专利摘要:
Method for the synthesis of nanoparticles, their collection and generation of coatings assisted by laser and electric fields of high intensity. The present invention relates to a method for the synthesis and collection in a single step of nanoparticles of diverse materials, as well as for obtaining coatings thereof on materials with simple or complex geometries, both in controlled atmosphere and in ambient conditions, by medium of the combined application of a laser beam and high intensity electric fields. (Machine-translation by Google Translate, not legally binding)
公开号:ES2689393A1
申请号:ES201730689
申请日:2017-05-12
公开日:2018-11-13
发明作者:Antonio Riveiro Rodríguez;Jesús Del Val García;Mohamed Boutinguiza Larosi;Fernando Lusquiños Rodríguez;Rafael Comesaña Piñeiro;Félix Quintero Martínez;Juan María Pou Saracho
申请人:Universidade de Vigo;
IPC主号:
专利说明:

DESCRIPTION
METHOD FOR THE SYNTHESIS OF NANOPARTICLES, ITS COLLECTION AND GENERATION OF COATINGS ASSISTED BY LASER AND ELECTRIC FIELDS OF ELEVATED INTENSITY 5
OBJECT OF THE INVENTION

The present invention relates to a method for the synthesis and collection in a single step of nanoparticles of diverse materials, as well as optionally for obtaining 10 coatings of these on materials with simple or complex geometries, both in controlled atmosphere and in ambient conditions , by means of the combined application of a laser beam and high intensity electric fields.

By means of this new technique it is possible to adjust the size distribution of nanoparticles 15 by means of the variation of parameters related to the laser, of parameters related to the electric field required in its generation as well as of parameters related to the process atmosphere. In the case of the collection of particles on a substrate material, or with the intention of generating a coating on it, it is not necessary to prepare any type of said substrate material. Finally, the precursor material necessary for its preparation must be in a solid or liquid phase, with no restriction imposed on its shape (although it has been observed that it is preferable to start from materials with cylindrical geometry).
BACKGROUND OF THE INVENTION 25

Particles with nanometric sizes (diameters), approximately 100 nm or less, and commonly designated as nanoparticles, have unique physical or chemical properties, being, in general, very different from those shown by the same material as those that are composed macroscopically. The properties of these materials show a clear influence on both the size and shape of the nanoparticles. Thanks to their small size, they have a high surface ratio with respect to their volume, making their chemical reactivity much greater than in the case of their macroscopic counterpart. In the case of nanoparticles of semiconductor materials (eg CdS or CdSe), also called quantum dots, their optical and electronic properties vary greatly with their diameter.
Since these materials have exceptional properties, they find application in very diverse fields, such as: electronics, optoelectronics, information storage, energy, biomedicine, chemistry, etc. Nanoparticles of very diverse materials can be synthesized using a wide variety of techniques, including physical, chemical, biological and hybrid techniques. All these techniques and methods have their own advantages and disadvantages. Thus, the synthesis of nanoparticles by conventional chemical methods is considered a scalable process for obtaining nanoparticles of diverse nature and in large quantities; However, the chemicals that are used are generally toxic. To solve this problem, an alternative is the synthesis by biological means, using microorganisms, biomolecules or extracts derived from plant sources. However, this approach also has drawbacks, primarily the polydispersity of the nanoparticles formed is a challenge today, as well as the problems arising from the use of certain bacteria and fungi with a marked pathogenic character that can pose a danger from the point of view sanitary. Synthesis methods by physical techniques avoid many of these 15 problems; Thus, through these methods nanoparticles and coatings of these are achieved very quickly, without contamination problems and with a great degree of uniformity in their distribution. The main disadvantage of these methods is that they usually require vacuum systems or equipment for the generation of plasmas which are expensive. twenty

Among the physical methods, laser-based ones stand out, since they are quick and simple methods for the synthesis of nanoparticles compared to other methods, which do not require long reaction times, high temperatures or chemical processes with multiple steps. They also allow to produce nanoparticles of diverse materials, from 25 metal nanoparticles, semiconductors, polymeric, as well as nanoparticles of semiconductor alloys or multiple metal elements. The main laser-based techniques are: a) laser pyrolysis, b) laser ablation, or c) pulsed laser deposition. The laser pyrolysis generates nanoparticles as a result of the condensation of the products generated from the chemical reactions induced by laser during the interaction of a flow of precursors / reagents in the gas phase and a laser beam generally operating in continuous mode. The main problem with this technique is that the precursors / reagents must be exclusively in the gas phase and that one or more of them must have suitable absorption bands to ensure a coupling with the laser radiation used. As for laser ablation, it can be performed in a vacuum, controlled atmosphere, or in a liquid, generating the nanoparticles by ablation
by laser of a solid target that is in a gaseous or liquid environment, followed by its collection as a powder or colloidal solution. The main problems of this technique are that in addition to the nanoparticles fragments of precursor material can be formed during ablation and that vary in size from sub-nanometric to micrometric (these being, therefore, an undesirable byproduct of the process), as well as a fee of 5 reduced production. Finally, pulsed laser deposition uses high energy laser pulses to ablate a material through its fusion, vaporization and ionization, as in laser ablation, but in this case, the precursor material is deposited on a substrate. In addition to the drawbacks of laser ablation, this technique involves the use of vacuum equipment that is expensive. 10

We verify, therefore, that among the main disadvantages of the production processes of laser-based nanoparticles are: their low production rate, need for expensive vacuum systems and equipment, as well as the possibility of simultaneous generation not only of nanoparticles, but also of fragments with different sizes. Therefore, new methods of laser nanoparticle production are necessary to solve some or all of the current limitations of laser nanoparticle production techniques.
DESCRIPTION OF THE INVENTION 20

The present invention presents a new technique based on laser technology for the synthesis of nanoparticles, their collection, as well as optionally controlled deposition of nanoparticle coatings on substrates of metallic and non-metallic materials, which does not require expensive equipment and systems. vacuum, which only produces nanoparticles 25 and which has higher production rates than production techniques based on laser ablation.

This technique involves the vaporization of one or more precursor materials (which / is / are to be in solid or liquid phase) with the desired composition / s of the 30 nanoparticles by means of one or more laser beams, with the power and wavelength required for this purpose. Simultaneously, a high intensity electric field (preferably with a maximum intensity of the order of 106-107 V / m) is generated by establishing a high potential difference (preferably, 5-50 kV) between a metallic conductor (a from now on, called electrode) close (typically, between 1-35 and 15 mm apart) to the vaporized zone in the precursor material, and another conductor
metallic (from now on counter electrode) on which the nanoparticles will be collected or on which a substrate material will be placed for said collection or to generate a controlled deposit of nanoparticles therein. The shapes and sizes of electrode and counter electrode should preferably be that of a pointed rod or tube and a flat plate or plate respectively, although this patent is not restricted to them, provided 5 and when the combinations chosen provide a sufficiently high electric field such as to generate an electric wind in the atmosphere in which the nanoparticles are generated. When the material (s) is vaporized / is a precursor / is by means of the action of the laser beam (or beams), the intense electric field existing at the tip of the electrode will cause the electrical charge of the resulting vapors and the process atmosphere, which will be dragged along the electric field lines to the counter electrode. During their movement, said supersaturated vapors will cool more or less rapidly depending on the velocity of the existing gas stream, condensing and finally giving rise to nanoparticles through nucleation and growth processes. Finally, since said nanoparticles are electrically charged, they will move and deposit the counter electrode, or other material that interposes on their way to it. The continuous application of the present process therefore allows the generation of nanoparticles, their collection as well as, if desired, obtaining coatings of them in metallic and non-metallic substrates that interpose in the path of the nanoparticles towards the counter electrode.
 twenty
The present invention offers, among others, the following advantages:
- The generation rate of nanoparticles is higher than that of processes based on laser ablation since it is based on the vaporization of the precursor material and not on the ablation of a precursor material, a process that generally uses laser beams with very high laser pulses short duration and that ablates the precursor material 25 (ie, removes precursor material) very superficially.
- Since the precursor material must only be vaporized the energy requirements of the process are low (so that laser beams with low average power can be used, as long as their irradiance is sufficient to vaporize a precursor material). 30
- a controlled atmosphere is not necessary, although if necessary it can be controlled.
- the use of vacuum equipment and systems is not necessary.
- both the precursor material and the substrate do not require strict prior preparation. 35
- the precursor material can be fed in various solid or liquid forms (thread, rod, sheet, plate, in powder form, etc.) which does not restrict the type of material.
- The system is easily integrated and automatable to obtain nanoparticles and deposits of these controlled, since by means of the parameters related to the laser beam (which determine the rate of vaporized material), those related to the intensity of the electric field (which determine the process of condensation of the vapors, and therefore the size of the generated nanoparticles, as well as their transport), as well as those related to the atmosphere (nature, pressure, or density) it is possible to control the process.
- Since the formation of the nanoparticles resides in the ionization transport of the vapors of the precursor material and the process atmosphere, the nanoparticles acquire an electric charge.

DESCRIPTION OF THE DRAWINGS
 fifteen
These and other features and advantages of the invention will become more clearly apparent from the detailed description that follows in a preferred embodiment, given only by way of illustrative and non-limiting example, with reference to the accompanying figures. .
 twenty
Figure 1: Scheme of the nanoparticle generation, collection and deposit system according to an embodiment of the invention.

Figure 2: Images obtained by field emission scanning electron microscopy (FESEM) of a SiO2 nanoparticle deposit obtained according to the method of the invention.

Figure 3: Optical images of SiO2 coatings obtained according to the method of the invention, with a square geometric shape (2.5 mm x 2.5 mm), simulated in an area of 35 mm x 35 mm on a transparent sheet of 30 polyester, and generated by interposing a mask with the same geometric shape immediately before the polyester sheet.
DETAILED DESCRIPTION OF A PREFERRED EMBODIMENT OF THE INVENTION

The production of nanoparticles, as well as their collection and optionally deposition on a substrate in order to create layers of nanoparticles on it, can be carried out by a system such as that shown in Fig. 1. 5

In the method of the invention a laser beam (1) is conducted by means of a guidance or focusing system (2), such as optical fiber or mirrors, depending on the type of laser source we use, to the precursor material (4 ) solid or liquid in order to vaporize it. In a particular embodiment the precursor material (4) is in the form of sheet, plate, rod, thread or tape, preferably in the form of thread, more preferably in the form of thread with a diameter of less than 2 mm.

If a continuous production of nanoparticles (14) is desired, we must have a system that establishes a relative movement between the laser beam (1) and the precursor material (4). This relative movement can be carried out by moving the laser beam (1) and the precursor material (4) standing or in reverse, moving the precursor material (4) and the laser beam (1) resting. Examples of mobile system or systems that provide motion relative to the laser beam (1) with respect to the precursor material (4) in step c) include a robot, a coordinate table, or in a combination of both systems. In turn, the substrate material (10), to collect nanoparticles (9) or optionally to cover it, must be located at a certain distance from the previous system (distance that must be greater than that which causes the dielectric breakdown of the atmosphere of process (13)) and on a support that can either be mobile or static with respect to the precursor material (4). The aforementioned mobile systems may consist of a manual or automatic positioning system of any type, which, as it is commonly used in industrial equipment, is not shown in the figure.

This technique requires that the precursor material (4) be vaporized. For this, the laser beam (1) must be focused by means of a focusing system (2) in order to achieve the necessary irradiance to vaporize the precursor material (4). This focusing system (2) can consist of both a pair of mirrors, one of them flat and the other parabolic for example, as in a single lens, a double focus lens or combinations thereof. The targeting system (2) must be selected as the most appropriate depending on the type and power of the laser we are going to use. 35

To carry out the process of generating nanoparticles it is necessary, in addition to the action of a laser beam (1) to vaporize the precursor material (4), a high intensity electric field (preferably with a maximum intensity of the order of 106 -107 V / m), which will generate a transport flow (8) of the vaporized material (6) as a result of ionization of the vapors of the precursor material as well as the atmosphere in which the process is carried out (13 ). To generate such an electric field, a high potential difference will be established, for example between 5 and 50 kV, by means of a high voltage and low current source (preferably, producing direct current and positive or negative output polarity) (7 ) between two conducting electrodes, which we call electrode (5) and counter electrode (11). In a preferred embodiment a potential difference 10 of between 20 and 30 kV is established.

The shape of these will be mainly determined by the need for the establishment of a high intensity electric field (in atmospheric conditions, up to an average intensity of 1-30 kV / cm). Usually, the electrode (5) will be a rod or tube of reduced diameter, of conductive material (preferably a material with a high electrical conductivity such as copper or aluminum), with one of its very pointed ends in both cases. The counter electrode (11) can be a flat conductive plate (preferably a material with a high electrical conductivity such as copper or aluminum), or with the most suitable shape according to the geometric shape of the substrate (10) that is used to collect or to coat with the nanoparticles (9). In a preferred embodiment the geometric shape of the electrode (5) is tubular with one of its sharp ends and the counter electrode (11) is flat.

As a consequence of the intense electric field established between electrode (5) and counter electrode (11), some molecules of the vapors from the vaporized precursor material, as well as the atmosphere in which the process occurs are ionized and accelerated towards the counter electrode to along the electric field lines. The collision of these ionized molecules with other non-ionized ones results in a stream of vaporized material (6) from the precursor material (4) to the counter electrode (11). In order to achieve an effective vapor flow (6), the pointed end of the electrode (5) must be located closely (typically between 1 and 15 mm apart) to the precursor material (4), preferably concentrically ( although this invention is not restricted only to this geometry). In a particular embodiment the electrode (5) is tubular and the precursor material is in the form of a wire, both of which are concentrically located at a distance of between 1 and 15 mm, preferably between 5-10 mm. In this case it will be necessary to use a
rod-shaped precursor material (4), and a tube-shaped electrode (5), the end of the electrode (5) having the precursor material (4) protruding as sharply as possible, in order to achieve The vicinity of this electric field is high enough.
 5
During the movement of the steam from the precursor material (4) irradiated with the focused laser beam (3), from the vicinity of the electrode (5) to the counter electrode (11), nanoparticles (14) are formed as a result of nucleation phenomena homogeneous in the gas phase, as well as its subsequent condensation and coagulation. Said nanoparticles can finally be collected, after being deposited on the same counter electrode (11) or on a substrate material (10) that interposes on its way to the counter electrode (11). The substrate material (10) used to collect the nanoparticles (14) or to be coated can have a geometric shape similar to the geometric shape of the counter electrode (11) used. In a particular embodiment the substrate material (10) used to collect the nanoparticles (14) or on which it is desired to produce the coating of these (9) has a metallic or non-metallic nature. In another particular embodiment the deposition of the nanoparticles (14) is performed on a surface of the substrate material (10) of 50 mm x 50 mm to 100 mm x 100 mm, for separations between the electrode (5) and counter electrode (11) of 5-30 cm, such as 15-30 cm or 5-20 cm, more preferably 5-10 cm. In another particular embodiment the particles are collected in a tip-shaped counter electrode.

Likewise, it is possible to obtain controlled deposits of nanoparticles, that is to say coatings (9), on the substrate material (10) (or even on the counter electrode (11), if this were the case), and with the desired geometric shape, interposing a mask (12) in 25 the path of nanoparticles. Said mask (12) must be located close (typically, at a distance of less than 1 mm) to the surface to be coated, in case you want to obtain a geometric shape with a sharp contour.

The final size of the nanoparticles depends primarily on the vaporization rate 30 of the precursor material (4), as well as the rate at which the vapors (6) from the precursor material (4) irradiated by the laser beam are cooled and condensed focused (3). Therefore, we can control the final size distribution of the nanoparticles by means of the parameters that control the vaporization rate (mainly: laser beam power, laser beam focusing, relative speed between laser beam or precursor material, 35 although it is not restricts these only; other parameters such as beam work mode
continuous / pulsed laser, pulse length, duty cycle, etc. can also be modified), as well as those that control the rate of cooling / condensation of the vapors and that are fundamentally related to the intensity of the vapor current between the electrode and counter electrode (fundamentally: distance, voltage and geometric shape of electrode - against electrode (5) - (11), nature, density and pressure of the atmosphere (13) in which the process takes place among others).

This process can be carried out in atmospheres (13) of gases of different nature. For example, the atmosphere (13) in which the process is carried out may consist of Ar, He, Ne, N2, CO2, air, O2 or derived mixtures. Depending on the type of gas used, its density or pressure, the drag rate of the vaporized material as a result of the electric field may differ significantly. To control the atmosphere used, the process area will be enclosed within an enclosure that avoids contamination by contact with the outside of it. The mentioned control systems, being commonly used in industrial equipment, are not shown in Fig. 1. 15

The most suitable atmosphere (13) will be selected depending on the type of nanoparticles that are to be obtained; for example, in the case of seeking the formation of nanoparticles of oxides (such as SiO2, ZnO, ZrO2, TiO2, or Al2O3, among others), oxygen-rich atmospheres will preferably be used, while in the case of seeking formation 20 of nanoparticles of pure elements (such as Au, Ag, Pt, or Fe among others), inert atmospheres with the vapors of said elements will be used.

This method of obtaining nanoparticles (9) is not restricted to the use of a single precursor material. A single precursor material (4) (metallic or non-metallic) can be vaporized with the desired composition of the nanoparticles to be obtained, as well as several precursor materials (4) simultaneously using one of several laser beams. The only restriction that is imposed is that the area vaporized by the focused laser beam (3) must be in the vicinity of the pointed area of the electrode (5), typically at a distance between 1 and 15 mm. When the different precursor materials are vaporized, their vapors will be mixed during entrainment and nanoparticles will be formed with a mixture composition of these.

The laser source that generates the laser beam necessary to vaporize the precursor material (4) can come from a laser device of any wavelength such as, for example, a CO2, CO, N2, Nd: YAG laser , from Nd: YVO4, from Er: YAG, from Nd: glass,
of Yb: YAG; Ruby, HeNe, HeCd, HeHg, Cu, I, Ar, Kr, diode, fiber, disk, chemical, excimer, alexandrite, emerald or dye. However, said laser source must emit a laser beam with an appropriate wavelength so that the energy of this laser beam (1) is efficiently absorbed by the precursor material (4) and vaporized. Due to their optical properties, most of the 5 insulating precursor materials essentially absorb laser radiation in the far UV and infrared region of the electromagnetic spectrum, while metallic precursor materials absorb UV laser radiation better. The power required for this type of lasers must be sufficient so that the laser beam (1) emitted, once concentrated by means of the focusing system, is capable of vaporizing the precursor material 10. Therefore, the power needed will be determined by the thermophysical properties of the material: specific heats, and latent heats of fusion and evaporation. In a particular embodiment, the power supplied by the laser beam is between 100 and 2000 W, such as between 700 and 1200 W.
 fifteen
Examples

The method of the present invention has been used to produce SiO2 nanoparticles as well as to create coatings thereof, in a controlled manner on 100 µm thick polyester substrates, without these suffering any chemical or shape alteration. twenty

The precursor material used was pure silica in the form of wire, with a diameter of 0.6 mm, and commonly used in optical fibers. The laser source used to vaporize it was a CO2 laser (since the radiation it emits is strongly absorbed by silica) working continuously and supplying between 200-300 W of average power of the laser beam. The laser beam was focused between 10-20 mm below the surface of the precursor material by means of a ZnSe lens with a focal length of 190 mm.

In order to generate the vapor current to the counter electrode, a steel needle with an outside diameter of 1.6 mm was used as an electrode, and one of its ends 30 pointed. A rectangular copper plate with dimensions of 205 mm x 120 mm was used as a counter electrode. The precursor material was concentrically fed to said needle (which is hollow internally). Between the electrode and counter electrode potential differences were established between 20-30 kV. The distance between the electrode and counter electrode was adjusted to 15-30 cm and both were positioned approximately perpendicularly (as shown schematically in the
Fig. 1). The establishment of said conditions between electrode and counter electrode results in the material vaporized by the laser beam being transported to the counter electrode as a result of the ionization of process vapors and atmosphere and its interaction with the existing electric field.
 5
In this case, the nanoparticle generation process was carried out under standard atmospheric conditions (i.e. atmospheric pressure, temperature 20 ° C and relative humidity 30-60%), since the nanoparticles that were intended to be obtained were SiO2.

Using the above process conditions, SiO2 nanoparticles were obtained as shown in Fig. 2, determining an atomic percentage of Si of 34.71% and 65.29% by means of X-ray energy dispersion spectrometry (EDS). for the O and not detecting other elements. This corresponds to a Si / O ratio of 0.53, thus confirming that the nanoparticles are composed of SiO2.
 fifteen
Using identical conditions, silica nanoparticles were deposited in a controlled manner on transparent sheets of polyester. In Fig. 3 we collect an example of such deposits. Deposition occurred in an area of 35 mm x 35 mm with deposits of 2.5 mm x 2.5 mm square geometric shape, interposing a mask with the same geometric shape immediately before the transparent polyester sheet. twenty

Once the nature of the present invention has been sufficiently described, as well as a way of putting it into practice, it only remains to be added that, as a whole and its component parts, it is possible to introduce changes in shape, materials and arrangement as long as said alterations substantially vary said invention. 25
权利要求:
Claims (16)
[1]

1.- Method for the synthesis of nanoparticles, their collection and optionally their controlled deposit on surfaces, characterized in that the following operational phases are established:
a) positioning of a solid or liquid precursor material (4), optionally said positioning taking place in a system connected to a position control equipment of said precursor material (4) that allows relative movement with respect to a laser beam (1 ),
b) focusing of the laser beam (1) by means of a suitable targeting system (2) 10 to generate a focused laser beam (3) on the precursor material (4),
c) vaporization of the surface of precursor material irradiated by the focused laser beam (3), said focused laser beam (3) being stationary or provided with a relative movement with respect to the precursor material (4),
d) establishment of a potential difference in a range between 5 and 50 15 kV between an electrode (5) and a counter electrode (11), the electrode being located at a distance between 1 and 15 mm apart from the area of vaporized material (6),
e) entrainment of the vaporized material through its ionization and that of the atmosphere (13) in which the process is carried out,
f) nucleation and condensation of the vaporized material during transport from the electrode (5) to the counter electrode (11), leading to the formation of nanoparticles (14),
g) optionally, interposition of a mask (12) in the path of the flow of nanoparticles (14) in case it is desired to produce a coating of 25 nanoparticles (9) with a determined geometric shape on the counter electrode (11) or on a substrate material (10) that interposes in the path of the flow of nanoparticles (14) towards the counter electrode (11), and
h) collection or deposition of the nanoparticles (9) to produce a coating on the surface of the counter electrode (11) or the substrate material (10). 30

[2]
2. Method according to claim 1, wherein the deposition of the nanoparticles (14) in step h) is performed on a surface of the substrate material (10) from 50 mm x 50 mm to 100 mm x 100 mm, for separations between electrode (5) and counter electrode (11) of 5-30 cm. 35

[3]
3. Method according to claim 1 or 2, in which a precursor material (4) is used with the desired final composition of the nanoparticles (9, 14) or several precursor materials (4) which together have the desired final composition of the nanoparticles (9, 14).
 5
[4]
4. Method according to claims 1 to 3, in which the precursor material (4) is in the form of sheet, plate, rod, thread or tape, preferably in the form of thread.

[5]
5. Method according to any of claims 1 to 4, in which the power supplied by the laser beam (1) is between 100 and 2000 W. 10

[6]
6. Method according to any of claims 1 to 5, wherein the laser beam focusing system (2) consists of a pair of mirrors, one of them flat and the other parabolic.
 fifteen
[7]
7. Method according to any of claims 1 to 5, wherein the laser beam focusing system (2) consists of a single lens, a double focus lens or a set of lenses.

[8]
8. Method according to any of claims 1 to 7, in which the atmosphere 20 (13) in which the process is carried out is constituted by Ar, He, Ne, N2, CO2, air, O2 or derived mixtures.

[9]
9. Method according to any of claims 1 to 8, wherein the mobile system or systems for providing movement relative to the laser beam (1) with respect to the precursor material (4) in step c) consists of a robot, in a coordinate table, or in a combination of both systems.

[10]
10. Method according to any of claims 1 to 9, in which the laser beam (1) comes from a CO2, CO, N2, Nd: YAG, Nd: YVO4, Er: laser: YAG, of 30 Nd: Glass, of Yb: YAG; Ruby, HeNe, HeCd, HeHg, Cu, I, Ar, Kr, diode, fiber, disk, chemical, excimer, alexandrite, emerald or dye.

[11]
11. Method according to any of claims 1 to 10, in which the vaporized material (6) and the atmosphere in which the process is generated (13) are ionized by means of the
establishment of a potential difference between 20-30 kV between electrode (5) and counter electrode (11).

[12]
12. Method according to any of claims 1 to 11, in which the geometric shape of the electrode (5) is tubular with one of its sharp ends and the counter electrode 5 (11) is flat.

[13]
13. Method according to any of claims 1 to 12, in which the electrode (5) is tubular and the precursor material is in the form of a wire, both being concentrically located at a distance of between 1 and 15 mm. 10

[14]
14. Method according to any of claims 1 to 13, in which the substrate material (10) used to collect the nanoparticles (14) or to be coated has a geometric shape similar to the geometric shape of the counter electrode (11) used.
 fifteen
[15]
15. Method according to any of claims 1 to 14, in which the substrate material (10) used to collect the nanoparticles (14) or on which it is desired to produce the coating of these (9) has a metallic nature or not metallic

[16]
16. Method according to any of claims 1 to 15 in which the 20 generated nanoparticles (14) acquire an electric charge.
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同族专利:
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WO2018206836A1|2018-11-15|
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ES2689393B2|2019-05-24|
US11148945B2|2021-10-19|
引用文献:
公开号 | 申请日 | 公开日 | 申请人 | 专利标题

US5316636A|1992-08-12|1994-05-31|The Regents Of The University Of California|Production of fullerenes by electron beam evaporation|
US6368406B1|2000-09-13|2002-04-09|Chrysalis Technologies Incorporated|Nanocrystalline intermetallic powders made by laser evaporation|
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ES201730689A|ES2689393B2|2017-05-12|2017-05-12|METHOD FOR THE SYNTHESIS OF NANOPARTICLES, COLLECTION AND GENERATION OF COATINGS ASSISTED BY LASER AND ELECTRIC FIELDS OF HIGH INTENSITY|ES201730689A| ES2689393B2|2017-05-12|2017-05-12|METHOD FOR THE SYNTHESIS OF NANOPARTICLES, COLLECTION AND GENERATION OF COATINGS ASSISTED BY LASER AND ELECTRIC FIELDS OF HIGH INTENSITY|
US16/612,901| US11148945B2|2017-05-12|2018-05-11|Method assisted by a laser and high-intensity electric fields for the synthesis and collection of nanoparticles and the generation of coatings|
PCT/ES2018/070349| WO2018206836A1|2017-05-12|2018-05-11|Method assisted by a laser and high-intensity electric fields for the synthesis and collection of nanoparticles and the generation of coatings|
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