• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
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    • 专利摘要:
    An apparatus (100) for testing electronic components for their response to nuclear particle radiation. The device comprises an irradiation bell which is designed to be slipped over an electronic component (1) of the assembly, excluding a section (21) of an electronic assembly (20), thereby forming an evacuatable irradiation chamber (111). The irradiation bell has a compressible seal (112) on its edge to be placed on. A particle radiation source for nuclear particles is arranged inside the irradiation bell. The device also includes a port (130) for connection to a vacuum pump. A method for testing at least one electronic component (1) of an electronic assembly (20) is also disclosed.
    公开号:CH714238B1
    申请号:CH00993/18
    申请日:2018-08-15
    公开日:2022-01-14
    发明作者:Daniel Christian
    申请人:Airbus Defence & Space Gmbh；
    IPC主号:
    专利说明:

    The invention relates to a device and a method for testing electronic components.
    [0002] Electronic components of various application areas (such as for use in a space project) usually have to be tested for their reaction to nuclear particle radiation (protons, heavy ions). This is particularly necessary for those components which, as commercial or industrial components, were not specially designed for the respective environment. The type and frequency of errors then determines the possible use and any necessary protective measures.
    Such radiation tests with protons or heavy ions can be carried out, for example, in physical accelerator laboratories that can provide such high-energy nuclear particle beams. However, this is very complex because it involves using a complex, large and very expensive machine that usually has to be operated by several people.
    [0004] For a simple radiation test, however, lower energies are often sufficient than can be achieved with such accelerators. In this way, a circuit can be irradiated with nuclear particles with an effort that is significantly reduced compared to tests carried out in accelerator laboratories.
    A radiation source that is set up or suitable for emitting nuclear particles is also referred to below as a “particle radiation source” or simply as a “radiation source” for short. It can, for example, comprise<252>Californium or<141>Americium: The first-mentioned material<252>Californium emits heavy ions with energies of around 75 MeV (megaelectronvolts) and 105 MeV through spontaneous decay. The second <141>americium emits alpha rays with energies of 5.5 MeV. In this way, enough electrical charge can be generated to cause an effect in the electronic component that is relevant for the test.
    Since the nuclear particles are already slowed down so much by air that they reach the chip surface - if at all - only with insufficient energy, tests that include irradiation with heavy nuclear particles are usually carried out in a vacuum chamber that contains an assembly with an electronic circuit and contains the above-mentioned particle radiation source and is connected to the rest of the supply and measuring apparatus via several vacuum bushings. Such a device includes, for example, the so-called "Californium-252 Assessment of Single-event Effects" (CASE) from ESTEC in Noordwijk (Netherlands) a large glass bell, which is placed on a sealing plate and over the radiation source held by a mounting arm and a carrier plate is put over, on which the assembly is arranged with the circuit. The circuit is connected to a power source and a suitable measuring device by means of sealed electrical feedthroughs.
    In order to test and irradiate another component (which, for example, may be outside the pivoting range of the radiation source or may belong to another assembly), the bell jar must generally be removed so that the circuit to be tested can be exchanged or repositioned relative to the radiation source. The vacuum is first released and then generated again for the testing of the other component, which, due to the size of the bell jar, requires time, control, energy and costs.
    The present invention is based on the object of providing a technique with which the effort involved in testing electrical components for their reaction to nuclear particle radiation can be simplified.
    The object is achieved by a device according to claim 1 and a method according to claim 10. Advantageous embodiments are disclosed in the dependent claims, the description and the figures.
    A device according to the invention is intended for use in testing one or more electronic components of an electronic assembly. An electronic component to be tested can, for example, be attached directly or in a housing to a printed circuit board of the electronic assembly, for example plugged onto it and/or soldered onto it.
    The device comprises an irradiation bell, inside which a radiation source for nuclear particles is arranged; In this document, the “inside” of the irradiation bell is understood to mean the space under the irradiation bell, which is therefore covered by the irradiation bell. The particles that the particle radiation source is set up to emit can include, for example, helium nuclei (α rays) and/or those fission ions that are heavier than helium nuclei. The particle radiation source can contain, for example, <252>Californium or <141>Americium.
    The irradiation bell is set up to be slipped over the respective component to be tested, excluding a section of the electronic assembly (for example a section of the printed circuit board on which the electronic component can be attached); the particle radiation source is then preferably directed at the component. The irradiation bell has a compressible seal on its edge that is to be put on (when putting it on).
    In this way, the device is set up to, together with the electronic assembly (e.g. together with an associated printed circuit board and/or possibly one or more other component(s) such as a housing section of the electronic component and/or a separate adapter element for Compensation for unevenness on the printed circuit board) to form an evacuable (outwardly sealed) irradiation chamber inside the irradiation bell, i.e. to enclose it. This contains the component to be tested, whereas the excluded section of the electronic assembly, which can in particular include a further electronic component, is arranged outside the irradiation chamber.
    [0014] The device further comprises a connection which is designed or intended to be connected to a vacuum pump, for example by means of a hose. The irradiation chamber can then be evacuated with the vacuum pump. The connection can be set up, for example, to be connected to a hose leading to the vacuum pump.
    The electronic component to be tested can be irradiated in the irradiation chamber. Its reaction can then be measured, for example, by means of a measuring apparatus (which can include a power connection) that is preferably connected to the electronic assembly (e.g. the printed circuit board).
    A method according to the invention serves to test at least one electronic component of an electronic assembly. In this case, an evacuatable irradiation chamber is formed by placing an irradiation bell over the electronic component, excluding a section of the electronic assembly (for example a section of an associated printed circuit board); the irradiation bell preferably has a compressible seal on its edge that is or is to be placed on. This can be placed on at least one element of the assembly, for example on a circuit board on which the electronic component to be tested can be attached, on a housing section of the electronic component and/or on one or more other components (e.g. adjacent to the component). /n such as, in particular, an adapter element to compensate for unevenness (eg on the circuit board or on a housing of the electronic component). The irradiation chamber with the component to be tested located therein can be limited in particular by the printed circuit board and/or the further component(s); the excluded section of the electronic assembly is arranged outside the irradiation chamber. In particular, it can be slipped over in such a way that at least one further electronic component, which can be attached (preferably soldered) to the printed circuit board, is outside the irradiation chamber.
    The method also includes evacuating the irradiation chamber by means of a vacuum pump connected to a connection of the irradiation bell. The electronic component is then irradiated with nuclear particles from a particle radiation source arranged inside the irradiation bell (preferably with helium nuclei (α-radiation) and/or those fission ions that are heavier than helium), and at least one function of the irradiated electronic component becomes measured.
    In particular, a method according to the invention can be carried out with a device according to the invention according to one of the embodiments disclosed in this document.
    A part of the electronic assembly, for example a/the associated printed circuit board itself and/or one or more components on the printed circuit board, thus serves as an edge surface of the irradiation chamber in a device according to the invention or a method according to the invention. The/a compressible seal enables the irradiation chamber to be evacuated in spite of elements that may be located on the printed circuit board and the uneven (non-smooth) structure resulting therefrom.
    A device according to the invention and a method according to the invention enable a correspondingly small dimensioning of the irradiation chamber and thus only a small expenditure of time and energy when generating the vacuum. In particular, a device according to the invention is preferably designed as a hand-held device.
    The size of the irradiation bell is/is preferably selected to match the radiation source used and the size of the test area, so that in particular the particle radiation source can be accommodated in the irradiation bell and a lower opening of the irradiation bell is preferably larger than the surface of the electronic component to be examined.
    The irradiation bell or the irradiation chamber can, for example, have an internal volume that is at most 125 ml or at most 50 ml, at most 6 ml or even at most 1 ml and/or at least 0.5 ml, at least 1 ml or at least 2 ml or at least 5 ml. The device can thus be easily moved between different components to be tested and is also suitable for easy transport (in which the particle radiation source is preferably transported separately in a specially closed, shielded container intended for transport).
    According to an advantageous embodiment, an outer shape of the irradiation bell is essentially prismatic, rotationally symmetrical or rotationally symmetrical; a height of a corresponding prism or an axis of rotation or rotation preferably runs in an intended radiation direction of the particle radiation source. In particular, the outer shape of the irradiation bell can essentially be designed as a straight or oblique prism, in the shape of a truncated cone or as a circular cylinder.
    [0024] The seal on the edge of the irradiation bell to be fitted can be designed, for example, as an annular bead. According to an advantageous embodiment, it borders an opening, the diameter of which (in an unloaded, i.e. not compressed or deformed by pressure state of the seal 112) is preferably at least 1 cm or at least 1.5 cm or at least 2 cm and/or at most 5 cm or at most 3, 5cm or at most 2cm. In this document, the “diameter” of the opening is to be understood as the largest occurring distance between two points on the boundary G of the opening. In mathematical terms, D:=max{d(x,y): x, y ∈ G}, where d(x,y) denotes the Euclidean distance of the points x, y. In this document, this diameter is also referred to as the “internal diameter” of the irradiation bell.
    The seal can have an inner boundary (that is, a boundary toward the opening) that runs, for example, along an ellipse (in particular a circle) or a (preferably regular) polygon, in particular a triangle, rectangle, hexagon or octagon can.
    [0026] According to special exemplary embodiments, the edge of the irradiation bell that is to be placed on surrounds an area of at least 2 cm 2 or at least 5 cm 2 or even 20 cm 2 .
    The irradiation bell can be composed of one piece or of several elements such as layers (particularly plates and/or rings), which can be glued or screwed together, for example. One or more sealing elements such as an O-ring can be arranged between individual elements. In particular, the compressible seal can be glued or welded to an overlying layer of the radiation bell. An embodiment variant with a replaceable seal is advantageous, in which this is connected to another element (e.g. a layer) of the irradiation bell in a positive, non-positive and/or frictional manner. In particular, an edge of the seal can be inserted into a groove in another element of the radiation bell.
    Due to the compressibility of the seal, the irradiation chamber can be securely sealed even with irregularities on the surface on which it is placed, so that a vacuum can be generated therein. Such irregularities may result, for example, from a conductive trace, one or more adjacent component(s), and/or a transition to an additional component such as a separate adapter element; Such an adapter element can in turn be arranged (and part of the device) to compensate for unevenness on the printed circuit board or on a housing of the respective electronic component between the seal on the edge of the irradiation bell and the printed circuit board.
    According to a preferred embodiment, the compressible seal is elastically compressible, so that after using the device or performing the method, in particular after removing the irradiation bell from the printed circuit board (at least substantially), it resumes its original shape. In this way, the device can easily be slipped over another component with a different environmental profile, or the method can be carried out again.
    Preferably, the compressible seal includes at least one elastomer. In particular, the compressible seal can comprise a soft rubber. According to a special embodiment, the compressible seal consists entirely or partially of a closed-cell (or closed-pore) foam rubber.
    According to an advantageous embodiment, the compressible seal has a thickness of at least 3 mm or at least 5 mm and/or at most 10 mm or at most 7 mm in the unloaded state; the thickness is measured in an intended placement direction, in particular preferably perpendicular to an assembly (or a printed circuit board belonging to it) on which the irradiation bell is set up to be placed or which includes the electronic component to be tested.
    The connection of the device for connection to a vacuum pump can preferably comprise a tube that leads through a wall of the irradiation bell. In particular, such a small tube can run through the seal: this enables the device to be produced in a particularly simple manner.
    According to an advantageous embodiment of the present invention, the particle radiation source is arranged on a carrier circuit board, which separates the radiation chamber (which can be substantially rotationally or at least rotationally symmetrical) from an evacuation chamber inside the radiation bell. In such an embodiment, one or more passages in the carrier board connect(s) the evacuation chamber and the irradiation chamber to one another. The connection for connecting to the vacuum pump is attached to the evacuation chamber, so that the irradiation chamber can be or is evacuated through the evacuation chamber.
    This configuration offers the advantage that irradiation or a nuclear particle flow caused by this is possible without being influenced by the connection to the vacuum pump or by the suction flow. In addition, the carrier board acts as a shield, with which a propagation of the nuclear particles emitted by the particle radiation source can be ensured (preferably only) towards the electronic component. Nuclear particles radiated backwards are slowed down and absorbed by the carrier plate, so that there is no danger to a person operating the device or carrying out the method.
    Alternatively, the connection to the vacuum pump (e.g. a small tube as mentioned above) can, for example, lead directly from the irradiation chamber to the outside of the irradiation bell.
    One embodiment of the method can include lifting the irradiation bell from the irradiated electronic component (which is then also referred to here as a “first” electronic component) after measuring the function and putting the irradiation bell over another electronic component, which in particular belong to the same assembly (for example, be arranged on the same printed circuit board (eg attached, in particular soldered)) as the previously measured electronic component; preferably the slipping over the (first) electronic component takes place to the exclusion of the further electronic component and/or the slipping over the further electronic component takes place to the exclusion of the previously measured component. When slipping over the additional electronic component, the seal of the irradiation bell is preferably placed on a printed circuit board and/or on one or more other components (e.g. adjacent to the additional electronic component) of the assembly. The further electronic component can then be tested analogously by evacuating the irradiation chamber, irradiating with nuclear particles and measuring a function.
    An electronic component to be tested in a method according to the invention or with an apparatus according to the invention can, for example, be part of a circuit which is intended for use in a space project, in particular in an experimental setup provided in space. For example, it can comprise a resistor, a diode, a transistor and/or at least part of an integrated semiconductor circuit (a chip, in particular a silicon chip) with such components.
    The electronic component can be at least partially enclosed in a housing and/or covered with a protective layer or seal. Before being slipped over the (first) electronic component and/or over the further electronic component, the electronic component can be exposed, for example by removing the material (e.g. plastic) covering the electronic component. In particular, a protective layer or seal and/or part of a housing (e.g. a cover of the electronic component) can be removed, e.g. etched away. As a result, a meaningful measurement (and thus testing) of the electronic component can be carried out even with relatively low radiation energy.
    The nuclear particles emitted by the particle radiation source as decay or fission ions are often electrically positively charged, so not all nuclear charges are then neutralized by a completely saturated electron shell. These ions can be deflected in a magnetic and/or electric field. Embodiment variants of the present invention are therefore advantageous in which a particle or ion beam can be influenced by means of magnets, for example deflected and/or focused or defocused.
    For this purpose, the irradiation bell can comprise one or more radially magnetized permanent magnets, which at least partially surround(s) a provided flow path for nuclear particles emitted by the particle radiation source. Alternatively or additionally, the irradiation bell can comprise one or more axially magnetized permanent magnets, which at least partially surrounds a flow path provided for nuclear particles radiated by the particle radiation source. Such a permanent magnet can in each case be designed, for example, as a ring magnet
    According to an advantageous embodiment variant of the present invention, the irradiation bell comprises at least one electromagnetic coil (i.e. a coil made of an electrical conductor) which is connected to a power source or is designed to be connected to a power source in order to form an electromagnet. The at least one coil at least partially surrounds an intended flow path for electrically charged nuclear particles emitted by the particle radiation source. The device can include a (preferably dynamically adjustable) current source for connection to the electrical coil, so that the current can be changed and the particle flow can thus be manipulated during the irradiation or between two irradiations; the device is therefore particularly versatile. An embodiment of the method may accordingly include changing the current applied to the at least one electrical coil; during or after the change, the function of a further function of the irradiated component can be measured.
    The at least one coil can be divided into several (for example two or three) sub-coils which have different (abstract geometric) winding axes. For example, the winding axes can intersect at a point which preferably lies on a central axis of the device running in the intended main radiation direction of the particle radiation source. A variant is particularly advantageous in which the winding axes of the partial coils are rotated relative to one another (about a central axis of the device), for example by 90° (in particular with two partial coils) or by 120° (in particular with three partial coils). This allows, on the one hand, a focusing of the nuclear particles by applying a continuous and equal current in all coils, and on the other hand, a lateral deflection of the particle beam by applying currents of different strengths in the partial coils. In particular, the direction of the focused beam of electrically charged nuclear particles can be changed over the electronic component to be irradiated or tested.
    An embodiment of the method may include changing a current applied to the coil(s) after measuring the function of the irradiated electronic device. The irradiation of the component with the particle radiation source can be continued or interrupted and resumed, and a (possibly additional) function of the component can be measured in each case.
    In particular, an embodiment of the method that is carried out with a device (as mentioned above) that has a plurality of partial coils with different winding axes can comprise two measurements, wherein in one of the measurements a continuous and equal current is applied in all coils and in the other of the measurements (before or after) different currents are applied in the partial coils.
    An embodiment of a device according to the invention is advantageous in which the irradiation bell is assembled or assembled in a modular, detachable manner, ie consists of several individual parts which are or can be detachably connected to one another. The irradiation bell is preferably set up to optionally include a different number (e.g. optionally from 0 to 2 or from 1 to 3) of permanent magnets and/or coils, which then at least partially surround an intended flow path for nuclear particles emitted by the particle radiation source. In particular, preferably no, one or more permanent magnets in the irradiation bell and/or none, one or more coils (e.g. stacked and/or twisted against one another) can preferably be used as required. Thus, different magnetic flux densities can be brought about with the device, that is to say the irradiation conditions under which the electronic components are tested can be varied.
    According to a preferred development, an embodiment of the method includes changing the number of permanent magnets and/or coils accordingly. The irradiation bell with the changed number of permanent magnets and/or coils can then be put back over the electronic component to be tested or over another electronic component to be tested, the associated irradiation chamber can preferably be evacuated and the respective component can be irradiated with the particle radiation source. In this way, the function or a further function of the electronic or of the further electronic component can be measured.
    According to an advantageous embodiment, the device comprises, in addition to at least one permanent magnet and/or at least one electric coil, a magnetic yoke made of a ferromagnetic material (e.g. iron or an iron alloy or a ferrite material), which has at least one permanent magnet or the at least preferably at least partially surrounds a coil. In particular, such a magnetic yoke can have a larger inner diameter than the at least one permanent magnet or the at least one coil. As a result, a distorted magnetic field can be formed, the strength of which is particularly high in an (envisaged) irradiation area of the particle radiation source.
    [0048] Such a magnetic yoke can be designed, for example, in the form of a clamp with which several layers or plies of the irradiation bell can be held together. In particular, it can be formed from a spring material so that it can be easily removed or installed. The spring material is preferably ferromagnetic or ferrimagnetic without remanent magnetization, so that it has a high magnetic permeability. In particular in an embodiment in which the irradiation bell, as mentioned above, can be assembled or is assembled in a modular, detachable manner, such a magnetic yoke made of a (e.g. ferromagnetic) spring material can advantageously serve as a fastening element.
    In the following, preferred exemplary embodiments of the invention are explained in more detail with reference to drawings. It goes without saying that individual elements and components can also be combined differently than shown.
    [0050] There are shown schematically in cross section: FIG. 1a: an exemplary embodiment of a device according to the invention; FIG. 1b: the device according to FIG. 1a in use; FIG. 2: another exemplary embodiment of a device according to the invention; FIG. 3: a further exemplary embodiment of a device according to the invention; FIG. 4: a device according to an alternative embodiment; and FIG. 5: a further embodiment variant of a device according to the invention.
    FIG. 1a shows a cross section through an exemplary embodiment 100 of the device according to the invention; FIG. 1b shows a use of this device (e.g. while carrying out a method according to the invention). The device 100 comprises an irradiation bell 110 which--as shown in FIG. 1b--is designed to be slipped over an electronic component 1 to be tested, excluding a section 21 of an electronic assembly (in particular an associated printed circuit board 20), and an evacuatable irradiation chamber 111 to train (ie to enclose). An edge of the irradiation bell that is to be put on when it is put on comprises a (preferably elastically) compressible seal 112, which can be formed at least partially from soft rubber, for example. FIG. 1b shows how the seal 112 is placed on a housing of a chip 10 comprising the component 1 to be tested and is partially compressed in the process. In the situation shown in FIG. 1b, the component 1 to be tested is uncovered (while maintaining its functionality), ie a covering over the component 1 is removed, for example by etching.
    The device 100 comprises a particle radiation source 120 which is arranged inside the irradiation bell 110 and is arranged in a receiving housing on a carrier circuit board 113 in the present case. As indicated in FIG. 1b, the carrier board 113 separates the irradiation chamber 111 from an evacuation chamber 114; Passages 115 connect the two chambers. If a vacuum pump is connected to a connection 130 of the device, which is attached to the evacuation chamber and is in the form of a small tube, air can thus be sucked out of the irradiation chamber 111 through the passages 115 and the evacuation chamber 114 . In particular, a negative pressure or vacuum (preferably at least a rough or fine vacuum) can be generated in the evacuation chamber 114 and the irradiation chamber 111 in this way, so that the deceleration of the nuclear particles emitted by the particle radiation source 120 is reduced or even (at least largely) prevented can be.
    The particle radiation source 120 for nuclear particles can contain, for example, Californium 252 or Americium 241, which can be covered in whole or in part by a gold foil or layer to ensure safe contact. In particular, the nuclear particles (e.g. helium or heavier atomic nuclei after decay) emitted by the particle radiation source 120 can then be emitted all around, but shielded by the carrier circuit board 113 and/or the receiving housing, so that they only spread through the gold foil to the component 1 (As illustrated in Figures 1a and 1b (and correspondingly in Figures 2 and 3) by the dotted area).
    The irradiation bell 110 of the device 100 shown in FIGS. 1a and 1b has a modular structure. It comprises a number of detachably assembled parts, a number of which are held together by one or more screws 119 . In particular, the irradiation bell can have at least one spacer ring 116a, 116b (e.g. made of aluminum), at least one cover plate 117 (e.g. made of aluminum) and/or at least one seal (e.g. between two other parts; not shown in Figures 1a, 1b) as such parts. include. Two or more of the parts can be glued together (possibly in addition to the connection by the screw(s) 119), preferably by means of a vacuum-suitable or sealing adhesive.
    In an unloaded state (not compressed or deformed by pressure) of the seal 112, an opening bordered by the seal has a diameter D, which is also referred to here as the inner diameter of the irradiation bell 110. The inner diameter D is preferably measured along a plane of the edge to be placed (ie a plane in which the edge to be placed lies); an intended placement direction of the irradiation bell is preferably perpendicular to this plane. An outer diameter A of the irradiation bell is defined as its maximum extent occurring parallel to the said plane. A height H of the device is measured in an unloaded state of the seal in a central area of the irradiation bell (in particular above the particle radiation source), specifically perpendicular to the plane of the edge to be placed (and thus in an intended placement direction).
    The particle radiation source 120 is at a distance d1 from a plane of the edge to be placed. When the irradiation bell 110 is slipped over an electronic component 1 (by placing it on a printed circuit board and/or another component and/or on a housing enclosing the component, for example a chip 10), a distance d2der results, as shown in FIG. 1b Particle radiation source from the electronic component. The dimensions of the devices shown, which are not shown in FIGS. 2-5, are to be understood accordingly.
    Are particularly advantageous embodiments of the present invention in whichfor the outer diameter A, A≦6cm applies, more preferably A≦4cm or even A≦3cm; and orfor the inner diameter D, D ≤ 5cm or D ≤ 3.5cm or even D ≤ 2cm; and orfor the inner diameter D, D ≥1cm or D ≥ 1.5cm or even D ≥ 2cm; and orfor the height H, H ≤ 5 cm, more preferably H ≤ 3.5 cm or even H £ 2.5 cm; and orfor the distance d1, d1≤3.5cm, more preferably d1≤2cm or even d1≤1.8cm; and orfor the distance d2, d2≤2cm, more preferably d2≤1.8cm or even d2≤1.2cm.
    FIG. 2 shows an alternative embodiment 200 of the device according to the invention, which has an irradiation bell 210 with a compressible seal 212, a particle radiation source 220 for nuclear particles and a connection 230 for connection to a vacuum pump. In contrast to the embodiment shown in FIGS. 1a, 1b, in this case the connection 230 is directly attached to the irradiation chamber, so there is no separate evacuation chamber here.
    In this embodiment variant, the particle radiation source 220 is enclosed in a disk-shaped receiving housing 213 , which at the same time forms a cover plate for the radiation bell 210 . The receiving housing 213 is inserted into a coupling frame 215, the connection being sealed by sealing rings 219, preferably O-rings.
    Figure 3 shows an embodiment variant 300 of the device according to the invention, which is particularly easy to manufacture: It comprises an irradiation bell 310 with a (preferably elastic) compressible seal 312, a particle radiation source 320 for nuclear particles and a connection 330 for connection to a vacuum pump.
    As in the embodiment of FIG. 2, the particle radiation source 320 is arranged in a disc-shaped receiving housing 313; this can be at least partially made of the same elastic, vacuum-tight material as the seal.The receiving housing 313 for the particle radiation source is inserted into a depression in the compressible seal 312 (for example glued in place) and together with the seal 312 forms the irradiation bell. The connection 330 designed as a small tube leads through the compressible seal 312, which can consist, for example, at least partially of a closed-cell (or closed-pore) foam rubber.
    FIG. 4 shows a further alternative embodiment 400 of the device according to the invention, which has an irradiation bell 410 with a compressible seal 412, a particle radiation source 420 for nuclear particles and a connection 430 for connection to a vacuum pump.
    The irradiation bell 410 has a radially magnetized permanent magnet 416, which at least partially surrounds an intended flow path B for radiated from the particle radiation source 420 nuclear particles. In the exemplary embodiment shown, the permanent magnet 416 is designed as a ring magnet, through the inner circle of which the intended flow path B for nuclear particles emitted by the particle radiation source runs.
    A magnetic yoke 417 made of a magnetic material, which is preferably formed as a (e.g. slotted) clamp (and forms an outer wall of the irradiation bell in the example shown), in particular surrounds the permanent magnet 416; the yoke can preferably consist at least partially of a ferromagnetic spring material and hold the various components of the modularly constructed irradiation bell 410 together. In the embodiment shown in FIG. 4, the permanent magnet and yoke form a distorted magnetic field, which is indicated by dash-dot lines in the drawing and whose greatest concentration is in the area of the intended flow path B for nuclear particles emitted by the particle radiation source. The nuclear particles are deflected by the magnetic field on curved paths which, depending on the field orientation, can have a focusing or defocusing effect, whereby the particle flow under the particle radiation source increases or decreases.
    By stacking two or more permanent magnets 416, the magnetic flux density of the magnetic field and thus the extent to which the particle flow is influenced can be changed.
    FIG. 5 shows a further exemplary embodiment 500 of the device according to the invention. This comprises an irradiation bell 510 with a compressible seal 512, a particle radiation source 520 for nuclear particles and a connection 530 for connection to a vacuum pump. The device 500 also comprises an electrical coil 518 which is set up to be connected to a power source and which surrounds the intended flow path B for nuclear particles emitted by the particle radiation source 520 . In addition, the device has two magnetic yokes 517a, 517b made of a ferromagnetic material. The yoke 517a, which is preferably designed as a (e.g. slotted) clamp (and forms an outer wall of the irradiation bell in the example shown), in particular surrounds the coil 518; it can consist at least in part of a ferromagnetic spring material and hold together the various components of the modularly constructed irradiation bell. The yoke 517b is designed like a ring and extends over a surface area essentially parallel to a plane in which the edge of the irradiation bell 510 to be placed is located. An inner diameter of the yoke 517b, that is, a diameter of the area surrounded by the yoke 517b, is preferably at most 2 cm, more preferably at most 1 cm. In particular, the inner diameter of the yoke can be smaller than the inner diameter D of the irradiation bell at its edge to be placed on. Preferably, the inside diameter of the yoke is at most as large as half or even at most as large as a third of the inside diameter D of the irradiation bell at the edge to be placed on it.
    When current is applied to the coil 518, a magnetic field is generated which is identified by dash-dotted lines in FIG. 5 and whose highest flux density is in the area of the intended flow path B for nuclear particles emitted by the particle radiation source. The inner diameter of the magnetic yoke 517a can be, for example, at least twice, at least three times or even at least four times the inner diameter of the magnetic yoke 517b. The very different diameters of the magnetic yokes 517a and 517b ensure a highly distorted field, which acts like a magnetic lens to focus or defocus the particle beam. The influence depends on the direction and strength of the electric excitation current in the coil 518 and can thus be changed by modifying the current.
    The coil 518 can consist of several (preferably two or three) individual coils (not visible in the figure), the winding axes of which can be set at an angle to one another. As a result, the strongly distorted magnetic field (dash-dotted lines) can be given an additional horizontal component, which can deflect the particle beam B to the side.
    Alternatively or in addition to the coil 518, the irradiation bell may comprise at least one annular, axially magnetized magnet (as commonly used in loudspeakers). The electrical connection can then possibly be omitted. In such an embodiment, the magnetic field can be changed by stacking several magnets of the same type.
    An apparatus 100, 200, 300, 400, 500 for testing electronic components is disclosed. The device comprises an irradiation bell 110, 210, 310, 410, 510, which is set up to be slipped over an electronic component 1 of the assembly excluding a section 21 of an electronic assembly 20, thereby forming an evacuatable irradiation chamber 111. The irradiation bell has a compressible seal 112, 212, 312, 412, 512 on its edge to be placed on. A particle radiation source 120, 220, 320, 420, 520 for nuclear particles is arranged inside the irradiation bell. The device also includes a port 130, 330, 430, 530, 630 for connection to a vacuum pump.
    Also disclosed is a method for testing at least one electronic component 1 of an electronic assembly 20.
    Reference sign
    1 electronic component 10 chip 20 printed circuit board 21 section of the printed circuit board 20100, 200, 300, 400, 500 device for testing electronic components 110, 210, 310, 410, 510 irradiation bell 111 irradiation chamber 112, 212, 312, 412, 512 compressible seal 113 carrier board 114 evacuation chamber 115 aperture 116b, cover plate 1197 spacer plate 1197 Screw 120, 220, 320, 420, 520 Nuclear Particle Radiation Source 130, 330, 430, 530, 630 Connector for connection to a vacuum pump213, 313 accommodation housing for the particle radiation source 215 coupling frame 219 sealing ring416 permanent magnet 417, 517a, 517b yoke 518 coilA Outside diameter of the irradiation bell B Planned flow path for nuclear particles emitted by the particle radiation source D Inside diameter of the irradiation bell at its edge to be placed H Height of the irradiation bell d1Distance of the particle radiation source from a plane of the edge to be placed d2Distance of the particle radiation source from the electronic component
    权利要求:
    Claims (13)
    [1]
    Apparatus (100, 200, 300, 400, 500) for testing electronic components, comprising:- An irradiation bell (110, 210, 310, 410, 510), which is set up to be slipped over an electronic component (1) of the assembly, excluding a section (21) of an electronic assembly (20), and in doing so an evacuatable irradiation chamber (111), wherein the irradiation bell comprises a compressible seal (112, 212, 312, 412, 512) on its edge to be fitted;- a particle radiation source (120, 220, 320, 420, 520) for nuclear particles arranged inside the irradiation bell jar; and- a connection (130, 330, 430, 530, 630) which is adapted to be connected to a vacuum pump for evacuating the irradiation chamber (111).
    [2]
    2. Device according to claim 1, wherein the particle radiation source is arranged on a carrier board (113) which separates the irradiation chamber (111) from an evacuation chamber (114) inside the irradiation chamber, the evacuation chamber and the irradiation chamber being connected by at least one passage (115) are connected to each other in the carrier board and wherein the connection (130) attaches to the vacuum pump in the evacuation chamber (114).
    [3]
    3. Device according to one of claims 1 or 2, wherein the irradiation bell (110, 210, 310, 410, 510) has an inner diameter (D) at the edge to be placed,– which is at least 1cm or at least 1.5cm or at least 2cm or exactly 2cm and/or– which is no more than 5 cm or no more than 3.5 cm or no more than 2 cm.
    [4]
    4. Device according to one of the preceding claims, wherein the irradiation bell comprises at least one radially magnetized permanent magnet (416) which at least partially surrounds an intended flow path (B) for nuclear particles emitted by the particle radiation source.
    [5]
    5. Device according to one of the preceding claims, wherein the irradiation bell comprises at least one annular, axially magnetized permanent magnet which at least partially surrounds a or the intended flow path (B) for nuclear particles emitted by the particle radiation source.
    [6]
    6. Device according to one of the preceding claims, wherein the irradiation bell comprises at least one electrical coil (518) which is connected to a power source or is set up to be connected to a power source, the at least one coil having a or the intended flow path ( B) for nuclear particles emitted by the particle radiation source at least partially surrounds.
    [7]
    7. Device according to claim 6, wherein the at least one coil (518) comprises two or three partial coils which have different winding axes.
    [8]
    8. Device according to one of claims 4 to 7, wherein the irradiation bell also comprises a magnetic yoke (417, 517a, 517b) made of a ferromagnetic material, which is set up to influence a magnetic field generated by the permanent magnet or by the at least one coil .
    [9]
    9. Device according to one of the preceding claims, wherein the irradiation bell is assembled or assembled in a modular, detachable manner, and wherein the irradiation bell is set up to optionally comprise a different number of permanent magnets (416, 516) and/or coils (518). at least partially surrounds a or the intended flow path (B) for nuclear particles emitted by the particle radiation source (420, 520).
    [10]
    10. A method for testing at least one electronic component (1) of an electronic assembly (20), comprising:- Forming an evacuatable irradiation chamber (111) by slipping over an irradiation bell (110, 210, 310, 410, 510) excluding a section (21) of the electronic assembly over the electronic component (1);- evacuating the irradiation chamber (111) by means of a vacuum pump connected to a connection (130, 230, 330, 430, 530) of the irradiation bell;- Irradiating the electronic component with nuclear particles from a particle radiation source (120, 220, 320, 420, 520) arranged inside the irradiation bell jar; and- measuring a function of the irradiated electronic component (1).
    [11]
    11. The method of claim 10, further comprising:- Lifting off the irradiation bell (110, 210, 310, 410, 510) from the electronic component (1);- forming a further irradiation chamber by slipping the irradiation bell over a further electronic component (1);- evacuating the further irradiation chamber by means of the vacuum pump connected to the connection (130, 230, 330, 430, 530) of the device;- Irradiating the further electronic component (1) with the particle radiation source (120, 220, 320, 420, 520); and- measuring a function of the further irradiated electronic component (1).
    [12]
    12. The method according to any one of claims 10 or 11, which also comprises influencing a flow path of the nuclear particles by a magnetic field of at least one permanent magnet (416, 516) and/or at least one coil (518).
    [13]
    13. The method of claim 12, further comprising changing the magnetic field and measuring another function or measuring the same function again of the irradiated electronic component.
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    同族专利:
    公开号 | 公开日
    CH714238A2|2019-04-15|
    DE102017123288B4|2019-11-21|
    DE102017123288A1|2019-04-11|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US4742232A|1987-03-03|1988-05-03|United States Of America As Represented By The Adminstrator, National Aeronautics And Space Administration|Ion generator and ion application system|
    JP5259688B2|2010-12-09|2013-08-07|本田技研工業株式会社|Scanning electron microscope|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE102017123288.5A|DE102017123288B4|2017-10-06|2017-10-06|Apparatus and method for testing electronic components|
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