• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The chemical filter unit consists of a housing for holding the filter medium and the filter medium formed by laminating a large amount of fiber sheets, and has an open gas inlet on one side of the housing and an open gas outlet on a side substantially opposite to the gas inlet. And a gas passage for allowing gas to flow along the surface of the fiber sheet is formed between each adjacent fiber sheet of the filter medium from the gas inlet to the gas outlet, and the absorption capacity of the filter medium is 300 eq / m 3 or more. It is preferable that the said fiber which comprises the said sheet is an ion exchange fiber.
    公开号:KR20010086195A
    申请号:KR1020007002265
    申请日:1998-08-05
    公开日:2001-09-10
    发明作者:히라타나미；후지무라요이치；사루야마히데오；아마노마사키
    申请人:히라이 가쯔히꼬；도레이 가부시끼가이샤；
    IPC主号:
    专利说明:

    Chemical Filter Unit and Gas Cleaning System {CHEMICAL FILTER UNIT AND GAS CLEANING SYSTEM}
    [3] In recent years, in the electrical and electronics industry, the biochemical industry, and the like, the demand for a closed clean space is rapidly increasing. Due to the improvement of manufacturing techniques in each of the above fields, the demand for hygiene is very intense. In this context, techniques for analyzing pollutants have also come up dramatically in recent years. As a result, the necessity of removing the substance which was previously overlooked is emphasized. Conventional cleaning methods for air in an enclosed clean space are mainly used to remove particulates in the solid state using a particulate removal filter such as a HEPA filter, and the removal of the particulates in the solid state is currently controlled to the extent possible. .
    [4] However, air in an enclosed clean space is circulated through the filter and some of the fumes or gaseous substances contained in the air are much more concentrated than those in the open air. The reason for this is that, in the cleaning of conventional air, the necessity of removing the fumes and gaseous substances contained in the air is not emphasized, and thus the conventional air cleaners do not have such a function.
    [5] In the electronics industry, where products such as large scale integrated circuits are produced, the need for removing chemicals has begun to emerge. In particular, in the photolithography process, the presence of these chemicals has been found to reduce the production of the product, and a technique for removing chemicals of a different concept from the conventionally adopted removal technology using a HEPA filter has been found. There is a need to develop.
    [6] In particular, development of a technique for removing amines such as organic amines and ammonia is required. Since ammonia causes haze and destroys the dielectric in the product, the generation of ammonia greatly lowers the yield of the product.
    [7] In the chemically amplified resist manufacturing process of the photolithographic process, both of them generated in the region irradiated with the chemical amplifying agent accelerate the dissolution into the developer. According to this mechanism, the device has been devised. If ammonia is present in the atmosphere, both are neutralized and extinguished, and dissolution into the developer in the irradiation zone is suppressed. This phenomenon causes a very serious trouble called T-TOP failure.
    [8] This phenomenon occurs when the concentration of ammonia in the air is present in very small amounts, accounting for only a few minutes in billions of minutes. Although the concentration of each part is different, the concentration of ammonia in the air to be treated is usually between tens and hundreds of billions. In order to solve this problem, it is necessary to make the concentration of ammonia present in clean air at a concentration of 5 ppb or less.
    [9] Manufacturers of LSIs need to solve this problem and want to develop filter units that keep the concentration of ammonia in the air as low as possible in an enclosed clean air production space.
    [10] Japanese Laid-Open Patent Publication No. 1-317512 discloses a method for removing sea salts (including ammonia) in air by passing air through a filter medium containing ion exchange fibers. However, these techniques either reduce the absorption to a very low level (in ppb) or reduce the pressure loss of the filter using a filter medium or increase the material absorption capacity per unit volume of the filter medium, which indicates the filter's service life. It does not indicate any possibility of removing ammonia.
    [11] Japanese Laid-Open Patent Publication No. 61-138543 discloses a filter material obtained by pleating a laminate formed by covering a pulp sheet on both sides of an ion exchange fiber-containing sheet. However, this filter medium is used in a cross flow method in which gas flows from the front of the first sheet of the filter medium to the back of the last sheet. This technique does not refer to any method of using a filter medium to reduce the pressure loss of the filter or to increase the material absorption capacity per unit volume of the filter medium which indicates the service life of the filter.
    [12] Japanese Laid-Open Patent No. 60-183022 discloses a filter composed of cation exchange fibers for capturing mutagenic substances in the air. However, these filter media are used in a cross flow method. The technique does not refer to any method of using a filter medium to reduce the pressure loss of the filter or to a method of increasing the material absorption capacity per unit volume of the filter medium which indicates the service life of the filter.
    [13] Japanese Patent Laid-Open No. 8-24564 discloses a filter unit containing an ion exchange fiber sheet. However, the above technique does not refer to any method of using the filter medium to reduce the pressure loss of the filter or to increase the material absorption capacity per unit volume of the filter medium which indicates the service life of the filter.
    [14] Therefore, the above prior art cannot satisfy the requirements in the technical field.
    [15] It is an object of the present invention to provide a filter unit and a gas cleaning system which can meet the above requirements.
    [16] The present invention provides a filter unit having a very large absorption capacity of the filter medium and a small pressure loss of the filter medium as compared with the conventional filter medium.
    [17] In order to solve the above problem, it may be considered to increase the quality of the filter medium per volume, but this method does not solve the latter problem. In order to solve the latter problem, it is worth considering reducing the quality of the filter medium per volume, but this method does not solve the former problem. The present invention can simultaneously solve these conflicting problems.
    [1] The present invention relates to a chemical filter unit and a gas cleaning system.
    [2] Chemical filter units that can reduce chemical contaminants in the air, particularly in clean rooms, clean booths and clean benches (hereinafter referred to as enclosed clean spaces) to a very low level by ion exchange or charge absorption; The present invention regarding a gas scrubbing system lowers the pressure loss of the gas and can be used for a long time.
    [60] 1 is a perspective view showing a filter sheet used in the filter unit of the present invention in an embodiment.
    [61] 2 is a perspective view showing a filter medium used in the filter unit of the present invention in an embodiment.
    [62] 3 is a perspective view showing a filter medium used in the filter unit of the present invention as another example.
    [63] 4 is a front view of the filter medium used in the filter unit of the present invention as another example.
    [64] 5 is a side exploded view showing a filter unit used in the present invention in an embodiment.
    [65] Fig. 6 is a schematic side view showing an ammonia absorption test system for chemical filters used in the filter unit of the present invention.
    [66] ** Brief description of the main parts of the drawing **
    [67] (1): fiber sheet
    [68] (2): Short fiber
    [69] (4), (11), (16): Gas passage
    [70] (5), (9), (21): filter material
    [71] (6): Wrinkled fiber sheet
    [72] (7): Liner fiber sheet
    [73] (20): Filter unit
    [74] (22): Filter containing box
    [75] (23): Cover box
    [76] (24), (25): Hole
    [77] 30: aluminum screen
    [18] First aspect of the invention:
    [19] The chemical filter unit comprises a filter medium formed by stacking a large amount of fiber sheets and a housing for housing the filter medium, wherein the chemical filter unit has a gas inlet on one side of the housing and a gas outlet on the other side almost opposite to the gas inlet. have. In addition, the chemical filter unit is characterized in that the gas passage through which the gas flows from the gas inlet to the gas outlet along the surface of the fiber sheet is formed between the adjacent fiber sheet of the filter medium, the absorption capacity of the filter medium is 300 eq / m 3 or more Doing.
    [20] Due to this gas passage, the source gas mainly flows along the surface of the fiber sheet constituting the filter medium. This means that the flow of source gas flowing through the filter media is parallel. Since such a structure is substantially formed only of a fiber sheet, the absorption capacity of the filter medium can be maintained at 300 eq / m 3 or more, and the pressure loss of the filter medium can be kept small.
    [21] The absorption capacity refers to the amount of additionally charged fine particles, mists and gases absorbed per unit volume (1 m 3 ) of the filter medium in chemical equilibrium. For example, for activated carbon fibers containing phosphoric acid, the absorption capacity is calculated from the total weight of phosphoric acid contained based on the maximum equilibrium capacity that occurs when all reactors react to form salts.
    [22] In the case of ion exchange fibers, the ion exchange capacity is the absorption capacity. The method for measuring the ion exchange capacity is not described. In general, a filter medium having a constant capacity is cleaved to react with a known concentration of acid or alkali, and the residue is titrated and neutralized.
    [23] Second aspect of the invention:
    [24] In the chemical filter unit according to the first aspect of the present invention, in which gas flows from the gas inlet to the gas outlet, when the average flow velocity of the gas inlet is 0.5 m / sec, loss of gas flowing by the filter medium having a depth of 70 mm in the gas passage direction. The pressure is 3 mmAq or less.
    [25] Third aspect of the invention
    [26] In the chemical filter unit according to the first or second aspect of the present invention, the fibers constituting the fiber sheet are chemically modified activated carbon fibers (eg, activated carbon fibers containing phosphoric acid) or ion exchange fibers. In particular, ion exchange fibers are preferred.
    [27] The ion exchange fibers used herein will be described in detail later.
    [28] Fourth aspect of the present invention:
    [29] In the chemical filter unit according to any one of the first to third aspects of the invention, the filter media is substantially secured to the housing only by the elasticity of the large amount of fibrous sheet.
    [30] The fact that the filter medium is fixed to the housing substantially by the elasticity of only a large amount of fiber sheet means that when using the filter unit, the means for stacking the fiber sheets and fixing the filter medium to the housing do not emit any gas, thus reducing the gas cleaning effect. It means. For example, if the fibrous sheet is laminated with an adhesive, supported on a sheet with some other organic material, or the filter media is fixed in the housing with an adhesive, some gas may be released which reduces the air cleaning effect.
    [31] Other aspects of the invention will be described below as examples of the invention.
    [32] It is preferable to form a fiber sheet by scooping short fibers having a length of 0.1 to 10 mm, such as filter paper using a wire cloth, and the area unit weight of the fibers of the fiber sheet is 30 to 1000 g. / m is recommended, but in the range of from 2, more preferably in the range of 50 ~ 500g / m 2. When the fiber sheet is subjected to post-treatment by folding, thermal bonding or other method, it is particularly preferable that the fiber sheet is in the range of 100 to 300 g / m 2 .
    [33] The fiber sheet may also have any other material with a mixture of chemically modified activated carbon fibers and ion exchange fibers. In order to improve the formability of the paper, not only the cellulose, the pulp, and the like of the long fibers can be mixed to some extent, but also the inorganic fibers can be mixed. When mixing other materials, it is preferable to make the chemically modified activated carbon fiber or the ion exchange fiber 50% by weight or more.
    [34] It is important that the filter medium is a laminated three-dimensional structure consisting of a large amount of fiber sheets, and that gas passages from one side of the filter medium to the corresponding other side are formed between adjacent fiber sheets.
    [35] The gas passage can be formed by laminating the corrugated sheet of fiber. For example, corrugated structures, honeycomb structures, simple wave structures, composites thereof, and the like may be used, but it is preferable to use corrugated fiber sheets.
    [36] The corrugated paper may also contain a planar fibrous sheet (liner) in close contact with the crest of the corrugated fibrous sheet (wrinkles).
    [37] Corrugated paper with a liner can be produced by supplying a sheet of fiber to be processed into a pleated material between two rotating rolls with corrugated surfaces, and can be formed by transferring the pleated material to a rotating roll which forms the same wrinkles as the pleated material. On the other hand, the fiber sheet to be processed into a liner is conveyed by a roll having a flat surface installed on the opposite side of the rotating roll. The corrugate and the liner are compressed together in two rotating rolls to produce the desired corrugated cardboard. The fiber sheet to be processed into a corrugate may also be a laminate consisting of a large amount of fiber sheet.
    [38] In the above, the powdery or fibrous heat-sealable polymer is contained in at least one of the fibrous sheet to be processed into the corrugated material or the fibrous sheet to be processed into the liner, which is wrinkled when the corrugated material and the liner are compressed by the rolling roll. The heat sealable polymer is melted to effectively bond the ash and the liner.
    [39] The heat sealable polymer is only polystyrene or poly- having a melting point lower than the melting point of the fibers mainly used in fiber sheets, for example forming ion exchange fibers. It should be a polymer such as -olefin, but is not particularly limited. What is needed can be selected from polymers of low melting points, such as polyesters, polyolefins, vinyl polymers, etc. The form of the heat sealable polymer contained in the fiber sheet is not particularly limited. However, in consideration of the ease of mixing with ion-exchange fibers or activated carbon fibers and the paper formability, it is preferable that the heat sealable polymer is fibrous.
    [40] Filter media having an absorption capacity of 300 eq / m 3 or more can be obtained by using chemically modified activated carbon fibers (eg, activated carbon fibers containing phosphoric acid) or ion exchange fibers as the fibers forming the fiber sheet.
    [41] Polystyrene-based ion exchange fibers are preferred, but bond fibers composed of polymers having ion exchange groups injected with crosslinked insoluble polystyrene and reinforcing polymers (eg polyolefins) are preferred.
    [42] Because polystyrene has a low strength, it is difficult to form fibers with mechanical properties that are practically tensile in polystyrene alone. Thus, to obtain fibers with mechanical properties, reinforcing polymers are used in combination with polystyrene.
    [43] It is preferable that the moisture content of an ion exchange fiber exists in the range of 1.0-5.0. The moisture content is sufficiently injected into the sodium-type (chlorine type) cation (anion) exchanger in ion-exchanged water, dehydrated with a centrifugal dehydrator to remove the water, and then immediately measured the weight (W) and dried the sample After drying, the weight (W 0 ) is measured and calculated from the following equation using the measured values.
    [44] Moisture content = (WW 0 ) / W 0 .
    [45] It is preferable that the particle diameter of the ion exchange fiber exists in the range of 15-100 micrometers in a dry state, However, when the range is 20-70 micrometers, it is still more preferable when it exists in the range of 30-50 micrometers. When the particle diameter of the ion exchange fiber is in this range, the specific surface area of the fiber sheet can be increased.
    [46] The binding type of the polymer with the ion exchanger and the reinforcing polymer injected is not particularly limited. Core-sheath type bonding fibers consisting of an ion exchange polymer as the main sheath component and a reinforcing polymer as the core component can be preferably used. Island-in-a-sea type bond fibers are a type of core-cis-type bond fibers, which are particularly high strength, because of the excellent bond between the reinforcing polymer and the polymer with the ionic bonds injected. , Especially good. Mixed type binding fibers having both of the above two polymers may also be preferably used.
    [47] Polymers that can be used as reinforcing polymers include poly- -Olefins, polyamides, polyesters, polyacryl compounds, etc., of which poly- -Olefin is good because it is excellent in chemical resistance.
    [48] The poly- Examples of the olefin include polyethylene, polypropylene, poly-3-methylbutene-1, poly-4-methylpentene-1, and the like. Among them, polyethylene having excellent strength and convenient production is preferred.
    [49] The fibers are cut into short fibers of appropriate length, which have an ion exchanger injected at the ion exchange polymer site. The ion exchange group can be either a cation exchanger or an anion exchanger.
    [50] The length of the short fibers is optional, when the length of the fiber is too short, it is easy to separate from the formed fiber sheet, and when the length of the fiber is too long, the ion exchange reaction in the fiber sheet is undesirably slightly uneven. Although the length of the short fiber is preferably 0.1 mm to 10 mm, 0.3 mm to 5 mm is more preferable, and 0.3 mm to 1 mm is most effective.
    [51] The anion exchanger used preferably includes a strong basic anion exchanger obtained by treating a haloalkylated compound with a quaternary amine such as trimethylamine, secondary or primary amines such as isopropylamine and diethylamine, piperazine or mole. There is a weakly basic anion exchanger obtained by treating with polyline. In order to achieve the object of the present invention effectively, a strong basic anionic group is more preferable.
    [52] When using a filter medium composed of anion exchange fibers, the absorption capacity of the present invention is anion exchange capacity.
    [53] Cation exchange groups which are preferably used include aminocarboxylic acid groups such as sulfonic acid groups, phosphoric acid groups, carboxylic acid groups and iminodiacetic acid groups.
    [54] Ammonia and organic amines, such as organic amines, are present in the source gas as particulates, fumes and gases imposed in excess amounts. In order to effectively absorb and remove the material by using the filter unit of the present invention, it is preferable to use a cation exchanger as an ion exchanger, among which sulfonic acid groups are better.
    [55] When using a filter medium composed of a cation exchange filter, the absorption capacity of the present invention is a cation exchange capacity.
    [56] Ion exchange fibers are, for example, polystyrene-based compounds and poly- The polystyrene portion of the binding fiber made of -olefin is crosslinked with formaldehyde under an acid catalyst to insolubilize and inject the designed ion exchanger into the polystyrene portion.
    [57] Based on the dry weight of the fiber, the amount of ion exchanger to be injected is preferably 0.5 meq / g or more, but more preferably 1.0 to 10 meq / g.
    [58] The housing of the filter media is for example a box with a lid. In the upper part of the cover and the lower part of the box there is a hole through which gas can pass. After the filter media is installed in the box, the cover is attached to the box.
    [59] It is preferable to install the filter medium in the housing in the compressed state, and the filter medium is fixed in the housing without using any adhesive using the elastic force to be restored to its original state.
    [78] Hereinafter, although the preferable example in this invention is demonstrated, this invention is not limited to this example.
    [79] 1 shows, as an example, a fiber sheet used for forming the filter medium of the filter unit of the present invention. The short fibers 2 are scooped using a wire cloth to form the fiber sheet 1 into paper, and then the pleats 3 are formed. A large amount of the fiber sheet 1 is laminated to make a filter medium. In the filter medium, a gas passage 4 is formed between each fiber sheet 1.
    [80] Figure 2 shows the filter medium used in the filter unit of the present invention by way of example. The filter medium 5 is a laminate composed of a set of fiber sheets. A set of fiber sheets is a corrugated sheet of corrugated fiber sheet 6 and a liner fiber sheet 7, and a gas passage 8 between the corrugated fiber sheet 6 and a liner fiber sheet 7. Is formed.
    [81] 3 shows another example of the filter medium used in the filter unit of the present invention. The filter medium 9 is a laminate composed of a large amount of fiber sheet 10. Each fiber sheet 10 is laminated and has a honeycomb structure. The hollow portion of the honeycomb structure forms a gas passage 11.
    [82] 4 shows a filter medium used in the filter unit of the present invention as another example. The filter medium 12 is made by winding two corrugated sheets 15 each consisting of a fiber sheet 13 which is a corrugated material and a fiber sheet 14 which is a liner. A gas passage 16 is formed between the corrugated fiber sheet 13 and the liner fiber sheet 14.
    [83] 5 shows a filter unit of the invention in an embodiment. The filter unit 20 has a cover box 22 in which the filter medium-containing box 22 containing the filter medium 21 covers the filter medium-containing box 22 so that the filter medium 21 in the filter medium-containing box 22 is provided. Cover the filter media-containing box after installation. On the opposite sides of the filter medium-containing box 22 and the cover box 23, holes 24 and 25 for passing gas are made, respectively.
    [84] Before the filter medium 21 is installed in the filter medium-containing box 22, the rear aluminum screen 26 and the rear nonwoven 27 are sequentially installed in the filter medium-containing box 22. The filter medium 21 is then compressed in the direction of the arrow 28 and placed in the filter medium-containing box 22 in a compressed state.
    [85] Before installing the cover box 23 covering the filter medium-containing box 22, the first half nonwoven fabric 29 and the front aluminum screen 30 are sequentially installed. The cover box 23 is then installed to cover the filter media-containing box 22. The movement of the lid box 23 towards the filter medium-containing box 22 is indicated by arrow 32. Tighten them with fasteners (not shown). Thus, in the embodiment, the filter unit of the present invention is completed. The filter-containing box 22 with the opening 24 and the cover box 23 with the opening 25 form the housing of the invention.
    [86] Example
    [87] Ion exchange fiber:
    [88] The island-in-the-sea type conjugated fiber in which the sea component is polystyrene and the island component is polyethylene is bonded at 50:50, and the bonded fiber having 16 degrees is produced. The fibers were cut to 0.5 mm length.
    [89] 1 part by weight of the chopped fibers was added to a crosslinked sulfonated solution consisting of 7.5 parts by weight of grade 1 sulfuric acid and 0.07 parts by weight of paraformaldehyde, followed by reaction treatment at 90 ° C. for 4 hours.
    [90] After the reaction was terminated, the chopped fibers were treated with alkali and activated with hydrochloric acid to obtain cation exchange fibers with sulfonic acid groups. The exchange capacity of the cation exchange fiber was 3.0 meq / g-Na, and the water content was 1.5. The exchange capacity was measured by the following method.
    [91] 1 g of cation exchange fiber was added to 50 mL of 0.1 N sodium hydroxide and the mixture was shaken for 2 hours. 5 ml of this solution was taken, titrated and neutralized. Based on the results, the exchange capacity was calculated.
    [92] The chopped fibers converted to Na-type (Cl-type) were sufficiently immersed in ion-exchanged water, dehydrated with a centrifugal dehydrator, and the weight (W) of the chopped fibers was measured. Further, the cut fibers were dried at 60 ° C. for 48 hours in a dryer, and the weight (W 0 ) of the cut fibers was measured. The water content of the chopped fibers was obtained from the formula (WW 0 ) / W 0 .
    [93] Paper Forming:
    [94] The obtained ion-exchange fiber, heat-sealable fiber (polyester with low melting point, Kuraray product, trade name "Sofit N720") (1 mm length), and a paper forming aid, Manila hemp, 60:20:20 The mixture was mixed in proportion, formed into paper by a rotary filter cloth large paper machine, and dried at 120 ° C. in a drum rotary dryer. Then, it was wound up with a fiber sheet (0.55 mm thickness).
    [95] From the fiber sheet, a 3 cm square sheet sample was cut and immersed in the sodium hydroxide solution described above for ion exchange fibers, and the ion exchange capacity per sample weight was measured. The ion exchange capacity was 1.5 meq / g.
    [96] Waveform shaping:
    [97] The obtained fibrous sheet was creased with a wrinkle machine (a single facer for the fifth fibrous cardboard). In the corrugator, a rotating roll having a corrugated surface (120 to 130 ° C.), a fiber sheet to be a corrugated material, a fiber sheet to be a liner, and a rotary compression roll having a flat surface were placed in order from above. A corrugated sheet was formed by passing a sheet of fiber to be a corrugated material and a sheet of fiber to be a liner between the rolls and compressing with heat and pressure.
    [98] From the corrugated cardboard, a 2 cm square sheet sample was cut and immersed in the sodium hydroxide solution described above for ion exchange fibers to measure the ion exchange capacity per sample weight. The ion exchange capacity was 1.45 meq / g.
    [99] Filter unit:
    [100] From the obtained corrugated cardboard, a large amount of sheets of 590 mm in width x 70 mm in length was cut so that gas was located in the longitudinal direction. These corrugated sheets, which allowed gas to pass in the same direction, were stacked, compressed to a width of 590 mm x 590 mm x depth (L) 70 mm, and installed in an aluminum housing to produce a filter unit of the present invention. In FIG. 9, the height of the filter medium is indicated by H, and the depth of the filter medium is indicated by L. In FIG.
    [101] The total weight of the filter medium installed in the filter unit was 6050 g. The ion exchange capacity per volume was 360 eq / m 3 .
    [102] The ammonia absorption test of the filter unit of the present invention will be described below. Such a test system is shown in FIG. In FIG. 6, the test system 40 includes a fan 42 for introducing the outside air 41, an activated carbon chemical filter 43, a HEPA filter 44, a gas mixer 46, and a filter unit 48 of the present invention. ) And exhaust pipe (50). These parts are arranged from the left to the right in the figure, and are connected by the gas supply pipes 51, respectively. An ammonia injection port 45 is formed in the gas supply line 51 between the HEPA filter 44 and the gas mixer 46. The first sampling port 47 for gas sampling is installed in the gas supply pipe 51 between the gas mixer 46 and the filter unit 48, and the gas supply pipe between the filter unit 48 and the exhaust pipe 50 ( In 51, a second sampling port for gas sampling is provided in the discharge pipe 50.
    [103] While the outside air 41 is introduced into the system 40 by the fan 42, ammonia gas is injected from the ammonia introduced into the port 45 so that the ammonia concentration of the air at the outlet of the gas mixer 46 is 200 ppb. maintain. The average flow rate of air at the inlet of the filter unit 48 was fixed at 0.5 m / sec. In this case the pressure loss in the filter medium of the filter unit 48 measured was 1.7 mmAq.
    [104] After a period of time, the flow of air upstream and downstream of the filter unit 48 was sampled at the first sampling port 47 and the second sampling port 49.
    [105] Samples taken from the first sampling port 47 and the second sampling port 49 were injected directly into the high clean water in the dust collector. The concentration of ammonia dissolved in high clean water was measured by ion chromatography. Based on the measured value, the simulation was performed.
    [106] As a precondition for the simulation, the time taken until the concentration starts exceeding 1 ppb at the outlet of the filter unit 48 after supplying 10 ppb of ammonia was defined as the life of the filter unit 48. The lifetime has been determined in consideration of the conditions necessary for a closed clean space in the electronics industry. As a result of the analysis, the life of the filter unit 48 was determined to be 890 days. This result means that the filter unit 48 can be used in an air clean system for practical enclosed clean spaces for two years without replacement.
    [107] Comparative Example 1
    [108] Except for modifying the space behind the wrinkles, the fibrous sheet prepared as described in the above example was molded to be wrinkled as described in the above example. The same corrugated sheet obtained in Examples was cut from the obtained corrugated cardboard, and a filter unit was produced therefrom as described in the Examples. The total weight of the filter medium in the filter unit was 290 eq / m 3 .
    [109] The filter unit was used for the same ammonia absorption test as in Example. The pressure loss of the filter medium of the filter unit was 1.3 mmAq lower than that obtained in the examples.
    [110] Although a high ammonia removal rate was observed at the beginning of the test, it was confirmed that the removal rate rapidly decreases as the test proceeds. As a result of the simulation, it was determined that the filter unit had a life of 590 days. According to the equipment repair of this field, if it is estimated that the life of the filter unit will end before the next regular maintenance at the current regular maintenance, replace the filter unit at the current regular maintenance. In this case, the number 590 days means that the filter unit should be replaced once a year.
    [111] Comparative Example 2
    [112] A commercially available filter unit (590mm in width) in which an ion exchange nonwoven fabric obtained by irradiating an electron beam to a polyolefin filament nonwoven fabric to form an implantation site and converting the fiber into a cation exchange fiber by a transplantation reaction is installed in a housing together with a spacer formed of aluminum wire. A filter medium having a height of 70 mm and a depth of 70 mm) was subjected to the same test as that performed in the example.
    [113] The ion exchange capacity of the filter medium was 2.5 meq / g, and the weight of the installed filter medium was 2068 g. The ion exchange capacity per unit volume of the filter medium was 220 eq / m 3 .
    [114] As a result of the simulation, the life of the commercial filter unit was judged to be 586 days, but the pressure loss of the filter medium was very large, 6.0 mmAq.
    [115] Since the gas flow rate was kept the same as in the example, the fan 2 had to be replaced by a fan with a larger capacity in the test for a filter unit with a higher pressure loss.
    [116] The chemical filter unit and gas cleaning system of the present invention can remove chemical contaminants to a very low degree in a confined space, which not only has a very low pressure loss but also a very long life. Thus, the chemical filter unit and gas cleaning system are particularly useful in the electronics industry where products that are sensitive to chemical contaminants, such as large integrated circuits, are manufactured.
    权利要求:
    Claims (13)
    [1" claim-type="Currently amended] In a chemical filter unit comprising a filter medium formed by laminating a large amount of fiber sheets and a housing for containing the filter medium, the gas inlet on one side of the housing and the gas outlet on the opposite side of the gas inlet:
    Gas passages through which gas flows along the surface of the fiber sheet are formed between each adjacent fiber sheet of filter medium from the gas inlet to the gas outlet and the absorption capacity of the filter medium is 300 eq / m 3 or more .
    [2" claim-type="Currently amended] The pressure loss of the flowing gas by the filter medium having a depth of 70 mm in the gas passage direction when the average flow rate of the gas from the gas inlet to the gas outlet is 0.5 m / sec at the gas inlet is 3 mmAq or less. Chemical filter unit.
    [3" claim-type="Currently amended] The chemical filter unit of claim 1, wherein the fibers constituting the fiber sheet are ion exchange fibers, and the absorption capacity is an ion exchange capacity.
    [4" claim-type="Currently amended] The chemical filter unit of claim 3, wherein the ion exchange fibers are island-in-the-sea binding fibers.
    [5" claim-type="Currently amended] The chemical filter unit of claim 4, wherein the ion exchange fibers are cation exchange fibers.
    [6" claim-type="Currently amended] The chemical filter unit of claim 5, wherein the sea component of the island-in-the-sea binding fiber is a polystyrene-based polymer.
    [7" claim-type="Currently amended] The chemical filter unit of claim 1, wherein at least 50% by weight of the fiber sheet is 0.1 to 10 mm in length of short fibers.
    [8" claim-type="Currently amended] The chemical filter unit of claim 1, wherein the filter medium is fixed only by the elasticity of the fiber sheet.
    [9" claim-type="Currently amended] 2. The chemical filter unit of claim 1, wherein the fiber sheet contains a heat sealable material, and the large amount of fiber sheet is laminated by fusion of the heat sealable material.
    [10" claim-type="Currently amended] A gas cleaning system comprising a production chamber and a gas cleaner for supplying clean air to the production chamber, wherein the gas cleaner includes the chemical filter unit according to any one of claims 1 to 9. .
    [11" claim-type="Currently amended] The gas cleaning system according to claim 10, wherein the manufacturing chamber has an LSI manufacturing process.
    [12" claim-type="Currently amended] 12. The gas cleaning system according to claim 11, wherein the manufacturing chamber holds a photolithography process in the LSI manufacturing process.
    [13" claim-type="Currently amended] 12. The gas cleaning system according to claim 11, wherein said manufacturing chamber holds a chemically amplified resist process in the LSI manufacturing process.
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    同族专利:
    公开号 | 公开日
    CN1273538A|2000-11-15|
    KR100504703B1|2005-08-03|
    CA2296477A1|2000-02-05|
    EP1022043A4|2001-11-14|
    WO2000007696A1|2000-02-17|
    EP1022043A1|2000-07-26|
    US6352579B1|2002-03-05|
    CN1160145C|2004-08-04|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    1998-08-05|Application filed by 히라이 가쯔히꼬, 도레이 가부시끼가이샤
    1998-08-05|Priority to PCT/JP1998/003491
    2001-09-10|Publication of KR20010086195A
    2005-08-03|Application granted
    2005-08-03|Publication of KR100504703B1
    优先权:
    申请号 | 申请日 | 专利标题
    PCT/JP1998/003491|WO2000007696A1|1998-08-05|1998-08-05|Chemical filter unit and gas purification system|
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