• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a slide valve (1). A parallel movement mechanism with guide grooves (35) and guide rollers (36a, 36b) and a vertical movement mechanism with cam grooves (33a, 33b) and cam rollers (32a, 32b) are arranged between a drive rod of an air cylinder and a valve assembly (15) of the spool valve (1) according to the invention , By moving the valve arrangement (15) in parallel with the valve seat surfaces (6, 7) around a pair of openings (3, 4) of a valve housing (2), and then moving them perpendicular to the valve seat surfaces (6, 7) with the vertical movement mechanism, the valve sealing elements (8, 9) can be brought into and out of contact with the valve seat surfaces (6, 7) by valve elements (5A, 5B), and the openings (3, 4) can be selectively opened and closed. The object of the present invention is to provide a non-sliding gate valve (1) capable of having not only a first opening (3) leading to a process chamber but also a second opening (4) leading to a transfer chamber leads to open and close in a non-abrasive manner. The spool valve (1) may be disposed between vacuum chambers of a semiconductor manufacturing device.
    公开号:CH708350B1
    申请号:CH01049/14
    申请日:2014-07-10
    公开日:2016-01-15
    发明作者:Tsuneo Ishigaki；Hiromi Shimoda；Hiroshi Ogawa
    申请人:Smc Corp；
    IPC主号:
    专利说明:

    The present invention relates to spool valves which are disposed between vacuum chambers of a semiconductor manufacturing apparatus or the like, and particularly relates to spool valves which are suitable, a first opening leading to a process chamber, and a second opening leading to a transfer chamber in non-abrasive way to open and close optionally.
    Gate valves are typically used for opening and closing an opening leading to a vacuum chamber in a semiconductor manufacturing apparatus or the like, and have a valve stem to which a valve plate is attached, and have a pneumatic cylinder connected to the valve stem and are configured to actuate the valve stem by means of the air cylinder to bring a sealing member of the valve plate into and out of contact with a valve seat surface which is provided around the opening and thereby open and close the opening shut down.
    With respect to the opening and closing of this opening in spool valves, there are mainly known a method in which a valve stem is rotated by one point, thereby opening and closing the valve plate, and a method in which a valve assembly consisting of a valve stem and a valve plate is moved perpendicular to a valve seat surface and thereby the valve plate is opened and closed.A spool valve employing the latter method can simultaneously bring the entire circumference of a sealing member of a valve plate into and out of contact with a valve seat surface of the opening, and thus open and close the opening without causing them to grind together and thus become non-abrasive Shifter valve referred to. Such a slide valve is capable of preventing twisting of the seal member or generation of abrasion powder generated due to the friction between the seal member and the seal face, and therefore has been receiving increased attention in recent years.
    An example of such a non-abrasive gate valve is disclosed in JP 2013 096 557. The shut-off valve described in JP 2013 096 557, as shown in Figs. 11 and 12, has two cam grooves 130, each formed in a pair of cam rails 128 which are secured to drive rods 109 via an intermediate cross member 124 which Cam grooves lie in a direction inclined to the valve seat 110 direction, and has two cam rollers 133 which are fixed to each left and right side surface of a lever member 112 and fitted in the respective cam grooves 130. Roller stoppers 136, which are mounted on the cam rollers 133, are in contact with contact portions 137 formed in roller carriers 132. The cam rails 128 move upward even if the upward movement of the lever member 112 is stopped and a compression spring 125 is compressed, and each cam groove 130 moves upwardly relative to the corresponding cam roller 133. Thereby, the cam rollers 133 are pressed by the groove walls of the inclined cam grooves 130, and the valve plate 105 and the valve stem 107 move perpendicular to the valve seat surface 110.
    The non-slip gate valve disclosed in JP 2013 096 557 opens and closes an opening leading to a process chamber in a non-abrasive manner. In order to improve the efficiency of servicing a spool valve and a process chamber, a spool valve capable of opening and closing another port leading to a transfer chamber in a non-abrasive manner is desired.
    That is, it is an object of the present invention to provide a non-sliding gate valve which is capable of not only a first opening leading to a process chamber but also a second opening leading to a transfer chamber. in a non-abrasive way to open and close.
    In order to achieve the above object, a slide valve according to claim 1 is proposed. According to the present invention, the spool valve comprises a valve housing, the opposite side walls of which are provided with a first opening leading to a process chamber and a second opening leading to a transfer chamber, and having valve seat surfaces parallel to each other and about the openings run around; a valve assembly comprising a valve stem having longitudinal distal and proximal ends, and plate-like first and second valve members secured to the distal end of the valve stem and having valve seal members corresponding to the valve seat surfaces; and a pneumatic cylinder whose drive rod is connected to the valve stem. The valve assembly can be moved by the compressed air cylinder from a fully open position in which the valve elements are not opposed to the openings, via an intermediate position in which the valve elements opposite the openings in a first closed position in which the valve sealing member of the first valve element against the the first opening extending valve seat surface is pressed to close the first opening, and a second closed position are moved, in which the valve sealing element of the second valve element is pressed against the valve seat surface extending around the second opening to close the second opening. The spool valve has a connection mechanism connecting the drive rod and the valve stem such that they can be displaced relative to each other, a parallel motion mechanism moving the valve assembly parallel to the valve seat surfaces, a vertical movement mechanism moving the valve assembly perpendicular to the valve seat surfaces, and a stop mechanism. which stops the parallel movement of the valve assembly when the valve assembly is moved from the fully open position to the opposite intermediate position by the parallel movement mechanism and permits the vertical movement of the valve assembly produced by the vertical movement mechanism. The link mechanism includes a cross member secured to the drive rod, a lever member attached to the proximal end of the valve stem, and a compression spring disposed between the lever member and the cross member. The parallel movement mechanism has a pair of left and right cam rails fixedly connected to the cross member so as to face the left and right side walls of the lever member, a guide groove provided in each of the cam rails in the parallel moving direction, and a A plurality of guide rollers fixed to each of a pair of left and right roller carriers, which are fixed to a cover to which the valve housing is mounted, and fitted in the guide groove. The vertical movement mechanism has a plurality of cam grooves provided in each of the pair of cam rails, and a plurality of cam rollers provided on each of the left and right side surfaces of the lever member and fitted in the cam grooves; the cam grooves have, in the parallel direction of movement, an initial end position on the valve element side, a terminating end position on the other side thereof, and an intermediate position therebetween, and in the vertical direction of movement, the intermediate position is closer to the first opening than the initial end position and the termination end position is closer to the second opening than the initial end position; and the cam rollers are in the initial end position during the parallel movement in which the valve assembly is moved from the fully open position to the intermediate intermediate position, and the valve assembly assumes the first closed position when the cam rollers are moved to the intermediate position, and The valve assembly assumes the second closed position when the cam rollers are moved to the final end position.
    Preferably, and in view of the strength, in the present invention, each of the guide grooves provided in the pair of left and right cam rails has a widened portion with an enlarged groove width at the end closest to the valve members and one of the plurality of guide rollers , which are mounted on each of the left and right roller carriers and closest to the valve elements, is designed to be larger in diameter than the others and fitted in the extended section.
    Preferably, in the present invention, the stop mechanism in the vertical direction of rotation rotatably mounted stop rollers, and contact members with which the stop rollers come in and out of contact, the stop rollers and the contact members facing each other on the lever member and the cover are provided, and When the valve assembly is moved from the fully open position to the opposite intermediate position by the parallel movement mechanism, the stop rollers come into contact with the contact members and stop the parallel movement of the valve assembly, and when the valve assembly is vertically moved by the vertical movement mechanism, the stop rollers roll along the contact members ,In this case, it is preferable that pairs of stop rollers and contact members are provided on both left and right sides of the valve stem in the stop mechanism, and it is more preferable that the contact members comprise buffer rods with contact surfaces at one longitudinal end thereof Stop rolls are in rolling contact, and buffer elements with which the other longitudinal ends of the buffer bars in contact.
    According to the inventive shut-off valve, the valve sealing elements of the valve elements in a non-abrasive manner in and out of contact with the valve seat surfaces can be brought by the valve assembly with the first valve element and the second valve element perpendicular to the valve seat surfaces, which around the first opening and the second opening are moved, and thus twisting of the valve sealing members, the generation of abrasion powder, and so forth, not only at the opening and closing of the first opening leading to the process chamber can be avoided, but also at the opening and closing the second opening leading to the transfer chamber. As a result, even when the second opening is closed during the maintenance of the process chamber, the first valve element, etc., vacuum leakage by turning the valve seal member, the generation of abrasive powder, etc., can be avoided, and the efficiency of the maintenance work can be improved.<Tb> FIG. 1: <SEP> shows a split sectional view of an embodiment of a slide valve according to the invention, wherein the left half shows a state in which a valve assembly is in a fully open position, and wherein the right half shows a state in which the valve assembly in a Intermediate position is;<Tb> FIG. Fig. 2: <SEP> is an exploded perspective view of a part of Fig. 1;<Tb> FIG. 3: <SEP> shows a vertical sectional view along the axis X1 of FIG. 1;<Tb> FIG. 4: <SEP> is a vertical sectional view of the main part of the left half of FIG. 1;<Tb> FIG. Fig. 5: <SEP> is a vertical sectional view of the main part of the right half of Fig. 1;<Tb> FIG. 6: <SEP> shows a sectional view of a state in which the valve arrangement is in a first closed position;<Tb> FIG. Fig. 7: <SEP> is a vertical sectional view of Fig. 6;<Tb> FIG. 8: <SEP> is a sectional view showing a state in which the valve assembly is in a second closed position;<Tb> FIG. 9: <SEP> is a vertical sectional view of Fig. 8;<Tb> FIG. 10a: <SEP> shows a sectional view of a stop mechanism, and<Tb> FIG. 10b <SEP> is a sectional view showing a state in which a stop roller is in contact with a buffer rod of a contact member;<Tb> FIG. 11: <SEP> is a sectional view of a conventionally used spool valve, the left half showing a state in which a valve plate is in a valve open position, and the right half showing a state where the valve plate is in an intermediate position;<Tb> FIG. 12: <SEP> is an exploded perspective view of the main part of FIG. 11.
    A non-slip gate valve 1 according to the present invention is disposed between vacuum chambers in an apparatus for manufacturing semiconductors or the like to selectively open and supply two openings each leading to a process chamber and a transfer chamber in a non-abrasive manner Close, and includes a valve housing 2 having a first opening 3 and a second opening 4, which are opposed to each other, and with parallel and around the openings formed valve seat surfaces 6 and 7, and includes a first valve element 5A, which in the valve housing. 2 is housed and on one surface, which is closest to the first opening 3, a valve sealing member 8 made of an elastic material, such as an O-ring, is attached, and comprises a second valve element 5 B, on its one surface, the next to the second opening 4, a valve sealing element 9 of a m elastic material, such as an O-ring, and comprises a valve stem 10, at the distal end of which the first and second valve elements 5A and 5B are mounted back to back to each other, and includes air cylinder 20, the drive rods 11 with the valve stem 10 are attached.A valve assembly 15 is formed by the first and second valve members 5A and 5B and the valve stem 10.
    The valve housing 2 has a substantially rectangular parallelepipedic box shape, as can be seen from Fig. 1 and Fig. 3, and wherein opposite left and right side walls 2a and 2b thereof respectively provided with the first opening 3 and the second opening 4 which are horizontally elongated and substantially rectangular. The first opening 3 leads to a process chamber (not shown), and the second opening 4 leads to a transfer chamber (not shown). The first and second valve elements 5A and 5B open and close the respective first and second openings 3 and 4, and have a horizontal elongated rectangular shape, like the first and second openings 3 and 4, and are formed in the shape of a plate having a larger size Surface area than the openings.
    Of the two side walls 2a and 2b, a side wall 2a (the closest to the process chamber) on its inner surface on a valve seat surface 6, which forms a flat surface and in the form of a substantially rectangular, the first opening 3 surrounding ring is trained. The valve sealing member 8, which is in the form of a substantially rectangular ring and comes into contact with the valve seat surface 6 for hermetically sealing the first opening 3, is fixed on the surface of the first valve element 5A closest to the first opening 3. As with the one side wall 2a, the other side wall 2b has, on its inner surface, the valve seat surface 7, which is a flat surface and formed in the shape of a substantially rectangular ring around the second opening 4. The valve sealing member 9 which is formed in a substantially rectangular ring shape and comes into contact with the valve seat surface 7 for hermetically sealing the second opening 4 is mounted on the surface of the second valve element 5B closest to the second opening 4.
    The first and second valve elements 5A and 5B are detachably and fastened fastened with releasable fastening means, such as screws, wherein the mounting surfaces for the valve sealing elements 8, 9 back to back to each other, to surfaces which are opposite to the two side walls 2a and 2b and at the distal end (the upper end in Fig. 1) of the cylindrical valve stem 10 are provided. A cover 12 is hermetically attached to a bottom side of the valve housing 2, which is substantially perpendicular to the side walls 2a and 2b, wherein the proximal end (the lower end in Fig. 1) of the valve stem 10 from the valve housing 2 to the outside by a in the center of the cover 12 provided through hole 12a extends. In this case, the through hole 12a has a minimum diameter, which is slightly larger than the diameter of the valve stem 10, to allow the vertical movement of the entire valve assembly 15 described later. The axis X1 of the valve stem 10 is parallel to the valve seat surfaces 6 and 7, and thus the entire valve assembly 15 is parallel to the valve seat surfaces 6 and 7th
    A lever member 13 is attached to the proximal end of the valve stem 10. The lever member 13 is formed substantially H-shaped and has a first recessed part 13 a, which in the middle of the side closest to the cover 12 is inserted (the upper side in Fig. 1), has a pair of First shoulder portions 13b on the left and right sides of the recessed portion 13a, which form the side walls of the recessed portion 13a, have a second recessed portion 13c formed in the center of the side that faces in the direction of the axis X1 (the lower side in FIG Fig. 1) of the cover 12 faces away, and has a pair of second shoulder portions 13d, on the left and right sides of the recessed portion 13c and which form the side walls of the recessed portion 13c. The proximal end of the valve stem 10 is fixed to the first recessed part 13a, and one end of a compression spring 31 described later in detail is connected on the opposite side thereof to the second recessed part 13c.
    The valve assembly 15 moves sequentially from a fully open open position in which the first and second valve elements 5A and 5B are not opposite to the first opening 3 and the second opening 4 and the two openings 3 and 4 are fully open via a opposite intermediate position, in which the valve elements 5 A and 5 B opposite the openings 3 and 4 with a gap therebetween, to a first closed position in which the valve seal member 8 of the first valve element 5 A is pressed against the first opening 3 extending valve seat surface 6 to the hermetically closing the first opening 3, and to a second closed position in which the valve sealing element 9 of the second valve element 5B is pressed against the valve seat surface 7 extending around the second opening 4 in order to hermetically close the second opening 4.
    The through-hole 12a has an enlarged-diameter portion 12b, the expanded diameter being on the side closest to the proximal end of the valve stem 10 (on the side closest to the outer surface of the cover 12) , One end of a bellows 14 surrounding the valve stem 10 is fixed to the enlarged diameter portion 12b. The other end of the bellows 14 is attached to a flange 10 a at the proximal end of the valve stem 10. The bellows 14 is formed to expand and contract with the vertical movement of the valve stem 10. Both ends of the bellows 14 are hermetically fixed, and the interior of the valve housing 2 is completely separated from the outside by the bellows 14.
    Two pneumatic cylinders 20 with their respective drive rod 11 are mounted on the outer surface of the cover 12, such that they are mutually opposed to the valve stem 10, with the lever member 13 therebetween. Specifically, the air cylinders 20 each include a cylinder housing 21 whose outer peripheral shape of its cross section is formed in a substantially rectangular shape, a stopper piston 22 on the upper end side (the side where the drive rod 11 is not guided outwardly), a driving piston 23, the rod side (the side on which the drive rod is guided to the outside) below the stopper piston 22 and is arranged coaxially with the stop piston 22, wherein the proximal end of the drive rod 11 is fixed to the drive piston 23. The pair of pneumatic cylinders 20, 20 are each fixed with their head side on the lower surface of the cover 12, wherein the respective axis line X2 of the drive rods 11 is parallel to the axis line X1 of the valve stem 10.
    A part of the cylinder housing 21 also serves as a roller carrier to which first and second guide rollers 36a and 36b, which will be described later, are attached. Thus, in the following description, the part of the cylinder housing 21 to which the guide rollers 36a and 36b are attached will also be referred to as the "roller carrier 27". It is understood that the roller carrier 27 may also be formed separately from the cylinder housing 21.
    A first cylinder S1 having a large diameter is provided on the front side inside the cylinder housing 21, a second small diameter cylinder S2 is provided on the rod side thereof, and the cylinders S1 and S2 communicate with each other. The stopper piston 22 is slidably disposed in the first cylinder S1, the drive piston 23 is slidably disposed in the second cylinder S2, and a cylindrical stopper member 22a having a diameter smaller than the inner diameter of the second cylinder S2 is fixedly connected to the rod side of the stopper piston 22.As a result, in the pneumatic cylinder 20, a first cylinder chamber 24 is formed on the rod side of the driving piston 23, a second cylinder chamber 25 is formed between the driving piston 23 and the stopper piston 22, and a third cylinder chamber 26 is formed on the end face of the stopper piston 22. The first cylinder chamber 24, the second cylinder chamber 25, and the third cylinder chamber 26 are each provided with an inlet / outlet port (not shown).
    The distal ends of the drive rods 11 of the pneumatic cylinders 20 are fixed to the left and right ends of a plate-like, horizontally extending cross member 30 which is on the side of the lever member 13, which is the cover 12 opposite (below the lever member 13) attached , The compression spring 31 is interposed between the second recessed portion 13c as a spring seat of the lever member 13 and a recessed spring seat 30a provided in a surface of the cross member 30 and opposed to the second recessed portion 13c (the upper side of the cross member 30).
    The compression spring 31, which is arranged between the cross member 30 and the lever member 13, has a spring force which is capable of carrying the weights of the valve assembly 15 and the lever member 13. This spring force urges second cam rollers 32b, which will be described later, against the upper ends of the second cam grooves 33b closest to the valve members 5A and 5B, and the valve assembly 15 and the cross member 30 thereby become united with each other when the valve members 5A and 5B be moved up and parallel to the first and second openings 3 and 4. When the valve elements 5A and 5B are moved perpendicular to the first and second openings, the compression spring 31 is compressed and allows the relative movement between the valve assembly 15 and the cross member 30. That is, the compression spring 31, the lever member 13 and the cross member 30 form a link mechanism for connecting the valve stem 10 to the drive rods 11 so that they can be displaced relative to each other.
    A pair of left and right plate-shaped cam rails 34, 34 are fixed to the upper side of the cross member 30 so as to be parallel to the axis X1 of the valve stem 10 with their inner surfaces facing the left and right side surfaces of the lever member 13 , A closed bottom guide groove 35, which extends in a direction parallel, along the axis X1 extending direction of movement, in the roller carrier 27, 27 opposite outer surface of each cam rail 34, 34 is formed. Two upper and lower lower closed first and second cam grooves 33a and 33b are provided in each of the inner surfaces along the axis X1. Here, the depth of the guide groove 35 and the cam grooves 33a and 33b is larger than half the thickness of the cam rail 34. Likewise, the guide groove 35 and the cam grooves 33a and 33b are shifted from each other in the width direction of the cam rail 34 so as to move in the direction of the Do not overlap the thickness of the cam rail 34.
    The number of the cam grooves 33a and 33b and their mutual positioning arrangement are not limited to those in this embodiment. Three or more cam grooves may be provided in each cam rail 34, and cam grooves may be offset from each other in the width direction of the cam rail 34. When the strength of the cam rail 34 is ensured, the guide groove 35 and the cam grooves 33a and 33b in the cam rails 34 may be open.
    The guide groove 35 is continuous and with a widened portion 35a of increased groove width and with a narrow portion 35b which is narrower than the widened portion 35a. The widened portion 35a is provided on the end closest to the valve members 5A and 5B (on the upper side in Fig. 2), and the narrow portion 35b is on the side closest to the cross member 30 (on the lower side in Fig 2). In this situation, the valve element closest to the end of the guide groove 35, that is, the valve elements closest to the end of the widened portion 35a on the upper end edge of the cam rail 34, open.
    The first and second cam grooves 33a and 33b each have an A position (initial end position), a position B (intermediate position), and a C position (final end position) sequentially from the valve element 5A side 5B (the upper side in Fig. 4) in the direction of the lever member 13 opposite side (the lower side in Fig. 4) in the parallel direction of movement parallel to the axis X1, in the vertical direction of movement perpendicular to the axis X1. The B position is located closer to the first opening 3 than the A position (on the left side of the position A in FIG. 4), and the C position is located closer to the second opening 4 than the A position (on the right side of the position A in Fig. 4). That is, the cam grooves 33a and 33b are respectively formed in a convexly curved shape in the direction of the first side opening 3 and extend vertically. The two cam grooves 33a and 33b have the same cam groove shape and are arranged along the axis line X1. The end nearest the valve elements 5A and 5B (the upper end) of the cam groove 33a is open at the upper end side of the cam rail 34.
    Two first and second guide rollers 36a and 36b fitted in the guide groove 35 are fixed to each of the inner side surfaces of the cylinder housings 21 of the two air cylinders 20 which are opposed to the valve shaft 10 so as to be vertical along the Axial line X1 are arranged spaced. In this situation, the upper first guide roller 36a is fitted in and guided by the widened portion 35a of the guide groove 35, and thus is formed to have a larger diameter than the other lower guide roller 36b fitted in the narrow portion 35b. In order to suppress wobble during the guidance, preferably, the diameter of the first guide roller 36a is substantially the same width as that of the widened portion 35a, and the diameter of the second guide roller 36b is substantially equal to the width of the narrow portion 35b.
    The guide rollers 36a and 36b are configured such that when the valve assembly 15 is in the fully open position, as shown in Fig. 4, only the lower second guide roller 36b is fitted in the guide groove 35, and such that When the valve assembly 15 reaches the opposite intermediate position, as shown in Fig. 5, the upper first guide roller 36a through the opening at the upper end of the guide groove 35 in the widened portion 35a of the guide groove 35 is fitted. In this way, the valve assembly 15 is movable from the fully open position parallel to the valve seat surfaces 6 and 7 in the opposite intermediate position. The cam rail 34, the guide groove 35 and the guide rollers 36a and 36b constitute a parallel movement mechanism for moving the valve assembly 15 vertically in parallel with the valve seat surfaces 6 and 7.
    Two first and second cam rollers 32 a and 32 b respectively fitted in the two cam grooves 33 a and 33 b provided in each cam rail 34 are fixed to each of the left and right side surfaces of the lever member 13. In this situation, the two cam rollers 32a and 32b are vertically spaced and fitted into the two cam grooves 33a and 33b, respectively.
    After the valve assembly 15 has been moved by the parallel movement mechanism from the fully open position to the intermediate position, the cross member 30 is further moved upward, while the valve assembly 15 is held by a stop mechanism in the position described later and the cam rails 34 on moved upward and the compression spring 31 is compressed. Due to the upward movement of the cam grooves 33a and 33b, the cam rollers 32a and 32b are pushed by the parts of the cam grooves which are inclined toward the first opening 3 side and moved from the position A to the position B. In this situation, the cam rollers 32a and 32b move in a direction perpendicular to the valve seat surface 6 approaching the valve seat surface 6 of the first opening 3, and the valve assembly 15 is thereby moved in the same direction. As a result, the valve assembly 15 assumes the first closed position in which the valve sealing member 8 of the first valve member 5A is pressed against the valve seat surface 6 of the first opening 3 to hermetically close the first opening 3.
    When the cam rail 34 is further moved upward due to the further upward movement of the cam grooves 33a and 33b, the cam rollers 32a and 32b are pushed by the parts of the cam grooves inclined toward the second opening 4 side are moved from the B position to the C position. In this situation, the cam rollers 32a and 32b are moved in a direction perpendicular to the valve seat surface 7, which approaches the valve seat surface 7 of the second opening 4, and the valve assembly 15 is thereby moved in the same direction. As a result, the first valve element 5A is separated from the first opening 3, and the valve assembly 15 assumes the second closed position in which the valve seal member 9 of the second valve member 5B is pressed against the valve seat surface 7 of the second opening 4 to hermetically seal the second opening 4 close.
    Thus, the cam grooves 33a and 33b and the cam rollers 32a and 32b form a vertical movement mechanism to move the valve assembly 15 perpendicular to the valve seat surfaces 6 and 7.
    This slide valve 1 further includes a stop mechanism 40 which, when the valve assembly 15 is moved by the parallel movement mechanism from the fully open position to the opposite intermediate position, stops the parallel movement of the valve assembly 15 and allows the vertical movement of the valve assembly 15 through the vertical movement mechanism , The stopper mechanism 40 has stopper rollers 41 which are rollably provided in the vertical direction of movement at the upper ends of the paired shoulder portions 13b, 13b located on the side of the lever member 13 closest to the cover 12, and has contact members 42 which are provided on the stop rollers 41 opposite parts of the outer surface (lower surface) of the cover 12 and with which the stop rollers 41 are brought into and out of contact. That is, pairs of stop rollers 41 and contact members 42 are provided on the left and right sides of the valve stem 10.
    As can be seen from Fig. 5, when the valve assembly 15 is moved by the parallel movement mechanism from the fully open position to the opposite intermediate position, the stop rollers 41 come into abutment with the contact members 42 and stop the parallel movement of the valve assembly 15, and as in 7 and 9, the stop rollers 41 roll with the vertical movement of the valve assembly 15 on the contact members 42 in the vertical direction of movement.
    As shown in Fig. 10, the stop rollers 41 are rotatably supported by means of their pivots 41a in roller housing cut-outs 43, which are provided in the upper end faces of the shoulder portions 13b, wherein parts of the stop rollers 41 protrude from the upper end faces. In view of the strength, it is preferable that, as in this embodiment, the roller housing cutouts 43 are recesses in the upper end surfaces of the shoulder portions 13b and both ends of the pivots 41a are supported by the shoulder portions 13b. However, recesses such as the roller housing cutouts 43 may be formed in the corners of the upper ends of the shoulder portions 13b, and only one end of each of the pivots 41a may be supported by the shoulder portions 13b.
    As shown in Fig. 10, the contact members 42 on buffer rods 45, with contact surfaces 45a at one longitudinal end (the lower end in Fig. 10), with which the stop rollers 41 come into rolling contact, buffer members 46, with which other longitudinal ends (the upper ends in FIG. 10) of the buffer rods 45 are in contact, and buffer holders 47 for fixing the buffer rods 45 and the buffer members 46 to the lower surface side of the cover 12.
    More specifically, buffer receiving openings 12c provided for fixing the contact members and having a substantially circular cross-section and having a bottom are provided in the lower surface of the cover 12, and an internal thread is formed on the inner peripheral surfaces thereof. The buffer rods 45 are formed of an inelastic material and in a substantially cylindrical shape, the contact surfaces 45a provided at one of the ends thereof are formed flat, and flange portions 45b are provided at the other end. The buffer members 46 are made of an elastic damping material in a substantially frusto-conical shape whose diameter decreases toward one end (the lower end in FIG. 10), and have distal end surfaces 46a at that end and flange portions 46b at one end Diameter that is substantially equal to or slightly smaller than that of the cushion receiving openings 12c are provided at the other end (the upper end in FIG. 10). The buffer holders 47 have a substantially cylindrical shape with a through hole 48 between one end thereof (the lower end in FIG. 10) and the other end thereof (the upper end in FIG. 10), and have tubular portions 47a with external threads in their outer peripheral surfaces are provided, in which the internal threads of the buffer receiving holes 12c are screwed, and have flange portions 47b at the lower ends of the tubular portions 47a, so as to have a larger diameter than the tubular portions 47a and the buffer receiving openings 12c.
    The through holes 48 of the buffer holders include large-diameter portions 48a at the upper end, small-diameter portions 48c at the lower end, and intermediate-diameter portions 48b. The buffer rods 45 are slightly smaller in diameter than the diameter of the small diameter portions 48c so that they can be slidably inserted into the through holes 48 of the holders and can be pushed out and in through the openings at the lower ends of the holders 47. The flange portions 45b of the buffer rods 45 are formed to be slightly smaller in diameter than the diameters of the large-diameter portions 48a, and have a larger diameter than the diameters of the intermediate-diameter portions 48b and are located in the large-diameter portions 48a , Therefore, when the stop rollers 41 are not in contact with the contact members 42, the flange portions 45b abut on step portions 48d forming the transitions between the large diameter portions 48a and the middle diameter portions 48b, so that the buffer rods 45 are out of the protrude lower ends of the buffer holder 47 without the buffer rods 45 from the through holes 48 fall.
    In the contact members, the buffer members 46 are encapsulated in the buffer receiving holes 12c with the flange portions 46b in contact with the lower surfaces of the buffer receiving holes 12c; the buffer rods 45 are coaxial with the buffer members 46 and are disposed with the flange portions 45b in contact with the distal end surfaces 46a of the buffer members 46, and are engaged with the step portions 48d of the inner peripheries of the buffer holders; and, as described above, the buffer holders 47 are fixed to the buffer receiving holes 12c by screwing such that the distal ends having the contact surfaces 45a of the buffer rods 45 project through the openings of the flange portions 47b at the lower ends thereof and the buffer members 46 and hold the buffer rods 45 in the buffer receiving holes 12c.Thus, when the lever member 13 is moved upward and the valve assembly 15 reaches the opposite intermediate position and the stop rollers 41 come in contact with the rods 45, as shown in Fig. 10 (b), the buffer members 46 are compressed, and the impact is absorbed. In this situation, as shown in the figure, the contact surfaces 45a of the buffer rods 45 are pushed up so as to be substantially flush with the openings of the buffer holders 47. When the valve assembly 15 is vertically moved by the vertical movement mechanism, the stop rollers 41 roll on the contact surfaces 45a of the buffer rods 45 in the vertical movement direction.
    Next, the operation of the spool valve 1 having the above-described configuration will be described. The left halves of Figs. 1 and 4 show a state in which the valve assembly 15 assumes the fully opened open position in which the first and second valve members 5a and 5b are separated from the first opening 3 and the second opening 4 and retracted to the lower end of the valve housing 2, that is, in a state in which the process chamber (not shown) connected to the first opening 3 and the transfer chamber (not shown) connected to the second opening 4 communicate with each other and a workpiece between the vacuum chambers can be transported. In this situation, the drive rods 11 of the air cylinder 20 extend completely downwards, and the valve assembly 15 including the first and second valve elements 5A and 5B is maximally lowered. Thus, the cam rollers 32a and 32b are brought into the A positions of the cam grooves 33a and 33b by the spring force of the compression spring 31, and the drive rods 11 and the valve assembly 15 are integrally connected to the cross member 30, the cam rails 34 and the lever member 13 therebetween , As described above, of the first and second guide rollers 36a and 36b, only the lower second small-diameter guide rollers 36b are fitted in the guide grooves 35.
    In the following description, the drive rods 11 and the cam rails 34, which are stationary relative to each other, referred to as the "rod side assembly", and the valve assembly 15 (the valve stem 10 and the first and second valve elements 5A and 5B) and Lever element 13, which are stationary relative to each other, are hereinafter referred to as "a shaft-side assembly".
    In the state of the fully opened open position, the compressed air in the second cylinder chambers 25 is discharged to the outside, compressed air is supplied to the first cylinder chambers 24 and the third cylinder chamber 26 to move the drive rods 11 upwards, and the rod-side assembly and the shank side Assembly are thereby moved together with each other up. As shown in the right half of Figs. 1 and 5, the valve assembly 15 reaches the opposed intermediate position in which the first and second valve members 5A and 5B face the first and second ports 3 and 4, respectively, however, the valve seal members 8 and 8 are 9 separated from the valve seat surfaces 6 and 7.
    In this situation, in the early phase of the upward movement of the rod side assembly and the shaft side assembly, as shown in Fig. 4, the cam rails 34 are guided by the lower second guide rollers 36 b in the guide grooves 35 and the rod side assembly and the shaft-side assembly is thereby moved parallel to the valve seat surfaces 6 and 7 along the axis line X1 of the valve stem 10 held parallel to the valve seat surfaces 6 and 7. When the valve assembly 15 approaches the opposite intermediate position as shown in Fig. 5, the first guide rollers 36a are fitted in the guide grooves 35 through the openings at the upper ends.
    When the valve assembly 15 reaches the opposite intermediate position, as illustrated in Fig. 5 with the dashed line, the stop rollers 41 come into contact with the contact members 42, and the shank-side assembly is thereby stopped in this position. However, after the stem-side assembly is stopped, since the compressed air in the second cylinder chambers 25 is discharged to the outside, the rod-side assembly continues to move upward compressing the compression spring 31 and the first and second cam grooves 33a and 33b are provided in the cam rails 34, move upwardly relative to the first and second cam rollers 32a and 32b. The cam grooves 33a and 33b move upward until the driving piston 23 is in contact with the stopper 22a of the stopper piston 22, as shown in FIG. In this situation, as shown in Fig. 7, the cam rollers 32a and 32b move to the positions B of the cam grooves 33a and 33b. In this situation, the cam rollers 32a and 32b are pressed by the inclined groove walls of the cam grooves 33a and 33b and move in a direction approaching the valve seat surface 6 against the first opening 3 which is perpendicular to the valve seat surface 6. As a result, the stem side assembly moves together with the cam rollers 32a and 32b in the same direction, causing the valve assembly 15 to move to the first closed position, and the valve seal member 8 of the first valve member 5a is pressed against the valve seat face 6 and the first opening 3 is hermetically sealed. In the hermetically sealed process chamber, a workpiece is processed.
    Radicals generated in the process chamber during workpiece machining affect the valve sealing member 8 of the first valve element 5A. Therefore, the valve seal member 8 must be replaced regularly. The inside of the process chamber must also be cleaned regularly. In the gate valve 1 according to the present invention, during such maintenance, by hermetically closing the second opening 4 leading to the transfer chamber with the second valve element 5b as shown in Fig. 8, the interior of the transfer chamber can be maintained in a vacuum state.
    In carrying out the maintenance, the compressed air in the second cylinder chambers 25 and the third cylinder chamber 26 is discharged to the outside, and compressed air pressure is supplied to the first cylinder chamber 24 to move the drive rods 11 upwards. The guide grooves 33a and 33b move upward until the driving pistons 22 come into contact with the front ends as shown in FIG. In this situation, as shown in Fig. 9, the cam rollers 32a and 32b respectively move to the C position of the cam grooves 33a and 33b. In this situation, the cam rollers 32a and 32b are pushed away from the inclined groove walls of the cam grooves 33a and 33b and move in a direction approaching the valve seat surface 7 of the second opening 4 which is perpendicular to the valve seat surface 7. As a result, the stem side assembly moves together with the cam rollers 32a and 32b in the same direction, thereby moving the valve assembly 15 to the second closed position, the valve seal member 9 of the second valve member 5B is pressed against the valve seat face 7, and the second opening 4 is hermetically sealed.Thus, by hermetically sealing the second opening 4 and maintaining the vacuum state in the associated transfer chamber during maintenance, the transfer chamber can be continuously used, and the operation of the apparatus after the maintenance can be accelerated.
    As described above, with the guide of the two cam rollers 32a and 32b by the respective cam grooves 33a and 33b of the cam rails 34, the movement of the valve assembly 15 from the opposite intermediate position to the first closed position or the second closed position becomes perpendicular to the valve seat surfaces 6 and 7 executed. The reaction force acting from the valve seat surfaces on the valve members 5A and 5B when the valve seal members 8 and 9 are pressed against the valve seat surfaces 6 and 7 is received by the two guide rollers 36a and 36b via the cam rails 34.
    In particular, when the valve assembly 15 is in the first closed position or the second closed position, as illustrated in FIGS. 7 and 9, the following equations apply:W1 x L2 = F x L1, andW2 = F + W1 = (1 + L1 / L2) F,where F is the reaction force acting on the valve members 5A and 5B from the valve seat surfaces 6 and 7, W2 is the acting force acting on the first guide rollers 36a from the cam rails 34 (the reaction force acting on the cam rails from the first guide rollers 36a) , W1 is the acting force acting on the second guide rollers 36b via the cam rails 34 (the reaction force acting on the cam rails via the second guide rollers 36b) L1 is the distance between the centers of the valve elements 5A and 5B and the centers of the first guide rollers 36a, and L2 is the distance between the centers of the first guide rollers 36a and the centers of the second guide rollers 36b. The reason for this is that the torques on the first guide rollers 36a caused by the reaction force F acting on the first and second valve elements 5A and 5B from the valve seat surfaces 6 and 7 and the reaction force W1 coming from the second guide rollers 36b the cam rails 34 are exerted, are coordinated, and the reaction force W2 is equal to the sum of the reaction force F and the reaction force W1. That is, the force acting on the first guide rollers 36a via the cam rails 34 is greater than the force exerted by the cam rails 34 on the second guide rollers 36b. Therefore, as described above, the first guide rollers 36a are reinforced by a larger diameter than the second guide rollers 36b. Specifically, in this embodiment, the distance L1 between the centers of the valve elements 5A and 5B and the centers of the first guide rollers 36a is greater than the distance L2 between the centers of the first guide rollers 36a and the centers of the second guide rollers 36b, W2 is greater than twice F, and therefore, the first guide rollers 36a are preferably reinforced.
    When the first and second openings 3 and 4 of the spool valve 1 are opened from the hermetically closed state, that is, when the valve assembly 15 goes from the first closed position or the second closed position to the fully open position, this is to close the Openings 3 and 4 of the spool valve 1 performed reverse procedure.
    Thus, with this spool valve 1, by moving the valve assembly 15, the first valve element 5A, the second valve element 5B, and the valve stem 10 may be perpendicular to the valve seat surfaces 6 and 7 located around the first port 3 and the second port 4 , the valve sealing elements 8 and 9 of the valve elements 5A and 5B, in a non-abrasive manner, into and out of contact with the valve seat surfaces 6 and 7, and can thus rotate the valve sealing elements 8 and 9, the generation of abrasive powder, etc. be avoided, not only when opening and closing the first opening 3, which is connected to the process chamber, but also when opening and closing the second opening 4, which is connected to the transfer chamber. As a result, even when closing the second opening 4 at the time of maintenance of the process chamber, the valve seal member 8 of the first valve member 5A, etc., vacuum leakage by turning the valve seal member 9, generation of abrasive powder, etc. can be avoided, and the efficiency of maintenance work can be improved ,
    Although embodiments of the present invention have been described in detail, it is to be understood that the present invention is not limited to these and various structural changes are possible without departing from the scope of the present main claim.
    LIST OF REFERENCE NUMBERS
    [0052]<Tb> 1 <September> slide valve<Tb> 2 <September> valve housing<tb> 2a, 2b <SEP> Sidewall<tb> 3 <SEP> first opening<tb> 4 <SEP> second opening<tb> 5A <SEP> first valve element<tb> 5B <SEP> second valve element<tb> 6, 7 <SEP> Valve seat surface<tb> 8, 9 <SEP> Valve Seal Element<Tb> 10 <September> valve stem<tb> X1 <SEP> Axis Line of valve stem<Tb> 11 <September> drive rod<Tb> 12 <September> cover<Tb> 13 <September> lever member<Tb> 15 <September> valve assembly<Tb> 20 <September> pneumatic cylinder<Tb> 27 <September> roller carrier<Tb> 30 <September> crossmember<Tb> 31 <September> spring<tb> 32a <SEP> first cam roller<tb> 32b <SEP> second cam roller<tb> 33a <SEP> first cam groove<tb> 33b <SEP> second cam groove<Tb> 34 <September> cam track<Tb> 35 <September> guide<tb> 35a <SEP> widened section<tb> 36a <SEP> First Leadership<tb> 36b <SEP> second leading role<Tb> 40 <September> stopping mechanism<Tb> 41 <September> Stop role<Tb> 42 <September> contact member<Tb> 45 <September> buffer rod<Tb> 45 <September> contact surface<Tb> 46 <September> buffer element
    权利要求:
    Claims (5)
    [1]
    A slide valve (1) comprising:a valve housing (2) having two opposite side walls (2a, 2b), one of which having a first opening (3) leading to a process chamber when installed, and the second having a second opening (4) incorporated therein Condition to a transfer chamber leads, are provided around these openings (3, 4) around mutually parallel valve seat surfaces (6, 7): a valve assembly (15) having a valve stem (10) in the longitudinal direction of the valve stem (10 ) and with plate-shaped first (5A) and second (5B) valve elements which are fastened to the distal end of the valve stem (10) and with valve sealing elements (8, 9) connected to the valve seat surfaces (6, 7) correspond, is provided; anda compressed air cylinder (20) whose drive rod (11) is connected to the valve stem (10),the valve arrangement (15) being movable by means of the pneumatic cylinder (20), from a fully opened open position in which the valve elements (5A, 5B) do not face the openings (3, 4) via an intermediate position in which the valve elements (5A , 5B) oppose the openings (3, 4), in a first closed position, in which the valve sealing element (8) of the first valve element (5A) is pressed against the valve seat surface (6) extending around the first opening (3), around the first Close the opening (3), and in a second closed position, in which the valve sealing element (9) of the second valve element (5B) against the around the second opening (4) extending valve seat surface (7) is pressed to the second opening (4) close,wherein the gate valve (1) has a linkage mechanism connecting the drive rod (11) and the valve stem (10) so that they can be displaced relative to each other, and a parallel movement mechanism connecting the valve assembly (15) parallel to the valve seat surfaces (6 7), and a vertical movement mechanism which moves the valve assembly (15) perpendicular to the valve seat surfaces (6, 7) and a stop mechanism (40) which, when the valve assembly (15) is fully opened by means of the parallel movement mechanism Opening position is moved to the intermediate position, the parallel movement of the valve assembly (15) stops and allows the vertical movement of the valve assembly (15) by means of the vertical movement mechanism,the connecting mechanism comprising the drive rod (11) fixed to a cross member (30), a lever member (13) fixed to the proximal end of the valve stem (10), and a compression spring (31) between the lever member (13). and the cross member (30),said parallel movement mechanism having left and right cam rails (34) forming a pair and fixed to said cross member (30) so as to face a left and right side wall of said lever member (13), a guide groove (35) in parallel movement direction in each of these cam rails (34) is provided, and this parallel movement mechanism has a plurality of guide rollers (36a, 36b) which are fixed to each of the left and right roller supports (27), which on a valve housing (2) fixed cover (12) are mounted, and which in the guide groove (35) are fitted, andwherein the vertical movement mechanism has a plurality of cam grooves (33a, 33b) provided in each of the two cam rails (34), and a plurality of cam rollers (32a, 32b) are provided on each of the left and right side surfaces of the lever member (13) which are fitted in the cam grooves (33a, 33b); the cam grooves (33a, 33b) comprise, in the direction of parallel movement, an initial end position (A) on the valve element side, a terminating end position (C) on the other end, and an intermediate position (B) therebetween, the intermediate position (B) being in the vertical direction of movement is closer to the first opening (3) than the initial end position (A), and the terminal end position (C) is closer to the second opening (4) than the initial end position (A); and wherein the cam rollers (32a, 32b) during the parallel movement, in which the valve assembly (15) is moved from the fully open position to the intermediate position, in the initial end position (A), wherein the valve assembly (15) assumes the first closed position when the cam rollers (32a, 32b) are shifted to the intermediate position, and wherein the valve assembly (15) assumes the second closed position when the cam rollers (32a, 32b) are moved to the final end position.
    [2]
    2. slide valve (1) according to claim 1, characterized in that the guide groove (35) which is provided in each of the two left and right cam guide rails (34) has a widened portion with an enlarged groove width at the end which is closest to the valve elements (5A, 5B), and that one of the plurality of guide rollers (36a, 36b) fixed to each of the left and right roller supports (27), namely those closest to the valve elements (5A, 5B) , are formed so that they have a larger diameter than the other and are fitted in the widened portion.
    [3]
    3. slide valve (1) according to claim 1, characterized in that the stop mechanism (40) with stop rollers (41) is provided, which are rotatably mounted in the vertical direction of movement and with contact members (42) are provided, with which the stop rollers (41 ) get in and out of contact,wherein the stop rollers (41) and the contact members (42) are respectively disposed opposite to the lever member (13) and the cover (12), and wherein when the valve assembly (15) is moved from the fully opened open position to the first position by the parallel movement mechanism Intermediate position is moved, the stop rollers (41) come into contact with the contact members (42) and stop the parallel movement of the valve assembly (15), and wherein, when the valve assembly (15) is vertically displaced by the vertical movement mechanism, the stop rollers (41) roll along the contact members (42).
    [4]
    4. slide valve (1) according to claim 3, wherein the stop mechanism (40) stop rollers (41) and contact members (42) on the left and on the right side of the valve stem (10) are provided.
    [5]
    5. slide valve (1) according to claim 3, wherein the contact members (42) buffer rods (45) arranged at one longitudinal end thereof, contact surfaces (45 a) with which the stop rollers (41) are in rolling contact, and wherein the contact members ( 42) comprise buffer elements (46) with which the other longitudinal ends of the buffer rods (45) are in contact.
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    同族专利:
    公开号 | 公开日
    TWI545282B|2016-08-11|
    JP5963091B2|2016-08-03|
    TW201516295A|2015-05-01|
    CH708350A2|2015-01-15|
    DE102014109673A1|2015-01-15|
    US20150014556A1|2015-01-15|
    JP2015017655A|2015-01-29|
    CN104279345B|2017-01-18|
    CN104279345A|2015-01-14|
    US9404589B2|2016-08-02|
    KR101683552B1|2016-12-07|
    KR20150007240A|2015-01-20|
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    JP6679594B2|2014-12-19|2020-04-15|バット ホールディング アーゲー|Door closing the chamber opening in the chamber wall of the vacuum chamber|
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    KR102145830B1|2017-10-13|2020-08-19|주식회사 라온티엠디|A valve complex|
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    TWI730808B|2020-06-11|2021-06-11|新萊應材科技有限公司|Two-way moving valve drive device|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    JP2013145033A|JP5963091B2|2013-07-10|2013-07-10|Non-sliding gate valve|
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