• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    According to various embodiments, there is provided a bearing assembly (100) for supporting a rotatable electrode, the bearing assembly comprising: an outer sleeve (102) insertable into a housing for supporting a rotatable electrode; an inner member (104) coaxially received in the outer sleeve and rotatably supported by a first bearing (118a) and a second bearing (118b) relative to the outer sleeve, the bearings being axially spaced from each other, and an electrically conductive contact structure (110) which is positioned adjacent to the first and / or the second bearing and which electrically contacts the inner member.
    公开号:BE1024054B1
    申请号:E2014/5093
    申请日:2014-11-28
    公开日:2017-11-09
    发明作者:Hans-Jürgen Heinrich；Gerit Stude；Grosser Götz
    申请人:Von Ardenne Gmbh；
    IPC主号:
    专利说明:

    Bearing assembly for rotatably supporting an electrode and electrode assembly
    The invention relates to a bearing assembly for rotatably supporting an electrode and an electrode assembly.
    In general, electrodes may be used in coating technology for various processes and / or pretreatments. For example, in the case of a sputtering process (cathode sputtering), a tubular target (a tubular cathode) can be used, from which the coating material can be sputtered off or which is dusted. Generally, a tubular electrode (cathode and / or anode) may rotate during processing. This may, for example, enable a long-term stable process, e.g. a long-term stable coating process. When Magnetronsputtem (magnetic field assisted cathode dust), for example, a tube cathode can be used, which rotates during the sputtering, wherein within the tube cathode, a magnet assembly is arranged to influence a plasma formation and thus among other things, the sputtering rate and / or other process parameters of the sputtering process. Furthermore, a magnetron arrangement can also have a plurality of tube cathodes (tube targets), for example in the case of a so-called double tube magnetron (a so-called rotatable dual magnetron).
    An aspect of various embodiments can be seen illustratively in providing a bearing assembly for rotatably supporting an electrode, e.g. For example, a tube target for a magnetron can be mechanically rotatably mounted and electrically contacted by means of the bearing arrangement, wherein the bearing arrangement permits, for example, a construction which enables simple maintenance and / or repair of the bearing arrangement or its locking means. Illustrated clearly, a tubular magnetron target can be coupled by means of the bearing arrangement to a so-called magnetron end block such that a power supply (eg for providing a predetermined electrical potential to the magnetron target), a cooling water supply (eg for cooling the tubular magnetron target and / or for cooling a Magnet arrangement within the tubular Magnetrontargets) and / or a rotatable mounting of the tubular Magnetrontargets (eg for homogeneous atomization of the surface of the tubular Magnetrontargets) is enabled and so that the bearing assembly and / or the Magnetronendblock (the Geh'use) are further arranged such that the bearing assembly can be removably inserted into the Magnetronendblock, and that wear parts of the bearing assembly (eg sealing elements or bearings) can be replaced without the bearing assembly must be removed from the Magnetronendblock.
    Furthermore, electrodes which are rotatably mounted can be used as anodes in a so-called SAD process (SAD = Spotless Arc Activated Déposition), by means of which electron beam high-rate vapor deposition can be realized.
    According to various embodiments, an electrode arrangement is provided comprising a bearing arrangement and a corresponding housing which are set up such that the individual components of the bearing arrangement can be successively inserted or withdrawn along the axis of rotation (or so that the bearing arrangement is successively mounted along the axis of rotation and / or can be dismantled), so that maintenance and / or repairs to the electrode assembly (eg on a magnetron assembly) can be performed time efficient and cost-efficient.
    Furthermore, another aspect of various embodiments can be clearly seen in sealing the housing to a vacuum by means of the bearing arrangement (eg, so that an electrode coupled to the housing by means of the bearing arrangement can be operated in vacuum), and at the same time by means of the housing and the bearing arrangement Cooling (eg, a water cooling or a liquid-based cooling) for an electrode coupled by means of the bearing assembly to the housing.
    According to various embodiments, a bearing assembly is provided for supporting a rotatable electrode, the bearing assembly comprising: an outer sleeve insertable into a housing for supporting a rotatable electrode; an inner member coaxially received in the outer sleeve and rotatably supported by a first bearing and a second bearing relative to the outer sleeve, the bearings being axially spaced from each other; and an electrically conductive contact structure extending between the first and second bearings is positioned and which electrically contacts the inner member. The inner element may be an inner sleeve, e.g. a hollow tube, or the inner element may have a cylindrical outer surface and at least one DurchgangsöfFnung in the axial direction. According to various embodiments, the first bearing and the second bearing may be spaced apart from each other.
    According to various embodiments, the electrically conductive contact structure may include one or more terminals for attaching one sliding contact or multiple sliding contacts.
    The bearing assembly may further include: a first receiving portion formed at a first axial end portion of the bearing assembly between an inner periphery of the outer sleeve and an outer periphery of the inner member for mounting a first seal member.
    The bearing assembly may further include: a second receiving portion formed at a second axial end portion of the bearing assembly between an inner periphery of the outer sleeve and an outer periphery of the inner member for receiving a second seal member. In this case, the second end portion may be opposite to the first end portion.
    The bearing arrangement may furthermore have the following: a first sealing element inserted coaxially (removable) into the first receiving region of the bearing arrangement and / or a second sealing element inserted coaxially (removable) into the second receiving region of the bearing arrangement.
    Furthermore, a first distance between the outer circumference of the inner element and the inner circumference of the outer sleeve in the region between the first bearing and the second bearing may be smaller than a second distance between the outer circumference of the inner element and the inner circumference of the outer sleeve in the region of the first bearing and / or the second camp.
    Furthermore, a third distance between the outer circumference of the inner element and the inner circumference of the outer sleeve in the area of the first receiving area and / or second receiving area may be greater than a second distance between the outer circumference of the inner element and the inner circumference of the outer sleeve in the region of the first bearing and / or the second camp.
    Furthermore, the electrically conductive contact structure may comprise at least one sliding contact (or a plurality of sliding contacts, for example two, three, four or five sliding contacts, or more than five sliding contacts) which grinds on the outer circumference of the inner element. In this case, the sliding contact of the outer sleeve can be set up electrically isolated, e.g. For example, the current conduction from the sliding contact may be led to the outside through an electrically insulated through hole in the outer sleeve. In other words, the electrical contact structure may be passed through the wall of the outer sleeve, e.g. in one place or in several places.
    Illustratively, the inner element and the outer sleeve can be arranged and arranged relative to each other so that a plurality of regions are provided between the outer circumference of the inner element and the inner circumference of the outer cover, wherein the distance between the outer circumference of the inner element and the inner circumference of the outer sleeve differs from each other in the plurality of regions are. Thus, for example, the bearings (the first bearing and the second bearing) can be inserted into the bearing assembly from the axial direction and be removed along the axial direction of the bearing assembly. Thus, there is the possibility of easy maintenance or repair of the bearings and / or the electrical contact structure (e.g., a sliding contact). Furthermore, for example, also the sealing elements (the first sealing elements and the second sealing elements) can be inserted into the bearing arrangement from the axial direction and be removed along the axial direction from the bearing arrangement. This results in the possibility of easy maintenance or repair of the sealing elements. The bearings, the electrical contact structure and / or the sealing elements can be wear parts of the bearing arrangement, for example. In this case, the bearing arrangement can be configured such that the closure parts can be assembled and disassembled from an axial direction, or that the closure parts can be assembled and disassembled from opposite directions (both parallel to the axial direction).
    Furthermore, the inner element can have an axial passage opening. In other words, the inner member may have a through hole, a bore or the like along the axial direction, so that, for example, cooling water can flow through the inner member. For example, cooling water may flow from a housing (e.g., end block) through the bearing assembly into an electrode (tube cathode) coupled to the bearing assembly and / or flow out of the electrode through the bearing assembly to the housing.
    Furthermore, the electrically conductive contact structure may extend through the outer sleeve and / or the outer sleeve may be electrically insulated from the electrically conductive contact structure.
    Furthermore, the first bearing and the second bearing may comprise an electrically insulating material, so that the inner element is electrically insulated from the outer sleeve by means of the first bearing and the second bearing.
    According to various embodiments, a bearing arrangement may comprise: an outer sleeve and an inner element inserted coaxially into the outer sleeve, wherein the outer sleeve and the
    Inner element are arranged rotatably relative to each other by means disposed between the Aubcnhülsc and the inner element Rotationslagem, wherein the bearing assembly is formed removably insertable from one of its axial end portions in an end block of an electrode assembly and can be coupled with its other axial end portion with a magnetron cathode; and wherein from each one of the free axial ends of the bearing assembly forth a sealing member is removably inserted into the bearing assembly, such that the space between the sealing elements is sealed against ingress of water and / or air.
    According to various embodiments, an electrode assembly may include a housing for supporting a rotatable electrode, the housing having a through hole configured to receive a bearing assembly (as described herein), wherein the through hole defines an axial direction and the housing is configured in that the bearing arrangement can be inserted coaxially into the passage opening (removable), such that the outer sleeve of the bearing arrangement is supported at least in sections on the housing. The bearing arrangement may, for example, at least partially adjoin (and thus be supported) the outside circumference of the outer sleeve and / or at least partially a stimulus area of the outer sleeve. The electrode arrangement may be, for example, or have a magnetron arrangement, wherein the rotatable electrode may be a magnetron cathode or a target tube and the housing may be a so-called magnetron end block.
    According to various embodiments, the electrode assembly may further include: a bearing assembly removably inserted into the through-hole.
    Furthermore, the passage opening of the housing and the bearing arrangement can be set up and arranged relative to one another such that a first sealing element can be inserted coaxially and removably into the first receiving area of the bearing arrangement and / or a second sealing element can be inserted coaxially and removably into the second receiving area of the bearing arrangement.
    According to various embodiments, the electrode assembly may further comprise: a first sealing element inserted coaxially removable into the first receiving region of the bearing arrangement and / or a second sealing element inserted coaxially and removably into the second receiving region of the bearing arrangement.
    Furthermore, the first sealing element can be a vacuum seal, by means of which the first receiving area between the outer sleeve and the inner element is sealed in a vacuum-tight manner.
    Furthermore, the second sealing element can be a fluid seal, by means of which the second receiving region between the outer sleeve and the inner element is sealed in a liquid-tight manner.
    Furthermore, the housing and the bearing arrangement can be set up and arranged relative to one another such that the bearing arrangement and the first sealing element can be fixed relative to one another by means of a flange ring and / or the bearing arrangement and the first sealing element can be fixed to the housing by means of the flange ring.
    Furthermore, the housing and the bearing arrangement can be set up and arranged relative to one another such that the bearing arrangement and the second sealing element can be fixed relative to one another by means of a flange and / or the bearing arrangement and the second sealing element can be fixed to the housing by means of the flange.
    According to various embodiments, the electrode assembly may further include a flange ring connected to the housing which fixes the bearing assembly and the first sealing member relative to each other and / or to the housing.
    In various embodiments, the electrode assembly may further include a flange connected to the housing which fixes the bearing assembly and the second seal member relative to each other and / or to the housing.
    Furthermore, the flange ring can be arranged such that a face of the inner element is accessible from the axial direction. Furthermore, the flange ring can be arranged such that a free end section of the inner element is accessible from the axial direction.
    In various embodiments, the axis of rotation of the bearing assembly may define the axial direction. Furthermore, the through-hole of the housing can define the axial direction. Furthermore, the housing and the bearing arrangement can be set up such that the bearing arrangement can be inserted coaxially into the through hole of the housing or can be used.
    Furthermore, the flange may have a Kühlwasserfühmng by means of which cooling water can be passed through the flange to the inner member. Furthermore, the flange can have a cooling water guide by means of which cooling water can be discharged through the flange from the inner element.
    According to various embodiments, the electrode assembly may further include: a coupling member for coupling an electrode to the inner member, the coupling member being fixed to a first axial end portion of the inner member. The coupling element may for example be a terminal to which the electrode can be clamped. Furthermore, the coupling element and the inner element can be arranged such that the coupling element can be screwed to the inner element.
    According to various embodiments, a method of operating an electrode assembly may include: withdrawing and / or inserting along the axial direction of a rotatable bearing assembly into a housing of an electrode assembly for rotatably supporting an electrode.
    According to various embodiments, a method of operating an electrode assembly may include: withdrawing and / or inserting a first seal member and / or a second seal member along the axial direction of a bearing assembly removably plugged into a housing. In this case, the sealing elements can be pulled out or inserted, for example, while the bearing arrangement remains in the housing.
    According to various embodiments, a bearing assembly described herein may be used to rotatably support and contact a tubular electrode (e.g., a magnetron cathode or a magnetron target) of an electrode assembly.
    In various embodiments, a bearing assembly described herein may be used to secure a magnetron tube to a magnetron end block.
    Furthermore, the electrode assembly may be configured in a vacuum environment (e.g., partially within a vacuum chamber, processing device, or vacuum processing device). In other words, the bearing assembly may be used for rotatably supporting and electrically contacting a tubular electrode in a vacuum processing system.
    Exemplary embodiments of the invention are illustrated in the figures and will be explained in more detail below.
    Show it
    Figure IA is a schematic cross-sectional view and a schematic side view of a bearing assembly, according to various embodiments;
    FIGS. 1B to 1E each show a schematic cross-sectional view of a bearing arrangement according to various embodiments;
    FIGS. 2A and 2B are each a schematic cross-sectional view of an electrode assembly according to various embodiments;
    FIGS. 3A and 3B each show a schematic cross-sectional view of a housing and a housing
    Bearing assembly, separated and mated together, according to various embodiments;
    4A shows an electrode arrangement in a schematic exploded view, according to various embodiments;
    FIG. 4B shows an electrode arrangement in a schematic cross-sectional view, according to various embodiments;
    FIG. 5A shows an electrode arrangement in a schematic exploded view, according to various embodiments;
    FIG. 5B shows an electrode arrangement in a schematic cross-sectional view, according to various embodiments; and
    FIG. 6 shows a processing device with an electrode arrangement in a schematic view, according to various embodiments.
    In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top", "bottom", "vome", "back", "front", "back", etc., is used with reference to the orientation of the described figure (s). Because components of embodiments can be positioned in a number of different orientations, the directional terminology is illustrative and is in no way limiting.
    It is understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. It should be understood that the features of the various exemplary embodiments described herein may be combined with one another unless specifically stated otherwise. The following detailed description is therefore not to be considered in a limiting sense, and the scope of the present invention is defined by the appended claims.
    As used herein, the terms "connected," "connected," and "coupled" are used to describe both direct and indirect connection, direct or indirect connection, and direct or indirect coupling. In the figures, identical or similar elements are given identical reference numerals, as appropriate.
    As described herein, an outer circumference may be understood as the outer peripheral surface or the outermost limiting surface of a body. Similarly, the inner circumference can be understood as an inner peripheral surface or the inwardly limiting surface of a body.
    In general, coating equipment may be arranged to ensure, for example, long uninterrupted production as well as high sputtering performance and / or high specific gravity materials such as molybdenum. Consequently, tubular electrodes (tube targets or tube cathodes) can be used in sputtering systems, wherein a tubular electrode should provide as much as possible a large amount of material to be atomized. Thus, for example, a tubular electrode may have a large length (eg, up to about 4 meters in length or longer than about 4 meters in length) and / or a large diameter (eg, up to about 30 cm in diameter (eg about 13 cm to about 18 cm) or more than about 30 cm in diameter), which allows these tubular electrodes to have a high weight.
    These tubular electrodes may be, e.g. be axially supported at their ends by means of a bearing assembly and housing (a so-called end block) and continuously rotated during processing (e.g., during a sputtering process or during an SAD process). In this case, the storage of the tubular electrodes to maintain the technological processes, the stable vacuum seal the Drehdurchfuhrung required.
    Furthermore, heat may be generated during processing which, for example, has to be dissipated from the tubular electrode, e.g. by means of a liquid coolant and a correspondingly configured cooling device. The cooling can be realized for example by means of cooling water inside the tubular electrodes (the tubular electrode can for example be traversed by water), wherein the case necessary replacement of the coolant (cooling circuit) can be done by means of the bearing assembly.
    According to various embodiments, by means of an electrical contact structure (e.g., by means of sliding electrical contacts), the electrical energy necessary for processing may be transferred to the tubular electrode, which electrical contact structure may allow a service life of the bearing assembly of several years.
    Furthermore, it may be necessary in electrophysical processes in vacuum to provide a stable gas pressure within the vacuum chamber, which can be placed on the bearing assembly and the corresponding Gehause high demands on the tightness and cleanliness.
    GcmaB various embodiments, a bearing assembly and a corresponding Gehause are provided, which allows both a long service life and a simple assembly-side accessibility of VerschleiBteüe the bearing assembly. Furthermore, a vacuum seal and a Kühlwasserfuhrung be realized.
    The seals (or seal members) of the bearing assembly may be replaced (or serviced or repaired), for example, due to the structure provided, without disassembling the complete bearing assembly. Further, the bearings (e.g., rolling bearings) of the bearing assembly can be easily lubricated, whereby, for example, a longer life of the bearings can be realized.
    GcmaB various embodiments, for example, an electrode assembly with a Gehâuse and a bearing assembly (or a Drehdurchfuhrung) is provided, with easy accessibility is given to be replaced components within the bearing assembly and the bearing assembly further has a long life.
    Illustratively, a modular rotary leadthrough (including a bearing assembly and a housing) may or may not be provided wherein, for example, a magnetron may or may be rotatably supported by the rotary feedthrough in a vacuum chamber, with an interchangeable bearing assembly with integrated loop contact (or multiple integrated wiper contacts ) and separated seals (sealing elements) can be installed in a housing, wherein the mounting-side accessibility to the seals can be realized via two removable (unscrewable) flanges. The load-bearing bearing arrangement may consist of an inner hollow shaft (an inner element), an outer sleeve (an outer sleeve), at least two electrically insulated roller bearings (a first bearing and a second bearing) and the sliding contacts (an electrical contact structure) enclosed therebetween. Furthermore, in the axial direction (in both parallel axial directions), the seal may in each case be located upstream of the roller bearing. Furthermore, for example, the bearings and seals can be relubricated without separate removal from the rotary feedthrough.
    According to various embodiments, races of the rolling elements of the rolling bearings can be integrated in the inner hollow shaft or in the outer sleeve or in both. In addition, the inner hollow shaft may have seats for gaskets (sealing elements). Furthermore, the outer sleeve can have clamping points for fastening the sliding contacts.
    The service life of the sliding contacts, combined with the lifetime of the roller bearing secured by relubrication, clearly defines the total service life of the rotary feedthrough. The bearing assembly can be replaced, for example, without reducing the rotary feedthrough of a magnetron cover, which haith, for example, the rotary feedthrough. The rotary feedthrough can be set up in such a way that an integrated re-lubrication of the seals and bearings is possible and thus optimum service life can be achieved. Maintenance work is possible, for example, without disassembling the electrode assembly from the vacuum chamber and / or disassembling the magnetron end block from the magnetron cover, since the seals séparai are interchangeable along the axial direction. Thus, short downtime can be realized.
    Fig. 1A illustrates an arrangement of an inner member 104 relative to an outer sleeve 102 of a bearing assembly 100 in a schematic cross-sectional view (top) and a side view (bottom) of the direction 101a (or of possible symmetry also from the opposite direction), according to various embodiments ,
    The inner element 104 and the outer sleeve 102 may be arranged and / or arranged relative to one another such that between the outer circumference 104a of the inner element 104 and an inner circumference 102b, 102c, 102d of the outer sleeve 102 different regions 106a, 106b, 108a, 108b, 110a to Receiving further components of the bearing assembly 100 are provided. According to various embodiments, the bearing assembly 100 may be rotationally symmetric with respect to an axis 111 (the axial direction). Furthermore, the inner member 104 and the outer sleeve 102 may be configured such that other components (e.g., bearings or seals) may be successively plugged into the bearing assembly 100. Furthermore, the inner member 104 and the outer sleeve 102 may be configured such that the inner member 104 may or may be rotatably supported relative to the outer sleeve 102.
    The outer sleeve 102 may have a cylindrical outer shape 102a, e.g. with a constant outer diameter 102d and a circular cross section or are based on a circular base surface (see the side view in Fig.lA below). In other words, the outer sleeve 102 may have, as an outer boundary, a cylinder jacket surface 102a. Alternatively, the outer sleeve 102 may at least externally have a different shape, for example, a cross-section perpendicular to the axial 111 angular shape or an oval shape or the like, in which case the Gehause, which is to take the bearing assembly 100 or in which the bearing assembly 100 are inserted should, can be adjusted accordingly.
    Between the inner member 104 and the outer sleeve 102, a plurality of portions 106a, 106b, 108a, 108b, 110a for supporting electrical contacts, mechanical bearings or seals may extend. The inner surfaces 102b, 102c, 102d of the outer sleeve 102 may each be cylindrical surfaces in the respective regions 106a, 106b, 108a, 108b, 110a, e.g. each with a constant diameter and a circular cross-section or are based on a circular base (see the side view in Fig.lA below).
    The inner member 104 may also have a cylindrical outer shape 104a, e.g. with a constant outer diameter 104d and a circular cross-section or are based on a circular base surface (see the side view in Fig.lA below). In other words, the inner element 104 may have as external boundary a cylinder jacket surface 104a.
    Illustrated clearly, the outer sleeve 102 can be arranged on the inside such that in the regions 106a, 106b, 108a, 108b, 110a different distances 103a, 103b, 103c are provided between the outer circumference 104a of the inner element 104 and the respective inner circumference of the outer sleeve 102.
    Alternatively, for example, the inner element 104 may also be configured externally such that in the regions 106a, 106b, 108a, 108b, 110a different distances 103a, 103b, 103c are provided between the inner periphery of the outer sleeve 102 and the respective outer periphery of the inner element 104 (not shown) ), or both the inner member 104 and the outer sleeve 102 may be arranged such that in the regions 106a, 106b, 108a, 108b, 110a, different distances 103a, 103b, 103c between the respective inner periphery of the outer sleeve 102 and the respective outer circumference of the inner member 104 are provided (see Fig.lD).
    According to various embodiments, the distance 103a between the inner periphery 102d of the outer sleeve 102 and the outer periphery 104a of the inner member 104 in the region 110a (in which, for example, an electrical contact structure may or may be accommodated) may be smaller than, for example, the distance 103b between the inner periphery 102c of the outer sleeve 102 and the outer circumference 104a of the inner element 104 in the region 108a and / or the region 108b (in which, for example, one bearing each can or may be received).
    According to various embodiments, the distance 103a between the inner periphery 102d of the outer sleeve 102 and the outer periphery 104a of the inner member 104 in the region 110a (in which, for example, an electrical contact structure may or may be accommodated) may be smaller than, for example, the distance 103c between the inner periphery 102b of the outer sleeve 102 and the outer circumference 104a of the inner element 104 in the region 106a and / or the region 106b (in which, for example, a respective seal can or may be received).
    According to various embodiments, the distance 103b between the inner circumference 102c of the outer sleeve 102 and the outer circumference 104a of the inner member 104 may be smaller in the region 108a and / or the region 108b (in which, for example, each bearing may or may be received) than, for example the distance 103c between the inner periphery 102b of the outer sleeve 102 and the outer periphery 104a of the inner member 104 in the region 106a and / or the region 106b (in which, for example, a seal may or may not be received).
    Illustrated clearly, the inner element 104 and the outer sleeve 102 can be provided such that the regions 106a, 106b, 108a, 108b, 110a are each accessible from the axial direction 111, so that, for example, the bearings and / or the seals can be removably inserted into the corresponding regions are, so that, for example, the bearings and / or seals in the axial direction 111 between the outer sleeve 102 and the inner member 104 can be inserted or in the axial direction 111 can be pulled out of the bearing assembly 100. Illustratively, the inner element 104 and / or the
    Aubenhülse 102 be constructed abgegcstuft so that the Verschleibteile along the axial direction 111 between the outer sleeve 102 and the outer sleeve 102 can be inserted or removed inserted.
    For example, as illustrated in FIG. 1A, the bearing assembly 100 may include a first end 100a and a second end 100b. Bearing assembly 100 may be symmetrically constructed between ends 100a and 100b, as illustrated, for example, or alternatively, bearing assembly 100 may be asymmetrically configured between ends 100a and 100b. Perpendicular to the axial direction 111, the bearing assembly 100 can be constructed rotationally symmetrical, so that the inner element 104 can rotate in the outer sleeve 102.
    In various embodiments, the inner member 104 may have an outer diameter in the range of a few centimeters, for example, in a range of about 3 cm to about 10 cm. Further, the inner member 104 may have an outer diameter ranging from a few centimeters to a few tens of centimeters, for example, in a range of about 6 cm to about 20 cm, e.g. in a range of about 10 cm to about 30 cm.
    For example, as illustrated in FIG. 1A, the inner member 104 and the outer sleeve 102 may be spaced apart such that they do not, for example, grind together. The outer sleeve 102 may, for example, be a cylinder which can be brought into the shape of the outer sleeve 102 by means of two or more than two (eg three, four or five) coaxial bores of different diameter, as illustrated herein, by means of the coaxial bores 106a, 106b, 108a, 108b, 110a may or may be provided.
    According to various embodiments, the outer sleeve 102 may also have fewer inside shades than shown in FIG. 1A.
    Fig. 1B illustrates a bearing assembly 100 in a schematic cross-sectional view, wherein an electrical contact structure 110 is provided between the inner member 104 and the outer sleeve 102 (e.g., in the region 110). Furthermore, a first bearing 118a may be inserted in the axial direction 111 from the first end 100a (ie along the first axial direction IIIa) between the inner member 104 and the outer sleeve 102 (e.g., in the portion 108a). Furthermore, a second bearing 118b in the axial direction 111 from the second end 100b ago (ie along the second axial direction 11 lb) between the inner member 104 and the
    Outer sleeve 102 (e.g., in region 108b). For example, because the inner diameter of the outer sleeve 102 may be smaller in the region 110a than in the regions 108a, 108b, the outer sleeve 102 may include, for example, a projection 102v by which the inserted bearings 108a, 108b may or may be positioned in the bearing assembly 100 , Thus, for example, the bearings 118a, 118b may be plugged in without contacting the electrical contact structure 110.
    The bearing assembly 100 may further include a first receiving portion 106a at the first axial end portion of the bearing assembly 100 for receiving at least a first seal or at least a first seal member. The bearing assembly 100 may further include a second receiving portion 106b at the second axial end portion of the bearing assembly 100 for receiving at least a first seal or at least a first sealing member. As illustrated in FIG. 1B, the bearings 118a, 118b may be accessible from the axial direction 111 if no seals are inserted into the respective receiving regions 106a, 106b.
    Figure lC illustrates a bearing assembly 100 in a schematic cross-sectional view, wherein an electrical contact structure 110, a first bearing 118a, and a second bearing 118b are provided between the inner member 104 and the outer sleeve 102 (e.g., in the region 110) as previously described. Further, a first seal member 116a may be removably inserted in the axial direction 111 from the first end 100a (ie, along the first axial direction 11la) between the inner member 104 and the outer sleeve 102 (e.g., in the portion 106a). Further, a second seal member 116b may be removably inserted in the axial direction 111 from the second end 100b (ie, along the second axial direction 11b) between the inner member 104 and the outer sleeve 102 (e.g., in the portion 106b). For example, since the inner diameter of the outer sleeve 102 may be smaller in the regions 108a, 108b than in the regions 106a, 106b, the outer sleeve 102 may, for example, have a further projection 102w by means of which the inserted sealing elements 116a, 116b may be positioned in the bearing assembly 100 or can be. Thus, the sealing elements 116a, 116b can be inserted without touching the mechanical bearings 118a, 118b, for example.
    The sealing elements 116a, 116b can, for example, seal the outer sleeve 102 with respect to the inner element 104. In this case, the first sealing element 116a may be a vacuum seal, so that, for example, the bearings 118a, 118b and / or the electrical contact structure 110 can be or can be separated from the bearing arrangement 100 by means of the first sealing element 116a in the direction of the first end 100a of the bearing arrangement 100. Furthermore, the second sealing element 116b may be a fluid seal, so that, for example, the bearings 118a, 118b and / or the electrical contact structure 110 by means of the second sealing element 116b in the direction of the second end 100b of the bearing assembly 100 of a cooling liquid, which for example, the bearing assembly 100 partially flows through can, can or should be separated.
    The inner element 104 can, for example, be a hollow tube or have one or more bores or through-holes, so that cooling liquid can flow in the axial direction 111 through the inner element 104.
    Analogous to the previous description, FIG. 10D illustrates an alternative design for the assembly of outer lens 102 and inner member 104. In this case, for example, both the interior of the outer sleeve 102 and the outer of the inner element 104 are configured such that the areas 106a, 106b, 108a, 108b, 110a, as described above, for receiving the electrical contact structure 110, the bearings 118a, 118b and / or the sealing elements 116a, 116b may or may be provided. Furthermore, as described above, the inner member 104 may be hollow or have a through-opening 104i.
    Analogous to the above description, FIG. 10E illustrates an alternative design for the outer sleeve 102 and inner 104 assembly. In this case, the outside of the inner element 104 is configured, for example, such that the regions 106a, 106b, 108a, 108b, 110a can be provided for holding the electrical contact structure 110, the bearings 118a, 118b and / or the sealing elements 116a, 116b, as described above can be. Furthermore, as described above, the inner member 104 may be hollow or have a through-going aperture 104i. In this case, the outer sleeve 102 may be a simple hollow cylinder 102.
    2A, an electrode arrangement 200 is illustrated in a schematic cross-sectional view, wherein the electrode arrangement 200 has a housing 202, wherein the housing 202 is set up such that the bearing arrangement 100 can be inserted into the housing 202 and can be removed from the housing, eg along the first axial direction purple. Illustratively, the housing 202 may have a through hole that mates with the outer sleeve 102 of the bearing assembly 100 such that the bearing assembly 100 is supported in the housing at multiple locations or along at least one surface. For example, the outer surface 102a (lateral surface) of the outer sleeve 102 may be attached to the inner surfaces 202i of the
    Housing 202 adjoin or at least partially adjacent, wherein the inner surfaces 202i may be part of the through hole or may define a part of the Durchgangsöffhung.
    The housing 202 may be, for example, a holder for holding an electrode in a vacuum chamber, e.g. a so-called endblock or magnetronendblock. In this case, the housing 202 can be set up such that the electrode can be supplied with cooling water and / or electrical energy, wherein the coupling between the electrode and the housing 202 by means of the bearing arrangement 100 erfblgt.
    According to various embodiments, the housing 202 of the electrode assembly 200 may have a projection 202v at at least one location, such that the outer sleeve 102 of the inserted bearing arrangement 100 adjoins the projection 202v with a front end on the second end 100b of the bearing assembly 100. Thus, the bearing assembly 100 may be or be positioned, for example, when it is inserted from the axial direction 11 la in the housing 202. Illustratively, the outer sleeve 102 of the bearing assembly 100 is not fixedly connected to the housing 202, i. the bearing assembly 100 is removably inserted into the housing 202 or can be removably inserted into the housing 202. In other words, the outer sleeve 102 of the bearing assembly 100 is not integrally formed with the housing 202. Thus, for example, the bearing assembly 100 can be replaced without the housing 202 must be dismantled. Furthermore, the outer sleeve 102 may be or may be inserted into the housing such that it does not rotate or rotate relative to the housing when the inner member 104 is rotating.
    In FIG. 2B an electrode arrangement 200 is illustrated in a schematic cross-sectional view, wherein the electrode arrangement 200 has at least one housing 202 (eg two or even four housing 202), wherein the at least one housing 202 with a holder 212 (eg another component of the electrode arrangement 200) is connected. The electrode assembly 200 may further include a tubular electrode 216 (or, for example, two or more than two tubular electrodes 216) with the at least one tubular electrode 216 held by the at least one housing 202. In this case, the electrode arrangement 200 may comprise at least one bearing arrangement 100 (for example one per housing 202 in each case), by means of which the tubular electrode 216 is rotatably mounted.
    For example, the electrode assembly 200 may include coupling members 214 by which the tubular electrode 216 may or may be coupled to the inner member 104 of the bearing assembly 100.
    Furthermore, the tubular electrode 216 may have a magnet arrangement within the tubular electrode 216. Further, the tubular electrode 216 may be configured such that the tubular electrode 216 may be cooled by means of a cooling liquid passing through the tubular electrode 216, for example.
    For example, the electrode assembly 200 may be a magnetron assembly 200 comprising: two end blocks 202 (eg, a magnetron cathode tube magnetron) or four end blocks (eg, a dual magnetron cathode double magnetron cathode), with the end blocks having a retainer 212 (eg, with a magnetron cathode) Magnetrondeckel or another component of the magnetron 200) are mechanically connected. The magnetron assembly 200 may further include a magnetron cathode 216 or two magnetron cathodes 216, which are respectively held by the end blocks 202. The magnetron assembly 200 may include one or more bearing assemblies 100 (e.g., one per end block 202, or one per electrode 216 in the electrode assembly 200), by means of which the magnetron cathode or the plurality of magnetron cathodes may be rotatably supported and / or electrically contacted. A magnetron cathode can, for example, have a magnet arrangement, by means of which a plasma can be generated outside the magnetron cathode. Furthermore, the magnetron cathode 216 may be arranged such that it can be cooled from the inside by means of a cooling liquid.
    The magnetron cathode 216 may, for example, be placed at or brought to cathode potential so that a sputtering process in a vacuum chamber can be carried out by means of the magnetron cathode.
    Various modifications and configurations of the bearing assembly 100 and details of the electrode assembly 200 will now be described, and the basic features and functions described with respect to FIGS. 1A through 1 B, 2 A and 2 B may be incorporated by analogy. Furthermore, the features and functionalities described below can be transferred analogously to the bearing arrangement 100 or electrode arrangement 200 described in FIGS. 1A to 1 IE, 2A and 2B or combined with the bearing arrangement 100 or electrode arrangement 200 described in FIGS. 1A to 1 IE, 2A and 2B ,
    3A each illustrates a housing 202 (left) and a bearing assembly 100 (right) in a schematic cross-sectional view. The housing 202 may, for example, have a passage opening 302, and be configured such as having the area 302a (which may be part of the passage opening 302) that the bearing arrangement 100 can be inserted into the housing 202, for example along the axial direction 11 la. Furthermore, the housing 202 can have a cooling water guide 302k, so that, for example, cooling water can be conducted through the housing 202 to the bearing arrangement 100 or further through the bearing arrangement 100 to an electrode coupled to the bearing arrangement 100. Furthermore, the housing 202 may include an annular flange receiving area 302r such that an annular flange may be secured to the housing 202. Further, the housing 202 may include a flange receiving portion 302f so that a flange may be secured to the housing 202.
    For example, in various embodiments, the (eg, smallest) diameter 302i of the through opening of the housing 202 may be greater than or equal to the diameter 304i of the outer shell 102 of the bearing assembly 100 in the region 106a, 106b (ie, in the area of receipt for the gaskets 116a, 116b), such that the gaskets 116a, 116b can be inserted through the housing 202 into the bearing assembly 100.
    Furthermore, the electrical contact structure 110 of the bearing arrangement 100 can be set up as a sliding contact. In this case, the outer sleeve 102 can have an electrical feedthrough 110 L in the region of the electrical contact structure 110, so that the electrical contact structure 110 can or can be contacted by the outer sleeve 102.
    FIG. 3B illustrates the electrode arrangement 200 in analogy to FIG. 3A, wherein the bearing arrangement 100 is removably inserted into the housing 202. For example, the bearing assembly 100 is supported at multiple locations in the housing 202. According to various embodiments, a region 302b may extend between the housing 202 and the bearing arrangement 100 used, in which the housing 202 has no mechanical contact with the bearing arrangement 100.
    As shown in a schematic exploded view (in cross-section) in FIG. 4A, the electrode arrangement 200 next to the housing 202 and the inserted bearing arrangement 100 can also have further components which complete the modular arrangement, for example, of the electrode arrangement 200.
    For example, the electrode assembly 200 may include a first seal member 116a that may be inserted into the first receiving portion 106a of the bearing assembly 100. Illustratively, the first sealing element 116a can be inserted into the bearing arrangement 100 and / or removed from the bearing arrangement 100 without removing the bearing arrangement 100 from the housing 202. The first sealing element 116a may be, for example, a vacuum seal or have a vacuum seal. Lemer, the first sealing member 116a may also have a plurality of vacuum seals, which may be inserted one after the other or at the same time in the bearing assembly 100 or may be.
    The electrode arrangement 200 can, for example, have a second sealing element 116b, which can be inserted into the second receiving region 106b of the bearing arrangement 100. Illustratively, the second sealing element 116b can be inserted into the bearing arrangement 100 and / or removed from the bearing arrangement 100 without removing the bearing arrangement 100 from the housing 202. The sealing member 116b may be, for example, a fluid seal or having a fluid seal. Furthermore, the second sealing element 116b can also have a plurality of fluid seals, which can be inserted one after the other or at the same time into the bearing arrangement 100. As a fluid seal, a seal can be understood which at least the passage of a liquid, e.g. Water, prevented.
    Furthermore, the electrode assembly 200 may include a flange ring 420a, which may be attached to, for example, the housing 202, e.g. can be or can be attached to the flange receiving portion 302r of the housing 202 (see Fig. 3A). The flange ring 420a may be bolted to the housing 202, for example. In other words, the flange ring 420a and the housing 202 of the electrode assembly 200 may have a threaded connection.
    For example, the flange ring 420a may have an outside diameter which is greater than the outside diameter 102d of the outer sleeve 102 of the bearing assembly 100 become. Furthermore, the first sealing element 116a and the bearing arrangement 100 can be fixed by means of the flange ring 420a, so that the first sealing element 116a inserted into the bearing arrangement 100 seals the first receiving area 106a of the bearing arrangement 100 in a vacuum-tight manner. Further, the flange ring 420a may have a through-opening in the axial direction, wherein the inner diameter of the flange ring 420a may be larger than the outer diameter 104d of the inner member 104. Thus, a portion of the inner member 104 may be exposed when the flange ring 420a is mounted, e.g. the end face or the free end portion of the inner member 104, so that, for example, a coupling element 422 can be attached to the inner member 104 or can be. The coupling element 422 may, for example, be screwed to the inner element 104 or be. The coupling element 422 may, for example, be configured such that a tubular electrode can be rotatably fastened by means of the coupling element 422 to the bearing arrangement 100 and thus to the housing 202.
    Furthermore, the electrode assembly 200 may include a flange 420b which may be attached to the housing 202, e.g. can be attached to the flange receiving portion 302f of the housing 202 (see Fig. 3A). For example, the flange 420b may or may be bolted to the housing 202. In other words, the flange 420b and the housing 202 of the electrode assembly 200 may have a threaded connection.
    In various embodiments, the second sealing element 116b and / or the bearing assembly 100 may be fixed (fixed) to the housing 202 by means of the flange 420b. Further, the second seal member 116b and the bearing assembly 100 can be fixed by means of the flange 420b, so that the second seal member 116b inserted into the bearing assembly 100 seals the first receiving portion 106b of the bearing assembly 100 in a liquid-tight manner. Furthermore, the flange 420b may have a liquid guide 420k, so that coolant can be conducted from the housing 202 to the inner element 104 and / or through the inner element 104 and / or out of the inner element 104 by means of the flange 420b. For example, the flange 420b may include a coolant supply 420k and a coolant drain, so that an electrode coupled to the bearing assembly 100 may be cooled by means of the assembled electrode assembly 200 (see FIG. Furthermore, an electrode can be electrically conductively connected to the inner element 104 of the bearing arrangement 100, so that the electrode can be brought to a predefined potential by means of the electrical contact structure 110, 10 lo of the bearing arrangement 100.
    According to various embodiments, the electrical contact structure 110, 110d can be arranged such that a current of several hundred amperes can be transmitted to the inner element 104 and thus to the electrode.
    In Fig. 4B, the electrode assembly 200 is illustrated as described with respect to Fig. 4A, for example, with the gaskets 116a, 116b inserted into the bearing assembly 100 and fixed by the flange 420b and the annular flange 420a, and with the coupling member secured to the inner member 104 of the bearing assembly 100 is attached.
    The inner element 104 can be rotatably supported by means of the bearings 118a, 118b of the bearing assembly 100, wherein upon rotation of the inner element 104, the seals 116a, 116b can slide or grind on the inner element 104. The bearings of the bearing assembly 100 may be, for example, roller bearings, ball bearings, roller bearings or the like. Furthermore, the first bearing 118a and / or the second bearing 118b of the bearing assembly 100 may include a plurality of bearings, e.g. several juxtaposed similar or different types of bearings.
    As shown in Fig. 4B, the housing 202, the flange 420b, and the bearing assembly 100 may each be arranged to allow (when mounted) a coolant flow 426 (e.g., for passing cooling water). For example, the housing 202 may include a coolant inlet 426a for introducing the coolant through the bearing assembly 100 into an electrode coupled to the bearing assembly 100. Further, the housing 202 may include a coolant outlet 426b for diverting the coolant from the electrode coupled to the bearing assembly 100 through the bearing assembly 100. The electrode assembly 200, for example, allows a design in which the cooling liquid guide 426 can be realized to save space. For example, the cooling liquid inlet 426a and the cooling liquid outlet 426b may be juxtaposed, e.g. with a small distance from each other (at a distance from each other of about 1 cm to about 10 cm).
    As shown in FIGS. 5A and 4B analogously to FIGS. 4A and 4B, the flange 420b can also be set up in such a way that it provides a part 428 of the second seal 116b, so that only in the mounted state of the electrode arrangement 200, cf. , 5B, the second receiving area of the bearing assembly 100 is sealed (e.g., sealed liquid tight) by the second seal and sealed by the flange 420b. The flange 420b fixes in the mounted state, for example, the second seal 116b in the bearing assembly 100 and at the same time seals off the region 106b.
    The sealing by means of the seals 116a, 116b can be understood, for example, as meaning that a pressure difference or a partial pressure difference can be provided.
    According to various embodiments, the outer sleeve 102 of the bearing assembly 100 may include a lubricant supply such that, for example, the bearings 118a, 118b may be lubricated through the outer sleeve 102.
    For example, as illustrated in FIGS. 4B and 5B, the gaskets 116a, 116b may be easily replaced. For this purpose, only the flange 420b and / or the annular flange 420a and the coupling element 422 are to be removed. For example, the bearing assembly 100 may remain in the housing 202 upon replacement of the seals 116a, 116b. In the same way, the bearings 118a, 118b can be replaced.
    According to various embodiments, the distance between the first bearing 118a and the second bearing 118b may be in a range of several centimeters, e.g. in a range of about 5 cm to about 30 cm.
    Furthermore, the bearing assembly 100 may have a length (along the axial direction 111) in a range of about 10 cm to about 50 cm.
    Furthermore, the bearing assembly 100 may be configured such that the inner member 104 is electrically isolated from the outer sleeve 102. For example, the bearings (rolling bearings) may be made of electrically insulating material or may be electrically insulating, e.g. also to avoid electrocorrosion or electroerosion (or sparking) on the bearing and / or on the running surfaces of the bearing. Furthermore, distilled water can be used as the cooling liquid so that there is no electrical short circuit between the outer sleeve 102 and the inner element 104 via the cooling liquid.
    According to various embodiments, the inner element 104 and the outer sleeve 102 may also be conical or partially conical, in which case the bearings 118a, 118b and the seals 116a, 116b must be adapted accordingly.
    Furthermore, a portion of the flange 420b may extend into the tubular inner member 104, for example for directing the cooling water in the inner member 104.
    6 schematically depicts a coating assembly 600 (e.g., a magnetron sputtering apparatus) for coating 606 a substrate 604 in a vacuum chamber 602, the coating assembly 600 having a magnetron assembly, the magnetron assembly comprising: a support 212, e.g. a magnetron cap, an electrode assembly 200 affixed to the support 212 as described above, a magnetron cathode 216 (e.g., having a magnet assembly and a cathode tube), the magnetron cathode 216 being rotatably supported within the housing 202 by the bearing assembly 100.
    As illustrated in FIG. 6, a magnetron cathode 216 or multiple magnetron cathodes 216 may be held in a vacuum chamber 602 via multiple housings 202 so that a sputtering process may be performed to coat 606 the substrate 604 with sputtered magnetron cathode (or magnetron).
    权利要求:
    Claims (17)
    [1]
    Patentanspriiche
    A bearing assembly (100) for rotatably supporting an electrode, the bearing assembly comprising: • an outer sleeve (102) insertable into a housing (202) for supporting a rotatable electrode (216); An inner member (104) coaxially received in the outer sleeve (102) and rotatably supported relative to the outer sleeve (102) by a first bearing (118a) and a second bearing (118b), the bearings (118a, 118b) in the axial direction (111) have a distance from each other; An electrically conductive contact structure (110) positioned adjacent to the first bearing (118a) in the second bearing (118b) and electrically contacting the inner member (104); and a first receiving portion formed at a first axial end portion of the bearing assembly between an inner periphery of the outer sleeve and an outer periphery of the inner member for receiving a first sealing member wherein a distance (103c) between the outer circumference (104a) of the inner element (104) and the inner circumference (102b) of the outer sleeve (102) in the region of the first receiving region (106a) is greater than a distance (103b) between the outer circumference (104a) of the inner element (104) and the inner circumference (102c) of the outer sleeve (102) in the region (108a, 108b) of the first bearing (118a).
    [2]
    2. Bearing assembly according to claim 1, further comprising: a second Aufhahmebereich (106 b) at a second axial end portion of the bearing assembly between an inner periphery (102 b) of the outer sleeve (102) and an outer circumference (104 a) of the inner member (104) for holding a second sealing element (116b) is formed.
    [3]
    3. Bearing arrangement according to claim 2, wherein a distance (103c) between the outer circumference (104a) of the inner element (104) and the inner circumference (102b) of the outer sleeve (102) in the region of the second receiving region (106b) is greater than a second distance (103b) between the outer periphery (104a) of the inner member (104) and the inner periphery (102c) of the outer sleeve (102) in the region (108a, 108b) of the second bearing (118b).
    [4]
    A bearing assembly according to any one of claims 1 to 3, wherein a distance (103a) between the outer periphery (104a) of the inner member (104) and the inner periphery (102d) of the outer sleeve (102) in the region (110a) between the first bearing (118a ) and the second bearing (118b) is smaller than a distance (103b) between the outer periphery (104a) of the inner member (104) and the inner periphery (102c) of the outer sleeve (102) in the region (108a, 108b) of the first bearing (118a ) and / or the second bearing (118b).
    [5]
    5. Bearing arrangement according to one of claims 1 to 4, wherein the electrically conductive contact structure (110) has at least one sliding contact, which on the outer circumference (104a) of the inner member (104) grinds.
    [6]
    6. Bearing arrangement according to one of claims 1 to 5, wherein the inner member has an axial passage opening (104i).
    [7]
    7. Bearing arrangement according to claim 1, wherein the electrically conductive contact structure extends through the outer sleeve and / or wherein the outer sleeve is electrically insulated from the electrically conductive contact structure.
    [8]
    8. Bearing assembly according to one of claims 1 to 7, wherein the first bearing (118a) and the second bearing (118b) comprise an electrically insulating material, so that the inner member (104) by means of the bearings of the AuBenhülse (102) is electrically insulated ,
    [9]
    An electrode assembly (200) comprising • a housing (202) for supporting a rotatable electrode, the housing (202) having a through opening (302) adapted to receive a bearing assembly (100) according to any one of claims 1 to 8 wherein the passageway (302) defines an axial direction (111) and the housing (202) is arranged such that the bearing assembly (100) is removably insertable coaxially into the passageway (302) such that the outer sleeve (102) of FIG Bearing assembly (100) is at least partially supported on the housing (202).
    [10]
    10. The electrode assembly according to claim 9, wherein the passage opening (302) of the housing (202) and the bearing assembly (100) are arranged such that a first Dichtungseleraent (116a) in the first Aufiiahmebereich (106a) of the bearing assembly (100) can be inserted coaxially removable is and / or that a second sealing element (116b) in the second Aufiiahmebereich (106b) of the bearing assembly (100) can be inserted coaxially removable.
    [11]
    11. The electrode assembly according to claim 10, wherein the first sealing element (116a) is a vacuum seal, by means of which the first receiving area (106a) between the outer sleeve (102) and the inner element (104) is sealed vacuum-tight, and / or wherein the second sealing element (116). 116b) is a fluid seal, by means of which the second Aufiiahmebereich (106b) between the outer sleeve (102) and the inner member (104) is sealed liquid-tight.
    [12]
    12. Electrode arrangement according to claim 11, wherein the bearing arrangement (100) and the first sealing element (116a) are fixable relative to one another by means of a flange ring (420a) and / or wherein the bearing arrangement (100) and the first sealing element (116a) are connected by means of the flange ring (116). 420a) can be fixed to the housing (202).
    [13]
    13. Electrode arrangement according to claim 11 or 12, wherein the bearing arrangement (100) and the second sealing element (116b) by means of a flange (420b) are fixable relative to each other and / or wherein the bearing assembly (100) and the second sealing element (116b) by means of Flange (420b) on the housing (202) are fixable.
    [14]
    14. The electrode assembly according to claim 12, wherein the flange ring (420a) is arranged such that the fteie end portion of the inner member (104) from the axial direction (111) is accessible.
    [15]
    15. An electrode assembly according to claim 13, wherein the flange (420b) has a Kühlwasserfiihrung (420k), by means of which cooling water through the flange (420b) can be passed through to the inner member (104) and / or derived from the inner member (104) can be.
    [16]
    16. The electrode assembly of claim 9, further comprising: a coupling member for coupling an electrode to the inner member, wherein the coupling member is attached to a first axial end portion of the inner member.
    [17]
    17. An electrode assembly (200) comprising a housing (202) for supporting a rotatable electrode, said housing (202) having a through hole (302) adapted to receive a bearing assembly (100), said bearing assembly comprising: • a Outer sleeve (102) insertable into a housing (202) for supporting a rotatable electrode (216); An inner member (104) coaxially received in the outer sleeve (102) and rotatably supported relative to the outer sleeve (102) by a first bearing (118a) and a second bearing (118b), the bearings (118a, 118b) in the axial direction (111) have a distance from each other; An electrically conductive contact structure (110) positioned adjacent to the first bearing (118a) and / or the second bearing (118b) and electrically contacting the inner member (104); A first receiving portion (106a) formed at a first axial end portion of the bearing assembly between an inner periphery (102b) of the outer sleeve (102) and an outer periphery (104) of the inner member (104) for housing a first seal member (116a); and • a second receiving portion (106b) formed at a second axial end portion of the bearing assembly between an inner periphery (102b) of the outer sleeve (102) and an outer periphery (104a) of the inner member (104) for receiving a second seal member (116b); wherein the passageway (302) defines an axial direction (111) and the housing (202) is arranged such that the bearing assembly (100) is removably insertable coaxially into the passageway (302) such that the outer sleeve (102) of the bearing assembly (100) is at least partially supported on the housing (202), and wherein the Durchgangsöffhung (302) of the housing (202) and the bearing assembly (100) are arranged such that, preferably when the bearings (118a, 118b) are mounted, the first sealing element (116a) can be inserted coaxially and removably into the first receiving region (106a) of the bearing arrangement (100) and the second sealing element (116b) can be inserted coaxially and removably into the second receiving region (106b) of the bearing arrangement (100).
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    同族专利:
    公开号 | 公开日
    DE102013113562B4|2018-10-04|
    US20150162159A1|2015-06-11|
    BE1024054A1|2017-11-08|
    DE102013113562A1|2015-06-11|
    引用文献:
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    法律状态:
    2018-02-08| FG| Patent granted|Effective date: 20171109 |
    2018-08-31| MM| Lapsed because of non-payment of the annual fee|Effective date: 20171130 |
    优先权:
    申请号 | 申请日 | 专利标题
    DE102013113562.5A|DE102013113562B4|2013-12-05|2013-12-05|Bearing assembly for rotatably supporting an electrode and electrode assembly|
    DE1020131135625|2013-12-05|
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