• 专利附录
  • 专利说明
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  • 类似技术
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    • 专利摘要:
    The invention relates to an optical device (100) for guiding a light beam, in particular a laser beam, for machining workpieces, and having at least one rotation axis (104), comprising: at least one rotatable first means (101) configured for a first parallel displacement of the light beam, at least one second means (102) configured for focusing the light beam, for example for focusing and tilting the light beam, and at least one rotatable third means (103) configured for a second parallel displacement of the light beam.
    公开号:CH711987A2
    申请号:CH01589/16
    申请日:2016-12-05
    公开日:2017-06-30
    发明作者:Materne Tobias
    申请人:Steinmeyer Mechatronik GmbH；
    IPC主号:
    专利说明:

    Description: PRIOR ART [0001] The invention relates to a device of the type specified in the preamble of patent claim 1 and to a method of the type indicated in the preamble of patent claim 15.
    For the production of fine structures, or for the machining of workpieces, in particular for the micro-machining of workpieces, for example for drilling and cutting workpieces or various substrate materials and sheets of a few lum to about 1 mm thickness, the use of Laser radiation known.
    Among other things, cuts with vertical edges and wide vertical or widening bores are required, as they are e.g. used in the watch industry or for the production of injection, spinning or cooling bores.
    A conventional optical laser beam guiding device for guiding the laser beam onto a workpiece is described for example in DE 20 2008 017 745 U1.
    However, a disadvantage of known devices and methods for laser beam guidance, inter alia, their high demands on the precision and quality of the optical components used and their adjustment mechanisms and the associated high susceptibility to even the slightest error in the control and / or the quality of the optical Components, which can lead to high downtime and high product reject rates.
    Also disadvantageous in known devices and methods, which sometimes include a variety of components for manipulation and / or expansion of the laser beam, may also be their relatively large space requirement.
    OBJECT It is therefore an object of the invention to improve a device and a method for guiding a light beam, in particular a device and a method for guiding a laser beam for machining workpieces. For example, said device can be improved, inter alia, in terms of the compactness and efficiency of the device, as well as in terms of variety, precision and quality can be processed with the workpieces. Solution According to the invention, this is achieved by an optical device according to claim 1 and a method according to claim 15. Advantageous embodiments and further developments are the subject of the dependent claims.
    An optical device for guiding a light beam, in particular a laser beam for machining workpieces, and having at least one axis of rotation, for example, may have the following means for guiding the light beam.
    By the term of the laser beam may e.g. both continuous and pulsed laser radiation are understood.
    The optical device may comprise at least one rotatable first means, which may be configured for a first parallel displacement of the light beam, and at least one second means, which may be configured for focusing the light beam, for example for focusing and tilting the light beam ,
    In addition, the optical device may comprise at least one rotatable third means, which may be configured for a second parallel displacement of the light beam.
    For example, the said means of the optical device can preferably be arranged along the beam path of the light beam such that the first parallel displacement of the light beam by the first means before focusing of the light beam by the second means, as well as that the second parallel displacement of Light beam through the third means after focusing of the light beam by the second means is carried out.
    The term means can be understood to mean an optical arrangement or optical assembly comprising at least one component, an optical means, or an optical element, or a group of components, optical means or optical elements for modification and / or Deflection or guiding a light beam, for example a laser beam comprises.
    By the term of focusing the light beam, e.g. also a focusing and oblique position of the light beam are understood, wherein the oblique position of the light beam can take place with respect to or in the direction of an optical axis.
    By the at least one axis of rotation of the optical device, for example, the optical axis of the optical device can be understood.
    The at least one axis of rotation of the optical device and the possible axes of rotation of the means for guiding the light beam may coincide with each other. This can e.g. be advantageous for compatibility of the optical device for high speeds or for high rotational frequencies of the optical device.
    But it is also conceivable that the means for guiding the light beam may have their own axes of rotation, which may be different from the at least one axis of rotation of the optical device.
    In particular, e.g. the first means being rotatable about the at least one axis of rotation, and also the third means being rotatable about the at least one axis of rotation.
    Also, the second means configured to be rotatable for focusing the light beam, e.g. also be rotatable about the at least one axis of rotation.
    Among other things, the synergetic effect of said means of the optical device ensures that the device is characterized by advantageous over known devices, that the device is compact, as well as a precise and independent setting for the processing of workpieces by means of light or Laser parameters relevant parameter, such as an independent adjustment of the diameter of a circular path along which the light beam can make a bore or a cut, and an independent adjustment of the angle of attack with which the light beam with respect to an optical axis or a workpiece axis can hit the workpiece.
    In particular, the optical device offers the possibility of drilling holes, such as trephining and helical bores, and cuts with widening, constant or narrowing cross-section, and it can, for example, holes from a diameter of a few microns to the small single-digit millimeter range, manufactured with high precision, cost-effective and reproducible. Also, the optical device enables more accurate cutting of thin sheets and substrates. For example, the achievable roundness of bores, as well as the edge quality in cuts, can benefit from the optical device.
    Moreover, the optical device is also less susceptible to interference or less prone to inaccuracies in the adjustment or the quality of the optical elements, without affecting the quality and quality of the workpiece machining would be affected.
    The achievable by the arrangement or configuration compactness of the optical device can also allow a space-saving and easy integration into existing processing plants.
    The first means of the device, so the means for a first parallel displacement of the light beam, can be designed as a wedge-prism pair or as a plane-parallel optical disk or as an adjustable mirror system.
    The use of other prism shapes or other Prismentypen is conceivable. For example, dispersion prisms and / or reflection prisms which emit light rays, e.g. be redirected among other things by total reflection, can be used.
    For example, e.g. the first means of the device for a first parallel displacement of the light beam to be designed as a wedge-prism pair, wherein in addition a wedge prism of the wedge-prism pair along the at least one axis of rotation can be displaced, whereby, for example, among other things, the size of the first parallel offset can be freely adjustable.
    The third means for a second parallel displacement of the light beam may also be designed as a wedge-prism pair or as a plane-parallel plate or as an adjustable mirror system.
    For example, the third means for a second parallel displacement of the light beam can be designed as a tiltable plane-parallel plate.
    Again, however, the use of other prism shapes or other prism types is conceivable. For example, dispersion prisms and / or reflection prisms which emit light rays, e.g. be redirected among other things by total reflection, can be used.
    By focusing by means of the second means, the light beam can be made obliquely, for example, be made obliquely with respect to a rotational axis of the device, and be made oblique, for example, with respect to a rotation axis, which may coincide with the optical axis of the device.
    The possible skew, i. e.g. The angle of attack of the light beam with respect to the at least one axis of rotation can be determined or changed and controlled directly by the previous parallel offset by the first means.
    The inclination / the angle of incidence of the light beam with respect. The axis of rotation can therefore be freely adjustable as the size of the first parallel offset with a displacement movement of an exemplary first wedge prism of the first means.
    In addition, the third means for a second parallel displacement of the light beam comprise an additional wedge-prism pair, which can serve, inter alia, to compensate for light beam guidance errors that may occur when passing through the example executed as a plane-parallel plate third agent.
    In addition, the optional additional wedge prisms may also serve to effect a second, for example, well-defined and constant oblique position of the light beam whose direction may be opposite to the direction of the variable inclination of the light beam caused by the above-described focusing means ,
    The optional additional wedge prisms may, for example, thereby also enable a guide of the light beam in the direction of a rotation axis, for example a rotation axis coincident with the optical axis of the device, e.g. thereby also a central guidance of the light beam along the rotation axis can be made possible.
    The optical device may be further configured to rotate the first means for a first parallel displacement of the light beam and the third means for a second parallel displacement of the light beam at the same rotational frequency.
    For example, all means of the optical device may share a common axis of rotation, which may be, for example, the optical axis, and about which the optical device itself and its means can rotate.
    Advantageously, such unnecessary movements of the means and components of the optical devices outside the axis of rotation, e.g. be minimized outside a common axis of rotation, whereby high rotational frequencies, or high speeds, or high rotational speeds can be achieved.
    For example, such high speeds, for example, speeds greater than 10,000 revolutions (U) / min, can be achieved. For optimum operation of the optical device, speeds may be in the range of about 15,000-20,000 rpm, for example.
    Among other things, it can be achieved that the overlap of the individual shots or the individual laser beam pulses is lower and thus a better quality or a stress-free processing of e.g. Glass can be made possible.
    However, it is also conceivable that the optical device may be configured such that the first means for a first parallel displacement of the light beam is rotatable at a first rotational frequency and the third means for a second parallel displacement of the light beam is rotatable at a second rotational frequency , where the two rotational frequencies can be different from each other.
    This may enable a workpiece processing method in which the light beam can always wobble rapidly around a fixed point (e.g., the focus point) and this tumbling point e.g. can be guided along a cutting path. This can e.g. allow more precise cutting out of small holes.
    The optical device may be further configured so that the second means for focusing the light beam may comprise at least one lens.
    In addition, the second means configured to be displaceable for focusing the light beam along the at least one axis of rotation.
    Preferably, the second means configured to focus the light beam comprise a plurality of lenses, wherein the lenses may be individually slidably positionable along or parallel to the at least one axis of rotation.
    The displaceability of the components of the optical device, for example lenses of the second means for focusing the light beam, can help to compensate for the insensitivity and fault tolerance of the device to deviations of the optics manufacturer. The positions of the components, such as lenses and wedge prisms, are not critical in the optical device and, therefore, coarser installation tolerances may be used.
    For example, a travel of the first means of the device may be used for a first parallel displacement of the light beam, e.g. a travel of a wedge prism of the first means, for example, lie with a travel length of up to 70 mm. In a possible use of a larger movable wedge prism, the exemplary travel but can also be shortened to save space.
    Above all, however, the exemplary arrangement, rotatability and positionability of the means of the optical device may allow improved focus quality.
    In addition, the optical device allows small changes in the light beam guidance to be achieved by large displacement movements of the light beam guidance means, which can also improve the robustness and fault tolerance of the device.
    The exemplary use of lenses for the second means for focusing and for example simultaneous inclination of the light beam in exemplary combination with the parallel displacement of the first means makes it possible to adjust the inclination of the light beam or the angle of incidence of the light beam with coarser tolerances in the adjustment mechanism, as this eg could be realized by wedges or mirrors. For an exemplary beam angle adjustment or for example an attack angle of 0-10 ° greater allowable positioning tolerances for components of the first means can be achieved. Take, for example, a positioning tolerance in the exemplary displacement of a wedge prism of the first means for a first light beam parallel displacement of 10 pm, the two wedge prisms of the first means comprising e.g. At a distance of 70,000 μm from each other, the positioning tolerance for the light beam would be approximately 8770,000 μm * 10 μm = 0.0011 ° given a resulting angle of attack of approximately 8 °.
    By an arrangement of the third means for a second parallel displacement of the light beam after focusing, or after focusing and tilting of the light beam, the bore diameter can be adjusted independently of the angle of attack by the second parallel offset.
    Furthermore, the exemplary arrangement of the third means for a second parallel displacement of the light beam after focusing, or after focusing and tilting of the light beam, allows a much lower necessary parallel offset for setting a bore diameter, as e.g. an arrangement in which the means for the parallel offset for adjusting a bore diameter in front of the means for adjusting the inclination of the light beam is.
    This exemplary arrangement also makes it possible, in an exemplary use of a plane-parallel plate as a third means to optimize the required deflection and the necessary refractive index of the material of the plane-parallel plate.
    For example, for tilt angles of a plane-parallel plate of the third means from 0 to + -10 °, e.g. Bore diameter of up to 1.3 mm can be adjusted. However, there are also larger Kippwinkelbereiche conceivable, for example, from 0 to + -20 ° or more, and bore diameter greater than 1.3 mm.
    By the described exemplary arrangement and exemplary travel paths of the components of the means of the device can also for such a tiltable plane-parallel plate of the third means, which, for example, via a lever connection of e.g. about 15 mm, allowable positional tolerances of about 8 to 10 pm or more can be achieved.
    Such allowable positional tolerances are not critical to an exemplary ball or air bearing of the exemplary plane-parallel plate of the third means. As mentioned above, these high permissible position tolerances have an advantageous effect on the quality of the workpiece machining compared with conventional devices, so that, for example, holes with required roundness deviations of less than 2 μm are reliable and easy to implement.
    The optical device may further comprise an additional means for rotating the polarization plane of the light beam, wherein e.g. the additional means may comprise a pair of lambda / 4 plates, and wherein the additional means is rotatable, e.g. around which at least one axis of rotation of the device can be rotatable.
    By this optional co-rotation of a polarization plane of the light beam, improved absorption of the light beam in the workpiece, i. an improved penetration of the light beam into the workpiece can be achieved.
    A method for guiding a light beam, in particular a laser beam for machining workpieces by means of an optical device, can be used e.g. comprising the following steps: a first parallel displacement of a light beam coupled into the optical device, e.g. by means of a first means rotatable about an axis of rotation of the optical device, - a focusing of the light beam, for example a focusing and tilting of the light beam, e.g. by means of a second means rotatable about an axis of rotation of the optical device, - and at least a second parallel displacement of the light beam coupled into the optical device, e.g. by means of a third means rotatable about an axis of rotation of the optical device.
    It is therefore also conceivable that after the focusing of the light beam and after a second parallel displacement of the light beam coupled into the optical device, further parallel displacements of the light beam coupled into the optical device can be performed.
    The following figures represent by way of example:
    Fig. 1: Exemplary schematic representation of an optical device for guiding a
    Light beam.
    2: Exemplary enlarged detail of FIG. 1.
    Fig. 3: Exemplary light beam geometry.
    Fig. 4a, 4b, 4c, 4d, 4e, 4f: Exemplary holes.
    Fig. 1 shows schematically an exemplary representation of an optical device 100 for guiding a light beam, in particular for guiding a laser beam for machining workpieces.
    The device 100 may, for example, be rotatable about an axis of rotation 104, wherein said axis of rotation 104 may correspond, for example, to the optical axis of the device.
    The device 100 may also comprise one or more means 107, 107.1, 107.2, 101, 101.1, 101.2, 102, 102.1, 102.2, 102.3, 103, 103.1, 103.2, 103.3 for the optical manipulation of a light beam 106 coupled into the device For example, means 101, 101.1, 101.2 configured for a first parallel displacement of the light beam 106, means 103, 103, 103, 103, 103 configured for a second parallel displacement of the light beam 106, and means 102, 102, 110, 102 for focusing the light beam.
    The said exemplary means 107, 107.1, 107.2, 101, 101.1, 101.2, 102, 102.1, 102.2, 102.3, 103, 103.1, 103.2, 103.3 can be, for example, rotatable about the axis of rotation 104 of the device, or can for example, rotate together with the device 100 about the axis of rotation 104.
    However, it is also conceivable that said exemplary means 107,107.1,107.2,101,101.1,101.2,102,102.1,102.2, 102.3, 103, 103.1, 103.2, 103.3 respectively individually or in groups about their own axes of rotation (not shown) can be rotated, which not must match the illustrated axis of rotation 104 or the optical axis of the device. In this case, said rotation means (not shown) which can be assigned individually or in groups to said means can be, for example, parallel or oblique to the illustrated rotation axis 104.
    In addition, the exemplary means 107, 107, 1, 107, 10, 101, 101, 101, 102, 102, 102, 102, 103, 103, 103, 103, 103, 103 of the apparatus 100 may be displaceable, e.g. for example, be displaceable along the illustrated axis of rotation 104, or e.g. be displaced along a means of the individual or in groups associated with their own rotation axis (not shown).
    A displaceability of the exemplary means 107,107.1,107.2,101,101.1,101.2,102,102.1,102.2,102.3,103, 103.1, 103.2, 103.3 not parallel to the exemplary axis of rotation 104, however, is also conceivable.
    Also, the exemplary means 107, 107.1, 107.2, 101, 101.1, 101.2, 102, 102.1, 102.2, 102.3, 103, 103.1, 103.2, 103.3 of the device 100 may be tiltable, e.g. be tiltable about a tilt axis / tilt axes (not shown), which may be parallel or not parallel to the illustrated axis of rotation 104, wherein the tilt axis (s) may be orthogonal to one / the axis of rotation 104 of the device 100 / can be.
    The exemplary means of the device 100 may be e.g. arranged, configured and used as follows.
    For example, a light beam 106 coupled into the device 100 may first be offset in parallel via a first means 101.
    The first means 101 for a first parallel displacement of the light beam may consist of two components, for example (as shown), for example a wedge prism pair with a first wedge prism 101.1 and a second wedge prism 101.2.
    The two components, i. For example, the wedge prisms 101.1 and 101.2, can be displaced, for example, for optimal regulation and control of the size of the (first) parallel displacement of the light beam.
    Illustrated is, for example, a possible displaceability 108 of the wedge prism 101.1 along or parallel to a rotation axis 104 of the optical device 100.
    Alternatively, it is also conceivable that the first means 101 may be designed as a tiltable plane plate or a movable mirror assembly.
    Subsequently, i. E. after passage of the first means 101, the (first time) parallel offset light beam 113 may strike a second means 102, which may be configured to focus the light beam.
    This second means 102 for focusing the light beam may comprise one or more components, for example, as shown, three components 102.1, 102.2, 102.3, wherein the components are, for example, lenses and comprise, for example, at least one focus lens or condenser lens. The second means 102 for focusing the light beam can be embodied, for example, such that the design and arrangement of its components or its lenses is selected such that error influences on the focus quality are minimized.
    This can make it possible for the parallel offset light beam to run decentrally through the second means 102, or decentrally through the components 102.1, 102.2, 102.3 of the second means 102, without the beam quality at the focal point on a work piece plane 114, eg astigmatism or spherical aberrations.
    By way of example, as shown, a first component 102.1 of the focusing means 102 may be embodied as a bi-convex focusing lens 102.1, a second component 102.2 of the focusing means 102 as a negative meniscus lens 102.2, and a third component 102.3 of the focusing means 102 as a positive meniscus lens 102.3. wherein the inwardly curved side of the negative meniscus lens 102.2 may be facing, for example, the bi-convex converging lens 102.1, and the outwardly curved side of the negative meniscus lens 102.2 may face the convex side of the positive meniscus lens 102.3.
    In this case, the components 102.1, 102.2, 102.3 may also be displaceable, e.g. be slidable along a rotation axis 104, so that the focal point of the light beam, for example, the focal point of the light beam along the axis of rotation 104, can be adjusted and can be optimally adjusted for the workpiece machining.
    Also, the second means 102, or the components 102.1, 102.2, 102.3, can be rotatable, for example, be rotatable about the rotation axis 104.
    By focusing with the aid of the means 102, for example by the described lens combination with the lens components 102.1, 102.2, 102.3, the light beam 113 can be made obliquely, for example obliquely against an axis of rotation of the device 100, for example, as shown, obliquely employed with respect to the axis of rotation 104, which may coincide with the optical axis of the device.
    The possible skew, i. the angle of attack of the light beam with respect to the axis of rotation 104 can be determined or controlled directly by the previous parallel offset by the first means 101, wherein, for example, in the illustrated case, the inclination / angle of the light beam with respect Displacement 108 of the first wedge prism 101.1, eg a linear movement of the first wedge prism 101.1, can be freely adjustable. Said displacement movement 108 of the first wedge prism 101.1 can take place, for example, along or parallel to the axis of rotation 104.
    The displacement or movement range of the first wedge prism 101.1 may begin, for example, upon contact with the second wedge prism 101.2 (in this position, for example, no parallel offset would take place) and may end, for example, when the light beam as far as possible to the edge of the second means 102, for example to the edge of the first component 102.1. An exemplary travel range can e.g. have a travel length of up to 70 mm.
    For example, beam angle or angle of attack of the light beam of about 0-10 ° can be achieved.
    The wedge angle of the wedge prisms 101.1, 101.2 may be up to 10 °, for example; however, larger wedge angles of up to 200 or up to 30 ° or more are also possible and may be advantageous, as this results in e.g. the travel range can be made even more compact.
    As mentioned, the second means 102 may be displaceable and / or rotatable for focusing, for example its components 102.1, 102.2, 102.3 may also be displaceable and / or rotatable individually or in groups, for example displaceable and / or rotatable about the axis of rotation 104 of the device or about one or more axes of rotation (not shown) parallel to the illustrated axis of rotation 104 of the device 100th
    By an exemplary exemplary rotation 105 of the optical device 100, or the means of the optical device, about the axis of rotation 104 and the described exemplary focusing or inclination of the light beam, the light beam 113 passing through the means 102 for focusing can be rotated about a fixed beam To wobble around a fixed point on / in / under / over a workpiece 111.
    The focus point of the device 100 does not necessarily have to lie on the surface of the workpiece.
    A desired path guidance of the light beam, for example for tensioning or helical bores, can be effected by a further, a second, parallel displacement of the light beam.
    In other words, by the second parallel displacement of the light beam, the radius or diameter of a circular path which the light beam can describe by the exemplary rotation 105 can be adjusted freely and independently of the angle of incidence of the light beam, e.g. free and independent of the angle of incidence of the light beam with respect to the axis of rotation 104 and the optical axis.
    Thus, e.g. be adjusted during a drilling process, the bore diameter or the Bohrwandwinkel.
    This second parallel offset of the light beam can be realized for example by a third means 103, wherein the third means 103 may comprise, for example, a tiltable plane-parallel plate 103.2 for performing the second parallel offset. In this case, the tilt angle range for a tiltable plane-parallel plate 103.2 for carrying out the second parallel offset can be, for example, + 10 °, but larger tilt angle ranges are also conceivable.
    Alternatively, the third means 103 for implementing the second parallel offset may also comprise a wedge prism or mirror arrangement (not shown).
    Optionally, as shown, the third means 103 may also comprise two additional wedge prisms 103.1, 103.3, which may serve, inter alia, to compensate for light beam guidance errors which may arise when passing through the exemplary plane-parallel plate 103.2.
    In addition, the optional additional wedge prisms 103.1, 103.3 can also serve to effect a second, for example, well-defined and constant oblique position of the light beam, the direction of which is opposite to the direction of the variable inclination of the light beam, caused by the described upstream means 102 to Focusing, is.
    The optional additional wedge prisms 103.1, 103.3 can, for example, thereby also make possible a guide or a web guide of the light beam in the direction of an axis of rotation, for example a rotation axis 104 which coincides with the optical axis of the device, thereby also providing a central guidance of the light beam along the axis of rotation 104 can be made possible.
    Said optional additional wedge prisms 103.1, 103.3 can be rotatable and / or displaceable and / or tiltable and thus compensate for their possible positioning, for example, a possible astigmatism, which can be undesirably caused by the exemplary plane-parallel plate 103.2, for example.
    In this case, the focused on the workpiece 111 incident light beam may have a well-defined angle of attack and by the rotation 105, so for example by rotation of the device and / or rotation of one or more of its means 107,107.1,107.2,101,101.1,101.2,102,102.1 , 102.2, 102.3, 103, 103, 103, 103, 103, describe a circular path of a well-defined diameter on the workpiece 111, wherein the angle of incidence of the light beam and the diameter of the circular path that the light beam can describe on the workpiece are free and independent of each other by the optical device 100 can be adjustable.
    Optionally, prior to a first parallel displacement of the light beam 106, a polarization plane of the light beam may be rotated by an optional means 107 with rotation of the device 100, or rotated with component / means rotation, such as rotation 105 μm the rotation axis 104 are rotated.
    The optional means 107 may comprise, for example, a pair of corrugated plates, for example a lambda / 4 plate pair, e.g. formed from the lambda / 4 plates 107.1 and 107.2.
    By this optional co-rotation of a plane of polarization of the light beam 106 by means 107, improved absorption of the light beam in the workpiece, i. an improved penetration of the light beam into the workpiece can be achieved.
    As shown, the exemplary means 107, 107.1, 107.2, 101, 101.1, 101.2, 102, 102.1, 102.2, 102.3, 103, 103.1, 103.2, 103.3 of the device 100 share, for example, a common axis of rotation 104 coinciding with the optical axis of the device 100, it is also conceivable that the exemplary means 107.107.1.107.2.101.101.1.101.2.102.102.1.102.2.102.3.103.103.1.103.2.103.3 of the device 100 different own axes of rotation (not shown) can have.
    In addition, the optical device 100 may, for example, be designed so that the optical device 100 or all exemplary means 107, 107.1, 107.2, 101, 101.1, 101.2, 102, 102.1, 102.2, 102.3, 103, 103.1, 103.2.103.3 with the same rotational frequency about a common axis of rotation 104, which for example coincides with the optical axis of the device 100, can rotate.
    However, it is also conceivable for the exemplary means 107, 107.1, 107.2, 101, 101.1, 101.2, 102, 102.1, 102.2, 102.3, 103, 103.1, 103.2, 103.3 of the device 100 to have their own different rotational frequencies a common axis of rotation 104, which for example coincides with the optical axis of the device 100 can rotate.
    In particular, it is possible that the means 101, 101.1, 101.2, 102, 102.1, 102.2, 102.3, 103, 103.1, 103.2, 103.3, although about a common axis of rotation 104, which coincides for example with the optical axis of the device 100 , can rotate, but for example the means 103, or 103.1, 103.2, 103.3, configured for a second parallel displacement of the light beam, can rotate with its own rotational frequency, which can be different from a rotational frequency with which the means 101, or 101.1, 101.2, configured for a first parallel displacement of the light beam, and the means 102, or 102.1, 102.2, 102.3 configured to focus the light beam, can rotate / rotate.
    This may enable a workpiece processing method in which the light beam can rapidly tumble around a fixed point (e.g., the focus point) and this tumbling point e.g. can be guided along a cutting path. This can e.g. allow more precise cutting out of small holes.
    An exemplary rotational speed range for optical device rotations or rotations of optical device means may be e.g. at about 15,000-20,000 rpm. However, significantly smaller or significantly larger speeds are also conceivable. In addition, it may be, e.g. inter alia, for reasons of operational safety, be advantageous to set a speed limit of about 40 000 U / min.
    FIG. 2 illustrates by way of example an enlarged portion of FIG. 1 wherein the exemplary beam path 113 of the light beam in the exemplary optical device 100 is configured for a first offset of the light beam after passage of a first means (not shown) is pictured.
    The light beam 113, which has already been offset in parallel for the first time, thus initially strikes a second means 102 for focusing the light beam, which may comprise one or more components, for example three components 102.1, 102.2, 102.3, as shown.
    By way of example, as shown, a first component 102.1 of the focusing means 102 may be embodied as a bi-convex focusing lens 102.1, a second component 102.2 of the focusing means 102 as a negative meniscus lens 102.2, and a third component 102.3 of the focusing means 102 as a positive meniscus lens the inwardly curved side of the negative meniscus lens 102.2 may face, for example, the bi-convex converging lens 102.1, and the outwardly curved side of the negative meniscus lens 102.2 may face the convex side of the positive meniscus lens 102.3.
    The light beam 112 exemplarily focused and exemplarily inclined by the second means 102 for focusing the light beam may encounter a third means 103 configured for a (second) parallel displacement of the light beam. The second parallel displacement of the light beam can be carried out, for example, by a tiltable plane-parallel plate 103.2. Thus, a light beam 115 offset at least twice parallel to the input light beam 106 (see FIG. 1) can be generated.
    Optionally, as shown, the third means 103 may also comprise two additional wedge prisms 103.1, 103.3, which may, inter alia, be used to compensate for light beam guidance errors which may arise when passing through the exemplary plane-parallel plate 103.2.
    The second parallel offset realized by the exemplary plane-parallel plate 103.2 can, among other things, thus be finely adjusted and corrected by the exemplary additional wedge prisms 103.1, 103.3.
    In addition, the optional additional wedge prisms 103.1, 103.3 may also serve to effect a second, for example, well-defined and constant skew of the light beam, the direction of which is opposite to the direction of the variable inclination of the light beam caused by the described upstream means 102 of FIG Focusing, is.
    For example, the light beam 116 which is focused and inclined relative to the input light beam 106 and at least doubly offset in parallel may be emitted from the optical device e.g. exit via a protective window 110 and used for machining a workpiece 111 in a workpiece processing level.
    Fig. 3 exemplifies schematically the geometry of a light beam 202, e.g. after exiting an exemplary optical device.
    Thus, for example, light beam 202 may correspond to light beam 116 of FIG. 1 and FIG. 2, i. E. For example, compared to an input light beam (not shown), for example, focused and tilted, as well as offset at least twice in parallel.
    In other words, the light beam 202 may, for example, be focused on a focal point 204, or focused on a caustic 208 (due to the finite spatial extent of the light beam) for machining a workpiece (not shown).
    Incidentally, the focal point 204 can lie above, in or below a workpiece processing plane (not shown), or lie above, in or below the workpiece.
    By rotation of the optical device (not shown), or by the rotation of some or all means of the optical device, e.g. the exemplary means 107, 107.1, 107.2, 101, 101.1, 101.2, 102, 102.1, 102.2, 102.3, 103, 103.1, 103.2, 103.3, e.g. around a axis of rotation 201 which may coincide with the optical axis of the device, the beam focus may move on a path 206, for example on a trephine track of diameter 207, e.g. can be freely adjusted by a second parallel displacement (not shown) of the light beam (e.g., third means 103, not shown).
    Also shown is an exemplary angle of attack 205 of the light beam 202, which may be defined, for example, as an angle between the centerline 203 of the light beam 202 and the axis of rotation 201 (which may coincide with the optical axis of the device). The size of the angle of attack can e.g. by the first parallel offset, e.g. executed by a first means 101 of the device (not shown).
    Figures 4a, 4b, 4c, 4d, 4e and 4f show, by way of example, a portion of the variety of processing capabilities of workpieces 311, 411, 511, 611, 711, 811 associated with an exemplary optical device, e.g. the optical device 100, are realized.
    In particular, exemplary bores 312, 412, 512, 612, 712, 812 are shown, which by the exemplary radiation geometry 300, 400, 500, 600, 700, 800 of a light beam 307, 407, 507, 607, 707, 807 Exit from an exemplary optical device (not shown) can be realized.
    By way of example, schematic marginal rays 308, 309, 408, 409, 508, 509, 608, 609, 708, 709, 808, 809 delimiting the associated light beam 307, 407, 507, 607, 707, 807, and wherein one of the marginal rays, eg 308, 408, 508, 608, 708, 808, the geometry of the bore wall 313, 413, 513, 613, 713, 813, determined.
    The focal point 305, 405, 505, 605, 705, 805 of the light beam 307, 407, 507, 607, 707, 807 occurring from an exemplary optical device may be both above, inside, or below a workpiece to be machined , For example, the focal point 305, 405, 505 of the radiation geometry 300, 400, 500 lies on the workpiece 311, 411, 511, or e.g. on a workpiece upper side 301, 401, 501, and the focal point 605, 705, 805 of the radiation geometry 600, 700, 800 for the workpiece 611, 711, 811, e.g. on a workpiece underside 602, 702, 802.
    FIGS. 4a, 4b, 4c, 4d, 4e and 4f likewise show exemplary angles of incidence 310, 410, 510, 610, 710, 810 which describe the oblique position of the light beam and which, for example, as an angle between the center line of the light beam 307 , 407, 507, 607, 707, 807 and an axis of rotation 303, 403, 503, 603, 703, 803 of the optical device (which may, for example, coincide with the optical axis of the optical device).
    FIGS. 4a, 4b, 4c, 4d, 4e and 4f also show exemplary parallel displacements 304, 404, 504, 604, 704, 804 of the light beams 307, 407, 507, 607, 707, 807, for example measured with respect to one another Rotation axis 303, 403, 503, 603, 703, 803 of the optical device. Said exemplary parallel displacements 304, 404, 504, 604, 704, 804 may, for example, be considered as a possible orbit radius for a web which transmits a light beam for processing the web
    Workpiece describes. For example, the offsets 304, 404, 504, 604, 704, 804 may also define bore diameters.
    The parallel displacements 304, 404, 504, 604, 704, 804, and thus said track radii or bore diameters, are defined by the means of an optical device (not shown), e.g. by a parallel offset performed by a third means of the optical device (not shown, see for example the third means 103), freely adjustable.
    The wall angles of the bores, which are e.g. can be described as angles between the bore walls 313, 413, 513, 613, 713, 813 and the rotation axis 303, 403, 503, 603, 703, 803 of the optical device, can be detected by said angles of incidence 310, 410, 510, 610, 710, 810, and the Strahlkaustik (not shown) are determined.
    Depending on the relative position and orientation of the workpiece to the light beam 307, 407, 507, 607, 707, 807 different bore geometries can be achieved.
    For the purpose of distinguishing the bore geometries shown below, it is assumed below, for example for the sake of simplicity, that the rotation axis 303, 403, 503, 603, 703, 803 is a Z-axis of an orthogonal reference system and its X, Y axes are a possible plane parallel define, for example, a positive parallel displacement of a light beam as a parallel displacement along the positive X-axis relative to a rotation of the optical device and a negative parallel displacement of a light beam as a parallel offset along the negative X-axis relative to a rotation of the optical device can be done.
    For the sake of clarity, exemplary X, Y axes are shown as axes 314, 315 and 614, 615 only in Figs. 4a and 4d.
    Hereinafter, the expression of an angle of attack of> 0 °, for example, an angle of attack, which differs only slightly from zero, e.g. an angle of attack greater than zero but less than 3 °, or e.g. an angle of attack which may correspond to the divergence of a light beam coupled into the optical device.
    Furthermore, by the expression of an angle of incidence »0 °, an angle of attack can be understood, which is e.g. greater than 3 °, or e.g. an angle of attack which may be greater than the divergence of a light beam coupled into the optical device.
    Following this exemplary convention, the bore geometry 300 includes e.g. a negative parallel offset 304 and an angle of attack 310 »0 ° and describes an exemplary hole with a positive hole opening (positive wall angle, positive taper). A positive bore opening may be e.g. be defined so that the optical system facing, or the optical axis facing, bore diameter is greater than the optical system, or the optical axis, facing away bore diameter.
    By contrast, the bore geometry 400 has, for example, a positive parallel offset 404 and an angle of attack 410 ° 0 ° and describes an exemplary bore with a negative bore opening (negative wall angle, negative taper). A negative bore opening may be e.g. be defined so that the optical system facing, or the optical axis facing, bore diameter is smaller than the optical system, or the optical axis, facing away bore diameter.
    The bore geometry 500 has a negative parallel offset 504 and an angle of attack 510> 0 ° (i.e., slightly different from zero) and describes an exemplary cylindrical bore.
    The bore geometry 600 has e.g. a negative parallel offset 604 and an angle of attack 610 »0 ° and describes another exemplary hole with positive hole opening (positive wall angle, positive taper).
    The bore geometry 700 includes e.g. a positive parallel offset 704 and an angle of attack 710 »0 ° and describes another exemplary hole with negative hole opening (negative wall angle, negative Ta-per).
    The bore geometry 800 includes e.g. a positive parallel offset 804 and an angle of attack 810> 0 ° (i.e., slightly different from zero), and describes another exemplary cylindrical bore.
    While in the hole geometries 300, 400, 500, the focal point 305, 405, 505 on the workpiece 311, 411, 511 is located, the focal point 605, 705, 805 for the hole geometries 600, 700, 800, for example, on a workpiece lower side 602nd , 702, 802 of the workpieces 611, 711, 811.
    With the focus point 605 on the workpiece lower side 602, for example, larger positive wall angles can be achieved, such as e.g. in the hole geometry 600, with negative parallel offset 604 and angle of attack 610 »0 °, than with a focal point 305 on the workpiece top 301, e.g. in the hole geometry 300, with negative parallel offset 304 and angle of attack 310 »0 °.
    For example, with the focus point 405 on the workpiece top 401, larger negative wall angles can be achieved, e.g. in the bore geometry 400, with positive parallel offset 404 and angle of attack 410 »0 °, than with a focal point 705 on the workpiece bottom 702, e.g. in the hole geometry 700, with positive parallel offset 704 and angle of attack 710 »0 °.
    Incidentally, it is also conceivable that, during the machining of the workpiece by the light beam of an exemplary optical device, the focal point moves along the axis of rotation 303, 403, 503, 603, 703, 803 of the axis of rotation within the workpiece 311, 411, 511, 611, 711, 811 can.
    The following are five leaves with the figures Fig. 1, Fig.2, Fig.3, Fig.4a, 4b, 4c, 4d, 4e, and Fig. 4f.
    The reference numerals are assigned as follows. 100 Exemplary optical device for guiding a light beam 101 (first) means configured for (first) parallel displacement of a light beam 101.1 (first) possible component of the (first) means for a (first) parallel displacement of a light beam, e.g. (first) wedge prism 101.2 (second) possible component of the (first) means for a (first) parallel displacement of a light beam, e.g. (second) wedge prism 102 (second) means configured for focusing a light beam, e.g. for focusing and skewing a light beam 102.1 (first) possible component of the (second) means for focusing a light beam 102.2 (second) possible component of the (second) means for focusing a
    Light beam 102.3 (third) possible component of the (second) means for focusing a light beam 103 (third) means configured for (second) parallel displacement of a light beam 103.1 (first) possible component of the (third) parallel displacement means
    Light beam, e.g. Wedge prism 103.2 (second) possible component of the (third) means for parallel displacement of a
    Light beam, for example, a plane-parallel plate, such as a tiltable plane-parallel plate 103.3 (third) possible component of the (third) means for a parallel displacement of a
    Light beam, e.g. Wedge prism 104 Exemplary possible rotation axis of the optical device may preferably coincide with the optical axis of the optical device for guiding a light beam. 105 Exemplary possible rotation of the optical device for guiding a light beam, or the means or components of the optical device 106 light beam, e.g. Laser beam, for example collimated laser beam, input light beam 107 (fourth) means configured for rotation of the polarization plane of a light beam, for example by means of a wave plate pair, for example by means of a lambda / 4 plate pair 107.1 (first) possible component of the (fourth) means for rotation of the plane of polarization a light beam, eg (first) lambda / 4-plate 107.2 (second) possible component of the (fourth) means for a rotation of the polarization plane of a light beam, e.g. (second) lambda / 4 plate 108 Exemplary displaceability / displacement movement of a means or component of an optical device means, e.g. Displaceability along or parallel to an axis of rotation of the optical device, for example displacement of a wedge prism of the (first) means for a (first) parallel displacement of a light beam 109 Exemplary tiltability of a means or component of an optical device, e.g. Tiltability about an axis orthogonal to an axis of rotation of the optical device, for example, tiltability of a (third) means for (second) parallel displacement of a light beam, for example tiltability of a plane-parallel plate 110 Optional exemplary protective window through which the light beam from the optical
    Device can exit and focus on a workpiece can hit 111 Exemplary workpiece to be machined in the workpiece processing level, e.g. a sheet 112 of light beam, e.g. Laser beam, after passage of the (second) means configured for focusing a light beam, e.g. for a focusing and tilting of a light beam 113 Exemplary (for the first time) parallel offset light beam after passage of the (first)
    Means configured for a (first) parallel displacement of the light beam 114 focal plane, which in this case corresponds to the workpiece processing plane 115 light beam, e.g. Laser beam, after passage of the (third) means configured for (second or further) parallel displacement of a light beam 116 Output light beam 200 Exemplary beam path of a light beam after exiting an exemplary optical device 201 Rotation axis of an exemplary optical device, e.g. optical axis 202 output light beam, light beam after exit from an exemplary optical device 203 centerline 204 focus point 205 angle of attack, beam angle 206 trepanning circle or track on which the laser focus runs 207 diameter of the trepanning circle 208 light beam caustic, area of light beam focusing 300, 400, 500, 600, 700, 800 Exemplary radiation geometry, bore geometry 301, 401, 501, 601, 701, 881 Workpiece side, eg Top 302.402, 502, 602, 702, 802 workpiece side, e.g. Bottom 303.403, 503, 603, 703, 803 rotation axis, optical axis 304.404, 504, 604, 704, 804 parallel offset with respect to rotation axis or optical axis 305.405, 505, 605, 705, 805 focus point 306.406, 506, 606, 706, 806 centerline 307.407, 507, 607, 707, 807 light beam, eg Laser beam, exemplary light beam after exiting an exemplary optical device 308.408, 508, 608, 708, 808 (first) edge beam 309.409, 509, 609, 709, 809 (second) edge beam
    权利要求:
    Claims (15)
    [1]
    310, 410, 510, 610, 710, 810 Angle of attack 311, 411, 511, 611, 711, 811 Workpiece 312, 412, 512, 612, 712, 812 Exemplary bore 313, 413, 513, 613, 713, 813 Bore wall 314, 614 Exemplary X-axis of an exemplary orthogonal reference system 315, 615 Exemplary Y-axis of an exemplary orthogonal reference system claims
    Optical apparatus (100) for guiding a light beam, in particular a laser beam for machining workpieces, and having at least one rotation axis (104), comprising: at least one rotatable first means (101) configured for a first parallel displacement of the light beam, at least one second Means (102) configured for focusing the light beam, and at least one rotatable third means (103) configured for a second parallel displacement of the light beam.
    [2]
    The optical device (100) of claim 1, wherein the first means (101) is rotatable about the at least one rotation axis (104), and wherein the third means (103) is rotatable about the at least one rotation axis (104).
    [3]
    The optical device (100) of claim 1 or 2, wherein the second means (102) is configured to be rotatable for focusing the light beam, e.g. is rotatable about the at least one axis of rotation (104).
    [4]
    4. Optical device (100) according to one of the preceding claims, wherein the first means (101) for a first parallel displacement of the light beam is designed as a wedge-prism pair or as a plane-parallel optical disk or as an adjustable mirror system.
    [5]
    5. Optical device according to one of the preceding claims, wherein the first means (101) for a first parallel displacement of the light beam is designed as a wedge-prism pair and wherein a wedge prism of the wedge-prism pair along the at least one rotation axis (104) is displaceable.
    [6]
    6. Optical device (100) according to one of the preceding claims, wherein the third means (103) for a second parallel displacement of the light beam is designed as a wedge-prism pair or as a plane-parallel plate or as an adjustable mirror system.
    [7]
    7. An optical device (100) according to claim 6, wherein the third means (103) for a second parallel displacement of the light beam is designed as a tiltable plane-parallel plate.
    [8]
    8. An optical device (100) according to claim 6 or 7, wherein the third means (103) for a second parallel displacement of the light beam comprises an additional wedge prism pair.
    [9]
    The optical device (100) according to one of the preceding claims, configured such that the first means (101) for a first parallel displacement of the light beam and the third means (103) for a second parallel displacement of the light beam are rotatable at the same rotational frequency.
    [10]
    The optical device (100) according to one of the preceding claims 1 to 8, configured such that the first means (101) for a first parallel displacement of the light beam is rotatable at a first rotational frequency and the third means (103) for a second parallel displacement of the first Light beam is rotatable at a second rotational frequency, wherein the two rotational frequencies are different from each other.
    [11]
    The optical device (100) of any one of the preceding claims, wherein the second means (102) configured to focus the light beam comprises at least one lens.
    [12]
    The optical device (100) of any preceding claim, wherein the second means (102) is configured to be slidable along the at least one axis of rotation (104) for focusing the light beam.
    [13]
    13. The optical device according to claim 1, wherein the second means configured to focus the light beam comprises a plurality of lenses, the lenses being individually displaceable along or parallel to the at least one rotation axis are.
    [14]
    The optical device (100) of any one of the preceding claims, wherein the device comprises at least one additional means (107) for rotating the polarization plane of the light beam, wherein e.g. the additional means (107) comprises a pair of lambda / 4 plates, and wherein the additional means (107) is rotatable, e.g. about which at least one axis of rotation (104) of the device is rotatable.
    [15]
    15. A method for guiding a light beam, in particular a laser beam for machining workpieces by means of an optical device, comprising the following steps: a first parallel displacement of a light beam coupled into the optical device, e.g. by means of a first means (101) rotatable about an axis of rotation (104) of the optical device, focusing of the light beam, for example focusing and tilting of the light beam, e.g. by means of a second means (102) rotatable about an axis of rotation (104) of the optical device, and second parallel displacement of the light beam coupled into the optical device, e.g. by means of a third means (103) rotatable about an axis of rotation (104) of the optical device.
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    同族专利:
    公开号 | 公开日
    DE102015226083A1|2017-06-22|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    CN109048051A|2018-08-27|2018-12-21|江苏大学|A kind of three-dimensional adjustable laser beam expands focusing device|DE112008000681A5|2007-03-13|2010-04-15|Laser- Und Medizin-Technologie Gmbh, Berlin|Apparatus and method for guiding a light beam|
    法律状态:
    2020-01-31| AZW| Rejection (application)|
    优先权:
    申请号 | 申请日 | 专利标题
    DE102015226083.6A|DE102015226083A1|2015-12-18|2015-12-18|Optical arrangement for producing fine structures by means of laser radiation|
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