• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    A diaphragm manometer (G) which is attached to a container to be measured and which measures a pressure being supplied by a gas inside the measuring container includes a housing (3) in which the gas is introduced, and a detection unit which is arranged in the housing (3), and which includes a membrane electrode, a measurement surface of which is arranged parallel to the direction of introduction of the gas. When the housing (3) is attached to the container, the measuring surface of the membrane electrode is arranged parallel to the direction of the gravitational force.
    公开号:CH707337B1
    申请号:CH00530/14
    申请日:2012-09-12
    公开日:2017-07-14
    发明作者:Miyashita Haruzo
    申请人:Canon Anelva Corp；
    IPC主号:
    专利说明:

    Technical Field [0001] The present invention relates to a membrane manometer.
    Prior Art [0002] In a process for manufacturing an electronic component or a semiconductor product, the formation and etching of thin layers can be performed in a vacuum apparatus. In the process, the internal pressure of the vacuum apparatus is adjusted to a predetermined pressure. To measure the pressure in a process, a diaphragm manometer is often used, which can perform a precise pressure measurement regardless of the type of gas.
    For example, a membrane manometer having a membrane structure as disclosed in Patent Document 1 (D1) is configured to deflect a membrane electrode in accordance with the pressure. However, since the membrane electrode is also deflected in the direction of the gravitational force, the attachment of the electrode when it is inclined in the direction of the gravitational force will cause an error in the measured value. To correct the error in the measured value based on the angle of attachment of a membrane manometer, for example, patent document 2 (D2) discloses a technique of correction of the measured value based on the value of the angle of inclination.
    List of quotes
    Patent literature [0004]
    Patent Document 1: US Patent No. US 4785 669
    Patent Document 2: Japanese Patent No. However, the implementation of an angle detector will increase the number of components. In addition, to correct the measured value based on the angle information, it is necessary to prepare in advance the data relating to the changes in the membrane electrode capacity as a function of the inclination angles.
    It is an object of the present invention to create a technique for solving more easily the problem of a measurement error caused by the deformation of a membrane electrode due to the gravitational force.
    Solution of the Problem [0007] This object of the present invention is achieved in particular by means of a membrane manometer according to claim 1. The preferred embodiments are illustrated in the dependent claims.
    More particularly, the object of the present invention is achieved with the aid of a membrane manometer which is attached to a measuring vessel and which measures a pressure being fed by a gas located inside. container, the gauge comprising: a housing having an element separating an inner space of the housing in a first space and a second space, the first space communicating with the container, and the gas being introduced into the first space; and a detection unit arranged in the housing, the detection unit including an insulating substrate having a first surface and a second surface opposing the first surface, a fixed electrode arranged on the first surface, a membrane electrode having a measurement surface facing the fixed electrode and being parallel to the direction of introduction of the gas, the fixed electrode and the measurement surface facing a hermetically sealed pressure chamber formed between the insulating substrate and the membrane electrode, the second surface facing the first space, a surface of the membrane electrode, which opposes the measurement surface, facing the first space, wherein the insulating substrate and the membrane electrode are arranged in the first space, a capacitor constituted by the fixed electrode and the membrane electrode is connected to a pad serving as an electrode fixed to the insulating substrate, the electrode pad is connected to a conductive wiring in the first space, and the conductive wiring extends through the element from the first space to the second space.
    Advantageous Effects of the Invention [0009] The present invention provides a technique for more easily solving the problem of measurement error caused by deformation of the membrane electrode due to the gravitational force.
    Other features and advantages of the present invention will be apparent from the following description taken in conjunction with the accompanying drawings. It should be noted that the same reference numerals denote identical or similar components throughout the accompanying drawings.
    Brief Description of the Drawings [0011] The accompanying drawings, which are introduced into and constitute a part of the description, illustrate exemplary embodiments of the invention and, together with the description, serve to explain the principles of the present invention.
    Fig. 1 is a schematic view of a membrane manometer according to an embodiment of the present invention;
    Fig. 2 is a sectional view of a detection chip assembly according to an embodiment of the present invention;
    Fig. 3 is a perspective view of the detection chip assembly according to the embodiment of the present invention;
    Fig. 4 is a view showing an example of how the membrane manometer according to the embodiment of the present invention is attached to a vacuum container;
    Fig. 5 is a block diagram showing the system configuration of the membrane manometer according to the embodiment of the present invention;
    Fig. 6 is a graph showing the relationship between measured pressures and digital capacitance values according to the embodiment of the present invention;
    Fig. 7 is a graph showing the relationship between the pressures measured by the membrane manometer and the digital pressure values according to the embodiment of the present invention;
    Fig. 8 is a graph showing the relationship between measured pressures and I / O output signals; and
    Fig. 9 is a perspective view of a sensor chip assembly according to another embodiment of the present invention.
    Description of Embodiments [0012] FIG. 1 shows a G membrane manometer according to an embodiment of the present invention. The pressure gauge G is a pressure gauge which is attached to a vacuum container (the measuring vessel) 2 (see Fig. 4) and which measures the pressure after the introduction of a gas from inside the pressure vessel. vacuum container 2. The diaphragm manometer G includes, as the main constituent elements, a housing 3 communicating with the inner space of the greedy container 2 through an edge (the attachment part) 3a, two detection chips 18 and 22 arranged in the housing 3, and an electrical circuit 7 (the circuit part) which reproduces the measured values of the detection chips 18 and 22 as pressure values. The housing 3 is a stainless casing which allows the circulation (introduction) of gas molecules (the gas) from the vacuum container 2 into the internal space of the housing 3 by communicating the internal space of the housing 3 with the internal space of the vacuum container 2 through the edge 3a.
    An airtight terminal 19 is an element that introduces an electrode element into the space of the vacuum side while guaranteeing airtightness. The housing 3 and the hermetic terminal 19 separate the space from the atmospheric side of the space on the vacuum side. The detection chips 18 and 22 are arranged in the space of the vacuum side of the hermetic terminal 19 which is provided in the housing 3, and the electric circuit 7 is arranged in the space of the atmospheric side. In addition, the housing 3 is provided with a particle filter 3b which prevents the intrusion of particles into the housing 3.
    The particulate filter 3b is, for example, a ceramic filter which removes particles and is provided at a position between the detection chips 18 and 22 and the edge 3a to prevent particles flying from the vacuum container 2 to adhere to the detection chips 18 and 22. The electrical circuit 7 may be connected to an external control device or display device by an electrical output terminal 12. An I / O output terminal 17 reproduces, to the external, a signal indicating whether the electrical signal output from the electrical output terminal 12 comes from the detection chip 18 or the detection chip 22. The two detection chips 18 and 22 are each attached to the hermetic terminal 19, thereby forming a detection chip assembly (the detection unit). In the case shown in FIG. 1, the diaphragm manometer G includes the electrical circuit 7 inside the housing 3. However, the electrical circuit (the circuit part) 7 may be provided as an insulated component outside the diaphragm manometer instead of be placed inside the diaphragm manometer.
    FIG. 2 is an enlarged sectional view of the sensor chip assembly. Fig. 3 is a perspective view of the detection chip assembly. The detection chips 18 and 22 will be described with reference to FIG. 2. The detection chip 18 may be manufactured by, for example, a micro-machining technique using a manufacturing process for the semiconductors. Detection chip 18 is formed by bonding an insulating substrate 13a made of sodium glass to a silicon substrate 14 made of monocrystalline silicon to form a hole (the reference pressure chamber) therebetween. Part (the elastic structure) with a certain elasticity is formed as the membrane electrode 41 on a part of the silicon substrate 14.
    The membrane electrode 41 may be the part which has a circular shape and which is formed by a thinned portion of the silicon substrate. The membrane electrode 41 is configured to deflect as a function of pressure. A circular fixed electrode 5a may be provided on the insulating substrate 13a to face the membrane electrode 41. The manometer calculates the pressure value based on the capacitance between the fixed electrode 5a and the membrane electrode 41. C that is, the membrane electrode 41 deflects as a function of pressure to change the distance between the membrane electrode 41 and the fixed electrode 5a. It changes the capacity. The gap between the fixed electrode 5a and the membrane electrode 41 is an airtight reference pressure chamber. A getter 6 is disposed in this space to adjust the predetermined pressure (the reference pressure).
    The detection chip 22 may also have the same structure as that of the detection chip 18. A circular membrane electrode 42 is formed on a silicon substrate 24. A fixed electrode 5b is provided on an insulating substrate 13b for facing the membrane electrode 42. The manometer calculates the pressure from the capacitance between the fixed electrode 5b and the membrane electrode 42. The membrane electrode 41 of the detection chip 18 and the membrane electrode 42 of the detection chip 22 have different thicknesses to have optimum detection sensitivity with respect to different pressure zones.
    More specifically, the membrane electrode 41 is formed more voluminously than the membrane electrode 42 and has a high sensitivity on the high pressure side (the low side under vacuum). The membrane electrode 42 thinner than the membrane electrode 41 has a higher sensitivity on the lower pressure side (the high side under vacuum). In this embodiment, the range in which the pressure measurement results on the membrane electrode 41 are reproduced is 100 Pa to 100,000 Pa. The range in which the pressure measurement results on the membrane electrode 42 are reproduced is set from 0.01 Pa to 100 Pa. It should be noted that the capacitor constituted by the membrane electrode 41 (42) and the fixed electrode 5a (5b) is connected to a conductive wiring 9 of the hermetic terminal 19 by a pellet serving as an electrode 16.
    In the detection chip assembly, the detection chip 18 and the detection chip 22 are arranged in positions in which their membrane electrodes are perpendicular to a bearing surface 19a of the hermetic terminal 19. Conductive wiring 9 extends through the sealed terminal 19 to hold the airtightness. The detection chips 18 and 22 are fixed to the hermetic terminal 19 by connecting the conductive wiring 9 to the pads serving as the electrode 16 of the detection chips 18 and 22. The detection chips 18 and 22 are fixed to the hermetic terminal 19 with a predetermined gap between them. The gap between the detection chips 18 and 22 and the hermetic terminal 19 is provided to prevent the detection chips 18 and 22 from receiving any voltage from the sealed terminal 19 due to deformation caused by the thermal expansion.
    The membrane electrodes 41 and 42 are arranged to face each other and they can measure the pressure of the space between the detection chips 18 and 22. Since the two detection chips 18 and 22 measure the same space, no error appears independently of the measuring positions. In addition, the bearing surface 19a of the hermetic terminal 19 is provided parallel to an attachment surface 3c of the edge 3a. That is, the detection chips 18 and 22 are attached in a direction that makes the membrane electrodes 41 and 42 perpendicular to the attachment surface 3c of the edge 3a.
    The surface of the membrane electrode 41 (or 42) which faces the fixed electrode 5a (or 5b) is defined as the measuring surface of the membrane electrode 41 (or 42). The membrane electrode 41 and the membrane electrode 42 are arranged in such a way that the measuring surface of the membrane electrode 41 becomes parallel to the measurement surface of the membrane electrode 42. It is necessary to take into consideration that in the present description, the expression "the measurement surface of the detection chip 18" means "the measuring surface of the membrane electrode 41 of the detection chip 18". Likewise, the expression "the measuring surface of the detection chip 22" means "the measurement surface of the membrane electrode 42 of the detection chip 22".
    The membrane electrode 41 is provided so that its measuring surface is parallel to a central line A-A (see Figs 1 and 2) of the opening of the edge 3a. When the membrane manometer G is attached to the vacuum container 2, it is possible to obtain stable measurement values since the gas (the gas molecules) which is introduced from the opening (the port) of the vacuum container 2 in the housing 3 does not strike directly the measuring surface of the membrane electrode 41. This can protect the membrane electrode 41 against a sudden pressure change or an impact at the previous evacuation action step or at the time of introduction of gas. The same applies to the measuring surface of the membrane electrode 42.
    As in the case of the G membrane manometer, the central line AA is preferably located in the middle front of each of the measuring surfaces of the membrane electrodes 41 and 42. However, the above effect can be expected even if the center line AA is not located in the middle front of each measuring surface as long as each measuring surface is substantially parallel to the center line AA. The center line AA (the center axis) is the center line of an introduction path through which the gas flows when the membrane manometer G is attached to the port of the vacuum container 2, and is a line parallel to the direction of introduction of the gas which is introduced from the vacuum container 2 into the housing 3. The direction of introduction of the gas is the direction of flow of the gas between the vacuum container 2 and the housing 3. More specifically, this direction is the direction in which the gas that comes from the vacuum vessel 2 into the housing 3 moves near the inlet through which the gas is introduced into the housing 3. The introduction path through which the gas flows is a portion formed on the edge side 3a of the housing 3, and which guides the gas to the space in which the detection chips 18 and 22 are arranged.
    FIG. 4 shows an example of attaching the membrane manometer G to the vacuum container 2. The vacuum container 2 and the membrane manometer G are constituent elements of the vacuum treatment device. Three G-diaphragm manometers (G1, G2 and G3) are attached to the ports provided on the three wall surfaces of the vacuum container 2a. More specifically, the hermetic terminal 19 of the diaphragm manometer G1 is located thereon (in a direction opposite to the direction of the gravitational force) of the detection chips 18 and 22, and the hermetic terminal 19 of the G2 diaphragm manometer is located parallel to the detection chips 18 and 22. The hermetic terminal 19 of the G3 diaphragm manometer is located below (in the direction of gravitational force) of the detection chips 18 and 22. In this case, the ports are opening portions which are provided in the vacuum container for attaching detectors such as vacuometers and for introducing cables.
    The detection chips 18 and 22 of each of the diaphragm manometers G1, G2 and G3 are attached so that the measuring surfaces of the membrane electrodes 41 and 42 become parallel to the direction of the gravitational force. In other words, the detection chips 18 and 22 are arranged in such a way that the normal (corresponding to the line BB in Fig. 2) of the measuring surfaces of the membrane electrodes 41 and 42 is perpendicular to the direction of rotation. the gravitational force. The membrane electrodes 41 and 42 and the fixed electrodes 5a and 5b each have a circular shape. Although the diaphragm manometers G1, G2 and G3 have different angles of attachment about the axis in the vertical direction, the diaphragm electrodes 41 and 42 of the G1, G2 and G3 diaphragm manometers do not deflect or deviate in the same form regardless of the angles of attachment. Therefore, the capacities (pressures) measured by the G1, G2 and G3 diaphragm manometers are the same. That is, the diaphragm manometer G does not cause any error in the measurement value irrespective of the angle of attachment about the axis in the vertical direction as long as the measuring surfaces of the diaphragm electrodes 41 and 42 are located parallel in the direction of the gravitational force. In the following description, when it is simply mentioned "angle of attachment", it means an angle of attachment about the axis in the vertical direction.
    [0026] Referring to FIG. 4, if the angle of attachment of the G1 diaphragm manometer is 0 °, the angles of attachment of the G2 and G3 diaphragm manometers are respectively 90 ° and 180 °. Obviously, the same effect can be achieved with other attachment angles. That is, the membrane manometer G can be arranged so that the measuring surfaces of the membrane electrodes 41 and 42 are parallel to the direction of the gravitational force.
    As described above, even if membrane manometers are attached at different attachment angles, they can measure the same measurement value as long as the membrane electrodes deviate in the same shape due to the force. gravitational independently of the angles of attachment. For this reason, the membrane electrodes may have a polygonal shape with rotational symmetry such as a square. In this case, the angles of attachment of the membrane manometers (the angles of attachment around the normal of the measuring surfaces of the membrane electrodes) are adjusted in such a way that the arrangements of the polygonal shapes with respect to the direction of the gravitational force become of the same symmetrical form. For example, in the case of rectangular membrane electrodes, the electrodes may be arranged to make the respective sides perpendicular to the direction of the gravitational force or to make the diagonal lines parallel to the direction of the gravitational force in addition to the fact that the measuring surfaces are made parallel to the direction of the gravitational force.
    A sign M indicating the directions of the membrane electrodes 41 and 42 may be formed on the outer surface of the housing 3 to allow the measuring surfaces of the membrane electrodes 41 and 42 to be parallel to the direction of the gravitational force. . For example, a logo is printed on the outer side of the housing 3. The attachment of the housing 3 to the vacuum container 2 so that the surface on which the logo is printed is made parallel to the direction of the gravitational force can arrange the surfaces measuring the membrane electrodes 41 and 42 so that they are parallel to the direction of the gravitational force.
    The diaphragm manometers G1, G2 and G3 may be arranged in such a way that the centers of the spaces between the detection chips 18 and 22 are located on the central lines AA of the opening portions (ports) of the container. Vacuum 2. That is, the two membrane electrodes 41 and 42 may be arranged symmetrically on both sides of the center line AA. In other words, the center line AA may be located at an equal distance from the two membrane electrodes 41 and 42. The arrangement of the detection chips 18 and 22 to locate the center line AA at an equal distance by relative to the two membrane electrodes 41 and 42 in this manner will introduce several of the gas molecules entering the housing 3 through the opening (port) of the vacuum vessel 2 into the space at which the measuring surfaces of the membrane electrodes 41 and 42 face. In addition, the two detection chips 18 and 22 are arranged symmetrically with respect to the introduction path for gas molecules. This can guarantee high measurement accuracy.
    In addition, the arrangement of the membrane electrodes 41 and 42 away from the central line A-A can measure the degree of vacuum in the region spaced from the center line A-A. In the housing 3, since the gas flows along the central line AA, the zone spaced from the center line AA is similar in pressure inside the vacuum container 2. It is therefore possible to accurately measure the pressure in the vacuum container 2. It should be noted that the sensor chip 41 (or 42) may be arranged to locate the center line AA on the measurement surface of the membrane electrode. Obviously, even in this case, the attachment of the membrane electrode to make the measuring surface parallel to the direction of the gravitational force and the center line AA can avoid any change in the measured value accompanying a change in the angle of attachment.
    The control at the time of measurement by the G membrane manometer will be described below. The membrane manometer G converts the deflection amounts of the membrane electrodes 41 and 42 into an electrical signal, compares the value corresponding to the electrical signal with the data recorded in advance, and determines the measured pressure value. The membrane manometer G will be described in detail with reference to the block diagram of FIG. 5 which represents the system configuration. A control circuit for the membrane pressure gauge G is formed in the electrical circuit 7, and includes the detection chips 18 and 22, a C / D converter 21, a central processing unit (CPU) 23, a temperature sensor 28 , a measuring pressure adjusting device 27, a memory 25, a D / A converter 29, and an I / O output terminal 31. As described above, the detection chip 18 has a capacitor structure ( the detector on the high pressure side) constituted by the membrane electrode 41 and the fixed electrode 5a. Similarly, the sense chip 22 has a capacitor structure (the low pressure side detector) constituted by the membrane electrode 42 and the fixed electrode 5b.
    The C / D converters 21 are configured to convert the output capabilities of the detection chips 18 and 22 into digital values, and are provided for the detection chips 18 and 22 respectively. The memory 25 is a storage device allowing the CPU 23 to perform write access and read access. The D / A converter 29 converts the output digital value of the CPU 23 to a similar value.
    The C / D converters 21 convert the analog signals (the capacities) of the output of the detection chips 18 and 22 into the numerical values (the digital capacitance values) and send them to the CPU 23. The CPU 23 calculates the numerical value (the numerical value of the pressure) proportional to the pressure value with reference to the value measured by the temperature sensor 28 and the input from the memory 25, and sends the digital value to the D / A converter 29. The D / A converter 29 converts the output signal (the voltage value of the pressure) corresponding to the pressure to an analog value and reproduces it at the electrical output terminal 12. At this time, the output terminal I / O to output a signal indicating whether the signal output from the electrical output terminal 12 has been measured by the sense chip 18 or 22. The output signals from the electrical output terminal 12 and the output terminal I / O 17 are sent, for example, to the display device (see FIG. 4) and displayed as pressure measurements.
    Although the membrane manometer G of this embodiment includes two detection chips, namely the detection chips 18 and 22, the number of detection chips is not limited to two and can be three or more. Alternatively, the number of detection chips may be one as in another embodiment. In addition, if the sense chips 18 and 22 are elements whose output measurement values are the analog values as voltages, A / D converters that convert analog values to digital values are attached to the sense chips instead. C / D converters 21.
    Outputs of the detection chips 18 and 22 may change due to changes in the ambient temperature in addition to the pressure. For this reason, this manometer collects the output characteristics of the digital values for each ambient temperature of each of the detection chips 18 and 22 as data in advance and stores the temperature characteristic data in the memory 25. The temperature sensor 28 shown in fig. 5 measures the ambient temperature. By calculating the measured values of the sense chips 18 and 22 as signals (the digital pressure values) that are reproduced at the D / A converter 29, the CPU 23 corrects the measurement values with reference to the temperature characteristic data. corresponding to the ambient temperature.
    FIG. 6 is a graph showing the relationship between the measured pressures and the output capacitance values of each C / D converter 21. Referring to FIG. 6, the characteristic A indicated the output characteristic of the detection chip 18 with a full scale pressure of 100,000 Pa, and the characteristic B indicates the output characteristic of the detection chip 22 with full scale pressure of 100 Pa. More specifically, in the diaphragm manometer G, outputs of the fixed electrode 5a correspond to the output characteristic A, and outputs of the fixed electrode 5b correspond to the output characteristic B. In a zone with pressure measurements equal to or higher than 100 Pa, the CPU 23 processes the output signal (the numerical value of the capacitance) indicating the pressure detected by the fixed electrode 5a, thereby calculating the signal as well as the numerical value of the pressure.
    On the other hand, with respect to the measurement of pressure lower than 100 Pa, the CPU 23 processes the output signal (the numerical value of the capacitance) indicating the pressure detected by the fixed electrode 5b, calculating in this way the signal
    权利要求:
    Claims (12)
    [1]
    as well as the numerical value of the pressure. The D / A converter 29 then converts the digital value of the output pressure of the CPU 23 into a voltage value (the analog value). It should be noted that since the CPU 23 refers to the input signal of the temperature sensor 28 and the temperature characteristic data in the memory 25, when the output terminal of the D / A converter 29 reproduces a measurement value of pressure, it reproduces the value (the pressure value) obtained by correcting the influence of the ambient temperature. As a result, the diaphragm manometer G has the pressure / output voltage characteristic shown in FIG. 7. FIG. 7 is a case in which an adjustment is made to cause the logarithmic values of the digital output pressure values of the CPU 23 to have a linear relationship with the logarithmic values of the pressures in the entire measurement pressure zone. Upon output of the analog signal corresponding to the pressure of the electrical output terminal 12, the CPU 23 reproduces the I / O output signal shown in FIG. 8 of the I / O output terminal 17. This I / O output signal makes it possible to identify whether the output terminal of the D / A converter 29 has reproduced a detection result of the pressure of a specific terminal of the detection chips. 18 and 22. [0039] Referring to FIG. 8, a low voltage (low) indicates the I / O output signal when the D / A converter 29 has reproduced a detection result (the first pressure value) of the low pressure side detection chip 22 (the fixed electrode 5b). A high (high) voltage indicates the I / O output signal when the D / A converter 29 has reproduced a detection result (the second pressure value) of the high pressure side sensor chip 22 (the fixed electrode 5a). It should be noted that the pressure sensing elements indicated by I / O output signals may be opposite to those described above. FIG. 9 shows a sensor chip assembly of a membrane manometer according to another embodiment. This embodiment differs from the above embodiment in the structure of the detection chip assembly. That is, the sensing chip assembly (the sensing unit) of this embodiment includes only a sensing chip 31. The sensing chip 31 is identical to the sensing chip 18 (or 22), and includes a membrane electrode with a circular shape. In this case too, if the membrane electrode is attached to make its measuring surface parallel to the direction of the gravitational force, no change in measured value appears accompanying the change in the angle of attachment. The detection chip 31 is attached to a bearing surface 19a of a hermetic terminal 19 by a conductive wiring 9. The measuring surface of the membrane electrode of the detection chip 31 is spaced from the line central AA by a predetermined distance. In this case, the predetermined distance is the distance between the measurement surface of the membrane electrode and the center line A-A when the center line A-A is located opposite the measuring surface of the membrane electrode. The arrangement of the measurement surface of the membrane electrode away from the center line A-A can measure the degree of vacuum of a zone on the extension of the center line A-A. In the housing 3, since the pressure of a zone on an extension of the central line A-A is close to the internal pressure of the vacuum container 2, the manometer can measure the pressure more precisely. It should be noted that the center line A-A is located so as to overlap the central axis of the gas introduction path above. With the membrane manometer according to the present invention, the arrangement of the measuring surface of the membrane electrode parallel to the direction of the gravitational force prevents the occurrence of an error in the measured value. because of the angle of attachment around the axis in the vertical direction. This reduces restrictions on attachment positions and improves actuation. It should be noted that it is possible to arrange the central line AA on the measuring surface of the membrane electrode of the detection chip 31. Similarly, in this case also, by attaching the membrane electrode to make the measuring surface parallel to the direction of the gravitational force and the center line AA will prevent the occurrence of the change in the measured value accompanying the change in the angle of attachment. The present invention is not limited to the above embodiments and various changes and modifications may be made within the spirit and scope of the present invention. Therefore, to inform the public of the scope of the present invention, the following claims are made. This application claims the priority of Japanese Patent Application No.. 2011-220 565 filed October 5, 2011 and Japanese Patent Application No.. 2012-085 219 filed April 4, 2012, which are inserted here by reference. List of reference numbers [0045] G: diaphragm pressure gauge, 1: reference pressure chamber, 2: vacuum container, 3: housing, 3a: edge, 41, 42, 104: membrane electrode, 5a, 5b: fixed electrode, 6: gatter, 7: electrical circuit, 9: conductive wiring, 10: correction electrode, 12: electrical output terminal, 13a, 13b: insulating substrate, 14, 24: silicon substrate, 16: tablet serving as a electrode, 17: I / O output terminal, 18, 22, 31: sense chip, 19: hermetic terminal, 21: C / D converter, 23: CPU, 25: memory, 28: temperature sensor, 29: D / A converter. claims
    A membrane pressure gauge (G) which is attached to a container (2) to be measured and which measures a pressure being supplied by a gas inside the container (2), the pressure gauge (G) comprising: a housing (3) having an element (19) separating an inner space of the housing (3) into a first space and a second space, the first space communicating with the container, and the gas being introduced into the first space; and a detection unit arranged in the housing (3), the detection unit including an insulating substrate (13a) having a first surface and a second surface opposite the first surface, a fixed electrode (5a) arranged on the first surface a membrane electrode (41) having a measurement surface facing the fixed electrode (5a) and being parallel to the direction of introduction of the gas, the fixed electrode (5a) and the measuring surface facing the a hermetically sealed pressure chamber formed between the insulating substrate (13a) and the membrane electrode (41), the second surface facing the first space, a surface of the membrane electrode (41) opposite to the surface of the measurement facing the first space, wherein the insulating substrate (13a) and the membrane electrode (41) are arranged in the first space, a capacitor consisting of the fixed electrode (5a) and the membrane electrode (41). ) is connected at least one electrode pad (16) attached to the insulating substrate (13a), the electrode pad (16) is connected to a conductive wiring (9) in the first space, and the conductive wiring (9) extends through the element (19) from the first space to the second space.
    [2]
    The diaphragm pressure gauge (G) according to claim 1, wherein when the housing (3) is attached to the container (2), the measuring surface of the membrane electrode (41) is parallel to the direction of gravitational force. .
    [3]
    The membrane pressure gauge (G) according to claim 1, further comprising an attachment portion configured to secure the housing (3) to the container (2) to make the measurement surface of the parallel membrane electrode (41). to the direction of gravitational force
    [4]
    The membrane pressure gauge (G) according to claim 1, wherein the sensor includes two membrane electrodes, and measurement surfaces of the two membrane electrodes are parallel to each other.
    [5]
    Diaphragm pressure gauge (G) according to claim 4, in which the housing (3) includes an introduction path on which a gas is introduced from the container (2) into the first space of the internal space of the housing ( 3), and the measuring surfaces of the two membrane electrodes (41) are arranged on two sides of a central axis of the insertion path.
    [6]
    The membrane pressure gauge (G) according to claim 1, wherein the housing (3) includes an introduction path through which a gas is introduced from the container (2) into the first space of the internal space of the housing ( 3), and the measuring surface of the membrane electrode (41) is spaced from a central axis of the insertion path.
    [7]
    The membrane pressure gauge (G) according to claim 1, further comprising an attachment portion configured to attach the housing (3) to the container (2), wherein a measurement surface of the membrane electrode (41) is parallel to a direction in which a gas inside the container (2) circulates in the first internal space, and an outer surface of the housing (3) is provided with a sign to orient the measurement surface in order to be able to parallel to the direction of the gravitational force.
    [8]
    The membrane pressure gauge (G) of claim 1, wherein the membrane electrode (41) extends in a direction parallel to the direction of the gravitational force.
    [9]
    The diaphragm pressure gauge (G) according to claim 4, wherein the housing (3) includes an introduction path through which a gas is introduced from the container (2) into the first space of the internal space of the housing ( 3), and the two membrane electrodes are arranged symmetrically with respect to the central axis of the insertion path.
    [10]
    The membrane manometer (G) of claim 1, further comprising: an output terminal (12) provided on the housing (3); and an electrical circuit (7) arranged in the second space and configured to represent a measurement value at the output terminal (12) in accordance with a given signal from the detection unit via the conductive wiring (9).
    [11]
    The diaphragm pressure gauge (G) according to claim 1, wherein the insulating substrate (13a) is attached to the element (19) so that a hole is formed between the insulating substrate (13a) and the element ( 19).
    [12]
    The membrane pressure gauge (G) according to claim 1, wherein the insulating substrate (13a) is attached to the member (19) by connecting the conductive wiring (9) to the electrode pad (16) attached to the insulating substrate (13a).
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    同族专利:
    公开号 | 公开日
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    WO2013051199A1|2013-04-11|
    JP5894175B2|2016-03-23|
    JPWO2013051199A1|2015-03-30|
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    法律状态:
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