• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    One aspect of the invention relates to a device (10, 10 ') for detecting gases or particles comprising: - a light source capable of emitting a light beam, - an interaction cavity (12) comprising first and second walls reflectors (123, 124) substantially parallel to each other, - a plurality of single-mode optical waveguides (13b) each having a first end (13b1) of width 11 optically coupled to the light source and a second end (13b2) of width 12, greater than the width 11, optically coupled to a first end (121) of the interaction cavity, each optical waveguide having in its second end of width 12 a diffraction grating (13b3) having a pitch P in particular chosen according to a concentration C and a parameter α of interaction with the light beam of a type of gas or particles to be detected; and a detector (14) coupled to a second end (122) of the interaction cavity.
    公开号:FR3061553A1
    申请号:FR1750004
    申请日:2017-01-02
    公开日:2018-07-06
    发明作者:Salim BOUTAMI
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    @ Holder (s): COMMISSIONER FOR ATOMIC ENERGY AND ALTERNATIVE ENERGIES.
    ©) Extension request (s): ® Agent (s): CABINET CAMUS LEBKIRI Limited liability company.
    ® GAS OR PARTICLE DETECTION DEVICE AND METHOD FOR MANUFACTURING SUCH A DEVICE.
    FR 3 061 553 - A1 (57) one aspect of the invention relates to a device (10, 10 ') for detecting gases or particles comprising:
    - a light source capable of emitting a light beam,
    - an interaction cavity (12) comprising first and second reflecting walls (123, 124) substantially parallel to one another,
    - a plurality of single-mode optical waveguides (13b) each having a first end (13b1) of width 11 optically coupled to the light source and a second end (13b2) of width I2, greater than width 11, optically coupled to a first end (121) of the interaction cavity, each optical waveguide comprising in its second end of width I2 a diffraction grating (13b3) having a pitch P in particular chosen as a function of a concentration C and of a parameter ot of interaction with the light beam of a type of gas or of particles to be detected;
    - And a detector (14) coupled to a second end (122) of the interaction cavity.

    GAS OR PARTICLE DETECTION DEVICE AND MANUFACTURING METHOD FOR SUCH A DEVICE
    TECHNICAL FIELD OF THE INVENTION
    The technical field of the invention is that of the detection of gases or particles. One aspect of the present invention relates to a gas or particle detection device, and in particular a gas or particle detection device by interaction with a light beam. A gas is composed of separate molecules, of sub-nanometric size. A particle is solid, made up of molecules that are joined together. The total size of a particle exceeds a nanometer or even a micrometer. Another aspect of the invention relates to a method of manufacturing such a detection device.
    TECHNOLOGICAL BACKGROUND OF THE INVENTION
    The objective of a detector is generally not only to determine the presence or not of a given element, but also, in the event of the presence of this element, to determine its concentration.
    To detect gases or particles, it is in particular possible to use a detector by attenuation of light or a photoacoustic detector. A light attenuation detector is based on a light absorption or scattering property of an element to be detected: part of the light beam interacting with the element to be detected is absorbed or scattered by the element to be detected. This results in an attenuation of the light beam which is measured by a light detector. In a photoacoustic detector, a time-varying light source, such as a pulsed or amplitude or wavelength modulated laser, interacts with the element to be detected. The energy absorbed by the element to be detected is returned in the form of a transient heating which generates a pressure wave, itself measured by an acoustic detector.
    For the types of detectors mentioned above, an important parameter is the length of interaction of the light with the element to be detected. For example, in the case of a light absorption detector, if the gas absorbs too little light, we cannot be sure that it is present. If, on the contrary, the gas absorbs too much light, its concentration cannot be defined with certainty because any concentration above a certain threshold can lead to total absorption and an absence of signal to the detector. Likewise, in the case of a particle detector by light scattering, if the particles scatter too little light, we cannot be sure that they are present, and if on the contrary they scatter too much light, we cannot not define their concentration with certainty. It is therefore a question of precisely controlling the length of interaction of light with the element to be detected, according to the type of element to be detected and its concentration: for a given type of element to be detected, a interaction length the greater the lower the concentration of the element to be detected.
    To maximize a light-matter interaction and thus allow the detection of low concentrations of gas or particles, it is notably known to confine the light and the element to be detected in a hollow cavity with reflective walls.
    The use of single-mode hollow cavities, in which the light follows a single path, makes it possible to control the length of interaction of the light with the element to be detected and therefore to precisely dimension a device for the detection of a certain range of concentrations. However, such singlemode cavities are fine and the light that they confine undergoes very many reflections, which causes undesirable signal losses. The alternative use of wider multimode hollow cavities causes less loss but does not allow precise control of the length of interaction of light with the gas because the light then propagates along several different paths.
    Furthermore, the prior art gas or particle detection devices can only be dimensioned for the detection of a single type of gas or particle, over a concentration range [cmin; Cmax] restricted, i.e. for which Cmax / Cmin ^ 10.
    SUMMARY OF THE INVENTION
    The invention offers a solution to the problems mentioned above, by proposing a device for detecting at least one type of gas or of particles over a wide concentration range [cmin; Cmax] such as Cmax / Cmin> 10, or a plurality of different types of gas or particles over at least one concentration range [Cmin; Cmax] restricted, the device making it possible to control a length of interaction of light with each element to be detected according to its type and concentration, while minimizing the number of light reflections.
    One aspect of the invention thus relates to a gas or particle detection device comprising:
    - a light source capable of emitting a light beam at at least one wavelength,
    - a gas or particle interaction cavity with the light beam comprising first and second reflecting walls substantially parallel to each other,
    a plurality of single-mode optical waveguides each having a first end of width 11 optically coupled to the light source and a second end of width I2, greater than width 11, optically coupled to a first end of the interaction cavity , each optical waveguide comprising in its second end of width I2 a diffraction grating having a pitch P chosen as a function of the wavelength λ of the light beam propagated in the optical waveguide associated with said diffraction grating, of the cladding index n of the optical waveguide associated with the diffraction grating, of the effective index n e ff of the mode propagated in the optical waveguide associated with the diffraction grating, of the length L and of the height H of the cavity, of the reflection rate R of the first and second reflective walls of the cavity for the light beam at the wavelength λ, of a concentration C of a type of gas o u of particles to be detected and an interaction parameter a of the type of gas or of particles to be detected with the light beam;
    - and a detector coupled to a second end of the interaction cavity.
    The term “width” of an end of a waveguide means a first dimension which lies in a plane of propagation of the light beam in the waveguide and which is perpendicular to a direction of propagation of the light beam in the waveguide. "Propagation plane" means a plane to which the direction of propagation of the light beam in the waveguide belongs. The term "length" of the cavity is understood to mean a second dimension which lies in the plane of propagation of the light beam in the waveguide and which is parallel to the direction of propagation of the light beam in the waveguide. The second length dimension is therefore perpendicular to the first width dimension previously defined. “Height” of the cavity is understood to mean a third dimension which is perpendicular to the first width dimension and to the second length dimension.
    Thanks to the invention, the pitch P of each diffraction grating is chosen so that the light beam of wavelength λ diffracted by said diffraction grating follows a path within the interaction cavity which is optimized for a particular type of element to be detected, thanks to the interaction parameter a, and for a particular concentration C of the element to be detected. The widening of the second end of each waveguide decreases or even eliminates the diffraction of the light beam in the direction parallel to this width, and the diffraction grating arranged in the second end of each waveguide diffracts the light beam in a specific direction at the output of the waveguide. We thus precisely control the direction in which the light propagates out of the waveguide, and we choose this direction to optimize a length of interaction with an element to be detected, depending on the type and concentration of this element. The element to be detected is either a type of gas or a type of particles.
    In addition to the characteristics which have just been mentioned in the preceding paragraph, the gas or particle detection device according to one aspect of the invention may have one or more additional characteristics from the following, considered individually or according to all technically possible combinations :
    - The step P is chosen so as to minimize the norm of the following equation:
    By "minimizing the norm of the equation f (P)", we mean making f (P) as close as possible to zero. By choosing the pitch P of each diffraction grating to minimize the norm of the function f, it is guaranteed that the light beam of wavelength λ diffracted by said diffraction grating follows a path within the interaction cavity which is optimized for a particular type of element to be detected, thanks to the interaction parameter a, and for a particular concentration C of the element to be detected.
    - The gas or particle detection device advantageously comprises at least a first diffraction grating having a first pitch, and a second diffraction grating having a second pitch distinct from the first pitch. At least two different interaction lengths are thus obtained between the light beam and the element to be detected within the interaction cavity, each interaction length being able to be precisely adapted to a type and a concentration of element to be detected. .
    - Each single-mode optical waveguide having a core layer interposed between first and second cladding layers, the gas or particle detection device advantageously comprises a reflective layer in the extension of the second reflective wall, and the first layer of sheath is advantageously arranged on said reflective layer having a thickness e such that:
    »Î w y s t w
    --- <e <- 8n 8n where Àmoy is the average wavelength of the set of wavelengths used and n is the index of the first layer of cladding. Thus, the light rays extracted from a given diffraction grating and which penetrate into the cavity all have the same angle of extraction and all follow the same optical path while being in constructive interference with each other.
    - The gas or particle detection device has first and second vents communicating with the interaction cavity. This allows an improved flow of a gas or particle flow in the interaction cavity.
    - The gas or particle detection device is advantageously such that:
    o the interaction cavity is an optical cavity, o the detector is a light detector and is arranged substantially parallel to the reference plane, in the plane of the first reflecting wall, o the pitch P of each diffraction grating also belongs following (Pm), with m a natural integer, such that:
    λ
    o the diffraction gratings extend substantially along the same plane and each diffraction grating of pitch P has a plurality of structures parallel to each other, spaced from pitch P, and perpendicular to a radial direction relative to the light detector.
    It is thus guaranteed that the light beam ends at the detector, when the detector is arranged in the plane of the first reflecting wall. This allows detection by light attenuation.
    Alternatively, the gas or particle detection device is advantageously such that:
    o the interaction cavity is an optical cavity, o the detector is a light detector and is arranged substantially parallel to the reference plane, in the plane of the second reflecting wall, o the pitch P of each diffraction grating also belongs following (Pm), with m a natural integer, such that:
    λ
    o the diffraction gratings extend substantially along the same plane and each diffraction grating of pitch P has a plurality of structures parallel to each other, spaced from pitch P, and perpendicular to a radial direction relative to the light detector.
    It is thus guaranteed that the light beam ends at the detector, when the detector is arranged in the plane of the second reflecting wall. This allows detection by light attenuation.
    The interaction parameter of the type of gas or of particles to be detected with the light beam is an absorbency parameter a and the light source is capable of emitting a light beam at at least a first wavelength corresponding to a length absorption wave of a first gas to be detected, and at least one second wavelength distinct from the first wavelength and corresponding to an absorption wavelength of a second gas to be detected . This allows optimized detection for at least two different gases to be detected.
    Another aspect of the invention relates to a method of manufacturing a gas or particle detection device comprising a light source capable of emitting a light beam at at least one wavelength λ, a gas interaction cavity or of particles with the light beam comprising first and second reflecting walls substantially parallel to one another, a plurality of single-mode optical waveguides each having a first end of width 11 optically coupled to the light source and a second end of width I2, greater than the width 11, optically coupled to a first end of the interaction cavity, and a detector coupled to a second end of the interaction cavity, the method comprising at least the following steps:
    - In a first part of a first substrate, production of the plurality of single-mode optical waveguides, each optical waveguide comprising a core layer interposed between first and second cladding layers, as well as a network of diffraction arranged at an interface between the core layer and one of the first or second cladding layers, each diffraction grating having a pitch P chosen as a function of the wavelength λ of the light beam propagated in the waveguide optics associated with said diffraction grating, the cladding index n of the optical waveguide associated with the diffraction grating, the effective index n e ff of the mode propagated in the optical waveguide associated with the diffraction grating, the length L and the height H of the cavity, the reflection rate R of the first and second reflecting walls of the cavity for the light beam at the wavelength λ, of a concentration C of a type of gas or pa particles to be detected and an interaction parameter a of the type of gas or particles to be detected with the light beam;
    - depositing a first reflective layer on the plurality of optical waveguides produced in the first part of the first substrate and on a second part of the first substrate;
    - Etching, in the second part (sp2) of the first substrate, of a cavity opening onto the first reflective layer;
    - on a second substrate, deposit of a second reflective layer;
    - Etching, in the second reflective layer and in the second substrate, of a location intended to receive the detector;
    - assembly of the first and second substrates so that:
    o the first and second reflective layers are located opposite one another, o the location intended to receive the detector is directly above the cavity, o the plurality of optical waveguides is located between the first and second reflective layers.
    In addition to the characteristics which have just been mentioned in the previous paragraph, the manufacturing process according to one aspect of the invention may have one or more complementary characteristics among the following, considered individually or according to all technically possible combinations:
    - The process may include, after the etching step, in the second part of the first substrate, a cavity opening onto the first reflecting layer, a deposition step, on the first substrate forming a wall of the previously etched cavity, a first anti-reflective layer; and the step of etching the location intended to receive the detector may include the following three substeps:
    o etching, in the second reflective layer, of a first location opening onto the second substrate;
    o deposition, on the second substrate opening into the first location, of a second anti-reflective layer;
    o etching, in the second substrate, of a second location intended to receive the detector.
    - The process can also include:
    o an etching step, in the second part of the first substrate, of at least first and second vents opening onto the etched cavity in the second part of the first substrate;
    o after assembling the first and second substrates, a step of etching the second substrate so as to lead to the first and second vents, without leading to the cavity.
    The invention and its different applications will be better understood on reading the description which follows and on examining the figures which accompany it.
    BRIEF DESCRIPTION OF THE FIGURES
    The figures are presented for information and in no way limit the invention.
    - Figure 1 shows a schematic sectional view of a gas or particle detection device according to a first or a second embodiment of the invention.
    - Figure 2a shows a schematic top view of a gas or particle detection device according to a first embodiment of the invention.
    - Figure 2b shows a schematic top view of a gas or particle detection device according to a second embodiment of the invention.
    - Figure 3a shows a graph of absorptivity versus wavelength in the example of an N2O gas, for a given concentration and interaction length.
    - Figure 3b shows a graph of absorptivity versus wavelength in the example of an NH3 gas, for a given concentration and length of cavity.
    - Figure 4a shows a graph of a function f as a function of the period P of a diffraction grating in the example of N2O gas.
    - Figure 4b shows a graph of a function f as a function of the period P of a diffraction grating in the example of NH3 gas.
    - Figure 5a shows a graph of the terms of a sequence (Pm) in the example of N2O gas.
    - Figure 5b shows a graph of the terms of a sequence (Pm) in the example of NH3 gas.
    - Figure 6a shows, in the example of N2O gas, several graphs of the function f for several different values of cavity length.
    - Figure 6b shows, in the example of NH3 gas, several graphs of the function f for several different values of cavity length.
    - Figures 7a to 7f show steps in a method of manufacturing a first part of a gas or particle detection device according to one aspect of the invention.
    - Figures 8a to 8e show steps in a process for manufacturing a second part of a gas or particle detection device according to one aspect of the invention.
    - Figure 9 shows a step of assembling the first part obtained at the end of the steps of Figures 7a to 7f with the second part obtained at the end of steps 8a to 8e, to obtain a device for gas or particle detection according to one aspect of the invention.
    - Figure 10 shows in particular a step of opening vents within a gas or particle detection device according to one aspect of the invention.
    - Figure 11a is a sectional view showing in particular a first vent opening into a cavity of a gas or particle detection device according to one aspect of the invention.
    - Figure 11b is a sectional view showing in particular a second vent opening into a cavity of a gas or particle detection device according to one aspect of the invention.
    DETAILED DESCRIPTION OF AT LEAST ONE EMBODIMENT OF THE INVENTION
    Unless otherwise specified, the same element appearing in different figures has a unique reference.
    Figure 1 shows a schematic sectional view of a gas or particle detection device 10 according to a first embodiment of the invention, or 10 ’according to a second embodiment of the invention. Figure 2a shows a schematic top view of the gas or particle detection device 10 according to the first embodiment of the invention. Figure 2b shows a schematic top view of the gas or particle detection device 10 'according to the second embodiment of the invention. Figures 1, 2a and 2b are described together.
    The gas or particle detection device 10 according to the first embodiment or 10 ’according to the second embodiment comprises:
    - a light source 11, 11 ’for the emission of a light beam,
    a cavity 12 for the interaction of gas or particles with the light beam, of length L and height H, comprising a first reflecting wall 123 and a second reflecting wall 124 substantially parallel to each other and having a reflection rate R,
    a plurality of single-mode optical waveguides, for example first, second and third single-mode optical waveguides 13a, 13b, 13c, coupled to a first end 121 of the interaction cavity 12, and
    - a detector 14 coupled to a second end 122 of the interaction cavity 12.
    The plurality of single-mode optical waveguides could alternatively include only two single-mode optical waveguides, or four or more single-mode optical waveguides.
    Each single mode optical waveguide 13a, 13b, 13c is a solid guide, having a solid core surrounded by a sheath. In particular, each single mode optical waveguide 13a, 13b, 13c typically has a core layer c interposed between first and second cladding layers g1, g2.
    Each single mode optical waveguide 13a, 13b, 13c has:
    a first end 13a1, 13b1, 13c1 of width 11 which is optically coupled to the light source 11, 1 T, and
    - A second end 13a2, 13b2, 13c2 of width I2 greater than width 11 which is optically coupled to a first end 121 of the interaction cavity 12.
    Each optical waveguide 13a, 13b, 13c comprises, in its second end of width I2, a diffraction grating 13a3, 13b3, 13c3 having a pitch P chosen to minimize the standard of the following equation f:
    or :
    - λ is the wavelength of the light beam propagated in the optical waveguide associated with said diffraction grating,
    - n is the index of the sheath of the optical waveguide associated with said diffraction grating,
    - n e ff is the effective index of the mode propagated in the optical waveguide associated with the diffraction grating,
    - C is the concentration of the type of gas or particles to be detected, and
    - a is an interaction parameter of the type of gas or particles to be detected with the light beam.
    In the example of FIG. 1, the widths 11 and I2 of the waveguide 13b are measured along an axis y, the length L of the cavity 12 and the pitch P of the diffraction grating 13b3 are measured along an axis x and the height H of the cavity 12 is measured along an axis z, the axes x, y and z being perpendicular to each other. The length L is defined between the first end 121 and the middle of the detector 14. The diffraction gratings 13a3, 13b3, 13c3 of FIGS. 1, 2a, 2c are arranged substantially parallel to the same plane (Oxy) defined by the axes x and y.
    A first part of the light rays diffracted by each diffraction grating is typically oriented upwards, that is to say towards the first reflecting wall 123, while a second part of the light rays diffracted by each diffraction grating is oriented downwards, that is to say towards the second reflecting wall 124, with, in absolute value, the same extraction angle as the first part of the light rays. This situation can have the disadvantage that several optical paths coexist in the cavity for the same wavelength, and / or that part of the light rays extracted from each diffraction grating does not penetrate into the cavity or does not reach the detector and is lost. To remedy this, the first sheath layer g1 is advantageously arranged on a reflective layer 125 and has a thickness e such that:
    ^ mov ^^ avg
    ---- <e <---- 8n 8n where Àmoy is the average wavelength of the set of wavelengths used and n is the index of the first sheath layer g1. The light rays extracted “downwards”, that is to say towards the reflective layer 125, are reflected on the reflective layer 125 and leave in the same direction as the light rays extracted “upwards”, this is that is to say towards the first reflecting wall 123, while being in constructive interference with them taking into account the choice of the thickness e, of optical thickness close to a quarter of the average wavelength. The light rays extracted from a given diffraction grating and which penetrate into the cavity therefore all have the same extraction angle and all follow the same optical path, because the small thickness e also makes it possible to avoid a significant lateral shift between the reflected and unreflected rays. In addition, the phenomenon of constructive interference makes it possible to optimize the power of the light source.
    The thickness e of the first sheath layer g1 is preferably substantially equal to Àmoy / 4n.
    The thickness of the second sheath layer g2 is typically chosen so that the total thickness of each waveguide is substantially equal to the height H of the cavity. The second sheath layer g2 is thus typically at least 5 times thicker, or even at least 10 times thicker, or even at least 100 times thicker than the first sheath layer g1. In the example of FIG. 1, the thickness of the first and second sheath layers g1, g2 as well as the thickness of the optical guides are measured along the z axis. The reflecting layer 125 and the second reflecting wall 124 can form a single reflecting element, or alternatively be two separate reflecting elements arranged in the extension of one another.
    In general, the choice of the pitch determines the length of light-matter interaction and a path is chosen that is all the shorter as the concentration of the element to be detected is high, and all the longer as the concentration of the item to be detected is low. In the example of FIGS. 1, 2a and 2b, the diffraction grating 13a3 is associated with a first optical path c1; the diffraction grating 13b3 is associated with a second optical path c2 longer than the first optical path c1; the diffraction grating 13c3 is associated with a third optical path c3 longer than the first and second optical paths c1, c2.
    In the case of gas detection, the interaction parameter a is typically the absorptivity of a type of gas to be detected. In the case of particle detection, the interaction parameter a is typically a diffusivity of a type of particle to be detected. Generally, any element having absorption properties can be directly detected by means of a detection device by light attenuation or by means of a detection device by photoacoustic effect; anything with diffusivity properties can be directly detected by a light attenuation detection device, but not by a photoacoustic effect detection device.
    In the case of a light attenuation detection device:
    - the interaction cavity is an optical cavity,
    - the detector 14 is a light detector such as a photomultiplier, a photodiode, or a thermal detector.
    - each diffraction grating, which comprises a plurality of patterns parallel to each other and spaced apart by a pitch P, is oriented within the plane (Oxy) so that its plurality of patterns is perpendicular to a radial direction relative to the detector 14 - in FIGS. 2a and 2b, the first, second and third optical paths c1, c2, c3 are shown in a radial direction relative to the detector 14, and
    - the pitch P of each diffraction grating belongs to the sequence (Pm), with m a natural integer, such that:

    In the case of a light attenuation detection device, the pitch P of each diffraction grating is therefore advantageously the member of the sequence (Pm) which minimizes the norm of the function f. It is thus guaranteed that all the optical paths terminate at the detector 14, while optimizing the sensitivity of the detection device for particular experimental conditions.
    In the case of a photoacoustic effect detection device, the detector 14 is an acoustic detector such as a microphone and the orientation of the different diffraction gratings is indifferent. The pitch P of each diffraction grating is therefore advantageously chosen such that f (P) = 0.
    According to the first embodiment, the light source 11 emits a light beam with a single wavelength, and the optical coupling between each single mode optical waveguide and the light source 11 is carried out via a multimode interferometer. FIG. 2a illustrates in particular an example according to the first embodiment, according to which:
    - the light source 11 emits a light beam with a single wavelength Ai,
    the optical coupling between each single mode optical waveguide 13a, 13b, 13c and the light source 11 is carried out via a multimode interferometer 15, and
    - the optical coupling between the light source 11 and the multimode interferometer 15 is carried out via an input guide 16.
    The detection device 10 according to the first embodiment advantageously makes it possible to detect the same type of element, characterized by its absorption properties or by its diffusion properties, over a large continuous or discontinuous concentration range [Cmin; Cmax] such that Cmax / Cmin> 10 k with k the number of diffraction gratings, choosing for each diffraction grating 13a3, 13b3, 13c3 a step adapted to a certain restricted concentration range of the type of element to be detected, the meeting of the restricted concentration ranges forming the large continuous or discontinuous concentration range. Each restricted concentration range typically extends over an interval [CRmin; CRmax] such as CRmax / CRmin 10. When the restricted concentration ranges are contiguous or even partially overlap, their meeting forms a large continuous concentration range. When the restricted concentration ranges are disjointed and therefore do not overlap, their meeting forms a large discontinuous concentration range. This latter case is particularly advantageous for the detection of the same type of element at very different concentrations: for example, the detection of the same type of element in two very different applications, such as industrial emanation or quality of ambient air. The detection device 10 according to the first embodiment of the invention alternately makes it possible to detect several types of different elements characterized by their diffusion properties, over a given restricted concentration range, by choosing for each diffraction grating 13a3, 13b3 , 13c3 a step adapted to each type of element over the restricted concentration range considered.
    According to a variant of the first embodiment, the detection device 10 comprises at least a first plurality and a second plurality of optical waveguides as described above, the steps of the diffraction gratings of the first plurality of waveguides being chosen to allow the detection of a first type of element characterized by its diffusion properties over a wide concentration range as previously described, and the steps of the diffraction gratings of the second plurality of waveguides being chosen for allow the detection of a second type of element characterized by its diffusion properties over a wide concentration range as previously described.
    According to the second embodiment, the light source 11 ′ emits a light beam at at least two distinct wavelengths, each wavelength corresponding to an absorption wavelength of an element to be detected, and each Single mode optical waveguide is directly coupled to the light source 11 '. FIG. 2b illustrates in particular an example according to the second embodiment, according to which:
    the light source 11 ′ emits a light beam with at least three distinct wavelengths Ai, À2 and À3, each wavelength corresponding to an absorption wavelength of an element to be detected,
    - each single mode optical waveguide 13a, 13b, 13c is directly coupled to the light source 11 ’.
    The light source 11 ′ according to the second embodiment could alternatively emit a light beam only at at least two distinct wavelengths Ai and À2, or at four distinct wavelengths or more. The light source 11 ′ according to the second embodiment may include a plurality of separate sources, each separate source emitting a light beam at a single wavelength. In this case, each waveguide is coupled to a single source and receives a single wavelength. In this case, the light source is preferably a quantum cascade array of lasers, or QCL (from the Quantum Cascade Laser) array, multiwavelength. Alternatively, the light source 11 ′ according to the second embodiment can be a single light source tunable over time in wavelength. In this alternative, the tunable source is coupled to all of the waveguides, and each waveguide receives the plurality of wavelengths emitted by the tunable source. We then deduce from the instant of detection, the wavelength injected at this instant and therefore the element measured at this instant.
    The gas or particle detection device 10 ′ according to the second embodiment advantageously makes it possible to detect several types of different elements characterized by their absorption properties over a certain restricted concentration range [Cmin; Cmax] such as Cmax / Cmin 10, by choosing for each diffraction grating 13a3, 13b3, 13c3 a separate pitch adapted to said restricted concentration range for each type of element to be detected. Indeed, the absorbency parameter of an incident radiation by an element strongly depends on the wavelength of the incident radiation.
    According to a variant of the second embodiment:
    the light source 11 ′ emits a light beam at at least a first wavelength Ai corresponding to an absorption length of a first element to be detected, and a second wavelength À2 distinct from Ai and corresponding to a absorption wavelength of a second element to be detected, and
    the detection device 10 ′ comprises at least first and second pluralities of optical waveguides as previously described, the steps of the diffraction gratings of the first plurality of waveguides being chosen to allow the detection of the first element to be detected over a wide concentration range as previously described, and the steps of the diffraction gratings of the second plurality of waveguides being chosen to allow the detection of the second element to be detected over a wide concentration range as previously described .
    FIGS. 3a, 3b, 4a, 4b, 5a, 5b, 6a, 6b describe an example of dimensioning of a detection device according to one aspect of the invention, intended to be used for the detection of two gases: an N2O gas and NH3 gas.
    Figure 3a shows a graph of the absorptivity of N2O gas as a function of wavelength, for a concentration of 1 ppm and an interaction length of 1 cm. Figure 3b shows a graph of the absorbency of NH3 gas as a function of the wavelength, also for a concentration of 1 ppm and an interaction length of 1 cm. The graph in FIG. 3a makes it possible to determine a wavelength of interest ÀN2o for the gas of N2O, such that ÀN2o = 7.85 pm, corresponding to an on2o absorptivity of 1.6e ' 5 ppm' 1 .cm ' 1 . Similarly, the graph in FIG. 3b makes it possible to determine a wavelength of interest at nh3 for the NH3 gas, such that at nh3 = 9.22 pm, corresponding to an absorptivity onh3 of 7th -5 ppm ' 1 . cm ' 1 .
    It is possible to use several wavelengths for each gas or element to be detected, each wavelength corresponding to a different absorption peak of the gas or element to be detected. This reduces or eliminates the risk of false positive during detection, which exists when two different gases have one or more absorption peaks in common.
    In this example, each single-mode optical waveguide has a core in Ge, of index n c = 4, and a sheath in SiGe with 40% of Ge, of index n = 3.6, and is transparent to the lengths. wave of interest. For the technology and the wavelengths of interest considered, a thickness of 2.5 μm is typically chosen for each optical waveguide. The effective index of the propagated mode within each optical waveguide is substantially equal to 3.8. We consider a cavity of height H = 725 pm, corresponding to the thickness of a silicon substrate, and of length L = 1 cm. We consider a reflection rate of 98% for the first and second reflective walls of the cavity, characteristic of gold at the wavelengths of interest. Finally, we aim for a typical detection concentration of 1 ppm for each of the two gases of interest. FIG. 4a shows a graph of the function f, with its real part Real (f) and its imaginary part lmag (f), as a function of the period P of a diffraction grating, for a gas of N2O with the chosen parameters above. Figure 4b shows a graph of the function f, with its real part Real (f) and its imaginary part lmag (f), as a function of the period P of a diffraction grating, for an NH3 gas with the chosen parameters above. A non-zero imaginary part means that the light beam extracted by the diffraction grating undergoes a total internal reflection at the interface between the solid optical waveguide and the hollow cavity, filled with air. The graph in FIG. 4a makes it possible to determine the period PN20 such that f (PN2o) = 0: Pn2o = 23.7 pm. Similarly, the graph in FIG. 4b makes it possible to determine the period Pnh3 such that î (Pnh3) = 0: Pnh3 = 27.84 pm.
    In the particular case of a light attenuation detection device, it is now a question of finding, for each gas, the period of the diffraction grating belonging to the sequence (Pm) which is closest to the canceling period. the function f. To do this, Figure 5a shows a graph of the terms of the sequence (Pm) as a function of m in the example of N2O gas with the parameters chosen above, and Figure 5b shows a graph of the terms of the sequence (Pm) as a function of m in the example of NH3 gas with the parameters chosen above. The graph in FIG. 5a makes it possible to determine the period PN2o_d belonging to the sequence (Pm) and minimizing the norm of the function f in the case of N2O gas: PN2o_d = 23.71 pm for m = 24. Similarly, the graph in FIG. 5b makes it possible to determine the period PNH3_d belonging to the sequence (Pm) and minimizing the norm of the function f in the case of NH3 gas: PNH3_d = 27.85 pm.
    Figures 6a and 6b show the impact of a variation in the length L of the cavity over the period to be chosen, in the case of N2O gas and in that of NH3 gas, respectively. An increase in the length L of the cavity results in an increase in the period of the required diffraction gratings.
    FIGS. 7a to 7f, 8a to 8e and 9, which show steps of a manufacturing method 100 of a gas or particle detection device according to an embodiment of the invention, are now described.
    FIG. 7a shows a first substrate su1, for example a silicon substrate for later use of infrared interaction light, or a glass substrate S1O2 for later use of visible interaction light. The first substrate su1 has a first part sp1 and a second part sp2. The first part sp1 forms a first sheath layer g1 of an optical waveguide.
    FIG. 7b shows a step of etching, in a first part sp1 of the first substrate su1, of a diffraction grating rd having a pitch P.
    FIG. 7c shows a step of depositing, on the first layer of cladding g1 and on the diffraction grating rd etched in the first layer of cladding g1, with a layer of core c of the optical waveguide. The core layer is for example a layer of Ge when the first substrate is made of Si, or a layer of silicon nitride when the first substrate is made of SiO2. A mechanical-chemical planarization step CMP can be provided at the end of the deposition step 7c.
    FIG. 7d shows a step of depositing, on the core layer c and on the second part sp2 of the first substrate su1, a quarter wave layer, for example in SiGe when the core layer is produced in Ge, which forms a second layer of sheath g2 directly above the layer of heart c. FIG. 7d also shows a step of depositing, on the quarter-wave layer, a first reflective layer r1, for example metallic. Even if the sectional representations of FIGS. 7a to 7d show only one optical waveguide, a plurality of optical waveguides are produced during these steps.
    Figure 7d ’shows a step of inverting the device of Figure 7d.
    FIG. 7e shows a step of etching a cavity Ca in the second part of the first substrate su1, so as to lead to the first reflective layer r1. At this stage, the cavity Ca has a wall formed by the first substrate su1 and a wall formed by the first reflective layer r1.
    FIG. 7f shows, in the case of a subsequent use of infrared interaction light, a step of depositing a first anti-reflective layer ar1 on the wall of the cavity Ca formed by the first substrate su1. This step is optional in case of subsequent use of visible interaction light. The first antireflection layer ar1 is typically deposited both on the wall of the cavity Ca formed by the first substrate su1 and on the wall of the cavity Ca formed by the first reflective layer r1, then removed from the wall formed by the first layer reflective r1 by an anisotropic ion etching technique.
    FIG. 8a shows a second substrate su2, for example a silicon substrate for later use of infrared interaction light, or a glass substrate S1O2 for later use of visible interaction light. A second reflective layer r2 is deposited on the second substrate su2 and then a first location ep1 leading to the second substrate su2 is opened in the second reflective layer r2, using a resin mask re.
    FIG. 8b shows, in the case of a subsequent use of infrared interaction light, a step of depositing a second antireflection layer ar2 in the first location ep1. This step is optional in case of subsequent use of visible interaction light. The second antireflection layer ar2 is typically deposited both in the first location ep1 and on the resin mask re, then the resin mask re is removed during a lift-off step.
    FIG. 8d shows a step of inverting the device of FIG. 8b, followed by an etching step, in the second substrate su2 and directly above the first location ep1, of a second location ep2 intended to receive the detector 14 .
    When step 8b has been carried out and a second antireflection layer ar2 has been deposited in the first location ep1, the second location ep2 is etched so as to keep a residue of the second substrate su2 directly above the first location ep1. The remainder of the second substrate su2 makes it possible to protect the anti-reflective layer ar2 by preventing it from breaking, while ensuring good subsequent mechanical maintenance of the detector 14, when it is arranged in the second location ep2. The remainder of the second su2 substrate is preferably at least 10 µm thick.
    When step 8b has not been carried out, the second location ep2 is preferably etched so as to keep the residue of the second substrate su2, as previously described. Good subsequent mechanical maintenance of the detector 14 is thus ensured. Alternatively, the second location ep2 can be etched directly above the first location ep1 so as to pass through the second substrate su2 and lead to the first location ep1. In this alternative, a means of holding the detector 14 is provided so that it does not enter the cavity 12.
    FIG. 8e shows a stage of arrangement of the detector 14 in the second location ep2.
    FIG. 9 shows a step of assembling the device obtained at the end of the steps of FIGS. 7a to 7f with the device obtained at the end of steps 8a to 8e, for obtaining a device for detecting gas or of particles 10, 10 'according to one aspect of the invention. The assembly is typically a step of Si / Au eutectic sealing. The first and second substrates su1, su2 are assembled in such a way that the first and second reflective layers r1, r2 are opposite one another, thus forming the first and second reflective walls 123, 124 of the cavity 12 such as previously described. The first and second locations ep1, ep2 are aligned and perpendicular to the cavity 12. The core layer interposed between the first and second sheath layers g1, g2 and comprising the diffraction grating rd at the interface between the layer of core c and the first sheath layer g1 forms the optical waveguide 13b as previously described. Alternatively, each diffraction grating rd could be located at the interface between the core layer c and the second cladding layer g2. In this alternative, each diffraction grating is not etched in the first layer of cladding g1 but in the layer of core c which is deposited on the first layer of cladding g1.
    FIG. 10 particularly shows a step of opening vents within a gas or particle detection device according to one aspect of the invention. First and second vents ev1, ev2 are etched in the second part of the first substrate su1, so that they open onto the cavity Ca. The cavity and the vents are typically produced at the same time, during the same technological step. The assembly of the first and second substrates su1, su2 closes the cavity and the first and second vents. There is then provided a step of etching a first volume v1 of the second substrate su2 so as to open the first vent ev1, and of etching a second volume v2 of the second substrate su2 so as to open the second vent ev2.
    FIG. 11a is a sectional view showing in particular the first vent ev1 opening into the cavity 12 of a gas or particle detection device 10, 10 ′ according to one aspect of the invention, after the step of etching the first and second volumes v1, v2, described in Figure 10. Figure 11b is a sectional view showing in particular the second vent ev2 opening into the cavity 12 of a gas or particle detection device 10, 10 'according to one aspect of the invention, after the step of etching the first and second volumes v1, v2, described in FIG. 10.
    权利要求:
    Claims (11)
    [1" id="c-fr-0001]
    1. Device (10, 10 ’) for detecting gases or particles comprising:
    - a light source (11, 11 ’) capable of emitting a light beam at least one wavelength,
    - a cavity (12) for interaction of gas or particles with the light beam comprising first and second reflecting walls (123, 124) substantially parallel to one another,
    - a plurality of single-mode optical waveguides (13a, 13b, 13c) each having a first end (13a1, 13b1, 13c1) of width 11 optically coupled to the light source and a second end (13a2, 13b2, 13c2) of width I2, greater than width 11, optically coupled to a first end (121) of the interaction cavity, each optical waveguide comprising in its second end of width I2 a diffraction grating (13a3, 13b3, 13c3) having a pitch P chosen as a function of the wavelength λ of the light beam propagated in the optical waveguide associated with said diffraction grating, of the cladding index n of the optical waveguide associated with the diffraction grating, the effective index n e ff of the mode propagated in the optical waveguide associated with the diffraction grating, the length L and the height H of the cavity, the reflection rate R of the first and second reflecting walls of the cavity to do it light beam at the wavelength λ, of a concentration C of a type of gas or of particles to be detected and of a parameter a of interaction of the type of gas or of particles to be detected with the light beam;
    - And a detector (14) coupled to a second end (122) of the interaction cavity.
    [2" id="c-fr-0002]
    2. Device (10, 10 ’) for detecting gas or particles according to the preceding claim, characterized in that the pitch P is chosen so as to minimize the standard of the following equation:
    [3" id="c-fr-0003]
    3. Device (10, 10 ') for detecting gas or particles according to any one of the preceding claims, characterized in that it comprises at least a first diffraction grating having a first pitch, and a second diffraction grating having a second step separate from the first step.
    [4" id="c-fr-0004]
    4. Device (10, 10 ') for detecting gas or particles according to any one of the preceding claims, in which each single-mode optical waveguide (13a, 13b, 13c) has an interlayer of core (c) between first and second sheath layers (g1, g2), characterized in that it comprises a reflective layer (125) in the extension of the second reflective wall (124), and in that the first sheath layer (g1 ) is arranged on said reflecting layer (125) and has a thickness e such that:
    ^ avg _ _ 3-Àmoy
    ---- <e <----—
    8n 8n where Àmoy is the average wavelength of all the wavelengths used and n is the index of the first cladding layer (g1).
    [5" id="c-fr-0005]
    5. Device (10, 10 ') for detecting gas or particles according to any one of the preceding claims, characterized in that it comprises first and second vents (ev1, ev2) communicating with the interaction cavity (12 ).
    [6" id="c-fr-0006]
    6. Device (10, 10 ’) for detecting gas or particles according to any one of the preceding claims, characterized in that:
    - the interaction cavity (12) is an optical cavity,
    the detector (14) is a light detector and is arranged substantially parallel to the reference plane, in the plane of the first reflecting wall (123),
    - the pitch P of each diffraction grating also belongs to the sequence (Pm), with m a natural integer, such that:
    λ
    - the diffraction gratings extend substantially along the same plane and each diffraction grating of pitch P has a plurality of structures parallel to each other, spaced from pitch P, and perpendicular to a radial direction relative to the light detector.
    [7" id="c-fr-0007]
    7. Device (10, 10 ’) for detecting gas or particles according to any one of Claims 1 to 5, characterized in that:
    - the interaction cavity (12) is an optical cavity,
    the detector (14) is a light detector and is arranged substantially parallel to the reference plane, in the plane of the second reflecting wall (124),
    - the pitch P of each diffraction grating also belongs to the sequence (Pm), with m a natural integer, such that:
    λ
    - the diffraction gratings extend substantially along the same plane and each diffraction grating of pitch P has a plurality of structures parallel to each other, spaced from pitch P, and perpendicular to a radial direction relative to the light detector.
    [8" id="c-fr-0008]
    8. Device (10 ') for detecting gas according to any one of the preceding claims, characterized in that the interaction parameter of the type of gas or of particles to be detected with the light beam is an absorbency parameter a and in that the light source (1T) is capable of emitting a light beam at at least a first wavelength corresponding to an absorption wavelength of a first gas to be detected, and at at least a second length wave distinct from the first wavelength and corresponding to an absorption wavelength of a second gas to be detected.
    [9" id="c-fr-0009]
    9. Method for manufacturing a gas or particle detection device comprising a light source capable of emitting a light beam at at least one wavelength λ, a gas or particle interaction cavity with the light beam comprising first and second reflecting walls substantially parallel to each other, a plurality of single-mode optical waveguides each having a first end of width 11 optically coupled to the light source and a second end of width I2, greater than width 11, coupled optically at a first end of the interaction cavity, and a detector coupled to a second end of the interaction cavity, the method comprising at least the following steps:
    - In a first part (sp1) of a first substrate (su1), production of the plurality of single-mode optical waveguides, each optical waveguide comprising a core layer (c) interposed between first and second layers cladding (g1, g2), as well as a diffraction grating (rd) arranged at an interface between the core layer and one of the first or second cladding layers, each diffraction grating having a pitch P chosen as a function of the wavelength λ of the light beam propagated in the optical waveguide associated with said diffraction grating, of the cladding index n of the optical waveguide associated with the diffraction grating, of the effective index n e ff of the mode propagated in the optical waveguide associated with the diffraction grating, of the length L and of the height H of the cavity, of the reflection rate R of the first and second reflecting walls of the cavity for the light beam at the wavelength at, of a concentrati one C of a type of gas or of particles to be detected and of a parameter a of interaction of the type of gas or of particles to be detected with the light beam;
    - depositing a first reflective layer (r1) on the plurality of optical waveguides produced in the first part (sp1) of the first substrate (su1) and on a second part (sp2) of the first substrate (su1);
    - Etching, in the second part (sp2) of the first substrate (su1), of a cavity (Ca) opening onto the first reflective layer (r1);
    - on a second substrate (su2), deposition of a second reflective layer (r2);
    - Etching, in the second reflecting layer (r2) and in the second substrate (su2), of a location (ep1, ep2) intended to receive the detector (14);
    - assembly of the first and second substrates (su1, su2) so that:
    o the first and second reflective layers (ri, r2) are located opposite one another, o the location intended to receive the detector (ep1, ep2) is directly above the cavity (Ca) , o the plurality of optical waveguides is located between the first and second reflecting layers (r1, r2).
    [10" id="c-fr-0010]
    10. Manufacturing process according to the preceding claim, characterized in that:
    - the method comprises, after the etching step, in the second part (sp2) of the first substrate (su1), of a cavity (Ca) opening onto the first reflective layer (r1), a step of depositing, on the first substrate forming a wall of the previously etched cavity, with a first anti-reflective layer (ar1), and
    - the step of etching the location intended to receive the detector (14) comprises the following three substeps:
    o etching, in the second reflective layer (r2), of a first location (ep1) opening onto the second substrate (su2);
    o deposit, on the second substrate opening into the first location, of a second anti-reflective layer (ar2);
    o etching, in the second substrate (su2), of a second location (ep2) intended to receive the detector.
    [11" id="c-fr-0011]
    11. Manufacturing method according to any one of claims 9 or 10 characterized in that it further comprises:
    - an etching step, in the second part (sp2) of the first
    5 substrate (su1), at least of the first and second vents (ev1, ev2) opening onto the cavity (Ca) etched in the second part (sp2) of the first substrate (su1);
    - after the assembly of the first and second substrates (su1, su2), a step of etching the second substrate (su2) so as to open up
    10 on the first and second vents (ev1, ev2), without leading to the cavity (Ca).
    1/9 z
    类似技术:
    公开号 | 公开日 | 专利标题
    EP3563140B1|2020-09-30|Device for detecting gas or particles and method for manufacturing such a device
    EP0461991B1|1996-11-20|Spatial optical integrated monomode filter and method of manufacture
    EP0323317B1|1992-07-29|Method of manufacturing micro light guides having a low optical propagation loss by depositing multiple layers
    FR3019653A1|2015-10-09|HELMHOLTZ-TYPE DIFFERENTIAL ACOUSTIC RESONATOR DETECTION DEVICE
    WO2001050554A1|2001-07-12|Network structure using high dispersion volume holography
    EP0724315B1|1998-08-26|Microlaser cavity and its manufacturing method
    EP3610309A1|2020-02-19|Photonic chip with integrated collimation structure
    WO2012032495A1|2012-03-15|Photodetector and corresponding detection matrix
    EP1509794B1|2007-02-21|Optical filtration device
    EP3732531B1|2021-11-03|Optical device possessing means for the precise assembly thereof, assembly or test method for said device
    EP0992842A1|2000-04-12|Device for regenerating a wavelength division multiplexed signal comprising a saturable absorber
    FR3054882A1|2018-02-09|ABSORPTION CAVITY WITH INPUT WAVE GUIDES AND OUTPUT FOR A BIOLOGICAL OR CHEMICAL SENSOR
    EP2052291B1|2011-12-21|Passive component for all-optical regeneration of high levels by saturable absorptions cavity
    EP1291707A1|2003-03-12|Optical saturable absorber and its use for regenerating a wavelength division multiplexed signal
    EP1745531B1|2009-04-08|Inclined pump beam radiation emitter
    FR2849922A1|2004-07-16|Support device for chromophore component e.g. chemical molecule, has anti-reflective layer formed as pile of layers on face of support, where layer has refractive index nearly equal to square root of refractive index of support
    FR3056750A1|2018-03-30|DETECTOR OF A FLUID SUBSTANCE
    EP3968066A1|2022-03-16|Waveguide comprising a multimode optical fibre and adapted to spatially concentrate the guided modes
    FR3046853A1|2017-07-21|OPTICAL CAVITY COUPLED OPTICALLY TO A WAVEGUIDE.
    EP3936763A1|2022-01-12|Luminescent concentrator
    EP0874228A1|1998-10-28|Method and device for optimizing position and width of the cut-off band from an optical filter arrangement
    FR3104259A1|2021-06-11|Device for the photoacoustic characterization of a gaseous substance and method of manufacturing such a device
    WO2021240115A1|2021-12-02|Device for distributing light based on diffraction gratings
    FR3101442A1|2021-04-02|Bragg mirror and method of making a Bragg mirror
    WO2017220919A1|2017-12-28|Resonant optical reflector having multiple thin layers of dielectric materials, optical sensor, amplifying laser device comprising a reflector of said type, and corresponding manufacturing processes
    同族专利:
    公开号 | 公开日
    FR3061553B1|2020-07-24|
    US11209352B2|2021-12-28|
    WO2018121982A1|2018-07-05|
    US20190339197A1|2019-11-07|
    EP3563140B1|2020-09-30|
    EP3563140A1|2019-11-06|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    DE10144808A1|2001-09-12|2003-03-27|Pierburg Instr Gmbh|Infrared gas analysis instrument includes adjustable grating in beam path between transmitter and receiver, which can adopt differing angular positions|
    EP2515096A1|2011-04-21|2012-10-24|Commissariat A L'energie Atomique Et Aux Energies Alternatives|Photoacoustic gas detector with Helmholtz cell|
    EP2930506A1|2014-04-08|2015-10-14|Commissariat à l'Énergie Atomique et aux Énergies Alternatives|Detection device with helmholtz differential acoustic resonator|
    JP2016223804A|2015-05-27|2016-12-28|富士通株式会社|Gas sensor and method of use|
    WO2020005375A1|2018-06-29|2020-01-02|Carrier Corporation|Multipurpose air monitoring device|
    CN109470614A|2019-01-11|2019-03-15|海南大学|A kind of haze real-time monitoring device|
    US11209361B2|2019-03-25|2021-12-28|Asahi Kasei Microdevices Corporation|Optical density measuring apparatus and optical waveguide|
    EP3859308A1|2020-01-28|2021-08-04|Infineon Technologies AG|Radiation source and gas sensor using the radiation source|
    法律状态:
    2017-12-18| PLFP| Fee payment|Year of fee payment: 2 |
    2018-07-06| PLSC| Publication of the preliminary search report|Effective date: 20180706 |
    2020-01-30| PLFP| Fee payment|Year of fee payment: 4 |
    2021-01-28| PLFP| Fee payment|Year of fee payment: 5 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1750004|2017-01-02|
    FR1750004A|FR3061553B1|2017-01-02|2017-01-02|GAS OR PARTICULATE DETECTION DEVICE AND METHOD FOR MANUFACTURING SUCH A DEVICE|FR1750004A| FR3061553B1|2017-01-02|2017-01-02|GAS OR PARTICULATE DETECTION DEVICE AND METHOD FOR MANUFACTURING SUCH A DEVICE|
    EP17816731.8A| EP3563140B1|2017-01-02|2017-12-12|Device for detecting gas or particles and method for manufacturing such a device|
    US16/475,201| US11209352B2|2017-01-02|2017-12-12|Device for detecting gases or particles and method for manufacturing such a device|
    PCT/EP2017/082438| WO2018121982A1|2017-01-02|2017-12-12|Device for detecting gas or particles and method for manufacturing such a device|
    [返回顶部]