奥地利专利AT517809A1 Fixing mechanism for scanning probe microscope that can be actuated without tools by a master power

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专利摘要:
Fixing device (20) for selectively fixing a measuring probe (11) of a scanning probe microscope (1), wherein the fixing device (20) has an insertion device (22) into which the measuring probe (11) can be inserted, a master force device (34) for selectively exerting a master force to a tool-operated fixation mechanism (24) and the fixing mechanism (24), which by means of the master power device (34) for releasing and / or fixing the introduced into the insertion device (22) measuring probe (11) is operated without tools.
公开号:AT517809A1
申请号:T549/2015
申请日:2015-08-19
公开日:2017-04-15
发明作者:Dr Gomez-Casado Alberto；Dipl Ing Rath Norbert
申请人:Anton Paar Gmbh；
IPC主号:

专利说明:

With Masterkraft werkzeualns aktiabarer and a probe releasably fixing fixing mechanism for scanning probe Microskoo
The invention relates to a fixing device, a scanning probe microscope and a method for fixing a measuring probe of a scanning probe microscope.
An atomic force microscope is mainly used for the lateral or vertical high-resolution examination of surfaces (in particular topographical investigations of surfaces). In this case, a measuring probe (for example, a leaf spring, which is also referred to as cantilever) with a nanoscopic needle (also referred to as probe tip or probe tip) over the surface (ie screened) and the deflection of the cantilever, based on the interaction of the cantilever with the surface, detected. Depending on the surface condition of the sample, the deflection of the cantilever is recorded or scanned depending on the position or the tracking of the probe. The deflection of the cantilever or the tip can be measured capacitively (in particular piezoelectrically) or by means of optical sensors. This method allows a structural analysis of the surface of the sample up to atomic resolution. The distance of the cantilever to the surface of the sample to be examined can be set very accurately. Thus, various measurement methods, such as the contact mode (contact mode), non-contact mode (non contact mode), tactile AFM mode (tapping mode), etc. can be realized.
Depending on the mode of operation, in addition to attractive long-range van der Waals and capillary forces, strong repulsive forces with short range can be exploited to obtain topographic or chemical information of the sample surface. Furthermore, sample properties such as electrical conductivity, surface charges, modulus of elasticity, adhesion, electrochemical potential, piezoelectric properties, infrared absorption and / or temperature phase transitions can be determined. In addition, atomic force microscopes are also used as magnetic force microscope, friction force microscope, current-voltage microscopes or raster Kelvin microscopes. Depending on the intended use of a scanning probe microscope, various coated measuring probes can be used in addition to measuring probes made of silicon or silicon nitride (for example, gold-, platinum- or carbon-coated measuring probes). The measuring probes are usually coated on the underside, ie the side where the measuring tip is located. Coating processes in which the entire measuring probe is coated usually do not guarantee a continuous contact between the top side and bottom side. Then an electrical contacting of the underside of the sample with the scanning probe microscope is to be realized. It should be ensured that the contact resistance between scanning probe microscope and probe does not change significantly over the life of the device.
Prior art relating to the mounting of a probe to a scanning probe microscope is disclosed in EP 1,012,862 and US 5,717,132.
Conventionally, it is still a challenge to handle and, if necessary, replace a sensitive probe of a scanning probe microscope without compromising the reproducibility and accuracy in the operation of the scanning probe microscope.
It is an object of the present invention to provide a way to handle a probe of a scanning probe microscope easily and damage protected.
This object is solved by the objects with the features according to the independent claims. Further embodiments are shown in the dependent claims.
According to an embodiment of the present invention, a fixing device for selectively fixing a measuring probe of a scanning probe microscope is provided, wherein the fixing device a
Introducer, in which the probe is insertable, a master power device (in particular a separate from the insertion means for generating a master force) for selectively exerting a master force on a tool-operated fixation mechanism and this fixing mechanism, by means of the master power device for releasing and / or fixing the introduced into the introducer probe is operated without tools.
According to another embodiment of the present invention, there is provided a scanning probe microscope for detecting surface information regarding a specimen by scanning one surface of the specimen, the scanning probe microscope comprising a probe adapted to scan the surface of the specimen and a fixing device having the above-described Has features for fixing the probe.
According to a further exemplary embodiment, a method is provided for fixing a measuring probe of a scanning probe microscope, wherein in the method the measuring probe is introduced into an insertion device of the scanning probe microscope and a fixing mechanism for releasing and / or fixing the introduced into the insertion probe by means of a (especially external) Master power is operated without tools.
In the context of the present application, the term "master power device" is understood to mean, in particular, a force-generating device which is designed to generate a master force (preferably separate from the insertion device and / or from the fixing device) on demand (for example machine-controlled or user-controlled) enable a non-contact, tool-free and / or auxiliary body-free and thus easily reproducible fastening of the measuring probe to or detachment of the measuring probe from the insertion device Such a master force can optionally be switched on or off.
In the context of the present application, the term "operable without tools" means in particular that a user for attaching the probe to the fixing device and for removing the probe from the fixing device no tool (for example, screwdriver) or other means outside the fixing must use.
In the context of the present application, the term "detachable fixing" is understood to mean that the measuring probe is fixedly attached to the insertion device in a fixing state of the fixing device and is not undesirably released from the insertion device when forces are applied during scanning of a surface of a specimen; in a release state of the fixing device, the measuring probe can be removed non-destructively (ie without destroying the fixing device, the measuring probe and / or other components) and essentially without force from the insertion device of the fixing device.
In the context of the present application, the term "scanning probe microscope" is understood to mean, in particular, a microscope in which an image or other surface information of a test specimen is not generated with an optical or electron-optical imaging (ie using lenses), but via the interaction of a measuring probe The sample surface to be examined is scanned point by point in a raster process by means of this measuring probe, and the measured values resulting for each individual point can then be combined into an image or evaluated in another way.
According to an exemplary embodiment of the invention, a robust fixing device for a measuring probe of a scanning probe microscope is provided, which can be used simultaneously for many different measuring probe types or measuring methods in the scanning probe microscope and makes the measuring probe non-destructively interchangeable. An embodiment of the invention allows the user to replace the probe without external
Tools (such as screwdrivers) or other auxiliary assembly body (for example, fixing clips or lever) or no tiny fasteners (for example, screws) must be used. This increases user comfort in connection with the assembly and replacement of a measuring probe. The interaction of an intuitively manageable insertion device, a reversible-acting fixing mechanism and a preferably non-contact master power device for force-based control of the fixing mechanism, the handling of the probe can be simplified, unwanted mechanical destruction of the fixing can be prevented and can be excluded misplacement of the probe. For this purpose, embodiments of the invention, the operating principle to own, that with a relation to the introduction separately provided master power of the fixing mechanism for switching on and / or off a fixing force is applied to a higher master force, under the influence of the measuring probe selectively fixed by the fixing or it can be solved. The master force generated by means of the master power device can thereby be superimposed on a fixing force of the fixing mechanism (in particular superimposed on it in a debilitating or even eliminating manner) so that no resultant fastening force acts on the measuring probe and the measuring probe is thus released.
Hereinafter, additional exemplary embodiments of the fixing device, the scanning probe microscope and the method will be described.
In one embodiment, the master power device may be independent of, or integrated with, the remainder of the device (i.e., the remainder of the scanning probe microscope). The fixing mechanism, however, usually forms, but not necessarily, a part of this device.
According to one exemplary embodiment of the invention, the master power device can be designed to release and / or fix it by means of
To control an adjustable master power, in particular to selectively activate the release (for example, by turning on a power source to energize an electromagnet to generate a magnetic master force or by spatially moving a permanent magnet to the fixing device) or disable (for example, by turning off the power source or by spatially driving away the permanent magnet from the fixing device). In this way, a precise adjustment of the respective acting master power is possible. Exerting excessive or too little force on the probe can be eliminated by such automatic control. The sensitive probe can thus be protected from damage.
According to one exemplary embodiment of the invention, the fixing mechanism can be designed to activate fixing with the master power switched off and to deactivate the fixing for inserting the measuring probe into the insertion device or for removing the measuring probe from the insertion device while the master power is switched on. Optionally, the external master power can also be switched off completely, during which the fixation can be maintained. Then the release of the measuring probe can only be accomplished by active connection of the external master power. By such a control logic, an unwanted or accidental release of the probe can be avoided (for example, in case of power failure), because then only an active control action triggers the release. Alternatively, the switching logic can be inverted so that when the master power is turned off, the probe is free and with the master power turned on, the probe is fixed to the fixing device.
According to an exemplary embodiment of the invention, the master power device for exerting the master power can be selected from a group consisting of a magnetic master power device for generating a magnetic master power (in particular can be applied by means of a movable master force permanent magnet or by means of an electrically activatable master power electromagnet), a hydraulic master power device for generating a master power hydraulic master power, a pneumatic master power device for generating a pneumatic master power, an electric master power device for generating a master electric power, a thermal master power device for generating a thermal master power and a mechanical master power device for generating a mechanical master power. All of these force-generating mechanisms can be implemented in terms of control technology, so that the effect of excessive or insufficient fastening force can advantageously be made impossible. In other words, an objectively correct amount of force can be expended and incorrect operation of the sensitive measuring probe can be eliminated by such a force generation mechanism functionally separate from the insertion device.
According to one exemplary embodiment of the invention, the insertion device may have a curved, in particular spherically curved, holding force reinforcing element (for example a force transmission ball) which, in a state of the measuring probe introduced into the insertion device, has a curved, in particular spherically curved, surface directly on, in particular on the upper side, the measuring probe acts. This has the advantage that the force acting on the measuring probe via the adhesion force enhancing element can be substantially punctiform, so that the fixing force exerted by the fixing mechanism can act on the measuring probe in a positionally accurate and spatially highly concentrated or focused action. The further advantage is that thus a simple electrical contacting of the measuring probe on the underside (the side which also includes the measuring tip) is made possible. This ensures a reliable fixation of the probe.
According to an embodiment of the invention, the fixing mechanism may have at least two magnetic members whose magnetic interaction force is adapted to clampingly fix the measuring probe inserted in the insertion means in the insertion means. Such an embodiment is shown for example in FIG. If one of the two magnetic elements (for example in a recess of a housing or a fixing body) is immobilized and the other of the two magnetic elements can move freely (for example in the recess of the housing or fixing body), then the magnetic interaction of the two magnetic elements a force is generated which acts to fasten the measuring probe introduced into the insertion device. In order to be able to remove the measuring probe from the insertion device, an additional magnetic field generating device (for example a movable permanent magnet or an electromagnet) can be used, which superimposes a superordinate magnetic force on the already acting magnetic forces, with which a directly or indirectly acting on the measuring probe the magnetic elements is withdrawn releasing the probe.
According to one embodiment of the invention, the two magnetic elements may be designed to repel each other as a result of their magnetic interaction force and thus act on the measuring probe introduced into the insertion device so that it is clamped in the insertion device. In other words, the repulsive force between the two magnetic elements can be converted into a clamping force acting on the probe.
According to one embodiment of the invention, the two magnetic elements can be arranged in and / or at the same of two opposite fixing bodies of the fixing device, between which the measuring probe is arranged in the introduced state in the introduction. Such an embodiment is shown for example in FIG. In particular, the two magnetic elements can be arranged in an upper part of the insertion device. A lower part of the insertion device can then be filled out, if necessary, from an electrically conductive material in order to detect an electrical signal from the measuring probe or to specify the electrical potential of the probe tip.
According to an embodiment of the invention, each of the two magnetic elements may be arranged in and / or on another of two opposing fixing bodies of the fixing device, between which the measuring probe is arranged in the state introduced into the insertion device. Corresponding embodiments are shown in FIG. 3 or FIG. In this case, the two magnetic elements may both be movable, or it may be one stationary and the other movable. That of the magnetic elements, which is formed in a lower part or as a lower part of the insertion device, is preferably stationary. It can also be designed as an electrically conductive magnet (in particular as an electrically conductive ferromagnetic element in combination with a permanent magnet), in order then to be able to also detect electrical signals of the measuring probe.
Still referring to the embodiment described above, the clamping fixation of the probe in the introducer can be accomplished by means of a rotary lever mechanism.
A corresponding embodiment is shown in FIG. Two magnetic elements in an end portion of the insertion device remote from the measuring tip can be magnetically repulsive to each other to clamp two opposing main surfaces of the measuring probe by force of rotation by a rotary lever in an end region close to the measuring tip of the insertion device.
According to one embodiment of the invention, the two magnetic elements can be designed to attract due to their magnetic interaction force and act on the introduced into the insertion probe so that it is clamped in the insertion. Detaching the probe from the introducer then requires the magnetic attraction of the two
Magnetic elements to superimpose a repulsive master power, in particular a repulsive magnetic master force.
According to an embodiment of the invention, each of the two magnetic elements may be arranged in and / or on another of two opposing fixing bodies of the fixing device, between which the measuring probe is arranged in the state introduced into the insertion device. Thereby, the space required for receiving the magnetic elements between the different fixing bodies can be divided evenly.
According to one embodiment of the invention, one of the magnetic elements may be movable and the other of the magnetic elements may be immovably mounted in and / or on the fixing device. The reduction of the number of movable parts advantageously also reduces the mechanical complexity for producing the fixing device.
According to an embodiment of the invention, one of the magnetic elements may be part of a magnetic circuit with an air gap and the other of the magnetic elements may be movably arranged in the air gap and pulled out of it under the influence of a magnetic force. A corresponding embodiment is shown in FIG. Such a system is then biased into a state fixing the probe. Such a system can release the probe by an additional magnetic force is exerted by means of an external magnetic master power device, which overcompensates the Fixlerkraft.
According to one embodiment of the invention, the fixing mechanism may have a curved in the absence of a master force generated by the master power element, which is designed to be at least partially decongested upon application of the master force and thereby to form a clamping fixation of the probe to a receiving cavity of the probe in extend to the insertion device. Illustratively, such a curved element can function as a leaf spring, which only extends into a receiving space of the insertion device when the master force is activated and thereby clampingly fixes the measuring probe. Switching off this master force returns the curved element to the curved state and thus releases the clamp attachment of the measuring probe.
According to an embodiment of the invention, the curved element may comprise a magnetic material which is at least partially decongested upon the action of a magnetic master force generated by means of the master power device. Such an embodiment is shown in FIG. For example, the curved element may be made of permanent magnetic and / or ferromagnetic material.
According to one embodiment of the invention, the curved element may comprise a shape memory material (for example nitinol) which is at least partially decongested upon the action of a thermal master force generated by the action of the master force. Such an embodiment is shown in FIG. For example, an associated master power device may be formed as a heat source that may be activated as needed, thereby increasing the temperature of the curved member above a threshold temperature beyond which the curved member is transitioned to a shape memory stored other curvature condition in which the member enters a receiving cavity of the inserter protrudes and thereby fixed the probe clamped. Turning off heating, or even active cooling, may then return the element to the curved state and release the probe.
According to one exemplary embodiment of the invention, the fixing mechanism may comprise a magnetic element and a nonmagnetic biasing element biasing the magnetic element into a receiving cavity of the measuring probe in the insertion device, wherein the magnetic element can be guided out of the receiving cavity by means of a magnetic master force. Corresponding embodiments are shown in FIG. 10 and FIG
Magnetic element can be brought by a magnetic master power device out of engagement with the then dissolved probe.
According to an embodiment of the invention, the non-magnetic biasing member may be selected from a group consisting of a mechanical spring (for example, a coil spring, see FIG. 10), a hydraulic biasing member, and a pneumatic biasing member (see FIG. 11).
According to one exemplary embodiment of the invention, the scanning probe microscope can be designed as an atomic force microscope. The Atomic Force Microscope, also called Atomic Force Microscope or Atomic Force Microscope (AFM), is a special scanning probe microscope. It serves as a tool in surface chemistry and is used for mechanical scanning of surfaces and the measurement of atomic forces on the nanometer scale.
According to an embodiment of the invention, the probe can comprise or consist of a probe body for fixing by means of the fixing device and a measuring tip (which may be formed, for example, as a carbon nanotube) for scanning the surface.
According to one exemplary embodiment of the invention, a surface of the probe body facing the probe tip can be electrically conductive and can be electrically conductively coupled to an electrical measuring device of the scanning probe microscope for detecting an information indicative of the electrical properties of the test specimen in a state fixed to the fixing device. In particular, the probe body can also have a printed circuit board (for example a PCB) in which electrical functions can be integrated.
According to one embodiment of the invention, it is possible to fix the bare measuring probe in the fixing device. From using the reproducibility of the measurement impairing auxiliary bodies for receiving the probe can then be dispensed with. According to one embodiment, therefore, the bare measuring probe, without being attached to an auxiliary body, introduced into the insertion device and by means of
Fixing mechanism to be fixed. Thus, the one-piece probe can be inserted directly into the introducer. This saves a user the laborious and error-prone process of handling the small probe for attachment to an auxiliary body (eg, a clamp or the like) before attaching the auxiliary body and probe assembly to the fixator. It is also advantageous for the accuracy of the measurement with the scanning probe microscope to fix the measuring probe without auxiliary body to the fixing device, since the auxiliary body represents a disturbing mass, which would adversely affect the reproducibility of measurements.
Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the following figures.
FIG. 1 shows a scanning probe microscope according to an exemplary embodiment of the invention.
FIGS. 2 to 11 show different fixing devices according to exemplary embodiments of the invention.
FIG. 12 shows a measuring probe for a scanning probe microscope, as it can be introduced directly and without additional components into a fixing device according to an exemplary embodiment of the invention.
The same or similar components in different figures are provided with the same reference numerals.
Before describing exemplary embodiments of the invention with reference to the figures, a few general aspects of the invention and the underlying technologies will be explained:
In order to investigate the various properties of the sample surface, it is advantageous that the resolution of the atomic force microscope (AFMs) is known. The resolution of the AFM device is ultimately determined by the radius of curvature of the nanoscopic probe tip on the probe, which is on the order of tenths of a nanometer. Depending on the measuring method or measuring time, the tip is stressed mechanically.
Therefore, the probes are changed regularly. For this reason, probes in AFMs are often regarded as consumables. Therefore, the replacement of the probe in the device should be as simple as possible for a user, which is problematic due to the small size of the probe and the extremely sensitive probe tip and can lead to the destruction of the probe.
Since the cantilever often has diamagnetic material, it is not possible to fix it directly with a magnet in the meter. Conventionally, for example, the cantilever is glued to a ferromagnetic cantilever chip.
Another important parameter in an atomic force microscope is the scanning performance of the measuring actuators in the device, which however are limited by their resonance frequencies. The frequency decreases with increasing mass on the z-actuator. Depending on the instrument design, it is possible to move the sample to be measured and / or the probe. In addition, the movement of the probe not only means the movement of the probe mass, but also the probe fixation and other device parts in this area. For this reason, a reduced mass of the probe fixation would be desirable. The two contradictory requirements (small mass and high robustness) force a compromise between the measurement behavior of the scanning probe microscope and the durability of the probe fixation. Moreover, the robustness and holding power of conventional attachment mechanisms is also limited by the fact that preferably no portion of the probe fixation should protrude below the cantilever tip. For the detection of electrical properties of the sample to be measured with an SPM / AFM, the probe should either have electrically conductive material or be coated with an electrically conductive layer. Furthermore, an electrical contact should be provided between the scanning probe microscope and the measuring probe. Due to limitations in the probe fabrication process, it is common practice to fabricate the probes from semiconducting or nonconductive materials such as silicon or silicon nitride and apply a metal coating to the bottom surface (the side where the cantilever tip is located). Thus, it is advantageous to contact the measuring probe in the installed state in the scanning probe microscope at the bottom. Since a modification or contamination of each individual probe should be avoided, such as a time-consuming bonding of the underside of the probe with a wire, exemplary embodiments of the invention represent a further development of a probe fixation Furthermore, a release of the adhesive during measurements under harsh environmental conditions (for example under the influence of fluctuating temperature and / or high humidity), which makes a conventional measurement with a glued cantilever at least very problematic. If the fixing mechanism in the scanning probe microscope has a pivoting part (comprising a fixing joint), then this should be bridged, for example with a wire or a conductive hinge. Problems occur in particular when the wire is claimed several times a day from the pivoting movement. This has a negative impact on the durability of the system. An electrically conductive hinge solution introduces additional complexity into the system and complicates proper contacting and isolation of the canitlever from the remainder of the scanning probe microscope.
All conventional solutions have various disadvantages or
Weak points. In any case, the clamping units described must be very thin and small in order to have a vemachigigbare mass and to be compatible with the already small space under the probe. However, the low clamping thickness and low rigidity of the clamping unit also limits the maximum clamping force. Excessive force on the measuring probe would deform the clamp. Therefore, the clamp length must be kept as small as possible to bring the fulcrum as close as possible to the probe,.
When measuring electrical properties of a sample (in particular electrical conductivity, resistance, piezoelectric properties, surface potential) with a scanning probe microscope, it is generally advantageous to control the electrical potential of the measuring probe. For this reason, there should be a permanent and uninterrupted electrical connection between the scanning probe microscope and the underside of the probe, the above solutions with joint contacts or wire connections are prone to error because of their miniature versions, as they very easily lose the electrical contact during the measurement process.
Measuring probes with small printed circuit boards (PCB) at the bottom can be placed directly in the carrier and fixed from the top. In a further embodiment, the carrier located in the scanning probe microscope can be the counterpart to the printed circuits. As a result, a simple current measurement and thus, for example, topography measurement can be realized.
Advantageously, according to exemplary embodiments of the invention, there are no spatial constraints when fixing the canitlever (i.e., the probe) from the top. According to exemplary embodiments, no mechanical joints are necessary since in a preferred embodiment of the invention, for example, magnets or springs press directly from above onto the measuring probe. The clamping force required thereby can be easily achieved, the measurement performance of the scanning probe microscope can be increased by the mass reduction at the probe and the robustness of the scanning probe microscope can be increased due to the lack of miniature joints and the simple mechanical design. The fixed support, which can form the insertion device, can be connected to the measuring probe, for example, via three edges, which ensures good stability and no problems with excessive bending of the sensor
Cantilevers brings with it. By contrast, with a clamp fixation, the probe can only be attached at one point from below.
1 shows a scanning probe microscope 1 according to an exemplary embodiment of the invention, which is designed as an atomic force microscope (AFM).
In the scanning probe microscope 1, a cantilever rash, i. a change in position or a change in shape of a measuring probe 11 (which is also referred to as cantilever) is detected by means of an optical sensor. In this case, an electromagnetic radiation source 2 (for example a laser source) transmits an electromagnetic primary beam 13 (in particular a light beam) to the measuring probe 11 via a focusing device 12 (which may be in the form of an arrangement of one or more optical lenses) which is reflected by the measuring probe 11 electromagnetic secondary beam 3 propagates to a photo- and position-sensitive detector 10 (in particular, the electromagnetic secondary beam 3 can be deflected by means of a deflecting mirror 14 or another optical deflecting element onto the position-sensitive detector 10). If the measuring probe 11 is brought into motion via an actuator 4 (which can effect a change in position in the vertical z-direction according to FIG. 1) and / or the measuring probe 11 changes its shape, a change in the laser light can be detected at the position-sensitive detector 10. Depending on the interaction of a measuring tip 5 (also referred to as cantilever tip) of the measuring probe 11 with a sample body 6 to be examined or characterized, the deflection of the measuring probe 11 will vary and an associated area on the detector 10 will be hit by the electromagnetic secondary beam 3. The detector signal can then be processed in an evaluation unit 8. The resulting high-resolution image of the surface of the sample body 6 can then be displayed by means of a display device 9. A surface of the sample body 6 may be scanned with the measuring tip 5 (i.e., a sensitive tip of the measuring probe 11). A sample table 17 is horizontal in FIG
Plane (i.e., in an orthogonal to the z-axis x-direction and y-direction) by means of actuators 18 movable. The scanning probe microscope 1 thus serves to determine surface information with regard to the test specimen 6 by means of scanning scanning of a surface of the specimen 6 by means of the measuring probe 11.
Furthermore, a fixing device 20 for temporarily fixing the measuring probe 11 to the scanning probe microscope 1 is shown schematically in FIG. Embodiments of the fixing device 20 are shown in more detail in Figure 2 to Figure 11. The fixing device 20 contains an external master power device 34 (according to FIG. 1 designed as an electromagnet) for generating a defined master force with which the measuring probe 11 can be selectively released from the fixing device 20. The fixing device 20 further comprises an insertion device 22, which defines a receiving cavity, in which the measuring probe 11 can be inserted by a user before being fixed to the scanning probe microscope 1. In addition, a tool-free operable fixing mechanism 24 forms part of the fixing device 20 and serves for the releasable fixing of the measuring probe 11 introduced into the insertion device 22.
The fixing mechanism 24 is actuated by means of the master power device 34 for releasing the introduced and fixed in the insertion device 22 probe 11 without tools and without contact. In other words, the fixing can be released by applying an adjustable master force, so that the fixation can be selectively deactivated, wherein the master force can be generated by means of the master power device 34. The fixing mechanism 24 may be configured to perform fixing with the master power (ie, in a deactivated state of the master power device 34) fixed, and with the master power (ie, in an activated state of the master power device 34), releasing the fixation for inserting the measurement probe 11 into the insertion device 22 or for removing the probe 11 from the insertion device 22 to allow. The master force generated by means of the master power device 34 can be a magnetic
Masterkraft (for example, be applied by means of an electrically activated Masterkraftelektromagneten) be.
As can be seen in FIGS. 1 to 11 and best in FIG. 12, the measuring probe 11 has a probe body 7 for fixing by means of the fixing device 20 and the measuring tip 5 for scanning the surface of the sample body 6. One of the measuring tip 5 facing surface of the probe 11 may be electrically conductive and may be electrically coupled in a fixed to the fixing device 20 state with an electrical measuring device 45 shown in Figure 2 45 of the scanning probe microscope 1 for detecting an indicative of the electrical properties of the specimen 6 information be. An upper side of the measuring probe 11, more precisely an upper side of the probe body 7 of the measuring probe 11, may have optically reflecting properties or be provided with an optically reflecting coating in order to support the optical detection principle described above.
In another embodiment of the scanning probe microscope 1 designed as an atomic force microscope, a self-sensitive measuring probe 11 (according to a capacitive detection principle) can be provided. A corresponding probe 11 includes in its structure parts (not shown) which may have piezoelectric properties. Such a probe 11 may vary its resistance / current characteristics as probe deflections change due to the surface structure of the sample body 6. Such a measuring probe 11 is provided with an electrical contact to measure the current / resistance behavior during operation. A corresponding measuring probe 11 may have a printed circuit (for example in the form of a printed circuit board, PCB) on its underside. According to exemplary embodiments of the invention, such probes 11 can be used unmodified, wherein by means of a counterpart of the fixing device 20 of the or the circuits are contacted.
The following group of fixing principles is characterized in that the measuring probe 11 or the cantilever is pressed against a contact plate of the fixing device 20 by some form of pressure body in a straight line, without deflection by the action of a magnetic force, for example. Possible in this context, for example, a magnetic clamp, which can be implemented directly (in particular by means of attraction and / or repulsion and / or reluctance) or indirectly (for example, using a toggle lever). Alternatively or additionally possible is a non-magnetic clamping, which can also act directly (for example by means of a compression spring and / or by means of a pneumatic clamp) or indirectly to the measuring probe 11. In the following, a number of possible embodiments of the fixing device 20 are explained with reference to Figure 2 to Figure 11, to which, however, the invention is not limited.
Figure 2 shows a fixing device 20 according to a preferred embodiment of the invention.
FIG. 2 shows how the measuring probe 11 is accommodated in a receiving shaft of the insertion device 22. For this purpose, the measuring probe 11 is to be inserted into the receiving shaft while the fixing mechanism 24 described below is deactivated. The receiving shaft is defined as a gap between a sample body remote upper fixing body 46 and a sample body lower fixing 48. The fixing 46, 48 form part of the housing of the scanning probe microscope 1. The lower fixing 48 may comprise an electrically conductive material or consist thereof to electrical signals be replaced with the probe 11 (see electrical measuring device 45). As shown in Figure 2, the measuring probe 11 is naked or as such, i. without one of the handling of the probe 11 serving auxiliary body introduced into the receiving shaft. In other words, the measuring probe 11 may be inserted into the receiving well, for example, with a configuration as shown in FIG.
This has the advantage that the reproducibility of the sensitive
Grid measurement is not falsified or influenced by an undefined and significant additional mass of such an auxiliary body.
The fixing mechanism 24 of the fixing device 20 has two magnetic elements 30, 32 formed here as permanent magnets (alternatively as electromagnets), which are arranged in a receiving hollow space in the upper fixing body 46. A north pole of the respective magnetic element 30, 32 is denoted by "N" in the figures, whereas a south pole of the respective magnetic element 30, 32 is indicated by "SK" in the figures The two magnetic elements 30, 32 are in the same of the two In the embodiment shown, the magnetic interaction force between the magnetic elements 30, 32 is formed so that the measuring probe 11 introduced into the insertion device 22 is clamped in the insertion device 22 by this magnetic interaction force 2, the two magnetic elements 30, 32 repel each other. Because of this repulsive magnetic interaction force, the magnetic elements 30, 32 act on the measuring probe 11 introduced into the insertion device 22 in such a way that they are in the Insertion device 22 is fixed by clamping Magnetic element 30 is immovably mounted in the fixing device 20, for example glued there. The magnetic element 32, however, is movably mounted in the fixing device 20. Under the influence of the repulsive magnetic force, therefore, the magnetic element 32 is pressed in the direction of the receiving shaft of the insertion device 22 and thus exerts a fixing clamping force on the measuring probe 11. Advantageously, the insertion device 22 additionally has an optional and, in the embodiment shown, spherical or spherical holding force reinforcing element 36, which may be non-magnetic, but does not have to. The adhesion force enhancement element 36 acts as an intermediate member or force transmitter between the magnetic element 32 and the introduced into the receiving shaft measuring probe 11 and thus presses in a in the
Introducing device 22 introduced state of the measuring probe 11 with a spherically curved contact surface directly on the probe 11. The probe 11 is thereby applied approximately punctiform with a strong clamping force.
Thus, according to FIG. 2, a direct magnetic clamping takes place with the use of a repulsive magnetic force between the magnetic elements 30, 32. In this repulsion variant, the measuring probe 11 or the cantilever likewise becomes in shape between the contact plate in the form of the lower fixing body 48 and the freely movable magnet the magnetic element 32 clamped. Above the movable magnetic element 32, the fixed magnetic element 30 is mounted, wherein the magnetic elements 30, 32 are oriented relative to each other so that the two magnetic elements 30, 32 repel.
The clamping of the measuring probe 11 between the adhesion-promoting element 36 and the lower fixing 48 is solved by imparting to the field of the fixed magnetic element 30 a magnetic field oppositely oriented therefrom, which pushes the movable magnetic element 32 away from the measuring probe 11. In the embodiment shown, this is accomplished by the spatially movable (see double arrow 77) and also designed as a permanent magnet master power device 34, which can be approximated to the magnetic elements 30, 32 to solve the clamping, or can be removed from the magnetic elements 30, 32 in order to allow the clamping to act unimpeded on the measuring probe 11. In this case, use can advantageously be made of the law of nature that the strength of a magnetic field of a permanent magnet decreases with increasing distance. Alternatively to the provision of the master power device 34 as a movable permanent magnet, it is also possible to form the master power device 34 as a (for example stationary) electromagnet which can be controlled by applying an electrical activation signal to generate a clamping force-releasing counterforce when the probe 11 from the
Receiving shaft is to be removed (for example, to replace them).
The fixation is carried out according to Figure 2 so via a repulsive magnet assembly (see magnetic elements 30, 32), which advantageously from above (ie integrated into the upper fixing 46) on the electrically non-conductive part of the unmodified probe 11drückt and the electrically conductive bottom of the probe 11 with a fixed electrically conductive carrier (ie, the formed here as a contact sheet bottom fixing 48) in the scanning probe microscope 1 connects. This support in the form of the lower fixing body 48 is connected in an optional further with a current / voltage source or measuring device 45. An optionally provided in this embodiment piezoelectric actuator is shown in Figure 2 by reference numeral 50.
According to the constellation shown in Figure 2, the magnetic field of the (here below the magnetic elements 30, 32 arranged) master power device 34 abuts the magnetic element 32 to lead out the magnetic element 32 for releasing the fixation from the receiving cavity. As an alternative to the constellation shown in FIG. 2, it is also possible to generate a magnetic force by means of the master force device 34, which attracts the magnetic element 32 (not shown). In the latter embodiment, the master power device 34 could be arranged above the two magnetic elements 30, 32, wherein the north pole and south pole of the master power device 34 would then be reversed.
FIG. 3 shows a fixing device 20 according to another exemplary embodiment of the invention.
According to FIG. 3, the two magnetic elements 30, 32 are designed to attract due to their magnetic interaction force and thus act on the measuring probe 11 introduced into the insertion device 22 in such a way that it is clamped in the insertion device 22. For this purpose, each of the two magnetic elements 30, 32 is arranged in or as part of another of the two opposing fixing bodies 46, 48. The now movably mounted magnetic element 30 is slidably disposed in a receiving cavity of the upper fixing body 46, whereas the now stationary magnetic element 32 is formed as part of the lower fixing 48 (wherein the term "Fe" in Figure 3 indicates that according to this embodiment, the second magnetic element 32 may be formed by providing the lower fixing body 48 of ferromagnetic material.) Thus, as shown in FIG. 3, magnetic clamping is performed by directly tightening the two magnetic members 30, 32 sandwiching the measuring probe 11.
In the attraction mode according to FIG. 3, the attractive force between the two magnetic elements 30, 32 or a magnet and a ferromagnetic component is utilized in order to clamp the measuring probe 11 or the cantilever against the lower fixing body 48 in the form of a contact sheet. For this purpose, the contact plate, for example, from a ferritic steel (for example, corrosion-resistant chromium steel 1.1274) are manufactured. On the other side of the measuring probe 11 or of the cantilever is a freely movable magnet in the form of the magnetic element 30. The attraction between the magnet and the contact plate causes the cantilever to be clamped between the two. In order to release the clamping, either the contact plate can be acted on from the outside with a magnetic field, which is opposite to the field of the movable magnet and repels it. Alternatively, it can be applied to the opposite side of the magnetic field that attracts the freely movable magnet, both variants can be realized by means of the movable permanent magnetic master power device 34 or by means of a fixed electromagnetic master power device 34.
FIG. 4 shows a fixing device 20 according to another exemplary embodiment of the invention.
The embodiment according to FIG. 4 discloses a movable magnetic element 30, a stationary magnetic element 32 and additionally a
Adhesive force reinforcing element 36 between the movable magnetic element 30 and the measuring probe 11. The magnetic elements 30,32 are arranged so that there is always an attractive force effect and thus the measuring probe 11 is fixed. The magnetic element 32 is arranged around the adhesion force-enhancing element 36, in particular annularly, and is firmly embedded in the upper fixing body 46. In the exemplary embodiment shown, the adhesion-promoting reinforcing element 36 is designed as a piston with a curved active surface or force transmission surface, which can act on the measuring probe 11 in a force-enhancing or force-concentrating manner. The lower fixing body 48 may be formed non-magnetic according to FIG.
FIG. 5 shows a fixing device 20 according to another exemplary embodiment of the invention.
The exemplary embodiment according to FIG. 5 largely corresponds to that according to FIG. 2, wherein according to FIG. 5 the adhesion-enhancing element 36 has been omitted.
FIG. 6 shows a fixing device 20 according to yet another exemplary embodiment of the invention.
According to FIG. 6, each of the two magnetic elements 30, 32 is arranged in another of two opposing fixing bodies 46, 48 of the insertion device 22. The clamping fixing of the measuring probe 11 in the insertion device 22 is accomplished according to FIG. 6 by means of a rotary lever mechanism described in more detail below. In the further rejection variant according to FIG. 6, the measuring probe 11 or the cantilever is in turn clamped between the lower fixing body 48 in the form of a contact plate and the upper fixing body 46 as part of the housing. In contrast to the embodiments described above, as shown in FIG. 6, a fixed magnet in the form of the magnetic element 32 is mounted on the lower fixing body 48, and another fixed magnet in the form of the magnetic element 30 is attached to the upper fixing body 46. The magnetic elements 30, 32 are oriented relative to one another such that the two magnetic elements 30, 32 repel each other. The pivotable lever arm, which is realized in the form of the lower fixing body 48 together with the magnetic element 32, is pivotably mounted about a pivot bearing 53. The magnetic elements 30, 32 opposite end of the swing arm clamps at repelling magnetic elements 30, 32, the probe 11 between the fixing bodies 46, 48 fixed. The clamping is achieved by an oppositely oriented field is impressed on the field of the fixed magnet in the contact plate, which pulls the lower fixing body 48 or carrier above the pivot point on the pivot bearing 53 upwards. The release of the clamping can in turn be done by a master power device 34.
FIG. 7 shows a fixing device 20 according to a further exemplary embodiment of the invention.
According to FIG. 7, the magnetic element 30 contributes to the formation of a magnetic circuit with an air gap. The other magnetic element 32, which is spherically formed here, is movably arranged in the air gap and is pulled out of this under the influence of a magnetic force or pressed down, which magnetic force inevitably forms due to the magnetic circuit with magnetic element 30 and air gap. In the exemplary embodiment according to FIG. 7, a direct clamping from above takes place using the principle of reluctance. In this exemplary embodiment, a magnetic circuit guided in ferromagnetic material is constructed which has a short air gap directly above the measuring probe 11 or the cantilever. A freely movable, ferromagnetic pressure body, preferably a ball, is pulled into the gap, since in this way the magnetic resistance of the air gap is greatly reduced. This effect is exploited to exert a pressure force on the cantilever with the pressure body. In order to remove the clamping, the pressure body is again pulled out of the air gap by means of a master power device 34. This can be done mechanically (for example by means of a spring and / or a lever) by the master power device 34 pneumatically (for
Example, by means of negative pressure on the pressure hull) and / or be accomplished by another magnetic field.
Hereinafter, embodiments in which an indirect magnetic clamp is used will be described. The concepts of the following exemplary embodiments make use of a type of force deflection in order to press the measuring probe 11 or the cantilever from below against the lower fixing body 48 in the form of a contact plate.
FIG. 8 shows a corresponding fixing device 20 according to an exemplary embodiment of the invention.
The fixing mechanism 24 according to FIG. 8 has a substantially C-shaped curved element in the absence of a master force, which is designed to be bent when acting on the master force (ie to reduce its curvature and consequently to approach a rectilinear configuration) and thereby to form a receiving cavity of the measuring probe 11 in the insertion device 22 to form a clamping fixation of the measuring probe 11. According to FIG. 8, the curved element 24 has a material with a molded gasket (for example Nitinol), which is at least partially dehumidified upon application of a thermal master force. An associated master power device 34 is therefore designed as a heating and / or cooling device, which can transfer the curved element by selective heating or cooling in the curved or entkrümmte configuration and thereby can be switched between "loosening" and "fixing" back and forth. Thus, it is possible to use a shape memory metal that undergoes a defined deformation under the action of heat.
FIG. 9 shows a fixing device 20 according to a further exemplary embodiment of the invention. According to FIG. 9, the curved element 24 has a magnetic material which is at least partially dehumidified upon the action of a magnetic master force. As an alternative to FIG. 8, it is thus also possible, according to FIG. 9, to insert a ferromagnetic metal sheet which is erected by a magnet in order to define a defined one
To experience deformation. In a recess above the cantilever is located in the non-powered state slightly curved ferromagnetic metal sheet. If you put a magnetic field from one side, the sheet is just bent, straightens and thereby clamps the cantilever against the contact plate. The concept according to FIG. 9 thus uses, like the concept according to FIG. 8, the principle of the toggle lever.
The embodiments described below accomplish a direct non-magnetic clamping and are characterized in that the cantilever is pressed by some form of pressure body in a straight line, without deflection from below against the contact plate. However, in these embodiments, the source of the compressive force is a nonmagnetic one.
FIG. 10 shows a fixing device 20 according to such an exemplary embodiment of the invention.
The fixing mechanism 24 according to FIG. 10 has a magnetic element 30 and a nonmagnetic pretensioning element 38 biasing the magnetic element 30 into a receiving cavity for receiving the measuring probe 11 in the insertion device 22. Without external magnetic force, the biasing member 38 thus pushes the magnetic member 30 into the receiving cavity for insertion of the measuring probe 11. However, the magnetic element 30 can be guided out of the receiving cavity by means of a magnetic master force exerted by means of the master power device 34. The nonmagnetic biasing element 38 is a mechanical spring according to FIG. In this variant, the cantilever is clamped from above via a ferromagnetic pressure body - preferably a ball - by a mechanical spring against the contact plate. By applying a magnetic field, the pressure body against the mechanical spring can be pulled away from the cantilever again.
FIG. 11 shows a fixing device 20 according to an exemplary embodiment of the invention. Referring to Figure 11, the non-magnetic biasing element 38 is a pneumatic biasing element. In this variant, the cantilever is clamped from above via a pressure body - preferably a ball or a body with a portion with a spherical surface - by applying an overpressure on the side facing away from the cantilever of the pressure hull against the contact plate. By releasing the overpressure or even applying a negative pressure at the appropriate location, controlled by the pneumatic master power device 34, the clamping can be solved. Alternatively, the pressure body can also be pulled away again by applying a magnetic field from the cantilever. Ern pneumatic control pressure can be generated by means of the master power device 34 and transmitted via a pressure line 40 to the pressure body of the fixing mechanism 24.
FIG. 12 shows a measuring probe 11, also referred to as cantilever, for a scanning probe microscope 1, as it can be introduced directly and without additional components into a fixing device 22 according to an exemplary embodiment of the invention. The probe 11 includes a core or base body 80 for providing mechanical stability, which may be made of, for example, silicon or silicon nitride. On a lower side of the base body 80, a reflection coating 82 is mounted, which is designed to detect a change in position of the measuring probe 11 during the scanning of a sample surface to be examined. When the scanning probe microscope 1 is not based on optical detection, the reflection coating 82 may be omitted. An upper surface of the base body 80 is coated with an optional adhesive layer 84 (for example, titanium) and an electrically conductive layer 86 (for example, platinum) mounted thereon. The adhesion layer 84 improves the adhesion of the electrically conductive layer 86. The electrically conductive layer 86 serves to detect electrical signals when scanning a surface of a test specimen 6 to be examined and can be omitted if such an electrical measurement is not to be carried out. The measuring probe 11 further includes the measuring tip 5, which may be formed, for example, as a carbon nanotube.
In addition, it should be noted that "having" does not exclude other elements or steps and "a" or "an" does not exclude a multitude. "It should also be noted that features or steps described with reference to one of the above embodiments also can be used in combination with other features or steps of other embodiments described above, and reference signs in the claims are not intended to be limiting.

权利要求:
Claims (26)
[1]
claims
1. fixing device (20) for selectively fixing a measuring probe (11) of a scanning probe microscope (1), wherein the fixing device (20) comprises: an insertion device (22) into which the measuring probe (11) can be inserted; a master power device (34) for selectively exerting a master power on a tool-free operable fixing mechanism (24); the fixing mechanism (24) which can be actuated without tools by means of the master power device (34) for releasing and / or fixing the measuring probe (11) introduced into the insertion device (22).
[2]
Second fixing device (20) according to claim 1, wherein the master power means (34) is adapted to control the loosening and / or fixing by exerting an adjustable master power, in particular the release and / or fixing selectively to activate or deactivate.
[3]
3. Fixing device (20) according to claim 1 or 2, wherein the fixing mechanism (24) is designed to activate the fixation with the master power switched off and with the master power switched on fixing for inserting the probe (11) into the insertion device (22) or for removal to deactivate the measuring probe (11) from the insertion device (22).
[4]
4. The fixing device (20) according to any one of claims 1 to 3, wherein the master power means (34) is selected from a group consisting of a master power means (34) for applying a magnetic master power, in particular be applied by means of a movable master force permanent magnet or by means of an electrically activatable Masterkraftelektromagneten, a master hydraulic force, a pneumatic master power, a master electric power, a thermal master power and a mechanical master power.
[5]
5. Fixing device (20) according to one of claims 1 to 4, wherein the insertion device (22) has a holding force reinforcing element (36) with a curved, in particular spherically curved, adhesive force transfer surface, which is inserted into an inserted into the insertion device (22) state of the measuring probe (11 ) acts by means of the adhesive force transfer surface, in particular punctiform, preferably from above, directly on the measuring probe (11).
[6]
6. Fixing device (20) according to any one of claims 1 to 5, wherein the fixing mechanism (24) has at least two magnetic elements (30, 32) whose magnetic interaction force is formed in the insertion device (22) introduced measuring probe (11) in the Inserting device (22) to fix by clamping.
[7]
7. Fixing device (20) according to claim 6, wherein the two magnetic elements (30, 32) are designed to repel each other as a result of their magnetic interaction force and act on the introduced into the insertion device (22) measuring probe (11), that these in the insertion device (22) is fixed by clamping.
[8]
8. Fixing device (20) according to claim 7, wherein the two magnetic elements (30, 32) are arranged in and / or on the same of two opposing fixing bodies (46, 48) of the fixing device (20), between which the measuring probe (11). in the inserted into the insertion device (22) state is arranged.
[9]
9. Fixing device (20) according to claim 7, wherein each of the two magnetic elements (30, 32) in and / or at another of two opposing fixing bodies (46, 48) of the fixing device (20) is arranged, between which the measuring probe ( 11) is placed in the inserted into the insertion device (22) state, and the clamping fixing of the measuring probe (11) in the insertion device (22) is accomplished by means of a rotary lever mechanism,
[10]
10. Fixing device (20) according to claim 6, wherein the two magnetic elements (30, 32) are adapted to attract due to their magnetic interaction force and act on the in the insertion device (22) introduced measuring probe (11), that these in the insertion device (22) is fixed by clamping.
[11]
11. Fixing device (20) according to claim 10, wherein each of the two magnetic elements (30, 32) is arranged in and / or on another of two opposing fixing bodies (46, 48) of the fixing device (20), between which the measuring probe (30). 11) is arranged in the introduced into the insertion device (22) state.
[12]
12. Fixing device (20) according to one of claims 6 to 11, wherein one of the magnetic elements (30, 32) is movable and the other of the magnetic elements (30, 32) immovably in and / or on the fixing device (20) is mounted.
[13]
13. Fixing device (20) according to any one of claims 6 to 12, wherein one of the magnetic elements (30, 32) forms part of a magnetic circuit with an air gap and the other of the magnetic elements (30, 32) is movably arranged in the air gap and from this is pulled out under the influence of a magnetic force.
[14]
The fixing device (20) according to any one of claims 1 to 5, wherein the fixing mechanism (24) comprises a member curved in the absence of a master force generated by the master power means (34), which is adapted to be at least partially dehumidified upon application of the master force thereby extending to form a Kiemmfixierung the measuring probe (11) up to a receiving cavity of the measuring probe (11) in the insertion device (22) out.
[15]
15. The fixing device (20) according to claim 14, wherein the curved element (24) comprises a magnetic material, in particular a ferromagnetic material, which is at least partially decongested upon the action of a magnetic master force generated by the master power device (34).
[16]
16. The fixing device (20) according to claim 14, wherein the curved element (24) comprises a shape memory material which is at least partially decongested upon the action of a thermal master force generated by the master power device (34).
[17]
17. Fixing device (20) according to one of claims 1 to 5, wherein the fixing mechanism (24) a magnetic element (30) and a magnetic element (30) in a receiving cavity of the measuring probe (11) in the insertion device (22) biasing, in particular non-magnetic , Biasing element (38), wherein the magnetic element (30) can be guided out of the receiving cavity by means of a magnetic master force generated by means of the master power device (34).
[18]
The fixture (20) of claim 17, wherein the non-magnetic biasing member (38) is selected from the group consisting of a mechanical spring, a hydraulic biasing member, and a pneumatic biasing member.
[19]
19. Scanning probe microscope (1) for determining surface information regarding a test specimen (6) by scanning a surface of the test specimen (6), wherein the scanning probe microscope (1) comprises: a measuring probe (11), which is used for scanning the surface of the specimen ( 6) is set up; a fixing device (20) according to any one of claims 1 to 18 for selectively fixing the measuring probe (11).
[20]
20. scanning probe microscope (1) according to claim 19, designed as an atomic force microscope.
[21]
21 scanning probe microscope (1) according to claim 19 or 20, wherein the measuring probe (11) has a probe body (7) for fixing by means of the fixing device (20) and a measuring tip (5), in particular comprising a carbon nanotube, for scanning the surface.
[22]
22. Scanning probe microscope (1) according to claim 21, wherein one of the measuring tip (5) facing surface of the probe body (7) is electrically conductive and in a fixed to the fixing device (20) electrically conductive state with an electrical measuring device (45) of the scanning probe microscope ( 1) for detecting an indicative of the electrical properties of the specimen (6) information is coupled.
[23]
23. scanning probe microscope (1) according to claim 21 or 22, wherein the probe body (7) comprises an electrical circuit, in particular a printed circuit board.
[24]
24. Scanning probe microscope (1) according to one of claims 21 to 23, wherein the probe body (7) has a reflection coating (82) for reflecting electromagnetic measuring radiation of the scanning probe microscope (1).
[25]
25. A method for selectively fixing a measuring probe (11) of a scanning probe microscope (1), the method comprising: inserting the measuring probe (11) into an insertion device (22) of the scanning probe microscope (1); tool-free operation of a fixing mechanism (24) by means of a master force for releasing and / or fixing the measuring probe (11) introduced into the insertion device (22).
[26]
26. The method according to claim 25, wherein the bare measuring probe (11), without being attached to an auxiliary body, inserted into the insertion means (22) and fixed by means of the fixing mechanism (24).

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同族专利:

公开号 | 公开日

US10386386B2|2019-08-20|

US20170067935A1|2017-03-09|

JP2017040656A|2017-02-23|

GB2543615B|2021-08-25|

GB2543615A|2017-04-26|

DE102016115057A1|2017-02-23|

GB201614129D0|2016-10-05|

KR20170022932A|2017-03-02|

AT517809B1|2017-11-15|

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法律状态:

优先权:

申请号 | 申请日 | 专利标题

ATA549/2015A|AT517809B1|2015-08-19|2015-08-19|Fixing mechanism for scanning probe microscope that can be actuated without tools by a master power and a probe releasably fixing|ATA549/2015A| AT517809B1|2015-08-19|2015-08-19|Fixing mechanism for scanning probe microscope that can be actuated without tools by a master power and a probe releasably fixing|

DE102016115057.6A| DE102016115057A1|2015-08-19|2016-08-12|Fixing mechanism for scanning probe microscope that can be actuated without tools by a master power and a probe releasably fixing|

JP2016160605A| JP2017040656A|2015-08-19|2016-08-18|Fixing mechanism for scanning probe microscope actuatable by master force without tool and detachably fixing measuring probe|

GB1614129.3A| GB2543615B|2015-08-19|2016-08-18|A fixing mechanism which is actuatable without a tool and which fixes a measuring probe in a detachable manner, for a scanning probe microscope|

US15/240,148| US10386386B2|2015-08-19|2016-08-18|Fixing mechanism actuatable without a tool and which fixes a measuring probe in a detachable manner for a scanning probe microscope|

KR1020160105301A| KR20170022932A|2015-08-19|2016-08-19|Fixing mechanism for scanning probe microscope operable by master force tool-less and fixing a measuring prob detachably|

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