• 专利附录
  • 专利说明
  • 权利要求
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    • 专利摘要:
    Disclosed is an optical system for measuring a distance to an object provided with a plane mirror. The optical distance measuring system 1 includes a coherent light source 10 projecting a laser beam L1, optical elements 20, 21 and a one-dimensional light sensor 30. The optical elements 20, 21 split the laser beam L1 into two laser beams L2, L3 and spread the laser beam L1 into one Light surface whose orientation is perpendicular to a plane which is generated by the propagation directions of the laser beams L2, L3. The laser beams L2, L3 are reflected by the mirror 40 and back to the light sensor 30. The light sensor 30 detects the intensity distribution of incident light of the reflected laser beams L2 and L3 with two local maxima whose position can be used to calculate the distance L of the mirror 40 and its current tilt angle.
    公开号:CH713135B1
    申请号:CH00309/18
    申请日:2015-09-18
    公开日:2018-10-15
    发明作者:Seitz Peter；Rusu Alexandru
    申请人:Hamamatsu Photonics Kk；
    IPC主号:
    专利说明:

    Description TECHNICAL FIELD The present invention relates to an optical system and a method for measuring the distance to an object provided with a plane mirror. The tilt angle of the mirror is not well known and may change over time. More particularly, the invention relates to an optical ranging system in which the mirror travels over distances much greater than the size of the mirror, as is the case in, for example, tube systems where the distance of a moving piston must be measured.
    Background Art In many mechanical systems, it is a common problem to measure the distance to an object without physically contacting the object. Very often, the preferred solution to such a problem is an optical process in which light from a suitable light source fills the object from where it is reflected back to the measuring system. There it is detected by a light sensor, and the electronic signal of the light sensor is processed to obtain the desired distance information. Examples of the optical method are disclosed in Patent Literatures 1 to 4.
    List of quotations
    Patent Literature [0003] PTL 1 European Patent No. EP 2 482 094 PTL 2 US Patent Application Publication No. 2015/0 019 160 A1 PTL 3 US Patent No. USP 5 424 834 PTL 4 German Patent No. DE 4 211 875
    DESCRIPTION OF THE INVENTION Technical Problem [0004] A common situation in practice is that the range changes to be measured are much larger than the space available on each side of the light path. Consequently, it is necessary to use an optical measuring method operating near the optical axis. To solve the problem, three fundamentally different optical measuring methods are known: (1) Optical time-of-flight method as described, for example, by S. Mack in European Patent No. EP 2 482 094 A1 "Distance Measuring Optoelectronic Sensor and Method for Object Detection". The practical advantage of the light transit time method is that their maximum measuring distance is almost unlimited and with such a method even the distance to the moon was measured. However, because of the high speed of light of about 3χ108 m / s, the distance accuracy achievable today with the light transit time method is on the order of 1 mm, which is insufficient for many mechanical systems.
    (2) Interferometric methods utilizing the small wavelength of coherent light available from low-cost laser diodes in the wavelength range of 200-2000 nm. Thus, the measurement accuracy of interferometric methods is well below 100 nm, which is sufficient for most mechanical systems. However, conventional interferometric range finding techniques can not determine absolute distances because they suffer from the well-known phase ambiguity problem that occurs with monochromatic interferometry systems. This can be done with multiwavelength interferometer, as for example by K. Thurneretal. in US Patent Application No. 2015/0 019 160 A1, "Absolute distance laser interferometer" described. The complexity of such a distance measuring system makes its design more expensive and more stable during operation. An additional practical problem is that interferometric rangefinding methods are highly sensitive to the tilt of the mirror. Deviation of mirror alignment by only 0.1 degrees from the ideal 90 degrees with respect to the optical axis can significantly alter the interference pattern, i. change bright image areas into dark image areas.
    (3) These disadvantages can be overcome with triangulation techniques using an optical system with two different optical axes: in stereo triangulation systems, one and the same point on the object is viewed from two different directions. In active triangulation systems, structured light fills in one direction, and its image on the object being examined is viewed from another direction. An example of such a triangulation system is described by J. Akedo et al. in U.S. Patent No. 5,424,834, "Optical displacement sensor for measurement of shape and coarseness of a target surface". This triangulation method requires at least three optical lens systems to create a spot of light on the object being examined and to focus the reflected-back light on the light sensors. The complexity of the system can be reduced by using only two optical lens systems, one for generating a measuring light beam and one for producing and imaging a light spot on the object under examination, as for example in German Patent No. DE 4 211 875 A1. Optical distance sensor », described. By using two stand-alone light sensors, it is possible to simultaneously measure the absolute distance to the object and the local tilt of the object surface where the measuring point is generated. Solution to Problem According to the present invention, an optical system for measuring a distance to an object provided with a plane mirror includes: a coherent light source projecting a laser beam in the direction of the plane mirror along an optical axis optical element disposed on the optical axis, where the optical element divides the incident laser beam into two laser beams whose propagation directions are at a certain angle to each other and spreads the incident laser beam into a light plane whose orientation is perpendicular to a plane passing through the optical axis Propagation directions of the two laser beams is generated, and a one-dimensional light sensor configured to detect an intensity distribution of incident light. The two laser partial beams propagate from the optical element to the plane mirror, and the two laser beams reflected from the plane mirror propagate to the one-dimensional light sensor. The one-dimensional light sensor detects the intensity distribution of incident light of the two reflected laser beams with two local maxima whose position can be used to calculate the distance of the plane mirror and its instantaneous tilt angle.
    According to the present invention, the optical element may be disposed over the one-dimensional light detector.
    According to the present invention, the optical element may be a cylindrical lens made of a transparent material.
    According to the present invention, the optical element may have a flat entrance surface and an exit surface consisting of two flat planes at an angle to each other. The flat entrance surface may have a plane entry surface provided with an antireflection coating and a plane reflective surface provided with a mirror coating. A first flat planar surface of the exit surface may be provided with a reflective coating and a second flat planar surface of the exit surface may be provided with an antireflection coating. The laser beam from the coherent light source may impinge on the planar entrance surface and propagate to the first flat planar surface of the exit surface, a portion of the incident laser beam may propagate from the first flat planar surface along a first direction and the other portion of the incident laser beam the other flat portion of the incident laser beam may be reflected at the plane of reflection and propagate along a second direction from the second flat plane of the exit surface.
    According to the present invention, the light sensor may consist of a one-dimensional array of pixels made as an array of light diodes or a CCD line. The shape of the pixels can be rectangular.
    Advantageous Effects of the Invention The described complexity as well as the limitations of the measurement accuracy of known optical distance measuring methods can be overcome by the above-described system according to the present invention which implements a particularly simple, robust and compact optical triangulation method: the distance to an object provided with a plane mirror is measured without the need of an optical lens system either for focusing incident light on the mirror or for producing an image of the reflected light on the light sensor. In addition, two important parameters, namely the distance of the mirror and the inclination angle of the mirror, are measured simultaneously.
    BRIEF DESCRIPTION OF THE DRAWINGS In view of the following detailed description, the invention will be better understood and other objects than those mentioned above will become apparent. In this description, reference is made to the appended drawings. It shows:
    Fig. 1 is a perspective view of an optical system according to an embodiment of the present invention;
    Fig. 2 is a plan view of the optical system illustrated in Fig. 1;
    Fig. 3 is another plan view of a situation in which a reflecting mirror is at an angle β to the ideal 90 degree orientation with respect to an optical axis;
    Fig. 4 is a plan view of an embodiment of a first optical function required for splitting a colliding laser beam into two beams at an angle to each other; and
    5 shows the intensity distribution P (x) of incident light as a function of the lateral position x on a one-dimensional light sensor.
    DESCRIPTION OF EMBODIMENTS A main object of an embodiment of the present invention is to provide an optical system and method for measuring a distance to an object provided with a plane mirror.
    Another object of one embodiment of the present invention is to provide an optical distance measuring system that can be implemented without optical imaging lens systems, so that the realized system becomes simple, robust, compact and inexpensive.
    Another object of one embodiment of the present invention is to provide an optical distance measuring system that can tolerate an inclination angle of the plane mirror. This is achieved by simultaneously measuring the distance and inclination angle of the plane mirror.
    Yet another object of one embodiment of the present invention is to provide an optical ranging system that is implementable with a small lateral extent to all sides of the optical axis. In this way, the distance of a plane-like piston-like object moving in a cylinder can be measured with this optical rangefinder system implemented in tube form.
    In view of the above objects, an embodiment of the present invention having an optical system illustrated in Figs. 1 and 2 is achieved. As illustrated in FIGS. 1 and 2, an optical distance measuring system 1 includes a coherent light source 10 (laser source), one or two optical elements 20 and 21 in front of the coherent light source 10, and a one-dimensional light sensor 30. The optical distance measuring system 1 may include an absolute distance L an object provided with a plane mirror 40 from the one-dimensional light sensor 30. To simplify the explanation of the system 1, the plane mirror 40 without the object is illustrated in the drawings. In Figs. 1 and 2, the plane mirror 40 is disposed at an angle of 90 degrees to an optical axis A, and the one-dimensional light sensor 30 can determine the absolute positions of the two light surfaces L2 'and L3'.
    The coherent light source 10 emits a thin laser beam L1, which is modified by the optical elements 20 and 21. An optical element 21 or 22 divides an incoming laser beam L1 into two beams L2 and L3 that are at an angle 2a to each other. A preferred embodiment of such an optical element is illustrated in FIG. The other optical element 21 or 22 spreads one or more incident laser beams in a direction vertical to the propagation direction. A preferred embodiment of such an optical element is a cylindrical lens made of a transparent material such as glass or plastic. Unless the optical devices 20 and 21 are physically close to each other, their order is not of practical importance. It is also possible to combine the two optical functions implemented with optical elements 20 and 21 in a single optical element. In any case, the direction of spreading the incoming laser beam L1 in laser sub-beams L2 and L3 must be perpendicular to the plane generated by the propagation directions of the laser sub-beams L2 and L3.
    The laser partial beams L2 and L3 are reflected back by the plane mirror 40, which can move on the optical axis and whose distance with respect to the optical detector system 30 must be determined. The reflected light surfaces L2 'and L3' are incident on the one-dimensional light sensor 30 and detected at positions 31 and 32. The two measured positions 31 and 32 are then used to calculate the absolute distance L of the plane mirror 40 to the optical detector system 30, as illustrated in FIGS. 2 and 3. 2 and 3 show the optical paths of the two laser partial beams L2 and L3 and the structure of the virtual light source 11 for calculating the absolute distance L of the plane mirror 40 using the positions of the two light surfaces L2 'and L3' on the one-dimensional light sensor 30.
    Fig. 2 illustrates the optical arrangement used to calculate the distance L of the plane mirror 40 from the optical detector system 30. It is assumed that the optical beam splitter 21 (or 20) is placed accurately on the photosensitive surface of the one-dimensional light sensor 30. The beam splitter 21 generates two laser partial beams L2 and L3, which propagate in two different directions, which are separated by the angle 2a. In the case where the reflecting mirror 40 is placed at the ideal angle of 90 degrees to the optical axis A, a virtual point 11 corresponding to the point where the beam splitter 21 receives the laser beams L2 and L3 is generated on the optical axis A. generated. The distance between the virtual dot 11 and the outer detection / detection location (light sensor 30) on the optical axis A is given by 2L. In this symmetrical case, the light surfaces L2 'and L3' are detected by the one-dimensional light sensor 30 at symmetrical locations 31 and 32. The measured distance D between the locations 31 and 32 and the known angle 2a between the two emitted light areas L2 and L3 can be used to calculate the distance L of the plane mirror 40 according to L = D / (4 tan (a)).
    In practice, it is often not possible to ensure that the mirror 40 is oriented at the ideal angle of 90 degrees with respect to the optical axis A, and this inclination angle of the mirror 40 may change over time. In the optical system according to an embodiment of this invention, this situation is managed by using absolute locations d1 and d2 at which the reflected light surfaces L2 'and L3' are detected by the one-dimensional light sensor 30 as illustrated in FIG. If the inclination angle β of the mirror 40 is not zero degrees, the detected locations d1 and d2 are also not equal, and their values can be used together with the accurate knowledge of the triangulation angle a to calculate the distance L and the mirror inclination angle β both trigonometric functions of the other parameters, ie L (a, d1, d2) and β (a, d1, d2) are.
    A central component in the optical distance measuring system 10 according to an embodiment of the present invention is one of the optical components 21 or 22 capable of interposing the incoming laser beam L1 into the two propagating laser beams L2 and L3 at the angle 2a to share their directions of propagation. A first preferred embodiment of such an optical component is a sinusoidal phase grating having a (peak-to-peak) modulation depth of ηλ / 2 and a grating period λ / tan (a), where n indicates the refractive index of the grating material and λ the wavelength of the laser light is. As is known, the wavelength of a laser diode changes depending on the temperature, and consequently, the triangulation angle 2a changes depending on the temperature of the laser diode. In the event that these temperature changes can not be kept reasonably low, a second preferred embodiment of the beam splitting component is illustrated in Fig. 4, in which the triangulation angle 2a depends only slightly on the wavelength of the laser light. The beam splitter consists of an optically transparent component 50 consisting of a piece of optically transparent material with a flat entrance surface, the lower part of which is transparent and the part of which is designed to be reflective, and having an exit surface, consisting of two flat planes at a small angle to one another Layers, one semi-permeable and the other transparent. In this transparent component 50, the incident laser beam L1 strikes an angle on a plane entrance surface 51, which is provided with a suitable antireflection coating. Inside the component 50, the laser beam L1 propagates to a flat surface 52 provided with a 50% reflective coating such that a portion of the laser beam L1 propagates along a first direction D1 from the component 50, and the other portion of the laser beam L1 is reflected on a plane Flche 53, which is provided with a mirror coating. The second laser beam is reflected at the planar surface 53, from where it propagates to a flat surface 54 provided with a suitable antireflection coating. The second laser beam propagates out of the component 50 in the direction D2 such that the angle between the directions D1 and D2 is equal to the triangulation angle 2a. This triangulation angle is different from zero if at least one of the flat surfaces 51, 52, 53 and 54 is oriented at an angle to the other plane surfaces.
    In another embodiment of the present invention, the optical elements 20 and 21 have a function whereby the two laser beams can be independently turned on and off. In this way, the light sensor 30 needs to detect only one laser beam position at a time since a first measurement is made with only the first laser beam turned on (while the second laser beam is off) followed by a second measurement with the second laser beam turned on (while the first laser beam is switched off). This time-sequential measurement allows the use of additional types of one-dimensional light sensors, such as, for example, a PSD (Position Sensitive Device). A simple alternative to realizing such an embodiment is to use two independent laser sources which emit their laser beams at the triangulation angle 2a to each other, and to place a light-plane-forming optical element in front of each laser source.
    The one-dimensional light sensor 30 senses the light distribution produced by the incident light surfaces L2 'and L3' at the positions 31 and 32. A preferred embodiment of the light sensor 30 consists of a one-dimensional array of pixels fabricated, for example, as a photodiode array or a Charge-Coupled Device (CCD) line (CCD). Since the use of the laser beams results in speckle patterns on the light detector, it is advantageous if the pixel shape is rectangular, with the long side parallel to the direction of the light surfaces L2 'and L3', so that the influence of such speckle patterns is reduced by spatial averaging.
    The light sensor 30 detects a light distribution as schematically illustrated in FIG. 5. The light detector signal P (x) has, depending on the lateral position x, two local maxima at the positions x1 and x2, which can be determined using known signal processing algorithms. For example, an algorithm for determining the local maximum of a one-dimensional light intensity distribution P (x) with an accuracy of better than 1% of the pixel period has been proposed by P. Seitz in "Optical superresolution using solid-state cameras and digital signal processing". Optical Engineering, Vol. 27, No. 5, pp. 535-540, July 1938.
    In this way, the positions x1 and x2 of the two maxima of P (x) can be determined with high precision. This information is then used together with the knowledge of the position x0 of the optical axis A with respect to the light sensor 30 to calculate d1 = x0-x1 and d2 = x2-x0. Since the distance L (a, d1, d2) and the mirror inclination angle β (a, d1, d2) are both functions of the two parameters d1 and d2 and the angle a, this knowledge can be used to calculate the value of L and β [ 0029] As a practical example of the performance of the optical distance measuring system 1 according to an embodiment of the present invention, consider an angle a of 2 degrees and a light detecting device having a pixel period of 5 pm. Assuming that the precision with which the positions x1 and x2 of the two maxima of P (x) can be determined is 1% of the pixel period, the distance D = x2 - x1 can be selected with a precision AD = V2 x 50 nm s 70.7 nm determine. If the mirror tilt angle is zero according to the symmetrical case illustrated in FIG. 2, the precision AD with which the distance L can be measured is given by AL = AD / (4tan (a)) s 0.51 pm.
    Assuming that the light detector array consists of 2048 pixels, the total length of the sensor row and hence the maximum value of D is 10.24 mm. Consequently, the maximum distance L measurable in this configuration is given by Lmax s 70 mm. This example illustrates the compactness with which the optical distance measuring apparatus according to an embodiment of the present invention is realizable; in the example studied, it only needs a tubular space of at least 10.24 mm in diameter, which results in a usable measuring distance of about 70 mm, provided that the inclination angle of the plane mirror is zero.
    LIST OF REFERENCES 1 optical distance measuring system 10 coherent light source 20, 21 optical element 30 one-dimensional light sensor 31, 32 position 40 plane mirror 50 optical component 51, 52, 53, 54 plane surface L1 laser beam L2, L3, L2 ', L3' light surface
    权利要求:
    Claims (9)
    [1]
    An optical system (1) for measuring a distance (L) to an object provided with a plane mirror (40), comprising: a coherent light source (10) emitting a laser beam (L1) in the direction of the plane mirror (40) projected along an optical axis; an optical element (20, 21) disposed on the optical axis, the optical element (20, 21) dividing the incident laser beam (L1) into two laser beams (L2, L3) whose propagation directions are at a certain angle to each other , and each laser partial beam (L2, L3) spreads in a Lichtflcheche whose orientation is perpendicular to a plane which is generated by the propagation directions of the two laser partial beams (L2, L3); and a one-dimensional light sensor (30) configured to detect an intensity distribution of incident light, the two laser sub-beams (L2, L3) extending from the optical element (20, 21) to the planar mirror (40) the two laser beams reflected by the plane mirror (40) propagate to the one-dimensional light sensor (30), and wherein the one-dimensional light sensor (30) detects the intensity distribution of incident light of the two reflected laser beams (L2 ', L3') with two local maxima, whose position can be used to calculate the distance (L) of the plane mirror (40) and its instantaneous inclination angle.
    [2]
    The optical system of claim 1, wherein the optical element (21) is placed over the one-dimensional light sensor (30).
    [3]
    The optical system according to claim 1 or 2, wherein said optical element (20, 21) is a cylindrical lens made of a transparent material.
    [4]
    An optical system according to any one of claims 1 to 3, wherein the optical element (50) has a flat entrance surface and an exit surface consisting of two flat planes at an angle to each other.
    [5]
    The optical system according to claim 4, wherein the flat input surface has a plane entrance surface (51) provided with an antireflection coating and a plane reflection surface (53) provided with a mirror coating, wherein a first flat plane surface (52) of the exit surface is provided with a reflection coating and a second flat planar surface (54) of the exit surface is provided with an antireflection coating, and wherein the laser beam (L1) from the coherent light source (10) fills the planar entrance surface (51) and joins the first flat planar surface (52 ) of the exit surface, a portion of the incident laser beam propagates along a first direction from the first flat planar surface (52), and the other portion of the incident laser beam passes through the first flat planar surface (52) toward the planar reflective surface (53) of FIG flat entrance area is reflected and the other part of the incident The laser beam is reflected at the planar reflecting surface (53) and propagates along a second direction from the second flat planar surface (54) of the exit surface.
    [6]
    The optical system according to any one of claims 1 to 5, wherein the light sensor (10) consists of a one-dimensional array of pixels made as a photodiode array or a CCD line.
    [7]
    The optical system according to claim 6, wherein the shape of the pixels is rectangular.
    [8]
    The optical system according to any one of claims 1 to 7, wherein the optical element has a function whereby the two laser beams can be independently turned on and off.
    [9]
    An optical system for measuring a distance (L) to an object provided with a plane mirror (40), comprising: two coherent light sources (10), each projecting a laser beam in the direction of the plane mirror along an optical axis; an optical element (20, 21) disposed on the two optical axes, wherein the optical element (20, 21) spreads the incident laser beam into a light area whose orientation is perpendicular to a plane that produces propagation directions of the two laser beams becomes; and a one-dimensional light sensor (30) configured to detect an intensity distribution of incident light, wherein the two laser beams propagate from the optical element (20,21) to the planar mirror (40) and the two of the plane mirror (40 ) and the one-dimensional light sensor (30) detects the intensity distribution of incident light of the two reflected laser beams with two local maxima whose position can be used to determine the distance (L) of the plane mirror (FIG. 40) and calculate its current inclination angle.
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    法律状态:
    优先权:
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    PCT/JP2015/004812|WO2017046832A1|2015-09-18|2015-09-18|Optical distance measuring system|
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