• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a piezoelectric transducer comprising: a conductive layer (315) between first (313) and second (317) piezoelectric layers; first (A) and third (C) electrodes disposed on the front face of the second piezoelectric layer (317); second (B) and fourth (D) electrodes disposed on the rear face of the first piezoelectric layer (313); ; and a control circuit configured for: in a first phase of operation, simultaneously applying a non-zero voltage on the first electrode (A), a non-zero voltage on the fourth electrode (D), and substantially zero voltages on the second ( B) and third (C) electrodes; and in a second phase of operation, simultaneously applying a non-zero voltage on the second electrode (B), a non-zero voltage on the third electrode (C), and substantially zero voltages on the first (A) and fourth (D) electrodes.
    公开号:FR3077162A1
    申请号:FR1850472
    申请日:2018-01-22
    公开日:2019-07-26
    发明作者:Remy Dejaeger；Bruno FAIN
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    PIEZOELECTRIC TRANSDUCER
    Field
    The present application relates to the field of piezoelectric transducers.
    Presentation of the prior art
    A piezoelectric transducer conventionally comprises a piezoelectric conversion element consisting of a layer of piezoelectric material disposed between two electrodes.
    The application of a voltage between the two electrodes generates an electric field in the piezoelectric layer, causing mechanical deformation of the piezoelectric layer. This electromechanical transduction effect can be used for various applications, for example to produce an electromechanical actuator, a loudspeaker, an ultrasonic wave generator, etc.
    Conversely, the application of a mechanical deformation to the piezoelectric layer causes a variation of the electric field and therefore an accumulation of charges in the two electrodes of the piezoelectric conversion element. This mechanoelectric transduction effect can be used for various applications, for example to produce a pressure or deformation sensor, a microphone, etc.
    B16662 - DD18458
    The present application relates more particularly to the production of electromechanical piezoelectric transducers
    It would be desirable to be able to at least partially improve certain aspects of known electromechanical piezoelectric transducers.
    In particular, it would be desirable to be able to increase the amplitude of the mechanical displacement produced within the transducer for a given control voltage.
    summary
    Thus, one embodiment provides a piezoelectric transducer comprising:
    a first piezoelectric layer of a non-ferroelectric material, the first layer having a front face and a rear face;
    a first conductive layer disposed on the front face of the first piezoelectric layer;
    a second piezoelectric layer made of a non-ferroelectric material disposed on the front face of the first conductive layer;
    a first electrode disposed on the front face of the second piezoelectric layer;
    a second electrode disposed on the rear face of the first piezoelectric layer, opposite the first electrode;
    a third electrode disposed on the front face of the second piezoelectric layer;
    a fourth electrode disposed on the rear face of the first piezoelectric layer, facing the third electrode; and a control circuit configured for:
    in a first operating phase, simultaneously applying a non-zero voltage on the first electrode, a non-zero voltage on the fourth electrode, and substantially zero voltages on the second and third electrodes; and
    B16662 - DD18458 in a second operating phase, simultaneously apply a non-zero voltage on the second electrode, a non-zero voltage on the third electrode, and substantially zero voltages on the first and fourth electrodes.
    According to one embodiment, the first and second piezoelectric layers have identical P polarizations, and the control circuit is configured to, in the first configuration, apply voltages of opposite polarity to the first and fourth electrodes, and, in the second configuration, apply opposite polarity voltages to the second and third electrodes.
    According to one embodiment, the first and second piezoelectric layers each have a negative pole on the side of their rear face and a positive pole on the side of their front face, and the control circuit is configured to, in the first configuration, applying a positive voltage on the first electrode and a negative voltage on the fourth electrode, and, in the second configuration, applying a negative voltage on the second electrode and a positive voltage on the third electrode.
    According to one embodiment, the first and second piezoelectric layers have opposite P polarizations, and the control circuit is configured to, in the first configuration, apply voltages of the same polarity to the first and fourth electrodes, and, in the second configuration, apply voltages of the same polarity to the second and third electrodes.
    According to one embodiment, the first piezoelectric layer has a positive pole on the side of its rear face and a negative pole on the side of its front face, and the second piezoelectric layer has a negative pole on the side of its rear face and a positive pole on the side of its front face, and the control circuit is configured to, in the first configuration, apply a positive voltage to the first electrode and a positive voltage to the fourth electrode, and, in the second configuration,
    B16662 - DD18458 apply a positive voltage to the second electrode and a positive voltage to the third electrode.
    According to one embodiment, the control circuit is configured to, in the first configuration, apply DC voltages to the first and fourth electrodes, and, in the second configuration, apply DC voltages to the second and third electrodes.
    According to one embodiment, the control circuit is configured to, in the first configuration, apply variable voltages to the first and fourth electrodes, and, in the second configuration, apply variable voltages to the second and third electrodes.
    According to one embodiment, the control circuit comprises:
    first and second nodes for applying an AC control voltage;
    a first diode mounted directly between the first node and the first electrode; and a second diode mounted in reverse between the second node and the second electrode.
    According to one embodiment, the control circuit further comprises a first polarity reversing circuit connecting the first electrode to the fourth electrode, and a second polarity reversing circuit connecting the second electrode to the third electrode.
    According to one embodiment, the stack comprising the first and second piezoelectric layers and the first conductive layer forms a membrane suspended on a rigid support.
    According to one embodiment, the first and second electrodes are arranged opposite a central part of the membrane, and the third and fourth electrodes are arranged opposite a peripheral part of the membrane .
    According to one embodiment, the voltages applied by the control circuit to the first, second, third
    B16662 - DD18458 and fourth electrodes are referenced with respect to the first conductive layer.
    Another embodiment provides a method for controlling a piezoelectric transducer comprising:
    a first piezoelectric layer of a non-ferroelectric material, the first layer having a front face and a rear face;
    a first conductive layer disposed on the front face of the first piezoelectric layer;
    a second piezoelectric layer made of a non-ferroelectric material disposed on the front face of the first conductive layer;
    a first electrode disposed on the front face of the second piezoelectric layer;
    a second electrode disposed on the rear face of the first piezoelectric layer, opposite the first electrode;
    a third electrode disposed on the front face of the second piezoelectric layer; and a fourth electrode disposed on the rear face of the first piezoelectric layer, facing the third electrode, this method comprising:
    in a first operating phase, simultaneously applying a non-zero voltage on the first electrode, a non-zero voltage on the fourth electrode, and substantially zero voltages on the second and third electrodes; and in a second operating phase, simultaneously applying a non-zero voltage on the second electrode, a non-zero voltage on the third electrode, and substantially zero voltages on the first and fourth electrodes. Brief description of the drawings
    These and other features and advantages will be discussed in detail in the following description of modes of
    B16662 - DD18458 particular embodiment made without limitation in relation to the attached figures among which:
    Figure 1 is a schematic sectional view of an example of a piezoelectric transducer;
    Figure 2 is a schematic sectional view of another example of a piezoelectric transducer;
    Figure 3 is a schematic sectional view of another example of a piezoelectric transducer;
    FIG. 4 is a timing diagram illustrating an example of a method for controlling a piezoelectric transducer;
    FIG. 5 is a timing diagram illustrating an example of a method for controlling a piezoelectric transducer according to an embodiment;
    Figure 6 is a diagram illustrating an advantage of the control method of Figure 5;
    FIG. 7 illustrates another example of a method for controlling a piezoelectric transducer according to an embodiment;
    FIG. 8 is a simplified electrical diagram of an example of a control circuit of a piezoelectric transducer according to an embodiment;
    Figure 9 is a more detailed electrical diagram of an exemplary embodiment of a polarity reversal circuit of the control circuit of Figure 8;
    Figure 10 is a sectional view of another example of a piezoelectric transducer according to an embodiment; and FIG. 11 is a timing diagram illustrating an example of a method for controlling the transducer of FIG. 10. Detailed description
    The same elements have been designated by the same references in the different figures and, moreover, the various figures are not drawn to scale. For the sake of clarity, only the elements useful for understanding the described embodiments have been shown and are detailed. In
    B16662 - DD18458 In particular, the various uses which can be made of the piezoelectric transducers described have not been detailed, the embodiments described being compatible with the usual applications of piezoelectric transducers. In addition, the methods of manufacturing the piezoelectric transducers described have not been detailed, the transducers described being able to be produced by usual methods of manufacturing piezoelectric transducers, subject to possible adaptations within the reach of a person skilled in the art to read. of this description.
    In the following description, when referring to qualifiers of absolute position, such as the terms forward, backward, up, down, left, right, etc., or relative, such as the terms above, below, upper , lower, etc., or to orientation qualifiers, such as the terms horizontal, vertical, plumb with, etc., reference is made to the orientation of the figures, it being understood that, in practice, the described devices can be oriented differently. Unless specified otherwise, the expressions approximately, substantially, and of the order of mean to 10%, preferably to 5%.
    Figure 1 is a sectional view schematically illustrating an example of a piezoelectric transducer.
    The transducer of FIG. 1 comprises a flexible membrane 101, for example an elastic membrane, suspended on a rigid support 103. The support 103 has for example the shape of a closed frame or ring, for example of circular or rectangular shape (in top view). As a variant, the support 103 has the form of an open frame or ring, or even of one or more disjointed pillars. The support 103 is arranged opposite a peripheral part of the membrane 101, the membrane 101 being, in this part, fixed by its lower face to the upper face of the support 103. A central part of the membrane is free to move in an orthogonal direction
    B16662 - DD18458 to the membrane, i.e. in a vertical direction in the orientation of Figure 1.
    The transducer of FIG. 1 further comprises a piezoelectric actuator 105 fixed to the membrane 101, on the side of the upper face of the membrane 101 in the example shown. In this example, the piezoelectric actuator 105 is arranged opposite a central part of the membrane 101. The actuator 105 comprises a first conductive layer 105a, for example a metallic layer, disposed on the upper face of the membrane, a piezoelectric layer 105b coating the upper face of the layer 105a, and a second conductive layer 105c coating the upper face of the piezoelectric layer 105b. The conductive layers 105c and 105a respectively form a first electrode A and a second electrode B for controlling the actuator 105, intended to be connected to a control circuit (not shown) of the transducer.
    The application of a voltage between the electrodes A and B of the actuator leads to:
    - either by contraction of the piezoelectric layer 105b in the direction of the applied electric field, that is to say in a direction orthogonal to the layer 105b, and therefore with a stretching of the piezoelectric layer 105b perpendicular to the electric field, c ' that is to say parallel to the layer 105b;
    - Or to a stretching of the piezoelectric layer 105b in the direction of the applied electric field, and therefore to a contraction of the piezoelectric layer 105b perpendicular to the electric field, that is to say parallel to the layer 105b.
    More particularly, a piezoelectric material conventionally comprises a plurality of elementary dipoles oriented in a preferred direction and direction which lead to obtaining a non-zero macroscopic electrostatic dipole P called polarization. In the example of FIG. 1, the polarization P of the piezoelectric layer 105b is orthogonal to the layer 105b, the negative pole of the layer 105b being on the underside of the layer 105b and the positive pole of the layer
    B16662 - DD18458
    105b being on the upper face side of the layer 105b. Under these conditions, the application of a positive voltage between the electrode A and the electrode B of the piezoelectric actuator 105 leads to a stretching of the layer 105b orthogonally to the applied electric field, that is to say in parallel to the membrane 101, leading to an upward deflection (not shown in the figure) of the central part of the membrane. The application of a negative voltage between the electrode A and the electrode B of the piezoelectric actuator 105 leads on the contrary to a contraction of the layer 105b parallel to the membrane 101, leading to a downward deflection of the part membrane center.
    In the field known as small deformations, that is to say for displacements of the membrane less than half its thickness, the deflection of the membrane 101, that is to say the distance between the center of the membrane when a control voltage is applied between the electrodes A and B of the actuator, and the center of the membrane when no control voltage is applied between the electrodes A and B (in the rest position), is substantially proportional at the applied voltage. In the field of large deformations, that is to say for displacements of the membrane greater than half of its thickness, the relation of proportionality is no longer verified insofar as the stiffness of the membrane increases with its deformation .
    We are seeking here to produce a piezoelectric transducer allowing, for a given control voltage level, to increase the deflection of the membrane, in particular in the field of large deformations.
    To maximize the amplitude of the displacement of the membrane for a given control voltage, one possibility consists in choosing the piezoelectric material having the highest possible piezoelectric coefficient. For this reason, lead titano-zirconate, generally called PZT, is commonly used in piezoelectric transducers.
    B16662 - DD18458
    The characteristic of PZT, however, is that it is ferroelectric. Thus, when an electric field is applied to it, it repolarizes in the direction of the applied field. It follows that in a transducer of the type described in relation to FIG. 1, when the piezoelectric layer 105b is made of PZT or, more generally, of any other piezoelectric ferroelectric material, whatever the polarity of the control voltage applied between the electrodes A and B, the layer 105b can only contract in the direction transverse to the applied electric field. In other words, whatever the polarity of the control voltage applied between the electrodes A and B, the direction of movement of the membrane is always the same (down in the example of FIG. 1).
    Non-ferroelectric piezoelectric materials such as aluminum nitride (AIN), zinc oxide (ZnO) or polyvinylidene fluoride (PVDF) do not have this repolarization effect and can therefore contract or stretch perpendicular to the applied electric field, which allows the membrane to move up and down depending on the polarity of the control voltage applied between the electrodes A and B.
    Figure 2 is a sectional view schematically illustrating another example of a piezoelectric transducer.
    The transducer of FIG. 2 comprises, as in the example of FIG. 1, a flexible membrane 101 suspended on a rigid support 103, and a piezoelectric actuator 105 covering a central part of the membrane 101.
    The transducer of FIG. 2 further comprises a piezoelectric actuator 107 covering a peripheral part of the membrane 101. In this example, the actuator 107 comprises a first conductive layer 107a, for example a metallic layer, disposed on the upper face of the membrane, a piezoelectric layer 107b coating the upper face of the layer 107a, and a second conductive layer 107c coating the upper face of the piezoelectric layer 107b.
    B16662 - DD18458
    In this example, the lower conductive layer 105a of the actuator 105 and the lower conductive layer 107a of the actuator 107 are part of the same conductive layer 109 extending continuously over substantially the entire upper surface of the membrane 101 In addition, the piezoelectric layer 105b of the actuator 105 and the piezoelectric layer 107b of the actuator 107 are part of the same piezoelectric layer 111 extending continuously over substantially the entire surface of the membrane 101. The layers upper conductors 105c of the actuator 105 and 107c of the actuator 107 are on the other hand disjoint, which allows differentiated control of the two actuators.
    The conductive layers 105c, 107c and 109 respectively form a first electrode A, a second electrode B and a third electrode C for controlling the transducer, intended to be connected to a control circuit (not shown) for the transducer.
    In the case where the layer 111 is made of a piezoelectric ferroelectric material, for example PZT, the actuator 105 is used to control the movement of the membrane in a first direction (downwards in the example of FIG. 2), and the actuator 107 is used to control the movement of the membrane in the other direction (upwards in this example). More particularly, the transducer of FIG. 2 can be controlled in a first configuration in which a non-zero voltage (positive or negative) is applied between the electrodes A and C and a substantially zero voltage is applied between the electrodes B and C, and in a second configuration in which a non-zero voltage (positive or negative) is applied between the electrodes B and C and a substantially zero voltage is applied between the electrodes A and C. In the first configuration, the voltage applied between the electrodes A and C causes the contraction of the layer 105b perpendicular to the membrane 101, and therefore a downward deflection of the membrane 101. In the second configuration, the applied voltage between
    B16662 - DD18458 the electrodes B and C cause a contraction of the layer 107b perpendicular to the membrane 101, and therefore an upward deflection of the membrane 101.
    In the case where the layer 111 is made of a non-ferroelectric piezoelectric material such as 1Ά1Ν, voltages of opposite polarities can be applied simultaneously between the electrodes A and C on the one hand and between the electrodes B and C on the other hand so to maximize the amplitude of the displacements of the membrane. More particularly, the transducer of FIG. 2 can be controlled in a first configuration in which a positive voltage is applied between the electrodes A and C and a negative voltage is applied between the electrodes B and C, and in a second configuration in which a negative voltage is applied between electrodes A and C and a positive voltage is applied between electrodes B and C. In the case of a piezoelectric layer 111 of P polarization orthogonal to layer 111, the negative pole of which is located on the underside side of layer 111 and whose positive pole is situated on the upper face side of layer 111, in the first configuration, an upward displacement of the membrane 101 is obtained, and, in the second configuration, a downward displacement of the membrane 101.
    Figure 3 is a sectional view schematically illustrating another example of a piezoelectric transducer.
    The transducer of FIG. 3 is of the bimorph type, that is to say that it comprises two active piezoelectric layers (as opposed to transducers of the unimorph type comprising a single active piezoelectric layer as described in relation to FIGS. 1 and 2). In this case, the flexible layer 101 of the examples of FIGS. 1 and 2, having a purely mechanical function (passive layer), can be removed.
    The transducer of FIG. 3 differs from the transducers described in relation to FIGS. 1 and 2 in that, in the example of FIG. 3, the passive flexible membrane 101 of the examples of FIGS. 1 and 2 is replaced by a flexible membrane
    B16662 - DD18458 activates 301. The membrane 301 is suspended on a rigid support 103 in a similar manner to what has been described in the previous examples.
    The membrane 301 comprises a vertical stack comprising, in order from the underside of the membrane, a first conductive layer 311, for example a metal layer, a first non-ferroelectric piezoelectric layer 313, for example in AIN, in ZnO , made of PVDF, or any other non-ferroelectric piezoelectric material, a second conductive layer 315, for example a metal layer, a second non-ferroelectric piezoelectric layer 317, and a third conductive layer 319, for example a metal layer. The piezoelectric layers 313 and 317 are for example of the same material. Likewise, the conductive layers 311, 315 and 319 can be made of the same material.
    In this example, the piezoelectric layers 313 and 317 and the intermediate conductive layer 315 are continuous layers extending over substantially the entire surface of the membrane. The lower 311 and upper 319 conductive layers are discontinuous. More particularly, the layer 311 is discretized so as to define a first lower electrode B in a central part of the membrane 301, and a second lower electrode D in a peripheral part of the membrane 301. Similarly, the layer 319 is discretized so as to define a first upper electrode A in a central part of the membrane 301 and a second upper electrode C in a peripheral part of the membrane 301. In this example, the electrode A is located directly above the electrode B and the electrode C is located directly above the electrode D.
    Thus, the membrane 301 of the piezoelectric transducer of FIG. 3 integrates four piezoelectric actuators defined as follows:
    - an upper central actuator comprising the electrode A, the portion of the layer
    B16662 - DD18458 piezoelectric 317 located directly above the electrode
    A, and the portion of the conductive layer 315 located directly above the electrode A;
    an upper peripheral actuator comprising the electrode C, the portion of the piezoelectric layer 317 situated directly above the electrode
    C, and the portion of the conductive layer 315 located directly above the electrode C;
    a lower central actuator comprising the electrode B, the portion of the piezoelectric layer 313 situated directly above the electrode
    B, and the portion of the conductive layer 315 located directly above the electrode B; and
    a lower peripheral actuator comprising the electrode D, the portion of the piezoelectric layer 313 situated directly above the electrode
    D, and the portion of the conductive layer 315 located directly above the electrode D.
    In this example, the piezoelectric layers 313 and 317 have the same direction and the same direction of polarization P. More particularly, in the example shown, the negative pole of the layer 313 is located on the underside of the layer 313, the pole positive of layer 313 is situated on the upper face side of layer 313, the negative pole of layer 317 is situated on the lower face side of layer 317 and the positive pole of layer 317 is situated on the upper face side of layer 317.
    The electrodes A, B, C and D as well as the central electrode formed by the intermediate conductive layer 315 are intended to be connected to a control circuit (not shown) of the transducer. In this example, the control voltages applied to the electrodes A, B, C and D of the transducer are all referenced relative to the central electrode formed by the layer 315.
    FIG. 4 is a timing diagram illustrating an example of a method for controlling the piezoelectric transducer of the
    B16662 - DD18458 FIG. 3. FIG. 4 represents more particularly the evolution, as a function of time (on the abscissa), of the control voltages V ^, Vg, Vq and Vp (on the ordinate) applied respectively to the electrodes A, B C and D of the transducer by the control circuit (not shown) of the transducer. As indicated above, the control voltages V ^, Vg, Vq and Vq are all referenced with respect to the central electrode 315 of the transducer. By way of example, the central electrode is connected to a GND node for applying a reference potential of the control circuit, for example a potential of 0V, for example ground.
    In this example, the transducer control circuit is configured to control the transducer in one of the first and second configurations, corresponding respectively to phase PI and to phase P2 of the timing diagram of FIG. 4.
    In the first configuration (phase PI), a positive voltage V + is applied to the electrode A, a positive voltage, for example of the same level V +, is applied to the electrode B, a negative voltage V- is applied to the electrode C, and a negative voltage, for example of the same level V-, is applied to electrode D.
    In the second configuration (phase P2), a negative voltage V- is applied to electrode A, a negative voltage, for example of the same level V-, is applied to electrode B, a positive voltage V + is applied to l electrode C, and a positive voltage, for example of the same level V +, is applied to electrode D.
    In the first configuration, one obtains, in the direction orthogonal to the membrane 301, a stretching of the piezoelectric layer 317 in its central part (opposite electrode A), a contraction of the piezoelectric layer 317 in its peripheral part (facing the electrode C), a contraction of the piezoelectric layer 313 in its central part (facing the electrode B) and a stretching of the
    B16662 - DD18458 piezoelectric layer 313 in its peripheral part (opposite electrode D). This results in an upward movement of the membrane 301.
    In the second configuration, one obtains, in the direction orthogonal to the membrane 301, a contraction of the piezoelectric layer 317 in its central part (opposite electrode A), a stretching of the piezoelectric layer 317 in its peripheral part (facing the electrode C), a stretching of the piezoelectric layer 313 in its central part (facing the electrode B), and a contraction of the piezoelectric layer 313 in its peripheral part (facing the electrode D). This results in a downward movement of the membrane 301.
    The transducer of FIG. 3 combined with the control mode of FIG. 4 makes it possible to achieve deflections of the membrane of greater amplitudes than those which can be obtained with transducers of the type described in relation to FIGS. 1 and 2 .
    Surprisingly, the inventors have however observed that in a transducer of the type described in relation to FIG. 3, it is possible to obtain even greater deflection amplitudes by activating only the actuators producing a stretching of the piezoelectric layer, at namely, in the example described above, the upper central actuator and the lower peripheral actuator in the first configuration, and the lower central actuator and the upper peripheral actuator in the second configuration, and by deactivating (it that is to say while keeping at rest) the other actuators, namely, in the example described above, the lower central actuator and the upper peripheral actuator in the first configuration and the upper central actuator and 1 ' lower peripheral actuator in the second configuration.
    FIG. 5 is a timing diagram illustrating an example of a method for controlling a piezoelectric transducer according to
    B16662 - DD18458 an embodiment. We consider here a transducer of the type described in relation to FIG. 3. FIG. 5 represents the evolution, as a function of time (on the abscissa), of the control voltages V ^, Vg, Vq and Vp (on the ordinate) applied respectively on the electrodes A, B, C and D of the transducer by the control circuit (not shown) of the transducer. As before, the control voltages V ^, Vg, Vq and Vq are all referenced with respect to the central electrode 315 of the transducer. By way of example, the central electrode is connected to a GND node for applying a reference potential of the control circuit, for example a potential of 0V, for example ground.
    In this example, the transducer control circuit is configured to control the transducer in one of the first and second configurations, corresponding respectively to the phase PI and to the phase P2 of the timing diagram of FIG. 5.
    In the first configuration (phase PI), a positive voltage V + is applied to the electrode A, a substantially zero voltage is applied to the electrode B, a substantially zero voltage is applied to the electrode C, and a negative voltage V - Is applied to the electrode D. By substantially zero voltage is meant here a voltage close to the reference voltage of the GND node, for example equal to plus or minus 10 mV near the reference voltage of the GND node. Positive voltages V + and negative voltages V- are of a level capable of causing significant deformation of the piezoelectric layer in the corresponding actuator. For example, the voltages V + and V- are greater than 5 V in absolute value. The voltages V + and V- are for example substantially equal in absolute value.
    In the second configuration (phase P2), a substantially zero voltage is applied to the electrode A, a negative voltage V- is applied to the electrode B, a positive voltage V + is applied to the electrode C, and a voltage substantially zero is applied to electrode D.
    B16662 - DD18458
    In the first configuration, one obtains, in the direction orthogonal to the membrane 301, a stretching of the piezoelectric layer 317 in its central part (opposite electrode A), and a stretching of the piezoelectric layer 313 in its peripheral part (facing the electrode D). This results in an upward movement of the membrane 301. The piezoelectric layer 317 remains, however, at rest in its peripheral part (facing the electrode C), and the piezoelectric layer 313 remains at rest in its central part (facing electrode B). As illustrated in Figure 6 detailed below, this allows, compared to the control mode described above in which the upper peripheral actuator and the lower central actuator are activated in contraction, to further increase the deflection of the membrane , especially in the field of large deformations.
    In the second configuration, one obtains, in the direction orthogonal to the membrane 301, a stretching of the piezoelectric layer 317 in its peripheral part (facing the electrode C), and a stretching of the piezoelectric layer 313 in its central part (facing electrode B). This results in a downward displacement of the membrane 301. The piezoelectric layer 317 remains, however, at rest in its central part (facing electrode A), and the piezoelectric layer 313 remains at rest in its peripheral part (facing electrode D). Again, this allows, compared to the control mode described above in which the lower peripheral actuator and the upper central actuator are activated in contraction, to increase the deflection of the membrane, especially in the field of large deformations.
    Figure 6 is a diagram illustrating an advantage of the control mode described in connection with Figure 5 compared to the control mode described in connection with Figure 4. The diagram of Figure 6 shows the evolution of the displacement d of the membrane in its center and in a direction orthogonal to
    B16662 - DD18458 the membrane (on the ordinate, in micrometers), as a function of the voltage level V (on the abscissa, in volts) applied to the control electrodes of the transducer (with, in this example, V = | v + | = | v - |).
    The diagram in FIG. 6 more particularly comprises two curves C1 and C2. Curve C1 represents the evolution of the displacement of the membrane as a function of the level of control voltage when the transducer is controlled in the first configuration (PI) of the control method of FIG. 4, that is to say when the four actuators defined respectively by the electrodes A, B, C and D are activated in combination to generate an upward displacement of the membrane 301. The curve C2 represents the evolution of the displacement of the membrane as a function of the level of control voltage when the transducer is controlled in the first configuration (PI) of the control method of FIG. 5, that is to say when only the actuators A and D are activated to generate an upward movement of the membrane 301.
    As shown in FIG. 6, up to a certain amplitude of displacement of the membrane, of the order of 1 μm in this example (corresponding in this example to a level of control voltage of the order of 5 V) , the displacement of the membrane is substantially proportional to the level V of the control voltage applied to the transducer (and the number of actuators requested). This operating range corresponds to the area known as small deformations. In this operating domain, the control method of FIG. 4 (curve C1) is approximately twice as efficient as the control method of FIG. 5 (curve C2).
    For larger deformations of the membrane, the displacement d of the membrane is no longer proportional to the level of control voltage V applied. This operating range corresponds to the area known as large deformations. Surprisingly, it is observed that, in this operating range, for a sufficiently high control voltage level V (for a control voltage level V greater than about 20 V
    B16662 - DD18458 in the example shown), the deflection of the membrane 301 is significantly greater when the transducer is controlled according to the method of FIG. 5 than when the transducer is controlled according to the method of FIG. 4. Although the curves have not been shown in FIG. 6, a similar advantage is obtained when the transducer is controlled in the second configuration (phases P2 of the control methods in FIGS. 4 and 5, leading to a downward movement of the membrane 301 ).
    It will be noted that in the example of FIG. 5, the control voltages applied to the transducer in the first and second configurations are direct voltages. A DC voltage control can for example be used to make an electromechanical actuator, for example for the actuation of a micro-pump, a micro-valve, a mobile micro-mirror, etc.
    However, the embodiments described are not limited to this particular case. As a variant, the control voltages applied to the transducer can be variable voltages. A variable voltage control can for example be used to make an acoustic wave generator, for example for echolocation applications, non-destructive ultrasonic testing, or even to make a loudspeaker.
    FIG. 7 illustrates an example of a method for controlling a piezoelectric transducer according to an embodiment. We consider here a transducer of the type described in relation to FIG. 3. In this example, the control voltages applied to the transducer are variable voltages.
    FIG. 7 comprises, in the left part, a diagram representing a basic control voltage S representative of the displacement which it is desired to apply to the membrane. The voltage S is an alternating voltage alternating between a positive peak value V + and a negative peak value V-. The voltage S is
    B16662 - DD18458 referenced with respect to the intermediate electrode 315 of the transducer.
    FIG. 7 further comprises, on the right-hand side, four diagrams respectively representing the voltages Vg, Vq and Vq applied to the electrodes A, B, C and D of the transducer.
    It is intended here, in the positive phases of the control voltage S, to activate only the upper central actuator and the lower peripheral actuator of the membrane 301, and, in the negative phases of the control voltage S, d activate only the upper peripheral actuator and the lower central actuator of the diaphragm 301.
    More particularly, in this example, we apply:
    - On the electrode A, a control voltage V ^ = SI substantially equal to the voltage S in the positive phases of the voltage S, and substantially zero in the negative phases of the voltage S;
    - On the electrode B, a control voltage Vq = S2 substantially equal to the voltage S in the negative phases of the voltage S, and substantially zero in the positive phases of the voltage S;
    on the electrode D, a control voltage V D = -SI; and
    - on electrode C, a control voltage Vq = -S2.
    For example, the voltage SI (electrode A) is generated from the voltage S by means of a single-wave rectifier, the voltage S2 (electrode B) is generated from the voltage S by means of a single-wave rectifier returned, the voltage -SI (electrode D) is generated by means of a polarity inverter from the voltage SI, and the voltage -S2 (electrode C) is generated by a polarity inverter with from voltage S2.
    FIG. 8 is a simplified electrical diagram of a control circuit for a piezoelectric transducer, adapted to implement the control method of FIG. 7.
    B16662 - DD18458
    The control circuit of FIG. 8 comprises input nodes ni and n2 between which the base control voltage S is applied, referenced with respect to the node GND (connected to the intermediate electrode 315 of the transducer). The control circuit of FIG. 8 further comprises a diode DI mounted directly between the node ni and the electrode A of the transducer, and a diode D2 mounted in reverse between the node n2 and the electrode B of the transducer. More particularly, in this example, the diode DI has its anode connected to the node ni and its cathode connected to the electrode A, and the diode D2 has its anode connected to the electrode B and its cathode connected to the node n2. The control circuit of FIG. 8 further comprises a first polarity inversion circuit 801 (INV) of which an input node in is connected, for example connected, to electrode A and of which an output node out is connected, for example connected, to electrode D, and a second reverse polarity circuit 803 (INV), for example identical to circuit 801, of which an input node in is connected, for example connected, to the electrode B and an output node of which is connected, for example connected, to electrode C.
    Thus, the control circuit of FIG. 8 makes it possible, from the basic control voltage S, to generate the control voltage SI applied to the electrode A, the control voltage S2 applied to the electrode B, the control voltage -SI applied to electrode D, and control voltage -S2 applied to electrode C.
    FIG. 9 is an electrical diagram of an exemplary embodiment of the reverse polarity circuit 801 or 803 of the control circuit of FIG. 8. In this example, the reverse polarity circuit comprises an operational amplifier 901, the l the positive input (+) is connected, for example connected, to the node GND, and whose negative input (-) is connected to the input node in of the circuit via a resistor Ri. The circuit of FIG. 9 further comprises a resistor Rf connecting the output node s of the operational amplifier to its negative input (-). The output node out of the circuit
    B16662 - DD18458 reverse polarity is connected, for example connected, to the output node s of the operational amplifier.
    The output voltage Vout of the circuit of FIG. 9 is expressed as a function of the input voltage Vin, the gain G of the amplifier, the input resistance Ri, and the feedback resistance Rf, as following :
    Vout = -
    Rf * Wine * G
    Rf + Ri * (1 + G)
    By considering a gain value G sufficiently high, this equation can be simplified as follows:
    Rf * Wine
    Vout = --——
    Ri
    By taking substantially equal resistance values Ri and Rf, we have Vout = -Vin.
    Figure 10 is a sectional view of an alternative embodiment of a piezoelectric transducer. The transducer of FIG. 10 is identical or similar to the transducer 301 of FIG. 3, except that in the example of FIG. 10, the lower piezoelectric layer 313 of the transducer of FIG. 3 is replaced by a piezoelectric layer 313 ′ similar to layer 313 but of polarization P reversed with respect to layer 313.
    Thus, in the example of FIG. 10, the piezoelectric layers 313 ′ and 317 have the same direction of polarization, orthogonal to the membrane, but opposite directions of polarization. More particularly, in the example shown, the positive pole of the layer 313 'is located on the underside of the layer 313', the negative pole of the layer 313 'is located on the side of the upper face of the layer 313', the negative pole of layer 317 is situated on the underside of layer 317 and the positive pole of layer 317 is situated on the upper face of layer 317.
    B16662 - DD18458
    FIG. 11 is a timing diagram illustrating an example of an embodiment of a method for controlling the piezoelectric transducer of FIG. 10. FIG. 11 represents the evolution, as a function of time (on the abscissa), of the control voltages V ^, Vg, Vq and Vp (on the ordinate) applied respectively to the electrodes A, B, C and D of the transducer by the control circuit (not shown) of the transducer. As before, the control voltages V ^, Vg, Vq and Vq are all referenced with respect to the central electrode 315 of the transducer, connected to a node GND for applying a reference potential of the control circuit.
    In this example, the transducer control circuit is configured to control the transducer in one of the first and second configurations, corresponding respectively to the phase PI and to the phase P2 of the timing diagram of FIG. 5.
    In the first configuration (phase PI), a positive voltage V + is applied to the electrode A, a substantially zero voltage is applied to the electrode B, a substantially zero voltage is applied to the electrode C, and a positive voltage V + is applied to electrode D.
    In the second configuration (phase P2), a substantially zero voltage is applied to the electrode A, a positive voltage V + is applied to the electrode B, a positive voltage V + is applied to the electrode C, and a voltage substantially zero is applied to electrode D.
    In the first configuration, one obtains, in the direction orthogonal to the membrane 301, a stretching of the piezoelectric layer 317 in its central part (opposite electrode A), and a stretching of the piezoelectric layer 313 'in its peripheral part (opposite electrode D). This results in an upward movement of the membrane 301. The piezoelectric layer 317 remains, however, at rest in its peripheral part (facing electrode C), and the piezoelectric layer 313 'remains at rest in its central part (in
    B16662 - DD18458 opposite electrode B). As in the example in FIG. 5, this allows, compared to a control mode in which the upper peripheral actuator and the lower central actuator are activated in contraction, to increase the deflection of the membrane, in particular in the area of large deformations.
    In the second configuration, one obtains, in the direction orthogonal to the membrane 301, a stretching of the piezoelectric layer 317 in its peripheral part (facing the electrode C), and a stretching of the piezoelectric layer 313 'in its central part (opposite electrode B). This results in a downward movement of the membrane 301. The piezoelectric layer 317 remains, however, at rest in its central part (facing electrode A), and the piezoelectric layer 313 'remains at rest in its peripheral part (facing electrode D). Again, this allows, compared to a control mode in which the lower peripheral actuator and the upper central actuator are activated in contraction, to increase the deflection of the membrane, especially in the field of large deformations.
    As a variant, the transducer of FIG. 10 can be controlled by a variable voltage in a similar manner to what has been described in relation to FIG. 7. In this case, the positive voltage SI is applied to the electrode A and on electrode D, and the negative voltage S2 is applied to electrode B and to electrode C, which simplifies the control circuit. In particular, the polarity reversal circuits 801 and 803 of the control circuit of Figure 8 can then be omitted.
    Particular embodiments have been described. Various variants and modifications will appear to those skilled in the art. In particular, the embodiments described are not limited to the examples of membrane shapes and arrangement of the actuators described above.
    权利要求:
    Claims (13)
    [1" id="c-fr-0001]
    1. Piezoelectric transducer comprising:
    a first piezoelectric layer (313; 313 ') of a non-ferroelectric material, the first layer having a front face and a rear face;
    a first conductive layer (315) disposed on the front face of the first piezoelectric layer (313; 313 ');
    a second piezoelectric layer (317) of a non-ferroelectric material disposed on the front face of the first conductive layer (315);
    a first electrode (A) disposed on the front face of the second piezoelectric layer (317);
    a second electrode (B) disposed on the rear face of the first piezoelectric layer (313; 313 '), opposite the first electrode (A);
    a third electrode (C) disposed on the front face of the second piezoelectric layer (317);
    a fourth electrode (D) disposed on the rear face of the first piezoelectric layer (317), facing the third electrode (C); and a control circuit configured for:
    in a first operating phase, simultaneously apply a non-zero voltage (V ^; SI) on the first electrode (A), a non-zero voltage (Vp; -SI) on the fourth electrode (D), and voltages (Vg , Vq; S2, -S2) substantially zero on the second (B) and third (C) electrodes; and in a second operating phase, simultaneously apply a non-zero voltage (Vg; S2) on the second electrode (B), a non-zero voltage (Vq; -S2) on the third electrode (C), and voltages (V ^, Vq; SI, -SI) substantially zero on the first (A) and fourth (D) electrodes.
    [2" id="c-fr-0002]
    2. A transducer according to claim 1, in which the first (313) and second (317) piezoelectric layers have identical P polarizations, and in which the control circuit is configured for, in the first configuration,
    B16662 - DD18458 apply opposite polarity voltages to the first (A) and fourth (D) electrodes, and, in the second configuration, apply opposite polarity voltages to the second (B) and third (C) electrodes.
    [3" id="c-fr-0003]
    3. A transducer according to claim 2, in which the first (313) and second (317) piezoelectric layers each have a negative pole on the side of their rear face and a positive pole on the side of their front face, and in which the circuit of control is configured to, in the first configuration, apply a positive voltage to the first (A) electrode and a negative voltage to the fourth (D) electrode, and, in the second configuration, apply a negative voltage to the second (B) electrode and a positive voltage on the third (C) electrode.
    [4" id="c-fr-0004]
    4. A transducer according to claim 1, in which the first (313 ′) and second (317) piezoelectric layers have opposite P polarizations, and in which the control circuit is configured to, in the first configuration, apply voltages of the same polarity on the first (A) and fourth (D) electrodes, and, in the second configuration, apply voltages of the same polarity on the second (B) and third (C) electrodes.
    [5" id="c-fr-0005]
    5. Transducer according to claim 4, in which the first piezoelectric layer (313 ') has a positive pole on the side of its rear face and a negative pole on the side of its front face, and the second piezoelectric layer (317) has a pole negative on the side of its rear face and a positive pole on the side of its front face, and in which the control circuit is configured to, in the first configuration, apply a positive voltage to the first (A) electrode and a positive voltage to the fourth (D) electrode, and, in the second configuration, apply a positive voltage to the second (B) electrode and a positive voltage to the third (C) electrode.
    [6" id="c-fr-0006]
    6. Transducer according to any one of claims 1 to 5, in which the control circuit is
    B16662 - DD18458 configured to, in the first configuration, apply DC voltages to the first (A) and fourth (D) electrodes, and, in the second configuration, apply DC voltages to the second (B) and third (C) electrodes.
    [7" id="c-fr-0007]
    7. A transducer according to any one of claims 1 to 5, in which the control circuit is configured to, in the first configuration, apply variable voltages to the first (A) and fourth (D) electrodes, and, in the second configuration, apply variable voltages to the second (B) and third (C) electrodes.
    [8" id="c-fr-0008]
    8. A transducer according to claim 7, in which the control circuit comprises:
    first (ni) and second (n2) nodes for applying an alternating control voltage (S);
    a first diode (Dl) mounted directly between the first node (ni) and the first electrode (A); and a second diode (D2) mounted in reverse between the second node (n2) and the second electrode (B).
    [9" id="c-fr-0009]
    9. A transducer according to claim 8, in which the control circuit further comprises a first polarity inversion circuit (801) connecting the first electrode (A) to the fourth electrode (D), and a second inversion circuit polarity (803) connecting the second electrode (B) to the third electrode (C).
    [10" id="c-fr-0010]
    10. Transducer according to any one of claims 1 to 9, in which the stack comprising the first (313; 313 ') and second (317) piezoelectric layers and the first conductive layer (315) forms a suspended membrane (301) on a rigid support (103).
    [11" id="c-fr-0011]
    11. A transducer according to claim 10, in which the first (A) and second (B) electrodes are arranged opposite a central part of the membrane (301), and in which
    B16662 - DD18458 the third (C) and fourth (D) electrodes are arranged opposite a peripheral part of the membrane (301).
    [12" id="c-fr-0012]
    12. A transducer according to any one of claims 1 to 11, in which the voltages applied by the control circuit to the first (A), second (B), third (C) and fourth (D) electrodes are referenced with respect to to the first conductive layer (315).
    [13" id="c-fr-0013]
    13. Method for controlling a piezoelectric transducer comprising:
    a first piezoelectric layer (313; 313 ') of a non-ferroelectric material, the first layer having a front face and a rear face;
    a first conductive layer (315) disposed on the front face of the first piezoelectric layer (313; 313 ');
    a second piezoelectric layer (317) of a non-ferroelectric material disposed on the front face of the first conductive layer (315);
    a first electrode (A) disposed on the front face of the second piezoelectric layer (317);
    a second electrode (B) disposed on the rear face of the first piezoelectric layer (313; 313 '), opposite the first electrode (A);
    a third electrode (C) disposed on the front face of the second piezoelectric layer (317); and a fourth electrode (D) disposed on the rear face of the first piezoelectric layer (317), facing the third electrode (C), this method comprising:
    in a first operating phase, simultaneously apply a non-zero voltage (V ^; SI) on the first electrode (A), a non-zero voltage (Vq; -SI) on the fourth electrode (D), and voltages (Vg , Vq; S2; -S2) substantially zero on the second (B) and third (C) electrodes; and in a second operating phase, simultaneously apply a non-zero voltage (Vg; S2) to the second
    B16662 - DD18458 electrode (B), a non-zero voltage (Vq; -S2) on the third electrode (C), and substantially zero voltages (V ^, Vq; SI, -SI) on the first (A) and fourth (D) electrodes.
    类似技术:
    公开号 | 公开日 | 专利标题
    EP3514388B1|2020-03-11|Piezoelectric transducer
    EP2747452B1|2017-01-11|Membrane device with controlled movement
    EP2309559A1|2011-04-13|Piezoelectric actuating structure comprising an integrated piezoresistive strain gauge and manufacturing method thereof
    EP2647120B1|2015-04-29|Device for converting mechanical energy into electrical energy
    US6222304B1|2001-04-24|Micro-shell transducer
    FR2971650A1|2012-08-17|MECHANICAL ENERGY CONVERSION DIDSPOSITIVE IN OPTIMIZED ELECTRICITY
    FR2963192A1|2012-01-27|MEMS TYPE PRESSURE PULSE GENERATOR
    FR2496380A1|1982-06-18|PIEZORESISTIVE DEVICE WITH ELECTRICAL CONTROL
    FR2811828A1|2002-01-18|SOUND WAVE DEVICE COMPRISING ALTERNATE POLARIZATION AREAS
    Casset et al.2015|A 256 MEMS membrane digital loudspeaker array based on PZT actuators
    FR2730853A1|1996-08-23|PROCESS FOR POLARIZING A SHEET OF LARGE SURFACE FERROELECTRIC MATERIAL
    FR3033468A1|2016-09-09|ACTIONABLE MEMBRANE DEVICE AND DIGITAL SPEAKER HAVING AT LEAST ONE SUCH DEVICE
    EP1717830B1|2010-06-09|Electromechanical micro-capacitor with variable capacity and process of manufacture of such a capacitor
    EP3766829A1|2021-01-20|Mechanical link for mems and nems device for measuring a pressure variation and device comprising such a mechanical link
    FR2511571A1|1983-02-18|ELECTROACOUSTIC TRANSDUCER WITH CONDENSER WITH POLARIZED SOLID DIELECTRIC
    FR3013935B1|2019-08-02|ELECTRO-ACTIVE TRANSDUCER FILM HAVING A STRUCTURED SURFACE
    EP3234536A2|2017-10-25|Dynamic pressure sensor with improved operation
    FR2737019A1|1997-01-24|SCANNING MICROELEMENTS FOR OPTICAL SYSTEM
    EP3828943A1|2021-06-02|Mechanical microsystem and associated manufacturing method
    EP3340326B1|2019-06-19|Piezoelectric transformer
    Fanget et al.2015|Low voltage MEMS digital loudspeaker array based on thin-film PZT actuators
    EP0056549B1|1985-03-27|Electromechanical transducer structure
    WO2004028756A2|2004-04-08|Piezoelectric micromanipulator which is especially intended for microbotics and method of implementing same
    Vergara et al.2022|Feedback Controlled Pzt Micromirror with Integrated Buried Piezoresistors
    FR3077161A1|2019-07-26|TUNABLE PIEZOELECTRIC ACOUSTIC TRANSDUCER
    同族专利:
    公开号 | 公开日
    US11205747B2|2021-12-21|
    CN110071658A|2019-07-30|
    EP3514388B1|2020-03-11|
    EP3514388A1|2019-07-24|
    FR3077162B1|2020-02-07|
    US20190229256A1|2019-07-25|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    JPH0354383A|1989-07-20|1991-03-08|Olympus Optical Co Ltd|Piezoelectric pump|
    EP2039934A1|2006-07-11|2009-03-25|Murata Manufacturing Co. Ltd.|Piezoelectric pump|
    US20100239444A1|2008-04-17|2010-09-23|Murata Manufacturing Co., Ltd.|Layered piezoelectric element and piezoelectric pump|
    US4985926A|1988-02-29|1991-01-15|Motorola, Inc.|High impedance piezoelectric transducer|
    US7538477B2|2006-11-27|2009-05-26|Avago Technologies Wireless Ip Pte. Ltd.|Multi-layer transducers with annular contacts|
    KR101843185B1|2011-06-20|2018-03-29|삼성전기주식회사|Inertial Sensor|
    FR3000354B1|2012-12-20|2015-01-30|Commissariat Energie Atomique|MEMBRANE DEVICE WITH CONTROLLED DISPLACEMENT|US11042346B2|2019-07-30|2021-06-22|International Business Machines Corporation|Artificial cochlea|
    CN110944274B|2019-11-20|2020-12-18|武汉大学|Tunable MEMS piezoelectric transducer with mass load based on Pitton-mode|
    法律状态:
    2019-01-30| PLFP| Fee payment|Year of fee payment: 2 |
    2019-07-26| PLSC| Publication of the preliminary search report|Effective date: 20190726 |
    2020-01-30| PLFP| Fee payment|Year of fee payment: 3 |
    2021-01-28| PLFP| Fee payment|Year of fee payment: 4 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1850472A|FR3077162B1|2018-01-22|2018-01-22|PIEZOELECTRIC TRANSDUCER|
    FR1850472|2018-01-22|FR1850472A| FR3077162B1|2018-01-22|2018-01-22|PIEZOELECTRIC TRANSDUCER|
    EP19151044.5A| EP3514388B1|2018-01-22|2019-01-09|Piezoelectric transducer|
    US16/248,593| US11205747B2|2018-01-22|2019-01-15|Piezoelectric transducer|
    CN201910052933.8A| CN110071658A|2018-01-22|2019-01-21|Piezoelectric transducer|
    [返回顶部]