• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a guided light source (1) comprising: - at least one quantum dot (2) associated with a disc waveguide (3) so as to ensure a cylindrical propagation of a wavefront emitted by the at least one quantum dot in the disc waveguide; - An annular waveguide (5) surrounds the disc waveguide and has a coupling network (T) formed on its inner periphery to receive said wavefront in normal incidence; an output waveguide (6) optically coupled to the annular waveguide, in which said wavefront is guided. The invention extends to the method of manufacturing such a source, and to its use for the emission of a single photon sequence.
    公开号:FR3066616A1
    申请号:FR1754421
    申请日:2017-05-18
    公开日:2018-11-23
    发明作者:Karim HASSAN；Salim BOUTAMI
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    GUIDED LIGHT SOURCE, MANUFACTURING METHOD THEREOF, AND USE THEREOF FOR EMISSION OF SINGLE PHOTONS
    DESCRIPTION
    TECHNICAL AREA
    The field of the invention is that of light sources, and more particularly that of single photon sources.
    PRIOR STATE OF THE ART
    Single photon sources are capable of emitting only one photon at a time. They generally consist of a quantum dot type emitter, and the emission of a photon is carried out there from an injected electron-hole pair.
    These sources have for interest the fundamental study of optical and quantum processes, but also quantum cryptography. Indeed, if one is capable of transmitting information in bits each consisting of a single photon, one can guard against, or at least detect, the interception of messages.
    In order for a single photon source to be usable, one must be able to efficiently collect the emitted photon. For this, the source must be able to emit the photon in a directive manner.
    A well known single photon source is described in the article "Quantum dots as single-photon sources for quantum information processing" (D C Unitt et al 2005 J. Opt. B: Quantum Semiclass. Opt. 7 S129). It consists of a pillar formed by reactive ion etching, with a quantum dot within it surrounded by Braggs mirrors. Bragg mirrors make it possible to constitute a Fabry-Perot cavity which exacerbates the probability of emission of the quantum dot in this mode of resonance. However, we realize that this type of source diverges. In addition, due to the strong resonance of this source (high lifetime of the photon emitted in the cavity), there is a risk that the photon will be diffracted by the roughness of the etching edge of the pillar.
    Another type of single photon source is presented in the article "A highly efficient single-photon source based on a quantum dot in a photonic nanowire" (J. Claudon et al., Nature Photonics 4,174 -177 (2010)). This source takes the form of a pillar, the upper point of which is refined by suitable etching conditions. A mirror is placed under the pillar to reflect the light upwards. This source is not very resonant, which avoids diffracting the light by roughness. Furthermore, the refinement at the tip of the top of the pillar makes it possible to spatially expand the mode of the pillar, and therefore to make it less angularly divergent. This source therefore exhibits good emission directivity.
    However, the positioning of the quantum dot within a pillar requires precise alignment, which is not easy. It is also difficult to precisely control the shape given to the tip of the pillar, so that the collimation of the source cannot be well controlled.
    STATEMENT OF THE INVENTION
    An object of the invention is to provide a light source which does not have these drawbacks. To this end, the invention provides a light source which does not emit in a free field but in a guided manner. More particularly, the invention provides a guided light source comprising at least one quantum dot associated with a discoid waveguide so as to ensure a cylindrical propagation of a wavefront emitted by the at least one quantum dot in the discoid waveguide. An annular waveguide surrounds the discoid waveguide and has a coupling network (T) formed on its inner periphery to receive said wavefront at normal incidence. An output waveguide is optically coupled to the annular waveguide.
    Some preferred but non-limiting aspects of this source are:
    the annular waveguide is open to form two coupling ends, and the source further comprises a coupler connected, on the one hand, to the two coupling ends of the annular waveguide and, on the other hand, to the guide output wave, said coupler being configured to combine beams traveling in opposite directions in the annular waveguide into a single beam traveling in the output waveguide;
    the coupler is a Y junction, or a multimode interference coupler;
    a mirror surrounds the annular waveguide, for example at a quarter wavelength optical distance from the annular waveguide the discoid waveguide and the annular waveguide are spaced apart by an optical distance less than a distance quarter wave;
    the at least one quantum dot is arranged in the discoid waveguide, or spaced from the discoid waveguide by an optical distance less than a quarter wave distance;
    the annular waveguide is made of a doped semiconductor material;
    the annular waveguide is an edge waveguide;
    an electrical contact pad is arranged above the at least one quantum dot;
    it includes a single quantum dot.
    The invention extends to the use of this source for the emission of a sequence of single photons, for example in a quantum cryptography process. The invention also relates to a method of manufacturing such a guided light source.
    BRIEF DESCRIPTION OF THE DRAWINGS
    Other aspects, aims, advantages and characteristics of the invention will appear better on reading the following detailed description of preferred embodiments thereof, given by way of non-limiting example, and made with reference to the accompanying drawings on which ones :
    - Figure 1 is a top view of a guided light source according to a possible embodiment of the invention;
    - Figure 2 is a diagram illustrating the propagation of a wavefront emitted by a quantum dot in the source of Figure 1;
    - Figures 3a-3g illustrate a first example of a method of manufacturing a source according to the invention;
    - Figures 4a-4h illustrate a second example of a method of manufacturing a source according to the invention.
    DETAILED PRESENTATION OF PARTICULAR EMBODIMENTS
    The invention relates to a guided light source, for example a source intended to emit a sequence of single photons.
    There is shown in Figure 1 a top view of a source 1 according to the invention. It comprises at least one quantum dot 2 associated with a discoid waveguide 3 so as to ensure a cylindrical propagation of a wavefront emitted by the at least one quantum dot in the discoid waveguide. The discoid waveguide is made of a core material, for example silicon. It is surrounded by a sheath, for example made of silica.
    The discoid waveguide 3 takes the form of a block of generally circular section. It has an axis of symmetry referenced A in Figure 3b. Its cross section, in a plane orthogonal to the axis of symmetry, takes the form of an ellipse whose ratio between small and large radii is between 0.8 and 1. The axis of symmetry passes through the center of l 'ellipse. The discoid waveguide has for example a thickness of 3 μm. Its cross section can take the form of a circle, the diameter of which is for example 3.5 μm, in which case it forms a cylinder.
    The quantum dot (s) 2 are arranged below, above (this is the case for FIG. 1) or in the discoid waveguide 3. They are ideally placed at the level of the axis of symmetry. The wavefront emitted by a quantum dot propagates cylindrically in the discoid waveguide, from the axis of symmetry to the periphery of the discoid waveguide.
    When placed below or above the discoid waveguide, a quantum dot is in contact with or spaced from the discoid waveguide by a distance less than a quarter-wave optical distance.
    Source 1 can include a single quantum dot, thus forming a source of single photons. It can include a plurality of quantum dots arranged in the form of an aggregate or an organized set of quantum dots.
    The source 1 also comprises an annular waveguide 5 which surrounds the discoid waveguide 3, and is separated from the latter by the sheath 4 by an optical distance at most quarter wave to avoid vertical leaks. from light. The annular waveguide 5 has an outer periphery (side face) PE, an inner periphery PI facing the discoid waveguide 3 and an upper surface connecting the outer and inner peripheries. It advantageously has the same thickness as the discoid waveguide, and a width for example of 0.5 μm.
    A coupling network (known by the English term “grating coupler”) is formed on the inner periphery PI of the annular waveguide 5. Such a network is generally produced on the upper surface of a waveguide to allow extraction (respectively injection) of light from (to) the waveguide to (from) an optical fiber. To increase the efficiency, the extraction / injection is made at an angle Θ with respect to the normal to the grating coming D _ tilt the optical fiber. The network period is then expressed according to r ~ where n eff -wsinfl n e ff is the effective mode index, n the superstrate index, and Θ the injection or extraction angle.
    In the context of the invention, the coupling network comprises, along the inner periphery, a succession of trenches T etched over the entire thickness of the annular waveguide. The coupling network thus formed on the inner periphery of the annular guide 5 receives the wavefront, which has propagated in a cylindrical manner in the discoid waveguide 3, at normal incidence. We therefore have 0 = 0 ° and the network is designed P- λ to present a period r . An embodiment is a silicon guide H eff surrounded by silica, a working wavelength λ = 1.55μιτι, a network periodicity
    P = 530nm, a filling factor of 50% and an engraving depth of 90nm (from the inner side face of the annular waveguide).
    In normal injection, for reasons of symmetry, 50% of the light injected into the annular waveguide 5 leaves in one direction and 50% in the other direction, with the same phase. Thus, when the quantum dot emits a wave, light is normally injected into the annular waveguide 5 where it propagates in two modes: a propagative mode in one direction of the ring and a counterpropagative mode in the opposite direction.
    The light source 1 further comprises an output waveguide 6 optically coupled to the annular waveguide, for example a straight guide. Thus, the light emitted by the quantum dot (s) is coupled in the output guide, thus producing a guided light source.
    Preferably, the light source further comprises a mirror 7 which surrounds the annular waveguide to return the light to the annular waveguide. The mirror 7 is placed at a quarter-wavelength optical distance from the outer periphery of the annular waveguide and is spaced from the latter by sheath material, typically silica. The mirror can be formed from metal (for example copper, gold, titanium, tungsten or even indium tin oxide), and thus constitute a metallic enclosure making it possible to ensure that light does not leak from the source. In an alternative embodiment, the mirror is a Bragg mirror consisting of a radial alternation of layers of different optical indices, for example layers of silica and silicon.
    In one embodiment, and as shown in FIG. 1, the annular waveguide 5 is open to form two coupling ends E1, E2 (it is partially annular, and preferably covers at least 75% of the circumference d 'a ring). The two coupling ends E1, E2 are preferably symmetrical with respect to a median sagittal plane of the ring (plane orthogonal to the plane of FIG. 1 and containing the axis of symmetry). The coupling network extends from one coupling end to the other along the inner periphery of the annular waveguide.
    The source further comprises a coupler 8 with 2 inputs and 1 output connected, on the one hand, to the two coupling ends El, E2 of the annular waveguide 5 and, on the other hand, to the output waveguide , said coupler 8 being configured to combine the beams flowing in the opposite direction in the annular waveguide into a single beam flowing in the output waveguide. In other words, the coupler 8 allows the two modes, propagative and counterpropagative, flowing in the annular waveguide to be recombined in the output waveguide. The coupler 8 can be a Y junction, or a multimode interference coupler (MMI for “MultiMode Interference”).
    In an alternative embodiment, the annular waveguide is perfectly annular and is coupled evanescently to a rectilinear waveguide. In such a scenario, the light circulate in both propagative and counterpropagative modes in the rectilinear guide. A coupler with two inputs, each connected to one end of the rectilinear waveguide, and an output, connected to an output waveguide, makes it possible to combine the beams traveling in opposite directions in the rectilinear waveguide into one single beam flowing in the output waveguide.
    In another alternative embodiment which does not use a coupler, one of the coupling ends of the annular waveguide is connected to the output waveguide while a mirror is positioned at the other end of coupling.
    A simulation has been shown in FIG. 2, by calculation of finite differences in the time domain, at the telecom wavelength of λ = 1.55 μm of the guided light source of FIG. 1. This simulation confirms a good optical coupling with the output guide 6 since 80% of the light emitted by the quantum dot is guided in the output wave guide.
    There is shown in Figures 3a-3g a first embodiment of a method of manufacturing a guided light source according to the invention. The process begins (FIG. 3a) by the provision of a silicon-on-insulator substrate (SOI for “Silicon On Insulator”) which comprises a layer of surface silicon 10 separated from a solid substrate of silicon 11 by a layer of buried oxide 12. With reference to FIG. 3b, the surface silicon layer 10 is etched to define the different structures of the guided light source, namely the discoid waveguide 3, the waveguide annular 5 whose inner periphery is etched to define the coupling network, the output waveguide, the coupler and if necessary the silicon layers intended to form a Bragg mirror. Referring to FIG. 3c, the core material is then deposited, here silica, and planarize this deposit. We then position the quantum dot (s) 2 in the center of the discoid waveguide, for example by depositing a colloidal solution of quantum dots on the substrate.
    In a variant illustrated in FIG. 3d, a quantum dot is deposited on the discoid waveguide 3 at the level of the axis of symmetry A. In a variant not illustrated, a resin can be deposited on the structure of FIG. 3c and etched directly above the discoid waveguide 3 at the level of the axis of symmetry A. By capillarity, a quantum dot is positioned in the hole etched in the resin. The resin is then removed to obtain a structure identical to that shown in Figure 3d. In another alternative embodiment illustrated in FIGS. 3di and 3dii, the discoid waveguide 3 is etched to form a hole there at the level of the axis of symmetry. By capillary action, the quantum dot 2 naturally comes into position in the hole.
    A new deposit of silica is then produced to encapsulate all of the sheath material waveguides (FIG. 3e). When a metal mirror is used, an etching of a trench 14 which surrounds the annular waveguide 5 (FIG. 3f) is carried out, then filling of the trench (or a simple plating of its walls) by a metal 7 (Figure 3g), for example copper. The metal present on the surface can then be removed or kept after deposition.
    There is shown in Figures 4a-4h a second embodiment of a method of manufacturing a guided light source according to the invention. This second embodiment makes it possible to pump electrically, rather than optically, to excite the quantum dot by means of an electrical injection by tunnel effect and allow the emission of a photon.
    This process begins (FIG. 4a) with the supply of an SOI substrate, the surface layer 10 of which is doped. With reference to FIG. 4b, the surface silicon layer is etched to define the different structures of the guided light source, namely the discoid waveguide 3, the annular waveguide 5 whose periphery inside is etched to define the coupling network, the output waveguide and the coupler. The discoid waveguide is here a stopped waveguide ("rib" according to English terminology) to allow the realization of an electrical contact. We then proceed to deposit a thin layer of silica 4 (Figure 4c) and then position the quantum dot (Figure 4d), possibly with a pre-structure of the silica or a layer of resin to facilitate this positioning. A new deposition of silica is carried out (FIG. 4e), the etching of a trench 14 surrounding the annular waveguide (FIG. 4f), the filling of the trench with a metal to form the mirror 7 (FIG. 4g) and finally by depositing an upper electrical contact pad 15 directly above the quantum dot (FIG. 4h). The metal mirror 7 in contact with the doped edge discoid waveguide allows electrical contact to be made. These electrical contacts (pad 15 and contact via the mirror 7) make it possible to carry out an electrical injection into the box, the current being unable to pass from pad 15 to the discoid waveguide due to the dielectric layer 4, except by the quantum dot by tunnel effect. By forcing the current to pass through the box, good injection efficiency is ensured, the injection of an electron-hole pair allowing the emission of a photon.
    The invention also relates to the use of the source as described above for the emission of a sequence of single photons.
    The device can then consist of a pulse pump laser and a couple of two rapid detectors of the APD (avalanche photodiode) type coupled to a pulse counter ensuring the measurement of the correlation function. The two detectors are each located on either side of a semi-reflecting plate receiving the photon flux from the sample excited by the laser. In an alternative embodiment to optical pumping, and as described above, it is possible to perform an electrical injection by tunnel effect in the quantum dot.
    The invention is not limited to the guided light source and to its use, but also extends to a photonic circuit integrating such a light source as well as to the method of manufacturing such a source and in particular to a process for manufacturing a guided light source, comprising:
    laο the formation of a discoid waveguide 3, an annular waveguide surrounding the discoid waveguide and an output waveguide 6 optically coupled to the annular waveguide;
    placing at least one quantum dot 2 so as to ensure a cylindrical propagation of a wavefront emitted by the at least one quantum dot in the discoid waveguide; and forming a coupling network on an inner periphery PI of the annular waveguide 5 to receive said wavefront at normal incidence.
    权利要求:
    Claims (15)
    [1" id="c-fr-0001]
    1. Guided light source (1), comprising:
    - at least one quantum dot (2) associated with a discoid waveguide (3) so as to ensure a cylindrical propagation of a wavefront emitted by the at least one quantum dot in the discoid waveguide ;
    - an annular waveguide (5) surrounding said discoid waveguide and having a coupling network (T) formed on its inner periphery to receive said wavefront at normal incidence;
    - an output waveguide (6) optically coupled to the annular waveguide.
    [2" id="c-fr-0002]
    2. Source according to claim 1 wherein the annular waveguide (5) is open to form two coupling ends (E1, E2), and which further comprises a coupler (8) connected, on the one hand, to the two coupling ends (El, E2) of the annular waveguide and, on the other hand, to the output waveguide (6), said coupler being configured to combine beams traveling in opposite directions in the guide annular wave in a single beam circulating in the output waveguide.
    [3" id="c-fr-0003]
    3. Source according to claim 2, in which the coupler (8) is a Y junction.
    [4" id="c-fr-0004]
    4. Source according to claim 2, in which the coupler (8) is a multimode interference coupler.
    [5" id="c-fr-0005]
    5. Source according to one of claims 1 to 3, comprising a mirror (7) which surrounds the annular waveguide (5).
    [6" id="c-fr-0006]
    6. Source according to claim 5, in which the mirror (7) is arranged at a quarter-wave optical distance from the annular waveguide (5).
    [7" id="c-fr-0007]
    7. Source according to one of claims 1 to 6, wherein the discoid waveguide (3) and the annular waveguide (5) are spaced by an optical distance less than a quarter wave distance.
    [8" id="c-fr-0008]
    8. Source according to one of claims 1 to 7, wherein the at least one quantum dot (2) is arranged in the discoid waveguide.
    [9" id="c-fr-0009]
    9. Source according to one of claims 1 to 7, wherein the at least one quantum dot (2) is spaced from the discoid waveguide by an optical distance less than a quarter wave distance.
    [10" id="c-fr-0010]
    10. Source according to claim 9, in which the annular waveguide is made of a doped semiconductor material.
    [11" id="c-fr-0011]
    11. Source according to claim 9, in which the annular waveguide is an edge waveguide.
    [12" id="c-fr-0012]
    12. Source according to one of claims 10 and 11, further comprising an electrical contact pad (15) arranged above the at least one quantum dot.
    [13" id="c-fr-0013]
    13. Source according to one of claims 1 to 12, comprising a single quantum dot.
    [14" id="c-fr-0014]
    14. Use of the source according to claim 13, for the emission of a sequence of single photons.
    [15" id="c-fr-0015]
    15. Method for manufacturing a guided light source (1), comprising:
    - forming a discoid waveguide (3), an annular waveguide (5) surrounding the discoid waveguide and an output waveguide (6) optically coupled to the guide ring wave;
    - the placement of at least one quantum dot (2) so as to ensure a cylindrical propagation of a wavefront emitted by the at least one quantum dot in the discoid waveguide; and
    - the formation of a coupling network (T) on an inner periphery (PI)
    5 of the annular waveguide (5) for receiving said wavefront at normal incidence.
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    US11177397B2|2020-01-09|2021-11-16|Vanguard International Semiconductor Corporation|Semiconductor devices and methods for forming the same|
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    FR1754421A|FR3066616B1|2017-05-18|2017-05-18|GUIDED LIGHT SOURCE, MANUFACTURING METHOD AND USE THEREOF FOR SINGLE PHOTON TRANSMISSION|
    FR1754421|2017-05-18|FR1754421A| FR3066616B1|2017-05-18|2017-05-18|GUIDED LIGHT SOURCE, MANUFACTURING METHOD AND USE THEREOF FOR SINGLE PHOTON TRANSMISSION|
    US15/978,481| US10295742B2|2017-05-18|2018-05-14|Guided light source for emission of single photons|
    EP18172548.2A| EP3404781B1|2017-05-18|2018-05-16|Guided light source, method for manufacturing same and use thereof for single photon emission|
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