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    • 专利摘要:
    A textured surface structure for a solar thermal absorber comprises a substrate (4) made of an optically reflective material having a reference surface (14) and a set of textural elements (8) distributed in a two-dimensional arrangement along the surface of reference (14). The elementary structure (16) of a textural element (8) has a cavity (20) formed in the substrate (4), and a ring (22). The ring gear (22) protrudes from the reference surface (14) and is positioned immediately at the periphery of the edge (24) of the cavity (20)
    公开号:FR3014177A1
    申请号:FR1362104
    申请日:2013-12-04
    公开日:2015-06-05
    发明作者:Olivier Dellea；Emmanuel Ollier
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    [0001] The present invention relates to a textured surface structure for solar heat absorbers, operable at high temperatures, and a method of manufacturing such a structure. It is known to perform a selective wavelength surface treatment for solar thermal absorbers in order to improve the efficiency of converting solar radiation into heat. The principle of operation of a solar thermal absorber is simple and consists for the solar absorber to absorb the energy that comes from the sun to heat a liquid such as water or water vapor, circulating contact with the absorber. Two main quality requirements guide the design and realization of a solar thermal absorber: that of effectively absorbing the energy of the solar radiation and that of effectively reflecting the infrared heat radiation of the absorber to avoid thermal and soft losses. towards the realization of a black body. Several types of thin-film materials have already been studied for this type of application, such as, for example, black chrome, Ni-Al 2 O 3, stainless steel, aluminum nitride (AIN), Mo-A1203, and Mo-AIN. Some of these materials are even industrialized by being produced on a large scale. However, these materials ensuring this selectivity have demonstrated their potential only up to 600 ° C, because beyond this temperature 25 even stability of the deposits of the layers is not guaranteed or defective. For high temperatures, that is to say temperatures greater than or equal to 600 ° C, the materials W, Mo, Pt, Ni, Si are known to be more thermally stable. However, these materials in the absence of texturing of their surface have little or no selectivity, i.e., have low solar spectrum absorption and low reflection in the infrared range. As described in the article by J. Wang et al., Entitled "Simulation of two-dimensional Mo photonic crystal for solar-selective heat-absorbing", Phys. Status Solidi A 2007, No. 8, 19881992 (2010), these refractory planar materials deviate by their reflection spectra from the ideal selectivity curve for solar heat absorbers whose threshold wavelength Ath is close to 2 pm . In order to increase the spectral selectivity of the heat absorber and to maintain its conversion efficiency at these temperatures, it is known to structure or texture the surface of refractory materials to obtain the optical properties necessary for a selective heat absorber, which is that is, an absorption of solar electromagnetic radiation in the visible greater than 95% and an emissivity in the infrared (1R) less than 5%. Generally applied surface structures are made using photonic crystals. In this context, investigative work, generally limited to simulating the performance of certain surface structures in the field of solar thermal absorbers, and paying little attention to the industrialization of the manufacture of these structures, considered different types of photonic crystals and have been published. Among the photonic crystals, known to be periodic micro or nanostructures which advantageously affect the propagation of electromagnetic waves, one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) forms have been studied, the dimensions representing the number of directions according to which there is a periodicity of the dielectric constant.
    [0002] The surface structures studied are relatively conventional and comprise a matrix of circular or square holes, a matrix of studs, a matrix of pyramids, a succession of parallel grooves, cross networks of beams. When manufacturing methods are proposed for some of these structures, they are complex to make and incompatible with large scale production.
    [0003] For large-scale production, it is necessary to be able to achieve the characteristic dimensions obtained from the surface structure of the order of one micrometer or less without having recourse to the use of conventional photolithography methods implementing an exposure s of a photosensitive resin or an electron beam write. The article by R Saui et al., Entitled "Numerical study on tungsten selective radiators with various microinano structures", Photovoltaic Specialists Conference, 2005, IEEE, 762-765 (2005) describes a surface structure realized by a network of holes arranged in a metal material 10 such as tungsten (W), the dimensions explored for the radius, the thickness of the film and the period of the patterns being of the order of one micrometer. The object of the invention is to propose a surface structuring with an innovative geometry to obtain a wavelength selectivity, adapted to solar thermal absorbers, and compatible with a low-cost industrial manufacturing process that can be implemented. large-scale, large-area and compatible with refractory materials at high temperatures. To this end, the subject of the invention is a textured surface structure for a solar thermal absorber adapted to operate at high temperatures comprising a substrate having a flat or curved surface, consisting of a first optically reflective material, thermally stable, and having a set of surface elements defining a reference extension surface, and a set of textural elements having the same elementary structure and distributed along the reference surface in a two-dimensional arrangement, characterized in that the structure elemental element of a textural element comprises a cavity, formed in the substrate, having an edge of the same level as the reference surface and a bottom, and flaring from the bottom to the edge, and a crown outgrowth to the reference surface and positioned immediately on the periphery of the edge of the cavity. According to particular embodiments, the surface structure comprises one or more of the following characteristics, taken alone or in combination: two immediately adjacent crowns are separated everywhere by a space or touch at a single point, and present a separation distance s, greater than or equal to zero, less than or equal to 500 nm, and preferably less than or equal to 100 nm; The elementary structure has a cylindrical symmetry around an axis of symmetry crossing the bottom of the cavity and normal to the reference surface; and the cavity has a diameter D, considered at the reference surface, and a depth H, defined as the distance separating the bottom from the reference surface, such as a first aspect ratio H / D, defined as the ratio of the depth H to the diameter D of the cavity is strictly greater than one; and, the ring has a base width I, defined as the largest width of a radial section of the ring being equal to the difference between an outer radius corresponding to the outer contour of the ring and an inner radius corresponding to internal contour of the crown taken at the reference surface, and has a height h, defined as the distance between the reference surface and the largest of a single or more crown peaks, the base width I and the height h being such that a second form factor h / l, defined as the ratio of the height to the base width of the crown is strictly greater than one; and the transverse diameter D, cavity depth H, base width I, crown height h are all less than or equal to 10 μm, preferably 1 μm or more; the profile of a radial section of the cavity is a symmetrical first symmetrical plane curve, the axis of symmetry being oriented positively from the bottom towards the reference surface and originating from its point of intersection with the reference surface, and s the point of intersection of the axis of symmetry with the bottom is a minimum of the first plane curve, and the distance separating two symmetrical points of the first plane curve located at the same descending level when the corresponding level of symmetrical points decreases; The first planar curve is a parabola portion or a portion of the envelope of a two-dimensional cone; the profile of a radial half-section of the crown in a half-radial plane is a second plane curve defined by a function of evolution of the level of the crown as a function of the radius thereof, the function of evolution of the profile of the level of the ring being positive values and defined on a closed range of radii between the inner radius of the ring and the outer radius of the ring, and the value of the level of the ring corresponding to the inner radius being equal at zero and the value of the level of the crown corresponding to the zo outer radius being greater than or equal to zero and less than half the height h; and the evolution function being firstly increasing over a first subinterval until reaching a level threshold h.sub.se strictly greater than half the height h, then 25 over a second subinterval evolving above the threshold level h ',, i1 until the height of the crown and then evolving to reach again the threshold level h', d, then on a third decreasing sub-interval until the level corresponding to the outer radius; The crowns are integral with the substrate and made of the same first material; the textured surface structure comprises a layer of a second material, deposited on all the cavities and crowns), and zones 5 of the reference surface of the substrate not covered by the rings, the second material being composed of one or more layers; the rings consist of a second material different from the first material constituting the substrate; the second material is a material comprised in the group formed by metals such as tungsten, molybdenum, metal alloys such as steel, antireflection materials such as silicon oxide; the first material is a material comprised in all refractory metals such as tungsten, molybdenum, ceramics such as silicon carbide and alloys such as steel; The arrangement of the textural elements having the same elementary structure along the reference plane is made in the form of a tiling of elementary networks of textural elements, the elementary networks having the same mesh configuration included in the formed set; by the hexagonal meshes, the square meshes, the triangular meshes and being characterized by a degree of compactness of the textural elements; The invention also relates to a method of manufacturing a textured surface structure for a solar thermal absorber operable at high temperatures comprising a first step of providing a substrate having a flat or curved surface, consisting of a first thermally stable optically reflecting material having a reference surface, characterized in that it further comprises a second step, performed following the first step, of producing a set of textural elements having the same structure Elemental and distributed along the reference surface in a two-dimensional arrangement, the elementary structure of a textured element having a cavity, formed in the substrate, having an edge of the same level as the reference surface and a bottom, and flaring from the bottom to the edge, and a crown protruding from the reference surface this and positioned immediately on the periphery of the edge of the cavity. According to particular embodiments, the manufacturing method comprises one or more of the following characteristics, taken alone or in combination: the second step comprises the successive steps consisting in a third step of depositing on the smooth surface of the substrate forming the reference surface a lenticular particle film in a compact assembly, the lenticular particles being configured to micro-focus a beam of laser radiation on the substrate, then, in a fourth step subject the lenticular particles to a pulsed laser flux configured so that when the micro-focused energy reaches a threshold of ablation of the first material constituting the substrate, a cavity is formed in the substrate at the location of a contact zone of the lenticular particle accompanied by a rise of material forming a crown around the cavity; The manufacturing method defined above comprises a step of depositing a second mono or multilayer material on the reference surface of the substrate, executed between the first and second stages, the second material having a low emissivity to infrared radiation, and the second step comprises the successive steps of, in a fifth step, depositing on the flat surface of the second material a film of lenticular particles in a compact assembly, the lenticular particles being configured to micro-focus a beam of laser radiation on the layer. of the second material and the substrate immediately below, then in a sixth step subject the lenticular particles to a pulsed laser flux configured so that when the micro-focused energy reaches an ablation threshold of the second and first materials, a cavity is formed in the second material and in the subs trat at the location of a contact zone of the lenticular particle being accompanied by a rise of the second material forming a ring around the cavity pierced in the substrate; depositing a compact film of lenticular particles is carried out by a deposition technique comprised in the assembly formed by a Langmuir-Blodgett technique, Langmuir-Schaefer and a spin coating; the lenticular particles are particles made of a dielectric material comprised in the group consisting of oxides, silica, quartz, polymers such as polystyrene or particles made of an electrically conductive material comprised in the assembly formed by the gold, silver, silver, stainless steel. the lenticular particles have the shape of a sphere or a sphere modified by a chemical, thermal, plasma etching process implemented in an etching step executed between the third and fourth stages, or between the fifth and sixth stages , the diameter of the sphere being between a few tens of nm and several tens of microns. the laser beam applied to the film of the particles is collimated and delivered by pulses going from the femto-second to the nanosecond, preferably ranging from femto-second to picosecond; the manufacturing method comprises a step of cleaning the residual lenticular particles executed after the second step; - The manufacturing method comprises a step of depositing a second mono or multilayer material, performed after the second step or the cleaning step.
    [0004] The invention will be better understood on reading the description of several embodiments which follow, given solely by way of examples and with reference to the drawings in which: FIG. 1 is a view of a first embodiment of FIG. a surface structure of the invention; Figure 2 is a view of a first embodiment of a surface structure of the invention; Figure 3 is a view of an example of an elementary network of textural elements of Figure 2 organizing the two-dimensional arrangement Io of a surface structure according to the invention; Figure 4 is a comparative view of the reflexivity range performance between the surface structure of Figures 2 and 3 and a conventional structure of a tungsten smooth plane; Figure 5 is a comparative view of the reflectivity performance of the surface structure of Figures 2 and 3 and a conventional textured surface structure having circular holes and no flange; Figure 6 is a view of a third embodiment of a surface structure of the invention; Figure 7 is a view of a fourth embodiment of a surface structure of the invention; Figure 8 is a flow chart of a general method of manufacturing a surface structure of Figures 1-3 and 6-7; Figure 9 is a flow chart of a first embodiment of the general manufacturing method of Figure 7; Figures 10 and 11 are scanning electron microscope views of surface structures of Figure 1 made respectively with a femtosecond laser and a picosonde laser; Fig. 12 is a flow chart of a second embodiment of the general manufacturing method of Fig. 7; Figure 13 is a view of the ablation-vaporization and melting zones of the first and second materials when the second embodiment of the method of Figure 12 is implemented; Figure 14 is a view of lenticular particles having a modified spherical shape; FIG. 15 is a comparative view of the ablation-vaporization and melting zones of the first and second materials as a function of the modified shape of the lenticular particles when the second embodiment of the method of FIG. 12 is implemented. According to FIG. 1 and a first embodiment, a textured surface structure 2 for a solar thermal absorber, able to operate at high temperatures, comprises a substrate 4 having a surface, here plane, and a set 6 of elements. 8. The substrate 4 is made of a first optically reflective material, here a refractory material, thermally stable. The substrate 4 has an assembly 10 of surface elements, here planar, 12 belonging to the same reference surface 14, here a reference plane shown end in FIG. 1. As a variant, other smooth reference surfaces may can be used as expemie a cylindrical surface, a paraboloid surface, a hyperboloid surface ... The textural elements 8 have the same elementary structure 16 and are distributed along the reference plane 14 in a two-dimensional periodic arrangement. In Figure 1, this two-dimensional arrangement is not visible because of the representation of a particular section of the surface structure 2, here limited to two immediately adjacent textural elements 8 for the sake of simplification. The elementary structure 16 of a textured element 8 comprises a cavity 20 and a ring 22 or collar. The cavity 20, formed in the substrate 4, has an edge 24 and a bottom 26, the edge being defined as the contour of the cavity 20 at the reference plane 14. The cavity 20 flares out from the bottom 26 to the edge 24. The crown 22, protruding from the reference plane 14 is positioned immediately on the periphery of the edge of the cavity 20. The two rings 22 of any pair of immediately adjacent textural elements are separated by a space. As shown in FIG. 1, two immediately adjacent crowns Io have a separation distance s of less than or equal to 500 nm, preferably less than or equal to 100 nm, or even zero, the distance s being defined as the minimum of the distances separating two any points of the two crowns, one of the points being taken on a crown, the other point being taken on the other crown, and the distance s being reached on a single pair of points. Here, the crowns are integral with the substrate and made of the same first material. Here, in FIG. 1, the elementary structure 16 has a cylindrical symmetry around an axis of symmetry 30 which passes through the bottom 26 of the cavity 20 and which is normal to the reference plane 10. The cavity 20 has a diameter D , considered at the level of the reference plane 14, and a depth H, defined as the distance separating the bottom 26 from the reference plane 14, such as a first form ratio H / D, defined as the ratio of the depth H on the diameter D of the cavity is strictly greater than one. The ring 22 has a base width 1 which is defined as the largest width of the base of a radial section of the ring 22 and which is equal to the radial distance between the edge 24 of the cavity 20 and the outer contour of the crown 22.
    [0005] The ring 22 has a height h, defined as the distance separating the reference plane 14 and the largest one or more of the peaks of the crown. The basic width I and the height h are such that a second form factor ht1, defined as the ratio of the height to the base width of the crown is strictly greater than one. here, in Figure 1 and in particular, the ring 22 has a single peak 32. Alternatively, the ring has at least two peaks. The transverse diameter D, the depth H of the cavity 20, the base width I, the height h of the ring 22 are all less than or equal to 10 μm, preferably or equal to 1 μm. When, as shown in FIG. 1, the elementary structure 16 has a cylindrical symmetry about an axis of symmetry 30, a profile 36 of a radial section of the cavity 20 is a first flat curve 38. The first plane curve 38 is symmetrical with respect to the axis of symmetry 30, oriented positively from the bottom 26 of the cavity 20 towards the reference plane 14, graduated in levels and originating from its intersection with the reference plane 14. The axis of symmetry 30 has a point of intersection 40 with the bottom of the cavity 20 which is a minimum of the first curve 38, and the distance separating two symmetrical points of the first curve, situated at the same level, decreases when the corresponding level of the symmetrical points decreases. The first plane curve 38, illustrated in FIG. 1, is for example a parabola portion. When, as shown in FIG. 1, the elementary structure 12 has a cylindrical symmetry around an axis of symmetry 30, a profile 48 of a radial section of the ring 22 in a half radial plane is a second flat curve 50 defined by a function of evolution of the level of the ring 22 as a function of the radius r thereof. The function of evolution of the profile of the level of the crown is positive values and it is defined on a closed interval of radii included between the internal radius ri of the crown 22, equal to the radius of the cavity D / 2, and the radius external re of the ring 22, equal to the inner radius ri of the crown increased by its width 1. The value of the level of the ring 22 to the inner radius is equal to zero and the value of the level of the ring 22 to the outer radius is greater or equal to zero and less than half the height h of the crown.
    [0006] In general, the function of evolution of the profile of the crown is first increasing on a first subinterval until reaching a threshold level, greater than or equal to half the height h of the crown. Then, on a second subinterval, it moves above the level threshold hsewi to reach the height h of the crown and then Io evolves until reaching the threshold again. Then, on a third subinterval the function of evolution decreases until reaching the level corresponding to the external radius. In the particular case of the ring illustrated in FIG. 1, the second curve 50 is a parabola portion and the level threshold 15 coincides with the level of the single peak, that is to say the height h of the According to Figure 2, a second embodiment of a surface structure 82 is similar to the surface structure 2 according to the first embodiment and differs in the profile curves of the cavities and crowns. Here, the first planar curve is a portion of the envelope of a two-dimensional cone, and the second planar curve is a portion of the envelope of a two-dimensional cone oriented in the opposite direction. Thus, the surface structure 82 comprises textural elements 88, each formed of a conical hole or cavity 100 and a ring 102. The ring 102, in extension relative to a reference plane 94 of the substrate 84, possesses an outer shape also conical. The reference plane 94 is here also defined as the surface structure 2 of Figure 1 as an extension plane of a set of planar surface elements forming the joints of the rings together. In FIG. 2 this two-dimensional planar extension is not visible due to the fact that the two crowns shown touch locally at one point and that the cutting plane passes through this point and the axes of cylindrical symmetry. Nevertheless, this two-dimensional extension does exist. The dimensions D, I, s, H, h of the surface structure 82 are respectively equal to 600 nm, 200 nm, Onm, 600 nm and 300 nm. In a variant, the elementary structure does not have a cylindrical axis of symmetry. In general, the arrangement of the textural elements having the same elementary structure along the reference plane is realized in the form of a tiling of elementary networks of textural elements. The elementary arrays have the same mesh configuration included in the set formed by the hexagonal mesh, the square mesh, the triangular mesh and are characterized by a degree of compactness of the textural elements between them. By way of example, according to FIG. 3, the particular configuration of an elementary network 120 with compact hexagonal mesh is illustrated. Each of the six disks 122 of the elementary network 120 represents a textural element. This elementary network 120 organizes the arrangement along the reference plane of the second embodiment of the surface structure illustrated in FIG. 2. Thus, a disk 122 corresponds in particular to a textural element 88 of FIG. , the optical reflectivity performance of a first tungsten plane surface structure (W) and those of a second textured tungsten surface structure according to the geometry of the second embodiment described in FIGS. 3. A first curve 1.32 represents the evolution of the reflectivity as a function of the wavelength for the first structure while a second curve 134 represents the evolution of the reflectivity as a function of the wavelength for the second structure. The beneficial contribution of texturing by the geometry of the invention clearly appears since, with a threshold wavelength close to 2 μm, the optical selectivity presented by the second curve 134 is much closer to the ideal selectivity curve. A solar heat absorber that the optical selectivity exhibited by the first curve 132. In FIG. 5 is compared the performance in terms of optical reflectivity between on the one hand, a first conventional tungsten (W) surface structure with conical holes without flanges distributed in a compact hexagonal cavity configuration, and, secondly, a second textured tungsten surface structure according to the geometry of the second embodiment of the invention, i.e. same structure as the first structure but with a collar on the periphery of each hole Io and protruding from the plane of the substrate. A first curve 142 represents the evolution of the reflectivity as a function of the wavelength for the first structure while a second curve 144 represents the evolution of the reflectivity as a function of the wavelength for the second structure. The beneficial effect of the flange on the selectivity of the optical response is clearly apparent since the optical selectivity exhibited by the second curve 144 is much closer to the ideal selectivity curve of a solar heat absorber than the optical selectivity exhibited by the first curve 142. According to Figure 6 and a third embodiment of the invention, derived from the second embodiment described in Figure 2, a textured surface structure 150 comprises the surface structure 90 of Figure 2 and over a layer 152 of a second material. The layer 152 is deposited on all the cavities 100 and the crowns 102 forming the textural elements, and the non-hollow areas 92 of the reference plane 94 of the substrate 84, not covered by the crowns 102. The second material is composed of one or more layers. In accordance with Figure 7 and a fourth embodiment of the invention, a textured surface structure 160 is derived from the surface structure 2 of Figure 1 by replacing the rings 22 integrally with the substrate and in one and the same first material that the latter by rings 162 constituted by a second material different from the first material constituting the substrate. Advantageously, a bi or multi-material structure as proposed in the fourth embodiment makes it possible, for example, to obtain a crown and a medium surrounding the cavity made of different materials. This makes it possible to further optimize the basic structure of the texturing element by choosing, for example, different optical properties for the second upper material of the ring and for the first lower material of the substrate. Preferably, the first upper material is an infrared reflective metal which makes it possible to limit the infrared emissivity of the structure and thus to improve the performance of the absorber. The first lower material of the substrate is an absorbent material in the visible range. The first material is a material included in all the refractory metals such as tungsten (W), molybdenum (Mo), platinum (Pt), nickel (Ni), silicon (Si), ceramics such as than silicon carbide and alloys such as steel. The second constituent material, namely the thin layer deposited on a previously textured substrate and comprising in one piece the rings made of the same first material, or a material of the ring of the first material can be any type of material and in particular: a metal, such as molybdenum, tungsten, nickel, platinum. an alloy such as steel, a material or a set of materials to improve the optical function, such as an antireflection such as silicon oxide, a material or a set of materials to improve the holding function aging or protection vis-à-vis the environment, by silicon oxide. 8, a method of manufacturing a textured surface structure for a solar thermal absorber operable at elevated temperatures and as described in FIGS. 1 to 3 and 6 to 7 is based on FIG. laser / particle / substrate interaction. The method 202 generally comprises a first step 204 followed by a second step 206. In the first step 204, a substrate having a flat or regularly curved surface such as for example that of a cylinder, a sphere, a paraboloid or a hyperboloid is provided. The substrate is made of a first optically reflective material, thermally stable for high temperatures exceeding 1000 ° C, and has a reference surface. The first material is for example a refractory material and / or a metal. Then, in the second step 206, a set of textural elements is realized. The structural elements have the same elementary structure and are distributed along the reference surface in a two-dimensional arrangement. The elemental structure of a textural element has a cavity, formed in the substrate, and a crown or flange. The cavity has an edge of the same level as the reference smooth surface and a bottom; it flares from the bottom to the edge. The crown, protruding from the smooth reference surface, is positioned immediately on the periphery of the edge of the cavity. In accordance with Fig. 9 and a first particular embodiment 208 of the general method 202 depicted in Fig. 8, the second step 206 is a step 210 which comprises a third step 212 and a fourth step 214, executed successively. In the third step 208, a film of lenticular particles in compact assembly is deposited on the surface of the substrate forming the reference plane surface, the lenticular particles being configured to micro-focus a beam of laser radiation on the substrate. Then, in the fourth step 210 the lenticular particles are subjected to a pulsed laser flux, configured so that when the energy of the laser, individually micro-focused by each lenticular particle, reaches a threshold of ablation of the first material constituting the substrate, a cavity is then formed in the substrate at the location of a contact zone of the lenticular particle being accompanied by a rise of material which forms a ring around the cavity.
    [0007] Thus, by the method 202 with only a few technological steps, mainly the deposition of lenticular particles (third step 208) and laser shots (fourth step 210), it is possible to obtain on the surface of a refractory material a structuring of compact hexagonal type with microstructures formed of holes surrounded by rings such as Io described in Figures 1 to 2 and 6 to 7. The first material constituting the substrate can be, as already seen, all types of solid materials, such as for example, refractory metals such as tungsten or molybdenum, ceramics such as silicon carbide, or alloys such as steels. The surface of the substrate should have a roughness Ra of less than 0.1 μm. The substrate provided in the first step has therefore previously undergone a step of preparing its surface, for example by polishing. Lenticular particles are particles of a dielectric material such as, for example, oxides, silica, quartz, polymers such as polystyrene which act as optical focusing elements. Alternatively, the lenticular particles are particles of an electrically conductive material such as, for example, gold and silver which then put a different concentration process of the field by plasmon effect. The lenticular particles have the shape of a sphere or a sphere modified by a chemical, thermal, plasma etching process implemented in an etching step executed between the third and fourth stages, the diameter of the sphere being understood between a few tens of nm to several micron groins, preferably from 250 nm to 2 μm.
    [0008] The techniques for deposition of compact particle film for the implementation of the third step are numerous and known, for example the Langmuir-Blodgett method, Langmuir-Schaefer and spin coating (in English called "spin coating").
    [0009] The Langmuir-Blodgett method is described, for example, in the article by S. Acharya et al., Entitled "Soft Langmuir-Blodgett Technique for Hard Nanomaterials", Advanced Materials, 2009, 21, 2959-298, and the article by M. Bardosova entitled "The Langmuir-Blodgett Aproach to Making Colloidal Crystalline Crystals from Silica Spheres", Advanced Materials, 2010, 22, 3104-3144. The method of spin coating is described for example in the article by TE Bauert entitled "Self-Assembly of Particles Monolayers by Spin-Coating", European Celles and Materials, Vol. 10, Suppl. 5, 2005. The Langmuir-Blodgett method uses a carrier liquid, for example water, in which is previously immersed in vertical position the so-called "target" substrate on which must be reported the monolayer of spherical lenticular particles. The lenticular particles are dispensed on the surface of the liquid on which they disperse. A mechanical barrier is then set in motion to gradually reduce the area occupied by the particles to put them in compression. When the compact film is formed, the substrate is set in motion to deposit the film by capillary action on its surface. The barrier must accompany this pulling movement in order to maintain compression of the particles. The approach, implemented in the fourth step, is known and described in the article by Z. Chen et al., Entitled "Photonic nanojet enhancement of backscattering of light by nanoparticles: a novel potential visible-light ultramicroscopy technique", April 2004, Vol. 12, No. 7, Optics Express 1214. It consists in exploiting micro or nana-spheres (polystyrene, silica, quartz) as focusing "lenses". Thus, in this configuration, a collimated or focused beam illuminates the compact particle film. The energy of the beam is then concentrated on the substrate by each of the spheres. This method thus makes it possible, starting from a single illumination beam and whose dimension greatly exceeds that of the spheres, to obtain on the substrate a "multipoint" focusing well below the diffraction limit of the incident beam and with a periodicity submicron. The light sources used in this approach may be pulsed laser beams, collimated or focused, to directly etch or ablate the substrate. More precisely, the pulsed lasers used are, for example, femtosecond lasers which give the possibility of engraving numerous materials by means of the laser-matter interaction mode specific to ultrashort pulses. The ultrashort laser pulses -15 cover a pulse width range from femtosecond (10 -12 s) to picosecond (10 s). It is also possible to use nanosecond lasers considered as "long" pulses.
    [0010] In accordance with Fig. 10, a first surface structure 220 with holes 222 and peripheral rings 224 integral with the substrate 226 and in the same first material has been obtained by a method of the first embodiment in which a Laser radiation is applied to a layer of silica particles of 1 μm in diameter directly deposited on the steel substrate. The laser used is a femtosecond Ti: Sa laser from Bright Raymax LasersTM, wavelength 800nm, maximum power 2.5W, clocked at 5 kHz and Gaussian beam. According to Fig. 11, a second surface structure 230 with holes 232 and peripheral rings 234 in one piece and in the same first material has also been obtained by a method of the first embodiment in which laser radiation is obtained. applied on a layer of silica particles of lpm diameter directly deposited on the substrate 236 made of steel.
    [0011] The laser used here is a picosecond laser with a wavelength of 1064 nm, a maximum power of a few watts, clocked at 1 kHz, and a Gaussian beam. It should be noted that generally after the fourth laser firing step, a residual particle cleaning step is carried out according to one of the many techniques known to date. For example, a conventional method used to remove residual particles is to immerse the substrate in a solvent such as water, ethanol or acetone in the presence of ultrasound for a few minutes. Alternatively and optionally, a passivation layer of the surface structure may be deposited, such as silicon dioxide, silicon nitride by a method of PVD, CVD, sol gel, or printing. According to FIGS. 12 and 13, a second particular embodiment 238 of the general method 202 of FIG. 8 is described, in which the second step 206 is a step 240 which comprises a fifth step 242 and a sixth step 244, executed successively and replacing the third step 208 and the fourth step 210 respectively. The method 238 according to the second embodiment comprises a step of depositing a second material in mono or multilayer on the reference plane of the substrate, executed between the first and second layers. steps 204, 240, the second material having a low emissivity to infrared radiation. In the fifth step 242 a film of lenticular particles is deposited in compact assembly on the flat surface of the second material. The lenticular particles are configured to micro-focus a beam of laser radiation on the layer of the second material and the substrate immediately below. In Figure 13, a single lenticular particle 248 is shown. In the sixth step 244, the lenticular particles are subjected to a pulsed laser flux, configured so that when the micro-focused energy reaches an ablation threshold of the second and first materials, 249, 250, a cavity is formed in the second material and in the substrate at the location of a contact zone 252 of the lenticular particle being accompanied by a rise of the second material forming a ring around the cavity pierced in the substrate. According to FIG. 13, the contact zone 252 decomposes into a first central zone 254 for spraying and vaporizing the first and second materials contained therein, and a second zone 256 for fusing the only second material. Thus, a structured bi or mufti-material structure is obtained directly by the method of laser exposure of the nanoparticle mat 10 as shown in FIG. 13. Thus, with this method a crown and a medium surrounding the cavity are made of different materials. This makes it possible to further optimize the basic structure by choosing, for example, different optical properties for the second upper material and for the first lower material of the substrate. Preferably the upper material will be an infrared reflective metal which will limit the emissivity in the infrared of the structure and thus improve the performance of the absorber. The lower material forming the substrate will be an absorbent material in the visible range.
    [0012] In the aforementioned configurations, the dimensions of the structural element can be adapted by adjusting various parameters such as the nature of the micro-focusing particles of the energy of the laser beam. To adjust the size of the hole and crown, microspheres or microlenses whose shape has been modified, for example by plasma etching, may be used. Figure 14 shows an example of modification of the geometry of spherical silica particles by the action of a CHF3 / 02 plasma. According to FIG. 15, the adaptation of the geometries of the flanges and cavities by the modification of the shape of the microlenses is highlighted. The modification of the focusing makes it possible to adapt the sizes of the ablation zones 264 and the fusion zones 266 and 266. therefore to adapt the size of the cavities and flanges, as well as the spacing between flanges. The laser parameters such as the wavelength, the repetition rate, the pulse width, the polarization, the spatial and temporal shape of the beam, the fluence also make it possible to modulate the geometry of the surface structure. It should be noted that in variants, the cleaning steps, particle spreading, exposure to the laser beam can be performed several times to increase the depth of the holes.
    [0013] Alternatively, it is also possible to attach the particles to the substrate surface by chemical bonds, thereby allowing more power to be drawn and deeper digging.
    权利要求:
    Claims (1)
    [0001]
    CLAIMS1- Textured surface structure for a solar thermal absorber adapted to operate at high temperatures comprising a substrate (4; 84) having a flat or curved surface, made of a first optically reflective material, thermally stable, and having a set of surface elements (12; 92) defining a reference surface (14; 94) and a set of textural elements (8; 88) having the same elementary structure (16; 96) and distributed along the reference surface (14; 94) according to a two-dimensional arrangement, characterized in that the elementary structure (16; 96) of a textural element (8; 88) comprises a cavity (20; 100) formed in the substrate (4; ), having an edge (24; 104) of the same level as the reference surface (14; 94) and a bottom (26; 106), and flaring from the bottom (26; 106) to the edge (24; 104), and a crown (22; 102) protruding from the surface of 20 ference (14; 104) and positioned immediately periphery of the edge (24; 104) of the cavity (20; 100). 2. A surface structure as claimed in claim 1, wherein two adjacent crowns (22; 102) are spaced apart from each other by a gap or touching at a single point, and have a separation distance s greater than or equal to zero. , less than or equal to 500 nm, and preferably less than or equal to 100 nm. 3. Surface structure according to any one of claims 1 and 2, in whichthe elementary structure (26) has a cylindrical symmetry about an axis of symmetry (30) passing through the bottom (26) of the cavity (20). ) and normal to the reference surface (14); and the cavity (20; 100) has a diameter D, considered at the reference surface (14; 94), and a depth H, defined as the distance separating the bottom (26; 106) from the reference surface ( 14; 94), such that a first aspect ratio H / D, defined as the ratio of the depth H to the diameter D of the cavity (20; 100) is strictly greater than one; and, the ring gear (22; 102) has a base width I, defined as the largest width of a radial section of the ring gear (22; 102) being equal to the difference between an outer radius corresponding to the outer contour of the ring and an inner radius corresponding to the inner contour of the ring taken at the reference surface (14; 94), and has a height h, defined as the distance between the reference surface and the largest of a single or more of the crown peaks, the base width I and the height h being such that a second form factor h / l, defined as the ratio of the height to the base width of the crown is strictly greater than a ; and the transverse diameter D, cavity depth H, base width I, crown height h are all less than or equal to 10 μm, preferably 1 μm or more. A surface structure according to claim 3, wherein the profile of a radial section of the cavity (20; 100) is a first plane curve (38) symmetrical about the axis of symmetry (30), the axis of symmetry (30) being positively oriented from the bottom (26; 106) to the reference surface (14; 94) and originating from its point of intersection with the reference surface (14; 94), and the point d intersection of the axis of symmetry (30) with the bottom (26; 106) 30 is a minimum of the first plane curve (38), and the distance separating two symmetrical points of the first plane curve (38) located at the same decreasing level when the corresponding level of symmetrical points decreases. The textured surface structure of claim 4, wherein the first planar curve (38) is a parabola portion or a portion of the envelope of a two-dimensional cone. 6. Textured surface structure according to any one of claims 1 to 5, in which the profile of a radial half-section of the ring (22; 102) in a half radial plane is a second flat curve (50). ) defined by a function of evolution of the level of the crown according to the radius thereof, the function of evolution of the profile of the level of the ring (22; 102) 15 being positive values and defined on a closed interval radii between the inner radius of the ring gear (22; 102) and the outer radius of the ring gear (22; 102), and the value of the level of the ring gear (22; 102) corresponding to the inner radius being equal to zero and the value of the level of the ring 20 corresponding to the outer radius being greater than or equal to zero and less than half the height h; and the evolution function is first increasing on a first subinterval until reaching a level threshold hsew strictly greater than half the height h, then 25 on a second subinterval evolving above the threshold level h until reaching the height of the crown and then evolving until reaching the threshold level hseuil again, then on a third decreasing sub-interval until reaching the level corresponding to the outer radius. A textured surface structure according to any one of claims 1 to 6, wherein the rings (22; 102) are integral with the substrate (4; 84) and made of the same first material. A textured surface structure according to claim 7, comprising a layer (152) of a second material, deposited on all of the cavities (100) and crowns (102), and areas (92) of the surface reference frame (94) of the substrate (4; 84) not covered by the rings (102), Io the second material being composed of one or more layers. A textured surface structure according to any one of claims 1 to 6, wherein the rings (162) consist of a second material different from the first material constituting the substrate. A textured surface structure according to any one of claims 8 to 9, wherein the second material is a material comprised in the group consisting of metals such as tungsten, molybdenum, metal alloys such as steel, antireflection materials such as silicon oxide. 11. Textured surface structure according to any one of claims 1 to 10 wherein the first material is a material included in all refractory metals such as tungsten, molybdenum ..., ceramics such as silicon carbide and alloys such as steel. A textured surface structure according to any one of claims 1 to 11, wherein the arrangement of the textural elements (88) having the same elementary structure (96) according to the reference plane is embodied in the form of a paving elementary arrays (120) of textural elements (88), the elementary arrays (120) having the same mesh configuration comprised in the set formed by the hexagonal mesh, the square mesh, the triangular mesh and being characterized by a degree of compactness of textural elements. A method of manufacturing a textured surface structure for a solar thermal absorber operable at elevated temperatures comprising a first step (204) of providing a substrate having a planar or curved surface made of a first optically material reflective, thermally stable, and having a reference surface, characterized in that it further comprises a second step (206; 210; 240), performed following the first step (204), of making a set of textural elements having the same elementary structure and distributed along the reference surface in a two-dimensional arrangement, the elementary structure of a textural element having a cavity formed in the substrate having an edge of the same level as the reference surface and a bottom, and flaring from the bottom to the edge, and a crown protruding from the reference surface and p ositioned immediately on the periphery of the edge of the cavity. The manufacturing method according to claim 13, wherein the second step (210) comprises the successive steps of in a third step (212) depositing on the smooth surface of the substrate forming the reference surface a film of lenticular particles in compact assembly, the lenticular particles being configured to micro-focus a beam of laser radiation on the substrate, and then, in a fourth step (214) subject the lenticular particles to a pulsed laser flow configured so that when the micro-focused energy attains a threshold of ablation of the first material constituting the substrate, a cavity is formed in the substrate at the location of a contact zone of the lenticular particle being accompanied by a rise of crown material around the cavity. 15. The manufacturing method according to claim 13, comprising a step (246) of deposition of a second mono or multilayer material on the reference surface of the substrate, executed between the first and second steps (204; 240), the second material. having a low emissivity to infrared radiation, and wherein the second step (240) comprises the successive steps of in a fifth step (242) depositing on the flat surface of the second material a film of lenticular particles in a compact assembly, the lenticular particles being configured to micro-focus a beam of laser radiation on the layer of the second material and the substrate immediately below, then, in a sixth step (244) subject the lenticular particles to a pulsed laser flow configured so that when the energy micro-focused reaches a threshold of ablation of the second and first materials, a cavity is for embedded in the second material and in the substrate at the location of a contact zone of the lenticular particle being accompanied by a rise of the second material forming a ring around the cavity pierced in the substrate. 16. The manufacturing method according to any one of claims 14 to 15, wherein the deposition of a compact film of lenticular particles is carried out by a deposition technique included in the set formed by a Langmuir-Blodgett technique, Langmuir-Schaefer and a deposit by spin. 17. A manufacturing method according to any one of claims 14 to 16, wherein the lenticular particles are particles of a dielectric material comprised in the assembly formed by oxides, silica, quartz, polymers such as polystyrene or particles of an electrically conductive material included in the group consisting of gold, silver, silver, stainless steel, lenticular particles have the shape of a sphere or a sphere modified by a chemical, thermal, plasma etching process implemented in an etching step performed between the third and fourth steps, (212,214) or between the fifth and sixth steps (242,244), the sphere diameter being comprised between a few tens of - nm and several tens of microns. 18. A manufacturing method according to any one of claims 14 to 17, wherein the laser beam applied to the particle film is collimated and delivered by pulses ranging from femto-second to nanosecond, preferably ranging from femto-second to the picosecond. 19. A manufacturing method according to any one of claims 14 to 18, comprising a step of cleaning residual lenticular particles performed after the second step (206). 20. A manufacturing method according to any one of claims 13 to 18, comprising a step of depositing a second mono or multilayer material, performed after the second step (206) or the cleaning step.
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    同族专利:
    公开号 | 公开日
    ES2738669T3|2020-01-24|
    WO2015083051A1|2015-06-11|
    EP3077327B1|2019-06-26|
    EP3077327A1|2016-10-12|
    US20160298875A1|2016-10-13|
    FR3014177B1|2019-05-17|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    EP0068776A1|1981-06-29|1983-01-05|Minnesota Mining And Manufacturing Company|Radiation absorbing surfaces|
    WO2003054630A2|2001-12-21|2003-07-03|Austria Wirtschaftsservice Gesellschaft mit beschränkter Haftung|Device and method for modifying the surface of a workpiece using photonic radiation|
    JP2007190604A|2006-01-23|2007-08-02|Keio Gijuku|Working method for reducing friction on sliding surface|
    US20090020924A1|2007-02-21|2009-01-22|Iowa State University Research Foundation, Inc.|Drying-mediated self-assembly of ordered or hierarchically ordered micro- and sub-micro scale structures and their uses as multifunctional materials|
    WO2012057073A1|2010-10-25|2012-05-03|シャープ株式会社|Solar thermal collector member and manufacturing method thereof|
    FR2978688A1|2011-08-02|2013-02-08|Centre Nat Recherche|Structuring substrate that is useful for photonic crystals, by depositing optical convergent elements, transverse to light beam, on surface of substrate, and applying beam on substrate to form cavity, where the elements have dimensions|
    WO2013165014A1|2012-05-01|2013-11-07|デクセリアルズ株式会社|Heat-absorbing material and process for producing same|EP3291283A1|2016-09-05|2018-03-07|Commissariat à l'Energie Atomique et aux Energies Alternatives|Surface for emitting ir infrared radiation with high thermal emissivity and long durability and method for manufacturing same|US5236763A|1990-08-07|1993-08-17|Praxair S. T. Technology, Inc.|Method for engraving solid articles with laser beams and the articles produced|
    DE102012205702B3|2012-04-05|2013-05-23|Schaeffler Technologies AG & Co. KG|Method for marking components|EP3223063A1|2016-03-24|2017-09-27|Thomson Licensing|Device for forming a field intensity pattern in the near zone, from incident electromagnetic waves|
    EP3312660A1|2016-10-21|2018-04-25|Thomson Licensing|Device for forming at least one tilted focused beam in the near zone, from incident electromagnetic waves|
    EP3312646A1|2016-10-21|2018-04-25|Thomson Licensing|Device and method for shielding at least one sub-wavelength-scale object from an incident electromagnetic wave|
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    优先权:
    申请号 | 申请日 | 专利标题
    FR1362104A|FR3014177B1|2013-12-04|2013-12-04|SURFACE STRUCTURE FOR THERMAL SOLAR ABSORBERS AND METHOD FOR PRODUCING THE SAME.|
    FR1362104|2013-12-04|FR1362104A| FR3014177B1|2013-12-04|2013-12-04|SURFACE STRUCTURE FOR THERMAL SOLAR ABSORBERS AND METHOD FOR PRODUCING THE SAME.|
    PCT/IB2014/066420| WO2015083051A1|2013-12-04|2014-11-28|Surface structure for solar heat absorbers and method for the production thereof|
    ES14828294T| ES2738669T3|2013-12-04|2014-11-28|Solar thermal absorber with surface structure and its production procedure|
    US15/100,897| US20160298875A1|2013-12-04|2014-11-28|Surface structure for solar heat absorbers and method for the production thereof|
    EP14828294.0A| EP3077327B1|2013-12-04|2014-11-28|Solar heat absorber with surface structure and method for the production thereof|
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