OPTICAL DETECTOR OF PARTICLES

专利摘要:
The present invention relates to a particle detector (60) comprising at least: An optical device (15) configured to emit light radiation; A substrate (100) extending in a plane (x, y) and defining a channel (50) for receiving particles (60), the channel (50) extending mainly in a perpendicular direction (z) in the main plane (x, y); characterized in that the detector comprises a matrix (20) of photodetectors (21) and a reflecting surface (41); the matrix (20) of photodetectors (21) and the reflecting surface (41) being disposed on either side of said portion of the substrate (100) so that a portion of the light radiation passes through the channel (50) while being diffracted by a particle (60), then reflected on the reflecting surface (41), and then reaches the matrix (20) of photodetectors (21).
公开号:FR3062209A1
申请号:FR1750588
申请日:2017-01-25
公开日:2018-07-27
发明作者:Salim BOUTAMI；Sergio Nicoletti
申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
IPC主号:

专利说明:

© Holder (s): COMMISSIONER OF ATOMIC ENERGY AND ALTERNATIVE ENERGIES.
O Extension request (s):
® Agent (s): HIGH OFFICE.
FR 3 062 209 - A1 (54) OPTICAL PARTICLE DETECTOR.
(57) The present invention relates to a particle detector (60) comprising at least:
O An optical device (15) configured to emit light radiation;
O A substrate (100) extending in a plane (x, y) and defining a channel (50) intended to receive particles (60), the channel (50) extending mainly in a perpendicular direction (z) at the main plane (x, y); characterized in that the detector comprises an array (20) of photodetectors (21) and a reflecting surface (41); the array (20) of photodetectors (21) and the reflecting surface (41) being arranged on either side of said portion of the substrate (100) so that part of the light radiation passes through the channel (50) being diffracted by a particle (60), then is reflected on the reflecting surface (41), then reaches the matrix (20) of photodetectors (21).

TECHNICAL FIELD OF THE INVENTION
The present invention relates to the field of optical detection of particles in general and more particularly of particles of micrometric or even nanometric size. It will find for particularly advantageous but non-limiting application the detection of dust particles, smoke particles for detecting fires or even the detection of polluting particles and in particular so-called fine particles.
STATE OF THE ART
Particle detectors are generally based on the diffraction of visible, or near infrared, light by particles. These detectors thus generally include optical sensors configured to measure the diffraction of light by the particles.
The detectors include a light source and a channel through which the particles to be detected pass. In the absence of particles, there is no diffraction, so optical sensors do not measure light. In the presence of particles, the light is diffracted by the particles and the optical sensors detect the diffracted light in their solid detection angle. This measurement thus makes it possible to detect one or more particles. While the intensity of the diffracted light and its angular diagram are characteristics of the nature, shape, size and concentration of the particles, the known solutions do not make it possible to measure all of these characteristics in a way faithful, at a reasonable cost and occupying a limited space.
The document FR2963101 describes an existing solution. This solution provides a light source carried by a waveguide which illuminates a channel etched in a silicon substrate and through which particles will circulate. The diffraction of the incident light by these particles is detected by two peripheral photodiodes produced on the silicon substrate.
This solution makes it possible to reduce the size of the sensor. On the other hand, it is extremely difficult with this type of solution to obtain sufficiently precise and complete information on the particles.
It is particularly difficult, if not impossible, to determine the nature of the particles.
There is therefore a need to propose a solution to improve the precision and the quantity of information relating to the particles, in order for example to determine their nature.
This is the objective of the present invention.
SUMMARY OF THE INVENTION
The present invention relates to a particle detector comprising at least:
o An optical device able to be connected to at least one light source and configured to emit at least one light radiation generated by said light source;
o A substrate extending in along a main plane (x, y) and defining at least part of a channel intended to receive a fluid comprising particles, the channel extending mainly in a direction perpendicular (z) to the plane main (x, y), at least a portion of the substrate being configured to receive at least part of the light radiation emitted by the optical device.
The detector further comprises a matrix of photodetectors and at least one reflecting surface, capable of reflecting the light radiation. The photodetector array and the reflecting surface are arranged on either side of said portion of the substrate. Advantageously, the detector is configured so that if particles are present in the channel, at least part of the light radiation emitted by the optical device crosses the channel being at least partially diffracted by at least one particle, then is reflected at least partly on the reflecting surface, and then at least partly reaches the photodetector array.
The association of the channel, at least one reflecting surface and a matrix of photodetectors, makes it possible to capture a greater number of light rays diffracted by the particles.
Indeed, the photodetector matrix can receive on the one hand the light rays diffracted by the particles and which arrive after diffraction directly on the photodetector matrix and on the other hand the rays which arrive on the photodetector matrix after reflection on the surface reflective.
The invention thus makes it possible to increase the diffraction diagram to which one has access.
In fact, in the context of the development of the present invention, it has been observed that in a solution of the type described in the document FR2963101 cited above, the photodetectors capture the diffracted light laterally and detect a solid angle of the diffraction which is very limited. This type of solution then only allows access to a limited portion of the diffraction diagram, which reduces the wealth of information available and limits the knowledge that we can have of particles, in particular their nature.
With the invention, the combination of the reflecting surface, the array of photodetectors and the substrate carrying the channel makes it possible to approximate to a two-dimensional measurement a three-dimensional diffraction.
The present invention thus allows a projection on the same matrix of photodiodes of a very large number of light beams diffracted in various directions in three dimensions.
The geometry of the present invention allows a projection from a three-dimensional propagation vector space to a two-dimensional measurement space.
The invention thus makes it possible to collect more and more precise information concerning the particles. The detection of particles and the identification of their parameters, such as their sizes or their nature, is therefore improved.
In a particularly advantageous manner, the present invention allows the determination of the refractive index of the particles.
The present invention also relates to a method for producing at least one particle detector according to the present invention, comprising at least the following steps:
o Provide at least a first substrate comprising at least one matrix of photodetectors and part of at least one optical device configured to emit at least one light radiation, the first substrate extending along a main plane (x, y);
o Provide at least a second substrate comprising at least one reflective layer, capable of reflecting said at least one light radiation and extending in part at least along the main plane (x, y);
o Form a third substrate by assembling the first substrate and the second substrate so that the array of photodetectors and the reflecting surface are arranged on either side of at least a portion of the substrate;
o Before and / or after the step of forming the third substrate, form at least one particle circulation channel extending mainly in a direction perpendicular (z) to said main plane (x, y) and passing right through the third substrate so that, if particles are present in the channel, at least part of the light radiation emitted by the optical device crosses the channel being at least partially diffracted by at least one particle, then is reflected at least partly on the reflecting surface, and then at least partially reaches the array of photodetectors.
Advantageously, in the case where the step of forming the channel is carried out before the step of forming the third substrate, the method comprises the following steps:
o Formation of at least a first portion of the channel through the first substrate in the perpendicular direction (z) and located near the distal portion;
o Formation of at least a second portion of the channel through the second substrate in said perpendicular direction (z);
o Deposit of at least one additional reflecting layer, capable of reflecting said at least one light radiation, on at least part of the second portion of the channel and preferably on at least one wall of said at least one channel.
BRIEF DESCRIPTION OF THE FIGURES
The aims, objects, as well as the characteristics and advantages of the invention will emerge more clearly from the detailed description of embodiments of the latter which are illustrated by the following accompanying drawings in which:
Figure 1a is a top view of a particle detector according to a first embodiment of the present invention. In this figure, a projection of the diffraction pattern of light rays by particles is shown schematically. This figure represents a possible arrangement of a matrix of photodetectors relative to a particle circulation channel and to the distal portion of an optical device.
Figure 1b illustrate a view along section A-A of Figure 1a. In this figure, the optical path of light rays extracted from an extraction network is shown. This optical path meets the flow of particles in the particle circulation channel then forming diffracted light rays shown schematically in this figure. The reflections of the extracted light rays and of the light rays diffracted by an upper reflecting layer are also shown.
Figure 2a is a top view, similar to the view in Figure 1a, but according to a variant of the embodiment of Figure 1a in which photodetectors are distributed over the whole of a substrate so as to cover more large detection area.
Figure 2b is a view along section A-A of Figure 2a. In this figure, in the same way as in FIG. 1b, the optical paths of light rays extracted from an extraction network located at a distal portion of a waveguide, as well as those of diffracted light rays, are shown diagrammatically. and think about it.
Figure 2c is a view along section B-B of Figure 2a. In this figure, in an identical manner to FIG. 2b, the optical paths of light rays extracted from the extraction network, as well as those of diffracted and reflected light rays, are shown diagrammatically.
Figure 3a is a view of detail A of Figure 1a. This is a top view of an example of the extraction network and its dimensions.
Figure 3b is a view of detail B of Figure 1b. This is a sectional view of the extraction network, the section being taken at the distal portion of the waveguide.
FIGS. 4a to 6d illustrate steps for producing a detector according to the present invention. More precisely :
FIGS. 4a to 4h illustrate, according to one embodiment and according to a view according to section AA, the steps for forming the extraction network on a first substrate comprising a matrix of photodetectors and at least the distal portion of the waveguide intended to understand the extraction network.
Figures 5a to 5d illustrate, according to the first embodiment and according to a view in section A-A, the main steps of forming a second substrate and the reflective layer.
Figures 6a to 6d illustrate, according to the first embodiment and according to a view in section A-A, the assembly of the first and second substrates illustrated in Figures 4h and 5d as well as the formation of the particle circulation channel.
FIGS. 7a and 7b illustrate, according to yet another embodiment, two views in section A-A intersecting the particle circulation channel.
In FIG. 7a, an optical path is shown which crosses the channel directly at the outlet of the extraction network.
In FIG. 7b, an optical path is shown which crosses the channel directly at the outlet of the extraction network after reflection on a reflecting surface.
FIG. 8a is a top view of a variant of the embodiment of FIG. 7a in which photodetectors are distributed over the whole of a substrate so as to cover a larger detection surface.
Figures 8b and 8c are views along section B-B of the detector according to Figure 8a. These Figures 8b and 8c correspond to views 7a and 7b applied to the embodiment of Figure 8a.
Figures 9a to 9f illustrate steps for producing the detector illustrated in Figures 8a to 8c.
FIGS. 9a and 9b illustrate, according to one embodiment and according to a view according to section AA, the steps for forming the extraction network on a first substrate comprising a matrix of photodetectors and at least the distal portion of the waveguide as well as the formation of a first portion of the canal.
Figures 9c to 9e illustrate, according to one embodiment and according to a view in section A-A, the steps for forming a second substrate and a second portion of the channel as well as the deposition of the upper reflective layer.
FIG. 9f illustrates, according to one embodiment and according to a view according to section A-A, the assembly of the first and second substrates.
Figures 10 and 11 illustrate two embodiments of the present invention in which the substrate comprises two particle circulation channels. In these figures, a projection of the diagrams of diffraction of light rays by particles is shown schematically. These figures represent possible arrangements of a photodetector array relative to the two particle circulation channels. In these figures, the optical device comprises a waveguide separating into two arms. FIG. 11 is a top view of a variant of the embodiment of FIG. 10 in which photodetectors are distributed over the whole of a substrate so as to cover a larger detection surface.
Figures 12 and 13 illustrate an optical device according to two embodiments of the present invention. In these figures, the optical device comprises a waveguide separating into two arms.
The accompanying drawings are given as examples and are not limitative of the invention. These drawings are schematic representations and are not necessarily to the scale of practical application. In particular, the relative dimensions of the different layers, photodetectors and waveguide are not representative of reality.
DETAILED DESCRIPTION OF THE INVENTION
In the context of the present invention, the term "on", "overcomes", "covers" or "underlying" or their equivalents does not mean "in contact with". Thus for example, the deposition of a first layer on a second layer, does not necessarily mean that the two layers or substrates are directly in contact with each other but it means that the first layer at least partially covers the second layer by being either directly in contact with it or by being separated from it by at least one other layer or at least one other element.
In the following description, similar reference numerals will be used to describe similar concepts through different embodiments of the invention.
Unless otherwise specified, technical characteristics described in detail for a given embodiment may be combined with technical characteristics described in the context of other embodiments described by way of example and not limitation.
In the context of the present invention, the term “particle”, or its equivalents, has for definition a constituent of a physical system considered to be elementary with respect to the properties studied. For example, a particle is an element of matter whose largest dimension is less than a millimeter (10 ³ meters) and preferably a few tens of micrometers (10 ' ⁶ meters) and preferably less than a micrometer, or even of the order of nanometer (10 ' ⁹ meters). Generally, these are objects made of material whose dimensions are small compared to the dimensions of the particle circulation channel.
Preferably in the context of the present invention, the terms “light radiation”, “wave” or “ray” or their equivalents have the definition of an electromagnetic flux having a main wavelength lambda or a wavelength average lambda around the main wavelength with a standard deviation preferably lower or of the order of 20% for example and propagating preferably in a single main direction or an average direction around the main direction with a lower standard deviation or around 10% for example. This direction of propagation is also called "optical path".
In what follows, the terms "diffusion", "diffraction" or their equivalents refer to the phenomenon by which a propagation medium produces a distribution, in many directions, of the energy of an electromagnetic wave, light for example.
In what follows, the term Transparency or its equivalents refers to the phenomenon of relatively light propagation in a so-called transparent material. In the present description, a material is considered to be transparent as soon as it allows at least 50% of light radiation to pass, preferably at least 75% and advantageously at least 90%.
Before starting a detailed review of embodiments of the invention, there are set out below optional features which can optionally be used in combination or alternatively:
Advantageously, the substrate has a first face turned opposite to or arranged in contact with the reflecting surface and a second face, opposite the first face and turned opposite or arranged in contact with the array of photodetectors.
Advantageously, the matrix of photodetectors and the reflecting surface are located at least in part and preferably entirely, in line with one another in said perpendicular direction (z).
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This effectively increases the amount of diffracted light rays measured while maintaining a very small footprint.
Advantageously, the particle detector according to the present invention is configured so that at least part of the light radiation is reflected by at least part of the reflecting surface before crossing the channel to be diffracted by at least one particle. The use of a reflective surface located before crossing the particle channel, for example located opposite the exit of the optical device such as a waveguide, allows the present invention to take advantage of the backscattered rays in addition diffracted light rays, thereby increasing the number of measurements and therefore the wealth of information detected.
Advantageously, the substrate is formed of at least one material allowing at least 50% to pass, preferably at least 75% and preferably at least 90% of said light radiation, preferably the substrate comprises a material which is transparent relative to the light radiation.
Advantageously, the optical device has a distal portion through which the light radiation is emitted, the distal portion and the array of photodetectors are located on either side of the channel with respect to said perpendicular direction (z).
This increases the amount of diffracted light rays received by the photodetector array.
Advantageously, the matrix of photodetectors extends around, preferably all around, the channel.
- According to this embodiment, the matrix extends over 360 ° around the channel.
This maximizes the amount of diffracted light rays received by the photodetector array.
The positioning of photodetectors under the waveguide also makes it possible to have blind photodetectors making it possible to virtually determine the relative position of the other photodetectors and therefore to know virtually the geometry of the detector. Furthermore, this makes it easier to position the optical device by reducing positioning constraints.
More generally, the array of photodetectors extends around the channel, covering an arc of a circle of at least 180 ° and preferably 250 ° and preferably 300 °.
Advantageously, at least part of the reflecting surface is carried by at least part of the wall of the channel.
Advantageously, the substrate comprises at least a first substrate and a second substrate, the first substrate carrying the matrix of photodetectors and preferably at least part of the optical device and the second substrate carrying at least the reflecting surface, preferably the first substrate being configured to provide a function for detecting the diffracted light radiation and the second substrate being configured to provide at least in part a function for reflecting the diffracted light radiation towards the matrix of photodetectors.
Advantageously, the substrate comprises at least a first substrate and a second substrate, the first substrate carrying at least a first portion of the channel and the second substrate carrying at least a second portion of the channel, each portion extending in said perpendicular direction ( z), the average area of the section of the first portion is substantially equal to or less than the average area of the section of the second portion, the average area of the section of a portion corresponding to the average of the surfaces taken on the set of height along the z axis.
- According to one embodiment, the average thickness of the first portion is substantially equal to or less than the average thickness of the second portion, the thicknesses being measured in said perpendicular direction (z).
Advantageously, the substrate is a monolayer substrate.
- Alternatively, the substrate is a multilayer substrate.
Advantageously, the optical device is formed in said substrate.
Advantageously, the reflective surface covers the entire substrate.
Advantageously, the matrix of photodetectors and the reflecting surface are offset in the perpendicular direction (z).
This makes it possible to have a space, preferably comprising a material transparent to light radiation, in which certain diffracted light rays can propagate until they meet the matrix of photodetectors directly or after reflection on the reflecting surface.
Advantageously, the light radiation is a monochromatic radiation.
This allows to know precisely the wavelength of the light radiation received by the photodetectors in order to precisely design the present detector in order to increase its sensitivity through the choice of materials and their geometry.
Advantageously, the optical device comprises at least one waveguide, carried by the substrate, configured to guide the light radiation in the direction of the channel.
This provides a source of light radiation distant from the channel. The waveguide makes it possible to bring light radiation as close as possible to the channel and preferably while conforming to detection needs.
Advantageously, the optical device comprises at least one distal portion shaped to form, at the output of the optical device an extraction network configured to generate a set of extracted light rays, preferably parallel with each other, at the output of the optical device , the extraction network has a shape which widens in the main plane (x, y) towards the channel.
Advantageously, the extraction network comprises a plurality of elliptical grooves, each groove being a groove for extracting at least part of the light radiation.
- Advantageously, the extraction network comprises at least a plurality of elliptical grooves and the plurality of grooves form an alternation of trenches and projections.
This allows the extraction length and therefore the size of the extracted beam carrying the extracted light rays to be chosen during the design of the waveguide, as well as the divergence of the extracted beam. Indeed, the thickness of the etching determines the morphology of the extraction grooves and, thereby, the dimensions of the extracted beam.
When the etching is partial, the extracted beam is wide and not very divergent, therefore composed of extracted light rays having substantially the same vertical deviation corresponding to the angle a.
When the engraving is deep, the extracted beam is spatially narrow, therefore divergent, therefore composed of extracted light rays having vertical deviations varying around the value of the angle a. This elliptical appearance makes it possible to follow the profile of the wave front of the light radiation during its propagation in said distal portion.
Advantageously, the optical device comprises at least one waveguide comprising a heart having a distal portion and a sheath coating the heart, the heart having, at the distal portion, a plurality of grooves of thinner thickness than the rest of the distal portion arranged periodically at a step P such that P satisfies the following expression:
With: λ the wavelength of the light radiation;
n _eff the effective refractive index of the fundamental mode of light radiation;
n _c the refractive index of the core of the waveguide;
n _g the refractive index of the waveguide sheath;
n _eff being between n _c and n _g .
This makes it possible to obtain an extraction of the light radiation from the extraction network in a propagation direction making an angle a between the plane (x, y) in which the waveguide mainly extends and the main direction of extension of the channel (z) with preferably between 0 and 90 °.
- The light radiation propagating in the waveguide forms an angle a with the main plane (x, y), with 0 ° <a <90 °, preferably 10 ° <a <45 ° and preferably 20 ° < at <40 ° and preferably 20 ° <at <30 ° and preferably at about 25 °. These values allow effective detection of non-diffracted light rays while retaining low interference.
Advantageously, the optical device comprises at least one waveguide, the waveguide being single mode.
Advantageously, the optical device comprises at least one waveguide comprising a core and a sheath, the thickness h of the waveguide measured in said perpendicular direction (z) is such that:
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With: λ the wavelength of the light radiation;
n _c the refractive index of the core of the waveguide; n _g the refractive index of the waveguide sheath.
This makes it possible to have a single-mode guide and to precisely control the direction of extraction by the light radiation extraction network, that is to say the main direction of propagation of the extracted light rays.
Advantageously, the present invention comprises at least a first particle circulation channel and at least a second particle circulation channel.
Advantageously, the present invention comprises at least a first channel and a second particle circulation channel, each channel being intended to receive the fluid comprising particles and being configured to receive at least part of the light radiation emitted by the optical device.
Advantageously, the present invention is configured so that the light radiation received by each channel comes from a single optical device and preferably from a single light source.
Advantageously, the matrix of photodetectors and the reflecting surface are arranged on either side of said portion of the substrate so that at least part of the light radiation emitted by the optical device passes through each of the channels or at least one of the channels by being diffracted by at least one particle, then is reflected on the reflecting surface, then reaches the matrix of photodetectors.
This embodiment allows good detection even if one of the channels is out of use, for example if it is blocked, typically by dust or large particles such as insects. This embodiment thus improves the reliability of the detection.
Advantageously, the optical device comprises at least one waveguide comprising at least one junction configured to form at least a first arm of the waveguide and at least a second arm of the waveguide. According to one embodiment, the detector is configured so that:
o at least part of the light radiation emitted by the optical device through the first arm of the waveguide crosses the first channel while being diffracted by at least one particle, then is reflected on the reflecting surface, then reaches the matrix photodetectors;
o at least part of the light radiation emitted by the optical device through the second arm of the waveguide passes through the second channel while being diffracted by at least one particle, then is reflected on the reflecting surface, then reaches the matrix photodetectors.
The present invention finds as a preferred field of application the detection of particles of various sizes, preferably in the field of microscopic or even nanometric particles.
For example, the present invention can be used for the detection of particles from smoke, dust particles, polluting particles or even particles from allergens such as pollens, mold spores, or even carcinogenic particles, or biological particles such as bacteria, viruses, or even exosomes.
The present invention applies to all types of particles conveyed by a fluid, whether the latter is liquid and / or gaseous.
In the following description, the present invention will be detailed with reference to several embodiments which can be combined as required and each having a plurality of variants.
A first embodiment of the invention will now be described with reference to Figures 1a and 1b.
FIG. 1a represents a top view of a substrate 100 comprising a reflecting surface 41, a distal portion 10 of an optical device 15, a channel 50 for circulation of the particles 60 and a matrix 20 of photodetectors 21.
In this figure, a diagram of the diffraction diagram 70 of rays diffracted by particles is shown.
Figure 1b illustrates a view of the substrate 100 according to section A-A shown in Figure 1a.
As shown in these two figures, the reflective layer 41 is preferably arranged in line with the array 20 of photodetectors 21.
Advantageously, the particle circulation channel 50 is arranged between the distal portion 10 of the optical device 15 and at least part of the matrix 20 of photodetectors 21.
The relative arrangement of the reflective layer 41, of the array 20 of photodetectors 21 and of the distal portion 10 of the optical device 15 is configured so that, when particles 60 are present in the channel 50, the light rays extracted from the optical device 15 pass through the channel 50 while being at least partially diffracted by at least one particle 60 so as to produce diffracted light rays 12. The extracted light rays 11 and diffracted 12 are then at least partially reflected on the reflecting layer 41 so in producing reflected extracted light rays 13 and reflected diffracted light rays 14 reaching the matrix 20 of photodetectors 21.
Advantageously and without limitation, the substrate 100 comprises at least a first substrate 30 and at least a second substrate 40.
According to a preferred embodiment, the first substrate 30 and the second substrate 40 are joined, for example by molecular bonding, so as to form the substrate 100. In this case, the substrate 100 can thus be qualified as an assembly substrate or "third substrate" obtained by assembling the first 30 and second 40 substrates.
Preferably, the array 20 of photodetectors 21 is carried by the first substrate 30.
Advantageously, the first substrate 30 carries at least part of the optical device 15. The latter comprises at least one waveguide having a distal portion 10. The waveguide advantageously comprises a core and a sheath.
Preferably, the heart of the waveguide comprises at least one nitride-based material. The sheath of the waveguide preferably comprises at least one silica-based material, this material preferably forming the base material of the substrate 30. This waveguide is configured to bring light radiation as close as possible to the channel 50 emitted by the optical device 15.
This waveguide is advantageously located in the main plane (x, y) in which the substrate 100 extends, the reference x, y, z being represented in FIGS. 1a and 1b.
According to one embodiment, the particle circulation channel 50 has a main direction of circulation extending in the direction z perpendicular to the main plane (x, y).
This circulation channel 50 extends from an inlet orifice 51 to an outlet orifice 52.
According to a preferred embodiment, the channel 50 for circulation of the particles 60 is positioned between the distal portion 10 of the waveguide and the array 20 of photodetectors 21. In this position, the array 20 of photodetectors 21 receives most of the diffracted light rays 12 and 14.
According to another embodiment, the matrix 20 of photodetectors 21 can also be arranged around the distal portion 10 of the waveguide so as to also receive the backscattered rays, not shown in FIG. 1b, that is to say say diffracted in a direction substantially opposite to the main direction of extraction of the extracted light rays 11.
Indeed, the large particles 60, relative to the wavelength of the extracted light rays 11, can backscatter the extracted light rays 11, that is to say produce diffracted light rays in the opposite direction of the propagation of the incident rays.
According to another embodiment, the array 20 of photodetectors 21 can be positioned all around the channel 50 for circulation of the particles 60 as illustrated through FIGS. 2a and 2b and this so as to extend the detection zone of the diffracted light rays 12 and 14 and backscattered rays. This provides a larger detection area and measures the entire 70 diffraction pattern. FIG. 2b illustrates, according to section B-B of FIG. 2a, the diffracted light rays 12 propagating in multiple directions all around the main direction (z) of extension of the channel 50.
We will now describe in more detail the optical device 15 with particular reference to Figures 3a and 3b.
According to a preferred embodiment, the optical device 15 is able to be connected to at least one light source. For example, this light source can be a light-emitting diode or a laser diode.
According to a nonlimiting example, the present particle detector can be designed in order to use the light source of a portable device such as lighting, preferably monochromatic, of a mobile phone of the smartphone type for example, in order to have a portable particle detector module. This application allows for example to perform analyzes of air quality.
According to one embodiment, the optical device 15 comprises at least one light source of light radiation and a waveguide comprising a distal portion 10 configured to generate light rays 11 from the waveguide.
Preferably, the waveguide is configured to allow the propagation of light radiation from the optical device 15 to the level of the particle circulation channel 50.
Advantageously, the distal portion 10 comprises a lateral extension extending in the main plane (x, y) and widening in the direction of the channel 50.
Preferably, the maximum dimension of this lateral extension, taken along the axis y, is less than or substantially equal to the maximum dimension of the channel 50 taken along this same direction. Typically, the width D of the distal portion 10 is less than or equal to the diameter of the channel 50.
This advantageously makes it possible to maximize the number of particles 60 illuminated by the extracted light rays 11 while avoiding that extracted light rays 11 are emitted in directions not crossing the channel 50 for circulation of the particles 60.
According to a preferred embodiment, this distal portion 10 comprises an extraction network 10a of light rays. This extraction network 10a can have a series of crests and troughs at a certain periodicity P, as will be described in detail below.
The light radiation propagating in the waveguide is extracted from the extraction network 10a using a main extraction direction forming an angle a with the main plane (x, y). This angle a is illustrated in Figure lb.
This main direction of extraction is advantageously located between a normal direction and a grazing direction relative to the main plane (x, y). In the latter case, a = 0, according to this configuration, a large part, or even all, of the particles 60 circulating in the channel 50 is illuminated by the extracted light rays 11.
According to another configuration, the angle a can be greater than or equal to 45 °, preferably 75 ° and advantageously 85 °. In a particularly advantageous manner, it is possible to provide that the extraction angle a, is such that the extracted light rays 11 exit through the outlet orifice 52 of the channel 50. In this case, the array 20 of photodiodes 21 does not detects that the light rays diffracted 12 and 14 by the particles 60, it does not detect the non-diffracted light rays emitted by the optical device 15.
In the case where the value of the angle a allows the detection of the non-diffracted light rays emitted by the optical device 15, this then makes it possible to follow the drift of the power of the light source over time, corresponding to the aging of this source luminous, or the fouling of the canal over time. The analysis of this drift can then make it possible not to make an error on the relationship between the amount of diffracted light and the amount of light emitted by the light source. This ratio is indeed a quantity often useful for going back to certain parameters of the particles such as their nature or their concentration.
However, in this same case, the non-diffracted light rays emitted by the optical device 15 can act as a stray light source relative to the detection by the matrix 20 of photodiodes 21 of the diffracted light rays 12 and 14.
During the development of the present invention, it has been surprisingly demonstrated that when the angle a has a value close to 25 °, the detection of non-diffracted light rays is effective while retaining low interference.
Advantageously, the extracted light rays 11 are diffracted by the particles 60. At least part of the diffracted light rays 12 is reflected on the reflecting layer 41, preferably metallic, being located at least partly opposite the matrix 20 of photodetectors 21 , the diffraction diagram 70 is thus substantially projected in its entirety on the matrix 20 of photodetectors 21.
Indeed, on the one hand the matrix 20 receives part of the diffraction diagram 70 directly from the particles and on the other hand it receives a complementary part of the diffraction diagram 70 after reflection of the diffracted light rays 12 on the reflecting layer 41.
In addition, the present invention can be adapted according to the type of particles to be detected, whether from a material, geometry or even point of view point of view of the light radiation itself. Thus, the present invention makes it possible to adapt the light radiation to various fields of applications.
According to one embodiment, the radiation comprises a wavelength adapted to the detection needs, for example less than the main dimension of the particles to be measured.
According to a preferred embodiment, the first substrate 30 has a main detection function and the second substrate 40 has a main transparency and mirror function.
Preferably, the first substrate 30 comprises silicon and the second substrate 40 comprises, according to one embodiment, at least one material which is transparent relative to the light radiation so as to allow the light radiation, to the extracted light rays 11 and 13 and to the rays diffracted light 12 and 14 to cross it.
The second substrate 40 can comprise silicon oxide, that is to say being for example being made of glass.
In a particularly advantageous manner, the reflective layer 41 is placed on the upper surface of the second substrate 40 opposite the lower surface of the second substrate 40 which is opposite or in contact with the first substrate 30.
In the case of this first embodiment, the reflected diffracted light rays 14 pass through the second substrate 40 before reaching the photodetectors 21.
Cleverly, the refractive index of the second substrate 40, made of glass for example, is configured to be close to that of air. In this situation, there are very few reflections at the interfaces between the interior of the channel 50 and the second substrate 40, that is to say at the walls of the channel 50.
According to one embodiment, an anti-reflective layer can be deposited on the walls of the channel after completion of the latter in order to reduce or even avoid reflections at the interfaces between the interior of the channel 50 and the second substrate 40.
The use of a reflective layer 41 called a mirror on the upper face of the second substrate 40 makes it possible to project the image of the diffraction diagram 70 on the matrix 20 of photodetectors 21 located at the surface of the first substrate 30.
The present invention thus makes it possible to obtain a greater amount of information concerning the diffraction diagram 70, or even the complete diffraction diagram 70 of the particles 60, via the use and clever positioning of a reflective layer 41 and of a matrix 20 of photodetectors 21.
FIGS. 3a and 3b illustrate a possible geometry of the distal portion 10 of the waveguide comprising the extraction network 10a.
The waveguide has a second end opposite the first end. This second end has a dimension w, taken along the axis y. Preferably, w is less than D.
The distal portion 10 of the waveguide has an extension length L taken in the direction x and corresponding substantially to the length of the extraction network 10a.
So that the beam formed by the extracted light rays 11 reaches a dimension substantially equal to D over a very short propagation distance, it is appropriate that for a given dimension D, L be all the smaller as w is small. Mathematically, the relationship between L, D and w can be expressed approximately as follows:
λ
This then allows the distal portion 10 of the waveguide to present a very large divergence in the main plane (x, y). The enlargement coefficient of the distal portion 10 is therefore important. This configuration thus allows that over a very short distance, the extracted light rays 11 together have a spatial extension substantially equal to D and preferably substantially equal to the diameter of the channel 50. This configuration thus increases the compactness of the present invention. Those skilled in the art, with known electromagnetic tools, will be able to size L, w and the extraction network 10a, as a function of D, in order to obtain this compactness effect.
According to one embodiment, in order to be able to control the main direction of extraction of the light rays extracted 11 by the extraction network 10a, the waveguide is preferably designed so that it is single mode relative to the light radiation . The thickness h of the waveguide, taken in the direction z, is therefore relatively small in comparison with the wavelength λ of the light radiation.
In the case where the section of the waveguide is substantially square, then the thickness h of the waveguide is such that:
, 2Λ
Λ <-.
/ 2 2 ^π ^ Ι ^η _ε -n _g with:
- n _c : refractive index of the heart
- n _g : refraction index of the sheath.
In the case of a nitride core and a silica cladding, the respective refractive indices are n _c = 2 and n _g = 1.5 for a light radiation located in the range of visible wavelengths, which gives for the thickness h, the following expression:
It can be noted that the effective refractive index n _eff of the fundamental mode of the light radiation can be calculated on the basis of electromagnetism calculations and is between the refractive index of the core n _c and that of the cladding n _g .
Figure 3b is a view of detail B of Figure 1b. The extraction network 10a includes a series of hollows and crests whose periodicity is noted P.
This extraction network 10a is produced by etching, partial or total, of the distal portion 10 of the waveguide.
During the development of the present invention, it has been observed that the type of etching used directly influences the length of extraction and therefore influences the size of the beam carrying the extracted light rays 11 and the divergence of the extracted light rays 11.
For example, partial etching should be used if one wishes to reduce the divergence of the extracted light rays 11.
The choice of the periodicity P directly impacts the main direction of extraction of the extracted light rays 11, that is to say the angle defined above. As indicated previously, this main direction of extraction can be between a normal direction (a = 90 °) and a so-called grazing direction (a = 0 °) and can be expressed as follows:
The choice of P directly determines the angle of extraction of the extracted light rays 11.
^H eff ~ ^H g ^COSOt
As illustrated in FIG. 3b, a lower reflective layer 31 can be placed below at least the distal portion 10 of the waveguide. This lower reflecting layer 31, preferably made of metal, for example aluminum or copper, is disposed at an optical distance from the waveguide being advantageously equal to at least a quarter of the wavelength of the light radiation. This optical distance advantageously corresponds to a distance, called "physical", greater than λ / (4η), where n is the refractive index of the material located between the waveguide and the lower reflecting layer 31. This minimum distance ensures that the reflective layer does not disturb the ray too much in the guide and that it serves to return the extracted light upwards. This condition on this thickness makes it possible to increase the flux of radiation in the direction of channel 50.
Remarkably, the present invention has demonstrated that when the wavelength of the light radiation used is less than 600 nm, aluminum has better reflectivity than copper for example.
When the wavelength of the light radiation used is greater than 600nm, copper has better reflectivity than aluminum.
We will now describe, through FIGS. 4 to 6, an example of a method for producing at least one particle detector according to the first embodiment presented above.
This process simplifies the following steps:
- The realization of the waveguide on the first substrate 30 comprising beforehand the matrix 20 of photodetectors 21;
- The deposition of a reflective layer 41 on the second substrate 40 preferably made of glass;
the second substrate 40 is then bonded to the first substrate 30 so that the array 20 of photodetectors 21 and the reflecting surface 41 are arranged at a distance from each other and on either side of a portion of the substrate 40;
- Then, the particle circulation channel 50 is formed through the first and second substrates 30 and 40. This formation of the channel 50 can for example be carried out by etching, dry or wet.
These steps are detailed below.
FIGS. 4a to 4h show an embodiment of the first substrate 30 according to the present invention.
In FIG. 4a, the first substrate 30 comprises a matrix 20 of photodetectors 21. Preferably the first substrate 30 is made of silicon.
According to a preferred embodiment, the array 20 of photodetectors 21 comprises an anti-reflection layer, not shown, disposed at the surface of the photodetectors 21 configured to limit the reflection of the rays arriving on the array of photodetectors 21.
FIG. 4b illustrates the optional deposition of a lower reflecting layer 31, capable of reflecting the light radiation emitted by the optical device. Preferably this lower reflecting layer 31 comprises at least one metal such as for example aluminum or copper.
FIG. 4c represents the etching of a portion of the lower reflecting layer 31 so as to uncover at least part of the matrix 20 of photodetectors 21. This etching can be wet or else dry. It can be preceded by conventional lithography steps to select the area to be engraved.
Once the lower reflecting layer 31 has been structured, a first layer of oxide 32, of silicon for example, is deposited on the surface of the first substrate 30 so as not to cover, after planarization by CMP (Chemical-Mechanical Planarization) for example, that the part of the surface of the first substrate 30 not being covered by the lower reflecting layer 31, as illustrated in FIG. 4d.
According to one embodiment, these previous steps can be replaced by a damascene based on copper and silica for example.
FIG. 4e shows the deposition of a buffer layer 33, of silica for example, over the entire surface of the first substrate 30 so as to form a buffer layer 33 whose optical thickness is at least a quarter of the wavelength of the light radiation. This optical thickness advantageously corresponds to a thickness, called "physical" thickness, at least equal to λ / (4η), where n is the refractive index of the buffer layer 33.
This buffer layer 33 performs the previously described function of forcing the extracted light rays 11 to propagate in a direction away from the surface of the first substrate 30.
Then, a guide layer 34 is deposited on the whole of the buffer layer 33 so as to form, after etching, the waveguide comprising the distal portion 10.
Advantageously, this guide layer 34 comprises a nitride-based material.
FIGS. 4f and 4e represent the stages of structuring of the guide layer 34 by partial or total etching, so as to form the extraction network 10a at the level of the distal portion 10 of the waveguide.
FIG. 4h then illustrates the deposition of a second layer of oxide 35, for example silica, covering the entire surface of the first substrate 30.
A planarization step by mechanical-chemical polishing can for example be carried out in order to smooth the surface of the first substrate 30 thus formed by the preceding steps.
Before or after, or even simultaneously with the preparation of the first substrate 30, the second substrate 40 is prepared.
For this and as illustrated in FIGS. 5a to 5d, the second substrate 40, preferably transparent to the light radiation considered, is covered on one of these main surfaces, called the upper surface, by a reflective layer 41, preferably based on metal, like aluminum or copper for example.
Optionally, once this deposit has been made, a portion of the reflective layer 41 is removed by lithography and etching so as to expose a part of the upper surface of the second substrate 40. This etching is configured to form an opening 42 for the future construction of the particle circulation channel 50.
Then, as illustrated in FIGS. 6a to 6d, the substrate 100 is formed by the assembly of the first 30 and second 40 substrates. This assembly may include bonding the first 30 and second 40 substrates so that the surface comprising the array 20 of photodetectors 21 and the waveguide of the first substrate 30 is brought into contact with the lower surface of the second second substrate 40 opposite at the upper surface comprising the reflective layer 41. In this configuration, the upper reflective layer 41 is, in the direction z, facing the matrix 20 of photodetectors 21 and the waveguide through the second substrate 40.
Once this assembly has been carried out, a step of forming the channel 50 for circulation of the particles 60 is carried out through the substrate 100, that is to say through the first 30 and second substrates 40 and passing substantially between the matrix 20 of photodetectors 21 and the extraction network.
This formation of the channel 50 can be achieved by a few conventional lithography steps, and one or more engravings.
According to one embodiment, this etching can be an etching based on a chemistry comprising potassium hydroxide (KOH) or tetramethylammonium hydroxide (TMAH) and based on a chemistry comprising acid hydrofluoric (HF) to etch the second substrate 40 if it is made of glass for example.
For example, the first substrate 30 can be etched using chemistry based on KOH or TMAH if it is made of silicon for example and having previously deposited a resin 36 in which an opening 37 is made, the opening 37 then being at the location of the future inlet orifice 51 of the channel 50. This etching of the first substrate 30 thus allows the formation of a first portion 50a of the channel 50.
The second substrate 40 can be etched on it using HF-based chemistry, for example through the opening 42 previously made. This etching of the second substrate 40 thus allows the formation of a second portion 50b of the channel 50.
Advantageously, etching based on KOH or TMAH causes only a very low residual roughness since it is carried out according to the crystalline planes of the silicon.
HF etching generally generates a very low roughness, only on the order of ten nanometers.
However, a subsequent step of depositing a layer of silica on the etched surface of the second substrate 40 is possible in order to smooth the surface of the particle circulation channel 50.
A very low roughness at the surface of the channel 50 makes it possible to minimize, or even avoid, the presence of light rays diffracted by the walls of the channel 50, when the light rays pass from or to the channel 50.
In fact, in order to satisfy the rigorous conditions for detecting particles 60 by measuring a diffraction diagram 70, the roughness of the walls inside the channel 50 for circulation of particles 60 should be limited as much as possible.
This roughness, if it is too large, can induce a parasitic diffraction, called background diffraction, measured by the photodetectors 21 even in the absence of particles 60 in the channel 50. Processing of the measured signals can make it possible to reduce this nuisance, nevertheless the precise choice of the etchings described here ensures a very low roughness reducing the problems of parasitic diffraction by the channel 50 itself. The detection accuracy is thus improved.
Once the etching or engravings completed, the channel 50 for circulation of the particles 60 then passes through the substrate 100 right through, allowing a flow of particles 60 conveyed by a fluid to flow through.
According to an alternative embodiment, the first and second portions 50a and 50b used to form the channel 50 can be formed before the step of assembling the substrate 100.
According to another embodiment, a dry etching can be used, for example based on ions, for the partial or total formation of the channel 50.
One of the many advantages of this first embodiment using a second transparent substrate 40 is protection of the photodetectors 21.
Indeed, if the photodetectors are generally in direct contact with the particles, this can lead to the formation of a deposit on their surface which reduces their sensitivity or even blinds them.
According to this embodiment of the present invention, the photodetectors 21 are protected by the presence of the second transparent substrate 40 directly located in contact with them.
Thus, the photodetectors 21 are protected while receiving a greater quantity of light information via the reflection phenomenon allowing a better measurement of the diffraction diagram 70 of the particles 60 and therefore of their size and their nature for example.
Indeed, based on the documents “The Mie Theory: Basics and Applications”; Wolfram Hergert, Thomas Wriedt; Springer, June 30, 2012 - 259 pages, and “Light scattering and surface plasmons on small spherical particles”, Xiaofeng Fan, Weitao Zheng and David J Singh, Light: Science & Applications (2014) 3 or even JR Hodkinson and I. Greenleaves, Computations of Light-Scattering and Extinction by Spheres According to Diffraction and Geometrical Optics, and Some Comparisons with the Mie Theory, Journal of the Optical Society of America 53, 577 (1963), it is known to the skilled person the determination of the size of a particle on the basis of its diffraction diagram, a diagram which the present invention makes it possible to measure with very high precision.
As stated at the beginning of the description, the present invention comprises a second embodiment, fully compatible with the first described above.
The advantages of the first embodiment are therefore applicable to the embodiment below.
This second embodiment, illustrated in FIGS. 7a and 7b, is based on the use of a first substrate 30 identical to that of the first preceding embodiment and of a second substrate 40 which can be substantially opaque to light radiation.
According to the present embodiment, the transparent nature of the second substrate 40 relative to the light radiation is not necessary.
FIGS. 7a and 7b illustrate the substrate 100 resulting from the assembly of the first substrate 30 with the second substrate 40.
According to this second embodiment, the channel 50 passes through the first and second substrates 30 and 40. Preferably, the second substrate 40 is configured so that the second portion 50b of the channel 50, that passing through the second substrate 40, has a diameter greater than the diameter of the first portion 50a of the channel 50, that passing through the first substrate 30.
In addition, the second portion 50b of the channel 50 comprises a diameter which decreases as the channel 50 moves, along the axis z, towards the outlet orifice 52. This narrowing in diameter makes it possible to form walls 41a which are relatively inclined. in the main plane (x, y).
These walls 41a are advantageously covered with a reflective layer 41, preferably similar to that of the first embodiment.
Due to this particular inclination of these reflecting surfaces, a diffracted light ray 12 meeting said walls 41a is directly reflected in the direction of the matrix 20 of photodetectors 21 located opposite said walls 41a. The angle β of inclination of the walls 41a is shown in Figures 8b and 8c.
FIGS. 7a and 7b thus illustrate the optical path of extracted light rays 11 and diffracted 12 from the extraction network 10a towards the matrix 20 of photodetectors 21. The extracted light rays 11 coming from the extraction network 10a and the diffracted light rays 12, are reflected on the walls 41a of the second portion 50b of the channel 50, allowing their measurement by the photodetectors 21.
The walls 41a being inclined, it is possible to ensure that the reflected extracted light rays 13 and the reflected diffracted light rays 14 are presented with an angle of incidence almost normal to the surface of the array 20 of photodetectors 21.
This geometry has the advantage of not deforming the front of diffracted light by projection onto the matrix 20 of photodetectors 21, that is to say the diffraction diagram 70 of the particles 60. In this situation, the digital processing of the diffraction diagram 70 measured is simplified, because the geometric corrections to be made are weak, even non-existent.
It should be noted that taking into account the method for forming the second portion 50b of the channel 50, the wall 41a of this second portion 50b of the channel 50, passing through the second substrate 40, has a cylindrical or parallelepiped shape.
In the case of dry etching, the wall 41a can have a vertically extruded shape.
In the case of wet etching, the wall 41a can have a pyramid shape.
Preferably, the wall 41a will have a pyramid shape making it possible to present inclinations around the axis z in order to allow the reflection of the incident light rays while retaining a flat surface at the level of the wall 41a so as not to deform the front of light. Thus, wet etching is an advantageous embodiment.
Advantageously, only part or all of the surface of this wall 41a can be used for the reflection of the extracted light rays 11 and diffracted 12.
According to one embodiment, the array 20 of photodetectors 21 can be positioned all around the channel 50 for circulation of the particles 60 as illustrated through FIGS. 8a and 8b and this so as to extend the detection zone to diffracted light rays 12 and 14 and backscattered rays. In an identical manner to the embodiment illustrated through FIGS. 2a and 2b, this makes it possible to have a larger detection surface and to measure the diffraction diagram 70 as a whole. FIG. 8b illustrates according to section B-B of FIG. 8a, the diffracted light rays 12 propagating in multiple directions all around the main direction (z) of extension of the channel 50.
In a particularly advantageous manner, the angle that the walls 41a of the channel 50 form with the surface of the second substrate 40 parallel to the main plane (x, y) can be perfectly controlled during manufacture. Indeed, in the case of wet etching of a crystalline material for example, the etching planes are predictable and therefore this angle can be easily known and controlled.
Thus, for example in the case of a second silicon substrate 40, wet etching based on KOH results in the formation of walls 41a whose angle β relative to the main plane (x, y) is substantially equal to 54.7 °. β is illustrated in Figures 8b and 8c.
In addition, the angle of incidence of the extracted light rays 11 on the reflecting layer 41 deposited on the walls 41a is also perfectly known and controlled since it depends on the configuration of the extraction network 10a.
Therefore, the angle of incidence on the array 20 of photodetectors 21 is also perfectly known by simple geometric construction. Thus, by the inclination of the walls 41a of the second portion 50b of the channel 50, the angle of incidence of the reflected extracted rays 13 and of the reflected diffracted light rays 14 can be close to normal (z) relative to the main plane. (x, y), that is to say relative to the plane of the array 20 of photodetectors 21.
With reference to FIGS. 4e to 4h and 9a to 9f, we will now describe the method for producing at least one particle detector 60 according to this second embodiment illustrated in FIGS. 7a to 8c.
The steps described in FIGS. 4a to 4h above are identical for this second embodiment and allow the formation and the structuring of the first substrate 30.
As illustrated in FIGS. 9a and 9b, once the first substrate 30 has been formed and properly structured, an orifice is made so as to form the first portion 50a of the channel 50, that is to say that passing through the first substrate 30.
This formation may include an etching of the first substrate 30. This etching is preferably carried out between the distal portion 10 of the waveguide and the matrix 20 of photodetectors 21.
FIGS. 9c to 9e represent the formation and the structuring of the second substrate 40 through the formation of a second portion 50b of the channel 50 for circulation of the particles 60 through the second substrate 40. This second portion 50b is advantageously produced by etching , and preferably by wet etching. Indeed wet etching allows to have inclined surfaces whose advantages are indicated above.
Once this second portion 50b has been formed, a reflective layer 41, of metallic type, based on aluminum or copper for example, is deposited mainly on the walls 41a of the second portion 50b of the channel 50.
As illustrated in FIG. 9f, once this second portion 50b of the channel 50 has been made and its walls 41a covered with a reflective layer 41, the substrate 100 is formed by assembling the second substrate 40 with the first substrate 30 so as to form a channel 50 for circulation of the particles 60 defined by the meeting of the first and second portions 50a and 50b of the channel 50. As before, this assembly can be achieved by molecular bonding.
This second embodiment, in addition to having many advantages in common with the first embodiment, makes it possible to minimize the roughness of the channel 50 by the astute use of a wet etching carried out on a crystalline material.
For example, the almost total absence of roughness of the channel 50 is indeed possible by wet etching of the silicon by KOH-based chemistry, this etching being without roughness since it is carried out along the crystalline planes of the silicon.
In addition, this second embodiment makes it possible to obtain a direction of propagation of the reflected extracted rays 13 and of the diffracted light rays 14 almost normal, that is to say substantially along the axis (z), at the surface. photodetectors 21, that is to say the main plane (x, y).
This situation has the advantage of giving a direct image of the diffraction diagram 70 of the particles 60, without deformation due to projections which must otherwise be corrected by computer and / or electronically by processing the signals measured by the matrix 20 of photodetectors 21.
In addition, in the case of backscattered rays, that is to say in the case where the particles 60 have a large size relative to the wavelength of the light radiation used, extracted light rays 11 can be backscattered. In this case also, it is possible to adapt the present invention so that the extraction angle a is such that the extracted light rays 11 have a main direction of extraction substantially parallel to the direction z and are directed towards the outlet orifice 52 of channel 50, that is to say with an angle α substantially equal to 90 °. In this case, the matrix 20 of photodetectors 21 detects only the light rays diffracted 12 and 14 and backscattered by the particles 60.
We will now describe through Figures 10 and 11 two embodiments having, in addition to the advantages mentioned above, the advantage of allowing the present invention to operate even if the channel 50 for circulation of the particles 60 would be entirely or partially blocked.
Indeed, it is conceivable that the channel 50 may be blocked over time by very large particles, for example dust, or insects. It is also possible that the production process generates defects in the channel, leading to its total or partial obstruction.
The two nonlimiting embodiments which we will present now make it possible to respond to this problem.
In addition, the two embodiments illustrated in FIGS. 10 and 11 are advantageously combined with the preceding embodiments.
FIGS. 10 and 11 illustrate a substrate 100 comprising a first 50c and a second 50d particle circulation channel 60.
According to these two embodiments, in the case where a channel among the first 50c and the second 50d is blocked, the non-blocked channel allows the present invention to continue to operate.
In Figures 10 and 11, a single light source 1 in the form of a light emitting diode for example has been shown. This light source 1 is configured to emit light radiation. The optical device 15 is advantageously configured to include this light source 1 or to be able to connect to it. The optical device 15 and the light source 1 cooperate so that this light radiation is guided in the waveguide 2.
Preferably, the waveguide 2 can have one or more junctions 3 so as to form a plurality of arms 4b and 4c.
FIGS. 10 and 11 illustrate the case of a single junction 3 allowing the formation of a first arm 4b of the waveguide 2 and of a second arm 4c of the waveguide 2.
In the case of FIGS. 10 and 11, a distal portion 10b of the first arm 4b and a distal portion 10c of the second arm 4c of the waveguide 2 are shown. Preferably, each of these distal portions 10b, 10c forms or carries an extraction network as for the embodiments described above.
Similarly to the previous embodiments, the first channel 50c, the array 20 of photodetectors 21 and the distal portion 10b of the first waveguide arm 4b 2 are arranged so that at least part of the light radiation emitted at the distal portion 10b of the first waveguide arm 4b 2 passes through the first channel 50c while being diffracted by at least one particle 60, then is reflected on the reflecting surface 41, then then reaches the matrix 20 of photodetectors 21.
Likewise, the second channel 50d, the matrix 20 of photodetectors 21 and the distal portion 10c of the second waveguide arm 4c 2 are arranged so that at least part of the light radiation emitted at the portion distal 10c of the second waveguide arm 4c 2 crosses the second channel 50d while being diffracted by at least one particle 60, then is reflected on the reflecting surface 41, then then reaches the matrix 20 of photodetectors 21.
Advantageously, a single matrix 20 of photodetectors 21 receives the light radiation having passed through all of the channels 50c, 50d. Preferably this matrix 20 is continuous. In FIG. 11, the matrix 20 extends all around the channels 50c, 50d.
All of the characteristics described for the previous embodiments illustrated in FIGS. 1 to 9 are applicable to the embodiments of FIGS. 10 and 11 and to their variants.
Figures 12 and 13 describe two embodiments of the waveguide 2 of the optical device 15 and particularly two embodiments of the junction 3 so as to form the first arm 4b and the second arm 4c.
FIG. 12 represents the formation of the first arm 4b and of the second arm 4c by a simple separating junction 3 at the level of the waveguide 2.
FIG. 13 presents an advantageous embodiment in which the junction 3 is produced by an interferometer 4a, preferably multimode, thus making it possible to provide this optical device 15 with better robustness to technological inaccuracies.
By way of nonlimiting example, the following numerical values and dimensions can be adapted to the various elements of the present invention:
- The distance, in the direction perpendicular (z) to the main plane (x, y) in which the substrate 100 extends, between the array 20 of photodetectors 21 and the reflecting surface 41 is between 10 pm and 10 mm, preferably between 100mm 1mm and preferably between 500pm and 1mm.
This makes it possible to maximize the flux of diffracted light rays towards the reflecting surface as well as towards the array of photodetectors.
- The length of the particle circulation channel 50 is between 100pm and 10mm, preferably between 100pm and 5mm and advantageously between 500pm and 2mm.
- The diameter of the first portion 50a of the channel 50 for circulation of the particles 60 in the direction y is between 10pm and 10mm, preferably between 100pm and 5mm and advantageously between 500pm and 2mm.
- The channel 50 extends in a main direction (z) of circulation of said particles 60 and the light radiation, at the outlet of the optical device 15, has a main direction of propagation forming with the main direction of circulation of particles 60 an angle a between 0 and 90 °, preferably between 10 ° and 75 ° and advantageously between 10 ° and 45 °.
This makes it possible to optimize the volume of interaction between the particles and the light radiation so as to optimize the number of diffracted light rays, thereby improving particle detection.
In addition, the waveguide may or may not be at the same vertical level as the photodetector array.
In order to simplify the manufacturing process of the present invention, the waveguide is located at a raised level relative to the photodetector array.
- Preferably, the light radiation comprises a wavelength between 400nm and 2pm, preferably between 500nm and 1.6pm and advantageously between 600nm and 1pm.
This makes it possible to have light radiation in the visible domain, simplifying, among other things, its implementation and maintenance.
In addition, the diffraction of the extracted light rays is all the greater the shorter the wavelength of the light radiation at a given particle size.
- The diameter w of the waveguide is between 100nm and 1pm, preferably between 200nm and 800nm and advantageously between 300nm and 600nm.
- The thickness h of the waveguide is between 100nm and 1pm, preferably between 200nm and 800nm and advantageously between 300nm and 600nm.
- The extension length L of the distal portion 10 of the waveguide is between 10pm and 10mm, preferably between 100pm and 5mm and advantageously between 1mm and 3mm.
- The dimension D of the distal portion 10 of the waveguide is between 10pm and 10mm, preferably between 100pm and 5mm and advantageously between 1mm and 3mm.
- The lower reflective layer 31 has a thickness of between 10 nm and 10 μm, preferably between 50 nm and 1 μm and advantageously between 100 nm and 300 nm.
- The first oxide layer 32 has a thickness between 10nm and 10pm, preferably between 50nm and 1pm and advantageously between 100nm and 300nm.
- The buffer layer 33 has a thickness can be between 10 nm and 10 pm, preferably between 50 nm and 5 pm and advantageously between 100 nm and 1 pm.
- The guide layer 34 has a thickness of between 100 nm and 1 μm, preferably between 200 nm and 800 nm and advantageously between 300 nm and 600 nm.
- The second oxide layer 35 has a thickness of between 0.1 nm and 10 μm, preferably between 1 nm and 1 μm and advantageously between 10 nm and 500 nm.
- The reflective layer 41 has a thickness between 10nm and 10pm, preferably between 50nm and 1pm and advantageously between 100nm and 300nm.
- The walls 41a of the second portion 50b of the channel 50 have an angle with the perpendicular direction (z) of between 5 ° and 75 °, preferably between 10 ° and 65 ° and advantageously between 15 ° and 55 °.
- The first substrate comprises at least one material chosen from: silicon, III-V materials, for example GaN, InP making it possible to integrate the light source with the substrate itself.
- The second substrate comprises at least one material chosen from: glass, silicon.
The optical device 15 comprises a core and a sheath, the core comprising at least one material selected from: silicon nitride (SiN), titanium dioxide (TiO2) and the sheath comprising at least one material selected from: silica, MgF2, AI2O3.
- The reflective surface 41 comprises at least one material selected from: aluminum, copper, silver, gold.
The implementation of the present invention may include the use of various mathematical and computer tools in order to extract from the measurements of the photodetectors, intrinsic parameters of the particles such as their size for example.
Those skilled in the art can find such tools in the following references:
“The Mie Theory: Basics and Applications”; Wolfram Hergert, Thomas Wriedt; Springer, June 30, 2012 - 259 pages, and “Light scattering and surface plasmons on small spherical particles”, Xiaofeng Fan, Weitao Zheng and David J Singh, Light: Science & Applications (2014) 3.
The invention is not limited to the embodiments described but extends to any embodiment in accordance with its spirit.
In particular, it should be noted that the present invention can also be applied to liquid fluids carrying particles. Thus, in the present description, a "Fluid" is understood as a body whose constituents, particles for example, have little adhesion and can slide freely one on the other, in the case of liquids, or move independently from each other, in the case of a gas. According to this definition, air is a fluid, as is water. A fluid can transport particles, like micrometric and nanometric particles transported by air for example.
The array of photodetectors can advantageously be periodic or aperiodic and have a polygonal or circular shape.
The present invention can also be applied in the case of one or more particle circulation channels possibly open in a longitudinal direction. Thus, the outline of the channel (s) is not closed.
Furthermore, the section of the channel in the plane (x, y) is not necessarily circular. Advantageously, it can be polygonal, for example rectangular or square.
REFERENCES
1. Light source
2. Waveguide
3. Junction
4a. Interferometer
4b. First arm of the waveguide
4c. Second arm of the waveguide
10. Distal portion of the waveguide
10a. Extraction network
10b. Distal portion of the first waveguide arm
10c. Distal portion of the second waveguide arm
11. Extracted light rays
12. Diffracted light rays
13. Extracted light rays reflected
14. Reflected diffracted light rays
15. Optical device
20. Array of photodetectors
21. Photodetector (s)
30. First substrate
31. Lower reflective layer
32. First layer of silicon oxide
33. Buffer layer
34. Guide layer
35. Second layer of silicon oxide
36. Resin layer
37. Opening of formation of the first portion of the canal
40. Second substrate
41. Reflective layer
41a. Wall covered with a reflective layer
42. Training opening of the second portion
50. Particle circulation channel
50a. First portion of the canal
50b. Second portion of the canal
50c. First circulation channel
50d. Second circulation channel
51. Canal inlet
52. Channel outlet
60. Particle (s)
70. Diffraction diagram
70a. First diffraction diagram
70b. Second diffraction diagram
100. Substrate

权利要求:
Claims (18)
[1" id="c-fr-0001]
1. Particle detector (60) comprising at least:
o An optical device (15) able to be connected to at least one light source (1) and configured to emit at least one light radiation generated by said light source (1);
a substrate (100) extending in along a main plane (x, y) and defining at least part of at least one channel (50, 50c, 50d) intended to receive a fluid comprising particles (60), said at least one channel (50, 50c, 50d) extending mainly in a direction perpendicular (z) to the main plane (x, y), at least a portion of the substrate (100) being configured to receive at least part of the light radiation emitted by the optical device (15);
characterized in that the detector further comprises an array (20) of photodetectors (21) and at least one reflecting surface (41);
the matrix (20) of photodetectors (21) and the reflecting surface (41) being arranged on either side of said portion of the substrate (100) so that at least part of the light radiation emitted by the optical device (15 ) crosses said at least one channel (50, 50c, 50d) while being diffracted by at least one particle (60), then is reflected on the reflecting surface (41), then reaches the matrix (20) of photodetectors (21 ).
[2" id="c-fr-0002]
2. Detector according to the preceding claim in which the substrate (100) has a first face turned opposite to or disposed in contact with the reflecting surface (41) and in which the substrate (100) has a second face, opposite to the first face and turned opposite to or arranged in contact with the array (20) of photodetectors (21).
[3" id="c-fr-0003]
3. Detector according to any one of the preceding claims, in which the matrix (20) of photodetectors (21) and the reflecting surface (41) are located at least partly and in line with one another in said perpendicular direction. (z).
[4" id="c-fr-0004]
4. Detector according to any one of the preceding claims configured so that at least part of the light radiation is reflected by at least part of the reflecting surface (41) before passing through said at least one channel (50, 50c, 50d) to be diffracted by at least one particle (60).
[5" id="c-fr-0005]
5. Detector according to any one of the preceding claims, in which the substrate (100) is formed of at least one material allowing at least 50%, preferably at least 75% and preferably at least 90% of said light radiation to pass through, preferably the substrate comprises a transparent material relative to the light radiation.
[6" id="c-fr-0006]
6. Detector according to any one of the preceding claims, in which the optical device (15) has a distal portion (10, 10b, 10c) by which the light radiation is emitted and in which the distal portion (10, 10b, 10c) and the array (20) of photodetectors (21) are located on either side of said at least one channel (50, 50c, 50d) relative to said perpendicular direction (z).
[7" id="c-fr-0007]
7. Detector according to any one of the preceding claims, in which the array (20) of photodetectors (21) extends around said at least one channel (50, 50c, 50d).
[8" id="c-fr-0008]
8. Detector according to any one of the preceding claims, in which at least part of the reflecting surface (41) is carried by at least part of the wall of said at least one channel (50, 50c, 50d).
[9" id="c-fr-0009]
9. Detector according to claim 1, in which the substrate (100) comprises at least a first substrate (30) and a second substrate (40), the first substrate (30) carrying the matrix (20) of photodetectors ( 21) and preferably at least part of the optical device (15) and the second substrate (40) carrying at least the reflecting surface (41).
[10" id="c-fr-0010]
10. Detector according to any one of the preceding claims, in which the substrate (100) comprises at least a first substrate (30) and a second substrate (40), the first substrate (30) carrying at least a first portion (50a) said at least one channel (50, 50c, 50d) and the second substrate (40) carrying at least a second portion (50b) of said at least one channel (50, 50c, 50d), each portion (50a and 50b) s' extending in said perpendicular direction (z) and in which the average surface of the section of the first portion (50a) is substantially equal to or less than the average surface of the section of the second portion (50b), the average surface of the section of a portion corresponding to the average of the surfaces of a portion taken over the entire height along the z axis.
[11" id="c-fr-0011]
11. Detector according to any one of the preceding claims, in which the optical device (15) comprises at least one distal portion (10, 10b, 10c) shaped to form, at the outlet of the optical device (15), an extraction network. (10a) configured to generate a set of extracted light rays (11) and in which the extraction network (10a) has a shape which widens in the main plane (x, y) in the direction of said at least one channel ( 50, 50c, 50d).
[12" id="c-fr-0012]
12. Detector according to any one of the preceding claims, in which the optical device (15) comprises at least one waveguide (2) comprising a heart having a distal portion (10, 10b, 10c) and a sheath coating the heart. , the heart having, at the distal portion (10, 10b, 10c), a plurality of grooves arranged periodically according to a pitch P such that P satisfies the following expression:
<P <
with: λ the wavelength of the light radiation;
n _eff the effective refractive index of the fundamental mode of light radiation;
n _c the refractive index of the core of the waveguide (2); n _g the refractive index of the sheath of the waveguide (2); n _eff being between n _c and n _g .
[13" id="c-fr-0013]
13. Detector according to any one of the preceding claims, in which the optical device (15) comprises at least one waveguide (2) comprising a core and a sheath and in which the thickness h of the waveguide measured according to said perpendicular direction (z) is such that:
2Λ with: λ the wavelength of the light radiation;
n _c the refractive index of the core of the waveguide (2);
n _g the refractive index of the sheath of the waveguide (2).
[14" id="c-fr-0014]
14. Detector according to any one of the preceding claims comprising at least a first channel (50c) and a second channel (50d) for circulation of the particles (60), each channel (50c, 50d) being intended to receive the fluid comprising particles (60) and being configured to receive at least part of the light radiation emitted by the optical device (15).
[15" id="c-fr-0015]
15. Detector according to the preceding claim, configured so that the light radiation received by each channel (50c, 50d) comes from a single light source (1).
[16" id="c-fr-0016]
16. Detector according to any one of the preceding claims comprising at least a first and at least a second channel (50c, 50d) for circulation of the particles (60) and in which the optical device (15) comprises at least one guide waves (2) comprising at least one junction (3, 4a) configured to form at least a first arm (4b) of the waveguide (2) and at least a second arm (4c) of the waveguide, the detector being configured so that:
o at least part of the light radiation emitted by the optical device (15) through the first arm (4b) of the waveguide (2) passes through the first channel (50c) while being diffracted by at least one particle (60) , then is reflected on the reflecting surface (41), then then reaches the matrix (20) of photodetectors (21);
o at least part of the light radiation emitted by the optical device (15) through the second arm (4b) of the waveguide (2) passes through the second channel (50d) being diffracted by at least one particle (60) , then is reflected on the reflecting surface (41), then then reaches the matrix (20) of photodetectors (21).
[17" id="c-fr-0017]
17. Method for producing at least one particle detector (60) according to any one of the preceding claims, comprising at least the following steps:
o Provide at least a first substrate (30) comprising at least one matrix (20) of photodetectors (21) and part of at least one optical device (15) configured to emit at least one light radiation, the first substrate (30 ) extending along a main plane (x, y);
o Provide at least a second substrate (40) comprising at least one reflecting layer (41) and extending in part at least along the main plane (x, y);
o Form a third substrate (100) by assembling the first substrate (30) and the second substrate (40) so that the array (20) of photodetectors (21) and the reflecting surface (41) are arranged on either side. another of at least a portion of the substrate (100);
o Before and / or after the step of forming the third substrate (100), form at least one channel (50, 50c, 50d) for circulation of the particles (60) extending mainly in a direction perpendicular (z) to said plane main (x, y) and passing right through the third substrate (100) so that at least part of the light radiation emitted by the optical device (15) crosses the channel (50, 50c, 50d) being diffracted by at least one particle (60), then is reflected on the reflecting surface (41), then reaches the matrix (20) of photodetectors (21).
[18" id="c-fr-0018]
18. Method according to the preceding claim, in which, in the case where the step of forming said at least one channel (50, 50c, 50d) is carried out before the step of forming the third substrate (100), the method comprises following steps :
o Formation of at least a first portion (50a) of said at least one channel (50, 50c, 50d) through the first substrate (30) in the perpendicular direction (z) and located near the distal portion (10, 10b, 10c);
o Formation of at least a second portion (50b) of the channel (50, 50c, 50d) through the second substrate (40) in said perpendicular direction (z);
o Deposition of at least one additional reflective layer (42) on at least part of the second portion (50b) of said at least one channel (50, 50c, 50d) and preferably on at least one wall (41a) of said at minus one channel (50, 50c, 50d).
1/10
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引用文献:

---

公开号 | 申请日 | 公开日 | 申请人 | 专利标题

---

DE4230087A1|1992-09-09|1994-03-10|Bezzaoui Hocine Dipl Ing|Integrated optical micro-mechanical sensor for measuring physical or chemical parameters - has strip waveguide applied to etched membrane acting as integrated measuring path|

---

US5726751A|1995-09-27|1998-03-10|University Of Washington|Silicon microchannel optical flow cytometer|

---

US6661035B2|2001-05-07|2003-12-09|Infm Instituto Nazionale Per La Fisica Della Materia|Laser device based on silicon nanostructures|

---

FR2963101A1|2010-07-22|2012-01-27|Commissariat Energie Atomique|PARTICULATE DETECTOR AND METHOD OF MAKING SAME|

---

US20160077218A1|2014-09-17|2016-03-17|Stmicroelectronics S.R.I.|Integrated detection device, in particular detector of particles such as particulates or alpha particles|EP3671179A1|2018-12-21|2020-06-24|Commissariat à l'Energie Atomique et aux Energies Alternatives|Optical particle sensor|

---

WO2021078805A1|2019-10-25|2021-04-29|Commissariat A L'energie Atomique Et Aux Energies Alternatives|Optical detector of particles|

---

FR3111990A1|2020-06-30|2021-12-31|Commissariat A L'energie Atomique Et Aux Energies Alternatives|optical particle sensor|US4733073A|1983-12-23|1988-03-22|Sri International|Method and apparatus for surface diagnostics|

---

US5007737A|1988-11-01|1991-04-16|The United States Of America As Represented By The Secretary Of The Air Force|Programmable detector configuration for Fraunhofer diffraction particle sizing instruments|

---

JP2722362B2|1992-03-27|1998-03-04|三井金属鉱業株式会社|Method and apparatus for measuring particle or defect size information|

---

US5273633A|1992-07-10|1993-12-28|Tiansong Wang|Capillary multireflective cell|

---

US5793485A|1995-03-20|1998-08-11|Sandia Corporation|Resonant-cavity apparatus for cytometry or particle analysis|

---

US6937335B2|2002-03-08|2005-08-30|Paul Victor Mukai|Dynamic alignment of optical fibers to optical circuit devices such as planar lightwave circuits|

---

JP2004271187A|2003-03-05|2004-09-30|Sumitomo Electric Ind Ltd|Particle measuring device and its application|

---

US7547904B2|2005-12-22|2009-06-16|Palo Alto Research Center Incorporated|Sensing photon energies emanating from channels or moving objects|

---

US8821799B2|2007-01-26|2014-09-02|Palo Alto Research Center Incorporated|Method and system implementing spatially modulated excitation or emission for particle characterization with enhanced sensitivity|

---

JP5382852B2|2009-02-06|2014-01-08|株式会社オンチップ・バイオテクノロジーズ|Disposable chip type flow cell and flow cytometer using the same|

---

FR2942046B1|2009-02-12|2011-03-11|Centre Nat Rech Scient|SYSTEM AND EQUIPMENT FOR OPTICALLY DETECTING PARTICLES WITH OPTICAL INFORMATION DECOUPLING RANGE, METHOD OF MANUFACTURING SAME|

---

FR2951542B1|2009-10-16|2011-12-02|Commissariat Energie Atomique|METHOD FOR OPTICALLY DETECTING MICROMETRIC OBJECTS IN SOLUTION|

---

JP5768055B2|2010-09-30|2015-08-26|株式会社フジクラ|Substrate|

---

KR20140134715A|2012-03-22|2014-11-24|모멘티브 퍼포먼스 머티리얼즈 인크.|Organo-modified silicone polymers|

---

JP6325941B2|2014-08-06|2018-05-16|日本電信電話株式会社|Optical circuit|

---

JP2016197020A|2015-04-02|2016-11-24|富士通株式会社|Optical sensor|

---

WO2016170890A1|2015-04-24|2016-10-27|技術研究組合光電子融合基盤技術研究所|Grating coupler|

---

JP6596987B2|2015-07-02|2019-10-30|富士電機株式会社|Particle measuring device|

---

FR3041474A1|2015-09-23|2017-03-24|Commissariat Energie Atomique|IMAGING DEVICE WITHOUT LENS AND ASSOCIATED OBSERVATION METHOD|JP2020113638A|2019-01-11|2020-07-27|株式会社ジャパンディスプレイ|Electroluminescent display, and method for manufacturing electroluminescent display|

法律状态:
2018-01-26| PLFP| Fee payment|Year of fee payment: 2 |

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2018-07-27| PLSC| Publication of the preliminary search report|Effective date: 20180727 |

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2020-01-30| PLFP| Fee payment|Year of fee payment: 4 |

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2021-01-28| PLFP| Fee payment|Year of fee payment: 5 |

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2022-01-31| PLFP| Fee payment|Year of fee payment: 6 |

优先权:

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申请号 | 申请日 | 专利标题

---

FR1750588A|FR3062209B1|2017-01-25|2017-01-25|OPTICAL PARTICLE DETECTOR|

---

FR1750588|2017-01-25|FR1750588A| FR3062209B1|2017-01-25|2017-01-25|OPTICAL PARTICLE DETECTOR|

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EP18700929.5A| EP3574301A1|2017-01-25|2018-01-25|Optical detector of particles|

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KR1020197024897A| KR20190112049A|2017-01-25|2018-01-25|Optical particle detector|

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JP2019560485A| JP2020507086A|2017-01-25|2018-01-25|Optical detector for particles|

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PCT/EP2018/051890| WO2018138223A1|2017-01-25|2018-01-25|Optical detector of particles|

---

US16/480,136| US11204308B2|2017-01-25|2018-01-25|Optical detector of particles|