Optoelectronic device and methods for determining optical parameters of a lens or a lens system (Mac

专利摘要:
Optoelectronic device and methods for determining optical parameters of a lens or a lens system. The present invention relates to an optoelectronic device for determining optical parameters of a lens, a lens system or an optical imaging system 5, such as the position of the main planes and the focal planes and the focal distances, and to methods to determine these parameters. The device comprises a collimation element 2, a diffraction network 4 of known period p, a detection system 6, which may be a matrix of linear or two-dimensional photodetectors ccd or cmos, one or more data processing elements 7 and a displacement device 8, for example a linear motor, for moving the detection system 6 along the optical axis of the device. The lens, lens system or incognito image-forming optical system 5 is placed between the diffraction grating 4 and the detection system 6. (Machine-translation by Google Translate, not legally binding)
公开号:ES2600503A1
申请号:ES201600605
申请日:2016-07-21
公开日:2017-02-09
发明作者:Luis Miguel SÁNCHEZ BREA；Francisco José TORCAL MILLA
申请人:Universidad Complutense de Madrid；
IPC主号:

专利说明:

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DESCRIPTION
Optoelectronic device and methods for determining optical parameters of a lens or lens system.
Technology Sector
The present invention falls within the Optical Technology sector and more specifically in the Optoelectronic Devices sector.
State of the art
Within the optical applications, one of the most important parameters for the characterization of lenses or optical systems is the focal length, defined as the distance between the main plane of the lens or optical system and the focal plane. Its precise knowledge is of crucial importance in many applications, especially when optical systems are used in metrological applications.
There are simple and well-known methods to determine approximately the focal length of a lens or an optical system. One of them is the method of self-collimation, in which the transverse dimensions of a beam of light are compared at different distances from the light source. It is concluded that the beam is collimated when these dimensions are equal to all distances from the source. This technique can be implemented visually and can also be automated through the use of an optoelectronic element.
On the other hand, interferometric techniques are among the most accurate for determining the focal length of a lens or an optical system, having been known for several decades [D. Malacara, ed., Optical Shop Testing (Wiley, New York, 1978)].
Other methods are based on deflectometrla moire using two diffraction networks and analyzing the moire strips produced after the second network when the light beam converges through them: Y. Nakano, K. Murata, Talbot interferometry for measuring the focal length of a lens, Applied Optics 24 (1985) 3162-3166; K. M. Keren, E. Kreske, and O. Kafri, Universal method for determining the focal length of optical systems by moire deflectometry, Applied Optics 27 (8) (1998) 1383-1389.
In the reference S. Lee, Talbot interferometry for measuring the focal length of a lens without moire fringes, Journal of the Optical Society of Korea 19 (2015) 165-168, we propose a method with a unique diffraction network consisting of measuring the resulting spatial frequencies in the focal plane of the lens under analysis and compare them with the spatial frequencies of the diffraction network itself.
In reference J.-J. Wu, J.-B. Chen, A.-C. Xu, X.-Y. Gao, S. Zhuang, Focal length measurement based on hartmann-shack principie, Optik-International Journal for Light and Electron Optics 123 (6) (2012) 485-488, the authors use a Hartmann-Shack sensor to determine the focal plane of the lens under study, measuring the displacement of the various foci of the sensor with respect to its nominal position and extracting from these measurements the vergence of the light beam and therefore the position of the focal plane.
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Likewise, it is possible to determine the focal length of a lens by measuring the period variation of the autoimagens with respect to the distance between them along the optical axis [M. Tebaldi, G. Forte, R. Torroba, N. Bolognini, A. Tagliaferri. Selfimaging pitch variation applied to focal length digital measurements. Optics Communications 250 (2005) 10-15). The advantage of using the self-images of a diffraction network to determine the optical parameters of a lens or lens system is that the slits that form it are located in a very precise way, with minimum uncertainties of up to 3 nm in the positioning, since that high precision photolithographic techniques are used for engraving.
Moreover, in H Wu, J Yang, L Qiu, W Zhao. Measuring the lens focal length by laser confocal technique. Proc. of SPIE Vol. 8916 89161E-1 (2013), a confocal laser technique is proposed to determine the focal length of a lens where it is shown that the expanded uncertainty can reach up to 0.002%.
In addition, in the patent application US 2011/0149273 A1 entitled "Method and system for measuring a focal length of an optical lens", a system for measuring the focal length of a lens consisting of an image processing device and An operation platform. The method is to move the image processing system along the optical axis by storing the size of the focused light beam. Thus the focal plane is determined as the one in which the light beam has the smallest transverse size.
Patent ES-2393518 T3, entitled "Device and procedure for detecting the focal position of an optical system and ophthalmological treatment device", refers to a device and a method for detecting the focal position of an optical system. In particular, the invention relates to a device and a method for detecting the focal depth of an optical imaging system and, in addition, also to a device and a method for controlling the focal position and, in particular, the focal depth. . For this, the invention provides a device for detecting the focal position of an optical system with a source of illumination, a focusing imaging system, a surface at least partially reflective in the focus, a suitable digital sensor system (for example, a CCD camera, a CMOS camera or the like) to record an image reflected by the aforementioned surface, a computer to process the image registered by the camera and an optical element in the ray path of the optical system, before the formation system of Focusing images, which influences the cited image depending on the focal position.
However, new devices and new methods are still necessary to easily measure the optical parameters of lenses and lens systems with greater precision.
Detailed description of the invention
Optoelectronic device and methods for determining optical parameters of a lens or lens system
The present invention relates to an optoelectronic device that allows measuring the optical parameters of a lens, lens system or optical imaging system. In this specification, "optical parameters" means the position of the main planes, the position of the focal planes and the focal length, which is the
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distance between the focal pianos and the respective main pianos. It is understood by "beam of light" or. simply, "make" any type of light beam and laser beam. "Optical system" means a lens or set of refractive, diffractive lenses or a mixture of both.
An outline of the optical parameters that can be determined with this invention for a lens or lens system is shown in Figure 1. Here the main planes H and H '(for each side of the system) are shown, focal planes F and F '. and the focal distances f and f ’. It is necessary to consider that the described parameters are not invariant, but depend on the wavelength, since in many cases, the systems are not acromatices. On the other hand, if the medium is the same on both sides of the lens. lens system or optical imaging system, f and f 'are equal, f = f'.
A scheme of the device of the invention is shown in Figure 1. By means of a collimation system 2, collimating a beam from a light source 1, a collimated beam of light 3 is obtained. To measure the optical parameters, herein The invention uses a diffraction network 4. When the light propagates through the diffraction network, due to diffractive effects, self-images are generated at various distances from it. If A is the average wavelength of the light beam, and p is the period of the diffraction network that modulates the amplitude of said wave, the generated autoimagens are located at multiple integer or semi-integer distances of the Talbot distance zT = 2p2 / A. Said autoimagens, which have a period identical to the diffraction network 4, cross the optical system or incognita optical system 5, whose optical parameters are to be determined, and this structured light converges or diverges depending on the incognito optical system. The distribution of light intensity is captured in different positions following the optical system along the optical axis through a detection system 6, which is usually an array of photodetectors such as a CMOS or CCD camera. Finally, the data is processed by one or several data processing elements 7 for the processing of the signals received by the detection system 6, such as an electronic board or a computer. A displacement device 8, such as a linear motor, is also necessary to displace the detection system 6 which serves to capture the distribution of light intensity.
In the reference M. Tebaldi, G Forte, R. Torroba, N. Bolognini, A. Tagliaferri. Self-imaging pitch variation applied to focal length digital measurements. Optics Communications 250 (2005) 10-15, describes a system that uses a collimated beam and a diffraction network of period p to measure only the focal length of the lens. For this purpose, the distance between two auto-images is determined on the one hand and, on the other, the period of the auto-images after the light that crosses the lens whose focal distance is to be determined, which can be convergent or divergent, affects a diffraction network. In the present invention the device shown by Tebaldi et al. Is modified, improving it. On the one hand, the position is exchanged between the diffraction network and the incognita optical system. This change is very significant because, in this way, it is possible to know more parameters of the incognite optical system, such as the position of the main planes and the focal planes, in addition to the focal length.
On the other hand, a different and more precise method of data analysis is proposed. With all this, it is possible to obtain the parameters with an uncertainty of up to an order of magnitude smaller than in the work of Tebaldi et al. Instead of measuring only in two positions of self-images, in the present invention it can be measured in one
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multiplicity of positions so that a greater number of experimental data is obtained. For this, the device of the invention includes a displacement device as well as a detection system that can be constituted by linear or two-dimensional arrays of photodetectors. In this way you can obtain a linear interpolation to the experimental data and also determine the confidence intervals in the estimation, with which you can analyze the uncertainty committed in the calculation of the optical parameters.
One aspect of the present invention thus relates to a device for determining the optical parameters of an optical system composed of a lens or lens system comprising:
- a light source 1, preferably monochromatic, which can be laser,
- a collimation system 2, which generates a collimated beam 3,
- a diffraction network 4, of known period p,
- a detection system 6,
- one or more data processing elements 7.
- a displacement device 8, to move the detection system 6 along the optical axis,
where the optical system of which you want to determine the parameters or incognita optical system 5, is located between the diffraction network 4 and the detection system 6, along the optical axis.
From the electronic point of view, the fastest configuration for data processing is to locate a linear array of photodetectors as a detection system 6. However, it is also possible to use a camera formed by a two-dimensional distribution of photodetectors, such as a camera CCD or a CMOS camera. Among the elements for data processing 7 an electronic board, a microprocessor or a computer can be selected. On the other hand, the displacement device 8 can be a linear motor or a manual positioner.
Another aspect of the invention relates to an optical method for determining the optical parameters of a lens or a lens system or an optical imaging system. A collimation system 2 generates a collimated beam 3, preferably monochromatic. Mathematically, this collimated beam can be described by a flat wave that, when propagated along the optical axis of the lens turns out to be U (z) = U0e'k z. This flat wave affects a diffraction network 4 of period p so that, considering the thin element approximation, it validates when the period of the network is greater than the wavelength, the transmittance of the network results
image 1
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where n are integers, an are the Fourier coefficients of the diffraction network, x is the lateral coordinate perpendicular to the optical axis and parallel to the diffraction network and q = 2n / p. The field, just after crossing the diffraction network 4, z = 0, turns out to be
image2
The intensity distribution, after the light crosses the diffraction network 4, is determined by the Fresnel approximation, resulting
image3
This integral can be solved easily, resulting
image4
where zT = 2p2 / A is the distance of Talbot and U’0 is a constant that collects all parameters not dependent on the position. This distribution indicates that the field, after crossing the diffraction network 4, presents autoimagenes. As the beam of light is collimated, the self-images formed have a period identical to that of the diffraction network. Subsequently, this field crosses the incognita 5 optical system, whose transmittance is described as
image5
where f is the focal length of the incognita optical system 5. The field propagated after crossing said incognita optical system 5 results U4 (x, z) = U3 (x, z) L (x). Next, the field in positions subsequent to the incognita 5 optical system (that is, after the light beam crosses the incognita 5 optical system) is recalculated by Fresnel propagation
lr4 {x, z) = —e
ikz
I U3 (0e '*


(Ec. 6)
This integral is solved in a simple way obtaining
U4 (x, z) = UoY ^ ane ~ '^ e - ’* $ fhl {nqz-2kx).
(Ec. 7)
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On a plane perpendicular to the optical axis of the system is a detection system that is able to obtain, not the field, but the optical intensity or irradiance,
image6
being * the complex conjugate value of the field. Using the value of Eq. 8, it is obtained that the distribution of optical intensity results
image7
where I0 is a parameter that collects all the parameters that do not affect the period or form of the self-images. The summation accounts for the different harmonics present in the intensity distribution. The first exponential term accounts for the period of self-images at a certain distance z. This period turns out to be
image8
(Ec. 10)
where p is the period of the diffraction network 4 and p 'is the period of the self-image. Focal length has a positive sign for converging lenses and a negative sign for diverging lenses, so the period decreases for converging lenses or lens systems (f> 0) and increases for divergent lenses or lens systems (f <0) . When the system is afocal, we understand that f ^ «, and then the period of the self-images is equal to the period of the diffraction network used. In Figure 2, the example of intensity distribution according to Eq. 9 for a converging lens is shown.
In the present invention it is required to measure the period of the autoimagens in various positions z. Aqul z refers to the distance to the main plane since, when z = 0, the period of the self-image is equal to the period of the diffraction network 4. However, the value of the distances is not known with respect to the main plane, but it is referenced to another coordinate system, such as that of the displacement device 8 that moves the detection system 6, and which, preferably, is an array of photodetectors. Therefore, the mathematical relationship used turns out to be
image9
where zC is an unknown value.
(Ec. 11)
To determine the position of the main plane we have to take various experimental data of the relationship position z '= z - zC versus the period of the self-image at that distance, p'. According to Eq. 10 this relationship is linear. To determine the position of the main plane H ', the position z' is sought where the period of the self-image is equal to the period of the diffraction network 4, p '= p. To determine the position of the focal plane F, the position z 'is searched where the period of the self-image is equal to 0, p' = 0.
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Therefore, another aspect of the invention relates to a method for determining the position of the main plane H and / or the main plane H 'of a lens, a lens system or an incognito optical imaging system 5 that includes the following steps:
a- obtain the constant zC by placing a detection system 6 at the vertex of the lens, the lens system or the optical imaging system incognita 5;
b- move the detection system 6 along the optical axis, separating it from the lens, the lens system or the incognite optical imaging system 5;
c- capture a number n of auto-images generated by a collimated beam of light 3 that crosses a diffraction network 4 of known period p and then crosses the lens, the lens system or the incognito optical imaging system 5 whose main plane H or H 'it is desired to know;
d- obtain the intensity profile of each of the n autoimagens by integrating the image parallel to the slits of the diffraction network 4;
e- determine the period p 'of each of the n autoimagens obtained at each distance Z between the detection system 6 and the lens vertex, the lens system or the incognito optical imaging system 5 closest to the system of detection 6;
f- perform the linear interpolation of the data obtained in step e- as a function of z ';
g- determine the distance Z between the detection system 6 and the lens vertex, the lens system or the incognito optical imaging system 5 closest to the detection system 6, for which the period p of the self image is equal to the period p of the diffraction network 4, that is, p = p, and calculate the uncertainty given by the linear interpolation.
The vertex of the lens, the lens system or the incognita optical imaging system 5 is the point of its central axis through which the optical axis of the assembly passes into which the collimated beam of light 3 is integrated.
It is of interest in this method that the number of self-images n is always greater than 2. On the other hand, the collimated beam of light 3 of step c- is preferably monochromatic.
The determination of the period p described in step e- of this method is preferably performed by the variogram function and according to the equation 2y = ([/ (* + A) - / (*)]:> x, a Linear interpolation of the variogram rhymes: x = np and a linear interpolation of the periods obtained as a function of the distance z ', p = a Z + b, where (> represents the average value, n is the order of the r variogram, x is the coordinate parallel to the stripes, / is the periodic series obtained and h is the distance between pixels of the detection system.
The invention also relates to a method for determining the position of the focal planes F and / or F 'of a lens, a lens system or an incognite optical imaging system 5, which includes the following steps:
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a- determine the constant zC by placing a detection system 6 on the lens vertex, the lens system or the incognite optical imaging system 5, which, as already indicated, is the point of the central axis of the lens, the lens system or the optical imaging system through which the optical axis of the set passes;
b- move the detection system 6 along the optical axis, separating it from the lens, the lens system or the incognite optical imaging system 5;
c- capture a number n> 2 of autoimagens generated by a collimated beam of light 3, preferably monochromatic, that crosses a diffraction network 4 of known period p and then crosses the lens, the lens system or the optical system Incognita 5 imager whose focal plane F or F 'is to be known;
d- obtain the intensity profile of each of the n autoimagens by integrating the image parallel to the slits of the diffraction network 4;
e- determine the period p of each of the n self-images obtained at each distance Z between the detection system 6 and the lens vertex, the lens system or the incognito optical imaging system 5 closest to the detection system 6;
f- perform the linear interpolation of the data obtained in step e- as a function of z ';
g- determine the distance z 'between the detection system 6 and the lens vertex, the lens system or the incognito optical imaging system 5 closest to the detection system 6, for which the period p' of the Autoimage is 0, that is, p = 0, and calculate the uncertainty given by linear interpolation.
The determination of the period p 'of step e-is preferably carried out by the variogram function r according to the equation 2y = {[i (x + A) - / (x)] 2> x, a linear interpolation of the last variogram: x = np and a linear interpolation of the periods obtained as a function of the distance Z, p = a Z + b, where {) represents the average value, n is the order of the variogram rhymes, x is the parallel coordinate at the fringes, / is the periodic signal obtained and h is the distance between pixels of the detection system.
In addition, the invention relates to a method for determining the focal length f and / or the focal length f 'of a lens, a lens system or an optical imaging system 5 that includes the following steps:
a- determine the position of the main plane H or H 'as described in this
b- determine the position of the focal plane F or F 'as described herein;
c- determine the distance between the main plane H or H 'obtained in step a- and the focal plane F or F' obtained in step b-, and calculate the uncertainty as propagation of errors of the main plane and focal plane.
Brief description of the Figures
Figure 1. It shows, schematically, the basic configuration of the device to measure the optical parameters of an optical system: light source 1, collimation system 2, collimated beam 3, diffraction network 4, lens or incognito optical system 5 of the That
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they want to obtain the optical parameters, detection system 6, data processing elements 7 and displacement device 8 for the precise movement of the detection system 6. H and H 'are the main anterior and posterior planes of the incognita optical system 5, F and F 'are the anterior and posterior focal planes, and f and f are the anterior and posterior focal distances.
Figure 2. Example of intensity distribution after crossing the optical system incognita 5, calculated using Eq. 9.
Figure 3. The experimental intensity distribution is shown after crossing the incognite optical system 5 for the case of a Newport model KPX223 convergent lens when the illumination source used 1 is a 670 nanometer wavelength fiber optic pigmented laser diode.
Figure 4. In Figure 4a, the experimental intensity profile of Figure 3 is shown for a certain distance Z = 27.5 mm, where the detection system 6 is located and, in Figure 4b, the variogram is shown for said position. In Figure 4b, the continuous line represents the variogram calculated as described in example 1, the calculations represent the data of the squared minimum adjustment, the continuous line represents the determined values of the variogram and the stars represent the position of the minimum intensity obtained with the method of example 1. An amplification of the image is also shown for better observation.
Figure 5. The experimental relationship between the period and the distance is shown for the example of Figure 3. The stars represent the experimental period obtained for each of the Z positions. The solid line represents the linear interpolation of these experimental data. The horizontal dashed lines represent the positions p '= 0 and p' = 105 micrometers used to obtain the position of the focal plane and the main plane, respectively. An amplification of the image is also shown for better observation. In the amplification, the dashed lines represent the confidence interval used for the calculation of the positioning error.
Figure 6. The residues, R, (continuous line) and confidence interval (broken line) associated with linear interpolation are shown for the example of Figure 5.
Figure 7. The intensity distribution is shown after crossing the lens for a divergent lens model KPC076 of Newport, whose nominal focal length is -100 mm and whose nominal error is ± 1%.
Figure 8. The experimental relationship between the period and the distance is shown for the example of Figure 7. The stars represent the experimental period obtained for each of the detection positions of the photodetector array along z '. The continuous line represents the linear adjustment of these experimental data extrapolated to the interval between p '= 0 and p' = 105 micrometers. The horizontal dashed lines represent the positions p '= 0 and p' = 105 micrometers used to obtain the position of the focal plane and the main plane, respectively. Two amplifications of the image are also shown for better observation. In amplification (a) the dashed lines represent the confidence interval used for the calculation of the positioning error. In amplification (b) the stars represent the experimental period obtained for each of the detection positions of the photodetector array along z '.
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Mode of realization of the invention
Once the geometry of the system and the measurement process have been defined, examples of devices for measuring the optical parameters of an optical system, a lens system or a lens, such as its main planes, focal planes and focal distances, are presented below.
The examples have been made with a single lens. In the case of a lens system or optical imaging systems with two or more lenses, the tests will be carried out in the same way, but the lens system or the optical system will be considered as a unit element and the measurements will be taken on the two sides of the system, that is to say, impacting with the light beam on one side or the other of the system, without varying the distance or relative position between the different elements of the lens system.
Example 1. Measurement of the optical parameters of a converging lens.
A device was manufactured to measure the optical parameters of a converging lens. As a source of illumination 1, a 670 nanometer wavelength fiber optic pigmented laser diode was used and subsequently collimated by means of a collimating lens as collimation system 2.
A 4 diffraction network of amplitude was used, of chrome slits on glass with a period p = 105 micrometers.
The lens that was measured is the Newport KPX223 model, which has a diameter of 76.2 millimeters and a nominal focal length, given by the manufacturer, f = +100 millimeters, with an uncertainty in the focal length of ± 1 millimeter ( one %).
As detection system 6 of the autoimagenes we use a CMOS camera model UI-1492LE from IDS, whose pixel size is 1.67 x 1.67 micrometers.
For the movement of the camera, so that they could be measured at various levels, a motorized system, model M-500-PS of the firm PI, was used as a displacement device 8.
For the treatment of the data obtained, a Matlab-based computer program was used on a PC, as a data processing element 7. This program was also used to synchronize the movement of the motorized system with the image captures.
To obtain an absolute position in relation to the lens (constant zC), the camera was approached until it came to touch the vertex of the lens, that is, the point of the lens through which the optical axis of the device passes. In this way the coordinate system of the motorized system was converted to the reference system of the lens, by means of the zC value, subtracting it from the value of z given by the motorized system. From here the camera moved along the optical axis, separating it from the lens, and an image was captured for each selected distance. To obtain the intensity distribution of the self-image, the pixels were added by vertical columns parallel to the strips of the self-image. In this way, Figure 3 was obtained, showing the intensity distribution captured by the camera in different planes, in a quasi-continuous capture of planes.
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Once the intensity distribution in various observation pianos was obtained, the period of the autoimagenes was determined. For this, there are numerous methods such as: the determination of the positions of the intensity mm, adjustments to predefined periodic or pseudo-periodic functions, etc. For the particular case of this invention, we consider that the period of the strips is independent of the lateral position x. The variogram function was used to filter the light signals and accurately determine the positions of the intensity mm (LM Sanchez-Brea et al. Self-imaging technique for beam collimation. Optics Letters 39 (19) 5764-5767, 2014. ). For the intensity distribution at each of the distances, the variogram was obtained and, from this variogram, the millimeters were determined in order to be able to measure the period of the autoimagenes. The mmimos were calculated by a parabolic adjustment around each of the millimograms of the variogram. As an example, a profile is shown in Figure 4a and the corresponding variogram obtained in Figure 4b. For this particular case, each mm was adjusted to a parabolic function. The period value was determined by a linear interpolation of the order of the minimum and its position on the ordinate axis, x = np '. This procedure was performed for all distances measured with the camera. Figure 5 shows the experimental data obtained from the relationship period of the self-image, p ', with respect to the position z'. These experimental data are represented by stars, and an amplification of a small area has been made to observe the experimental data in detail. The experimental data fit a straight line of the type p '= a z + b. For this particular case the result was p '= -1.056 z' + 63.83 (continuous line). In linear interpolation the confidence interval can also be obtained (PR. Bevington, and DK Robinson. Data reduction and error analysis. McGraw-Hill, New York (2003).), Which has been represented in Figure 5 by two lines discontinuous around linear interpolation in the case of a coverage factor of 64% (k = 1).
Figure 6 shows the confidence interval in the measurement of the period of the autoimagens for the area where experimental measurements (discontinuous lines) and the residues were made, R, that is, the difference between the experimental positions and those obtained by linear interpolation. It is observed that the maximum difference of the residues in this interval was approximately ± 0.15 micrometers.
To determine the position of the main plane H, we take the linear interpolation performed p '= a z + b and determine the position z' for which the period of the self-image was equal to the period of the network (p1 = p = 105 micrometers). In this way, we obtained that said position is -38.97 millimeters. To calculate the uncertainty in the positioning of the main plane, we use the confidence interval. For the position z = -38.97 millimeters, the value of the confidence interval is 0.07 micrometers, so that the error in the positioning is 0.066 millimeters.
To determine the position of the focal plane F we take the linear adjustment made p '= az + b, and determine the position z' for which the period of the self-image was p '= 0. In this way we obtained that said position is +60.41 millimeters In this case, the positioning error is 0.065 millimeters.
For the determination of the focal length, we obtained the distance between the focal plane and the main plane. In this way, we obtained that f = HF = + 99.38 millimeters, with an error of 0.184 millimeters, calculated by propagation of errors.
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To calculate the optical parameters on the opposite side of the lens, the process was repeated once the lens was turned in the device, so that the faces of the lens that were close to the diffraction network 4 and the system were exchanged of detection 6. The positions turned out to be H = -1.7 millimeters and F = + 97.85 millimeters, respectively. Thus, it turned out that f = HF = +99.55 millimeters with an error of 0.092 millimeters in the positioning.
With the calculation of the focal length object fo focal length image f ', obtained from the measurements made on the two faces of the lens, which are ideally the same, f = f', we can obtain an average value that indicates the focal length of the lens. In this case, it turned out to be medium = 99.45 millimeters. The difference in focal distances for each of the faces was -0.09 millimeters and +0.09 millimeters, respectively. This experimental value is very similar to the error estimated by the coverage factor (less than 0.1 millimeters), which corresponds to an uncertainty of 0.1%, improving in an order of magnitude the uncertainty given by the lens manufacturer.
The error in the positioning of the main and focal planes can be obtained from the two functions of the confidence interval so that we consider the error as Az = a x Ap ', where A means error. For the data obtained with the graph of Figure 5 it is obtained that AH = 0.066 millimeters and AF = 0.065 millimeters. By propagation of errors, the focal length error calculated as f = HF results in Af = V (AH2 + AF2) = 0.092 millimeters.
As a summary, Table 1 shows the values calculated for the different optical parameters.
Table 1. Results obtained in Example 1.
Side 1 Side 2
 fnominal  H F f fmedio 5f Af Af / f
 (mm) (mm) (mm) (mm) (mm) (mm) (mm)  (%)
 +100  -38.97 60.41 +99.38 -0.09 ± 0.092 0.092
 +99.45
 +100  -1.7 97.85 +99.55 +0.09 ± 0.072 0.072
When measuring both sides (anterior and posterior) of the optical system, the focal length must be the same in both cases, provided that the refraction index on both sides is the same. As the best parameter for the focal length, the average value can be taken, which in this particular case is average = + 99.45 millimeters. The difference in focal distances, 5f, for each of the faces with respect to the average turns out to be -0.09 millimeters and +0.09 millimeters respectively. This value is very similar to that obtained through the confidence intervals associated with linear interpolation, which turn out to be Af = ± 0.092 millimeters and Af = ± 0.072 millimeters, respectively.
In this way, it can be concluded that the uncertainty in the estimation of the optical parameters for this example is Af / f = 0.09% of the focal length of the lens.
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Example 2. Measurement of the optical parameters of a divergent lens.
A device was manufactured to calculate the optical parameters of a divergent lens. As a source of illumination, a 670 nanometer 1 wavelength fiber optic pigmented laser diode was used, collimated by means of a collimating element 2.
A diffraction network of amplitude of chrome slits on glass with a period p = 105 micrometers was used.
The lens whose parameters are to be calculated was the Newport KPC076 model, which has a diameter of 50.8 millimeters and a nominal focal length f = -100 millimeters, with an uncertainty in the focal length of ± 1 millimeter (1%).
As detection system 6 or array of photodetectors, a CMOS camera model UI-1492LE of the IDS firm whose pixel size is 1.67 x 1.67 micrometers was used.
For the movement of the camera so that autoimagens could be detected at different distances from the incognito lens, a motorized system, model M-500-PS of the signature PI was used.
For the treatment of the collected data, a Matlab-based computer program was used on a PC, as a data processing element 7. This computer program was also used to synchronize the movement of the motorized system with the image captures.
To obtain an absolute position in relation to the lens, the camera was approached until it reached the surface of the lens at the outer point of the lens through which the optical axis of the system passes, obtaining the value of the constant zC. Thus. The coordinate system of the motorized system could be converted to the reference system of the lens, using the zC value, subtracting it from the value of z given by the motorized system. From here the camera moved along the optical axis, separating it from the lens, and an image was captured for each selected distance. To obtain the intensity profile of the self-image, the pixels were added by vertical columns parallel to the strips of the self-image. In this way, Figure 7 was obtained showing the intensity distribution captured by the camera in various planes, in a quasi-continuous capture of planes.
As in the previous example, we use the variogram function to accurately determine the positions of the minimum intensity. For the intensity profile at each distance the variogram was obtained and, from this variogram, the minimum intensity was determined in order to be able to measure the period of the autoimagenes. For this particular case, each minimum adjusted to a quadratic function. The period value was determined by a linear interpolation of the order of the minimum and the position of the minimum in the ordinates, x = np '. This procedure was performed for all distances measured with the camera. In Figure 8, the experimental data obtained from the self-image period relationship, p ', with respect to the z' position is shown. These experimental data are represented by stars, and an amplification of a small area has been made to observe the experimental data in detail. The experimental data fit a straight line of the type p '= a z' + b, where a is the slope of the line and b is the independent term. For this particular case, the result was p '= 1,048 z' + 133.98 (continuous line). In linear interpolation you can also
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Obtain the confidence interval, which is represented in Figure 8 by two dashed lines around the adjustment in the case of a coverage factor of 64% (k = 1).
To determine the position of the main plane H, we take the linear adjustment made p '= a Z + b, and determine the position z' for which the period of the self-image was equal to the period of the network (p '= p = 105 micrometers) In this way, we obtained that said position is -27.65 millimeters. To calculate the uncertainty in the positioning of the main plane, we use the confidence interval. For the position z '= -27.65 millimeters, the value of the confidence interval is 0.04 micrometers, so that the positioning error is 0.038 millimeters.
To determine the position of the focal plane F we took the linear adjustment made p '= a Z + b, and we determined the position Z for which the period of the self-image was 0. In this way, we obtained that said position was -127.81 millimeters, with an error in the positioning of 0.050 millimeters.
For the determination of the focal length, we obtained the distance between the focal plane and the main plane. In this way, we obtained that f = HF = -100.16 millimeters.
To calculate the optical parameters on the opposite side of the lens, the process was repeated once the lens was turned, exchanging the faces that were in front of the diffraction network 4 and in front of the detection system 6. The positions turned out to be H = -17.98 millimeters and F = -118.27 millimeters, respectively. In this way, it turned out that f = HF = -100.29 millimeters.
With the calculation of the focal length object fo focal length image f ', obtained from the measurements made on the two faces of the lens, which are ideally the same, f = f', we can obtain an average value that indicates the focal length of the lens. In this case it turned out to be f = -100.23 millimeters. The difference in focal distances for each of the faces was -0.07 millimeters and +0.07 millimeters, respectively. This experimental value is very similar to the error estimated by the coverage factor (less than 0.1 millimeters), which corresponds to an uncertainty of 0.1%, improving in an order of magnitude the uncertainty given by the lens manufacturer.
The error in the positioning of the main and focal planes can be obtained from the two functions of the confidence interval so that we consider the error as Az = a x Ap ', where A means error. For the data obtained with the graph of Figure 8, it is obtained that AH = 0.038 millimeters and AF = 0.050 millimeters. The uncertainty propagated for the focal length is 0.062 millimeters
As a summary, Table 2 shows the values calculated for the different optical parameters.
Table 2. Results obtained in Example 2.
Side 1 Side 2
 fnomlnal  H F fmedio 6f Af Af / f
 (mm) (mm) (mm)  (mm) (mm) (mm) (mm) (%)
 -100  -27.65 -127.81 -100.16 -0.07 ± 0.062 0.062
 -100.23
 -100  -17.98 -118.27 -100.29 +0.07 ± 0.064 0.064
Taking as the best parameter for the focal length the average value, in this case it is average = -100.23 millimeters. The difference of the focal distances, 5f, for each 5 one of the faces with respect to the average turns out to be -0.07 millimeters and +0.07 millimeters, respectively. This value is very similar to that obtained through the confidence intervals associated with linear interpolation, which turn out to be Af = ± 0.062 millimeters and Af = ± 0.064 millimeters, respectively.
10 Thus, it can be concluded that the uncertainty in the estimation of the optical parameters for this example is Af = 0.06% of the focal length of the lens.

权利要求:
Claims (14)
[1]
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1. Optoelectronic device for determining the optical parameters of a lens, a lens system or an incognita 5 optical imaging system that includes:
- a light source 1;
- a collimation system 2;
- a diffraction network 4 of known period p;
- a detection system 6;
- a displacement device 8 to move the detection system 6 along the optical axis of the device;
- one or more data processing elements 7;
where the different elements are located in the given order, along the optical axis of the device, and the lens, lens system or incognito optical imaging system 5 is located between the diffraction network 4 and the detection system 6, along the optical axis of the device.
[2]
2. Optoelectronic device according to revindication 1 in which the light source 1 is a laser.
[3]
3. Optoelectronic device according to any one of claims 1-2 wherein the lens system or the incognita optical imaging system 5 includes refractive and / or diffractive lenses.
[4]
4. Optoelectronic device according to any one of claims 1-3 wherein the detection system 6 is an array of linear or two-dimensional echo or photodetectors
[5]
5. Optoelectronic device according to any of claims 1-4 wherein the displacement device 8 is a linear motor.
[6]
6. Optoelectronic device according to any of claims 1-4 wherein the displacement device 8 is a manual positioner.
[7]
7. Optoelectronic device according to any of claims 1-6 wherein the data processing element 7 is a computer, a processor board or a microprocessor.
[8]
8. Method for determining the position of one of the main planes H or H 'of a lens, a lens system or an optical imaging system that includes the following steps:
a- obtain the constant zC by placing a detection system 6 on the lens vertex, the lens system or the incognite optical imaging system 5, the vertex being the point of the central axis of the lens, the lens system or the optical imaging system through which the optical axis of the set passes;
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b- move the detection system 6 along the optical axis, separating it from the lens, the lens system or the incognite optical imaging system 5;
c- capture a number n of auto-images generated by a collimated beam of light 3 that crosses a diffraction network 4 of known period p and then crosses the lens, the lens system or the incognito optical imaging system 5 whose main plane H or H 'it is desired to know;
d- obtain the intensity profile of each of the n autoimagens by integrating the image parallel to the slits of the diffraction network 4;
e- determine the period p of each of the n self-images obtained at each distance Z between the detection system 6 and the lens vertex, the lens system or the incognito optical imaging system 5 closest to the detection system 6;
f- perform the linear interpolation of the data obtained in step e-;
g- determine the distance Z between the detection system 6 and the lens vertex, the lens system or the incognito optical imaging system 5 closest to the detection system 6, for which the period p of the self image is equal to the period p of the diffraction network 4, that is, p = p, and calculate the uncertainty given by the linear interpolation;
where n> 2
[9]
9. Method for determining the position of one of the main planes H or H 'of a lens, a lens system or an incognito optical imaging system 5, according to revindication 8, in which the collimated beam of light 3 of the step c- is monochromatic.
[10]
10. Method for determining the position of one of the main planes H or H 'of a lens, a lens system or an optical imaging system 5, according to any of claims 8-9, wherein the determination of the period p 'of step e-is carried out by the variogram function and according to equation 2 y = ([/ (* + A) - / (*)]:> x, and a linear interpolation of the variogram rhymes: x = np 'and a linear interpolation of the periods obtained as a function of the distance Z, p = a Z + b, where (> represents the average value, n is the order of the variogram rhymes, x is the coordinate parallel to the stripes , / is the periodic serial obtained and h is the distance between pixels of the detection system.
[11]
11. Method for determining the position of one of the focal planes F or F 'of a lens, a lens system or an optical imaging system 5, which includes the following steps:
a- determine the constant zC by placing a detection system 6 in the lens vertex, the lens system or the incognite optical imaging system 5, the vertex being the center point of the lens, the lens system or the optical imaging system through which the optical axis of the set passes;
b- move the detection system 6 along the optical axis, separating it from the lens, the lens system or the incognite optical imaging system 5;
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c- capture a number n of auto-images generated by a collimated beam of light 3 that crosses a diffraction network 4 of known period p and then crosses the lens, the lens system or the incognito optical imaging system 5 whose focal plane F or F 'it is desired to know;
d- obtain the intensity profile of each of the n autoimagens by integrating the image parallel to the slits of the diffraction network 4;
e- determine the period p 'of each of the n autoimagens obtained at each distance z between the detection system 6 and the lens vertex, the lens system or the incognito optical imaging system 5 closest to the system of detection 6;
f- perform the linear interpolation of the data obtained in step e-;
g- determine the distance z 'between the detection system 6 and the lens vertex, the lens system or the incognito optical imaging system 5 closest to the detection system 6, for which the period p' of the autoimage is 0, that is, p '= 0, and calculate the uncertainty given by linear interpolation;
where n> 2.
[12]
12. Method for determining the position of one of the focal planes F or F 'of a lens, a lens system or an incognito optical imaging system 5, according to revindication 11, in which the collimated beam of light 3 of the step c- is monochromatic.
[13]
13. Method for determining the position of one of the focal planes F or F 'of a lens, a lens system or an incognito optical imaging system 5, according to any of claims 11-12, wherein the determination of the period p 'of step e- is performed using the variogram function and according to the equation 2y = ([/ (* + fr) - / (*)]:> x, a linear interpolation of the variogram minima: x = np' and a linear interpolation of the periods obtained as a function of the distance z ', p' = az '+ b, where () represents the mean value, n is the order of the minimum of the variogram, x is the coordinate parallel to the stripes , I is the periodic signal obtained and h is the distance between pixels of the detection system.
[14]
14. Method for determining the focal length f or f 'of a lens, a lens system or an incognito optical imaging system 5 that includes the following steps:
a- determining the position of the main plane H or H 'according to any of claims 7-9;
b- determining the position of the focal plane F or F 'according to any of claims 10-12;
c- determine the distance between the main plane H or H 'obtained in step a- and the focal plane F or F' obtained in step b-, and calculate the uncertainty as propagation of errors of the main plane and focal plane.

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引用文献:

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EP0418054A2|1989-09-13|1991-03-20|Matsushita Electric Industrial Co., Ltd.|Apparatus for evaluating a lens|

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WO2006115292A1|2005-04-25|2006-11-02|Canon Kabushiki Kaisha|Measuring apparatus, exposure apparatus and method, and device manufacturing method|

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US20130157202A1|2011-12-15|2013-06-20|Canon Kabushiki Kaisha|Apparatus, method, and talbot interferometer for calculating aberration of test optical system|

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US20150146214A1|2013-11-28|2015-05-28|Canon Kabushiki Kaisha|Optical performance measurement apparatus of test optical element and its control unit|CN107063037A|2017-03-30|2017-08-18|淮阴工学院|The sub-millimeter accuracy chi of horizontal displacement is determined based on collimation line method|

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