• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    There is provided a drive terminal block for a magnetron system with a rotating target, which comprises a terminal block body with a rotatably mounted drive shaft, disposed in the terminal block body, which shaft is configured at its. end accessible from the outside of the terminal block body to be connected to the tubular target and is configured at its end located inside the terminal block body to induce a rotational torque, as well as an electric motor with a stator and rotor for producing rotational torque, the electric motor being disposed within the terminal block body.
    公开号:BE1019095A3
    申请号:E2009/0432
    申请日:2009-07-15
    公开日:2012-03-06
    发明作者:Hans-Juergen Heinrich；Sven Haehne
    申请人:Ardenne Anlagentech Gmbh；
    IPC主号:
    专利说明:

    "Terminal block for a magnetron system with a rotating target"
    A drive terminal block for a magnetron system with a rotating target, which is of simple construction and easy maintenance, will be described hereinafter.
    In the vacuum coating technology, magnetron systems with a rotating target are known in which a target most often surrounds a magnet structure, the tubular target being rotatably mounted and drivable such that the target material be removed evenly. The tubular target is normally fixed in the vacuum chamber of a vacuum coating plant between two end blocks which are constructed in such a way that they respectively allow the rotational mounting of the tubular target. Most often, different functions are, in this case, assigned to the two terminal blocks. One of the terminal blocks is, in general, embodied as a terminal power supply unit for supplying the magnetron with cooling water and electrical energy and the other terminal block is designed as a drive terminal block for inducing a torque for to generate the rotation of the tubular target.
    For this purpose, known drive terminal blocks have an electromechanical drive device in the form of an electric motor with gears which induces the rotational torque, for example by means of conical gears, cylindrical gears or toothed belts. This drive must be potential free and must therefore be mounted isolated from the target and most often also from the vacuum chamber. Therefore, in the known drive terminal blocks, the drive device is mounted in the drive terminal block using insulators so that the electric motor is normally on the atmosphere side outside the vacuum chamber. and a transmission or portions of a transmission or other torque transmission devices such as belt drives or the like are disposed within the drive terminal block. Depending on the height of the process voltage, the cost for potential separation can be very high to reliably obtain that the process voltage applied to the tubular target does not discharge to the drive device or the vacuum chamber. An example of such a terminal block is known from patent application EP 1 365 436 A2.
    Inside the vacuum chamber, the rotational torque is normally transmitted to the target in the vacuum chamber via a coupling element insulated from the driver arranged inside the vacuum chamber. terminal block of training. Since the drive terminal block combines the functions of rotation induction, electrical insulation and vacuum sealing, the components of the drive terminal block must be produced and mounted with great precision. In general, the known drive terminal blocks are of complex construction and require a large number of spare parts to seal the vacuum chamber with respect to the atmosphere and the electrical insulation of the components accessible from the outside. .
    Therefore, it is necessary to provide an improved drive terminal block for which the production tolerance requirements of the components are lower than for the known drive terminal blocks, the drive device being electrically isolated from the conductive parts. the process voltage as well as the vacuum chamber and the sealing of the vacuum chamber can be obtained with simpler means and at a lower cost.
    To this end, there is provided a drive terminal block for a magnetron system with a rotatable target, which comprises a terminal block body with a rotatably mounted drive shaft disposed in the terminal block body, which shaft is configured at its accessible end from the outside of the terminal block body to be connected to the tubular target and is configured at its end located within the terminal block body to induce a rotational torque, as well as a electric motor with a stator and a rotor for producing a rotational torque, the electric motor being disposed within the terminal block body.
    In this case, it can be provided according to one embodiment that the electric motor is disposed coaxially with the drive shaft and / or that the torque is directly transmitted to the drive shaft.
    It must be understood by direct transmission of the torque to the drive shaft that the torque is transmitted to the drive shaft without slippage and with the same direction of rotation. This can for example be obtained because the motor shaft on which the rotor is located is arranged concentrically with respect to the drive shaft and is connected rigidly or by a clutch to the drive shaft. . In this case, no transmission component is necessary to transmit to the drive shaft the rotational torque produced by the electric motor. The mounting of the drive terminal block is considerably simplified compared to known solutions. This implies at the same time that the electric motor is disposed inside the terminal block body. It is obvious that the electric motor must be installed electrically insulated in the terminal block body and / or that the terminal block body itself and / or the motor housing must be made of an electrically non-conductive material.
    According to another embodiment, it can be provided that is disposed between the electric motor and the drive shaft a transmission which is for example configured as a planetary gear. The planetary gears have a compact construction form and allow the coaxial arrangement of the motor and the drive shaft. The gear can, in this case, be connected to the electric motor and / or the drive shaft via a clutch or through each time a clutch.
    In one embodiment, it is provided that the rotor is disposed directly on the drive shaft so that the drive shaft is at the same time the motor shaft of the electric motor. Expressed otherwise, the motor shaft of the electric motor is at the same time, in this case, the drive shaft. This further simplification is achieved because the drive shaft is no longer a separate component which must be mounted in the terminal block body and because no linkage has to be established between the drive shaft. and the motor shaft for transmitting the torque.
    In another embodiment, the electric motor is disposed in an auxiliary housing of electrically non-conductive material and the drive shaft is rotatably mounted in the auxiliary housing. With this measurement, the cost of electrical isolation of the drive shaft is further reduced because the auxiliary housing acts for the drive shaft as the electrical isolation member with respect to the terminal block body. In this case also, the drive shaft and the motor shaft can of course be one and the same component even if it is not necessarily necessary.
    For example, it may be provided that the rotor of the electric motor is arranged directly on the drive shaft so that the drive shaft is at the same time the motor shaft of the electric motor. The entire drive unit can, therefore, be made more compact.
    Further simplification of the drive unit is obtained when it is provided that the stator of the electric motor is disposed directly in the auxiliary housing so that the auxiliary housing is at the same time the housing of the electric motor.
    It can also be provided that the auxiliary housing is arranged without the possibility of rotation and without other means of attachment in receptacles of the terminal block body provided for this purpose. This can for example be obtained because there are provided in the terminal block body receptacles whose contours correspond exactly in cross section to those of the outer side of the auxiliary housing so that the electric motor must only be pushed into these receptacles. and is thus mounted without the possibility of rotation. It is understood that to obtain this effect a circular cross sectional contour is not appropriate. Any contour of cross section deviating from the circular shape, for example, a parallelepiped or a polygon against the described effect. For the axial attachment of the electric motor, it may be appropriate to provide fixing means which prevent axial displacement of the electric motor in the receptacles of the terminal block body. But this function can also be fulfilled, for example, by the receptacles for the auxiliary housing in the terminal block body.
    In an improvement, it can be expected that the terminal block body has no opening towards the atmosphere side. This embodiment has the advantage that vacuum tightness of the vacuum chamber is clearly facilitated. In this case, the necessary and usual permanent evacuation of the inside of the terminal block body from the known drive terminal blocks can be dispensed with. Only a passage of current for the power supply of the electric motor is still necessary.
    It may further be provided that the electric motor is a servomotor and / or a brushless direct current motor.
    The realization of the motor can also take place in such a way that the stator is inside and the rotor outside. The motor would be realized as an external armature motor or bell motor. In this case, there is a bearing that absorbs all overturning torque and bearing forces that directly on the rotating passage.
    The proposed training terminal block will be described in more detail below on the basis of exemplary embodiments and related drawings.
    Fig. 1 shows a longitudinal section through a first exemplary embodiment, and
    Fig. 2 shows a longitudinal section through a second exemplary embodiment of the proposed drive terminal block.
    Fig. 1 shows a first embodiment of a drive terminal block in which the electric motor 4 is disposed inside the terminal block body 22 and coaxially with the drive shaft 26. In a vacuum chamber 1 a drive end block 2 is provided on which is fixed a rotatable target 3 which has a target tube 31 and a connecting piece 32, a magnetron system which is not visible in the drawing being arranged inside the target tube 31.
    The drive terminal block 2 is removably attached to a chamber wall 11 of the vacuum chamber 1 by means of an insulating member 21. The drive terminal block 2 comprises a terminal block body 22 with an opening 23 which is oriented towards the inside of the vacuum chamber 1 and which forms a cavity 24. In this cavity 24, there are provided two receptacles 25 for a drive unit, which correspond to the contour of the cross-section of the auxiliary housing 41 of the drive unit so that the drive unit can be inserted without possibility of rotation into the cavity 24 through the opening 23.
    The drive unit comprises, in the exemplary embodiment, the auxiliary housing 41, the drive shaft 26 and the electric motor 4 which comprises a stator 42 and a rotor 43. The stator 42 and the rotor 43 of the electric motor 4 are arranged directly in the auxiliary housing 41 so that the electric motor requires no separate motor housing.
    The auxiliary housing 41 is made of electrically insulating material. There are arranged the stator 42 and the rotor 43 of the electric motor 4, the rotor 43 being arranged on the drive shaft 44 which at the same time represents the drive shaft 26 of the drive terminal block 2 and is rotatably mounted on both sides in the auxiliary housing 41. The rotor 43 of the electric motor 4 is directly mounted in this embodiment in the auxiliary housing 41 so that the auxiliary housing 41 of the drive unit is At the same time the crankcase of the electric motor 4. The end of the drive shaft 26 protruding through the opening 23 of the terminal block body 22 inside the vacuum chamber 1 is designed to receive and transmitting the rotational torque to the connecting piece 32 of the rotating target 3.
    This end of the drive shaft 26 is at the same time rotatably mounted and isolated in the auxiliary housing 41. In the region between two seals opens a channel 45 which serves to connect a vacuum pump and opens therefore, outside the vacuum chamber 1. The power supply of the electric motor 4 takes place via a connector 46 which also terminates outside the vacuum chamber 1.
    Fig. 2 shows a second embodiment of a drive terminal block in which an electric motor 4 is disposed inside the terminal block body 22 and coaxially with the drive shaft 26. In a vacuum chamber 1 is arranged a drive terminal block 2 on which is fixed a rotating target 3 which has a target tube 31 and a connecting piece 32, a magnetron system which is not visible in the drawing being disposed inside the target tube 31.
    The drive terminal block 2 is removably attached to a chamber wall 11 of the vacuum chamber 1 by means of an insulating member 21. The drive terminal block 2 comprises a terminal block body 22 with an opening 23 which is oriented towards the inside of the vacuum chamber 1 and which forms a cavity 24. In this cavity 24, there are provided two receptacles 25 for a drive unit, which correspond to the contour of the cross-section of the auxiliary housing 41 of the drive unit so that the drive unit can be inserted without possibility of rotation into the cavity 24 through the opening 23.
    The drive unit comprises, in the exemplary embodiment, the auxiliary housing 41, the drive shaft 26 and the electric motor 4 and a transmission 5 which is arranged between the electric motor 4 and the shaft 26 and which is connected on one side to the electric motor 4 and on the other side to the drive shaft 26 via a clutch 51. In this embodiment, the stator and the Electric motor rotor 4 are housed in a clean motor housing and are therefore not directly visible in the drawing.
    The auxiliary housing 41 is made of electrically insulating material. Y is rotatably mounted to the drive shaft 26 of the drive terminal block 2. The end of the drive shaft 26 which protrudes through the opening 23 of the terminal block body 22 inside. of the vacuum chamber 1 is designed to receive and transmit the rotational torque to the connecting piece 32 of the rotary target 3.
    This end of the drive shaft 26 is at the same time rotatably mounted and isolated in the auxiliary housing 41. In the region between two seals opens a channel 45 which serves to connect a vacuum pump and opens therefore, outside the vacuum chamber 1. The power supply of the electric motor 4 takes place via a connector 46 which also terminates outside the vacuum chamber 1.
    List of part numbers 1 Vacuum chamber 11 Chamber wall 2 Terminal block 21 Insulation element 22 Terminal block body 23 Opening 24 Cavity 25 Receptacle 26 Drive shaft 3 Rotary target 31 Target tube 32 Part of connection 4 Electric motor 41 Auxiliary housing 42 Stator 43 Rotor 44 Motor shaft 45 Channel 5 Transmission 51 Clutch
    权利要求:
    Claims (12)
    [1]
    A drive terminal block (2) for a magnetron system with a rotating target, comprising a terminal block body (22) with a rotatably mounted drive shaft (26) disposed in the body (22) of terminal block, which shaft is configured at its end accessible from the outside of the terminal block body (22) to be connected to the tubular target (3) and is configured at its end located inside the body (22) terminal block for inducing a rotational torque, and an electric motor (4) with a stator (42) and a rotor (43) for producing a rotational torque, characterized in that the electric motor (4) is arranged inside the terminal block body (22).
    [2]
    Terminal block according to claim 1, characterized in that the electric motor (4) is arranged coaxially with the drive shaft (26).
    [3]
    3. Drive terminal block according to claim 2, characterized in that the torque is transmitted directly to the drive shaft (26).
    [4]
    4. Drive terminal block according to claim 1 or 2, characterized in that a transmission (5) is disposed between the electric motor (4) and the drive shaft (26).
    [5]
    5. Terminal block according to claim 4, characterized in that the transmission (5) is a planetary gear.
    [6]
    Drive terminal block according to one of Claims 1 to 5, characterized in that the electric motor (4) is arranged in an auxiliary housing (41) of electrically non-conductive material and the drive shaft ( 26) is rotatably mounted in the auxiliary housing (41).
    [7]
    Terminal block according to claim 6, characterized in that the rotor (43) of the electric motor (4) is arranged directly on the drive shaft (4) so that the drive shaft ( 26) is at the same time the driving shaft (44) of the electric motor (4).
    [8]
    Terminal block according to Claim 6 or 7, characterized in that the stator (42) of the electric motor (4) is arranged directly in the auxiliary housing (41) so that the auxiliary housing (41) is in position. same time the crankcase of the electric motor (4).
    [9]
    9. Drive terminal block according to any one of claims 6 to 8, characterized in that the auxiliary housing (41) is mounted without other fastening means and without possibility of rotation in receptacles (25) of the body (22). ) terminal block provided for this purpose.
    [10]
    10. Terminal block drive according to any one of claims 1 to 9, characterized in that the body (22) terminal block (22) has no opening towards the atmosphere side.
    [11]
    11. Terminal block drive according to any one of claims 1 to 10, characterized in that the electric motor (4) is a servomotor.
    [12]
    12. Terminal block according to any one of claims 1 to 11, characterized in that the electric motor (4) is a brushless DC motor.
    类似技术:
    公开号 | 公开日 | 专利标题
    BE1019095A3|2012-03-06|TRAINING TERMINAL BLOCK FOR A MAGNETRON SYSTEM WITH A ROTARY TARGET.
    BE1019874A5|2013-02-05|SUPPORT DEVICE FOR A MAGNETRON SYSTEM WITH A ROTARY TARGET.
    CH655209A5|1986-03-27|BRUSHLESS ELECTRIC MICROMOTOR.
    FR2833917A1|2003-06-27|Electrically-powered steering device for automotive vehicle, has control substrate to which motor power terminals, torque detector terminals and motor driver terminals are extended, which is penetrated by steering shaft
    FR2729629A1|1996-07-26|MOTORIZED ASSISTED STEERING DEVICE
    FR2737944A1|1997-02-21|ELECTRIC MOTOR, IN PARTICULAR DRIVE MOTOR FOR PORTABLE ELECTRIC PUMP OR SUBMERSIBLE PUMP
    FR2842667A3|2004-01-23|MOTOR-REDUCER, PARTICULARLY FOR CONCRETE MIXERS, SPRAYERS AND SIMILAR MACHINES
    WO2005022088A1|2005-03-10|Universal actuator particularly for dashboards
    BE1019093A5|2012-03-06|TRAINING TERMINAL BLOCK FOR A ROTARY MAGNETRON.
    FR2965882A1|2012-04-13|ELECTRONIC CONTROL SYSTEM FOR AUTOMATIC GEARBOX OF MOTOR VEHICLE
    BE1019023A5|2012-01-10|TERMINAL BLOCK FOR A MAGNETRON SYSTEM WITH A ROTARY TARGET AND VACUUM COATING INSTALLATION.
    EP1947287B1|2014-01-01|Collar for roller blind cylinder head.
    FR2997797A1|2014-05-09|Assembly for electric compressor utilized for liquid refrigerant e.g. R134a circuit in electric car, has sealing unit insulating electric connection element of wall separating motor from control device on level of connection opening
    FR2745441A1|1997-08-29|BLOWER MOTOR
    FR2636679A1|1990-03-23|DRIVEN LIQUID PUMP GENERATED BY ELECTRIC MOTOR
    EP0984548A1|2000-03-08|Electric motor for engagement with a transmission, especially with a motor vehicle transmission
    FR2934333A1|2010-01-29|HYDRAULIC GROUP FOR AN ELECTRIC PUMP UNIT
    WO2018203019A1|2018-11-08|Articulation for robotic arm
    FR2801737A1|2001-06-01|Electric motor with fully sealed rotating parts, for fluid pump drive, has rotor within sealed compartment, driving external slip-ring shaft via magnetic coupling
    EP0467750A1|1992-01-22|Driving arm mounting arrangement, in particular for windshield wiper
    FR2708396A1|1995-02-03|Breather and electrical connector assembly intended for a sealed motor, and sealed motor using such an assembly
    FR2936201A1|2010-03-26|Gear motor for windscreen wiper device of motor vehicle, has balancing membrane provided on case of interface, and through hole formed in and/or on connection element to allow exchange of air between inner volume of box and surrounding area
    FR2965989A1|2012-04-13|ELECTRIC MACHINE WITH CONTINUOUS CURRENT AND SYSTEM FORMED OF SUCH A MACHINE
    FR2947966A1|2011-01-14|Drive train motive power unit for use as motor of windscreen wiper of motor vehicle, has bearing element occupying axial gap between motor housing and secondary bearing, where bearing element is connected to housing
    FR3086124A1|2020-03-20|ROTARY ELECTRIC MACHINE ASSEMBLY AND REDUCING ELEMENT AVOIDING INFILTRATION IN THE ROTARY ELECTRIC MACHINE
    同族专利:
    公开号 | 公开日
    US20100012487A1|2010-01-21|
    US8506773B2|2013-08-13|
    DE102008033904B4|2012-01-19|
    DE102008033904A1|2010-01-28|
    DE102009056240A1|2011-06-09|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US20030136672A1|2002-01-18|2003-07-24|Von Ardenne Anlagentechnik Gmbh|Cylindrical AC/DC magnetron with compliant drive system and improved electrical and thermal isolation|
    WO2005005682A1|2003-07-04|2005-01-20|Bekaert Advanced Coatings|Rotating tubular sputter target assembly|
    US20060000705A1|2004-07-01|2006-01-05|Klaus Hartig|Cylindrical target with oscillating magnet for magnetron sputtering|
    EP0046154B1|1980-08-08|1984-11-28|Battelle Development Corporation|Apparatus for coating substrates by high-rate cathodic sputtering, as well as sputtering cathode for such apparatus|
    US5096562A|1989-11-08|1992-03-17|The Boc Group, Inc.|Rotating cylindrical magnetron structure for large area coating|
    CH690805A5|1993-05-04|2001-01-15|Unaxis Balzers Ag|Magnetic-assisted atomization and vacuum treatment system herewith.|
    CA2589739A1|2004-07-01|2006-01-19|Tall Grass Restorations, Inc.|Revegetation process|
    EP1799876B1|2004-10-18|2009-02-18|Bekaert Advanced Coatings|Flat end-block for carrying a rotatable sputtering target|
    DE202005008801U1|2005-06-06|2005-08-11|Applied Films Gmbh & Co. Kg|Target changing unit for magnetron glass coating assembly has two pick-up claws that simultaneously lift and transport one or more targets|
    JP2008069402A|2006-09-13|2008-03-27|Shincron:Kk|Sputtering apparatus and sputtering method|
    DE102008033904B4|2008-07-18|2012-01-19|Von Ardenne Anlagentechnik Gmbh|Drive end block for a magnetron assembly with a rotating target|DE102008033904B4|2008-07-18|2012-01-19|Von Ardenne Anlagentechnik Gmbh|Drive end block for a magnetron assembly with a rotating target|
    WO2010115189A1|2009-04-03|2010-10-07|General Plasma, Inc.|Rotary magnetron|
    CN101994093B|2009-08-14|2013-08-21|鸿富锦精密工业（深圳）有限公司|Magnetron sputtering device|
    DE102009056241B4|2009-12-01|2012-07-12|Von Ardenne Anlagentechnik Gmbh|Support device for a magnetron arrangement with a rotating target|
    DE102010028421B4|2010-04-30|2012-02-23|Von Ardenne Anlagentechnik Gmbh|Ceramic rolling bearing and end block for a rotating magnetron|
    DE102010031259B4|2010-07-12|2012-07-12|Von Ardenne Anlagentechnik Gmbh|Support device for a magnetron arrangement with a rotating target|
    GB201200574D0|2012-01-13|2012-02-29|Gencoa Ltd|In-vacuum rotational device|
    DE102013106168B4|2013-06-13|2015-02-12|Von Ardenne Gmbh|Cantilever magnetron with a rotating target|
    DE102014115282B4|2014-10-20|2019-10-02|VON ARDENNE Asset GmbH & Co. KG|socket assembly|
    DE102014115275B4|2014-10-20|2019-10-02|VON ARDENNE Asset GmbH & Co. KG|End block arrangement and processing arrangement|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE102008033904A|DE102008033904B4|2008-07-18|2008-07-18|Drive end block for a magnetron assembly with a rotating target|
    DE102008033904|2008-07-18|
    [返回顶部]