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    • 专利摘要:
    Method for acquiring at least one hologram of a sample by off-axis optical holography using a transmission electron microscope, the microscope comprising a source of an electron beam, at least one objective lens a sample holder, a electron biprism and means for moving the electron beam in precession mode upstream of the sample holder and means for compensating the precession downstream of the sample holder, said method comprising activating the electronic beam displacement means in the mode precession and means for compensating the precession and acquiring a hologram of said sample in precession mode.
    公开号:FR3073956A1
    申请号:FR1761062
    申请日:2017-11-22
    公开日:2019-05-24
    发明作者:Victor Bourreau；David Cooper
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    METHOD OF ACQUIRING HOLOGRAMS BY ELECTRONIC HOLOGRAPHY OUTSIDE OPTICAL AXIS IN PRECESSION MODE
    DESCRIPTION
    TECHNICAL AREA AND PRIOR ART
    The present invention relates to a method of acquiring holograms by electronic holography off the optical axis in order to obtain phase images offering attenuated artefacts.
    The principle of holography was invented by Dennis Gabor in 1948, for electronic optics. This imaging technique makes it possible to record the interference patterns or holograms formed in a transmission electron microscope. This technique then makes it possible to reconstruct the wavefront of the electron beam, and to deduce the phase from it. One of the most widely used configurations for transmission electron microscopy is called off-axis electronic holography as described in the Midgley document, P. A. Micron 32, 167-184 (2001). This configuration uses an electron biprism, also called Möllenstedt biprism to deflect the electrons.
    A hologram is recorded between the reference wave and the wave which has passed through the object using a Möllenstedt biprism installed at the level of the microscope area selection diaphragm. This biprism makes it possible to superimpose part of the electron beam (reference wave) with the other part having passed through the sample (scattered wave), and thus to form the interference figure ...
    Unlike conventional imaging for which the image of interest is the intensity perceived by the detector, electronic holography off the optical axis records an interferogram, from which the phase image of the sample can be directly reconstructed . This phase image of the sample is sensitive to different physical fields such as the electrical potential; or the magnetic potential. With the use of a specific dark field configuration, the holography is sensitive to the mechanical strain field, as described in the document US8502143. In addition, the phase image is quantitative. Consequently, the phase image can be used to detect the presence of one or more physical fields and it can be transformed into a measurement of the physical field studied, as described for example in the document MJ. Hÿtch, F. Houdellier, F. Hüe, and E. Snoeck, Ultramicroscopy 111, 1328 (2011).
    But electronic holography off the optical axis is sensitive to the diffraction effects of electrons occurring during the measurement of crystalline samples, which generates artifacts in the phase image, the quantitative measurement of which then becomes false.
    In order to reduce these artifacts, great care is taken in the preparation of samples, in particular to avoid inhomogeneous curvatures and thicknesses. Such sample preparation can be very demanding.
    The document Gan, Z., DiNezza, M., Zhang, Y.-H., Smith, DJ & McCartney, MR Microscopy and Microanalysis 21, 1406-1412 (2015) describes the existence of these artefacts and proposes to mitigate these by adapting the crystal orientation of the sample relative to the electron beam. The manipulator moves away from the main crystal orientations in particular.
    STATEMENT OF THE INVENTION
    It is therefore an object of the present invention to provide a method of acquiring holograms by electronic holography with a view to obtaining artifacts, linked to diffraction effects, attenuated.
    The aim stated above is achieved by a method of phase image acquisition by electronic holography off the optical axis, the acquisition being done in precession mode.
    The precession mode means that the incident beam performs at least one revolution, the incident beam forming an angle relative to the optical axis of the microscope, and generates a precession cone. The angle can be constant or not. In the case of a symmetric precession cone generated by a circle, the angle of the cone is called the precession angle.
    The inventors have thought of performing holography off the optical axis in precession mode, while the precession mode is used in electron microscopy for the acquisition of diffraction images in order to obtain intensities representative of the kinematic diffraction conditions.
    The precession of the electronic probe makes it possible to attenuate the artefacts, linked to the diffraction effects, in the phase image obtained thanks to electronic holography in the case of a crystalline sample. These phenomena are particularly important when the crystal has a variation in thickness, a high thickness due to the effects of dynamic diffraction and / or changes of orientation resulting from the curvature, of a polycristaIlin sample ...
    According to the invention, it is the phase image which is directly affected by the precession of the probe, and not an intensity image as is the case in the methods conventionally using precession.
    Thanks to the invention, the preparation of samples can be less restrictive.
    The method can include:
    a first adjustment phase comprising the steps:
    - alignment of the electron microscope in holography mode,
    - alignment of the microscope in precession mode,
    - verification of the stability of the sample in the image plane and of the diffraction,
    - insertion of biprism and adjustment of biprism characteristics,
    - verification of the stability of the sample and the hologram in the image plane, a second phase of acquisition of at least one hologram.
    Alignment in holography mode includes for example the adjustments of the objective, diffraction and intermediate lenses.
    Advantageously, these settings are no longer modified until the acquisition of the hologram.
    The subject of the present invention is therefore a method of acquiring at least one hologram of a sample by holography off the optical axis using an electronic transmission microscope, said microscope comprising a source of an electron beam, at least one objective lens, a sample holder, at least one electron biprism and means for moving the electron beam in precession mode upstream of the sample holder and means for compensating for the precession downstream of the sample holder, said method comprising l activation of the means for moving the electron beam in precession mode and means for compensating for precession and the acquisition of a hologram of said sample in precession mode.
    Advantageously, the acquisition method comprises, after placing the sample in the microscope, in a first phase, the steps:
    - alignment of the electron microscope in holography mode without electron biprism,
    - alignment of the electron microscope in precession mode,
    - verification of the stability of the image of the sample in the image plane and the stability of the diffraction of the microscope,
    - placement of the electron biprism in the microscope and adjustment of the characteristics of said electron biprism,
    - verification of the stability of the sample and the hologram in the image plane, in a second phase, the acquisition of at least one hologram.
    For example, the stability of the image of the sample is considered to be sufficient in the image plane when its displacement is less than the desired measurement resolution, and in which the stability of the diffraction is sufficient when the operator considers that it is visually stable.
    Preferably, if the stability of the image of the sample in the image plane and the stability of the diffraction of the microscope is not sufficient, the alignment step in precession mode is at least partially repeated. Advantageously, before repeating the alignment step in precession mode, the height of the sample relative to an objective lens is modified.
    The acquisition method may include, after the placement of the electron biprism in the microscope and adjustment of the characteristics of said electron biprism, a step of verifying the stability of the image of the sample and of the hologram in the image plane.
    For example, the image of the sample in the image plane is considered to be sufficient when the movement of the sample is less than the desired spatial resolution, and in which the stability of the hologram is sufficient when it presents a contrast. at least 5%.
    In an advantageous example, if the stability of the image is not satisfactory, the step of acquiring at least one hologram is an acquisition of discrete holograms.
    Preferably, the precession mode is activated during the alignment step in holography mode or at the latest at the start of the alignment step in precession mode.
    For example, when adjusting the characteristics of said electron biprism, the precession angle is not zero.
    Advantageously, when adjusting the precession setting, said electron biprism is inserted.
    At least at the start of the second phase, the precession angle can be adjusted to a given value for the acquisition of said at least one hologram.
    The present invention also relates to a method of obtaining at least one phase image of a sample, comprising the method of acquiring at least one hologram according to the invention, and a step of obtaining at least one phase image by processing said at least one hologram obtained at the end of the acquisition method.
    The present invention also relates to a method for determining at least one physical field of a sample comprising the method for obtaining at least one phase image according to the present invention and a step of processing said phase image. to determine said physical field.
    BRIEF DESCRIPTION OF THE DRAWINGS
    The present invention will be better understood on the basis of the description which follows and of the appended drawings in which:
    FIG. IA is a schematic representation of a transmission electron microscope for the implementation of the acquisition method according to the invention,
    FIG. 1B is a schematic representation of the deflected beam in precession mode,
    FIG. 2 is a flow diagram of an example of a method of acquiring phase images according to the invention,
    FIG. 3 is a photo of a sample under an electron microscope in scanning transmission,
    FIG. 4 is a hologram of the sample of FIG. 3 obtained from the acquisition method according to the invention,
    FIG. 5 is a hologram of the sample of FIG. 3 obtained from a prior art acquisition method,
    FIG. 6 is a phase image obtained from the hologram of FIG. 4,
    FIG. 7 is a phase image obtained from the hologram of FIG. 5,
    - Figure 8 is a graphical representation of the phase variation along the profiles PI and P2.
    DETAILED PRESENTATION OF PARTICULAR EMBODIMENTS
    In the following description, the terms "beam" and "probe" are both used to denote the electron beam of the microscope.
    In FIG. 1A, we can see a schematic representation of an example of transmission electron microscope which can implement a method of acquiring phase images of samples according to the invention.
    The sample is the environment for which one wishes to acquire one or more phase images and from which or from which, for example, one can determine the physical field or fields of this environment.
    Sample E can be a crystalline and / or amorphous solid environment, for example a semiconductor material, to determine a physical field thereof.
    The transmission electron microscope 2, hereinafter referred to as TEM, may in this order comprise an electron source 4 producing an electron beam, a condenser system 6, an objective lens 8, a sample holder 10, an objective diaphragm 12, an intermediate lens 14, an electron biprism 16 or Möllenstedt biprism, a projector system 18 and a screen 19 on which the hologram is formed.
    The microscope also includes means for performing illumination in precession mode. For example, these means include means 20 for causing deflection of the incident beam. For example, these means include coils 22 between the condenser system and the objective lens. The coils 22 are electrically powered so as to produce a magnetic field capable of causing a deflection of the incident electron beam Fi by an angle a of deflection relative to the optical axis X, called the precession half-angle so that the beam incident by moving generates a precession cone C as shown in Figure IB. The fixed point O around which the incident beam Fi turns corresponds to the area of the sample which is analyzed. The values of a can vary from 0.01 ° to 5 ° and preferably between 0.1 ° and 1 °. This deflection is also called "scan".
    Advantageously, the means for performing illumination in precession mode also include means 23 for compensating for the effect of the deflection of the incident beam Fi on the transmitted beam. These means are located after the sample. For example, these compensation means comprise coils 24 downstream of the objective lens which are electrically supplied so as to produce a magnetic field capable of compensating for the effect of the deflection of the incident beam Fi on the transmitted beam. This compensation is also called “descan” correction.
    The incident electron beam is rotating, so due to precession, it forms a cone whose apex is located on the sample as shown in Figure IB.
    Alternatively, precession could be achieved by rotating the sample.
    The precession means are connected to a control unit 26.
    The acquisition method of at least one hologram according to the invention comprises the acquisition of at least one hologram in holography mode off the optical axis in precession mode. For this, during the acquisition of the hologram, the means for moving the electron beam in precession mode and the means for compensating for precession are activated. The hologram thus obtained makes it possible to obtain a phase image presenting an averaging of the diffraction effects along the precession cone, and thus fewer artefacts linked to the diffraction effects.
    The acquisition method according to the invention can take place according to a first phase I for adjusting the transmission electron microscope and a second phase II for acquiring the hologram (s).
    The sample that we wish to study is set up in the TEM.
    The first TEM adjustment phase includes:
    a step 100 of aligning the TEM in holography mode,
    a step 200 of aligning the TEM in precession mode,
    a step 300 of checking the stability of the sample in the image plane and of the diffraction,
    a step 400 of setting up the electron biprism and adjusting its characteristics,
    a step 500 for verifying the stability of the sample and the hologram in the image plane.
    Step 100 of aligning the TEM in holography mode is carried out in the absence of the biprism. The TEM is aligned in the optical configuration used for holography and is well known to a person skilled in the art who wants to use a TEM in holography mode. The microscope is used in an optical configuration, in which the image plane of the objective lens is not combined with the physical location of the biprism in the microscope.
    This alignment includes for example:
    sub-step 102 for adjusting the TEM in the optical configuration which will be used for holography, for example the choice of magnification in an optical configuration where the image plane of the objective lens is not combined with the location of the biprism and adjusting the condenser system for optimized holographic illumination.
    Sub-step 104 which consists in adjusting the pivot points of the usual TEM alignment of the probe, the center of rotation of the probe, the objective astigmatism and the focusing by adjusting the height of the sample,
    Advantageously, an image aberration corrector is used to correct the aberrations which are introduced by the use of a precession angle. It is then possible to use higher precession angle values, in order to more significantly attenuate the artifacts related to diffraction.
    Sub-step 106 which consists in aligning the diffraction by adjusting its focus, the diffraction astigmatism and by centering the diffraction.
    Advantageously, it can be provided prior to sub-step 104, sub-step 108 of activation of the precession mode of the microscope, in order to have access to the precession controls (“scan” and “descan”), in maintaining a zero precession angle. Activating the precession mode at this time allows the diffraction to be adjusted under the exact conditions used for the precession.
    Advantageously, the currents of the objective, diffraction and intermediate lenses as well as the objective astigmatism are no longer modified until the acquisition of the images.
    According to the invention, we then go to step 200 of aligning the TEM in precession mode.
    If the sub-step 106 for activating the precession mode has not taken place, the precession mode is activated in the sub-step 201 and is adjusted so as to apply a precession angle to the electron beam. The value of the precession angle a will advantageously be that which will be used for the acquisition of the images, or another value. For example, the precession angle a is of the order of 0.5 °.
    The objective of step 200 is to obtain an immobile or quasi-immobile image both in the diffraction plane and in the image plane when the precession is active.
    In the present application, it is considered that the image of the sample is stable in the image plane when its displacement is less than the spatial resolution desired for the measurement, this is a factor limiting the final spatial resolution for example at order of nm with a precession angle a of the order of 0.3 °. The image of the diffraction is considered to be immobile in the diffraction plane when it is visually stable. And we consider that the hologram is sufficiently stable when it has a contrast of at least 5%; the contrast of the hologram is given by (l max lmin) / (lmax + lmin), where l max and l min are respectively the maximum and minimum intensity of the fringes.
    Step 200 includes alignment sub-steps in image mode and in diffraction mode which are carried out in the absence of compensation for precession and in the presence of compensation for precession.
    For example, the alignment step 200 comprises
    - Without compensation for precession, a sub-step 202 consisting in aligning the pivot points of the precession means so that the electronic probe no longer moves on the sample. In precession mode, the fixed point of the probe is on the sample.
    - Without compensation for precession, sub-step 204 consisting in aligning the distortion of the precession means so that the transmitted and diffracted beams describe circles.
    - With precession compensation, a sub-step 206 consisting in adjusting the translation compensation of the probe after crossing the sample by the precession compensation means, so that the image does not move in the image plane.
    - With precession compensation, a sub-step 208 for adjusting the compensation of the precession angle, so that the diffraction image is stabilized.
    At the end of step 200, during a step 300, it is checked whether the stability of the sample in the image plane and of the diffraction is sufficient. If this stability is not sufficient, we return to step 206.
    In a variant, before repeating step 206, it is possible to readjust the focus to the moon sub-step 210 by modifying the height so as to ensure that the fixed point of the probe is indeed in the plane of the sample.
    As explained above, it is considered that the sample is sufficiently stable in the image plane when its displacement is less than the desired measurement resolution, and that the diffraction is stable when the operator considers that it is visually stable.
    When the sample is sufficiently stable in the image plane and the diffraction is sufficiently stable, we go to step 400 during which new adjustment adjustments are made in the presence of the biprism.
    First, we insert the biprism into the TEM downstream of the objective lens. Then we adjust the characteristics of the biprism, such as its position, its orientation and its voltage bias. The adjustment of biprism is well known to those skilled in the art of holography. The position and orientation of the biprism are used to separate the reference wave from the object wave. The polarization of the biprism is used to adjust the interfrange and the width of the hologram in view of the desired spatial resolution and field of view.
    In addition, the probe can be made elliptical by adjusting the condenser astigmatism, to increase the spatial coherence of the beam in the direction perpendicular to the biprism. These adjustments can advantageously be carried out by modifying the precession angle, for example by using a precession angle at 0 ° to limit movements.
    Alternatively, an objective diaphragm can be placed in the focal plane of the objective lens.
    When step 400 is finished, the stability of the sample and of the hologram in the image plane is verified during step 500. Prior to step 500, the precession angle a can be modified in step 600 to the value desired for the acquisition of the hologram, for example 0.25 °.
    It is considered that the sample is sufficiently stable in the image plane when the movement of the sample is less than the desired spatial resolution, for example of the order of nm with a precession angle a of the order of 0.3 °, and that the hologram is sufficiently stable when it has a contrast of at least 5%. The contrast of the hologram is given by (l m ax-lmin) / (lmax + lmin), where l max and l min are respectively the maximum and minimum intensity of the fringes.]
    If the sample and the hologram are not sufficiently stable in the image, we return to step 202, without resuming the alignment of the distortions of the precession means, ie without applying step 204. Provision may be made for readjust this alignment of the precession on the hologram, ie start again at step 202 leaving the biprism inserted in order to preserve the alignments of the biprism and the condenser astigmatism made in step 400 (loop 510).
    If the sample and the hologram are sufficiently stable, the first phase is completed and the second acquisition phase can take place directly. The precession angle is chosen and adjusted if it is different from that used for step 600.
    The second phase II comprises the acquisition of at least one hologram and then the reconstruction of a phase image from the hologram (s).
    The exposure time is a multiple of the time taken by the probe to perform a period of revolution.
    According to another exemplary embodiment, during the step 500 of checking the stability of the sample and of the hologram in the image plane, if the stability is not sufficient, the first phase is ended and we pass in the second acquisition phase during which images are acquired in discrete precession mode: a series of holograms is recorded by fixing the probe to each hologram; ie the probe is inclined by the desired precession angle and with a fixed position of the probe on the circle describing the precession, then the probe is rotated step by step so that it describes the circle, and a hologram is recorded at each step. For example, 90 holograms are recorded with an angular step of 4 ° to describe a complete revolution. The series of holograms can then be processed so as to find the average phase of the series of holograms. This treatment is for example described for example in the document E. Voelkl and D. Tang, Ultramicroscopy 110, 447 (2010).
    This discrete acquisition makes it possible to avoid the effects of spatial averaging of the sample due to a bad adjustment of the compensation of the movement of the sample.
    Discrete acquisition can be used on a regular basis whether the alignment is satisfactory or not.
    FIG. 3 is an image produced by a scanning electron microscope by transmission of a silicon bevel produced by a focused ion beam, the fringes of equal thickness can be seen.
    In FIG. 4, a hologram of the silicon bevel can be seen by a method of acquisition in precession mode according to the invention. The precession angle is 0.25 ° and the revolution time is 1 s. The exposure time of the camera was chosen equal to 4 s. Steps 100 to 500 of the first phase of the method according to the invention were carried out.
    By way of comparison, FIG. 5 shows a hologram of the silicon bevel by a conventional method of holography off the optical axis of the state of the art, i.e. without precession.
    In Figures 6 and 7, we can see the phase images reconstructed from the holograms of Figures 4 and 5 respectively. These images were obtained by usual Fourier processing, with a mask limiting the resolution to 2 nm. The plotting of profiles PI, P2 allows a quantitative comparison.
    FIG. 8 represents the phase values Φ in radians along the profiles PI and P2 in nm. Zone I corresponds to a vacuum zone, zone II corresponds to amorphous silicon and zone III corresponds to crystalline silicon.
    We note that the artefacts linked to the diffraction effects are clearly reduced by comparing Figures 6 and 7, and more easily by comparing the profiles PI and P2 on the plot in Figure 8. In Figure 8, we observe that electronic holography in precession gives equivalent values for the phase in the amorphous part of the sample, relative to electronic holography. The increase in the linear thickness of the beveled sample is observed by a linear increase in the phase. However, in the case of conventional electronic holography (FIG. 7), the phase no longer increases linearly with the increase in thickness in the crystalline part of the sample. This is due to the fringes of equal thickness caused by the diffraction effects and the dynamic diffraction effects. The acquisition method according to the invention makes it possible to correct these artefacts and to find a linear increase in the phase with the thickness also in the crystalline part (FIG. 6).
    According to an alternative embodiment, it is possible to carry out the alignment step 100 of the TEM in Lorentz mode, to use the advantage of the wide field of view that this mode allows for holography.
    According to an alternative embodiment, during the recording of the hologram (s), a movable objective diaphragm can be envisaged; its movement can be controlled, in order to give it a synchronous circular movement with the rotation of the diffraction pattern, making it possible to precisely select a transmitted or diffracted beam to carry out holography experiments in light or dark fields.
    In order to achieve an optical configuration of electronic holography in precession in the dark field, the TEM is, during step 100, aligned in the manner of an optical configuration of “dark field” type, on a desired diffracted beam. The diffracted beam is then in the optical axis instead of the transmitted beam. Steps 200 to 500 then take place.
    Thanks to the acquisition method according to the invention, it is possible:
    to measure the physical fields in a sample with artifacts, related to the diffraction effects in the crystal, attenuated.
    to image the phase of a monocrystalline sample while remaining in the zone axis. For example, we can measure the phase within a thin layer along the zone axis, in order to reduce the projection effects of the interfaces.
    to image the phase of a monocrystalline sample of non-homogeneous thickness. We can then for example determine the average internal potential (MIP) of materials in bevels or a thickness map by holography using the reconstructed amplitude image of the hologram, as described in the document Midgley, PA Micron 32,167-184 (2001).
    to image the phase of a curved monocrystalline sample. We can for example measure the magnetization in ferromagnetic materials, the polarization in a ferroelectric material or measure the deformation field by electronic holography in precession in the dark field, with a small precession angle, for example of the order of 0, 1 °, which makes it possible to partially overcome the effects of curvature of the crystal and to obtain a value of the deformation closer to the average value of the deformation through the thickness of the sample.
    to image the phase of a thick monocrystalline sample. For example, one can determine the dopants in semiconductors, requiring thick samples, from the measurement of their electrical potential.
    to image the phase of a poly-crystalline sample.
    to produce holograms on III-V semiconductors, which have the distinction of having diffraction contrasts which are difficult to eliminate by varying the orientation of the sample.
    权利要求:
    Claims (14)
    [1" id="c-fr-0001]
    1. Method for acquiring at least one hologram of a sample by off-axis holography using a transmission electron microscope, said microscope comprising a source of an electron beam, at least one objective lens, a holder sample, at least one electron biprism and means for moving the electron beam in precession mode upstream of the sample holder and means for compensating for the precession downstream of the sample holder, said method comprising activating the means of movement the electron beam in precession mode and means for compensating for precession and the acquisition of a hologram of said sample in precession mode.
    [2" id="c-fr-0002]
    2. Acquisition method according to claim 1, comprising, after placing the sample in the microscope, in a first phase, the steps:
    - alignment of the electron microscope in holography mode without electron biprism,
    - alignment of the electron microscope in precession mode,
    - verification of the stability of the image of the sample in the image plane and the stability of the diffraction of the microscope,
    - placement of the electron biprism in the microscope and adjustment of the characteristics of said electron biprism,
    - verification of the stability of the sample and the hologram in the image plane, in a second phase, the acquisition of at least one hologram.
    [3" id="c-fr-0003]
    3. Acquisition method according to claim 2, in which the stability of the image of the sample is considered to be sufficient in the image plane when its displacement is less than the desired measurement resolution, and in which the stability of the diffraction is sufficient when the operator considers it to be visually stable.
    [4" id="c-fr-0004]
    4. Acquisition method according to claim 2 or 3, in which, if the stability of the image of the sample in the image plane and the stability of the diffraction of the microscope is not sufficient, step d alignment in precession mode is at least partially repeated.
    [5" id="c-fr-0005]
    5. Acquisition method according to claim 4, in which prior to the repetition of the alignment step in precession mode, the height of the sample relative to an objective lens is modified.
    [6" id="c-fr-0006]
    6. Acquisition method according to one of claims 1 to 5, comprising, after the placement of the electron biprism in the microscope and adjustment of the characteristics of said electron biprism, a step of verifying the stability of the image of the sample and the hologram in the image plane.
    [7" id="c-fr-0007]
    7. The acquisition method according to claim 6, in which the stability of the image of the sample in the image plane is considered to be sufficient when the movement of the sample is less than the desired spatial resolution, and in which the hologram stability is sufficient when it has a contrast of at least 5%.
    [8" id="c-fr-0008]
    8. Acquisition method according to claim 6 or 7, wherein if the stability of the image is not satisfactory, the step of acquiring at least one hologram is an acquisition of discrete holograms.
    [9" id="c-fr-0009]
    9. Acquisition method according to one of claims 1 to 8, in which the precession mode is activated during the alignment step in holography mode or at the latest at the start of the alignment step in mode. precession.
    [10" id="c-fr-0010]
    10. Acquisition method according to one of claims 1 to 9, wherein, when adjusting the characteristics of said electron biprism, the precession angle is not zero.
    [11" id="c-fr-0011]
    11. Acquisition method according to one of claims 1 to 10, in which, when adjusting the precession setting, said electron biprism is inserted.
    [12" id="c-fr-0012]
    12. Acquisition method according to one of claims 1 to 11, in which, at least at the start of the second phase, the precession angle is adjusted to a given value for the acquisition of said at least one hologram.
    [13" id="c-fr-0013]
    13. Method for obtaining at least one phase image of a sample, comprising the method for acquiring at least one hologram according to one of claims 1 to 12, and a step for obtaining at at least one phase image by processing said at least one hologram obtained at the end of the acquisition method.
    [14" id="c-fr-0014]
    14. Method for determining at least one physical field of a sample comprising the method for obtaining at least one phase image according to the preceding claim and a step of processing said phase image to determine said physical field.
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    同族专利:
    公开号 | 公开日
    US10884379B2|2021-01-05|
    US20190155218A1|2019-05-23|
    FR3073956B1|2019-12-27|
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    法律状态:
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    2019-05-24| PLSC| Publication of the preliminary search report|Effective date: 20190524 |
    2019-11-29| PLFP| Fee payment|Year of fee payment: 3 |
    2020-11-30| PLFP| Fee payment|Year of fee payment: 4 |
    2021-11-30| PLFP| Fee payment|Year of fee payment: 5 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1761062A|FR3073956B1|2017-11-22|2017-11-22|METHOD OF ACQUIRING HOLOGRAMS BY ELECTRONIC HOLOGRAPHY OUTSIDE OPTICAL AXIS IN PRECESSION MODE|
    FR1761062|2017-11-22|FR1761062A| FR3073956B1|2017-11-22|2017-11-22|METHOD OF ACQUIRING HOLOGRAMS BY ELECTRONIC HOLOGRAPHY OUTSIDE OPTICAL AXIS IN PRECESSION MODE|
    US16/196,365| US10884379B2|2017-11-22|2018-11-20|Method of acquiring holograms by off-axis electron holography in precession mode|
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