• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a slide valve. A parallel movement mechanism comprising guide recesses and guide cams (31a, 31b) and a vertical movement mechanism comprising cam recesses (30a, 30b) and control cams (33a, 33b) are interposed between a drive rod (9) of an air cylinder and a valve stem (7). A valve seal (6) of a valve plate (5) is moved vertically to and away from a valve seat surface (10) to open and close an opening (3) by moving the valve stem (7) parallel to the valve seat surface (10). by means of the parallel movement mechanism, and by moving it vertically to the valve seat surface (10) by means of the vertical movement mechanism. This prevents the valve seal from grinding on the valve seat surface.
    公开号:CH705752B1
    申请号:CH02255/12
    申请日:2012-11-04
    公开日:2016-12-30
    发明作者:Ishigaki Tsuneo；Shimoda Hiromi；Ogawa Hiroshi
    申请人:Smc Corp；
    IPC主号:
    专利说明:

    The present invention relates to a non-sliding gate valve according to the preamble of claim 1. More particularly, the present invention relates to a gate valve attachable to a vacuum chamber in a semiconductor processing apparatus, which gate valve is used for opening and closing an opening communicating with the vacuum chamber, and more particularly a non-slip gate valve which is constructed so that it is capable of opening and closing the opening without dragging.
    In a semiconductor processing apparatus, a gate valve for opening and closing an opening is used, which communicates with a vacuum chamber. The spool valve generally includes a valve plate which serves to open and close the port, a valve stem which is connected to this valve plate, and an air cylinder which is connected to the valve stem and configured to open the port and by moving a valve seat of the valve plate away from a valve seat surface which passes around the aperture by actuating the valve stem with the air cylinder.
    Examples of spool valves include a system for opening and closing a valve plate by causing the valve stem to pivot about a fulcrum, and a system for opening and closing the valve plate by moving the valve stem and valve vertically directed to the valve seat surface valve plate.
    Of the systems in which is pivoted in the slide valve system for opening and closing the valve plate of the valve stem, since the valve seal after contacting the valve seat surface experiences a predetermined contact force when the pivotal movement of the valve stem is continued, the valve plate with Relative to the valve seat surface in the direction offset along the seat. As a result, friction may be generated between the valve seal and the valve seat surface, or the valve seal may twist in a mounting recess, creating abrasion, which may be detrimental to the cleaning of the valve.
    In contrast, in the gate valve system for opening and closing the valve plate by a vertically directed to the valve seat surface moving the valve stem and the valve plate no risk of generating abrasion, since no friction between the valve seal and the valve seat surface is generated. The patent document, Publication of Unexamined Japanese Patent Application No. 11-351 419, discloses, as described below, a non-slip gate valve in which no friction is generated between the valve seal and the valve seat surface. The spool valve includes a plurality of links, cam followers, and guide recesses disposed between a drive rod of the air cylinder and the valve stem and is configured to move the opening through a movement of the valve plate, one of the valve seat, parallel to the valve seat face extending along the opening Opening position in a position opposite the opening (opposite position), and a subsequent movement of the valve plate, vertical to the valve seat surface to close.
    However, the slider valve according to the above patent document has drawbacks in that the number of components is increased and the structure is complicated, so that the operation becomes complicated because the mechanism for moving the valve plate, vertical to the valve seat surface, by a combination of Variety of connections, cam followers and guide recesses is constructed.
    It is therefore an object of the present invention to provide a non-sliding gate valve which is capable of opening an opening, by a vertically directed to a valve seat surface movement of a valve stem and a valve plate and by using a simple mechanism, and to close, this mechanism uses a cam between a drive rod of an air cylinder and the valve stem. In order to achieve the above object, according to the present invention, there is provided a spool valve according to claim 1, which comprises: a valve plate mounted in a valve housing having an opening; a valve seal attached to the valve plate; a valve stem connected to the valve plate; an air cylinder having a drive rod coupled to the valve stem; wherein the valve plate is configured to move from a fully open position where the valve plate does not face the opening (hereinafter also referred to as full open position) via an opening-opposed position where the valve plate faces the opening (hereinafter also Called opposite position) to a closed position (hereinafter also referred to as closing position), in which the valve plate closes the opening, by moving the valve stem by means of the air cylinder and by pressing the valve seat to a valve seat surface extending along the opening.
    The spool valve includes a coupling mechanism configured to couple the drive rod to the valve stem so as to be displaceable relative to each other; a parallel movement mechanism configured to move the valve plate and the valve stem from the full open position to the opposite position and parallel to the valve seat surface; and a vertical movement mechanism configured to vertically move the valve plate and the valve stem from the counter position to the valve seat surface to the closed position, the coupling mechanism comprising: a cross member fixed to the drive rod; a lever member which is fixed to the valve stem; and a compression spring disposed between the lever member and the cross member, the parallel movement mechanism comprising a pair of left and right cam followers fixed to the cross member so as to face each of a left side surface and a right side surface of the lever member; Guide recesses formed on the cam followers and each lying parallel to the valve seat surface; and guide cams provided on a pair of left and right cam carriers, which cam carriers are fixed to a cap on which the valve housing is mounted and configured to fit in the guide recesses, the vertical movement mechanism comprising: cam recesses formed in the cap A pair of the cam followers are inserted and inclined toward the valve seat surface; and guide cams which are each attached to the left and right surface side of the lever member and configured to fit in the cam grooves.
    In the present invention, preferably, one of the guide recesses and two of the cam grooves are formed in each of the paired cam carriers, and the two control cams are fixed to the left and right side surfaces of the lever member, respectively.
    In this embodiment, the guide recesses are preferably formed so that they are parallel to an axial line of the valve stem, and that the two cam recesses and the two control cams, which fit into the cam recesses, are arranged double-stepped in the direction of the axial line of the valve stem ,
    In the present invention, the width direction guide grooves may be formed on one half side of the cam follower, and the widthwise cam grooves may be formed on the other half side of the cam follower, or the guide grooves may be formed in outer surfaces of the cam followers opposed to the cam carrier and the cam recesses may be formed on the lever member in opposite inner surfaces of the cam follower.
    Preferably, in the present invention, the guide recesses are recesses each open at one of its ends, a plurality of the guide cams being respectively attached to the left and right cam carriers, at least one of the guide cams of this plurality of guide cams in the guide recesses sits when the valve plate is in the full-open position, and with all the guide cams seated in the guide recesses when the valve plate is in the opposite position and the closed position.
    In one embodiment of the present invention, the dual-stage cam recesses have a first cam recess disposed at a position closer to the valve plate and a second cam recess disposed at a position farther from the valve plate, and wherein the inclination angles the first cam recess and the second cam recess are equal to each other with respect to the direction of the axial line of the valve stem.
    In another embodiment of the present invention, the double-stage cam recesses have a first cam recess, which is disposed in a position closer to the valve plate, and a second cam recess which is disposed in a position farther from the valve plate, wherein the second cam recess having a first recess portion and a second recess portion whose inclination angles to the axial line of the valve stem are different from each other, wherein the second recess portion is disposed in a position farther away from the valve plate than the first recess portion, and wherein a tilt angle of the second recess portion is larger as the inclination angle of the first cam recess with respect to the axial line of the valve stem.
    Likewise, on each of the air cylinders on the left and right sides of the valve stem, when attached to the attachment, the cross member is secured to the two drive rods which protrude from the two air cylinders and the cylinder housings serve as the cam carrier.
    In this way, the generation of abrasion is reliably prevented with the inventive slide valve, as the valve plate moves vertically to the valve seat and the valve seal moves to and away from the valve seat without causing friction between the valve seal and the valve seat or without allow the valve seal to rotate within the mounting groove.
    In addition, since the opening and closing operation of the valve plate is realized by a simple mechanism and by a direct forward movement of the air cylinder, which mechanism uses the arranged between the drive rod and the valve stem cams, the structure of the working mechanism is simple, requires less Components and creates a high sealing force.<Tb> FIG. 1 shows a cross-sectional view along the line 1-l of FIG. 2 and shows a first embodiment of a slide valve according to the invention, the left half of which shows a state in which a valve plate is in a valve open position, and the right half of a picture State shows in which the valve plate is in an opposite position;<Tb> FIG. Fig. 2 <SEP> shows a cross-sectional view along the line II-II of Fig. 1;<Tb> FIG. Fig. 3 <SEP> is a perspective view showing a main part of Fig. 1 in an exploded view;<Tb> FIG. Fig. 4 <SEP> shows a vertical cross-sectional view through a left half of Fig. 1;<Tb> FIG. FIG. 5 shows a vertical cross-sectional view through a right-hand side of FIG. 1; FIG.<Tb> FIG. Fig. 6 shows a cross-sectional view similar to the right half of Fig. 1, in which the valve plate is in a closed position;<Tb> FIG. Fig. 7 <SEP> shows a vertical cross-sectional view of Fig. 6;<Tb> FIG. 8 shows a side view of a main part showing a positional relationship between a stop cam and a stopper area when the valve plate is in the closed position;<Tb> FIG. 9 shows, similar to FIG. 1, a cross-sectional view of a second embodiment of the spool valve according to the invention, with a left half of the figure illustrating a state in which a valve plate is in a valve open position and a right half of the image representing a state in which the valve plate is in a counter position;<Tb> FIG. Fig. 10 shows a vertical cross-sectional view of a state in which the valve plate is in a closed position as shown in Fig. 9;<Tb> FIG. FIG. 11 shows a cross-sectional view along the line XI-XI of FIG. 12 and illustrates a third embodiment of a spool valve according to the present invention, wherein a left-hand image half represents a state in which a valve plate is in a valve-open position, and FIG a right half of a picture represents a state in which the valve plate is in a counter-division;<Tb> FIG. Fig. 12 <SEP> shows a cross-sectional view along the line XII-XII of Fig. 11;<Tb> FIG. Fig. 13 <SEP> shows a vertical cross-sectional view of the left half of Fig. 11;<Tb> FIG. Fig. 14 <SEP> shows a vertical cross-sectional view of the right half of Fig. 11;<Tb> FIG. Fig. 15 shows a cross-sectional view, similar to the right half of Fig. 11, in which the valve plate is in a closed position;<Tb> FIG. Fig. 16 <SEP> shows a vertical cross-sectional view of Fig. 15;<Tb> FIG. Fig. 17 shows a side view of a main part of a fourth embodiment of a spool valve according to the invention in a simplified manner and in a state in which the valve plate is in a counter position;<Tb> FIG. Fig. 18 shows a side view of a state in which the valve plate has been moved from the position of Fig. 17 to a closed position;<Tb> FIG. 19 <SEP> shows a side view of the spool valve according to the first to third embodiments in a state in which the valve plate is in the opposite position compared with FIG.
    FIGS. 1 to 8 show a first embodiment of a non-abrasive slide valve according to the invention. The gate valve 1A is attached to a vacuum chamber of a semiconductor processing apparatus to open and close an opening communicating with the vacuum chamber, and includes a valve housing 2 having an opening 3, a valve plate 5 accommodated in the valve housing 2, one on the valve plate 5 mounted valve seal 6, a connected to the valve plate 5 valve stem 7, and an air cylinder 8 with a drive rod 9 which is connected to the drive shaft 7, wherein the valve plate 5 assumes a full-open position when the opening 3 is fully open and in which Position the valve plate is not the opening 3 opposite (see the left half of Fig. 1 and Fig. 4), wherein the valve plate 5 is in a counter position, when the valve plate 5 of the opening 3 is opposite, but not closed (see the right half of FIG Fig. 1 and Fig. 5), and wherein the valve plate ei a closed position takes, if by moving the valve stem 7 by means of the air cylinder 8, the valve seal 6 is pressed along the opening 3 against a valve seat surface 10 while the opening 3 is closed (see Fig. 6 and Fig. 7).
    The valve housing 2 has a rectangular housing shape, as shown in Fig. 1 and Fig. 4 can be seen, and has, in the opposite front and rear walls 2a, 2b each have an opening 3 and an opening 4, which each have a lateral having elongated rectangular shape, wherein the valve plate 5 disposed in the interior of the valve housing 2 has a laterally elongated rectangular shape to open the opening 3 of the front wall 2a and close.
    An inner surface of the front wall 2a has a valve seat surface 10 which is formed as a, the opening 3 circumferential, planar surface, which in turn has a rectangular or elliptical shape, wherein the attached to a front surface of the valve plate 5 valve seal. 6 has a rectangular or elliptical shape to come into abutment with the valve seat surface 10.
    An upper end of the support-shaped valve stem 7 is connected to a central part of the valve plate 5, and a lower end portion of the valve stem 7 protrudes through a cylindrical, from the valve housing 2 downwardly extending portion 11 a in the center of an essay 11, which at a lower foot part of the valve housing 2 is hermetically fixed, and wherein a lever member 12 is fixed with a rectangular cross-section at the lower end. A lower end portion of the lever member 12 extends beyond the lower end portion of the valve stem 7 slightly downward. An axial line L1 of the valve stem 7 runs parallel to the valve seat surface 10.
    The one and the other end of a bellows 17, which is expanded and contracted by upward and downward movements of the valve stem 7, on the one hand connected to an annular fastening element 15 which is attached to one end of the cylindrical portion 11a of the attachment 11 and into the inner periphery of the cylindrical part 11 a, and on the other hand connected to an annular fixing member 16 which is fixed to the outer periphery of the valve stem 7, at a voltage applied to the valve plate 5, whereby the interior of the valve housing 2 from the bellows 17 in airtight manner is completely shielded from the outside. Two of the air cylinders 8 are fixed to the lower surface of the cap 11 and face each other with the valve stem 7 interposed therebetween, in a position in which an axial line L2 of the driving rod 9 is parallel to the axial line L1 of the valve stem 7. The air cylinders 8 each include a cylinder housing 21 having a rectangular outer peripheral surface, a piston 22 which is supported in the cylinder housing 21 so as to slide in the direction of the axial line L2 with an upper end of the drive rod 9 connected to the piston is, and an upper end of the cylinder housing 21 is fixed to the top 11, and the drive rod 9 from an end plate 23 which is fixed to the lower end of the cylinder housing 21 extends downwardly.
    The one and the other end of the plate-shaped cross member 24 are at the lower end of the drive rods 9, which drive rods 9 protrude from the two air cylinders 8, attached. The cross member 24 extends horizontally in a position which is below the lower end of the valve stem 7 and the lever member 12, wherein a compression spring 25 between a lowered spring seat 24 a, which is formed in an upper surface in the center of the cross member 24, and a lowered Spring seat 12a, which is formed in the center of a lower surface of the lever member 12 is inserted.
    Referring also to Fig. 3, a pair of left and right Nockenmitnehmern 28, 28 parallel to the axial line L1 of the valve stem 7 on an upper surface of the cross member 24, in an opposite arrangement, respectively. each mounted on a left side surface and on a right side surface of the lever member 12, wherein in each of the Nockenmitnehmer 28, a guide recess 29 and cam recesses 30 a, 30 b are provided, which break through the Nockenmitnehmer 28.
    The guide recess 29 is, as seen in the width direction, disposed in a half side of the Nockenmitnehmers 28 and is parallel to the axial line L1 of the valve stem 7, and an upper end of the guide recess 29 is open to the outside. The recess width of the guide recess 29 is constant over the entire length. The guide recess 29 can also be provided on an outer surface of the cam follower 28, opposite the air cylinder 8, and be designed such that it is not broken through.
    In contrast, the cam recesses 30a, 30b are elongated recesses with a constant recess width, which are inclined relative to the axial line L1 of the valve stem 7 and are inclined in particular in the downward direction to the valve seat surface 10. Two of the cam grooves 30a, 30b are disposed in two stages in the other half of the cam follower 28 in the widthwise direction and inclined to the axial direction L1 of the valve stem 7 by the same angle and in the same direction, and thus are parallel to each other.
    At each of the cylinder housing 21 of the two air cylinders 8, 8, two guide cams 31a, 31b of the same size, which fit into the guide recess 29, are provided on an inner surface opposite the valve stem 7. The two guide cams 31a, 31b are, as seen in the vertical direction, arranged at separate locations, wherein only the lower first guide cam 31a is located in the guide recess 29 of the cam follower 28 when the valve plate 5 and the valve stem 7 are in the fully open position, and when the valve plate 5 and the valve stem 7 move to the opposite position, the second guide cam 31b, in a position close to the opposite position, also fits in the guide recess 29, so that the parallelism from the axial line L1 of the guide block 31a, 31b Valve stem 7 is maintained with the valve seat surface 10, whereby the valve stem 7 and the valve plate 5 are moved from the fully open position to the opposite position parallel to the valve seat surface 10. Therefore, the cam followers 28, the guide recesses 29, and the guide cams 31a, 31b form a parallel movement mechanism configured to move the valve stem 7 and the valve plate 5 from the fully opened position to the counter position parallel to the valve seat surface 10.
    Parts of the cylinder housings 21 also serve as cam carriers to fix the guide cams 31a, 31b thereto. Therefore, in the description below, parts to which the guide cams 31a, 31b of the cylinder housing 21 are attached are also referred to as "cam carriers 32". However, the cam supports 32 may be formed independently of the cylinder housing 21.
    On the left side surface and the right side surface of the lever member 12, two guide cams 33a, 33b are respectively mounted, which fit into the two cam recesses 30a, 30b of the cam driver 28. The two guide cams 33a, 33b are vertically disposed at spaced apart positions, are fitted one by one into the two cam grooves 30a, 30b, and are urged by the spring force of the compression spring 25 to the upper ends of the respective cam grooves 30a, 30b at the full open position and the opposite position pressed. When the cam follower 28 moves up to a position where the valve stem 7 is stopped in the opposite position by a stop mechanism described later, the guide cams 33a, 33b become up against the inclined cam grooves 30a by the upward movement of the cam grooves 30a, 30b , 30 b and are moved relative to the valve seat 10 in the direction of the valve seat 10 vertically, in connection therewith the valve stem 7 and the valve plate 5 are moved in the same direction, so that the valve seat 6 of the valve plate 5 is pressed against the valve seat surface 10, the valve plate 5 assumes the closed position.
    Therefore, the cam grooves 30a, 30b and the guide cams 33a, 33b form a vertical movement mechanism configured to move the valve stem 7 and the valve plate 5 vertically with respect to the valve seat surface 10.
    The stop mechanism comprises stop cams 36 fixed to the lever member 12 and stopper portions 37 formed in the cam carriers 32. The stop cams 36 are provided coaxially and outside the first guide cams 33a disposed in upper portions, and are made smaller than the first guide cams 33a , However, the stop cams 36 may also have the same diameter as the first guide cams 33a.
    The stopper portions 37 are formed in upper end portions of valley-shaped grooves 38, which, as shown in Fig. 8, are formed on the inner side surfaces of the cam carrier 32, wherein the stop cams 36 are fitted into these lower grooves 38.
    The valley-shaped grooves 38 extend parallel to the axial line L1 of the valve stem 7, wherein the stop cam 36 come into abutment with the stopper area 37 when the valve stem 7 is moved from the full open position to the opposite position, so that the valve stem 7 stops at this position. The stopper portions 37 are provided with a flat surface 37 a which extends vertically to the valve seat surface 10, so that when the valve stem 7 is moved from the opposite position to the closed position after the stop cam 36 has hit against the stopper portion 37, the stop cam 36 with respect to the stopper area 37th along the flat surface 37a in the same direction as the valve stem 7 moves. Therefore, a lateral groove portion 38 a for receiving the moving stop cam 36 is formed in the upper end portion of the groove-shaped groove 38.
    Here, the compression spring 25 which is clamped between the cross member 24 and the lever member 12, a spring force which is large enough to carry the weight of the valve plate 5, the valve stem 7 and the lever member 12, wherein the valve stem. 7 and the cross member 24 are united by the pressing of the guide cams 33a, 33b with the spring force against the upper end of the cam recesses 30a, 30b when the valve plate 5 moves from the full open position to the opposite position, and the compression spring 25 is compressed when the Valve plate 5 is moved from the opposite position to the closed position, with a relative movement between the valve stem 7 and the cross member 24 is permitted.
    Therefore, the compression spring 25 is a coupling mechanism for coupling the lever member 12 and the cross member 24 so as to allow a relative displacement between the valve stem 7 and the drive rod 9; In the following, the operation of the slide valve 1A is explained in more detail with the described structure. The left half-images of Figs. 1 and 4 show a state in which the valve plate 5 assumes its full-open position in which it moves away from the opening 3 and retracted to a lower end portion of the valve housing 2. In this situation, the drive rod 9 of the air cylinder 8 is fully extended down, the valve stem 7 and the valve plate 5 take the lowest possible position, the respective guide cam 33a, 33b are due to the spring force of the compression spring 25 against the upper end of the cam recesses 30a, 30b wherein the drive rod 9 and the valve stem 7 are in a situation in which they are united via the cross member 24, the Nockenmitnehmer 28 and the lever member 12, wherein the lower first guide cam 31 a of the two guide cams 31 a, 31 b engages in the guide recess 29 and the stop cam 36 moves away from the stopper portion 37 and is located in a lower portion of the valley-shaped groove 38.
    In the following description, the drive rod 9, the cross member 24 and the cam follower 28, which are fixedly connected to each other, referred to as "rod-side kit", and the lever member 12, the valve stem 7 and the valve plate 5, which also fixed connected to each other, referred to as "side kit".
    In the state of the full-open position, when an upper opening 8a of the air cylinder 8 is opened to the outside and compressed air is supplied from a lower opening 8b to move the drive rod 9 upward, the rod-side kit and the shaft-side kit collectively rise upward moves, so that, as shown in the right half of Figs. 1 and 5, the valve plate 5 of the opening 3 is opposite, however, the valve seal 8 reaches the opposite position separated from the valve seat surface 10th
    In this situation, an early state of the upward movement of the rod-side kit and the shaft-side kit, as shown in Fig. 4, the cam follower 28 from the lower first guide cam 31 a, which is fitted into the guide recess 29, guided, whereby a parallel movement the rod-side and the shaft-side kit is produced, in which situation the axial line L1 of the valve stem 7 is maintained in parallel with the valve seat surface 10. Then, as the rod-side and shank-side kits approach the opposite position, the second guide cam 31b fits in the guide recess 29 as shown in FIG. 5, and the parallel movement of the rod-side and shank-side kits is ensured by the two guide cams 31a, 31b , When the rod-side and shank-side kits reach the opposite position, the stop cam 36 comes into abutment with the abutment portion 37 at the upper end of the valley-shaped groove 38, as shown in FIG. 8 with a broken line, whereby the shank-side kit stops at this point. However, as the rod-side kit further compresses the compression spring 25 and continues to move upward, the cam grooves 30a, 30b formed in the cam follower 28 move upwardly relative to the guide cams 33a, 33b. Thereby, the guide cams 33a, 33b are pushed away from the recess walls of the inclined cam grooves 30a, 30b and thereby moved vertically relative to the valve seat surface 10 toward the valve seat surface 10, and the shaft side assembly moves with the guide cams 33a, 33b in the same direction. Therefore, as shown in Fig. 6 and Fig. 7, the valve seal 6 of the valve plate 5 is pressed against the valve seat surface 10 and thus the opening 3 is closed, so that the valve plate 5 assumes the closed position.
    In this situation, the movement of the rod-side kit is guided from the counter position to the closed position, parallel to the valve seat surface 10, by means of the cam follower 28, which is guided by the two guide cams 31a, 31b, and is a reaction force, which is generated when the valve seal 6 is pressed against the valve seat surface 10, exerted on the Nockenmitnehmer 28 on the two guide cams 31a, 31b.
    Also, the stop cam 36 moves in the same direction as the first guide cam 33a along the flat surface 37a of the stopper portion 37 as shown by a solid line in Fig. 8 and is supported in the lateral groove portion 38a.
    When the valve plate 5 assumes a closed position, the guide cams 33a, 33b do not necessarily move to the positions where they are in abutment with the lower ends of the cam recesses 30a, 30b, and can, depending on a pressing force of the valve seat 6, stop in positions in front of the lower ends of the cam holes 30a, 30b. When opening the spool valve 1A, the lower opening 8b of the air cylinder 8 is opened to the outside, and by blowing the compressed air into the upper opening 8a, the operation used in closing the spool valve 1a is reversed.
    In this situation, at the beginning, simultaneously with the downward movement of the rod-side kit, the compression spring 25 is gradually stretched, as long as the stop cam 36 is by the spring force of the compression spring 25 in abutment with the stopper area 37. Therefore, the cam follower 28 and the cam recesses 30a, 30b move downwardly, and the guide cams 33a, 33b move vertically away from the valve seat surface 10, the valve seal 6 moving vertically away from the valve seat surface 10 and, as shown in the right half of FIG 1 and shown in Fig. 5, the rod-side kit moves in the opposite position.
    Subsequently, move further down the movement of the drive rod 9, the rod-side kit and the shaft-side kit together in the full open position, as shown in the left half of FIG. 1 and in Fig. 4.
    In this way, and according to the present spool valve 1A, since the valve plate 5 is moved vertically relative to the valve seat surface 10, the valve seat 6 is moved vertically to and away from the valve seat surface 10 without friction between the valve gasket 6 and the valve seat surface 10 and without allowing the valve gasket 6 to twist within the mounting groove, and the generation of abrasion is reliably prevented. Moreover, since the opening and closing operation of the valve plate 5 relative to the valve seat 10 in the vertical direction and by a direct forward movement of the air cylinder 8 and by a simple direction change mechanism, using cam recesses 30 a, 30 b and the guide cam 33 a, 33 b, which between the drive rod 9 and the valve stem 7 are executed, the structure for the opening and closing operation is simple and fewer components are required. 9 and FIG. 10 show a second embodiment of the spool valve according to the invention, wherein the spool valve 1B of the second embodiment differs from the spool valve 1A of the first embodiment by the stop cam 36 and the stopper portion 37 constituting the stop mechanism, in that the stop cam 36 coaxial with the lower second guide cam 33b which is one of the upper and lower two guide cams 33a, 33b attached to the lever member 12, and the stopper portion 37 is configured as a recessed step portion 40 at the lower end of the cam carrier 32; and wherein the arrangement of the bellows 17 is different.
    In other words, the recessed step portion 40 is formed as a recessed shape by cutting out a part of the lower end portion from the inner side surface of the cam carrier 32, a part of which corresponds to the stopper portion 27 and the flat surface 37a.
    An upper end of the bellows 17 is connected to an annular fixing member 41 which is fixedly connected in an airtight manner with an inner peripheral surface of the cap 11, and a lower end of the bellows 17 is connected to an upper end of the lever member 12 , which is assembled in an airtight manner with the valve stem 7. Since the arrangements and the operation of the second embodiment, which differs as described above, are substantially the same as those of the first embodiment, the main components and the same components are provided with the same reference numerals as in the first embodiment, and will be described the same omitted.
    Figs. 11 to 16 show a third embodiment of the spool valve according to the invention, wherein parts of a spool valve 1C of the third embodiment, which are different from the spool valve 1A of the first embodiment, arrangements of the guide recess 29 and the guide cam 31a, 31b, the Form parallel movement mechanism, and the cam recesses 30a, 30b and the control cam 33a, 33b, which form the vertical movement mechanism and the stop cam 36 and the stopper area 37, which form the stop mechanism concern. Therefore, in the following description, an arrangement concerning a horizontal movement mechanism, the vertical movement mechanism and the stopper mechanism will be described.
    As shown in Fig. 11 and Fig. 12, each of the pair of cam followers 28, which are fixed to the cross member 24, with the guide recess 29 and the cam recesses 30a, 30b in an outer side surface and an inner side surface, back at the back to each other, provided. In other words, the outer side surfaces of the cam follower 28 facing the cam carriers 32 are provided with one of the respective guide recesses 29 so as to extend in the vertical direction along the axial line L1 of the valve shaft 7, with each of the two inclined cam recesses 30a, 30b lie on two upper and lower levels and on the inner surfaces of the cam follower 28, the lever member 12 opposite, are arranged. The depth of the cam recesses 30a, 30b and the guide recesses 29 is less than half the thickness of the cam follower 28. The arrangement of the guide recesses 29 and the cam recesses 30a, 30b, seen in the width direction of the cam follower 28, be offset from each other.
    Each of the two guide cams 31a, 31b fitted in the guide recesses 29 are fixed to the inner side surface of the cam carrier 32, and the two control cams 33a, 33b individually fitted in the two cam recesses 30a, 30b are attached to outer side surfaces of the lever member 12.
    The cam followers 28 are fixed so as to be displaced widthwise toward one side of the cross member 24, and the guide cams 31a, 31b and the control cams 33a, 33b are also fixed in positions corresponding to the cam follower 28 at a widthwise direction Side of the cam carrier 32 and the lever member 12 are offset.
    The stop cams 36 are secured to the inner surfaces of the cam supports 32 at locations which are non-competitive with the cam followers 28, and projecting portions 12b, with horizontal planar surfaces 37a, are on both left and right surfaces of the lever member 12 formed as upper surfaces thereof at positions corresponding to the stop cams 36 and the stopper portions 37 with which the stop cams 36 come into abutment are formed by these projecting portions 12b.
    Since the arrangements which differ as described above are substantially the same as those of the first embodiment, the main components and the same components are provided with the same reference numerals as in the first embodiment, and the description thereof is omitted.
    The valve closing operation of the spool valve 1C of the third embodiment is carried out in the same manner as in the spool valve 1A of the first embodiment, that is, by passing from the state of full open position, as shown in the left half of FIG. 11 and in FIG the state of the opposite position, as shown in the right half of Fig. 11 and in Fig. 14, the state of the closed position, as shown in Fig. 15 and Fig. 16, wherein the valve opening operation is carried out by running the same path in reverse order ,
    In this situation, the parallel movement of the rod-side and the shaft-side kit to the valve seat 10 is guided by the guide recesses 28 and the guide cams 31a, 31b, and the vertical movement of the shaft-side kit with respect to the valve seat surface 10 by the cam recesses 30a, 30b and the Control cam 33a, 33b out. This operation is also the same as the spool valve 1A of the first embodiment.
    On the contrary, and regarding the stop cams 36 and the stopper portions 37 constituting the stopper mechanism, when the lever member 12 fixed to the valve stem 7 is moved upward from the full open position to the opposite position, the upper surfaces of the stopper portions come 37, which are formed in the lever member 12, in abutment with the stop cams 36 which are fixed to the cam carriers 32, and the lever member 12 is stopped at this point. Then, when the valve stem 7 is moved to the closed position by the movement of the vertical movement mechanism, the lever member 12 moves relative to the stop cams 36 to the closed position.
    Fig. 17 and Fig. 18 are side views showing main parts of a spool valve 1D according to a fourth embodiment in a simplified manner. A different aspect of the spool valve 1D of the fourth embodiment from the spool valves 1A to 1C of the first to third embodiments is the shape of the cam groove 30a, 30b, particularly the shape of the second cam groove 30b, with a required advance of an air cylinder (not shown) which controls the Valve plate 5 opens and closes by changing the shape of the second cam groove 30b from the shape of the second cam groove 30b of the spool valves 1A to 1C according to the first to third embodiments. The arrangement of the spool valve 1D of the fourth embodiment, which is different from the spool valves 1A to 1C of the first to third embodiments, will be described below.
    As shown in Fig. 17, the cam follower 28 is provided with two cam grooves 30a, 30b which are arranged in two stages in the direction of the axial line L1 of the valve stem 7 and with two control cams 33a fitted individually in the cam grooves 30a, 30b , 33b, which are attached to the lever member 12, provided.
    One of the two cam grooves 30a, 30b, which is closer to the valve plate 5, that is, the first cam groove 30a, is a linear groove having a constant groove width and has an angle of inclination, which is the axial line L1, θ. In the illustrated embodiment, since a side surface 28a of the cam follower 28 is parallel to the axial line L1 of the valve shaft 7, the inclination angle of a recess wall to the side surface 28a is referred to as the inclination angle θ of the first cam groove 30a. This also applies to the second cam recess 30b, as described below.
    In contrast, the second cam groove 30b, which is farther from the valve plate 5, has a first recess portion 30c and a second recess portion 30d which have the same recess width but different inclination angles, with an inclination angle θ1 of the first recess portion 30c extending is smaller than the inclination angle θ of the first cam groove 30a, and wherein an inclination angle θ2 of the second recess portion 30d located on the farther side of the valve plate 5 is greater than the inclination angle θ of the first one Cam recess 30a. However, the inclination angle θ1 of the first recess portion 30c may also be equal to the inclination angle θ of the first cam recess 30a. The other arrangements which have not been described for the above-described spool valve 1D of the fourth embodiment are substantially the same as any of the spool valves 1A to 1C of the first to third embodiments. Therefore, parts other than those described above and shown in Figs. 17 and 18 are denoted by the same reference numerals as the spool valves 1A to 1C of the first to third embodiments, and the operation of the spool valve 1D will be described below.
    Fig. 17 shows a state in which the valve plate 5 is in the opposite position, in which the valve plate 5 of the opening 3 of the valve housing 2 is opposite, but the opening 3 does not close. In this situation, the valve plate 5, the valve stem 7 and the lever member 12 are in mutual relation in which further upward movement is impossible, and the first control cam 33a, which is one of the two control cams 33a, 33b, in the upper end portion of the first Cam lobe 30a is located, and the second control cam 33b in the upper end portion of the first recess portion 30c of the second cam recess 30b is located, and the two on the cam carrier (not shown) mounted guide cam 31a, 31b in the guide recess 29 which are formed in the cam follower 28, fitted ,
    In the state as shown in Fig. 17, when the cam follower 28, which is driven by the air cylinder, and by the guide cams 31a, 31b, which are fitted in the guide recesses 29, in the direction of the axial line L1 is moved, the control cam 33a, 33b pressed by the inclined cam recesses 30a, 30b and moved to the left, as shown in FIG. Thus, the lever member 12, the valve stem 7 and the valve plate 5 are moved together and vertically to the valve seat 10 and the valve seat 6 is brought into abutting contact with the valve seat 10, thus the opening 3 is closed so that the valve plate 5 assumes the closed position. In this situation, the second control cam 33b is located in the second recess portion 30d of the second cam groove 30b.
    In the following, by comparing the case of the spool valves 1A to 1C of the first to third embodiments with the case of the spool valve 1D of the fourth embodiment, the advancement of the air cylinder acting on the cam follower 28 when the opening 3 of the valve plate 5 is closed, will be described.
    Fig. 19 is a side view of a main portion for the situation in which the valve plate 5 is in the closed position, in which, in the slide valves 1A to 1C of the first to third embodiments, the opening 3 is closed. In this situation, there is an air pressure P1 on the side of the opening 3 and a vacuum pressure P2 exists on the rear side of the valve plate 5.
    In the same illustration, W denotes a contact pressure force on the valve gasket 6 acting on the valve seat surface 10, D1 indicates a distance from the center of the valve seat surface 10 to a point T1 where a force from the first cam groove 30a engages the first control cam 33a , and D2 denotes a distance from the point of application T1 to a point of application T2 at which a force of the second cam recess 30b acts on the second control cam 33b, and a load pressure W2 exerted on the point of application T2 W2 = W (D1 / D2) and a load pressure W1 applied to the engagement point T1 in the opposite direction of W2 is W1 = W + W2.
    Since the cam follower 28 is pressed by a feed Fc of the air cylinder, this experiences a load pressure W1 at the point of application T1 of the first cam recess 30a, wherein between the recess wall and the first control cam 33a, a narrow gap on the opposite side of the application point T1 is generated , Therefore, a force F1 acting in the direction parallel to the valve seat surface 10 and on the first cam groove 30a is F1 = (-W1) · (tanθ), and is a reaction force to feed Fc. In contrast, the engagement point T2 of the second cam recess 30b is located at the side of the recess wall opposite the engagement point T1 of the first cam recess 30a, a force F2 acting parallel to the valve seat surface 10 and via the second cam recess 30b being F2 = (+ W2) · (tanθ) and acts in the same direction as the feed Fc. Therefore, the required feed Fc of the air cylinder is Fc = F1 - F2. In contrast, as shown in FIG. 18, in the case of the spool valve 1D of the fourth embodiment, the second control cam 33b is located in the second recessed area 30d of the second cam groove 30b, and thus is that of the second cam groove 30b in the direction parallel to the valve seat surface 10 applied force F2, F2 = (+ W2) · (tanθ2). In this situation, since θ2> θ, even if the relationship between W, W1, W2, D1 and D2 is the same as in the above-described case of Fig. 19, the force F2 is larger than F2 of Figs Thus, the value of the required feed Fc of the air cylinder becomes Fc = F1-F2 smaller than the value of Fc of FIG. 19.
    Therefore, a compact air cylinder with a smaller feed than in the air cylinder described above, according to the case in the first to third embodiments, can be used.
    When the valve plate 5 is moved to the closed position and the back of the valve plate 5 is subjected to the vacuum pressure P2 and the side of the opening 3 is subjected to the air pressure P1, this is a situation in which the at the points T1, T2 acting load pressures W1, W2 are increased by the increase of the contact pressure force W of the valve seal 6, wherein then the cam follower 28 is moved slightly downwards, whereby the amount of compression of the valve seal 6 is reduced. However, since the difference between the forces F1 and F2, that is F1 - F2 acting in the opposite direction, is small, the amount of downward movement of the cam follower 23 is reduced to a negligible extent and becomes the decrease in the amount of compression the valve seal 6 is significantly reduced and leakage can be further prevented.
    In the corresponding embodiments in which, for opening and closing the valve plate 5, two air cylinders 8 are provided, it is also possible to provide only one air cylinder and to connect the Ouerträger 24 with the drive rod of this air cylinder.
    In the respective embodiments, although two of the guide cams 31a, 31b are respectively provided on the left and right cam carriers 32, by attaching three or more guide cams to the respective cam carriers 32, it is also possible to fit a plurality of guide cams in the guide recess 29 resulting in that, in a position in which the valve plate 5 is fully opened, at least one guide cam, with the exception of some other guide cam, in the guide recess 29 of the Nockenmitnehmers 28 is fitted, and leads to that in positions at where the valve plate 5 is in the opposite position and the closed position, the rest of the guide cam in the guide recess 29 are fitted.
    It is also possible to use the arrangement of the bellows 17 in the spool valve according to the first embodiment in the spool valve of the second embodiment, or in contrast, the arrangement of the bellows 17 according to the spool valve of the second embodiment in the spool valves of the first and third embodiments apply.
    In addition, the bellows may also be omitted if the spool valve is not used in a vacuum.
    List of reference characters
    [0072]<tb> 1A, 1B, 1C and 1D <SEP> Gate valve<Tb> 2 <September> valve housing<Tb> 3 <September> opening<Tb> 5 <September> valve plate<Tb> 6 <September> valve seal<Tb> 7 <September> valve stem<Tb> 8 <September> air cylinder<Tb> 9 <September> drive rod<Tb> 10 <September> valve seat<Tb> 11 <September> essay<Tb> 12 <September> lever member<Tb> 24 <September> crossmember<Tb> 25 <September> spring<Tb> 28 <September> cam<Tb> 29 <September> guide recess<tb> 30a, 30b <SEP> Cam groove<tb> 30c <SEP> first recess area<tb> 30d <SEP> second recess area<tb> 31a, 31b <SEP> Leadership Cams<Tb> 32 <September> cam carrier<tb> 33a, 33b <SEP> Control Cams<tb> L1 <SEP> axial line of the valve stem<tb> θ, θ1, θ2 <SEP> Inclination angle
    权利要求:
    Claims (9)
    [1]
    A non-slip gate valve (1A, 1B, 1C, 1D) comprising: a valve plate (5) housed in a valve housing (2) having an opening (3); a valve seal (6) attached to the valve plate (5); a valve stem (7) fixed to the valve plate (5); an air cylinder (8) having a drive rod (9) which is coupled to the valve stem (7), which slide valve (1A, 1B, 1C, 1D) is designed to move it from a full-open position, in which the valve plate (5 ) of the opening (3) is not opposed, via a counter position, wherein the valve plate (5) of the opening (3) opposite, to a closed position, in which the valve plate (5), by moving the valve stem (7) by means of the air cylinder (8) and by pressing the valve seal (6) against a valve seat surface (10) surrounding the opening (3) and closing the opening (3), further comprising:a coupling mechanism configured to couple the drive rod (9) and the valve stem (7) against each other displaceably; a parallel movement mechanism configured to move the valve plate (5) and the valve stem (7) from the full open position to the opposite position parallel to the valve seat surface (10); and a vertical movement mechanism configured to move the valve plate (5) and the valve stem (7) from the counter position to the closed position vertically to the valve seat surface (10),wherein the coupling mechanism comprises:a cross member (24) fixed to the drive rod (9);a lever member (12) fixed to the valve stem (7); anda compression spring (25) arranged between the lever element (12) and the cross member (24),wherein the parallel movement mechanism comprises:such on the cross member (24) fixed pair of a left and a right cam follower (28) that they each face a left and a right side surface of the lever element (12);on the Nockenmitnehmern (28) provided guide recesses (29) which each extend parallel to the valve seat surface (10): andGuide cams (31a, 31b) fixed to a pair of left and right cam carriers (32), which cam carriers (32) are fixedly connected to an attachment (11) to which the valve housing (2) is fixed and which Guide cams (31a, 31b) are formed so as to fit in the guide recess (29),wherein the vertical movement mechanism comprises:cam recesses (30a, 30b) provided in each of the pair of cam followers (28), which are inclined toward the valve seat surface (10); andcontrol cams (33a, 33b) attached respectively to the left and right side surfaces of the lever member (12) and adapted to fit in the cam grooves (30a, 30b).
    [2]
    2. slide valve (1A, 1 B. 1C, 1D) according to claim 1, characterized in that one of the guide recesses (29) and the two cam recesses (30a, 30b) in each of the paired cam followers (28) are introduced, and that the both control cams (33a, 33b) are each attached to the left and the right side surface of the lever element (12).
    [3]
    3. slide valve (1A, 1 B, 1C, 1D) according to claim 2, characterized in that the guide recesses (29) are formed such that they are parallel to an axial line L1 of the valve stem (7), and that the two cam recesses (30a, 30b) and the two control cams (33a, 33b) which fit in the cam recesses (30a, 30b) are arranged in two sections spaced apart in the direction of the axial line L1 of the valve stem (7).
    [4]
    4. slide valve (1A, 1 B, 1 C, 1 D) according to claim 2 or 3, characterized in that the guide recesses (29) seen in the width direction on a half side of the Nockenmitnehmers (28) are formed, and the cam recesses (30 a, 30 b ), seen in the width direction, are formed on the other half side of the cam follower (28).
    [5]
    5. slide valve (1A, 1B, 1C, 1D) according to claim 2 or 3, characterized in that the guide recesses (29) on the cam carrier (32) opposite, outer surfaces of the Nockenmitnehmer (28) are formed and the cam recesses (30a , 30b), on the lever element (12) opposite, inner surfaces of the cam follower (28) are formed.
    [6]
    A spool valve (1A, 1B, 1C, 1D) according to any one of claims 1 to 3, characterized in that the guide recesses (29) are recesses each open at one end thereof, that a plurality of the guide cams (31a, 31b ) are respectively mounted on the left and right cam carriers (32), at least one of the guide cams (31a, 31b) of said plurality of guide cams (31a, 31b) being seated in one of the guide recesses (29) when the valve plate (5) is in the full open position, and that all the guide cams (31a, 31b) in the guide recesses (29) sit when the valve plate (5) is in the opposite position and the closed position.
    [7]
    7. slide valve (1A, 1 B, 1C, 1D) according to claim 3, characterized in that arranged in the two sections cam recesses (30 a, 30 b) has a first cam recess (30 a) which at a position closer to the valve plate (5 ), and a second cam groove (30b) located at a location farther from the valve plate (5), and that the inclination angles θ are related to the first cam groove (30a) and the second cam groove (30b) to the direction of the axial line L1 of the valve stem (7) are equal to each other.
    [8]
    8. slide valve (1A, 1B, 1C, 1D) according to claim 3, characterized in that arranged in the two sections cam recesses (30a, 30b) has a first cam recess (30a) which at a position closer to the valve plate (5) and a second cam groove (30b) located at a position further away from the valve plate (5), the second cam groove (30b) having a first recess portion (30c) and a second recess portion (30d), whose inclination angles (θ1, θ2) are different from the axial line L1 of the valve stem (7), the second recessed area (30d) being located at a position farther from the valve plate (5) than the first recessed area (30c) and wherein an inclination angle (θ2) of the second recess portion (30d) is greater than the inclination angle (θ) of the first cam recess (30a) with respect to the direction of the axial line L1 of the valve stem (7).
    [9]
    9. slide valve (1A, 1 B, 1C, 1D) according to one of claims 1 to 3, characterized in that in each case an air cylinder (8) on the left and the right side of the valve stem (7) is provided, wherein these on the attachment (11) to which the valve housing (2) is fixed, are fixed, and that the cross member (24) is fixed to the two drive rods (9) which protrude from the two air cylinders (8), and that the cylinder housing (21 ) serve as cam carrier (32).
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    同族专利:
    公开号 | 公开日
    CH705752A2|2013-05-15|
    KR20130049745A|2013-05-14|
    CN103090030B|2014-11-12|
    DE102012021354A1|2013-05-08|
    JP5533839B2|2014-06-25|
    JP2013096557A|2013-05-20|
    TW201339457A|2013-10-01|
    CN103090030A|2013-05-08|
    US20130112906A1|2013-05-09|
    US8800956B2|2014-08-12|
    KR101363959B1|2014-02-18|
    TWI512222B|2015-12-11|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    JP2766190B2|1994-07-28|1998-06-18|入江工研株式会社|No sliding vacuum gate valve|
    JP2996915B2|1996-06-03|2000-01-11|入江工研株式会社|No sliding vacuum gate valve|
    JPH1172167A|1997-08-29|1999-03-16|Hitachi Ltd|Unsliding vacuum sluice valve|
    JPH11351419A|1998-06-08|1999-12-24|Irie Koken Kk|Non-slide gate valve|
    JP3572222B2|1999-06-14|2004-09-29|Ｓｍｃ株式会社|Gate valve|
    DE60012428T2|1999-06-14|2005-07-28|Smc K.K.|pusher|
    JP4304365B2|2002-12-16|2009-07-29|Ｓｍｃ株式会社|Gate valve|
    JP5365867B2|2009-10-15|2013-12-11|Ｓｍｃ株式会社|Gate valve|JP5963091B2|2013-07-10|2016-08-03|Smc株式会社|Non-sliding gate valve|
    CN104421437B|2013-08-20|2017-10-17|中微半导体设备有限公司|Movable valve, portable shielding door and vacuum flush system|
    JP6160924B2|2014-05-08|2017-07-12|Smc株式会社|Gate valve|
    KR101725249B1|2014-11-25|2017-04-27|프리시스 주식회사|Vacuum valves|
    JP6679594B2|2014-12-19|2020-04-15|バット ホールディング アーゲー|Door closing the chamber opening in the chamber wall of the vacuum chamber|
    US10302225B2|2015-03-09|2019-05-28|Vat Holding Ag|Vacuum valve|
    WO2016155976A1|2015-03-27|2016-10-06|Vat Holding Ag|Vacuum valve|
    KR101725251B1|2015-05-04|2017-04-11|프리시스 주식회사|Vacuum Valves|
    KR101784839B1|2015-09-25|2017-11-06|프리시스 주식회사|Two-way gate valve|
    TWI705212B|2016-01-19|2020-09-21|瑞士商Ｖａｔ控股股份有限公司|Closure device for the vacuum-tight closure of an opening in a wall|
    TWI740981B|2016-08-22|2021-10-01|瑞士商Ｖａｔ控股股份有限公司|Vacuum valve|
    JP2019532235A|2016-10-24|2019-11-07|バット ホールディング アーゲー|Occlusion device|
    JP6774302B2|2016-10-28|2020-10-21|株式会社キッツエスシーティー|Vacuum gate valve|
    KR20190003064A|2017-06-30|2019-01-09|프리시스 주식회사|Shutter valve|
    JP6388182B1|2017-07-25|2018-09-12|Smc株式会社|Gate valve mounting structure|
    JP2020056498A|2018-09-26|2020-04-09|株式会社キッツエスシーティー|Vacuum gate valve|
    DE102019129344A1|2019-10-30|2021-05-06|Vat Holding Ag|Vacuum valve|
    JP2021134893A|2020-02-28|2021-09-13|Smc株式会社|Gate valve|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    JP2011242795A|JP5533839B2|2011-11-04|2011-11-04|Non-sliding gate valve|
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