Polystyrene Polymer Compound, Chemically Amplified Positive Resist Material and Pattern Forming Meth

专利摘要:
The present invention relates to a polymer compound represented by the following general formula (1a) having a terminal P and a weight average molecular weight of 1,000 to 500,000. Wherein R is OH or OR 3 , R 1 is H or CH 3 , R 2 is an alkyl group, R 3 is an acid labile group, x≥0, y> 0, k≥0, m≥0, n> 0, 0 <q ≦ 0.8, p + q = 1, P is H, an alkyl group, an alkenyl group, an aromatic hydrocarbon group, a carboxyl group, OH,-(R 4 ) h (COR 5 ) r , -R 4 ( OH) r or -R 4 (OR 5 ) r (wherein R 4 represents an (r + 1) valent aliphatic hydrocarbon group, an alicyclic saturated hydrocarbon group or an aromatic hydrocarbon group, and R 5 represents an alkyl group, an aromatic hydrocarbon group or an alkoxy group Or a hydroxyl group, h is 0 or 1, and r represents a positive integer of 1 to 3.). When the polymer compound of the present invention was used as a base resin of a chemically amplified positive resist material, it was sensitive to high energy rays, was excellent in sensitivity, resolution, and plasma etching resistance, and was also excellent in heat resistance and reproducibility of the resist pattern.
公开号:KR19990036901A
申请号:KR1019980041844
申请日:1998-10-07
公开日:1999-05-25
发明作者:오사무 와따나베；준지 시마다；시게히로 나구라；다까노부 다께다
申请人:카나가와 치히로；신에쓰 가가꾸 고교 가부시끼가이샤；
IPC主号:

专利说明:

Polystyrene Polymer Compound, Chemically Amplified Positive Resist Material and Pattern Forming Method
The present invention describes a polymer compound having a terminal having one or two or more acid labile groups or a polymer compound in which the polymer compound is crosslinked by a crosslinking group having a further COC group in the molecule and / or between the molecules and the polymer compound. By blending as a resin, it relates to a chemically amplified positive resist material and a pattern forming method which are considerably high in alkali dissolution contrast before and after exposure, have a high density, have high resolution, and are particularly reproducible as a fine pattern forming material for ultra LSI production.
In recent years, with the higher integration and higher speed of LSI, finer pattern rules have been required, and far-infrared lithography is promising as a next generation microfabrication technology. The far-ultraviolet lithography can process 0.5 micrometers or more, and when the resist material with low light absorption is used, the pattern formation with a side wall close to perpendicular to a board | substrate is possible.
Recently developed acid-catalyzed chemically amplified positive resist materials (described in Japanese Patent Publication Nos. 90-27660 and 88-27829, etc.) use KrF excimer lasers having high luminance as a source of far ultraviolet rays. In addition, it is expected to be a particularly promising resist material for far-ultraviolet lithography having high sensitivity, resolution, and dry etching resistance and excellent characteristics.
As such a chemically amplified positive resist material, a three-component system composed of a two-component system composed of a base resin and an acid generator, a base resin, an acid generator, and a dissolution control agent having an acid labile group is known.
For example, Japanese Patent Laid-Open Publication No. 87-115440 proposes a resist material composed of poly-4-tert-butoxystyrene and an acid generator, and similar to this proposal, Japanese Patent Laid-Open Publication No. 91-223858 discloses a molecule. A two-component resist material comprising a resin having a tert-butoxy group and an acid generator, and Japanese Patent Laid-Open No. 92-211258 discloses a methyl group, isopropyl group, tert-butyl group, tetrahydropyranyl group, and trimethylsilyl group-containing poly A two-component resist material composed of hydroxystyrene and an acid generator has been proposed.
In addition, Japanese Patent Application Laid-Open No. 94-100488 discloses poly [3,4-bis (2-tetrahydropyranyloxy) styrene], poly [3,4-bis (tert-butoxycarbonyloxy) styrene], Resist materials consisting of polydihydroxystyrene derivatives such as poly [3,5-bis (2-tetrahydropyranyloxy) styrene] and an acid generator have been proposed.
However, the base resin of these resist materials has an acid labile group on the side chain, and if the acid labile group is decomposed into a strong acid such as tert-butyl group or tert-butoxycarbonyl group, it is reacted with a basic compound in the air and inactivated as a result. Decomposition of the instable group is unlikely to occur, and the pattern shape of the resist material tends to be a T-top shape. On the other hand, since alkoxyalkyl groups such as ethoxyethyl groups are decomposed by weak acids, they are less affected by basic compounds in the air, but have the drawback that the pattern shape is significantly narrowed over time from exposure to heat treatment, or the bulk is large in the side chain. Since it has a group, it has a problem that heat resistance falls, or a sensitivity and a resolution cannot be satisfied, and it is the reality that it has not yet reached practical use, and therefore the improvement of these problems is calculated | required.
In addition, the polymer compound disclosed in Japanese Patent Laid-Open No. 96-305025 is intended to improve the above-mentioned problem, and due to the nature of the production method, it is difficult to design substituent ratios of acid labile groups and crosslinking groups, and It has the drawback that it causes the by-product of the crosslinking group described in -253534. That is, in designing the resist composition, a polymer compound having various alkali dissolution rates is required by the selection of an acid generator, an additive, and the addition amount set, and production reproducibility of the polymer compound is required. The method has the drawback that it is inevitably subject to the constraints of the acid labile group and crosslinking group selection and the substituent ratio.
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and particularly when used as a base resin of a chemically amplified positive resist material, it has high sensitivity, high resolution, exposure margin, process adaptability, and reproducibility exceeding conventional resist materials, and is resistant to plasma etching. An object of the present invention is to provide a high molecular compound which provides a chemically amplified positive resist material that is excellent in heat resistance and excellent in heat resistance of a resist pattern, and a chemically amplified positive resist material and a pattern forming method using the polymer compound as a base resin.
MEANS TO SOLVE THE PROBLEM The present inventors earnestly examined in order to achieve the said objective, As a result, the polymer compound which has the terminal which has 1 type, or 2 or more types of acid labile groups obtained by the method mentioned later, or this polymer compound is in a molecule | numerator and / or between molecules. The chemical amplification positive which the high molecular compound bridge | crosslinked by the bridge | crosslinking group which has a COC group in this using this as a base resin, and mix | blended an acid generator, a basic compound, and the aromatic compound which has group represented by ≡C-COOH in a molecule | numerator The type resist material increases the dissolution contrast of the resist film, in particular, increases the dissolution rate after exposure, improves the PED stability of the resist, improves edge roughness on the nitride film substrate, and further formulates an acetylene alcohol derivative to provide applicability and storage stability. Improve resolution, exposure margin, process Discovered that are excellent, highly practical and advantageous for precision microprocessing, it is very effective as a resist material for the second LSI.
That is, the present invention provides the following polymer compound, chemically amplified positive resist material, and pattern forming method.
<Claim 1>
A polymer compound whose terminal is represented by the following Formula 1a and whose weight average molecular weight is 1,000 to 500,000.
<Formula 1a>


In the formula,
R represents a hydroxyl group or an OR ³ group, at least one is a hydroxyl group,
R ¹ represents a hydrogen atom or a methyl group,
R ² represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms,
R ³ represents an acid labile group,
x is 0 or a positive integer, y is a positive integer, and x + y≤5 is a number,
k is 0 or a positive integer, m is 0 or a positive integer, n is a positive integer, and k + m + n ≦ 5,
p and q are positive numbers and are numbers satisfying 0 <q≤0.8 and p + q = 1, and
when n is 2 or more, R ³ may be the same as or different from each other,
Δ is a number having a weight average molecular weight of 1,000 to 500,000,
P is a hydrogen atom, a linear, branched or cyclic alkyl or alkenyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 50 carbon atoms, a carboxyl group, a hydroxyl group, or a group represented by Formula 2, 3 or 4, Not both terminals become hydrogen atoms at the same time,
R ⁴ represents an (r + 1) valence aliphatic hydrocarbon group having 1 to 30 carbon atoms, an alicyclic saturated hydrocarbon group or an aromatic hydrocarbon group having 6 to 50 carbon atoms,
R ⁵ represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 50 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, or a hydroxyl group,
R ^5a represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms or an aromatic hydrocarbon group having 6 to 50 carbon atoms,
h is 0 or 1,
r represents a positive integer of 1 to 3, and also
The phenolic hydroxyl group represented by R of the polymer compound represented by the formula (1a), the hydroxyl group of R ⁵ in the formula (2), and one or two or more hydroxyl groups of the hydroxyl group in the formula (3) are alkenyl ether compounds or halogenated alkyl ethers It may be crosslinked intramolecularly and / or between molecules by a crosslinking group having a COC group obtained by reaction with a compound, and the total amount of the acid labile group and the crosslinking group is represented by the phenolic hydroxyl group of Formula 1a, It is the ratio of the average of more than 0 mol% and 80 mol% or less of the whole hydrogen atom of the hydroxyl group of R <^{5> and} the hydroxyl group in said Formula (3).
<Claim 2>
The polymer compound according to claim 1, represented by the following general formula (5a).
In the formula,
R represents a hydroxyl group or an OR ³ group, at least one is a hydroxyl group,
R ¹ represents a hydrogen atom or a methyl group,
R ² represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms,
R ³ represents an acid labile group,
R ⁹ and R ¹⁰ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms,
R ¹¹ represents a monovalent hydrocarbon group which may have 1 to 18 carbon atoms,
R ⁹ and R ¹⁰ , R ⁹ and R ^11, and R ¹⁰ and R ¹¹ may form a ring, and in the case of forming a ring, R ⁹ , R ¹⁰ and R ¹¹ may be each linear or minute having 1 to 18 carbon atoms. Represents an alkylene group on the ground,
R ¹² represents a C 4-20 tertiary alkyl group, a trialkylsilyl group each having 1 to 6 carbon atoms, an alkyl group having 4 to 20 carbon atoms, or a group represented by -CR ⁹ R ¹⁰ OR ¹¹ ,
a is an integer of 0 to 6,
p1 and p2 are positive, q1 and q2 are zero or positive, 0 <p1 / (p1 + q1 + q2 + p2) ≤0.8, 0≤q1 / (p1 + q1 + q2 + p2) ≤0.8, 0≤q2 /(p1+q1+q2+p2)≤0.8 and p1 + q1 + q2 + p2 = 1, but q1 and q2 do not become 0 at the same time,
x, y, k, m, n, Δ and P are each as defined in claim 1, and
The hydrogen atom of one or two or more hydroxyl groups of the phenolic hydroxyl group represented by R of the polymer compound represented by Formula 5a, the hydroxyl group of R ⁵ in Formula 2, and the hydroxyl group in Formula 3 is separated, and its oxygen atom is It may be crosslinked intramolecularly and / or between molecules by a crosslinking group having a COC group represented by 6aa or 6ba, and the total amount of the acid labile group and the crosslinking group is a phenolic hydroxyl group represented by R of the polymer compound of Formula 5a. And an average of more than 0 mol% and not more than 80 mol% of the total hydrogen atoms of the hydroxyl group of R ⁵ in Formula 2 and the hydroxyl group in Formula 3 above.

(In the meal,
R ⁶ and R ⁷ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms, or R ⁶ and R ⁷ may form a ring, and in the case of forming a ring, R ⁶ and R ⁷ each represents a linear or branched alkylene group having 1 to 8 carbon atoms,
R ⁸ represents a linear, branched or cyclic alkylene group having 1 to 10 carbon atoms,
d is 0 or an integer from 1 to 10,
A represents a c-valent aliphatic or alicyclic saturated hydrocarbon group, aromatic hydrocarbon group or heterocyclic group having 1 to 50 carbon atoms, and these groups may be interrupted by a hetero atom, and a part of the hydrogen atoms bonded to the carbon atom is a hydroxyl group. , May be substituted by a carboxyl group, an acyl group or a halogen atom,
B represents -CO-O-, -NHCO-O- or -NHCONH-,
c is 2 to 8 and c 'is an integer of 1 to 7).
<Claim 3>
According to claim 1 or 2, In the polymer compound represented by the formula (1a) or (5a), R ³ is a group represented by the formula (7a) or 8, a C4-20 tertiary alkyl group, each alkyl group has 1 to 6 carbon atoms 1 or 2 or more types of high molecular compounds selected from an individual trialkyl silyl group and an oxoalkyl group having 4 to 20 carbon atoms.

In the formula,
R ⁹ and R ¹⁰ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms,
R ¹¹ represents a monovalent hydrocarbon group which may have 1 to 18 carbon atoms,
R ⁹ and R ¹⁰ , R ⁹ and R ^11, and R ¹⁰ and R ¹¹ may form a ring, and in the case of forming a ring, R ⁹ , R ¹⁰ and R ¹¹ may be each linear or minute having 1 to 18 carbon atoms. Represents an alkylene group on the ground,
R ¹² represents a C4-20 tertiary alkyl group, a trialkylsilyl group each having 1 to 6 carbon atoms, an alkyl group having 4 to 20 carbon atoms, or a group represented by Formula 7a.
a is an integer of 0-6.
<Claim 4>
The polymer compound according to claim 2, wherein the crosslinking group having a C-O-C group represented by Formula 6aa or 6ba is represented by the following Formula 6ab or 6bb.

In the formula,
R ⁶ and R ⁷ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms, or R ⁶ and R ⁷ may form a ring, and when forming a ring, R ⁶ and R ⁷ represents a linear or branched alkylene group having 1 to 8 carbon atoms,
R ⁸ represents a linear, branched or cyclic alkylene group having 1 to 10 carbon atoms,
d is 0 or an integer of 1 to 5,
A represents a linear, branched or cyclic alkylene group having 1 to 20 carbon atoms, an alkyltriyl group, an alkyl tetrayl group and an arylene group having 6 to 30 carbon atoms, and these groups may be interrupted by a hetero atom. Some of the hydrogen atoms bonded to the carbon atoms thereof may be substituted by hydroxyl groups, carboxyl groups, acyl groups or halogen atoms,
B represents -CO-O-, -NHCO-O- or -NHCONH-,
c "is 2-4, c" 'is an integer of 1-3.
<Claim 5>
(A): organic solvent
(B): The polymer compound according to any one of claims 1 to 4 as the base resin.
(C): acid generator
A chemically amplified positive resist material comprising a.
<Claim 6>
The hydrogen atom of the phenolic hydroxyl group of the high molecular compound which has a repeating unit represented by following formula (D): (D): (B) component as base resin separately, The 1 or 2 or more types of acid labile groups A chemically amplified positive resist material, further comprising a polymer compound having a weight average molecular weight of 3,000 to 300,000 partially substituted at an average of 0 mol% or more and 80 mol% or less as a whole.
In the formula,
R ¹ represents a hydrogen atom or a methyl group,
R ² represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms,
R ⁹ and R ¹⁰ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms,
R ¹¹ represents a monovalent hydrocarbon group which may have 1 to 18 carbon atoms,
R ⁹ and R ¹⁰ , R ⁹ and R ^11, and R ¹⁰ and R ¹¹ may form a ring, and in the case of forming a ring, R ⁹ , R ¹⁰ and R ¹¹ may be each linear or minute having 1 to 18 carbon atoms. Represents an alkylene group on the ground,
R ¹² is an acid labile group, different from -CR ⁹ R ¹⁰ OR ¹¹ ,
e and f are zero or positive, g is positive, e + f + g = 1, 0 ≦ e / (e + f + g) ≦ 0.5, 0.4 ≦ g / (e + f + g) ≦ 0.9 , Also
The phenolic hydroxyl group of the high molecular compound represented by the formula (9) may be crosslinked in the molecule and / or between molecules by a crosslinking group having a COC group obtained by reaction with an alkenylether compound or a halogenated alkyl ether, and the acid The total amount of the unstable group and the crosslinking group is an average of more than 0 mol% and no more than 80 mol% of the total hydrogen atoms of the phenolic hydroxyl group when e = 0, f = 0 and g = 1 in the formula (9).
<Claim 7>
(E): The chemically amplified positive resist material according to claim 5 or 6, further comprising a dissolution control agent.
<Claim 8>
(F): A chemically amplified positive resist material according to claim 5, further comprising a basic compound as an additive.
<Claim 9>
The chemically amplified positive resist material according to claim 5, further comprising (G) an aromatic compound having a group represented by ≡C-COOH in the molecule as an additive.
<Claim 10>
(H): A chemically amplified positive resist material according to claim 5, further comprising a ultraviolet absorber.
<Claim 11>
The chemically amplified positive resist material according to claim 5, further comprising (I): an acetylene alcohol derivative.
<Claim 12>
(i) applying the chemically amplified positive resist material according to any one of claims 5 to 11 onto a substrate,
(ii) subsequent heat treatment followed by exposure to high energy or electron beams having a wavelength of 300 nm or less via a photomask; and
(iii) The pattern formation method characterized by including the process of developing using a developing solution after heat-processing as needed.
The high molecular compound of this invention is characterized by having the polymer terminal of a polyhydroxy styrene derivative. When it mix | blends with a chemically amplified positive resist material as a base resin, the performance improves compared with the conventional base resin by the end group effect of a polymer. For example, environmental stability improves by making a terminal into a carboxylic acid. Moreover, by using alcohol, hydrophilicity can be provided and adhesiveness with a board | substrate can be improved. Moreover, the dissolution rate of an overexposed part improves compared with the conventional base resin, and the alkali dissolution rate contrast before and behind exposure becomes significantly high.
In addition, the polymer end groups can be crosslinked by a crosslinking group having a COC group like the side chain, and in this case, since the ends of the polyhydroxystyrene are crosslinked linearly, the dissolution rate of the overexposed portion is higher than that of the conventional base resin. It is further improved, and the alkali dissolution rate contrast before and after exposure is greatly increased.
In addition, in the case of the polymer in which the alkoxyalkyl group is added to the side chain of the phenolic hydroxyl group alone, the desorption reaction proceeds by weak acid, so that it is difficult to form a T-top, but since it is sensitive to acid as described above, it is heated under exposure. There is a drawback that the shape of the pattern is significantly narrowed over time. Moreover, since the dissolution inhibiting effect with respect to alkali is low, in order to obtain a dissolution contrast, a high substitution body must be used and it has a drawback that heat resistance is lacking. On the other hand, in the case of a polymer in which the side chain of the phenolic hydroxyl group is protected with tert-butoxycarbonyl group, blending it with a resist material improves alkali dissolution preventing property, and has a merit that dissolution contrast can be obtained at low substitution rate or heat resistance is good. However, in order to desorb and become alkali-soluble, an acid generator for generating a strong acid such as trifluoromethanesulfonic acid is required, and if such an acid is used, it has a drawback that it is easy to become a T-top shape as described above.
One or two or more hydroxyl groups and alkenyl ether compounds of a polymer compound having a terminal as described above for such a polymer, or a phenolic hydroxyl group of the polymer compound, a hydroxyl group of R ⁵ in Formula 2 and a hydroxyl group in Formula 3 Or a resist material using a polymer compound crosslinked intramolecularly and / or between molecules by a crosslinking group having a COC group obtained by reaction with a halogenated alkyl ether compound has a disadvantage of low heat resistance in a polymer in which side chains are protected by acetal groups, The drawback of the easy formation of a T-top shape in a polymer protected by a tert-butoxycarbonyl group is eliminated.
On the other hand, in the case of the polymer compound which is crosslinked by a crosslinking group having an acid labile COC group and protected by an acid labile group as an effect of the polymer compound used in the chemically amplified positive resist material of the present invention, the unexposed part of the resist film Although the weight average molecular weight and the solubility to an alkaline developing solution do not change, the weight average molecular weight of a resist film exposure part undergoes decomposition | disassembly by the acid which generate | occur | produced, and is again protected by a crosslinking group and an acid labile group with desorption of an acid labile group Since it returns to the weight average molecular weight of previous alkali-soluble base resin, since an alkali dissolution rate greatly increases compared with an unexposed part, dissolution contrast can be raised and consequently high resolution can be achieved. In particular, as the polymer terminal crosslinks, the dissolution rate of the overexposed portion is further improved as described above, and the alkali dissolution rate before and after exposure is significantly increased.
In addition, when a crosslinking group having a COC group is decomposed by an acid, an alcohol compound (diol, triol, polyol compound, etc.) is produced, but the hydrophilic group improves the affinity with the alkaline developer and consequently achieves high resolution. have.
In designing the resist composition, a polymer compound having various alkali dissolution rates is required by selecting an acid generator, an additive, and setting the amount of addition, and reproducibility of the polymer compound is required. By using it, it is possible to design without the constraint of an acid labile group and crosslinking group selection, and a substituent ratio.
In other words, the chemically amplified positive resist material using the polymer compound as the base resin tends to have a T-top shape, a narrow pattern shape, and a lack of heat resistance. It is possible to increase the height, and as a result, it is possible to arbitrarily perform the dimensional control of the pattern and the shape control of the pattern by the composition at the same time, resulting in a chemically amplified positive resist material with excellent process adaptability and reproducibility.
Hereinafter, the present invention will be described in more detail, the novel polymer compound of the present invention is a polymer compound having a terminal having one or two or more acid labile groups, or the polymer compound further has a COC group in the molecule and / or between molecules It is the high molecular weight molecular weight 1,000-500,000 high molecular compound bridge | crosslinked by the crosslinking group which has.
The polymer compound has a repeating unit represented by the following Chemical Formula 1b, and is represented by the following Chemical Formula 1a having a terminal of the following P.
<Formula 1a>
<Formula 2>
<Formula 3>
<Formula 4>
In the formula,
R represents a hydroxyl group or an OR ³ group, at least one is a hydroxyl group,
R ¹ represents a hydrogen atom or a methyl group,
R ² represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms,
R ³ represents an acid labile group,
x is 0 or a positive integer, y is a positive integer and is a number that satisfies x + y ≦ 5,
k is 0 or a positive integer, m is 0 or a positive integer, n is a positive integer and k + m + n≤5,
p and q are positive numbers and are numbers satisfying 0 <q≤0.8, p + q = 1,
when n is 2 or more, R ³ may be the same as or different from each other,
Δ is a number having a weight average molecular weight of 1,000 to 500,000,
P is a hydrogen atom, a linear, branched or cyclic alkyl or alkenyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 50 carbon atoms, a carboxyl group, a hydroxyl group, or a group represented by the following formula (2), (3) or (4): All the terminals do not become hydrogen atoms at the same time,
R ⁴ represents an (r + 1) valence aliphatic hydrocarbon group having 1 to 30 carbon atoms, an alicyclic saturated hydrocarbon group or an aromatic hydrocarbon group having 6 to 50 carbon atoms,
R ⁵ represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 50 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, or a hydroxyl group,
R ^5a represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms or an aromatic hydrocarbon group having 6 to 50 carbon atoms,
h is 0 or 1,
r represents a positive integer of 1 to 3, and also
The phenolic hydroxyl group represented by R of the polymer compound represented by the formula (1a), the hydroxyl group of R ⁵ in the formula (2), and one or two or more hydroxyl groups of the hydroxyl group in the formula (3) are alkenyl ether compounds or halogenated alkyl ethers It may be crosslinked intramolecularly and / or between molecules by a crosslinking group having a COC group obtained by reaction with a compound, and the total amount of the acid labile group and the crosslinking group is represented by the phenolic hydroxyl group of Formula 1a, It is the ratio of the average of more than 0 mol% and 80 mol% or less of the whole hydrogen atom of the hydroxyl group of R <^{5> and} the hydroxyl group in said Formula (3).
Here, R represents a hydroxyl group or OR ³ , but at least one of R is a hydroxyl group. R ¹ represents a hydrogen atom or a methyl group, R ² represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms, preferably 1 to 15 carbon atoms, more preferably 1 to 8 carbon atoms, Examples of the branched or cyclic alkyl group include methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group, cyclohexyl group and cyclopentyl group. R ³ is an acid labile group. In addition, although x is 0 or a positive integer and y is a positive integer and satisfy | fills x + y <= 5, it is preferable that y is 1-3, especially 1-2. k is 0 or a positive integer, m is 0 or a positive integer, n is a positive integer, it satisfies k + m + n <= 5, n is 1-2, and m is 0-1. . In addition, when n is two or more, R <^3> may mutually be same or different. p and q are positive, and 0 <q≤0.8 and p + q = 1.
P is a hydrogen atom, 1 to 30 carbon atoms, preferably 1 to 15 carbon atoms, more preferably 1 to 8 linear, branched or cyclic alkyl groups, 6 to 50 carbon atoms, preferably 6 to 30 carbon atoms More preferably, 6 to 20 aromatic hydrocarbon groups, carboxyl groups, hydroxyl groups or the groups represented by the above formulas (2), (3) or (4), but not all of the end groups P simultaneously become hydrogen atoms.
Here, as the linear, branched or cyclic alkyl group or alkenyl group, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, sec-butyl group, tert-butyl group, pentyl group , Hexyl group, octyl group, nonanyl group, decyl group, undecyl group, dodecyl group, tridecyl group, pentadecyl group, heptadecyl group, nonadecyl group, docosanyl group, heptacosanyl group, 2,2-dimethylbutyl Group, 2,3-dimethylbutyl group, 2,2,3-trimethylbutyl group, hexamethylethyl group, decahydronaphthyl group, cyclohexyl group, dicyclohexyl group, norbornyl group, norfinyl group, adamantyl group, 1, 3- dimethyl adamantyl group, cyclopentyl group, vinyl group, allyl group, butenyl group, hexenyl group, cyclohexenyl group, etc. are mentioned.
Examples of the aromatic hydrocarbon group include a phenyl group, benzyl group, tert-butylbenzyl group, diphenyl group, triphenyl group, naphthyl group, anthranyl group, 1,2,3-tripentylbenzyl group and hexapentylbenzyl group.
Examples of the (r + 1) valent aliphatic hydrocarbon group or alicyclic saturated hydrocarbon group for R ⁴ include methylene group, ethylene group, n-propylene group, isopropylene group, n-butylene group, isobutylene group, sec-butylene group and tert- Butylene group, pentylene group, hexylene group, octylene group, nonanilene group, decylene group, undecylene group, dodecylene group, tridecylene group, pentadecylene group, heptadecylene group, nonadecylene group, doco Sanylene group, heptacosanylene group, 2,2-dimethylbutylene group, 2,3-dimethylbutylene group, 2,2,3-trimethylbutylene group, hexamethylethylene group, decahydronaphthalene group, cyclohexavinylene group, cyclo One or two hydrogen atoms from the hexylene group, the cyclohexenylene group, the dicyclohexylene group, the norbornylene group, the adamantylene group, the 1,3-dimethyladamantylene group, the cyclopentylene group, and groups thereof Trivalent, tetravalent groups, etc. that occur apart from the dog.
Examples of the (r + 1) valent aromatic hydrocarbon group for R ⁴ include a phenylene group, a benzylene group, a tert-butylbenzylene group, a diphenylene group, a triphenylene group, a naphthylene group, an anthranilene group, and 1,2,3-tripentylbenzyl And trivalent and tetravalent groups in which one or two hydrogen atoms are separated from the ethylene group, the hexapentyl benzylene group and these groups.
Examples of the linear, branched or cyclic alkyl group or aromatic hydrocarbon group for R ⁵ include the same groups as described above. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, an n-butoxy group and an isobutoxy group. Period, sec-butoxy group, tert-butoxy group, pentyloxy group, hexyloxy group, octyloxy group, nonanyloxy group, decyloxy group, undecyloxy group, dodecyloxy group, tridecyloxy group, pentadecyloxy group, Heptadecyloxy group, nonadecyloxy group, docosanyloxy group, heptacosanyloxy group, 2,2-dimethylbutoxy group, 2,3-dimethylbutoxy group, 2,2,3-trimethylbutoxy group, hexamethyl Oxy group, cyclohexyloxy group, decahydronaphthyloxy group, dicyclohexyloxy group, norbornyloxy group, norpinyloxy group, adamantyloxy group, 1,3-dimethyladamantyloxy group, cyclopentyloxy group, etc. Can be mentioned.
Although various kinds are selected as the acid labile group of R ³ , in particular, a group represented by the following general formula (7a) or (8), a C4-20 tertiary alkyl group, a trialkylsilyl group having 1 to 6 carbon atoms each, and a C4 group It is preferable that they are from 20 to 20 oxoalkyl groups.
<Formula 7a>
<Formula 8>
In the formula,
R ⁹ and R ¹⁰ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms,
R ¹¹ represents a monovalent hydrocarbon group which may have 1 to 18 carbon atoms,
R ⁹ and R ¹⁰ , R ⁹ and R ^11, and R ¹⁰ and R ¹¹ may form a ring, and in the case of forming a ring, R ⁹ , R ¹⁰ and R ¹¹ may each have 1 to 18 carbon atoms. Terrestrial or cyclic alkylene groups,
R ¹² represents a C4-20 tertiary alkyl group, a trialkylsilyl group each having 1 to 6 carbon atoms, an alkyl group having 4 to 20 carbon atoms, or a group represented by Formula 7a.
a is an integer of 0-6.
Examples of the linear, branched or cyclic alkyl group having 1 to 8 carbon atoms of R ⁹ and R ¹⁰ include the same groups as described for R ² .
As R ¹¹ , an unsubstituted or substituted aryl group, benzyl group, phenethyl group, such as an alkoxy substituted phenyl group such as linear, branched or cyclic alkyl group, phenyl group, p-methylphenyl group, p-ethylphenyl group, p-methoxyphenyl group, etc. Aralkyl groups and the like, and groups such as an alkyl group represented by the following formula wherein an oxygen atom in these groups, a hydrogen atom bonded to a carbon atom is substituted with a hydroxyl group, or two hydrogen atoms are substituted with an oxygen atom to form a carbonyl group Can be.
^Examples of tertiary alkyl groups of R ¹² include tert-butyl group, 1-methylcyclohexyl group, 2- (2-methyl) adamantyl group, tert-amyl group and the like.
Examples of the trialkylsilyl group for R ¹² include those having 1 to 6 carbon atoms in each alkyl group such as trimethylsilyl group, triethylsilyl group, and dimethyl-tett-butylsilyl group.
As an oxoalkyl group of R <^12> , a 3-oxocyclohexyl group is a general formula The group represented by is mentioned.
As the acid labile group represented by the formula (7a), for example, 1-methoxyethyl group, 1-ethoxyethyl group, 1-n-propoxyethyl group, 1-isopropoxyethyl group, 1-n-butoxyethyl group , 1-isobutoxyethyl group, 1-sec-butoxyethyl group, 1-tert-butoxyethyl group, 1-tert-amyloxyethyl group, 1-ethoxy-n-propyl group, 1-cyclohexyloxyethyl group, methoxy Linear or branched acetal groups such as propyl group, ethoxypropyl group, 1-methoxy-1-methyl-ethyl group, 1-ethoxy-1-methyl-ethyl group, tetrahydrofuranyl group, tetrahydropyranyl group, etc. A cyclic acetal group etc. are mentioned, Preferably, an ethoxy ethyl group, butoxy ethyl group, an ethoxy propyl group is mentioned. On the other hand, as the acid labile group of formula (8), for example, tert-butoxycarbonyl group, tert-butoxycarbonylmethyl group, tert-amyloxycarbonyl group, tert-amyloxycarbonylmethyl group, 1-ethoxyethoxycarbonylmethyl group , 2-tetrahydropyranyloxycarbonylmethyl group, 2-tetrahydrofuranyloxycarbonylmethyl group, etc. are mentioned.
The polymer compound whose terminal represented by the formula (1a) of the present invention is P is a phenolic hydroxyl group represented by its R, a hydroxyl group of R ⁵ in formula (2), and one or two or more hydroxyl groups in the hydroxyl group in formula (3) will be described later. It may be crosslinked intramolecularly and / or between molecules by a crosslinking group having a COC group obtained by reaction with an alkenylether compound or a halogenated alkylether compound.
The total amount of the acid labile group and the crosslinking group is an average of more than 0 mol% and not more than 80 mol% of the total hydrogen atoms of the phenolic hydroxyl group of Formula 1a, the hydroxyl group of R ⁵ in Formula 2 and the hydroxyl group in Formula 3 .
As a crosslinking group which has the said C-O-C group, group represented by following formula (6aa) or 6ba, Preferably group represented by following formula (6ab) or 6bb is mentioned.
<Formula 6aa>
<Formula 6ba>
(In the meal,
R ⁶ and R ⁷ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms, or R ⁶ and R ⁷ may form a ring, and in the case of forming a ring, R ⁶ and R ⁷ each represents a linear or branched alkylene group having 1 to 8 carbon atoms,
R ⁸ represents a linear, branched or cyclic alkylene group having 1 to 10 carbon atoms,
d is 0 or an integer from 1 to 10,
A represents a c-valent aliphatic or alicyclic saturated hydrocarbon group, aromatic hydrocarbon group or heterocyclic group having 1 to 50 carbon atoms, and these groups may be interrupted by a hetero atom, and a part of the hydrogen atoms bonded to the carbon atom is a hydroxyl group. , May be substituted by a carboxyl group, an acyl group or a halogen atom,
B represents -CO-O-, -NHCO-O- or -NHCONH-,
c is 2 to 8 and c 'is an integer of 1 to 7).
<Formula 6ab>
<Formula 6bb>
(In the meal,
R ⁶ and R ⁷ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms, or R ⁶ and R ⁷ may form a ring, and when forming a ring, R ⁶ and R ⁷ each represents a linear or branched alkylene group having 1 to 8 carbon atoms,
R ⁸ represents a linear, branched or cyclic alkylene group having 1 to 10 carbon atoms,
d is 0 or an integer of 1 to 5,
A represents a linear, branched or cyclic alkylene group having 1 to 20 carbon atoms, an alkyltriyl group, an alkyl tetrayl group and an arylene group having 6 to 30 carbon atoms, and these groups may be interrupted by a hetero atom. Some of the hydrogen atoms bonded to the carbon atoms thereof may be substituted by hydroxyl groups, carboxyl groups, acyl groups or halogen atoms,
B represents -CO-O-, -NHCO-O- or -NHCONH-,
c "is 2 to 4, c" 'is an integer of 1-3.)
Here, as a C1-C8 linear, branched or cyclic alkyl group, the thing similar to what was mentioned above can be illustrated.
Examples of the linear, branched or cyclic alkylene group having 1 to 10 carbon atoms of R ⁸ include methylene group, ethylene group, propylene group, isopropylene group, n-butylene group, isobutylene group, cyclohexylene group, cyclopentylene group and the like. Can be mentioned.
Moreover, a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom are mentioned as a halogen atom.
In addition, the specific example of A is mentioned later. These crosslinking groups 6aa and 6ba are derived from the alkenyl ether compound and halogenated alkyl ether compound described later.
The bridging group may be a trivalent to octavalent group, without being limited to divalent, as is apparent from the values of c ′ in Formulas 6aa and 6ba. For example, as a bivalent crosslinking group, what is represented by following formula (6ad) and 6bd as a following formula (6ac) and 6bc and a trivalent crosslinking group is mentioned.


Examples of the crosslinked polymer compound according to the present invention include a polymer compound represented by the following general formula (5a) having a repeating unit represented by the following general formula (5b) as a specific example, and the terminal is P, particularly a phenolic hydroxyl group represented by R of this high molecular compound; (Or) Intramolecular and / or between molecules by a crosslinking group having a hydrogen atom of a hydroxyl group of R ⁵ in formula (2) and / or a hydroxyl group in formula (3) and its oxygen atom having a COC group represented by formula (6aa) or (6ba). A high molecular compound bridge | crosslinked is mentioned.
<Formula 5a>
In the formula,
R represents a hydroxyl group or an OR ³ group, at least one is a hydroxyl group,
R ¹ represents a hydrogen atom or a methyl group,
R ² represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms,
R ³ represents an acid labile group,
R ⁹ and R ¹⁰ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms,
R ¹¹ represents a monovalent hydrocarbon group which may have 1 to 18 carbon atoms,
R ⁹ and R ¹⁰ , R ⁹ and R ^11, and R ¹⁰ and R ¹¹ may form a ring, and in the case of forming a ring, R ⁹ , R ¹⁰ and R ¹¹ may each have 1 to 18 carbon atoms. Terrestrial or cyclic alkylene groups,
R ¹² represents a C 4-20 tertiary alkyl group, a trialkylsilyl group each having 1 to 6 carbon atoms, an alkyl group having 4 to 20 carbon atoms, or a group represented by -CR ⁹ R ¹⁰ OR ¹¹ ,
a is an integer of 0 to 6,
p1 and p2 are positive, q1 and q2 are zero or positive, 0 <p1 / (p1 + q1 + q2 + p2) ≤0.8, 0≤q1 / (p1 + q1 + q2 + p2) ≤0.8, 0≤q2 /(p1+q1+q2+p2)≤0.8 and p1 + q1 + q2 + p2 = 1, but q1 and q2 do not become 0 at the same time,
x, y, k, m, n, Δ, and P each represent the same meaning as above, and
p1 + p2 = p and q1 + q2 = q.
Here, specific examples, preferred ranges of R, R ¹ to R ³ , R ⁹ to R ¹² , x, y, k, m, n, a, and P are as described above. Also, p1 and p2 are positive, q1 and q2 are zero or positive, and 0 <p1 / (p1 + q1 + q2 + p2) ≦ 0.8, 0 ≦ q1 / (p1 + q1 + q2 + p2) ≦ 0.8, 0 Q2 / (p1 + q1 + q2 + p2) ≦ 0.8 and p1 + q1 + q2 + p2 = 1, but q1 and q2 do not become 0 at the same time.
More preferably, the values of p1, p2, q1, q2 are
In addition, q1 / (q1 + q2) is 0-1, More preferably, it is 0.5-1, More preferably, it is 0.7-1.
In this polymer compound, the total amount of the acid labile group and the crosslinking group is more than 0 mol% and 80 mol% of the total phenolic hydroxyl group of Formula 5a, the hydroxyl group of R ⁵ in Formula 2, and the hydroxyl group of the hydroxyl group in Formula 3 It is the following ratio.
As an example of this high molecular compound, what has a repeating unit represented with the following general formula (5c)-5i, and whose terminal is P is mentioned.



However, in the formula, h is 0 or 1, y is an integer of 1 to 3, U ₁ , U ₂ and U ₃ each represent the following units.
In addition, P is a hydrogen atom, a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 50 carbon atoms, a carboxyl group, a hydroxyl group, or a group represented by the formula (2), (3) or (4). Not all of them become hydrogen atoms at the same time. Q is a crosslinking group having a C—O—C group, typically a crosslinking group represented by the above formulas 6aa or 6ba, in particular a crosslinking group represented by the formulas 6ac, 6bc and 6ad, 6bd, preferably 6ab or 6bb. In addition, when the crosslinking group is trivalent or more, Q is bonded to three or more of the following units in Chemical Formula 5a.
In addition, the chemical formulas 5d and 5g represent intramolecular binding states, and others represent intermolecular binding states, and these may each be alone or mixed.
The polymer compound in the case of crosslinking of the present invention is reacted with a phenolic hydroxyl group and / or a hydroxyl group of R ⁵ in formula (2) and / or a hydroxyl group in formula (3) with an alkenylether compound or a halogenated alkyl ether. It is crosslinked by the crosslinking group which has COC group in the molecule | numerator and / or molecule | numerator obtained, In this case, as mentioned above, the total amount of an acid labile group and a crosslinking group is a phenolic hydroxyl group of Formula 1a, and / or It is preferred that the average of the hydroxyl groups of R ⁵ and / or the hydroxyl groups in the general formula (3) is more than 0 mol%, not more than 80 mol%, in particular 2 to 50 mol%.
In this case, the proportion of the crosslinking group having a C—O—C group is preferably more than 0 mol%, not more than 80 mol%, especially 0.2 to 20 mol%. When it becomes 0 mol%, the advantage of a crosslinking group cannot be brought out, the contrast of an alkali dissolution rate may become small, and resolution may deteriorate. On the other hand, when it exceeds 80 mol%, it crosslinks too much and gels, solubility with respect to alkali will disappear, a film thickness change and stress or bubble generate | occur | produce at the time of alkali development, or hydrophilic group will become low, and adhesiveness with a board | substrate is inferior There is a case.
Furthermore, the proportion of acid labile groups is preferably above 0 mol%, up to 80 mol%, in particular from 10 to 50 mol%. When it becomes 0 mol%, the contrast of alkali dissolution rate will become small and the resolution will deteriorate. On the other hand, when it exceeds 80 mol%, the solubility to an alkali may disappear, or affinity with a developing solution at the time of alkali development may fall, and resolution may be inferior.
In addition, the crosslinking group and acid labile group which has C-O-C group can arbitrarily perform dimension control of a pattern and shape control of a pattern by selecting the value suitably within the said range. The content of the cross-linking group and acid labile group having a C-O-C group in the polymer compound of the present invention affects the dissolution rate contrast of the resist film and relates to resist material properties such as pattern dimension control and pattern shape.
The polymer compound according to the present invention needs to have a weight average molecular weight of 1,000 to 500,000, preferably 3,000 to 50,000, respectively. This is because if the weight average molecular weight is less than 1,000, the heat resistance of the resist material is inferior, and if it exceeds 500,000, alkali solubility is lowered and resolution is deteriorated.
In addition, when the molecular weight distribution (Mw / Mn) of the base resin before crosslinking in the polymer compound according to the present invention is wide, it is difficult to design the crosslinked water because a polymer having a low molecular weight and a high molecular weight exists, and a resist material having the same performance It may be difficult to manufacture. Therefore, as the pattern rule becomes finer, the influence of such molecular weight and molecular weight distribution tends to be large, so that the molecular weight distribution is preferably 1.0-1.5, particularly 1.0-1.3, in order to obtain a resist material which is preferably used for fine pattern dimensions. . However, it is not limited to these, Of course, it is also possible to use the thing whose molecular weight distribution is larger than 1.5.
As a method for producing a polymer compound in the case of crosslinking according to the present invention, for example, an acid labile group represented by Formula 7a is introduced into an phenolic hydroxyl group of a polymer compound having a repeating unit represented by Formula 1b, and isolated. , By a crosslinking group having a COC group in the molecule and / or between the molecules by reaction with an alkenylether compound or a halogenated alkylether compound, or by a reaction with an alkenylether compound or a halogenated alkylether compound Crosslinking and isolation by a group represented by COC in and / or between molecules, and then introducing an acid labile group represented by formula (7a), or reaction with an alkenylether compound or halogenated alkylether compound to formula (7a) The method of carrying out the introduction of the acid labile group displayed collectively is mentioned. The method of performing the introduction of the acid labile groups represented by the alkenyl ether compound of formula 7a or reaction with a halogenated alkyl ether compound in bulk are preferred. In addition, an acid labile group, tertiary alkyl group, trialkylsilyl group, oxoalkyl group or the like represented by the formula (8) can also be introduced into the polymer compound thus obtained as necessary.
In addition, the terminal of the polymer compound having a repeating unit represented by the formula (1b) is a hydrogen atom, a linear, branched or cyclic alkyl group or alkenyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 50 carbon atoms, a carboxyl group, a hydroxyl group or In order to have the group represented by General formula (2), (3) or (4), it can synthesize | combine by changing the terminating agent of normal living anion polymerization into various terminators. For example, when the terminal of a high molecular compound is a hydrogen atom, water or alcohol etc. are used as a terminator, and when it is a C1-C30 linear, branched or cyclic alkyl group, methyl iodide and bromination are used as a terminator. Alkyl halides, such as ethyl and butyl bromide, can be used, and when it is set as an aromatic hydrocarbon group, halogenated aromatic hydrocarbon groups, such as 4-chlorobenzene, chlorobenzyl, 4-naphthalene bromide, 4-chlorobiphenyl, anthracene bromide, can be used. In addition, when making the terminal of a high molecular compound into a carboxyl group, carbonic acid etc. can be used as a terminator, and in the case of a hydroxyl group, the combination of trimethoxy borane and hydrogen peroxide can be used as a terminator.
When the terminal of the high molecular compound is a group represented by the formula (2), as a terminator, methylcarbonyl chloride, methoxycarbonyl chloride, ethoxycarbonyl chloride, butoxycarbonyl chloride, cyclopropanecarbonyl chloride, 1-a Tantanyl carbonyl chloride, cyclohexanecarbonyl chloride, benzyloxycarbonyl chloride, methylcarbonylmethyl chloride, methoxycarbonylethyl chloride, tert-butoxycarbonylmethyl chloride, butoxycarbonylbenzyl chloride, cyclohexyl jade Cycarbonyl chloride, cyclopentanecarbonyl chloride, cyclopentanecarbonylmethyl chloride, 1-adamantanecarbonylhexyl chloride, cyclohexanecarbonylmethyl chloride, benzyloxycarbonyl chloride and the like can be used.
In the case of using a group represented by the formula (3), as a terminator, ethylene oxide, propylene oxide, styrene oxide, chloromethyl vinyl ether, 2-chloroethyl vinyl ether, 2-bromoethyl vinyl ether, methyl ethyl ketone, and cyclohexanone , Pentanone, 3-acetylnoradamantane, formaldehyde, acetaldehyde, trimethylaldehyde, methyl formate, methyl acetate and the like can be used.
In the case of using the group represented by the formula (4), chloromethyl methyl ether, 2-bromoethyl methyl ether, chloromethyl octyl ether, chloromethylcyclohexyl ether, chloromethylbenzyl ether and the like can be used as a terminator.
In this case, the addition amount of the terminator is preferably at least equimolar to the initiator.
Next, the method for producing the crosslinked polymer compound will be described in detail. As a first method, a polymer compound having a repeating unit represented by the general formula (1c) and having a terminal P is represented by the following general formula (I) or (II). And a method of using a compound represented by the following formula (7b), a second compound having a repeating unit represented by the formula (1c), and having a terminal P, and a halogenated alkyl ether compound represented by the following formula (VII or VIII) The method of using the compound represented by 7c is mentioned.
<First method>

Here, R ¹ , R ² , R ⁸ , R ⁹ , x, y, p1, p2, q1 and q2 have the same meanings as above and p1 + p2 + q1 + q2 = 1. In addition, R <^5> and R <^6> represents the same meaning as the above, R <^9a> and R <^6a> represent a hydrogen atom or a C1-C7 linear, branched or cyclic alkyl group.
In addition, in the vinyl ether compound represented by the formula (I) or (II), A represents an aliphatic or alicyclic saturated hydrocarbon group, aromatic hydrocarbon group or heterocyclic group having 1 to 50 carbon atoms of c is (c represents 2 to 8), These groups may be interrupted by a hetero atom, and a part of the hydrogen atoms bonded to their carbon atoms may be substituted by hydroxyl groups, carboxyl groups, acyl groups or halogen atoms. B represents -CO-O-, -NHCO-O- or -NHCONH-, and d represents 0 or an integer of 1 to 10.
Specifically, the c-valent hydrocarbon group of A is preferably an unsubstituted or hydroxyl group containing 1 to 50 carbon atoms, especially 1 to 40 carbon atoms, and heteroatoms such as O, NH, N (CH ₃ ), S, and SO ₂ . , An alkylene group substituted with a carboxyl group, an acyl group or a fluorine atom, preferably an arylene group having 6 to 50 carbon atoms, especially 6 to 40 carbon atoms, a group having an alkylene group and an arylene group bonded thereto, Examples of the c '' valence (c '' is an integer of 3 to 8) from which the hydrogen atom has been removed include a cvalent heterocyclic group, a group in which the heterocyclic group and the hydrocarbon group are bonded, and the like.
Specifically, the following can be mentioned as A. FIG.

Compounds represented by formula I are described, for example, in Stephen. C. Lapin, Polymers Paint Color Journal. 179 (4237), 321 (1988)], that is, the reaction of polyhydric alcohol or polyhydric phenol with acetylene, or the reaction of polyhydric alcohol or polyhydric phenol with halogenated alkylvinyl ether.
Specific examples of the compound of the formula (I) include ethylene glycol divinyl ether, triethylene glycol divinyl ether, 1,2-propanediol divinyl ether, 1,3-propanedioldivinyl ether, 1,3-butanedioldivinyl ether, 1,4-butanediol divinyl ether, (tetramethylene glycol divinyl ether), neopentyl glycol divinyl ether, trimethylol propane trivinyl ether, trimethylol ethane trivinyl ether, hexanediol divinyl ether, 1,4-cyclo Hexanediol divinyl ether, 1,4-divinyloxymethylcyclohexane, tetraethylene glycol divinyl ether, pentaerythritol divinyl ether, pentaerythritol trivinyl ether, pentaerythritol tetravinyl ether, sorbitol tetravinyl ether, Sorbitol pentavinyl ether, ethylene glycol diethylene vinyl ether, triethylene glycol diethylene vinyl ether, ethylene glycol dipropylene vinyl ether, triethylene glycol di Tylene vinyl ether, trimethylol propane triethylene vinyl ether, trimethylol propane diethylene vinyl ether, pentaerythritol diethylene vinyl ether, pentaerythritol triethylene vinyl ether, pentaerythritol tetraethylene vinyl ether and the following general formula (I-1) Although the compound represented by I-31 is mentioned, It is not limited to these.




In addition, when B is -CO-O-, the compound represented by the said Formula (II) can be manufactured by reaction of polyhydric carboxylic acid and a halogenated alkylvinyl ether. Specific examples of the compound represented by the formula (II) when B is -CO-O- include terephthalate diethylene vinyl ether, diethylene vinyl phthalate, diethylene vinyl ether isophthalate, dipropylene vinyl ether and terephthalate dipropylene vinyl ether. Isophthalic acid dipropylene vinyl ether, diethylene vinyl ether maleate, diethylene vinyl ether fumarate, diethylene vinyl ether itaconic acid, and the like, but is not limited thereto.
Moreover, as an alkenyl ether group containing compound used preferably by this invention, the alkenyl ether synthesize | combined by reaction of the alkenyl ether compound which has an active hydrogen represented by following formula (III), IV, or V and the compound which has an isocyanate group is synthesized. A group containing compound is mentioned.

(In formula, R <^6a> , R <^7> , R <^8> represents the same meaning as the above.)
As a method for obtaining the compound represented by the above formula (II) when B is -NHCO-O- or -NHCONH-, for example, a compound having an isocyanate group described in the crosslinker handbook (published by Daisei Co., 1981) can be used. have. Specifically, triphenylmethane triisocyanate, diphenylmethane diisocyanate, tolylene diisocyanate, dimer of 2,4-tolylene diisocyanate, naphthalene-1,5-diisocyanate, o-tolylene diisocyanate, polymethylene polyphenyl isocyanate Polyisocyanate types such as polyisocyanate types such as hexamethylene diisocyanate, adducts of tolylene diisocyanate and trimethylolpropane, adducts of hexamethylene diisocyanate and water, adducts of xylene diisocyanate and trimethylolpropane, and the like. Can be. By reacting the isocyanate group-containing compound with the active hydrogen-containing alkenylether compound, various compounds having an alkenylether group at the terminal can be made. Examples of such compounds include those represented by the following formulas II-1 to II-11, but are not limited thereto.

In the first method, the hydrogen atom of the phenolic hydroxyl group of the polymer compound having a repeating unit represented by the formula (1c) having a weight average molecular weight of 1,000 to 500,000, preferably having a molecular weight distribution of 1.0 to 1.5, and whose terminal is P An alkenylether compound represented by formulas I and II, which are p1 mol, and a compound represented by formula 7b, which is q1 mol, are reacted with respect to 1 mol of hydroxyl groups, for example, having a repeating unit represented by the following formula 5ja or 5jg, and the terminal is P Phosphorus polymer compound can be obtained. In addition, the terminal P of the polymer compound and the compound represented by the formula (7b) may be reacted again. In addition, in the following formula, m + n = y, and h, k, m, n, x, y, p1, p2, q1, q2, R ¹ , R ² , R ⁹ , R ¹⁰ , R ¹¹ and Q are respectively It shows the same meaning as the above.



In the above formula, U ₁ and U ₃ ′ represent the following units.
U ₁ :
U ₃ ':
As a reaction solvent, aprotic polar solvents, such as dimethylformamide, dimethylacetamide, tetrahydrofuran, and ethyl acetate, are preferable, and may be used individually or in mixture of 2 or more types.
As the acid of the catalyst, hydrochloric acid, sulfuric acid, trifluoromethanesulfonic acid, p-toluenesulfonic acid, methanesulfonic acid, trifluoroacetic acid, p-toluenesulfonic acid pyridinium salt, and the like are preferable, and the amount of the reaction is the polymer represented by the general formula (1c). It is preferable that the hydrogen atom of the phenolic hydroxyl group of a compound is 0.1-10 mol% with respect to 1 mol of all the hydroxyl groups.
The reaction temperature is -20 to 100 ° C, preferably 0 to 60 ° C, and the reaction time is 0.2 to 100 hours, preferably 0.5 to 20 hours.
When the reaction is performed in a batch without isolation, the addition order of the alkenylether compound represented by the formula (I) or (II) and the compound represented by the formula (7b) is not particularly limited, but the compound represented by the formula (7b) is first added After the reaction has proceeded sufficiently, it is preferable to add an alkenylether compound represented by the formula (I) or (II). For example, when the alkenyl ether compound represented by the formula (I) or (II) and the compound represented by the formula (7b) are added at the same time, or the alkenyl ether compound represented by the formula (I) or (II) is added first, the compound is represented by the formula (I) or (II). Part of the reaction point of the alkenyl ether compound to be hydrolyzed by water in the reaction system, the structure of the resulting high molecular compound is complicated and the control of the physical properties may be difficult.
<Second method>
<Formula 1c>

[Wherein, R ¹ , R ² , x, y, p 1, p 2, q 1, q 2, R ^9a , R ¹⁰ , R ¹¹ and R ⁶ , R ⁷ , R ⁸ , A, B, c and d are each described above. And Z is a halogen atom (C1, Br or I).]
In addition, compounds of formulas VI and VII and compounds of formula 7c can be obtained by reacting hydrogen chloride, hydrogen bromide or hydrogen iodide with compounds of formulas I and II and compounds of formula 7b.
The second method has a repeating unit represented by the formula (1c) having a weight average molecular weight of 1,000 to 500,000, preferably a molecular weight distribution of 1.0 to 1.5, and the terminal is p1 mole with respect to 1 mole of the phenolic hydroxyl group of the polymer compound having a terminal P. By reacting the halogenated alkyl ether compound represented by the formula (VI) or VII and the compound represented by the formula (7c) of q1 mole, for example, a polymer compound having a repeating unit represented by the above formulas 5ja to 5jg and having a terminal P may be obtained. . In addition, the terminal P of the polymer compound and the compound represented by the formula (7c) may be reacted again.
It is preferable to perform the said manufacturing method in presence of a base in a solvent.
As a reaction solvent, aprotic polar solvents such as acetonitrile, acetone, dimethylformamide, dimethylacetamide, tetrahydrofuran and dimethyl sulfoxide are preferable, and two or more kinds may be used alone or in combination.
As a base, triethylamine, pyridine, diisopropylamine, potassium carbide, etc. are preferable, and the use amount is preferably (p1 + q1) mol or more with respect to 1 mol of phenolic hydroxyl groups of the high molecular compound represented by General formula (1c) to which it reacts. .
The reaction temperature is -50 to 100 ° C, preferably 0 to 60 ° C, and the reaction time is 0.5 to 100 hours, preferably 1 to 20 hours.
In addition, as described above, a polymer compound having a repeating unit represented by the formula (1c) and having a repeating unit represented by the following formula (10) by reacting a compound of the formula (7b or 7c) with a polymer compound having a terminal of P is a terminal having a terminal (P) After obtaining, the compound may be isolated and subsequently crosslinked using the compounds represented by the formulas (I) and (II) or (VI) and (VII).
For example, a polymer compound having a repeating unit represented by the formulas (5ja to 5jg) obtained by the first or second method, and having a terminal at the terminal (P) as necessary, and having a repeating unit represented by the original formula (1c) as necessary, An acid labile group represented by the formula (8) is introduced by reacting q2 mol dialkyl dicarbonate compound, alkoxycarbonylalkyl halide and the like with 1 mol of phenolic hydroxyl group of the phosphorus polymer compound, or tertiary alkyl halide, trialkylsilyl halide, oxo By reacting an alkyl compound or the like, for example, a polymer compound having a repeating unit represented by the above formulas 5ja to 5jg and having a terminal P can be obtained.
The method of introducing the acid labile group of formula (8) is preferably carried out in the presence of a base in a solvent.
As a reaction solvent, an aprotic polar solvent, such as acetonitrile, acetone, dimethylformamide, dimethylacetamide, tetrahydrofuran, dimethyl sulfoxide, is preferable, and you may use individually or in mixture of 2 or more types.
As a base, triethylamine, pyridine, imidazole, diisopropylamine, potassium carbonate, etc. are preferable, and the usage amount is q2 mol with respect to 1 mol of phenolic hydroxyl groups of the high molecular compound originally represented by General formula (1c).
As reaction temperature, it is 0-100 degreeC, Preferably it is 0-60 degreeC. The reaction time is 0.2 to 100 hours, preferably 1 to 10 hours.
Examples of the dialkyl dicarbonate compound include di-tert-butyl bicarbonate, di-tert-amyl bicarbonate, and the like. Examples of the alkoxycarbonylalkyl halide include tert-butoxycarbonylmethyl chloride, tert-amyloxycarbonylmethyl chloride, and tert- Butoxycarbonylmethylbromide, tert-butoxycarbonylethylchloride, ethoxyethoxycarbonylmethylchloride, ethoxyethoxycarbonylmethylbromide, tetrahydropyranyloxycarbonylmethylchloride, tetrahydropyranyloxycarbon Carbonyl methyl bromide, tetrahydrofuranyloxycarbonylmethyl chloride, tetrahydrofuranyloxycarbonylmethyl bromide, and the like. Examples of the trialkylsilyl halide include trimethylsilyl chloride, triethylsilyl chloride, and dimethyl-tert-butylsilyl chloride. Etc. can be mentioned.
Moreover, the polymeric compound which has a repeating unit represented by general formula (5ja-5jg) obtained by the said 1st or 2nd method, and whose terminal is P, has a repeating unit represented by the original general formula (1c) as needed, and the terminal is P Tertiary alkylation or oxoalkylation can be carried out by reacting q2 mol of a tertiary alkylating agent and an oxoalkyl compound with respect to 1 mol of the phenolic hydroxyl group of the phosphorus polymer compound.
The method is preferably carried out in the presence of an acid in a solvent.
As the reaction solvent, aprotic polar solvents such as dimethylformamide, dimethylacetamide, tetrahydrofuran, and ethyl acetate are preferable, and two or more kinds may be used alone or in combination.
As the acid of the catalyst, hydrochloric acid, sulfuric acid, trifluoromethanesulfonic acid, p-toluenesulfonic acid, methanesulfonic acid, trifluoroacetic acid, p-toluenesulfonic acid pyridinium salt, and the like are preferable, and the amount of use thereof is represented by the original formula (1c). It is preferable that it is 0.1-10 mol% with respect to 1 mol of phenolic hydroxyl groups, the hydroxyl group of R <^5> in general formula (2), and the hydroxyl group in general formula (3) of a polymer compound which has a unit and the terminal is P.
The reaction temperature is -20 to 100 ° C, preferably 0 to 60 ° C, and the reaction time is 0.2 to 100 hours, preferably 0.5 to 20 hours.
Examples of tertiary alkylating agents include isobutene, 2-methyl-1-butene, 2-methyl-2-butene, and the like, and oxoalkyl compounds include α-angelicalactone, 2-cyclohexen-1-one, and 5,6- Dihydro-2H-pyran-2-one etc. are mentioned.
Further, the acid labile group, tertiary alkyl group, trialkyl represented by the formula (8) to the polymer compound having a terminal P having a repeating unit represented by the following Formulas 5ha to 5hg without directly passing through the polymer compound represented by the formulas 5ja to 5jg After introducing a silyl group, an oxoalkyl group, or the like, an acid labile group represented by the formula (7a) may be introduced as necessary.



However, in formula, R <^1> , R <^2> , Q, p1, p2, q1, q2, h, x, and y show the same meaning as the above, respectively. In addition, U ₃ "represents the following unit.
U ₃ ":
In the polymer compound according to the present invention, the acid labile group of R ³ is not limited to one kind, and two or more kinds can be introduced. In this case, an acid labile group of q1 is introduced as described above with respect to 1 mol of all hydroxyl groups of the polymer compound having a repeating unit represented by the formula (1c) and the terminal is P, and then a separate acid labile group is separated by q2 in the same manner as described above. By molar introduction, the polymer compound in which two or more of these acid labile groups are introduced as appropriate or repeatedly described above can be obtained.
The chemically amplified positive resist material of this invention uses the said high molecular compound as a base polymer, and contains the following component.
(A): an organic solvent,
(B): a high molecular compound of the formula (1), preferably of the formula (5a) as the base resin,
(C): acid generator
In this case, the resist material of the present invention may further contain one or two or more of the following D to I components together with the A to C components.
(D): The average of 0 mol of the hydrogen atom of the phenolic hydroxyl group of the high molecular compound of the high molecular compound which has a repeating unit represented by following formula (9) as a base resin separate from (B) component by the whole or one or more types of acid labile groups A polymer compound having a weight average molecular weight of 3,000 to 300,000 which is partially substituted in a proportion of not less than 80% and not more than 80 mol%.
<Formula 9>
[(In the formula,
R ¹ , R ² , R ⁹ , R ¹⁰ and R ¹¹ have the same meaning as above,
R ¹² is an acid labile group, different from -CR ⁹ R ¹⁰ OR ¹¹ ,
e and f are 0 or positive, g is positive, e + f + g = 1, 0 ≦ e / (e + f + g) ≦ 0.5, 0.4 ≦ g / (e + f + g) ≦ 0.9 .)
In addition, the phenolic hydroxyl group of the polymer compound represented by the formula (9) may be crosslinked in the molecule and / or between molecules by a crosslinking group having a COC group obtained by reaction with an alkenyl ether compound or a halogenated alkyl ether, The total amount of the acid labile group and the crosslinking group is an average of more than 0 mol% and no more than 80 mol% of the total hydrogen atoms of the phenolic hydroxyl group when e = o, f = 0, g = 1 in the formula (9).]
(E): dissolution controller
(F): basic compound
(G): An aromatic compound having a group represented by ≡C-COOH in the molecule.
(H): UV absorber
(I): an acetylene alcohol derivative.
As the organic solvent of the component (A) used in the present invention, any solvent may be used as long as it is an organic solvent in which an acid generator, a base resin, a dissolution controller, and the like are soluble. As such an organic solvent, for example, ketones such as cyclohexanone and methyl-2-n-amyl ketone, 3-methoxybutanol, 3-methyl-3-methoxybutanol, 1-methoxy-2-propanol, and 1- Alcohols such as ethoxy-2-propanol, ethers such as propylene glycol monomethyl ether, ethylene glycol monomethyl ether, propylene glycol monoethyl ether, ethylene glycol monoethyl ether, propylene glycol dimethyl ether, diethylene glycol dimethyl ether, and propylene Glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, ethyl lactate, ethyl pyruvate, butyl acetate, methyl 3-methoxypropionate, ethyl 3-ethoxypropionate, tert-butyl acetate, tert-butyl propionate, propylene glycol mono- esters, such as tert- butyl ether acetate, etc., These 1 type can be used individually or in mixture of 2 or more types It is not limited to these. In the present invention, among these organic solvents, propylene glycol monomethyl ether acetate, which is a safety solvent in addition to diethylene glycol dimethyl ether, 1-ethoxy-2-propanol, and ethyl lactate, which have the highest solubility of the acid generator in the resist component, It is preferably used.
As for the usage-amount of the organic solvent, 200-1,000 parts, especially 400-800 parts are preferable with respect to 100 parts (weight part or less same) of base resin (the total amount of the said (B) component and (D) component, the same below).
Examples of acid generators of component (C) include onium salts of the following formula (11), diazomethane derivatives of the following formula (12), glyoxime derivatives of the following formula (13), β-ketosulfone derivatives, disulfone derivatives, nitrobenzylsulfonate derivatives, and sulfonic acids Ester derivatives, imide-ylsulfonate derivatives, and the like.
_{^{(R 30) b M + K}} -
[(Wherein R ³⁰ represents a linear, branched or cyclic alkyl group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms or an aralkyl group having 7 to 12 carbon atoms, and M ⁺ represents iodine or sulfonium) , K ^- represents a non-nucleophilic counter ion, and b represents 2 or 3.)
Examples of the alkyl group for R ³⁰ include a methyl group, ethyl group, propyl group, butyl group, cyclohexyl group, 2-oxocyclohexyl group, norbornyl group, adamantyl group and the like. As an aryl group, alkoxyphenyl groups, such as a phenyl group, p-methoxyphenyl group, m-methoxyphenyl group, o-methoxyphenyl group, ethoxyphenyl group, p-tert-butoxyphenyl group, and m-tert-butoxyphenyl group, 2-methylphenyl Alkylphenyl groups, such as group, 3-methylphenyl group, 4-methylphenyl group, ethylphenyl group, 4-tert- butylphenyl group, 4-butylphenyl group, and a dimethylphenyl group, are mentioned. As an aralkyl group, a benzyl group, a phenethyl group, etc. are mentioned. Examples of non-nucleophilic counter ions of K ⁻ include halide ions such as chloride ions and bromide ions, triflate, fluoroalkyl sulfonates such as 1,1,1-trifluoroethanesulfonate and nonafluorobutanesulfonate, and tosyl Alkyl sulfonates, such as aryl sulfonates, a mesylate, butane sulfonate, such as a late, a benzene sulfonate, 4-fluorobenzene sulfonate, a 1,2,3,4,5-pentafluorobenzene sulfonate, are mentioned. have.]
[(However, R ³¹ and R ³² represent a linear, branched or cyclic alkyl group or a halogenated alkyl group having 1 to 12 carbon atoms, an aryl group or a halogenated aryl group having 6 to 12 carbon atoms, or an aralkyl group having 7 to 12 carbon atoms). )
As an alkyl group of R <^31> and R <^32> , a methyl group, an ethyl group, a propyl group, a butyl group, an amyl group, a cyclopentyl group, a cyclohexyl group, a norbornyl group, an adamantyl group, etc. are mentioned. Examples of the halogenated alkyl group include trifluoromethyl group, 1,1,1-trifluoroethyl group, 1,1,1-trichloroethyl group, and nonafluorobutyl group. As an aryl group, alkoxyphenyl groups, such as a phenyl group, p-methoxyphenyl group, m-methoxyphenyl group, o-methoxyphenyl group, ethoxyphenyl group, p-tert-butoxyphenyl group, and m-tert-butoxyphenyl group, 2-methylphenyl Alkylphenyl groups, such as group, 3-methylphenyl group, 4-methylphenyl group, ethylphenyl group, 4-tert- butylphenyl group, 4-butylphenyl group, and a dimethylphenyl group, are mentioned. Examples of the halogenated aryl group include a fluorobenzene group, a chlorobenzene group, 1,2,3,4,5-pentafluorobenzene group, and the like. As an aralkyl group, a benzyl group, a phenethyl group, etc. are mentioned.
[(Wherein, R ³³ , R ³⁴ and R ³⁵ are linear, branched or cyclic alkyl or halogenated alkyl groups having 1 to 12 carbon atoms, aryl groups or halogenated aryl groups having 6 to 12 carbon atoms or aralkyl having 7 to 12 carbon atoms). In addition, R ³⁴ and R ³⁵ may be bonded to each other to form a cyclic structure, and when forming a cyclic structure, R ³⁴ and R ³⁵ each represent a linear or branched alkylene group having 1 to 6 carbon atoms. )
Examples of the alkyl group, halogenated alkyl group, aryl group, halogenated aryl group, and aralkyl group for R ³³ , R ³⁴ and R ³⁵ include the same groups as described for R ³¹ and R ³² . Further, as the R ³⁴ and the alkylene group of R ³⁵ may be mentioned methylene group, ethylene group, propylene group, butylene group, hexylene group and the like.]
Specifically, for example, trifluoromethanesulfonic acid diphenyliodium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) phenyliodium, p-toluenesulfonic acid diphenyliodium, p-toluenesulfonic acid (p -tert-butoxyphenyl) phenyliodonium, trifluoromethanesulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, trifluoromethanesulfonic acid bis (p-tert -Butoxyphenyl) phenylsulfonium, trifluoromethanesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, p-toluenesulfonic acid triphenylsulfonium, p-toluenesulfonic acid (p-tert-butoxyphenyl) di Phenylsulfonium, p-toluenesulfonic acid bis (p-tert-butoxyphenyl) phenylsulfonium, p-toluenesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, nonafluorobutanesulfonic acid triphenylsulfonium, butane Sulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid trimethylsulfonium, p-toluenesulfonic acid trimethyl Sulfonium, trifluoromethanesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, p-toluenesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, trifluoromethanesulfonic acid dimethylphenylsulfonium, p- Onium salts such as toluenesulfonic acid dimethylphenylsulfonium, trifluoromethanesulfonic acid dicyclohexylphenylsulfonium, p-toluenesulfonic acid dicyclohexylphenylsulfonium, bis (benzenesulfonyl) diazomethane, bis (p-toluenesulfonate) Ponyyl) diazomethane, bis (xylenesulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, bis (cyclopentylsulfonyl) diazomethane, bis (n-butylsulfonyl) diazomethane, Bis (isobutylsulfonyl) diazomethane, bis (sec-butylsulfonyl) diazomethane, bis (n-propylsulfonyl) diazomethane, bis (isopropylsulfonyl) diazomethane, bis (tert- Butylsulfonyl) diazomethane, bis (n-amylsulfonyl) diazomethane, bis (isoamylsulfonyl) di Azomethane, bis (sec-amylsulfonyl) diazomethane, bis (tert-amylsulfonyl) diazomethane, 1-cyclohexylsulfonyl-1- (tert-amylsulfonyl) diazomethane, 1-tert Diazomethane derivatives such as amylsulfonyl-1- (tert-butylsulfonyl) diazomethane, bis-o- (p-toluenesulfonyl) -α-dimethylglyoxime, bis-o- (p-toluene Sulfonyl) -α-diphenylglyoxime, bis-o- (p-toluenesulfonyl) -α-dicyclohexylglyoxime, bis-o- (p-toluenesulfonyl) -2,3-pentanedionegly Oxime, bis-o- (p-toluenesulfonyl) -2,3-pentanedioneglyoxime, bis-o- (p-toluenesulfonyl) -2-methyl-3,4-pentanedioneglyoxime, bis- o- (n-butanesulfonyl) -α-dimethylglyoxime, bis-o- (n-butanesulfonyl) -α-diphenylglyoxime, bis-o- (n-butanesulfonyl) -α-dish Clohexylglyoxime, bis-o- (n-butanesulfonyl) -2,3-pentanedioneglyoxime, bis-o- (n-butanesulfonyl) -2-methyl-3,4-pentanedioneglyoxime , Bis-o- (methanesulfonyl) -α-dimethylglyoxime, Bis-o- (trifluoromethanesulfonyl) -α-dimethylglyoxime, bis-o- (1,1,1-trifluoroethanesulfonyl) -α-dimethylglyoxime, bis-o- (tert -Butanesulfonyl) -α-dimethylglyoxime, bis-o- (perfluorooctanesulfonyl) -α-dimethylglyoxime, bis-o- (cyclohexanesulfonyl) -α-dimethylglyoxime, bis- o- (benzenesulfonyl) -α-dimethylglyoxime, bis-o- (p-fluorobenzenesulfonyl) -α-dimethylglyoxime, bis-o- (p-tert-butylbenzenesulfonyl) -α Glyoxime derivatives, such as -dimethylglyoxime, bis-o- (xylenesulfonyl) -α-dimenylglyoxime and bis-o- (camphorsulfonyl) -α-dimethylglyoxime, 2-cyclohexylcarbonyl- Β-ketosulfone derivatives such as 2- (p-toluenesulfonyl) propane, 2-isopropylcarbonyl-2- (p-toluenesulfonyl) propane, disulfones such as diphenyl disulfone and dicyclohexyl disulfone Nits such as derivatives, p-toluenesulfonic acid 2,6-dinitrobenzyl, p-toluenesulfonic acid 2,4-dinitrobenzyl Lobenzylsulfonate derivatives, 1,2,3-tris (methanesulfonyloxy) benzene, 1,2,3-tris (trifluoromethanesulfonyloxy) benzene, 1,2,3-tris (p-toluene Sulfonic acid ester derivatives such as sulfonyloxy) benzene, phthalimide-yl-triplate, phthalimide-yl-tosylate, 5-norbornene-2,3-dicarboxyimide-yl-triplate, 5- Imide-yl-sulfonate derivatives such as norbornene-2,3-dicarboxyimide-yl-tosylate and 5-norbornene-2,3-dicarboxyimide-yl-n-butylsulfonate; Trifluoromethanesulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, trifluoromethanesulfonic acid tris (p-tert-butoxyphenyl) sulfonium onium salts such as p-toluenesulfonic acid triphenylsulfonium, p-toluenesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, p-toluenesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, Bis (benzenesulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, bis (n-butylsulfonyl) diazomethane, bis (isobutylsulphate) Ponyyl) diazomethane, bis (sec-butylsulfonyl) diazomethane, bis (n-propylsulfonyl) diazomethane, bis (isopropylsulfonyl) diazomethane, bis (tert-butylsulfonyl) dia Glyoxime derivatives such as diazomethane derivatives such as methane, bis-o- (p-toluenesulfonyl) -α-dimethylglyoxime, and bis-o- (n-butanesulfonyl) -α-dimethylglyoxime It is preferably used. In addition, the said acid generator can be used individually by 1 type or in combination of 2 or more type. The onium salt is excellent in the effect of improving the rectangular formation, and the diazomethane derivative and the glyoxime derivative are excellent in the standing wave reduction effect, but the fine adjustment of the shape can be performed by combining both.
It is preferable that the compounding quantity of an acid generator shall be 0.2-15 parts with respect to 100 parts of all base resins, especially 0.5-8 parts, and when it is less than 0.2 part, the amount of acid generation at the time of exposure is small, and a sensitivity and resolution may fall, 15 If it exceeds the portion, the transmittance of the resist decreases and the resolution may decrease.
As a base resin different from the high molecular compound which concerns on the said (B) component of (D) component, the high molecular weight compound which has a weight average molecular weight of 3,000-300,000 which has a repeating unit represented by following formula (9) is used. By mix | blending this (D) component, the dimension control of a pattern and the shape control of a pattern can be arbitrarily performed, and it is advantageous.
<Formula 9>
[(Wherein, R ¹ , R ² , R ⁹ , R ¹⁰ , R ¹¹ represent the same meaning as above, R ¹² is an acid labile group different from -CR ⁹ R ¹⁰ OR ^11, and e and f are 0). Or positive, g is positive, e + f + g = 1, 0 ≦ e / (e + f + g) ≦ 0.5, 0.4 ≦ g / (e + f + g) ≦ 0.9.)
In addition, the phenolic hydroxyl group of the high molecular compound represented by the said Formula (9) may be bridge | crosslinked in molecule | numerator and / or molecule | numerator by the crosslinking group which has a COC group obtained by reaction with an alkenyl ether compound or a halogenated alkyl ether, And the total amount of the acid labile group and the crosslinking group is an average of more than 0 mol% and not more than 80 mol% of the total hydrogen atoms of the phenolic hydroxyl group when e = 0, f = 0, g = 1 in the formula (9). ]
Such high molecular compounds need to have a weight average molecular weight of 3,000 to 300,000, preferably 5,000 to 30,000. If the weight average molecular weight is less than 3,000, the heat resistance of the resist material is inferior, and if it exceeds 300,000, the alkali solubility is lowered and the resolution is deteriorated.
In addition, also in the base resin of this (D) component, when molecular weight distribution (Mw / Mn) is large, a low molecular weight and a high molecular weight polymer exist, and when there exist many low molecular weight polymers, heat resistance may fall. When a large amount of polymer of high molecular weight exists, it may become a cause of hemming after pattern formation, including the thing which is hard to melt | dissolve with alkali. Therefore, as the pattern rule becomes finer, the influence of these molecular weights and molecular weight distribution tends to become large, so that in order to obtain a resist material which is preferably used for fine pattern dimensions, the molecular weight distribution of the base resin is 1.0-2.5, in particular, 1.0-1.5 narrow dispersion. Is preferably.
Moreover, as for the compounding quantity of the base resin of (D) component, and the base resin (crosslinked high molecular compound) of (B) component, the weight ratio of 0: 100-90: 10 is preferable, Especially 0: 100-50: 50 is preferred. When the compounding quantity of the base resin of the said (D) component is larger than the said weight ratio, the objective effect obtained by the base resin (crosslinked high molecular compound) of the (B) component may not be acquired.
The dissolution control agent can be further added to the resist material of the present invention as the component (E), whereby the contrast can be improved. As a dissolution control agent, the average molecular weight is 100-1,000, Preferably it is 150-800, At the same time, the hydrogen atom of the said phenolic hydroxyl group of the compound which has two or more phenolic hydroxyl groups in a molecule | numerator is averaged 0-100 overall by acid instability group. The compound substituted by the ratio of mol% is mix | blended.
The substitution rate of the hydrogen atom of the phenolic hydroxyl group by the acid labile group is, on average, 0 mol% or more, preferably 30 mol% or more of the entire phenolic hydroxyl group, and its upper limit is 100 mol%, more preferably 80 Molar%.
In this case, as a compound which has 2 or more of these phenolic hydroxyl groups, what is represented by following formula (i)-xi is preferable.



(Wherein R ²¹ and R ²² each represent a hydrogen atom or a linear or branched alkyl or alkenyl group having 1 to 8 carbon atoms, and R ²³ represents a hydrogen atom or a straight or branched group having 1 to 8 carbon atoms) Alkyl group or alkenyl group or-(R ²⁷ ) _h -COOH, R ²⁴ is-(CH ₂ ) _i- (i = 2 to 10), arylene group having 6 to 10 carbon atoms, carbonyl group, sulfonyl group, oxygen atom or A sulfur atom, R ²⁵ is an alkylene group having 1 to 10 carbon atoms, an arylene group having 6 to 10 carbon atoms, a carbonyl group, a sulfonyl group, an oxygen atom or a sulfur atom, and R ²⁶ is a hydrogen atom or a straight or branched carbon atom having 1 to 8 carbon atoms An alkyl group, an alkenyl group, a phenyl group or a naphthyl group each substituted with a hydroxyl group, R ²⁷ is a linear or branched alkylene group having 1 to 10 carbon atoms, j is an integer of 0 to 5, and h and u are 0 Or 1. s, t, s ', t', s '', t '' are s + t = 8, s '+ t' = 5, s '' + t '' = 4 Satisfied, and also the can having at least one hydroxyl group in each phenyl skeleton. Α is a number of from 100 to 1,000 molecular weight of the compound of the formula viii, ix.)
In said formula, as R <^21> and R <^22>, for example, a hydrogen atom, a methyl group, an ethyl group, a butyl group, a propyl group, an ethynyl group, a cyclohexyl group, R <^{23> is} the same as R <^21> , R <^22> , or- As COOH, —CH ₂ COOH, R ^24, for example, an ethylene group, a phenylene group, a carbonyl group, a sulfonyl group, an oxygen atom, a sulfur atom, and the like, for R ^25, for example, the same as a methylene group or R ^24, and as R ²⁶ For example, a hydrogen atom, a methyl group, an ethyl group, a butyl group, a propyl group, an ethynyl group, a cyclohexyl group, the phenyl group substituted by the hydroxyl group, a naphthyl group, etc. are mentioned, for example.
Here, as an acid labile group of a dissolution control agent, the group represented by general formula (7a) and general formula (8), the C4-C20 tertiary alkyl group, the trialkylsilyl group of each C1-C6 each alkyl group, and the C4-C20 oxo Alkyl group etc. are mentioned.
The compounding quantity of the compound (dissolution control agent) which partially substituted the said phenolic hydroxyl group with the acid labile group is 0-50 parts with respect to 100 parts of base resins, Preferably it is 5-50 parts, More preferably, it is 10-30 parts, Or two or more kinds thereof may be mixed. If the blending amount is less than 5 parts, the resolution may not be improved, and if it is more than 50 parts, film reduction of the pattern may occur and the resolution may decrease.
In addition, the above dissolution control agent can be synthesized by chemically reacting an acid labile group with a compound having a phenolic hydroxyl group in the same manner as the base resin.
The resist material of the present invention has a weight average molecular weight of 1,000 or more and 3,000 or less as the other dissolution control agent instead of or in addition to the dissolution control agent. The compound which substituted the hydrogen atom partially by the ratio of 0 mol% or more and 60 mol% or less on average with an acid labile group can be mix | blended.
In this case, as the compound in which the hydrogen atom of the phenolic hydroxyl group is partially substituted with such an acid labile group, one or two or more compounds selected from compounds having a repeating unit represented by the following formula (14) and having a weight average molecular weight greater than 1,000 and no greater than 3,000 This is preferred.
(Wherein, R ³ represents an acid labile group, and v and w are numbers satisfying 0 ≦ v / (v + w) ≦ 0.6, respectively.)
Here, as the acid labile group of the dissolution controller, a group represented by the formula (7a), a group represented by the formula (8), a C4-20 tertiary alkyl group, a trialkylsilyl group having 1 to 6 carbon atoms each, and a carbon number And 4 to 20 oxoalkyl groups.
As for the compounding quantity of the said other dissolution control agent, the range in which the whole of the dissolution control agent totaled with the said dissolution control agent uses 0-50 parts with respect to 100 parts of base resins, especially 0-30 parts, Preferably 1 or more parts is preferable. .
In addition, said other dissolution control agent can be synthesize | combined by chemically reacting an acid labile group with the compound which has a phenolic hydroxyl group like base resin.
The basic compound of component (F) is preferably a compound capable of suppressing the diffusion rate when the acid generated from the acid generator is diffused into the resist film, and the diffusion rate of the acid in the resist film is increased by the combination of the basic compound. By suppressing the resolution, the resolution can be improved, and the exposure margin and the pattern shape can be improved by suppressing the sensitivity change after exposure or by reducing the substrate and the environment dependency.
Examples of such basic compounds include primary, secondary and tertiary aliphatic amines, hybrid amines, aromatic amines, heterocyclic amines, nitrogen-containing compounds having a carboxyl group, nitrogen-containing compounds having a sulfonyl group, and nitrogen-containing compounds having a hydroxy group. The compound, the nitrogen containing compound which has a hydroxyphenyl group, an alcoholic nitrogen containing compound, an amide derivative, an imide derivative, etc. are mentioned, Especially aliphatic amine is used preferably.
Specifically, as the primary aliphatic amines, ammonia, methylamine, ethylamine, n-propylamine, isopropylamine, n-butylamine, isobutylamine, sec-butylamine, tert-butylamine, pentylamine, tert -Amylamine, cyclopentylamine, hexylamine, cyclohexylamine, heptylamine, octylamine, nonylamine, decylamine, dodecylamine, cetylamine, methylenediamine, ethylenediamine, tetraethylenepentamine and the like are exemplified, and As secondary aliphatic amines, dimethylamine, diethylamine, di-n-propylamine, diisopropylamine, di-n-butylamine, diisobutylamine, di-sec-butylamine, dipentylamine, dicyclopentyl Amine, dihexylamine, dicyclohexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, didodecylamine, dicetylamine, N, N-dimethylmethylenediamine, N, N-dimethylethylenediamine , N, N-dimethyltetraethylenepentamine and the like, tertiary aliphatic Trimethylamine, triethylamine, tri-n-propylamine, triisopropylamine, tri-n-butylamine, triisobutylamine, tri-sec-butylamine, tripentylamine, tricyclopentylamine, tri Hexylamine, tricyclohexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, tridodecylamine, tricetylamine, N, N, N ', N'-tetramethylmethylenediamine, N, N, N ', N'-tetramethylethylenediamine, N, N, N', N'-tetramethyltetraethylenepentamine, etc. are illustrated.
In addition, examples of the mixed amines include dimethylethylamine, methylethylpropylamine, benzylamine, phenethylamine, benzyldimethylamine, and the like. Specific examples of aromatic amines and heterocyclic amines include aniline derivatives (for example, aniline, N-methylaniline, N-ethylaniline, N-propylaniline, N, N-dimethylaniline, 2-methylaniline, 3-methylaniline, 4-methylaniline, ethylaniline, propylaniline, trimethylaniline, 2-nitroaniline, 3-nitroaniline, 4-nitroaniline, 2,4-dinitroaniline, 2,6-dinitroaniline, 3,5-di Nitroaniline, N, N-dimethyltoluidine, etc.), diphenyl (p-tolyl) amine, methyldiphenylamine, triphenylamine, phenylenediamine, naphthylamine, diaminonaphthalene, pyrrole derivatives (e.g. pyrrole, 2H-pyrrole, 1-methylpyrrole, 2,4-dimethylpyrrole, 2,5-dimethylpyrrole, N-methylpyrrole and the like), oxazole derivatives (e.g. oxazole, isoxazole, etc.), thiazole derivatives ( For example thiazole, isothiazole, etc.), imidazole derivatives (for example imidazole, 4-methylimidazole, 4-methyl-2-phenylimidazole, etc.), Pyrazole derivatives, furazane derivatives, pyrroline derivatives (e.g. pyrroline, 2-methyl-1-pyrroline, etc.), pyrrolidine derivatives (e.g. pyrrolidine, N-methylpyrrolidine, pyrroli Dinon, N-methylpyrrolidone, etc.), imidazoline derivatives, imidazolidine derivatives, pyridine derivatives (e.g. pyridine, methylpyridine, ethylpyridine, propylpyridine, butylpyridine, 4- (1-butylpentyl) Pyridine, dimethylpyridine, trimethylpyridine, triethylpyridine, phenylpyridine, 3-methyl-2-phenylpyridine, 4-tert-butylpyridine, diphenylpyridine, benzylpyridine, methoxypyridine, butoxypyridine, dimethoxypyridine, 1-methyl-2-pyridone, 4-pyrrolidinopyridine, 1-methyl-4-phenylpyridine, 2- (1-ethylpropyl) pyridine, aminopyridine, dimethylaminopyridine, etc.), pyridazine derivatives, pyrimidine Derivatives, pyrazine derivatives, pyrazoline derivatives, pyrazolidine derivatives, piperidine derivatives, piperazine induction , Morpholine derivatives, indole derivatives, isoindole derivatives, 1H-indazole derivatives, indolin derivatives, quinoline derivatives (e.g. quinoline, 3-quinolinecarbonitrile, etc.), isoquinoline derivatives, cinnoline derivatives, quinazoline derivatives , Quinoxaline derivatives, phthalazine derivatives, purine derivatives, pteridine derivatives, carbazole derivatives, phenanthrizine derivatives, acridine derivatives, phenadine derivatives, 1,10-phenanthroline derivatives, adenine derivatives, adenosine derivatives , Guanine derivatives, guanosine derivatives, uracil derivatives, uridine derivatives and the like.
As the nitrogen-containing compound having a carboxyl group, for example, amino benzoic acid, indolecarboxylic acid, amino acid derivatives (for example, nicotinic acid, alanine, arginine, aspartic acid, glutamic acid, glycine, histidine, isoleucine, glycylosin, leucine, Methionine, phenylalanine, threonine, lysine, 3-aminopyrazine-2-carboxylic acid, methoxyalanine), and the like, and examples of the nitrogen-containing compound having a sulfonyl group include 3-pyridine sulfonic acid, p-toluene sulfonic acid pyridinium, and the like. As the nitrogen-containing compound having a hydroxy group, the nitrogen-containing compound having a hydroxyphenyl group, and the alcoholic nitrogen-containing compound, 2-hydroxypyridine, aminocresol, 2,4-quinolinediol, 3-indolmethanol hydrate, monoethanolamine , Diethanolamine, triethanolamine, N-ethyl diethanolamine, N, N-diethylethanolamine, triisopropanolamine, 2,2'-iminodie Tanol, 2-aminoethanol, 3-amino-1-propanol, 4-amino-1-butanol, 4- (2-hydroxyethyl) morpholine, 2- (2-hydroxyethyl) pyridine, 1- (2 -Hydroxyethyl) piperazine, 1- [2- (2-hydroxyethoxy) ethyl] piperazine, pyridinedinol, 1- (2-hydroxyethyl) pyrrolidine, 1- (2-hydroxy Hydroxyethyl) -2-pyrrolidinone, 3-piperidino-1,2-propanediol, 3-pyrrolidino-1,2-propanediol, 8-hydroxyurorizine, 3-quinuclidinol, 3 Examples of -tropanol, 1-methyl-2-pyrrolidineethanol, 1-azilidineethanol, N- (2-hydroxyethyl) phthalimide, N- (2-hydroxyethyl) isonicotinamide and the like do. Examples of the amide derivatives include formamide, N-methylformamide, N, N-dimethylformamide, acetamide, N-methylacetamide, N, N-dimethylacetamide, propionamide, benzamide and the like. Phthalimide, succinimide, maleimide, etc. are illustrated as an imide derivative.
Moreover, you may mix | blend the basic compound represented by following formula (15) and (16).

In the formula,
R ⁴¹ , R ⁴² , R ⁴³ , R ⁴⁷ and R ⁴⁸ are each independently a linear, branched or cyclic alkylene group having 1 to 20 carbon atoms,
R ⁴⁴ , R ⁴⁵ , R ⁴⁶ , R ⁴⁹ and R ⁵⁰ represent a hydrogen atom, an alkyl group having 1 to 20 carbon atoms or an amino group,
R ⁴⁴ and R ⁴⁵ , R ⁴⁵ and R ⁴⁶ , R ⁴⁴ and R ⁴⁶ , R ⁴⁴ and R ⁴⁵ and R ^46, and R ⁴⁹ and R ⁵⁰ may be bonded to each other to form a ring,
S, T, and U each represent an integer of 0 to 20,
However, S, when ^{T, U = 0, R 44} , R 45, R 46, R 49 and R ⁵⁰ do not contain a hydrogen atom.
Herein, the alkylene groups of R ⁴¹ , R ⁴² , R ⁴³ , R ⁴⁷ and R ⁴⁸ include 1 to 20 carbon atoms, preferably 1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms, specifically, a methylene group, Ethylene group, n-propylene group, isopropylene group, n-butylene group, isobutylene group, n-pentylene group, isopentylene group, hexylene group, nonylene group, decylene group, cyclopentylene group, cyclohexylene group, etc. Can be mentioned.
Moreover, as an alkyl group of R <^44> , R <^45> , R <^46> , R <^49> and R <^{50>, they} are C1-C20, Preferably it is 1-8, More preferably, it is 1-6, These are linear, branched, Any of the illusions may be sufficient. Specifically, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group, n-pentyl group, isopentyl group, hexyl group, nonyl group, decyl group, dode A real group, a tridecyl group, a cyclopentyl group, a cyclohexyl group, etc. are mentioned.
When R ⁴⁴ and R ⁴⁵ , R ⁴⁵ and R ⁴⁶ , R ⁴⁴ and R ⁴⁶ , R ⁴⁴ and R ⁴⁵ and R ^46, and R ⁴⁹ and R ⁵⁰ form a ring, the carbon number of the ring is 1 to 20, More preferably, it is 1-8, More preferably, it is 1-6, and these rings may also branch an alkyl group with 1-6 carbon atoms, especially 1-4 carbon atoms.
S, T and U are each an integer of 0-20, More preferably, they are 1-10, More preferably, they are 1-8.
Specific examples of the compounds represented by the above formulas (15) and (16) include tris {2- (methoxymethoxy) ethyl} amine, tris {2- (methoxyethoxy) ethyl} amine, and tris [2-{(2-methoxy Ethoxy) methoxy} ethyl] amine, tris {2- (2-methoxyethoxy) ethyl} amine, tris {2- (1-methoxyethoxy) ethyl} amine, tris {2- (1-e Methoxyethoxy) ethyl} amine, tris {2- (1-ethoxypropoxy) ethyl} amine, tris [2-{(2-hydroxyethoxy) ethoxy} ethyl] amine, 4,7,13, 16,21,24-hexaoxa-1,10-diazabicyclo [8.8.8] hexacoic acid, 4,7,13,18-detraoxa-1,10-diazabicyclo [8.5.5] eicoacid , 1,4,10,13-tetraoxa-7,16-diazabicyclooctadecane, 1-aza-12-crown-4,1-aza-15-crown-5,1-aza-18-crown- 6 and the like. Tertiary amines, aniline derivatives, pyrrolidine derivatives, pyridine derivatives, quinoline derivatives, amino acid derivatives, nitrogen-containing compounds with hydroxy groups, nitrogen-containing compounds with hydroxyphenyl groups, alcohol-containing nitrogen compounds, amide derivatives, imides Derivatives, tris {2- (methoxymethoxy) ethyl} amine, tris {(2- (2-methoxyethoxy) ethyl} amine, tris [2-{(2-methoxyethoxy) methyl} ethyl] Amines, 1-aza-15-crown-5 and the like are preferred.
Moreover, the said basic compound can be used individually by 1 type or in combination of 2 or more types, The compounding quantity is 0.01-2 parts with respect to 100 parts of all base resins, Especially 0.01-1 part is preferable. If the amount is less than 0.01 part, there is no compounding effect. If it is more than 2 parts, the sensitivity may be too low.
In addition, the aromatic compound which has group represented by -C-COOH in the molecule | numerator mix | blended with the resist material of this invention as (G) component is the 1 type, or 2 or more types of compound chosen from the following group I and II, for example. Although it can use, it is not limited to these. By blending the component (G), the PED stability of the resist can be improved and the edge roughness on the nitride film substrate can be improved.
[Group I]
A part or all of the hydrogen atoms of the phenolic hydroxyl group of the compound represented by the following formulas (17) to (26) is substituted by -R ⁵⁷ -COOH (R ⁵⁷ is a linear or branched alkylene group having 1 to 10 carbon atoms), And at the same time the molar ratio of the phenolic hydroxyl group (C) and the group (D) represented by ≡C-COOH in the molecule is C / (C + D) = 0.1 to 1.0.





(Wherein R ¹ is a hydrogen atom or a methyl group, R ⁵¹ , R ⁵² are each a hydrogen atom or a linear or branched alkyl or alkenyl group having 1 to 8 carbon atoms, and R ⁵³ is a hydrogen atom or 1 carbon atom) To 8 straight or branched alkyl or alkenyl groups, or-(R ⁵⁷ ) _h -COOR 'group (R' is hydrogen atom or -R ⁵⁷ -COOH), R ⁵⁴ is-(CH ₂ ) i- (i = 2 to 10), an arylene group having 6 to 10 carbon atoms, a carbonyl group, a sulfonyl group, an oxygen atom, or a sulfur atom, and R ⁵⁵ is an alkyl group having 1 to 10 carbon atoms, an arylene group having 6 to 10 carbon atoms, a carbonyl group, and a sulfo A nitrogen group, an oxygen atom or a sulfur atom, R ⁵⁶ is a hydrogen atom or a linear or branched alkyl group having 1 to 8 carbon atoms, an alkenyl group, a phenyl group or a naphthyl group substituted with a hydrogen group, respectively, and R ⁵⁷ is 1 to 10 carbon atoms a linear or branched chain alkylene group, R ⁵⁸ is a hydrogen atom or a carbon Number from 1 to 8 linear or branched chain alkyl or alkenyl group or a group -R ⁵⁷ -COOH. J is an integer from 0 to 5, u and h is 0 or 1. S1, t1, s2, t2, s3, t3, s4 and t4 satisfy s1 + t1 = 8, s2 + t2 = 5, s3 + t3 = 4 and s4 + t4 = 6, respectively, and are numbers having at least one hydroxyl group in each phenyl skeleton. β is a number having a compound of Formula 22 having a weight average molecular weight of 1,000 to 5,000, γ is a number having a compound of Formula 23 having a weight average molecular weight of 1,000 to 10,000.)
[Group II]
The compounds represented by Formulas 27 and 28
[Group II]

(In formula, R <^51> , R <^52> and R <^57> have the same meaning as the above. S5 and t5 are the numbers which satisfy | fill s5≥0, t5≥0, and s5 + t5 = 5.)
Specific examples of the component (G) include compounds represented by the following general formulas (III-1 to 14) and (IV-1 to 6), but are not limited thereto.

(Wherein R ″ represents a hydrogen atom or a CH ₂ COOH group, and 10 to 100 mol% of R ″ in each compound is a CH ₂ COOH group. Α and β have the same meaning as above).
In addition, the aromatic compound which has group represented by -C-COOH in the said molecule can be used individually by 1 type or in combination of 2 or more types.
The addition amount of the aromatic compound which has group represented by -C-COOH in the said molecule | numerator is 0.1-5 parts with respect to 100 parts of base resin, More preferably, it is 1-3 parts. When less than 0.1 part, the hemming on a nitride film substrate and the improvement effect of a PED may not fully be acquired, and when more than 5 part, the resolution of a resist material may fall.
In addition, the resist material of this invention can be mix | blended with the compound whose molar absorptivity in wavelength 248nm is 10,000 or less as an ultraviolet absorber of (H) component. This enables the design and control of a resist having an appropriate transmittance with respect to a substrate having a different reflectance.
Specifically, pentalene, indene, naphthalene, azlene, pepylene, biphenylene, indacene, fluorene, penalene, phenanthrene, anthracene, fluoranthene, acefenanthrene, aceanthylene, triphenyl Lene, pyrene, glycene, naphthalene, preaden, pisene, perylene, pentaphene, pentacene, benzophenanthrene, anthraquinone, anthronebenzanthrone, 2,7-dimethoxynaphthalene, 2-ethyl-9, 10-dimethoxyanthracene, 9,10-dimethylanthracene, 9-ethoxyanthracene, 1,2-naphthoquinone, 9-fluorene, condensed polycyclic hydrocarbon derivatives such as the following formulas 29 and 30, thioxanthene-9- Condensed heterocyclic derivatives such as on, thianthrene, dibenzothiophene, 2,3,4-trihydroxybenzophenone, 2,3,4,4'-tetrahydroxybenzophenone, 2,4-dihydroxy Benzophenone derivatives such as benzophenone, 3,5-dihydroxybenzophenone, 4,4'-dihydroxybenzophenone, 4,4'-bis (dimethylamino) benzophenone, squalane, dimethyl squalane The scoop of the tree, etc., and the like alsan derivative.

In the formula,
R ⁶¹ to R ⁶³ are each independently a hydrogen atom, a straight or branched alkyl group, a straight or branched alkoxy group, a straight or branched alkoxyalkyl group, a straight or branched alkenyl group or an aryl group. ,
R ⁶⁴ is a substituted or unsubstituted divalent aliphatic hydrocarbon group which may contain an oxygen atom, a substituted or unsubstituted divalent alicyclic hydrocarbon group which may contain an oxygen atom, a substituted or unsubstituted two that may include an oxygen atom Is an aromatic aromatic hydrocarbon group or an oxygen atom,
R ⁶⁵ is an acid labile group,
J is 0 or 1,
E, F and G are each 0 or an integer of 1 to 9, H is a positive integer of 1 to 10, and at the same time, E + F + G + H ≦ 10 is satisfied.
More specifically, in Chemical Formulas 29 and 30, R ⁶¹ to R ⁶³ each independently represent a hydrogen atom, a linear or branched alkyl group, a straight or branched alkoxy group, a straight or branched alkoxyalkyl group and a straight chain. Or a branched alkenyl group or an aryl group, and as the linear or branched alkyl group, for example, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, C1-C10 things, such as a hexyl group, a cyclohexyl group, and an adamantyl group, are preferable, and methyl group, an ethyl group, isopropyl group, and tert- butyl group are used more preferable especially. As a linear or branched alkoxy group, for example, a methoxy group, an ethoxy group, a propoxy group, isopropoxy group, n-butoxy group, sec-butoxy group, tert-butoxy group, hexyloxy group, cyclohexyloxy group C1-C8, such as these, are preferable, and a methoxy group, an ethoxy group, an isopropoxy group, and a tert- butoxy group are used more preferable especially. As the linear or branched alkoxyalkyl group, for example, those having 2 to 10 carbon atoms such as methoxymethyl group, 1-ethoxypropyl group, 1-propoxyethyl group, tert-butoxyethyl group, and the like are preferred. , 1-ethoxyethyl group, 1-ethoxypropyl group, 1-propoxyethyl group and the like are preferable. As the linear or branched alkenyl group, one having 2 to 4 carbon atoms such as a vinyl group, a propenyl group, an allyl group, and a butenyl group is preferable. The aryl group is preferably one having 6 to 14 carbon atoms such as a phenyl group, xylyl group, toluyl group and cumenyl group.
R ⁶⁴ is a substituted or unsubstituted divalent aliphatic hydrocarbon group which may contain an oxygen atom, a substituted or unsubstituted divalent alicyclic hydrocarbon group which may contain an oxygen atom, or a substituted or unsubstituted 2 that may contain an oxygen atom. It is a valent aromatic hydrocarbon group or an oxygen atom. In addition, J in the formula is 0 or 1, J is a 0, -R ⁶⁴ - becomes a single bond attachment portion.
As a substituted or unsubstituted divalent aliphatic hydrocarbon group which may contain an oxygen atom, for example, methylene group, ethylene group, n-propylene group, isopropylene group, n-butylene group, sec-butylene group, -CH ₂ O- group, a -CH ₂ CH ₂ O- group, a -CH ₂ OCH ₂ - groups such as the carbon number of 1 to 10 is preferable, and among them methylene group, an ethylene group, a -CH ₂ O- group, a -CH ₂ CH ₂ O- Groups are more preferably used.
As a substituted or unsubstituted bivalent alicyclic hydrocarbon group which may contain an oxygen atom, it is a 1, 4- cyclohexylene group, 2-oxacyclohexane- 1, 4- ylene group, 2-thiacyclohexane-, for example. The C5-C10 thing like the 1, 4- ylene group is mentioned.
As a substituted or unsubstituted bivalent aromatic hydrocarbon group which may contain an oxygen atom, for example, o-phenylene group, p-phenylene group, 1,2-xylene-3,6-ylene group, toluene-2,5-yl Having 6 to 14 carbon atoms, such as a ethylene group and a 1-cumene-2,5-ylene group, or a -CH ₂ Ph- group, -CH ₂ PhCH ₂ -group, -OCH ₂ Ph- group, -OCH ₂ PhCH ₂ O- And C6-C14 allylalkylene groups, such as group (Ph is a phenylene group).
In addition, R ⁶⁵ is an acid labile group, which refers to an acid labile group substituted with at least one functional group capable of decomposing a carboxyl group in the presence of an acid, and decomposes in the presence of an acid to release a functional group exhibiting alkali solubility. Although it does not specifically limit if it does, Especially group represented by following formula (31a), (31b) and (31c) is preferable.

In the formula,
R ⁶⁶ to R ⁶⁹ are each independently a hydrogen atom, a straight or branched alkyl group, a straight or branched alkoxy group, a straight or branched alkoxyalkyl group, a straight or branched alkenyl group or an aryl group. , At the same time, these groups may contain a carbonyl group in the chain, but not all of R ⁶⁶ to R ⁶⁹ should be hydrogen atoms;
R ⁶⁶ and R ⁶⁷ may combine with each other to form a ring,
R ⁶⁹ is a straight or branched alkyl group, a straight or branched alkoxyalkyl group, a straight or branched alkenyl group or an aryl group, and at the same time these groups may include a carbonyl group in the chain, and
R ⁶⁹ may combine with R ⁶⁶ to form a ring.
In this case, the linear or branched alkyl group, the linear or branched alkoxy group, the linear or branched alkoxyalkyl group, the linear or branched alkenyl group, and the aryl group are the same as those of R ⁶¹ to R ^63. It can illustrate that.
Also, as the ring which R ⁶⁶ and R ⁶⁷ are bonded to each other to form in Formula 31a, for example cyclohexylidene dengi, cyclopentyl Tilly dengi, 3-oxo-cyclohexylidene dengi, 3-oxo-4-oxa-cyclohexylidene The C4-C10 thing, such as a den group and 4-methylcyclohexylidene group, is mentioned.
In addition, in the formula (31b), R ⁶⁶ and R ⁶⁷ are formed by bonding to each other, for example, a 1-silacyclohexylidene group, a 1-silacyclopentylidene group, a 3-oxo-1-silacyclopentylidene group, The C3-C9 thing, such as a 4-methyl-1- silacyclopentylidene group, is mentioned.
In addition, as a ring formed by combining R <^69> and R <^66> in General formula (31c), it is a 2-oxacyclohexylidene group, the 2-oxacyclopentylidene group, 2-oxa-4-methylcyclohexylidene group, etc., for example. The thing of 4-10 carbon atoms is mentioned.
Examples of the group represented by the above formula (31a) include tert-amyl group, 1,1-dimethylethyl group, 1,1-dimethylbutyl group, 1-ethyl-1-methylpropyl group, 1,1-diethyl 3- such as 1,1-dimethyl-3-oxobutyl group, 3-oxocyclohexyl group, 1-methyl-3-oxo-4-oxacyclohexyl group, etc. other than tertiary alkyl groups having 4 to 10 carbon atoms such as propyl group Oxoalkyl groups are preferred.
As a group represented by the said General formula (31b), C3-C10 trialkyl silyl groups, such as a trimethylsilyl group, an ethyl dimethyl silyl group, a dimethyl propyl silyl group, a diethyl methyl silyl group, a triethyl silyl group, are preferable, for example.
As a group represented by the said General formula (31c), it is a 1-methoxymethyl group, 1-methoxyethyl group, 1-ethoxyethyl group, 1-ethoxypropyl group, 1-ethoxy isobutyl group, 1-n-pro, for example. Foxyethyl group, 1-tert-butoxyethyl group, 1-n-butoxyethyl group, 1-isobutoxyethyl group, 1-tert-pentoxyethyl group, 1-cyclohexyloxyethyl group, 1- (2'-n-butoxy Ethoxy) ethyl group, 1- (2'-ethylhexyl) oxyethyl group, 1- (4'-acetoxymethylcyclohexylmethyloxy) ethyl group, 1- {4 '-(tert-butoxycarbonyloxymethyl) cyclo It is preferable that it is C2-C8, such as a hexyl methyloxy} ethyl group, 2-methoxy-2-propyl group, 1-ethoxypropyl group, dimethoxymethyl group, diethoxymethyl group, tetrahydrofuranyl group, and tetrahydropyranyl group. .
In addition, in Formulas 29 and 30, E, F, and G are each a positive integer of 0 or 1 to 9, H is a positive integer of 1 to 10, and satisfies E + F + G + H ≦ 10.
Preferable specific examples of the compounds of the formulas (29) and (30) include compounds represented by the following formulas (32a) to (32j).
In the formula, R ⁷⁰ is an acid labile group.
As the ultraviolet absorber, bis (4-hydroxyphenyl) sulfoxide, bis (4-tert-butoxyphenyl) sulfoxide, bis (4-tert-butoxycarbonyloxyphenyl) sulfoxide, bis [4- ( Diaryl sulfoxide derivatives, such as 1-ethoxyethoxy) phenyl] sulfoxide, bis (4-hydroxyphenyl) sulfone, bis (4-tert- butoxyphenyl) sulfone, and bis (4-tert- butoxycarb) Diaryl sulfone derivatives, such as carbonyloxyphenyl) sulfone, bis [4- (1-ethoxyethoxy) phenyl] sulfone, and bis [4- (1-ethoxy propoxy) phenyl] sulfone, benzoquinone diazide, naph Diazo compounds such as toquinonediazide, anthraquinonediazide, diazofluorene, diazotetraron, diazophenanthrone, naphthoquinone-1,2-diazide-5-sulfonic acid chloride and 2,3, Full or partial ester compound with 4-trihydroxybenzophenone, full or partial ester of naphthoquinone-1,2-diazide-4-sulfonic acid chloride with 2,4,4'-trihydroxybenzophenone Quinone diazide group containing compounds, such as a tere compound, etc. can also be used.
As the ultraviolet absorber, 9-anthracenecarboxylic acid tert-butyl, 9-anthracenecarboxylic acid tert-amyl, 9-anthracenecarboxylic acid tert-methoxymethyl, 9-anthracenecarboxylic acid tert-ethoxyethyl, 9-anthracenecarboxylic acid tert-tetrahydropyranyl, 9-anthracenecarboxylic acid tert-tetrahydrofuranyl, naphthoquinone-1,2-diazide-5-sulfonic acid chloride and 2,3,4-trihydride And partial ester compounds with oxybenzophenone.
It is preferable that the compounding quantity of the ultraviolet absorber of the said (H) component is 0-10 parts, More preferably, it is 0.5-10 parts, More preferably, it is 1-5 parts with respect to 100 parts of base resins.
Moreover, the acetylene alcohol derivative can be mix | blended with the resist material of this invention as (I) component, and, thereby, storage stability can be improved.
As the acetylene alcohol derivative, those represented by the following formulas (33) and (34) can be preferably used.

In the formula,
R ⁷¹ , R ⁷² , R ⁷³ , R ⁷⁴ and R ⁷⁵ each represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms,
X and Y represent 0 or a positive number and satisfy 0 ≦ X ≦ 30, 0 ≦ Y ≦ 30, and 0 ≦ X + Y ≦ 40.
As the acetylene alcohol derivative, preferably, quinolin 61, sufinol 82, sufinol 104, sufinol 104E, sufinol 104H, sufinol 104A, sufinol TG, sufinol PC, sufinol 440, sufinol 465, sufinol 485 (Air Products & Chemicals Inc. product), Orfin E1004 (made by Nisshin Chemical Industries, Ltd.), etc. are mentioned.
The amount of the acetylene alcohol derivative added is 0.01 to 2% by weight, more preferably 0.02 to 1% by weight in 100% by weight of the resist composition. When less than 0.01 weight%, the effect of improving coating property and storage stability may not be fully acquired, and when more than 2 weight%, the resolution of a resist material may fall.
To the resist material of this invention, surfactant commonly used in order to improve applicability as an arbitrary component other than the said component can be added. In addition, the addition amount of arbitrary components can be used in a normal amount in the range which does not impair the effect of this invention.
Here, as surfactant, nonionic thing is preferable, and a perfluoroalkyl polyoxyethylene ethanol, a fluorinated alkyl ester, a perfluoroalkylamine oxide, a fluorine-containing organosiloxane type compound, etc. are mentioned. For example, fluoride "FC-430", "FC-431" (all are Sumitomo 3M Co., Ltd.), suffron "S-141", "S-145" (all are Asahi Glass Co., Ltd. product) , United "DS-401", "DS-403", "DS-451" (all Daikin High School Co., Ltd. product), mega pack "F-8151" (product of Dainippon Ink High School Co., Ltd.), " X-70-092 "," X-70-093 "(all are the Shin-Etsu Chemical Co., Ltd. product), etc. are mentioned. Preferably, fluoride "FC-430" (made by Sumitomo 3M Co., Ltd.) and "X-70-093" (made by Shin-Etsu Chemical Co., Ltd.) are mentioned.
In order to form a pattern using the chemically amplified positive resist material of the present invention, a known lithography can be employed, and the film thickness is 0.5 to 2.0 by a method such as rotation coating on a substrate such as a silicon wafer. It apply | coats to micrometer, and prebaks this on 60-150 degreeC for 1 to 10 minutes, Preferably it is 80-120 degreeC and 1 to 5 minutes on a hotplate. Subsequently, a mask for forming a desired pattern is covered on the resist film, and high-energy rays or electron beams such as ultraviolet rays, excimer lasers and X-rays having a wavelength of 300 nm or less are exposed at an exposure dose of about 1 to 200 mJ / cm ² , preferably. Preferably, it is irradiated to about 10 to 100 mJ / cm ² , and then post-exposure baking (PEB) is carried out on a hot plate at 60 to 150 ° C. for 1 to 5 minutes, preferably 80 to 120 ° C. for 1 to 3 minutes. Further, 0.1 to 5 minutes, preferably 2 to 3% tetramethylammonium hydroxide (TMAH) using a developing solution of an alkaline aqueous solution, such as 0.1 to 3 minutes, preferably 0.5 to 2 minutes, immersion method, puddle method, spray By developing by a conventional method such as a method, a desired pattern is formed on a substrate. In addition, the material of the present invention is particularly suitable for fine patterning by far ultraviolet rays or excimer lasers, X-rays and electron beams of 254 to 193 nm, even among high energy rays. In addition, when it is out of the upper limit and the lower limit of the above range, the desired pattern may not be obtained.
<Example>
Hereinafter, the present invention will be described in detail with reference to synthesis examples and examples, but the present invention is not limited to the following examples.
Synthesis Example 1
Synthesis of carboxylic acid terminated poly (p-1-ethoxyethoxystyrene-p-tert-butoxycarbonyloxystyrene-p-hydroxystyrene)
In a 2 L flask, 700 ml of tetrahydrofuran as a solvent and 7 x 10 ^-3 mol of sec-butyllithium as an initiator were added. 100 g of p-tert-butoxystyrene was added to this mixed solution at -78 degreeC, and it superposed | polymerized with stirring for 1 hour. This reaction solution appeared red. In addition, in order to set it as the carboxylic acid terminal, the polymerization termination reaction was performed by adding 1.4 x 10 <^-2> mol of chloroacetic acid tert-butyl to a reaction solution.
Next, the reaction mixture was poured into methanol, the obtained polymer was precipitated, then separated and dried to yield 99 g of a white polymer (carboxylic acid tert-butyl terminated poly p-tert-butoxystyrene). This polymer was found to have a weight average molecular weight of 1.4 × 10 ⁴ g / mol by light scattering method and a polymer having a very high monodispersity (Mw / Mn = 1.07) at the molecular weight distribution point from the GPC elution curve.
90 g of the carboxylic acid tert-butyl terminal polyp-tert-butoxystyrene was dissolved in 900 ml of acetone, and a small amount of concentrated hydrochloric acid was added at 60 ° C., stirred for 7 hours, and then poured into water to precipitate a polymer and washed. When dried, 60 g of polymer was obtained. The weight average molecular weight of the obtained polymer was 1.0 x 10 ⁴ g / mol. In addition, a peak derived from a tert-butyl group is not observed by ¹ H-NMR, and a polymer obtained by the presence of 170 ppm of C = O by ¹³ C-NMR has a narrow carboxylic acid terminal polyhydroxy. It was confirmed that it was styrene.
1,000 g of the obtained carboxylic acid terminal polyhydroxystyrene was dissolved in 1,000 ml of tetrahydrofuran, and a catalytic amount of p-toluenesulfonic acid was added, followed by addition of 30 g of ethyl vinyl ether while stirring at 30 ° C. After reacting for 1 hour, the solution was neutralized with concentrated ammonia water, and a neutralized reaction solution was added dropwise to 10 L of water to obtain a white solid. After filtration, it was dissolved in 500 ml of acetone, added dropwise to 10 L of water, filtered, and dried in vacuo. The obtained polymer confirmed that the hydroxyl group hydrogen atom of the carboxylic acid terminal polyhydroxystyrene was 27% ethoxyethylated from ¹ H-NMR.
Further, 50 g of the obtained partially ethoxyethoxylated carboxylic acid terminated polyhydroxystyrene was dissolved in 500 ml of pyridine and 7 g of di-tert-butyl dicarbonate was added while stirring at 45 ° C. After reacting for 1 hour, the reaction solution was added dropwise to 3 L of water to obtain a white solid. After filtration, the resultant was dissolved in 50 ml of acetone, added dropwise to 2 L of water, filtered, and vacuum dried to obtain a polymer. The obtained polymer has a structure represented by the following formula (Polym.1), the ethoxyethylation rate of the hydroxyl group hydrogen atom of the carboxylic acid terminal polyhydroxystyrene from ¹ H-NMR is 27%, and the t-BOC rate is 8%, The weight average molecular weight (Mw) and molecular weight distribution (Mw / Mn) were as shown in Table 1.
Synthesis Example 2
Synthesis of carboxylic acid terminated poly (p-1-ethoxypropoxystyrene-p-tert-butoxycarbonyloxystyrene-p-hydroxystyrene)
50 g of the carboxylic acid terminated polyhydroxystyrene obtained in the same manner as in Synthesis Example 1 was dissolved in 500 ml of tetrahydrofuran, except that the stop reaction of Synthesis Example 1 was changed to CO ₂ , thereby providing a catalytic amount of p-toluenesulfonic acid. After the addition, 27 g of ethoxypropenyl ether was added while stirring at 40 ° C. After reacting for 12 hours, the mixture was neutralized with concentrated ammonia water, and a neutralized reaction solution was added dropwise to 10 L of water to obtain a white solid. After filtration, it was dissolved in 500 ml of acetone, added dropwise to 10 L of water, filtered, and dried in vacuo. The obtained polymer confirmed that the hydroxyl group hydrogen atom of the carboxylic acid terminal polyhydroxy styrene was 24% ethoxypropyl by ¹ H-NMR.
Further, 50 g of the obtained partially ethoxypropoxylated carboxylic acid terminated polyhydroxystyrene was dissolved in 500 ml of pyridine, and 8 g of di-tertbutyl dicarbonate was added while stirring at 45 ° C. After reacting for 1 hour, the reaction solution was added dropwise to 3 L of water to obtain a white solid. After filtration, it was dissolved in 50 ml of acetone, added dropwise to 2 L of water, filtered, and vacuum dried to obtain a polymer. The obtained polymer has a structure represented by the following formula (Formula 2), the ethoxypropylation rate of the hydroxyl group hydrogen atom of the carboxylic acid terminal polyhydroxystyrene from ¹ H-NMR is 24%, the t-BOC rate is 11%, The weight average molecular weight (Mw) and molecular weight distribution (Mw / Mn) were as shown in Table 1.
Synthesis Example 3
Synthesis of Alcohol-terminated Poly (p-1-ethoxyethoxystyrene-p-tert-butoxycarbonyloxystyrene-p-hydroxystyrene)
In a 2 L flask, 700 ml of tetrahydrofuran as a solvent and 7 x 10 ^-3 mol of sec-butyllithium as an initiator were added. 100 g of p-tert-butoxystyrene was added to this mixed solution at -78 degreeC, and it superposed | polymerized with stirring for 1 hour. This reaction solution appeared red. Further, 1.4 × 10 ⁻² mol of ethylene oxide was added to the polymerization solution in order to obtain an alcohol terminal.
Next, the reaction mixture was poured into methanol, and the obtained polymer was precipitated, then separated and dried to obtain 99 g of a white polymer (alcohol terminated polyp-tert-butoxystyrene). This polymer was found to have a weight average molecular weight of 1.4 × 10 ⁴ g / mol by light scattering method and a polymer having a very high monodispersity (Mw / Mn = 1.07) at the molecular weight distribution point from the GPC elution curve.
90 g of the alcohol-terminated polyp-tert-butoxystyrene was dissolved in 900 ml of acetone, and a small amount of concentrated hydrochloric acid was added at 60 ° C., stirred for 7 hours, poured into water, the polymer was precipitated, washed, and dried. The polymer of was obtained. The weight average molecular weight of the obtained polymer was 1.0 x 10 ⁴ g / mol. In addition, the polymer obtained by the presence of 58 ppm of CH ₂ -OH with ¹ H-NMR that a peak is observed that is derived from a tert- butyl group, 4.17 to 4.28 ppm, ¹³ C-NMR as ¹ H-NMR It was confirmed that it is alcohol terminal polyhydroxystyrene with a narrow molecular weight distribution.
100 g of the obtained alcohol-terminated polyhydroxystyrene was dissolved in 1,000 ml of dimethylformamide, and a catalytic amount of p-toluenesulfonic acid pyridinium salt was added, followed by addition of 30 g of ethyl vinyl ether while stirring at 30 ° C. After reacting for 16 hours, the solution was neutralized with concentrated ammonia water and a neutralized reaction solution was added dropwise to 10 L of water to obtain a white solid. After filtration, it was dissolved in 500 ml of acetone, added dropwise to 10 L of water, filtered, and dried in vacuo. The obtained polymer confirmed that 27% ethoxyethylation of the hydroxyl group hydrogen atom of the alcohol-terminated polyhydroxystyrene from ¹ H-NMR.
Further, 50 g of the obtained partially ethoxyethoxylated alcohol-terminated polyhydroxystyrene was dissolved in 500 ml of pyridine and 7 g of di-tert-butyl dicarbonate was added with stirring at 45 ° C. After reacting for 1 hour, the reaction solution was added dropwise to 3 L of water to obtain a white solid. After filtration, it was dissolved in 50 ml of acetone, added dropwise to 2 L of water, filtered and dried in vacuo to obtain a polymer. The obtained polymer has a structure represented by the following formula (Poly.3), the ethoxyethylation rate of the hydroxyl group hydrogen atom of the alcohol-terminated polyhydroxystyrene from ¹ H-NMR is 27%, the t-BOC rate is 8%, and the weight average The molecular weight (Mw) and molecular weight distribution (Mw / Mn) were as shown in Table 1.
Synthesis Example 4
Synthesis of Triphenyl Terminated Poly (p-1-ethoxypropoxystyrene-p-hydroxystyrene)
1,000 ml of tetrahydrofuran as a solvent and 2.4 x 10 ^-2 mol of sec-butyllithium as an initiator were added to a 2 L flask. 300 g of p-tert-butoxystyrene was added to this mixed solution at -78 degreeC, and it superposed | polymerized with stirring for 1 hour. This reaction solution appeared red. In addition, in order to make a triphenyl terminal, the polymerization terminating reaction was performed by adding 3.0 x 10 <^-2> mol of triphenylmethyl chlorides to the reaction solution.
Next, the reaction mixture was poured into methanol, the obtained polymer was precipitated, separated and dried to give 298 g of a white polymer (triphenyl terminated polyp-tert-butoxystyrene). This polymer was found to have a weight average molecular weight of 1.4 × 10 ⁴ g / mol by light scattering method and a polymer having a very high monodispersity (Mw / Mn = 1.10) at the molecular weight distribution point from the GPC elution curve.
190 g of the triphenyl-terminated polyp-tert-butoxystyrene was dissolved in 1,000 ml of acetone, and a small amount of concentrated hydrochloric acid was added at 60 ° C., stirred for 7 hours, poured into water, the polymer was precipitated, washed and dried. g polymer was obtained. The weight average molecular weight of the obtained polymer was 9,500 g / mol. In addition, it was confirmed that the polymer obtained by the presence of a peak is not observed, ¹ H-NMR as being derived from triphenyl tert- butyl group in ¹ H-NMR of the molecular weight distribution is narrow triphenyl terminal polyhydroxystyrene.
100 g of triphenyl terminated polyhydroxystyrene obtained in a 2 L flask was dissolved in 700 ml of tetrahydrofuran, and a catalytic amount of methanesulfonic acid was added, followed by 25 g of ethoxypropenyl ether while stirring at 20 ° C. After reacting for 2 hours, the mixture was neutralized with concentrated ammonia water and a neutralized reaction solution was added dropwise to 10 L of water to obtain a white solid. After filtration, it was dissolved in 500 ml of acetone, added dropwise to 10 L of water, filtered, and dried in vacuo. The obtained polymer has the structure shown by following formula Polym.4, and it was confirmed by ¹ H-NMR that the hydroxyl group hydrogen atom of the triphenyl terminal polyhydroxy styrene was 26% ethoxypropyl. The weight average molecular weight (Mw) and molecular weight distribution (Mw / Mn) were as shown in Table 1.
Synthesis Example 5
Synthesis of Alcohol Carboxylic Acid Terminated Poly (p-1-ethoxypropoxystyrene-p-hydroxystyrene)
To a 2 L flask was added 2,000 ml of tetrahydrofuran as solvent and 1.3 x 10 ^-2 mol of sodium naphthalene as initiator. 200 g of p-tert-butoxystyrene was added to this mixed solution at -78 degreeC, and it superposed | polymerized stirring for 1 hour. This reaction solution appeared red. In addition, in order to set it as the carboxylic acid terminal, the polymerization terminating reaction was performed by adding 1.5 x 10 <^-2> mol of carbon dioxide dissolved in tetrahydrofuran to the reaction solution. On the other hand, the polymerization termination reaction to the hydroxyl group terminal, after which the reaction by the addition of a trimethoxy borane 1 x 10 ^-2 mol dissolved in tetrahydrofuran to the reaction solution, acetic acid 1 x 10 ^-2 mol, hydrogen peroxide 1.5 x 10 ^-2 mol was added.
Next, the reaction mixture was poured into methanol, and the obtained polymer was precipitated, then separated and dried to yield 198 g of a white polymer (alcohol carboxylic acid terminated polyp-tert-butoxystyrene). This polymer was found to have a weight average molecular weight of 1.6 × 10 ⁴ g / mol by light scattering method and a polymer having a very high monodispersity (Mw / Mn = 1.05) at the molecular weight distribution point from the GPC elution curve.
190 g of the alcoholic carboxylic acid terminated polyp-tert-butoxystyrene was dissolved in 1,000 ml of acetone, and a small amount of concentrated hydrochloric acid was added at 60 ° C., stirred for 7 hours, poured into water, the polymer was precipitated, washed and dried As a result, 125 g of polymer was obtained. The weight average molecular weight of the obtained polymer was 9,500 g / mol. Also, ^one does not show a peak derived from the tert- butyl groups to H-NMR, ¹³ C-NMR in the presence of 170 ppm of C = O, also ¹ 4.17 to 4.28 ppm by H-NMR, ¹³ C- NMR confirmed that the polymer obtained by the presence of 58 ppm of CH ₂ -OH was an alcohol-terminated polyhydroxystyrene having a narrow molecular weight distribution.
100 g of alcohol carboxylic acid terminal polyhydroxystyrene obtained in a 2 L flask was dissolved in 700 ml of tetrahydrofuran, and a catalytic amount of methanesulfonic acid was added, followed by addition of 30 g of ethoxypropenyl ether while stirring at 20 ° C. It was. After reacting for 2 hours, the mixture was neutralized with concentrated ammonia water and a neutralized reaction solution was added dropwise to 10 L of water to obtain a white solid. After filtration, it was dissolved in 500 ml of acetone, added dropwise to 10 L of water, filtered, and dried in vacuo. The obtained polymer Has a structure represented by the following formula Polym.5,^OneIt was confirmed from H-NMR that the hydroxyl group hydrogen atom of the alcohol carboxylic acid terminated polyhydroxystyrene was 28% ethoxypropylated. The weight average molecular weight (Mw) and molecular weight distribution (Mw / Mn) were as shown in Table 1.
Synthesis Example 6
Synthesis of carboxylic ester terminal triethylene glycol divinyl ether crosslinked poly (p-1-ethoxyethoxystyrene-p-hydroxystyrene)
Into a 2 L flask was added 1,000 ml of tetrahydrofuran as a solvent and 1.6 x 10 ^-2 mol of sec-butyllithium as an initiator. 200 g of p-tert-butoxystyrene was added to this mixed solution at -78 degreeC, and it superposed | polymerized with stirring for 1 hour. This reaction solution appeared red. In addition, in order to set it as the carboxylic acid ester terminal, the polymerization termination reaction was performed by adding 1.4 x 10 <^-2> mol of ethyl chlorocarbonates to a reaction solution.
Next, the reaction mixture was poured into methanol, and the obtained polymer was precipitated, then separated and dried to yield 198 g of a white polymer (carboxylic acid ester terminated polyp-tert-butoxystyrene). This polymer was found to have a weight average molecular weight of 1.2 × 10 ⁴ g / mol by light scattering method and a polymer having a very high monodispersity (Mw / Mn = 1.03) at the molecular weight distribution point from the GPC elution curve.
190 g of the carboxylic acid ester-terminated poly p-tert-butoxystyrene was dissolved in 900 ml of acetone, and a small amount of concentrated hydrochloric acid was added at 60 ° C., stirred for 7 hours, poured into water, the polymer was precipitated, washed and dried This gave 60 g of polymer. The weight average molecular weight of the obtained polymer was 8,500 g / mol. In addition, a peak derived from a tert-butyl group is not observed by ¹ H-NMR, and a polymer obtained by the presence of 170 ppm of C = O by ¹³ C-NMR has a narrow carboxylic acid ester terminal polyhydride. It was confirmed that it is oxy styrene.
100 g of the obtained carboxylic acid ester terminated polyhydroxystyrene was added to a 2 L flask, dissolved in 1,000 ml of dimethylformamide, and a catalytic amount of p-toluenesulfonic acid was added. After adding 4 g of ether and reacting for 1 hour, 22 g of ethyl vinyl ether and 4 g of triethylene glycol divinyl ether were added. After reacting for 1 hour, the solution was neutralized with concentrated ammonia water and a neutralized reaction solution was added dropwise to 10 L of water to obtain a white solid. After filtration, it was dissolved in 500 ml of acetone, added dropwise to 10 L of water, filtered, and dried in vacuo. The obtained polymer It has a structure represented by the following formula Polym.6,^OneIt was confirmed from H-NMR that the hydroxyl group hydrogen atom of the carboxylic acid ester terminated polyhydroxystyrene was 30% ethoxyethylated and 3% crosslinked, and the weight average molecular weight was as shown in Table 1.
Synthesis Example 7
Synthesis of Alcohol Terminal 1,4-Divinyloxymethylcyclohexane Crosslinked Poly (p-1-ethoxyethoxystyrene-p-tert-butoxycarbonyloxystyrene-p-hydroxystyrene)
Into a 2 L flask was added 3,000 ml of tetrahydrofuran as a solvent and 2.1 x 10 ^-3 mol of sec-butyllithium as an initiator. 300 g of p-tert-butoxystyrene was added to this mixed solution at -78 degreeC, and it superposed | polymerized with stirring for 1 hour. This reaction solution appeared red. In addition, in order to make it an alcohol terminal, the polymerization terminating reaction was performed by adding 1.0x10 <^-1> mol of ethylene oxide to the reaction solution.
Next, the reaction mixture was poured into methanol, and the obtained polymer was precipitated, then separated and dried to yield 295 g of a white polymer (alcohol terminated polyp-tert-butoxystyrene). This polymer had a weight average molecular weight of 1.4 × 10 ⁴ g / mol by light scattering method, and it was confirmed from the GPC elution curve that the polymer had a very high monodispersity (Mw / Mn = 1.05) at the molecular weight distribution point.
200 g of the alcohol-terminated poly p-tert-butoxystyrene was dissolved in 2,000 ml of acetone, and a small amount of concentrated hydrochloric acid was added at 60 ° C., stirred for 7 hours, poured into water, the polymer was precipitated, washed, and dried. The polymer of was obtained. The weight average molecular weight of the obtained polymer was 1.0 x 10 ⁴ g / mol. In addition, the polymer obtained by the presence of 58 ppm of CH ₂ -OH with ¹ H-NMR that a peak is observed that is derived from a tert- butyl group, 4.17 to 4.28 ppm, ¹³ C-NMR as ¹ H-NMR It was confirmed that it is alcohol terminal polyhydroxystyrene with a narrow molecular weight distribution.
100 g of the alcohol-terminated polyhydroxystyrene obtained in a 2 L flask was dissolved in 1,000 ml of dimethylformamide, and a catalytic amount of p-toluenesulfonic acid was added, followed by stirring at 20 ° C., 15 g of ethyl vinyl ether, 1, 9 g of 4-divinyloxymethylcyclohexane were added. After reacting for 1 hour, the solution was neutralized with concentrated ammonia water, and a neutralized reaction solution was added dropwise to 10 L of water to obtain a white solid. After filtration, it was dissolved in 500 ml of acetone, added dropwise to 10 L of water, filtered, and dried in vacuo. It was confirmed from the ¹ H-NMR and ¹³ C-NMR that the obtained polymer was ethoxyethylated and 4% crosslinked with 18% of the hydroxyl group hydrogen atoms of the alcohol-terminated polyhydroxystyrene.
Further, 50 g of the obtained partially crosslinked alcohol terminal ethoxyethoxylated polyhydroxystyrene was dissolved in 500 ml of pyridine, and 12 g of di-tert-butyl dicarbonate was added while stirring at 45 ° C. After reacting for 1 hour, the reaction solution was added dropwise to 3 L of water to obtain a white solid. After filtration, it was dissolved in 50 ml of acetone, added dropwise to 2 L of water, filtered and dried in vacuo to obtain a polymer. The obtained polymer has a structure represented by the following formula (polym.7), and the ethoxyethylation rate of the hydroxyl group hydrogen atom of the alcohol-terminated polyhydroxystyrene is 18%, the crosslinking rate is 4%, and the hydrogen atom of the hydroxyl group from ¹ H-NMR. The tert-butoxycarbonylation rate was 10% and the weight average molecular weight was as shown in Table 1.
Synthesis Example 8
Synthesis of carboxylic acid terminal 1,2-ethanedioldivinylether crosslinked poly (p-1-ethoxyethoxystyrene-p-hydroxystyrene)
Except for changing the stopping reaction of Synthesis Example 1 to CO ₂ , 200 g of the carboxylic acid terminated polyhydroxystyrene obtained in the same manner as in Synthesis Example 1 was dissolved in 2,000 ml of tetrahydrofuran, and 4 g of methanesulfonic acid was added. Then, 44 g of 2-chloro-2-ethoxyethyl was added stirring at 30 degreeC, and it was made to react for 3 hours. Then, 10 g of 1,2-ethanediol divinyl ether was added and reacted for 0.5 hour, followed by neutralization with concentrated ammonia water. The reaction solution was solvent-exchanged with ethyl acetate, purified six times using pure water and a small amount of acetone, and then solvent-exchanged with acetone and added dropwise to 2 L of pure water to obtain a white solid. This was filtered, washed twice with pure water, filtered and dried in vacuo. The obtained polymer has a structure represented by the following formula Polym.8, wherein 20% of the hydroxyl group hydrogen atoms of the carboxylic acid terminal polyhydroxystyrene are ethoxyethylated and 4% crosslinked from ¹ H-NMR and ¹³ C-NMR. And 20% of the carboxylic acid ends were ethoxyethylated and the weight average molecular weight was as shown in Table 1.
Synthesis Example 9
Synthesis of Alcohol-terminated 1,4-dimethylcyclohexyldichloroethylether crosslinked poly (p-1-ethoxypropoxystyrene-p-tert-butoxycarbonyloxystyrene-p-hydroxystyrene)
Into a 2 L flask was added 1,000 ml of tetrahydrofuran as a solvent and 5 x 10 ^-3 mol of sec-butyllithium as an initiator. 100 g of p-tert-butoxystyrene was added to this mixed solution at -78 degreeC, and it superposed | polymerized with stirring for 1 hour. This reaction solution appeared red. In addition, 5 x 10 ^-2 mol of ethylene oxide was added to the polymerization solution to obtain an alcohol terminal.
Next, the reaction mixture was poured into methanol, and the obtained polymer was precipitated, then separated and dried to obtain 99 g of a white polymer (alcohol terminated polyp-tert-butoxystyrene). This polymer was found to have a weight average molecular weight of 1.9 × 10 ⁴ g / mol by light scattering method and a polymer having a very high monodispersity (Mw / Mn = 1.09) at the molecular weight distribution point from the GPC elution curve.
90 g of the alcohol-terminated poly p-tert-butoxystyrene was dissolved in 1,000 ml of acetone, and a small amount of concentrated hydrochloric acid was added at 60 ° C., stirred for 7 hours, poured into water, the polymer was precipitated, washed, and dried. The polymer of was obtained. The weight average molecular weight of the obtained polymer was 1.0 x 10 ⁴ g / mol. In addition, the polymer obtained by the presence of 58 ppm of CH ₂ -OH with ¹ H-NMR that a peak is observed that is derived from a tert- butyl group, 4.17 to 4.28 ppm, ¹³ C-NMR as ¹ H-NMR It was confirmed that it is alcohol terminal polyhydroxystyrene with a narrow molecular weight distribution.
50 g of the alcohol-terminated polyhydroxystyrene obtained in a 2 L flask was dissolved in 1,000 ml of tetrahydrofuran, and 3.9 g of methanesulfonic acid were added, followed by stirring at 30 ° C with 2-chloro-2-ethoxypropyl 9 After adding g and reacting for 3 hours, 4 g of 1,4-dimethylcyclohexyldichloroethyl ether was added. After reacting for 0.5 hours, the mixture was neutralized with concentrated ammonia water. The reaction solution was solvent-exchanged with ethyl acetate, purified six times using pure water and a small amount of acetone, and then solvent-exchanged with acetone and added dropwise to 20 L of pure water to obtain a white solid. This was filtered, washed twice with pure water, filtered and dried in vacuo.
Further, 50 g of the obtained partially crosslinked alcohol terminal ethoxypropoxylated polyhydroxy styrene was dissolved in 300 g of pyridine, and 4 g of di-tert-butyl dicarbonate was added while stirring at 40 ° C. After reacting for 1 hour, the reaction solution was added dropwise to 10 L of water to obtain a white solid. After filtration, it was dissolved in 200 ml of acetone, added dropwise to 2 L of water, filtered, and vacuum dried to obtain a polymer. The obtained polymer was prepared by the following formula Polym. Having a structure represented by 9, 19% of the hydroxyl group hydrogen atoms of the alcohol-terminated polyhydroxystyrene from ¹ H-NMR and ¹³ C-NMR are ethoxypropylated, 5% are tert-butoxycarbonylated and 4% Was crosslinked, 19% of the alcohol terminus was ethoxypropoxylated, and 4% was crosslinked, and the weight average molecular weight was as shown in Table 1.
Synthesis Example 10
Synthesis of carboxylic acid sock end 1,4-butanedioldivinylether crosslinked poly (p-1-ethoxyethoxystyrene-p-tert-butoxycarbonyloxystyrene-p-hydroxystyrene)
To a 2 L flask was added 2,000 ml of tetrahydrofuran as a solvent and 3 x 10 ^-3 mol of sodium naphthalene as the sock end initiator. 100 g of p-tert-butoxystyrene was added to this mixed solution at -78 degreeC, and it superposed | polymerized with stirring for 1 hour. This reaction solution appeared red. In addition, in order to set it as the carboxylic acid sock end, the polymerization termination reaction was performed by adding 2 x 10 <^-1> mol of carbonic acid gas dissolved in tetrahydrofuran to the reaction solution.
Next, the reaction mixture was poured into methanol, and the obtained polymer was precipitated, followed by separation and drying, whereby 99 g of a white polymer (carboxylic acid ended polyp-tert-butoxystyrene) was obtained. This polymer had a weight average molecular weight of 1.5 × 10 ⁴ g / mol by the light scattering method, and it was confirmed from the GPC elution curve that the polymer was very high in monodispersity (Mw / Mn = 1.15) at the molecular weight distribution point.
90 g of the carboxylic acid sock end poly p-tert-butoxystyrene was dissolved in 900 ml of acetone, and a small amount of concentrated hydrochloric acid was added at 60 ° C., stirred for 7 hours, poured into water, the polymer was precipitated, washed and dried. This gave 60 g of polymer. The weight average molecular weight of the obtained polymer was 1.0 x 10 ⁴ g / mol. In addition, a peak derived from a tert-butyl group was not observed by ¹ H-NMR, and a polymer obtained by the presence of 170 ppm of C = O by ¹³ C-NMR has a narrow molecular weight distribution. It was confirmed that it is hydroxy styrene.
Into a 2-liter flask, 90 g of the carboxylic acid sockdan polyhydroxystyrene was added, dissolved in 1,000 ml of tetrahydrofuran, and 1 g of methanesulfonic acid was added, followed by stirring at 30 ° C to 2-chloro-2-. 21 g of oxyethyl was added and reacted for 1 hour. Subsequently, after adding 7 g of 1, 4- butanediol divinyl ethers and reacting for 0.5 hour, it neutralized with concentrated ammonia water. The reaction solution was solvent-exchanged with ethyl acetate, separated and washed six times with pure water, and then solvent-exchanged with acetone and added dropwise to 20 L of pure water to obtain a white solid. This was filtered, washed twice with pure water, filtered and dried in vacuo.
Further, 50 g of the obtained partially ethoxyethoxylated carboxylic acid sock end polyhydroxystyrene was dissolved in 500 ml of pyridine, and 7 g of di-tert-butyl dicarbonate was added while stirring at 45 ° C. After reacting for 1 hour, the reaction solution was added dropwise to 3 L of water to obtain a white solid. After filtration, it was dissolved in 50 ml of acetone, added dropwise to 2 L of water, filtered and dried in vacuo to obtain a polymer. The obtained polymer has a structure represented by the following formula (Poly. 10), and 25% of the hydroxyl group hydrogen atoms of the carboxylic acid terminal polyhydroxystyrene from ¹ H-NMR and ¹³ C-NMR are ethoxyethylated and 5% It was confirmed that BOCization, 5.5% was crosslinked, and the carboxylic acid single end and the sock end were totaled 25% ethoxyethyl, and the weight average molecular weight was as shown in Table 1.
Synthesis Example 11
Synthesis of hydroxyl terminal propylene glycol divinyl ether crosslinked poly (p-n-butoxyethoxystyrene-p-hydroxystyrene)
Into a 2 L flask was added 3,000 ml of tetrahydrofuran as a solvent and 1 x 10 ^-2 mol of sec-butyllithium as the sock end initiator. 200 g of p-tert-butoxystyrene was added to this mixed solution at -78 degreeC, and it superposed | polymerized stirring for 1 hour. This reaction solution appeared red. In addition, after the reaction to the hydroxyl group terminated the polymerization reaction is stopped adding a trimethoxy borane 1 x 10 ^-2 mol dissolved in tetrahydrofuran to the reaction solution, acetic acid 1 x 10 ^-2 mol, hydrogen peroxide 1.5 x 10 ^{This was done} by adding ^-2 mol.
Next, the reaction mixture was poured into methanol, and the obtained polymer was precipitated, then separated and dried to yield 198 g of a white polymer (hydroxyl terminated polyp-tert-butoxystyrene). This polymer was found to have a weight average molecular weight of 2.1 × 10 ⁴ g / mol by light scattering method and a polymer having a very high monodispersity (Mw / Mn = 1.16) at the molecular weight distribution point from the GPC elution curve.
150 g of the hydroxyl group-terminated poly p-tert-butoxystyrene was dissolved in 900 ml of acetone, and a small amount of concentrated hydrochloric acid was added at 60 ° C., stirred for 7 hours, poured into water, the polymer was precipitated, washed and dried, and then 100 g. The polymer of was obtained. The weight average molecular weight of the obtained polymer was 1.4 x 10 ⁴ g / mol. In addition, the polymer obtained by the presence of 58 ppm of CH ₂ -OH with ¹ H-NMR that a peak is observed that is derived from a tert- butyl group, 4.17 to 4.28 ppm, ¹³ C-NMR as ¹ H-NMR It was confirmed that it is a hydroxyl group terminal polyhydroxy styrene with a narrow molecular weight distribution.
90 g of hydroxyl-terminated polyhydroxystyrene obtained in a 2 L flask was added, dissolved in 1,000 ml of tetrahydrofuran, and 1 g of methanesulfonic acid was added, followed by 2-chloro-2-ethoxybutyl 21 while stirring at 30 ° C. g was added and reacted for 1 hour. Subsequently, 7 g of propylene glycol divinyl ether was added and reacted for 1 hour, and then neutralized with concentrated ammonia water. The reaction solution was solvent-exchanged with ethyl acetate, purified six times with pure water, solvent-exchanged with acetone, and added dropwise to 20 L of pure water to obtain a white solid. After filtration, the mixture was washed twice with pure water, filtered and dried in vacuo to obtain a polymer. The obtained polymer has a structure represented by the following formula Polym.11, wherein 25% of the hydroxyl hydrogen atoms of the hydroxyl-terminated polyhydroxystyrene are butoxyethylated and 5.5% crosslinked from ¹ H-NMR and ¹³ C-NMR. It was confirmed that 6% of the hydroxyl groups were butoxyethylated, and the weight average molecular weight was as shown in Table 1.
Synthesis Example 12
Synthesis of hydroxyl group 1,4-butanedioldivinylether crosslinked poly (p-n-butoxyethoxystyrene-p-hydroxystyrene)
Except for changing the terminating reaction of Synthesis Example 10 to chloromethyl vinyl ether, 200 g of hydroxyl group sockdan polyhydroxystyrene obtained in the same manner as in Synthesis Example 10 was dissolved in 2,000 ml of tetrahydrofuran, and 4 g of methanesulfonic acid was added. After the addition, 44 g of 2-chloro-2-ethoxybutyl was added with stirring at 30 ° C, and reacted for 3 hours. Then, 10 g of 1,4-butanedioldivinyl ether was added and reacted for 0.5 hour, followed by neutralization with concentrated ammonia water. The reaction solution was solvent-exchanged with ethyl acetate, purified six times using pure water and a small amount of acetone, and then solvent-exchanged with acetone and added dropwise to 2 L of pure water to obtain a white solid. This was filtered, washed twice with pure water, filtered and dried in vacuo. The obtained polymer has a structure represented by the following formula (Poly. ^12), and 20% of the hydroxyl group hydrogen atoms of the hydroxyl group polyhydroxystyrene from ¹ H-NMR and ¹³ C-NMR are butoxyethoxylated, and 4% is crosslinked. It was confirmed that the total 20% of the hydroxyl one end and the sock end was butoxyethylated, and the weight average molecular weight was as shown in Table 1.
The structure of the obtained polymer was as follows, and each substitution rate was as showing in Table 1. In addition, in the following formula, R represents the crosslinking group which bridge | crosslinks the following unit U between molecules, or in a molecule | numerator, (R) shows the state which the crosslinking group R has couple | bonded.
U:



Synthesis ExampleCreation ratio (molar ratio)Creation ratio (molar ratio)PHS ^* MWPHS ^* , Mw / MnMw of high molecular compound p1p2q1q2Y'1Y'2Y'3 1 [Polym.1]65278----1.0714500 2 [Polym. 2]652411----1.0615000 3 [Polym. 3]65278----1.0617500 4 [Polym.4]7426----1.1012000 5 [Polym.5]7228----1.0513000 6 [Polym. 6]36730---82001.0325700 7 [Polym.7]4681810---96001.0530000 8 [Polym.8]476208020-96001.0632000 9 [Polym.9]47219577194130001.0928000 10 [Polym.10]5.564.52557525102001.1536000 11 [Polym. 11]5.569.5257525-142801.1630000 12 [Polym.12]472248020-96001.1028000 * Polyhydroxystyrene
<Example>
The polymer compound (Polym. 1-12) obtained by the said synthesis example is a base resin, the acid generator represented by following formula (PAG. 1-10), the dissolution control agent represented by following formula (DRR. 1 and 2), A component for a resist material selected from a basic compound and an aromatic compound having a group represented by ≡C-COOH in a molecule represented by the following formulas (ACC. 1 and 2) is dissolved in a solvent, and the resist is used in the composition shown in Tables 2 and 3 The liquids were combined. As needed, 0.1 part of surfactant fluoride "FC-430" (made by Sumitomo 3M Corporation) was added, and film formation property was improved.
Each of these compositions was filtered through a 0.1 micron Teflon filter to prepare a resist liquid. This was spun onto a silicon wafer, and the silicon wafer was baked for 90 seconds on a 100 ° C. hot plate. In addition, the film thickness was set to 0.55 micrometer.
Then, the resultant was exposed to light using an excimer laser stepper (Nikon, NSR-2005EX NA = 0.5) through a mask for forming a desired pattern, baked at 110 ° C. for 90 seconds, and a 2.38% aqueous tetramethylammonium hydroxy solution. After 60 seconds of development, a positive pattern was obtained.
The obtained resist pattern was evaluated as follows.
First, sensitivity (Eth) was calculated | required. Next, the exposure amount for resolving the top and bottom of the line and space of 0.24 μm in a 1: 1 ratio is set as the optimum exposure amount (sensitivity: Eop), and the separated lines at this exposure amount The minimum line width of the end space was taken as the resolution of the evaluation resist. The resolution when the time elapsed from the exposure at the same exposure amount to the heat treatment (PED) was 2 hours was also observed. In addition, the shape of the resolved resist pattern was observed using a scanning electron microscope, and as a heat resistance test, the resist pattern was heated on a hot plate at 130 ° C. for 10 minutes to observe changes in the pattern shape before and after heating.
Table 4 shows the evaluation results of Tables 2 and 3 and the resist compositions.


ExampleResist material composition [Blank: Composition ratio (unit: parts by weight)] Base material resinAcid generatorDissolution control agentBasic compoundadditivesolvent OnePolym. 1 (80)PAG.1 (2)-TEA (0.1)-PGMEA (400) / EL (100) 2Polym. 2 (80)PAG.2 (2)DRR.1 (4)PEA (0.1)ACC.1 (0.1)PGMEA (500) 3Polym. 3 (80)PAG.3 (2)-TEA (0.1)-PGMEA (500) 4Polym. 4 (80)PAG.1 (1) PAG.3 (2)-TEA (0.1)-PGMEA (400) / EL (100) 5Polym. 5 (80)PAG.1 (1) PAG.3 (2)-TMMEA (0.1)-PGMEA (400) / EL (100) 6Polym. 6 (80)PAG.4 (2)-TEA (0.1)-PGMEA (530) 7Polym. 7 (80)PAG.5 (2)-TEA (0.1)-PGMEA (500) 8Polym. 8 (80)PAG.2 (2)-TEA (0.1)ACC.2 (0.1)PGMEA (500) 9Polym. 9 (80)PAG.1 (1) PAG.4 (2)DRR.2 (4)TEA (0.1)-PGMEA (500) 10Polym. 10 (80)PAG.1 (1) PAG.3 (2)-TEA (0.1)ACC.1 (0.1)PGMEA (500) 11Polym. 11 (80)PAG.1 (1) PAG.6 (2)-TEA (0.1)-PGMEA (500) 12Polym. 12 (80)PAG.1 (1) PAG.7 (2)-TEA (0.1)-PGMEA (500)
ExampleResist material composition [Blank: Composition ratio (unit: parts by weight)] Base material resinAcid generatorDissolution control agentBasic compoundadditivesolvent 13Polym. 3 (80)PAG.1 (1) PAG.4 (1) PAG.9 (2)-TMEEA (0.1)-PGMEA (400) / EL (100) 14Polym. 4 (80)PAG.1 (1) PAG.4 (1) PAG.10 (2)-TMMEA (0.1)-PGMEA (400) / EL (100) 15Polym. 5 (80)PAG.1 (1) PAG.4 (1) PAG.8 (2)-TMMEA (0.1)-PGMEA (400) / EL (100) 16Polym. 3 (80)PAG.1 (1) PAG.8 (2)-TEA (0.1)-PGMEA (400) / EL (100) 17Polym. 1 (40) Polym. 3 (40)PAG.1 (1) PAG.4 (1) PAG.8 (2)-TEA (0.1)-PGMEA (400) / EL (100) 18Polym. 1 (60) Polym. 9 (20)PAG.4 (1) PAG.8 (2)-TEA (0.1)-PGMEA (400) / EL (100)
PGMEA: propylene glycol monomethyl ether acetate
EL: ethyl lactate
TEA: Triethanolamine
PEA: piperidineethanolamine
TMMEA: Tris {2- (methoxymethoxy) ethyl} amine
TMEMEA: tris [2-{(2-methoxyethoxy) methoxy} ethyl] amine
ExampleSensitivity: Eop (mJ / cm ² )Resolution (μm)Shape of time / PED two hoursHeat resistance ImmediatelyPED 2 hours One150.20.2RectangleO 2200.20.2RectangleO 3250.20.2RectangleO 4230.20.2RectangleO 5280.20.2RectangleO 6240.20.2RectangleO 7200.20.2RectangleO 8140.20.2RectangleO 9120.20.2RectangleO 10200.20.2RectangleO 11200.20.2RectangleO 12150.20.2RectangleO 13210.20.2RectangleO 14220.20.2RectangleO 15250.20.2RectangleO 16230.20.2RectangleO 17180.20.2RectangleO 18190.20.2RectangleO Heat resistance O: No change of pattern shape before and after heating
Next, to the resist composition to which the orifice E1004 (Nisshin Chemical Co., Ltd. product) of the following structural formula was added to the resist composition of Example 6, 7, 8, and 9 as the acetylene alcohol derivative so that it may become 0.05 weight% of the whole. The storage stability with respect to the increase of particle (foreign material) was observed. The results are shown in Table 5. At this time, KL-20A (manufactured by Leon Co., Ltd.) was used as the counterpart in the liquid, and the particle size of 0.3 µm or more in the acceleration test by 40 ° C storage was monitored.
Immediately after filtration (pcs / ml)4 months after no addition (ml / ml)4 months after addition (ml / ml) Example63225 75217 85157 94155
When the polymer compound of the present invention is used as a base resin of a chemically amplified positive resist material, it is sensitive to high energy rays, has excellent sensitivity, resolution, and plasma etching resistance, and also has excellent heat resistance and reproducibility of the resist pattern. . In addition, the pattern hardly protrudes, and the dimensional controllability is excellent. Moreover, storage stability improves by mix | blending an acetylene alcohol derivative. Therefore, when the polymer compound of the present invention is used as a base resin of a chemically amplified positive resist material, since it can be a resist material having a low absorption at an exposure wavelength of a KrF excimer laser, in particular, it is fine and a substrate. A pattern perpendicular to the can be easily formed. Therefore, it is preferable as a fine pattern formation material for ultra-LSI manufacture, and a pattern formation method.

权利要求:
Claims (12)
[1" claim-type="Currently amended] A polymer compound whose terminal is represented by the following Formula 1a and whose weight average molecular weight is 1,000 to 500,000.
<Formula 1a>

<Formula 2>

<Formula 3>

<Formula 4>

In the formula,
R represents a hydroxyl group or an OR ³ group, at least one is a hydroxyl group,
R ¹ represents a hydrogen atom or a methyl group,
R ² represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms,
R ³ represents an acid labile group,
x is 0 or a positive integer, y is a positive integer, and x + y≤5 is a number,
k is 0 or a positive integer, m is 0 or a positive integer, n is a positive integer, and k + m + n ≦ 5,
p and q are positive numbers and are numbers satisfying 0 <q≤0.8 and p + q = 1, and
when n is 2 or more, R ³ may be the same as or different from each other,
Δ is a number having a weight average molecular weight of 1,000 to 500,000,
P is a hydrogen atom, a linear, branched or cyclic alkyl or alkenyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 50 carbon atoms, a carboxyl group, a hydroxyl group, or a group represented by Formula 2, 3 or 4, Not both terminals become hydrogen atoms at the same time,
R ⁴ represents an (r + 1) valence aliphatic hydrocarbon group having 1 to 30 carbon atoms, an alicyclic saturated hydrocarbon group or an aromatic hydrocarbon group having 6 to 50 carbon atoms,
R ⁵ represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 50 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, or a hydroxyl group,
R ^5a represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms or an aromatic hydrocarbon group having 6 to 50 carbon atoms,
h is 0 or 1,
r represents a positive integer of 1 to 3, and also
The phenolic hydroxyl group represented by R of the polymer compound represented by the formula (1a), the hydroxyl group of R ⁵ in the formula (2), and one or two or more hydroxyl groups of the hydroxyl group in the formula (3) are alkenyl ether compounds or halogenated alkyl ethers It may be crosslinked intramolecularly and / or between molecules by a crosslinking group having a COC group obtained by reaction with a compound, and the total amount of the acid labile group and the crosslinking group is represented by the phenolic hydroxyl group of Formula 1, It is the ratio of the average of more than 0 mol% and 80 mol% or less of the whole hydrogen atom of the hydroxyl group of R <^{5> and} the hydroxyl group in the said General formula (3).
[2" claim-type="Currently amended] The polymer compound according to claim 1, represented by the following general formula (5a).
<Formula 5a>

In the formula,
R represents a hydroxyl group or an OR ³ group, at least one is a hydroxyl group,
R ¹ represents a hydrogen atom or a methyl group,
R ² represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms,
R ³ represents an acid labile group,
R ⁹ and R ¹⁰ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms,
R ¹¹ represents a monovalent hydrocarbon group which may have 1 to 18 carbon atoms,
R ⁹ and R ¹⁰ , R ⁹ and R ^11, and R ¹⁰ and R ¹¹ may form a ring, and in the case of forming a ring, R ⁹ , R ¹⁰ and R ¹¹ may be each linear or minute having 1 to 18 carbon atoms. Represents an alkylene group on the ground,
R ¹² represents a C 4-20 tertiary alkyl group, a trialkylsilyl group each having 1 to 6 carbon atoms, an alkyl group having 4 to 20 carbon atoms, or a group represented by -CR ⁹ R ¹⁰ OR ¹¹ ,
a is an integer of 0 to 6,
p1 and p2 are positive, q1 and q2 are zero or positive, 0 <p1 / (p1 + q1 + q2 + p2) ≤0.8, 0≤q1 / (p1 + q1 + q2 + p2) ≤0.8, 0≤q2 /(p1+q1+q2+p2)≤0.8 and p1 + q1 + q2 + p2 = 1, but q1 and q2 do not become 0 at the same time,
x, y, k, m, n, Δ and P are each as defined in claim 1, and
The hydrogen atom of one or two or more hydroxyl groups of the phenolic hydroxyl group represented by R of the polymer compound represented by Formula 5a, the hydroxyl group of R ⁵ in Formula 2, and the hydroxyl group in Formula 3 is separated, and its oxygen atom is It may be crosslinked intramolecularly and / or between molecules by a crosslinking group having a COC group represented by 6aa or 6ba, and the total amount of the acid labile group and the crosslinking group is a phenolic hydroxyl group represented by R of the polymer compound of Formula 5a. And an average of more than 0 mol% and not more than 80 mol% of the total hydrogen atoms of the hydroxyl group of R ⁵ in Formula 2 and the hydroxyl group in Formula 3 above.
<Formula 6aa>

<Formula 6ba>

(In the meal,
R ⁶ and R ⁷ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms, or R ⁶ and R ⁷ may form a ring, and in the case of forming a ring, R ⁶ and R ⁷ each represents a linear or branched alkylene group having 1 to 8 carbon atoms,
R ⁸ represents a linear, branched or cyclic alkylene group having 1 to 10 carbon atoms,
d is 0 or an integer from 1 to 10,
A represents a c-valent aliphatic or alicyclic saturated hydrocarbon group, aromatic hydrocarbon group or heterocyclic group having 1 to 50 carbon atoms, and these groups may be interrupted by a hetero atom, and a part of the hydrogen atoms bonded to the carbon atom is a hydroxyl group. , May be substituted by a carboxyl group, an acyl group or a halogen atom,
B represents -CO-O-, -NHCO-O- or -NHCONH-,
c is 2 to 8 and c 'is an integer of 1 to 7).
[3" claim-type="Currently amended] According to claim 1 or 2, In the polymer compound represented by the formula (1a) or (5a), R ³ is a group represented by the formula (7a) or 8, a C4-20 tertiary alkyl group, each alkyl group has 1 to 6 carbon atoms 1 or 2 or more types of high molecular compounds selected from an individual trialkyl silyl group and an oxoalkyl group having 4 to 20 carbon atoms.
<Formula 7a>

<Formula 8>

In the formula,
R ⁹ and R ¹⁰ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms,
R ¹¹ represents a monovalent hydrocarbon group which may have 1 to 18 carbon atoms,
R ⁹ and R ¹⁰ , R ⁹ and R ^11, and R ¹⁰ and R ¹¹ may form a ring, and in the case of forming a ring, R ⁹ , R ¹⁰ and R ¹¹ may be each linear or minute having 1 to 18 carbon atoms. Represents an alkylene group on the ground,
R ¹² represents a C4-20 tertiary alkyl group, a trialkylsilyl group each having 1 to 6 carbon atoms, an alkyl group having 4 to 20 carbon atoms, or a group represented by Formula 7a.
a is an integer of 0-6.
[4" claim-type="Currently amended] The polymer compound according to claim 2, wherein the crosslinking group having a C-O-C group represented by Formula 6aa or 6ba is represented by the following Formula 6ab or 6bb.
<Formula 6ab>

<Formula 6bb>

In the formula,
R ⁶ and R ⁷ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms, or R ⁶ and R ⁷ may form a ring, and when forming a ring, R ⁶ and R ⁷ represents a linear or branched alkylene group having 1 to 8 carbon atoms,
R ⁸ represents a linear, branched or cyclic alkylene group having 1 to 10 carbon atoms,
d is 0 or an integer of 1 to 5,
A represents a linear, branched or cyclic alkylene group having 1 to 20 carbon atoms, an alkyltriyl group, an alkyl tetrayl group and an arylene group having 6 to 30 carbon atoms, and these groups may be interrupted by a hetero atom. Some of the hydrogen atoms bonded to the carbon atoms thereof may be substituted by hydroxyl groups, carboxyl groups, acyl groups or halogen atoms,
B represents -CO-O-, -NHCO-O- or -NHCONH-,
c "is 2-4, c" 'is an integer of 1-3.
[5" claim-type="Currently amended] (A): organic solvent
(B): The polymer compound according to any one of claims 1 to 4 as the base resin.
(C): acid generator
A chemically amplified positive resist material comprising a.
[6" claim-type="Currently amended] The hydrogen atom of the phenolic hydroxyl group of the high molecular compound which has a repeating unit represented by following formula (D): (D): (B) component as base resin separately, The 1 or 2 or more types of acid labile groups A chemically amplified positive resist material, further comprising a polymer compound having a weight average molecular weight of 3,000 to 300,000 partially substituted at an average of 0 mol% or more and 80 mol% or less as a whole.
<Formula 9>

In the formula,
R ¹ represents a hydrogen atom or a methyl group,
R ² represents a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms,
R ⁹ and R ¹⁰ represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms,
R ¹¹ represents a monovalent hydrocarbon group which may have 1 to 18 carbon atoms,
R ⁹ and R ¹⁰ , R ⁹ and R ^11, and R ¹⁰ and R ¹¹ may form a ring, and in the case of forming a ring, R ⁹ , R ¹⁰ and R ¹¹ may be each linear or minute having 1 to 18 carbon atoms. Represents an alkylene group on the ground,
R ¹² is an acid labile group, different from -CR ⁹ R ¹⁰ OR ¹¹ ,
e and f are zero or positive, g is positive, e + f + g = 1, 0 ≦ e / (e + f + g) ≦ 0.5, 0.4 ≦ g / (e + f + g) ≦ 0.9 , Also
The phenolic hydroxyl group of the high molecular compound represented by the formula (9) may be crosslinked in the molecule and / or between molecules by a crosslinking group having a COC group obtained by reaction with an alkenylether compound or a halogenated alkyl ether, and the acid The total amount of the unstable group and the crosslinking group is an average of more than 0 mol% and no more than 80 mol% of the total hydrogen atoms of the phenolic hydroxyl group when e = 0, f = 0 and g = 1 in the formula (9).
[7" claim-type="Currently amended] (E): The chemically amplified positive resist material according to claim 5 or 6, further comprising a dissolution control agent.
[8" claim-type="Currently amended] (F): A chemically amplified positive resist material according to claim 5, further comprising a basic compound as an additive.
[9" claim-type="Currently amended] The chemically amplified positive resist material according to claim 5, further comprising (G) an aromatic compound having a group represented by ≡C-COOH in the molecule as an additive.
[10" claim-type="Currently amended] (H): A chemically amplified positive resist material according to claim 5, further comprising a ultraviolet absorber.
[11" claim-type="Currently amended] The chemically amplified positive resist material according to claim 5, further comprising (I): an acetylene alcohol derivative.
[12" claim-type="Currently amended] (i) applying the chemically amplified positive resist material according to any one of claims 5 to 11 onto a substrate,
(ii) subsequent heat treatment followed by exposure to high energy or electron beams having a wavelength of 300 nm or less via a photomask; and
(iii) The pattern formation method characterized by including the process of developing using a developing solution after heat-processing as needed.

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EP0908473A1|1999-04-14|

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引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
1997-10-08|Priority to JP29167797

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1997-10-08|Priority to JP97-291677

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1998-10-07|Application filed by 카나가와 치히로, 신에쓰 가가꾸 고교 가부시끼가이샤

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1999-05-25|Publication of KR19990036901A

优先权:

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申请号 | 申请日 | 专利标题

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JP29167797|1997-10-08|

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JP97-291677|1997-10-08|