and the work holding member for each The work holding member was configured to adjust the fluid flow rate and its temperature for each system of the fluid flow path system for rotating shaft temperature control.
    [138] 6. Outline of Polishing Operation
    [139] 5 wafers each of 200 mmφ silicon wafer (thickness 750 µm) were distributed at equal intervals on the circumference of a radius of 175 mm at the center so as to satisfy the following equation with four work holding members having a diameter of 565 mm at 25 ° C. It adhere | attached at room temperature (25 degreeC) using the adhesive (methanol solution of a polyol-type polyurethane adhesive) adjusted to the viscosity of 5 mPa * s. Application of the adhesive was performed using a spin coating apparatus, and adhesion of the wafer to the work holding member was performed using the apparatus shown in FIG.
    [140] R = {(r + x) + sin (π / N) (r + 2y)} / sin (π / N)
    [141] (In formula (1), R: workpiece holding member diameter (mm), r: wafer diameter (mm), x: distance between wafers (mm), y: end circumferential distance of wafer and work holding member (mm)) , N: number of wafers / work holding member, π: circumference
    [142] At this time, the vacuum holding device and the work holding member back suction jig separately prepared for each bonding portion of the wafer on the back of the work holding member are exhausted and adhered, and the exhaust is discharged to 200 mmTorr or less until the adhesion is completed (0.5 minutes). Continued. Thus, the thickness of the adhesive bond layer in an adhesion | attachment site | part by adhering while exhausting was 0.20 to 0.22 micrometer for each wafer from the average value, and the variation of the thickness in each wafer was within 0.012 micrometer. The thickness of the adhesive layer was measured using an automatic film thickness mapping system F50, a thin film measuring apparatus manufactured by Filmetrics. The thickness of the adhesive layer was measured after the coating of the adhesive by spin coating, but since the viscosity of the adhesive increased by the solvent dispersion after the coating, the exhaust gas was exhausted from the back of the work holding member using the apparatus shown in FIG. It is confirmed that the adhesive is not sucked into the micropores for the pores, and it can be said that the thickness of the adhesive layer after the adhesion does not substantially change with the thickness of the adhesive layer after the adhesive application.
    [143] In this way, a total of 20 wafers adhered to the work holding member were polished under the following conditions.
    [144] (1) Polishing Table
    [145] Speed: 30rpm ± 0.5%
    [146] Coolant: Variable below 50 l / min
    [147] Inlet temperature: 11 ℃ (within ± 0.5 ℃)
    [148] Outlet temperature: room temperature + 1 ℃ or less
    [149] (2) Work holding member (free rotation)
    [150] Additional load: 250g per cm 2 wafer surface
    [151] Coolant: (per unit) Variable below 20 l / min
    [152] Inlet temperature: room temperature -1 ℃ (within ± 0.5 ℃)
    [153] Outlet temperature: room temperature + 1 ℃ or less
    [154] (3) abrasive solution
    [155] SiO 2 content: 20 g / l, pH 10.5-10.8, specific gravity 1.02-1.03
    [156] Supply amount: 30 l / min
    [157] (4) Polishing time: 10min
    [158] (5) Polishing amount: 10㎛
    [159] (6) Room temperature: 25 ± 1 ℃
    [160] In the meantime, the temperature control of the cooling water system was performed by the total heat quantity control system shown in FIG. 8 and FIG. In particular, the temperature of the exposed surface of the polishing cloth is measured using a thermal image sensor over a range corresponding to the diameter of the work holding member on the radius of the polishing table, and the supply temperature of the abrasive solution is maintained so that the average value is within 3 ° C of the ambient temperature. (Slurry Inlet Temperature) was controlled. The progress is shown in FIG.
    [161] Thus, the temperature of the surface of the polishing cloth at the time of polishing operation was controlled to within 3 ° C of room temperature (25 ° C). In this case, if the temperature distribution from the back surface of the work holding member to the bottom of the polishing table is analyzed, it is as shown in Fig. 11, and the temperature of the work holding member and the surface of the polishing plate are 25 ° C for the temperature before the polishing operation (environmental temperature = room temperature). The temperature change is suppressed to within 3 ° C. As shown in Fig. 23 (b), it can be seen that the displacement amount in the normal direction of the surface plate surface at this time is suppressed to 10 µm or less at any position.
    [162] After polishing the wafer polished under the above conditions, each wafer was removed from the work holding member and washed with pure water → alkali → NH 4 OH / H 2 O 2 → pure water, and then the finishing precision was measured. The results are shown in Table 1 in comparison with the results of Comparative Example 1.
    [163] Table 1
    [164]
    [165] The symbol in Table 1 is as follows.
    [166] GBIR: Global Back-side Ideal Range (= TTV) (difference between the maximum and minimum thickness of the whole area with reference to the back of the wafer)
    [167] SBIR: Site Back-Side Ideal Range (= LTV) [Difference between the maximum and minimum values in a site with reference to the back of the wafer]
    [168] SFQR: Site Front least sQuares <site> Range
    [169] The measurement conditions in Table 1 are as follows.
    [170] Measuring instrument: ADE9600E + (product of ADE Corporation)
    [171] Wafer: 8 inch wafer
    [172] Number of sheets: 20 sheets (1 batch)
    [173] Measuring area: Excluding 2mm from the edge
    [174] The measuring area is divided into 25mm x 25mm for both SFQRmax and SBIRmax.
    [175] (Comparative Example 1)
    [176] As Comparative Example 1, an example is shown in comparison with Example 1 regarding the polishing according to the prior art and the result.
    [177] The basic configuration of the polishing apparatus is as follows.
    [178] 1. Polishing plate: A cast iron (FC-30) lower plate (23) machined with an upper plate 12 (flat plate made of SUS410) and a concave portion 21 serving as a coolant flow path on the upper surface as shown in Figs. ) Were stacked and tightened with the fastening member 11 to constitute the polishing table 10.
    [179] 2. Work holding member: As shown in Fig. 18, the work holding member 13 made of alumina ceramics is pressed downward by an upper load 15 having a rotary shaft 18 via a rubber elastic body 13a. It was configured to.
    [180] 3. Polishing cloth: SuBa 600 manufactured by Rodel Corporation was attached to the upper surface of the polishing plate 10.
    [181] 4. Performance of other grinding machines
    [182] a) Surface rotation error: ± 2%
    [183] b) Plate top rotational deviation: 30㎛
    [184] c) Plate rotation axis deviation: 140㎛
    [185] 5. The total calorific value control system was configured in the form of FIGS. 14 and 15.
    [186] FIGS. 14 and 15 are the same as those of FIGS. 8 and 9 except that the temperature adjusting fluid supply system of the work holding member, the polishing plate rotating shaft temperature adjusting fluid system, and the work holding member rotating shaft temperature adjusting fluid system do not exist. Since it is a structure of, it will not be described again.
    [187] 6. Outline of Polishing Operation
    [188] In the same manner as in Example 1, each of five wafers (200 mmφ, 750 μm in thickness) in total, each of four wafer holding members having a diameter of 565 mm, was arranged on a circumference of 2/3 (175 mm) in radius from the center of the wafer. Adhesion was maintained at equal intervals so as to almost match this.
    [189] The adhesion was previously applied to the surface of the wafer to be bonded (the back surface) by dissolving Mitshiro-based adhesive SkyLiquid HM-4011 made of isopropyl alcohol and applied as a spin coating apparatus, and then the wafer was heated to 50 ° C. Blow off the solvent. The wafer was then heated to approximately 90 ° C. to melt the wax (viscosity 1000 mPa · s at 90 ° C.), and then placed at a predetermined position on the work holding surface of the work holding member that was warmed to 90 ° C., thereby avoiding the wafer. After pressing the adhesive jig composed of the rubber elastic body shown in Fig. 21 in the convex surface shape to push the air out of the adhesive layer at the adhesive site, the adhesive jig is released and the wafer is self-cooled. By cooling to room temperature.
    [190] In the case of adhering in this way, the work holding member and the wafer are bonded while heated to 90 ° C. Thus, the deformation caused by the difference in the thermal expansion coefficient of the wafer, the work holding member and the wax, and the force at the time of pressing by the rubber elastic body The thickness of an adhesive bond layer was 0.3-0.8 micrometer for each wafer, and the deviation was about 0.1 micrometer with respect to one wafer for the reason of the additional nonuniformity.
    [191] 7. Polishing condition
    [192] (1) Polishing Table
    [193] Speed: 30rpm ± 2%
    [194] Coolant: 15 l / min
    [195] Inlet temperature: 12 ℃ ± 1 ℃
    [196] Outlet temperature: change
    [197] (2) Work holding member (free rotation)
    [198] Additional load: 250g per cm 2 wafer surface
    [199] (3) abrasive solution
    [200] AJ-1325, pH 10.5-10.8, SiO 2 : 20 g / 1, specific gravity: 1.02-1.03 [trade name of colloidal silica abrasive product of Nissan Gakuku Co., Ltd.]
    [201] Supply amount: 10 l / min
    [202] Supply side outlet temperature: 23 ℃ ± 1 ℃
    [203] (4) Polishing time: 10min
    [204] (5) Polishing amount: 10㎛
    [205] The temperature control of the cooling water system is controlled by the total heat quantity control system shown in FIGS. 14 and 15, and the progress during the polishing operation is shown in FIG. In addition, although the temperature of the surface of the polishing cloth was measured by a thermal image sensor in the same manner as in the embodiment, in this case, the surface of the polishing cloth was changed, so that no particular control was performed. The change of the surface temperature of the polishing cloth at this time was shown in Fig. 13, but the temperature change increased from about 20 ° C before the start of polishing to about 32 ° C at the end of polishing. In this case, the temperature distribution from the work holding member to the polishing table is interpreted as shown in FIG. 13, and a temperature change of 10 ° C. or more occurs with respect to the temperature distribution before polishing of the polishing table and the work holding member, thereby resulting in the polishing table. The thermal deformation amount in the normal direction reaches 100 µm or more depending on the location as shown in Fig. 23C.
    [206] Polishing finish precision of the obtained wafer resulted in a low result compared with the Example as shown in Table 1.
    [207] As described above, according to the polishing apparatus and the polishing method of the present invention, it is possible to perform high precision mirror surface processing of a wafer having a diameter such as 8 inches to 12 inches or more with high efficiency. In addition, according to the work bonding method of the present invention, the work, for example, the wafer can be uniformly bonded so as not to shake the work holding member, it is possible to achieve the effect that helps to achieve high-precision mirror surface processing of the wafer.
    权利要求:
    Claims (31)
    [1" claim-type="Currently amended] A polishing apparatus having a polishing table and a work holding member and polishing a workpiece held on the work holding member while flowing an abrasive solution, the amount of deformation in the normal direction of the surface of the surface of the polishing table during the polishing operation and / or the workpiece of the work holding member. A polishing apparatus characterized by suppressing the amount of deformation in the normal direction of the holding surface to 100 µm or less.
    [2" claim-type="Currently amended] A polishing apparatus having a polishing table and a work holding member for polishing a workpiece held on the work holding member while flowing an abrasive solution, wherein the polishing table is integrally formed by casting, and the structure of the polishing table has a plurality of concave portions on the back surface. And / or a portion having a rib, wherein a portion of the temperature control fluid is formed inside the surface plate and at the same time the portion not forming the passage acts as an internal rib structure.
    [3" claim-type="Currently amended] The polishing apparatus according to claim 1 or 2, wherein the coefficient of thermal expansion of the material constituting the polishing plate is 5 × 10 −6 / ° C. or less, and its corrosion resistance is almost the same as that of stainless steel.
    [4" claim-type="Currently amended] The polishing apparatus according to claim 3, wherein the material of the polishing plate is invariant steel.
    [5" claim-type="Currently amended] A polishing apparatus having a polishing table and a work holding member and polishing a workpiece held on the work holding member while flowing an abrasive solution, the temperature change of the polishing table during polishing operation by controlling the flow rate and / or temperature of the temperature adjusting fluid. And / or controlling the temperature change of the work holding member within a predetermined range.
    [6" claim-type="Currently amended] The polishing apparatus according to claim 5, wherein a variation in temperature at any position of the polishing base and / or the workpiece holding member during the polishing operation is within 3 ° C.
    [7" claim-type="Currently amended] The temperature change and / or flow volume of the said abrasive | polishing agent solution are controlled, and the fluctuation | variation of the temperature in the arbitrary position of the grinding | polishing surface of the polishing cloth at the time of a grinding | polishing operation is made into any one of Claims 1-6. Polishing apparatus, characterized in that for controlling.
    [8" claim-type="Currently amended] The polishing apparatus according to any one of claims 1 to 7, wherein the rotational error of the polishing table is suppressed to 1% or less.
    [9" claim-type="Currently amended] The polishing apparatus according to any one of claims 1 to 8, wherein the surface deviation at the time of rotation of the polishing surface of the polishing plate is suppressed to 15 µm or less.
    [10" claim-type="Currently amended] The polishing apparatus according to any one of claims 1 to 9, wherein the rotational deviation of the rotating shaft of the polishing table is suppressed to 30 µm or less.
    [11" claim-type="Currently amended] The polishing apparatus according to any one of claims 1 to 10, wherein the work holding member has a recessed portion or a rib structure at its rear surface.
    [12" claim-type="Currently amended] The polishing apparatus according to claim 11, wherein the material of the work holding member is alumina ceramics or SiC.
    [13" claim-type="Currently amended] 13. The polishing apparatus according to claim 12, wherein a plurality of fine holes for sucking and holding the workpiece in the bonding area of the workpiece holding member with the workpiece are drilled.
    [14" claim-type="Currently amended] The amount of deformation in the normal direction of the surface of the surface of the surface of the polishing surface and / or the work holding member, using a polishing apparatus having a polishing surface and a work holding member and polishing the workpiece held on the work holding member while flowing an abrasive solution. The amount of deformation of the workpiece holding surface in the normal direction of the workpiece is suppressed to 100 µm or less.
    [15" claim-type="Currently amended] A polishing method having a polishing table and a work holding member and polishing a workpiece held on the work holding member while flowing an abrasive solution, wherein the polishing surface of the work is polished by a polishing cloth attached on the polishing table. A variation in temperature at an arbitrary position of the polishing surface of the polishing cloth during operation is 10 ° C. or less.
    [16" claim-type="Currently amended] A polishing method comprising a polishing table and a work holding member and polishing a work held on the work holding member while flowing an abrasive solution, wherein the variation of the temperature of the work during polishing is suppressed to 10 ° C. or less.
    [17" claim-type="Currently amended] The temperature and / or flow rate of the polishing solution is controlled to change the temperature at any position of the polishing surface of the polishing cloth and / or the temperature of the wafer during the polishing operation. Polishing method characterized by the following control.
    [18" claim-type="Currently amended] A polishing method using a polishing apparatus having a polishing base and a workpiece holding member for polishing a workpiece held on a workpiece holding member, wherein a plurality of wafers are arranged on the workpiece holding member so as to satisfy the relationship of the following formula (1) as an error within 2 mm. Polishing method characterized in that the holding.
    R = {(r + x) + sin (π / N) (r + 2y)} / sin (π / N)
    (In formula (1), R: workpiece holding member diameter (mm), r: wafer diameter (mm), x: wafer-to-wafer distance (mm), y: wafer and work holding member outer circumferential end distance (mm), N: number of wafers / work holding member, π: circumferential rate)
    [19" claim-type="Currently amended] The polishing method according to claim 18, wherein r is 200 mm or more, and 5 ≦ N ≦ 7, 5 ≦ x ≦ 20, and 7 ≦ y ≦ 22.
    [20" claim-type="Currently amended] The polishing method according to claim 19, wherein the thickness d of the work holding member is aR <d <bR (a = 0.04 to 0.08, b = 0.10 to 0.12).
    [21" claim-type="Currently amended] The polishing method according to any one of claims 14 to 19, wherein the silicon wafer is polished using the polishing apparatus according to any one of claims 1 to 13.
    [22" claim-type="Currently amended] 22. The polishing method according to claim 21, wherein the temperature change is carried out in an environment within ± 2 占 폚.
    [23" claim-type="Currently amended] Characterized in that the wafer is adhered to the work holding member as an adhesive while exhausting air through the micro holes at the back side of the work holding member by using a work holding member having a plurality of fine holes drilled into the contact area. Bonding method of work.
    [24" claim-type="Currently amended] The method according to claim 23, wherein the adhesion is performed between 20 ° C and 30 ° C.
    [25" claim-type="Currently amended] The method according to claim 24, wherein an adhesive having a viscosity of 1 mPa · s to 10 mPa · s at an adhesive temperature is used.
    [26" claim-type="Currently amended] The method according to any one of claims 23 to 25, wherein the average value of the thicknesses of the adhesives in the workpiece bonding portion is in the range of 0.1 µm to 0.5 µm, and the variation in the thickness is within 0.015 µm.
    [27" claim-type="Currently amended] And a plurality of suction holes penetrating from the work bonding surface to the back surface of the work holding member for adsorbing the vacuum into the bonding area of the work holding surface of the work holding member.
    [28" claim-type="Currently amended] 28. The work holding member according to claim 27, wherein a recess or a rib structure is provided on a rear surface of the work holding member.
    [29" claim-type="Currently amended] The method according to any one of claims 23 to 26, wherein the work holding member according to claim 27 or 28 is used.
    [30" claim-type="Currently amended] A polishing method, wherein the silicon wafer is adhered to the workpiece holding member and polished by the method according to any one of claims 23 to 26 and 29.
    [31" claim-type="Currently amended] The grinding | polishing method of Claim 30 using the grinding | polishing apparatus in any one of Claims 1-13.
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    同族专利:
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    DE60133231D1|2008-04-24|
    US20020187728A1|2002-12-12|
    EP1602444B1|2008-03-12|
    EP1614505B1|2008-11-26|
    EP1197293A4|2004-12-15|
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    EP1614505A1|2006-01-11|
    DE60136759D1|2009-01-08|
    EP1602444A3|2005-12-14|
    WO2001056742A1|2001-08-09|
    DE60128768T2|2007-10-11|
    US20050048882A1|2005-03-03|
    EP1602444A2|2005-12-07|
    DE60128768D1|2007-07-19|
    EP1197293A1|2002-04-17|
    KR100729022B1|2007-06-14|
    US7513819B2|2009-04-07|
    DE60133231T2|2008-07-03|
    EP1197293B1|2007-06-06|
    TWI291730B|2007-12-21|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    2000-01-31|Priority to JPJP-P-2000-00022591
    2000-01-31|Priority to JP2000022591
    2001-01-29|Application filed by 와다 다다시, 신에쯔 한도타이 가부시키가이샤
    2001-12-07|Publication of KR20010108076A
    2007-06-14|Application granted
    2007-06-14|Publication of KR100729022B1
    优先权:
    申请号 | 申请日 | 专利标题
    JPJP-P-2000-00022591|2000-01-31|
    JP2000022591|2000-01-31|
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