• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    To solve the problem of providing an improved terminal block in which the heating by induced eddy currents, which can occur for example during AC sputtering, is significantly reduced compared to known terminal blocks, it is proposed a terminal block for a magnetron system with a rotating target which includes a terminal block housing with a mating surface for installing the terminal block on a support device, with a rotating bearing for rotational mounting of the rotating target and with at least one current conduction device which conducts current through the terminal block housing when the terminal block is operating, the terminal block housing being designed such that each current path surrounding the current conduction device in the housing terminal block has an interrupton in at least one place.
    公开号:BE1019232A3
    申请号:E2009/0714
    申请日:2009-11-19
    公开日:2012-05-08
    发明作者:Hans-Juergen Heinrich；Ulf Seyfert；Goetz Teschner
    申请人:Ardenne Anlagentech Gmbh；
    IPC主号:
    专利说明:

    "Terminal block for a maqnetron system with a rotating target"
    A terminal block for a magnetron system with a rotating target and a vacuum coating plant with such a magnetron system, which are of simple construction and easy maintenance, will be described hereinafter.
    In vacuum coating technology, so-called rotary magnetrons are known in which a most often tubular target surrounds a magnet structure, the tubular target being rotatably mounted and drivable such that the target material is removed from the body. uniform way. The tubular target is generally fixed in the vacuum chamber of a vacuum coating installation between two end blocks which are constructed in such a way that they respectively allow the rotational mounting of the tubular target. Most often, different functions are, in this case, assigned to the two terminal blocks. One of the terminal blocks is, in general, embodied as a terminal power supply unit for supplying the magnetron with cooling water and electrical energy and the other terminal block is designed as a drive terminal block for inducing a torque for to generate the rotation of the tubular target. Terminal blocks of this type are known, for example, from documents DE 10 2007 049 735 A1 and WO / 2007/147757 A1.
    Known terminal blocks, both the feed terminal blocks and the drive end blocks, are usually rigidly connected to a support device, for example to a chamber wall or a chamber cover of a coating plant. under vacuum, and in fact either directly or via a spacer which serves to influence the distance between the magnetron and the substrate and which is also used for the electrical insulation of the terminal block with respect to the wall of chamber or the chamber cover and is made in this case in an insulating material.
    During AC sputtering in particular, induced eddy currents occurring in the housing of the terminal block can cause a heating of the terminal blocks. This heating leads to a loss of energy that can no longer be made available to the vacuum process. In addition, thermal expansion due to warming has adverse effects on the magnetron system. In addition, excessive heating of the terminal block can lead to damage or even destruction of heat sensitive terminal block components, such as seals, and thus lead to magnetron failure or any the vacuum coating installation.
    In the known terminal blocks, heating of the terminal block occurring during operation is counteracted by the fact that the heat produced is discharged by a cooling system integrated in the terminal block and / or the power supply is kept at a low level by a limitation of the power. In the first case, it is necessary to provide an additional cooling device, which entails additional costs and increases the energy consumption for the operation of the vacuum coating installation. In the latter case, however, the power of the magnetron is artificially limited, which lowers the productivity of the vacuum coating plant.
    This is why it is necessary to provide an improved terminal block in which heating due to induced eddy currents that may occur for example during sputtering AC current is significantly reduced compared to known terminal blocks.
    Therefore, to solve the problem, there is provided a magnetron system with a rotating target, which comprises a terminal block housing with a connecting surface for mounting the terminal block on a support device, with a rotary bearing for rotatably mounting the rotating target and with at least one current conducting device which conducts current, during operation of the terminal block, through the terminal block housing, the terminal block housing being designed in such a way that each current path surrounding the current conduction device in the terminal block housing has an interruption in at least one location.
    The idea behind the proposed terminal block is to generally realize the terminal block housing so as to prevent closed current paths in which eddy currents occur. For this purpose, it is proposed to integrate insulating sections in the geometric contour of the entire terminal block. The geometry and the concrete configuration of the isolation zones can be multiple.
    In a concrete embodiment, it can be provided for example that at least the wall of the terminal block housing facing the rotating target has a slot extending from the rotational bearing to the connecting surface.
    It may further be provided that each interruption is closed by a closure element of electrically non-conductive material. In this case, the electrically nonconductive material may be, for example, a curable casting resin with which slits or other insulation sections which serve to prevent closed current paths are closed. After curing the resin to be cast, the closure member formed by it is intimately connected to the contiguous portions of the terminal block housing. As a result, the terminal block housing can be made in a vacuum-tight manner despite expected interruptions.
    In an improvement of the proposed terminal block, the closure member further comprises an annular element surrounding the rotary bearing. According to another improvement of the terminal block, it is provided that the closure element further comprises a connecting element forming the connecting surface.
    The annular element and / or the connecting element can be produced, according to these improvements, with the closure element in one and the same working step and are finally an integrated constituent part of the closure element. when a curable casting resin is used, i.e. they are connected to it to be one piece. The annular element surrounds the rotating bearing and provides a vacuum-tight, electrically non-conductive surface. In the same way, the connection element surrounds the side of the terminal block intended for fixing the terminal block and offers at this point an electrically non-conductive, vacuum-tight surface.
    An exemplary embodiment of the proposed terminal block will be described in more detail below on the basis of a figure of the drawing. The single figure 1 shows three views of the terminal block housing.
    The terminal block casing 1 has a substantially parallelepipedic base shape, open on one side, with a cylindrical cavity 2. In addition, the outer surface facing the target has an opening 3 in which the rotary bearing for a rotating target is disposed.
    The terminal block housing 1 is open upward. With this side, the terminal block housing 1 is mounted on a support device, for example the chamber wall or the chamber cover of a vacuum coating plant.
    To power the target with power, a current driver conducts current through the terminal block housing 1 when the terminal block is operating is disposed therein. This current conduction device can also be made in a very different manner, for example comprising a cable for introducing the current into the terminal block housing and friction contacts for introducing the current into the rotating target. The concrete configuration of the current conduction device is however negligible for the inventive idea, which is why the current conduction device is only symbolized by the arrow 10 indicating the direction of flow of the current in the figure.
    To prevent closed current paths in the terminal block casing 1 which surround the current conduction device and thus lead to the generation of eddy-induced currents, the wall of the terminal block casing 1 facing the rotating target has a slot 4 extending from the opening 3 to the connecting surface 9. This slot acts as an interruption of a possible current path in the terminal block housing 1.
    To close the slot 4 and thereby to make the vacuum-sealed terminal block casing 1, the slot 4 is then closed with a non-conductive, curable casting resin which, after curing, forms the closure element described. In this case, an annular element 6 surrounding the opening 3, providing an electrically non-conductive vacuum-tight surface 8 and a connecting element 7 forming the connecting surface 9 of the terminal block and therefore also a vacuum-tight surface 9 Electrically non-conductive, which are connected to the closure member 5 to form a single piece therewith, are further formed by the resin to be cast.
    List of part numbers 1 Terminal block housing 2 Cavity 3 Opening for rotary bearing 4 Slot 5 Closing element 6 Annular element 7 Connection element 8 Vacuum-tight surface 9 Connection surface, vacuum-tight surface 10 Current conducting device , direction of current flow
    权利要求:
    Claims (6)
    [1]
    1. Terminal block for a magnetron system with a rotating target, comprising a terminal block housing (1) with a connecting surface (9) for installing the terminal block on a support device, a rotary bearing for mounting to rotate the rotary target and at least one current conducting device (10) which conducts the current through the terminal block housing (1) when the terminal block is operating, characterized in that the terminal block housing (1) is designed such that whereby each current path surrounding the current conducting device (10) in the terminal block housing (1) is interrupted at at least one location.
    [2]
    Terminal block according to Claim 1, characterized in that at least the wall of the terminal block housing (1) facing the rotary target has a slot (4) extending from the rotary bearing to the connecting surface. (9).
    [3]
    3. Terminal block according to claim 1 or 2, characterized in that each interruption is closed by a closure member (5) consisting of an electrically non-conductive material.
    [4]
    4. Terminal block according to claim 3, characterized in that the electrically non-conductive material is a curable casting resin.
    [5]
    5. Terminal block according to claim 3 or 4, characterized in that the closure element (5) further comprises an annular element (6) surrounding the rotary bearing.
    [6]
    6. Terminal block according to any one of claims 3 to 5, characterized in that the closure element (5) further comprises a connecting element (7) forming the connecting surface (9).
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    同族专利:
    公开号 | 公开日
    US8337681B2|2012-12-25|
    DE102008058528B4|2011-03-03|
    DE102008058528A1|2010-06-17|
    US20100126855A1|2010-05-27|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US5527439A|1995-01-23|1996-06-18|The Boc Group, Inc.|Cylindrical magnetron shield structure|
    EP1584707A1|2004-04-08|2005-10-12|Applied Films Corporation|Power coupling for high-power sputtering|
    US20080128276A1|2006-10-17|2008-06-05|Von Ardenne Anlagentechnik Gmbh|Supply end block for rotary magnetron|
    US5096562A|1989-11-08|1992-03-17|The Boc Group, Inc.|Rotating cylindrical magnetron structure for large area coating|
    US7758429B2|2003-09-03|2010-07-20|Igt|Articulated player tracking panel|
    US20060049043A1|2004-08-17|2006-03-09|Matuska Neal W|Magnetron assembly|
    KR20090029213A|2006-06-19|2009-03-20|베카에르트 어드벤스드 코팅스|Insert piece for an end-block of a sputtering installation|
    DE102007049735B4|2006-10-17|2012-03-29|Von Ardenne Anlagentechnik Gmbh|Supply end block for a tubular magnetron|DE102010028421B4|2010-04-30|2012-02-23|Von Ardenne Anlagentechnik Gmbh|Ceramic rolling bearing and end block for a rotating magnetron|
    US9809876B2|2014-01-13|2017-11-07|Centre Luxembourgeois De Recherches Pour Le Verre Et La CeramiqueSarl|Endblock for rotatable target with electrical connection between collector and rotor at pressure less than atmospheric pressure|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE102008058528|2008-11-21|
    DE200810058528|DE102008058528B4|2008-11-21|2008-11-21|End block for a magnetron assembly with a rotating target|
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