• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a position measuring device (2) for a piston rod (6) leading out of a fluid cylinder (1), comprising a measuring standard arranged on the outer circumference (7) of the piston rod (6) and in the form of an optically detectable code pattern (8) in a housing (12) fixed to the fluid cylinder (1) arranged sensor arrangement (9) for the optical detection of a rectangular Meßausschnittes (29) of the code pattern (8), with a luminous flux on the code pattern (8) emitting illumination source (15), an image sensor (16), a measuring optics (21) for transmitting an image of the measuring section (29) on the image sensor (16) and an evaluation unit (18) for determining the absolute position of the piston rod (6) using the image information detected by the image sensor (16). In this case, the illumination source (15) and the image sensor (16) are fastened to a common printed circuit board (17) of the sensor arrangement (9) and between light source (15) and measuring cutout (29) is a light guide element (22) for transmitting the luminous flux from the illumination source (15) arranged on the measuring section (29).
    公开号:AT511883A1
    申请号:T12192011
    申请日:2011-08-25
    公开日:2013-03-15
    发明作者:
    申请人:Weber Hydraulik Gmbh；
    IPC主号:
    专利说明:

    25 13:50:12 25-08-2011 5/38
    The invention relates to a position measuring device according to the preamble of claim 1.
    In many applications of fluid cylinders, it is advantageous if the position of a piston or the piston rod of a fluid cylinder is known in order to move movement members driven by the fluid cylinder exactly to desired positions or to determine their exact position.
    A variety of position measuring devices are known from the prior art, which can detect optically detectable markings on the piston rod by means of a cylinder-mounted sensor assembly with a light source and a light sensor. Such a position measuring device for absolute measurement of a piston rod position is known, for example, from DE 100 14 194 A1. Another generic position measuring device is known from WO 2009/112895 A1, whose sensor arrangement is based on a technology used in computer mice. A disadvantage of such a position measuring device is that despite the generally high measurement resolution of such a system, slight measurement accuracies increase in the course of use and, according to WO 2009/112895 A1, calibration positions must always be approached.
    A disadvantage of the former embodiment is that to determine the absolute position of the piston rod in each case an entire barcode of the code pattern must be detected, but this is done sequentially in this fold. In a sequence of many short movements that are shorter than the respective barcodes, measurement inaccuracies arise, which are only canceled again, N2009 / 06800 25/08 2011 DO 13:50 ISE / EM NR 9891] © 005 25 13:50: 28 25-08-2011 6/38 • · 2 β · · when there is a movement of the piston rod which is greater than the length of a bar code and thus an exact absolute position can be detected again.
    All previously known such position measuring devices have in common that they have only an insufficient combination of robustness and reliability as well as universally replaceable compact dimensions, which is why such optical measurement based measuring systems have been able to prevail in practice and the market so far only to a small extent.
    The object of the invention is to provide a position measuring device for a piston rod of a fluid cylinder, the aulweist despite rough operating conditions, a high reliability in mechanical and metrological terms and still is economical to produce.
    The object of the invention solves a generic position measuring device with the characterizing features of claim 1.
    Because the illumination source and the image sensor are fastened to a common printed circuit board of the sensor arrangement and a light-guiding element for transmitting the luminous flux from the illumination source to the measuring cut-out is arranged between the illumination source and the measurement section, the measurement section becomes sufficient even when using a simple, compact and inexpensive illumination source illuminated and reliable measurements can also be made with a simple measuring optics. The light guide is based on total reflection of a majority of the output from the light source luminous flux at its boundary walls and it can be optimally distributed the luminous flux with very low losses on the measurement section. The light-guiding element uses the principle of a light guide, similar to that which also finds application in signal transmission technology, and the light-guiding element is formed by a coherent, in particular one-piece, translucent body of light-transmissive material.
    The Lichteintrittsfiäche and the light exit surface on the light guide are translucent, while the lateral boundary walls opaque
    N2Q09 / QS80Q 25/08 2011 THU 13:50 [SE / EM NO 9891] 0006 25 13:50:48 25-08-2011 7/38 25 13:50:48 25-08-2011 7/38 * · 9 · K «
    t #
    .M can be and, for example, also have an internally mirrored coating, which further improves the reflection of the luminous flux at the boundary walls.
    The invention is replaceable with all types of fluid cylinders as with single-acting cylinders, plunger cylinders or plunger cylinders in which the piston rod is formed by the piston itself, and double-acting cylinders with a piston rod or double-sided or continuous piston rod. The position measuring device according to the invention can be doubly provided on a single fluid cylinder because of its favorable manufacturing costs and its compact dimensions, whereby a redundant position measuring system is provided, as e.g. in steering cylinders advantageous or prescribed. In the case of a fluid cylinder with a piston rod on both sides, the position measuring devices can be arranged at both ends or else both at one end.
    Optimum utilization of the luminous flux emitted by the illumination source is effected when the light-guiding element directly adjoins the illumination source or identifies a light-entry surface which is positioned at a distance of less than 2 mm from the illumination source. The light-guiding element can thus contact the illumination source directly or is arranged at least in its immediate vicinity, whereby the majority of the luminous flux enters the light-guiding element and is available for illuminating the measuring section.
    A further advantageous embodiment variant is that the light-guiding element extends over at least 50%, preferably over at least 75%, of the smallest distance between the illumination source and the piston rod surface. This also ensures that the smallest possible portion of the luminous flux between the illumination source and the measurement section is lost. In the tdeaf case, the light guide extends from the illumination source to just before the piston rod surface, but still ends at such a distance that N2009 / 06800 25/08 2011 DO 13:50 [SE / EM NR 9891] ® 007 4 25 13: 51:06 25-08-2011 8/38 the Wiessausschnitt can be detected by the measuring optics without being obstructed by the light-guiding element.
    If an LED element is used as the illumination source, the sensor arrangement has a high durability and low power consumption. LED elements are available in many embodiments and can be obtained with different frequencies of light, wherein the light frequency of the LED element or the illumination source can be generally adapted to the optimum sensitivity of the image sensor.
    Biid sensor and / or illumination source can be designed in particular as applied to the circuit board SMD components and thereby contribute to the reduction of the sensor array.
    The illumination source can advantageously have an approximately square radiation surface which, with a sufficiently high luminance, also allows a very small component size for the illumination source. The shape of the radiation surface can also differ substantially from the shape and size of the measurement section due to the use of the light guide element Light guide for guiding, shaping and steering of the luminous flux is optimally replaced.
    If the light-guiding element has a matted light-entry surface and / or a matted light-emitting surface, the luminous flux is distributed relatively evenly inside the light-guiding element and / or the light-emitting surface itself acts as a radiating surface of an illumination source, which, however, lies substantially closer to the measuring section than the actual one illumination source. As a result of the matting of the light entry surface or light exit surface, the luminous flux emitted by the illumination source is converted into an approximately diffuse luminous flux, which is also largely guided in the interior of the light guide element by total reflection to the light exit surface and effects a very uniform illumination of the measurement detail. N2D09 / 06S00 25/08 2011 THU 13:50 [SE / EM NR 9891] @ 008
    25 13:51:24 25-08-2011 9/38 '-S ι
    A compact embodiment of the sensor arrangement is particularly possible if the edge length of the radiating surface is less than 2 mm and the dimensions of the measuring section are at least 10 mm by 2 mm. By the light guide, the emitted from a small radiating surface intense light can be transferred to a relatively large Meßausschnitt, whereby even with thicker line markings coding of many Koibenstangenpositionen is possible, since the measurement section detects a sufficiently large portion of the code pattern
    This is also facilitated if the light-guiding element has a rectangular cross-section, with a longer side of the rectangular cross-section running parallel to the piston rod axis. As a result, a measuring section extending in the longitudinal direction of the piston rod axis can be illuminated in the best possible uniform manner.
    If the light-guiding element has a cross-section increasing from the light-entry surface to its light-emitting surface, a measurement section sufficiently large for measurement purposes can be uniformly illuminated even when using very small illumination sources with a small radiating surface.
    A compact embodiment of the sensor arrangement is possible in particular when the light exit surface of the light-guiding element corresponds at least to three times the light entry surface. The luminous flux of the illumination source can thereby be spread or expanded starting from a small, approximately punctiform radiating surface, whereby an illumination of the measuring excerpt which is advantageous for the optical measurement is effected.
    Light entry surface and / or Lichtaustrittsfiäche can be easily formed by the use of the light guide in contrast to pure lens systems, in particular substantially planar surfaces, whereby the production of the light guide is particularly inexpensive and still the lighting for reliable measurements of the piston rod position is sufficiently strong and uniform.
    N2OQ9 / O60OO 25/08 2011 THU 13:50 [SE / EM NO 9891] 0009
    25 13:51:44 25-08-2011 10/38 t B
    The light exit surface may be concave and / or sectionally convex at least in sections, whereby the light guide can be locally influenced by the light guide or the luminous flux distribution on the measuring section compared to purely flat surfaces. The concave light exit surfaces thereby cause a scattering of the exiting luminous flux, while convex sections of the light exit surface have a concentrating effect.
    A further possibility of advantageously influencing the illumination of the measurement section may be that the light guide has a local interference in the form of a transverse bore, a cover panel or an optically refractive element in its center of the beam path. As a result, an excessively large illumination difference between the central region of the measurement section and its edge regions can be substantially reduced.
    A further advantageous embodiment of the position-measuring device can consist in that the light-guiding element and / or the measuring optic is mounted pivotably in the housing relative to a pivot axis parallel to the rod axis. As a result, the luminous flux or the beam path of the measuring optics can be adapted to different geometrical conditions, which can occur, for example, if the sensor arrangement is to be used for piston rods of different diameters or the distance between piston rod and circuit board of the sensor arrangement varies for structural reasons.
    To facilitate or ensure the mutual positioning of Lichtleiteiement and measuring optics, it is possible that the Lichtleiteiement is pivotally mounted on the measuring optics or the measuring optics is pivotally mounted on Lichtleiteiement, whereby the two components are coupled in a sense in one direction to each other and in a to perpendicular direction to each other are adjustable.
    An embodiment with easy-to-produce code pattern on the piston rod is given when the code pattern, the width of the bar marks and the un-marked code sections each about one millimeter or an integer multiple of a millimeter. The requirements for accuracy N2009 / 06800 25/08 2011 THU 13:50 [SE / EM NR 9891] @ 010 25 13:52:04 25-08-2011 11/38 * m Λ «« * »*
    In this case, the production of the code pattern is relatively low, which also means that the associated production costs are relatively low A width of the line markings of one millimeter or a multiple thereof can be reliably scanned with simple embodiments of an image sensor in combination with simple measuring optics be, whereby the measurement reliability is very high and is sufficient for many applications of a fluid cylinder resolution of the position measurement.
    An advantageously replaceable for many applications measuring system is given if the code pattern is formed by a binary pseudo-random code with interlaced, mutually different code words, the length of the measurement section at least the length of the codewords corresponds and the codewords a length of at least Θ Bits, in particular 15 bits. Such a code is known, for example, from WO 66/00478 A1, and it is a possibility to uniquely identify a plurality of optically detectable absolute positions of the piston rod with simple line markings. With a codeword length of 15 bits contained in a code pattern corresponding to a 1000-digit binary number and corresponding to a width of 1 mm of the bar marks of one meter, using a codeword length of 15 bits, more than 1000 different codewords may be included a measurement resolution of 1mm is given. For the practice of fluid cylinder applications, it is advantageous if the measurement section on the Koibenstangenoberfläche covers a length of at least 15 bits of the code pattern. With the length of the codewords used, the number of possible different codewords also increases, as a result of which even very long measuring lengths can be assigned to unique absolute positions of the piston rod.
    An alternative embodiment of a position measuring device which also employs a code system which is advantageous for practical cases is when the code pattern is constituted by a binary block code with an alternating sequence of constant number and width information bits and DO 13 : 50 [SE / EM NR 9891J © Oll 25 25 12/38 13:52:24 25-08-2011 * «• * Μ
    Constant number and width guard bits are formed and the piston rod position measurement utilizes a measurement technique in which the position or shift of the guard bits in the measurement patch is detected and the information bits each define unique absolute references for the piston rod position.
    A sufficient and cost-effective embodiment for position measurements is when the image sensor is formed by a parallel to the piston rod axis line camera element or linear sensor array. However, the image sensor can of course also be formed by a two-dimensional CCD element, wherein a one-dimensional sensor element is also sufficient for the one-dimensional piston rod position measurement.
    The measurement accuracy requirements that occur in practice can easily be met if the line scan camera element has between 32 and 2048 sensor points, in particular 128 sensor points or pixels. Such image sensors are available in many embodiments and inexpensively. At the same time, such an image sensor has very compact dimensions, which allows the compactness of the entire measuring device and the universal applicability.
    Sufficient measurement accuracy of the position measuring device for the applications occurring in practice is given when the line camera element has a resolution between 200 and 1200 dpi, in particular 400 dpi. Again, a variety of embodiments is available at low cost on the market.
    A compact embodiment of the sensor arrangement is possible by selecting the distance of the circuit board from the piston rod surface in a range between 15 mm and 25 mm. In conjunction with the light-guiding element and the measuring optics of the position-measuring device according to the invention, such can be provided for many different sizes of fluid cylinders without requiring extensive structural changes to them. For the reliability of the measuring method, it may be advantageous if the main axis of the measuring optics is eccentric or skewed with respect to the piston rod. N2009 / 06800 25/08 2011 DO 13:50 [SE / EM NR 9891] @ 012 25 13:52:43 25 -08-2011 13/38 • * * · «« * ♦ 4 * I ♦ * · ·· Μ · I * f Ψ k · »*. ≫ , · * 4 > The image sensor is thus relatively independent of the reflectivity of the piston rod surface and thus also insensitive to the changes occurring in the operation of such Fluidzyiinder piston rod surface due to wear or other environmental influences.
    Alternatively or in addition, the main axis of the measuring optics may alternatively also have an oblique position relative to the main propagation direction of the light beams of the illumination source, which are reflected by the piston rod surface, that is to say directed approximately eccentrically to the illumination maximum on the code pattern. As a result, reflections affecting the measurement on the piston rod surface can also be prevented.
    A very compact size of the sensor arrangement is given if the center distance of the illumination source and the image sensor on the circuit board is selected from a range between 5 mm and 12 mm. By using a light-guiding element, the illumination source can be approached very close to the light sensor without the measuring section being shaded by the measuring optics.
    Another measure for miniaturizing the sensor arrangement is to arrange the evaluation unit on the circuit board. In the previously described embodiments of the image sensor and of the code pattern, the computing power required for the evaluation can also be achieved with very small evaluation units and microprocessors, whereby a first image data evaluation can already be integrated in the sensor arrangement.
    If the measurement results are not output directly to the sensor arrangement but the position measurement data are further processed by an external evaluation unit, for example a control and regulating device of the device comprising the fluid cylinder, it is advantageous if an interface for power supply and data transmission is arranged on the circuit board is.
    The compactness of the sensor arrangement can also be increased by connecting a second printed circuit board parallel or at an angle to the printed circuit board, to which an evaluation unit and / or a power supply unit is connected N2009 / 06800 25/08 2011 DO 13:50 [SE / EMNR 9891 ] 0013 25 13:53:03 25-08-2011 14/38 component and / or a data interface. The components of the sensor arrangement are divided by this embodiment into several circuit boards, whereby the individual circuit boards require a smaller area and the housing of the sensor arrangement can be kept relatively narrow and it does not protrude from the outer diameter of the fluid cylinder.
    A structurally advantageous embodiment of the measuring device is that the housing is designed on two sides and the circuit board is attached to an outer removable housing portion or housing cover. As a result, the sensor arrangement is accessible (as the sensor arrangement is separated from the fluid cylinder when the outer housing section is removed, thus greatly facilitating replacement of the sensor arrangement).
    Furthermore, it is possible for the printed circuit board to be adjustably fastened in its position within the removable housing section from the outside, in particular by means of adjusting screws. On the one hand, this can be offset by adjusting the circuit board of the measuring section on the piston rod in the circumferential direction, for example, if faulty position measurements occur due to local damage to the code pattern. Furthermore, it is possible to attach the outer removable housing portion in a constant size with different housing dimensions, which may be required for different piston rod diameters, structurally unchanged. Due to the adjustability of the printed circuit board within the removable housing section can be made in this case an optimal adaptation to the respective piston rod diameter.
    One possibility of reducing the production costs of such a position measuring device is further that the measuring optics and / or the light-guiding element substantially comprise optical elements made of PMMA (plexiglass) or polycarbonate. Since the requirements of the optical quality are also met by such components, thereby expensive optical components made of glass can be avoided.
    N2009 / 06800 25/08 2011 DO 13:50 [SE / EM NR 98911 @ 014 25 13:53:24 25-08] So that the sensor arrangement or the housing does not protrude from its outer diameter even with small sizes of fluid cylinders -2011 15/38 < 1 (4 · · 1 I * * # r *. | N · i * · · * t 4
    Advantage, if the circuit board has a rectangular basic shape with a maximum edge length of 40 mm. Thereby, the housing or the removable housing portion can be kept accordingly small.
    To permanently protect the sensor assembly against harmful influences and to ensure a long service life with high measurement reliability, it is advantageous if the piston rod completely comprehensive sealing rings or stripping elements are arranged on both sides of the measuring section.
    Due to the cost-effective design of the position measuring device according to the invention and its compact dimensions, it is further possible to equip a fluid cylinder with at least two such position measuring devices, whereby a redundant position measurement is easily possible, which is often prescribed in safety-related systems. The individual sensor arrangements can each be assigned a separate code pattern on the piston rod, but it is also possible for both sensor arrangements to access the same code pattern, in particular with staggered measurement sections.
    In fluid cylinders with double-sided piston rod, such as. in steering cylinders, the position measuring devices can be arranged at the two opposite ends.
    For a better understanding of the invention, this will be explained in more detail with reference to the following figures.
    Each shows in a highly schematically simplified representation:
    1 is a view of a fluid cylinder with a possible embodiment of a position measuring device:
    FIG. 2 shows a view of a sensor arrangement arranged in a removable housing section; FIG.
    3 shows a cross section through a possible embodiment of a position measuring device; N2009 / D6800 25/08 2011 THU 13:50 [SE / EM NR 9891] ®015 25 13:53:40 25-08-2011 16/38% ·· t * ι * * f * · · k * *
    4 shows a Radia (cut by a possible embodiment of a positi onsmessvorrichtung in the region of the light guide;
    Flg. 5 shows a radial section through a possible embodiment of a position measuring device in the region of the measuring optics.
    By way of introduction, it should be noted that in the differently described embodiments, the same parts are provided with the same reference numerals or the same component drawings, wherein the disclosures contained in the entire description can be applied mutatis mutandis to the same parts with the same reference numerals and component names. Also, the location information chosen in the description, such as top, bottom, side, etc. related to the immediately described and illustrated figure and are to be transferred to the new situation mutatis mutandis when a change in position. Furthermore, individual features or combinations of features from the different exemplary embodiments shown and described can also represent independent, inventive or inventive solutions. All statements on ranges of values in the description of the present invention should be understood to include any and all sub-ranges thereof, e.g. the indication 1 to 10 should be understood to include all sub-ranges, starting from the lower limit 1 and the upper limit 10, i. all subregions begin with a lower limit of 1 or greater and end at an upper limit of 10 or less, e.g. 1 to 1.7, or 3.2 to 8.1 or 5.5 to 10.
    1 shows a view of a fluid cylinder 1 with a position measuring device 2 according to the invention. The fluid cylinder 1 essentially comprises a cylinder tube 3, in which a piston (not shown) is guided which is displaced by supply or removal of fluid in the cylinder tube 3. The cylinder tube 3 is closed at one end with a Zyiinderboden 4 and closed at the opposite end with a cylinder head 5 through which a piston rod connected to the piston 6 is led out. The fluid cylinder 1 can be designed as a hydraulic cylinder or pneumatic cylinder, with the execution N2009 / 06300 25/08 2011 DO 13:50 [SE / EM NR 9891] 0016 25 13:54:00 25-08-2011 17/38 • is not relevant for the position measuring device 2 according to the invention. Further, in the case of a single-acting plunger cylinder, the piston rod may be formed by the piston itself, and the invention is not limited to the fluid cylinder 1 having a separate piston rod 6, but is applicable to plunger cylinders. For many applications, it is advantageous if the position of the piston rod 6, with which moving members are moved or positioned in device, can be detected and thereby precisely approach such a fluid cylinder 1 by means of control and regulating devices preprogrammed positions or can comply preprogrammed motion sequences exactly.
    The position measuring device 2 is based on the fact that on the outer circumference 7 of the piston rod 6 a material measure in the form of an optically detectable code pattern Θ is arranged, and the fluid cylinder 1 in the region of the cylinder head 5 stationary a sensor array 9 is arranged, with a partial section of the code pattern 8 optically detected and evaluated. As a result of the displacement of the piston rod 6 along the piston rod axis 10 during a movement of the piston, the code pattern 8 is moved past the sensor arrangement 9 and the position of the piston rod 6 is determined by means of an evaluation unit from the part section of the code pattern 8 optically detected therefrom
    The code pattern 8 is composed for example by a binary sequence of transversely to the Kof benstangenachse 6 oriented bar marks 11 which are mounted on the outer circumference 7 of the piston rod 6. The code pattern 8 or the bar marks 11 can be applied, for example, by galvanic methods or metallurgical methods. A possible method of production of the code pattern is that heat energy is introduced selectively on a chromium-plated coating of the calf bar surface 6 by means of concentrated laser radiation, whereby the surface layer assumes tempering colors which differ in color from the sections which are not thermally treated. Such an applied code pattern can also be combined with an optically transparent ΝΖ009 / ΟΘ800 25/08 2011 DO 13:50 [SE / EM NR 9891] ®017 25 13:54:19 25-08-2011 18/38 * * * b * I * Φ * Φ Φ * φ * Φ * * Φ '-A4 •% * · · • · i · «*« · < protective coating, ζ, Β. a SiO 2 coating, whereby the code pattern 8 has increased wear resistance.
    The optically detected by the sensor assembly 9 portion of the code pattern 8 corresponds to a codeword, which is associated with a unique piston rod position. The sensor arrangement 9 detects a specific measurement section of the code pattern 8, which extends in the direction of the piston rod axis 10 and is assigned an unambiguous piston rod position by an evaluation unit an optically detected code word. If, for example, the measuring section in the piston rod direction 10 has a length which corresponds to eight times the line width of a bar marking 11, then the respective position of the piston rod 6 can be detected by a code word with 8 bits.
    An embodiment of the code pattern 8 which is advantageous for practical applications consists in that the width of the line markings 11 and the unmarked code sections corresponds in each case to one millimeter or to an integral number of a millimeter. The narrowest bar mark has in this case a width of 1 mm and the narrowest unmarked code section has a width of 1 mm. Code patterns 8 with this width of the bar marks 11 are not very sensitive to punctate damage of the code pattern 8, e.g. due to wear, since the resolution here does not have to be so fine that even punctual damage would cause measuring errors. In this case, a certain minimum width of the captured measurement section is helpful in that not only a narrow line on the code pattern 8 is scanned optically, but an area with a width of two or more millimeters is imaged on the image sensor.
    A possible embodiment of the code pattern 8 and of the evaluation method may advantageously consist in that the code pattern 8 is formed by a binary pseudo-random code with mutually entangled, different codewords, the length of the measuring section corresponding at least to the length of the codewords and the codewords have a length of at least 8 bits, in particular 15 bits. N2009 / 06800 25/08 2011 THU 13:50 [SE / EM NR 9891] 0018 25 13:54:39 25-08-2011 19/38 25 13:54:39 25-08-2011 19/38 * -45 - • * * * * * «···«
    An alternative embodiment of the code pattern 8 may also be that the code pattern 8 is constituted by a binary block code having an alternating sequence of constant number and width information bits and constant number and width guard bits, e.g. a marked or unmarked section 4 mm in length, is formed and the measurement of the piston rod position uses a measuring method in which the position or shift of the protection bits is detected in the measurement section and the information bits each define absolute references for the piston rod position. The optically evaluated measurement section is chosen so large that it contains at least one complete coherent group of information bits.
    The sensor arrangement 9 is arranged in a housing 12 which is arranged stationarily on the fluid cylinder 1 and contains in its interior sufficient clearance for the sensor arrangement 9 as well as for the light guidance to or from the piston rod surface 7. The housing 12 can, as in FIG be arranged outside the fluid cylinder 1 on the cylinder head 5 or be integrated in the cylinder head 5 or be formed by this and protects the working on optical base sensor assembly 9 from stray light and harmful environmental influences such as mechanical loads or dirt. In order to protect against soiling, provision is made in particular for the measuring aperture provided on the piston rod 6 to be protected on both sides by the piston rod 6 comprising sealing rings or stripping elements.
    In the illustrated embodiment, the housing 12 is made in two parts and includes a removable outer housing portion 13 or housing cover, which is removable from the rest of the housing 12, whereby the sensor assembly 9 is more accessible. Furthermore, 12 bushings for the purpose of data exchange or power supply can be provided on the housing. This can be accomplished in particular by a connection socket 14.
    The position measuring device 2 with the sensor arrangement 9 and its mode of operation will be described in greater detail on the basis of FIGS. 2 to 5. Ν200Θ / 06800 25/08 2011 THU 13:50 tSE / EM NR 9891] @ 019 25 13:54:59 25-08-2011 20/38 * 1 * «· fr * • 4 fr * · * -. 16« I * II * #. * * * ·. »* 4 #
    Fig. 2 shows a view of the removed from the rest of the housing 12 housing portion 13, wherein in the illustrated embodiment in which the sensor assembly 9 is fixed, whereby it is particularly easily accessible. The attachment of the sensor assembly 9 in a removable housing portion 13 makes it possible to mount this structurally unchanged on housing bases of different sizes, whereby only these must be adapted to the respective fluid cylinder 1.
    The sensor arrangement 9 comprises, as the main components, essentially an illumination source 15 for illuminating the measurement section to be detected on the code pattern 8, as well as an image sensor 16 for optical detection of the measurement section. Illumination source 15 and image sensor 16 are arranged on a common printed circuit board 17, which is fastened in the removable housing section 13 in the illustrated embodiment. An evaluation unit 18 in the form of a microprocessor 19 is also arranged on this printed circuit board 17, which determines the absolute position of the piston rod 6 from the image data captured by the image sensor 16 or processes the image data in such a way that it can be evaluated by an external further evaluation unit.
    The image sensor 16 is formed, for example, by a line camera element 20 which is arranged parallel to the piston rod axis 10 and has 128 sensor points or pixels. The optical image of the measurement section on the code pattern 8 on the image sensor 16 by means of a measuring optics 21, which images the illuminated by the Beteuch-treatment source 15 Meßausschnitt optically on the image sensor 16. For example, the measurement section has an extension of 16 mm in the direction of the piston rod axis 10 and a width of 3 mm transversely thereto, while the line scan camera element 20 has an effective sensor length of approximately 8 mm and an effective width of 0.1 mm.
    For this purpose, the measuring optics 21 contain optical lens elements, for example made of Plexiglas (PMMA) or polycarbonate, and comprise in particular a cylindrical lens adjoining the camera element 20 and two piston rod-side lens elements with non-rotationally symmetrical surfaces. The measuring optics N2009 / 06800 25/08 2011 DO 13:50 [SE / EM NR 9891] ®020 25 13:55:19 25-08-2011 21/38 »· * · * · 1« ** • 1 * 7 * * * * H * * thus has an anamorphic property and is optimally suitable for imaging a rectangular measurement section on a line-shaped line camera element 20.
    In the position measuring device 2 according to the invention, the luminous flux emitted by the illumination source 15 is transmitted to the measuring section on the outer circumference 7 of the piston rod 6 by means of a light guide element 22 arranged between the illumination source 15 and the measurement section, whereby the code pattern 8 is used for the purpose of optical detection is optimally illuminated. In this case, the light-guiding element 22 has a light inlet side facing the illumination source 15 and a light outlet side facing the code pattern 8, and the incoming luminous flux is guided in the interior of the light-guiding element 22, whereby only a very small portion of the light quantity does not reach the light exit surface due to total reflection at the lateral boundary surfaces ,
    The light-guiding element 22 preferably directly adjoins the illumination source 15 or the light-entry surface of the light-guiding element 22 is located at least a distance of less than 2 mm from the illumination source, whereby the majority of the emitted light quantity enters the light-guiding element 22. Furthermore, the light-guiding element preferably extends over at least 50% of the smallest distance between the illumination source 15 and the outer circumference 7 of the piston rod 6, whereby the light exit surface is relatively close to the code pattern 8 and this is optimally illuminated.
    The illumination source 15 is preferably formed by an LED element 23, which is characterized by a long service life and a very high light output relative to its energy consumption. Advantageous for the position measurement, the use of a surface-emitting thin-film LED has proven, with the wavelength ranges white, red and infrared provide good results. Furthermore, such LED elements 23 can be used in very small dimensions. In order to keep the dimensions of the illuminating sources 15 small, it may be provided, in particular, that this has a square radiating surface 24 which, for example, has an edge length of N200H / 06800 25/08 2011 DO 13:50 [SE / EMNR 9891] @ 021 25 13:55:39 25-08-2011 22/38 «·« * • ♦ • ι * * * · · «» «ΙΟ« · »1 > * · ♦% • · «• · ♦ · • I t I i Ψ has less than 2 mm. By means of the very effective light-guiding element 22, it is also possible to use such an approximately point-shaped illumination source 15 for the uniform illumination of a rectangular measuring section. The light-guiding element 22 makes it possible, for example, to uniformly illuminate a measuring section of 16 mm length and 3 mm width with an edge length of the radiating surface 24 of, for example, 1x1 mm.
    In order to further improve the uniform illumination of the measurement section, the light-guiding element 22 may have a matted light-input surface and / or a frosted light-emitting surface, whereby the intensity differences within the luminous flux are reduced.
    As shown in FIG. 2 further shows, the light guide 22 may have an approximately rectangular cross-section, wherein a longer side of the rectangular cross-section parallel to the piston rod axis 10 and thereby the light exit surface has approximately the shape of the Meßausschnittes to be illuminated. In the case of an approximately point-shaped illumination source 15, it is advantageous if the cross-section of the light-guiding element 22 increases from the light entry surface to the light exit surface, whereby the light flux can also increase in its cross section. The Lichtaustrittsfiäche the Lichtleiteiements 22 corresponds in the example shown at least three times the light entry surface.
    In order to be able to optimally adapt the measuring optics 21 and the light-guiding element 22 to one another and thereby also be able to use the sensor arrangement 9 for different piston rod dimensions, it is possible for the light-guiding element 22 and / or the measuring optics 21 to be pivotable with respect to a pivot axis 25 parallel to the piston rod axis 10 Housing 12 are stored. As a result, the area illuminated by the illumination source 15 can be varied on the piston rod surface and / or the area covered by the measuring optics 21 can also be optimally adapted. As a result, differences in the distance between the circuit board 17 and piston rod surface 7 can be compensated for different piston rod diameters. N2009 / 06800 25/08 2011 THU 13:50 [SE / EM NR 9891] @ 022 19- 25 13:55:58 25-08-2011 23/38
    In this case, it is possible for the light-guiding element 22 to be pivotably mounted on the measuring optics 21 or, conversely, for the measuring optics 21 to be mounted pivotably on the light-guiding element 22. These are thus directly coupled to each other and possible axle deviations are minimized by assembly errors.
    The measuring section on the piston rod surface 7 detected by the image sensor 16 preferably covers a length of at least 15 bits of the code pattern 8. By detecting code words having a length of 15 bits, easily more than 1,000 different absolute positions of the piston rod 6 can be uniquely identified with a matching pseudo-random code. For the optical measurement of the code pattern 8, the line scan camera element 20 has a resolution between 200 and 1200 DPI, for example 400 DPI, which gives a slightly sufficient resolution for the detection of bar marks 11 with a width of 1 mm.
    FIG. 4 shows a radial section through a position measuring device 2 in the region of the light-guiding element 22, and FIG. 5 shows a radial section through the position-measuring device 2 in the region of the measuring optical system.
    In this case, the respective beam paths are indicated, wherein in each case only individual beams are shown.
    The light-guiding element 22 shown by way of example in FIG. 4 is arranged such that its light entry surface 26 is arranged at a distance to the emission surface 27 that is less than 2 mm, the light entry surface 26 could even directly adjoin the illumination source 15 and it is through it Ensuring that the largest proportion of the delivered Uchtes enters the Lichtleiteiement 22. As a result, the light entering at the light entry surface 26 is passed on to the light exit surface 28 in which it directly penetrates the material of the light guide element 22 or is deflected on its side walls by total reflection in the direction of the measurement section 29. N2009 / 06800 25/08 2011 THU 13:50 [SE / EM NR 9891] © 023 25 13:56:16 25-08-2011 24/38 »♦ * * * · • · ** * · · -20
    The light entry surface 26 is executed in the illustrated embodiment as a substantially flat surface, which is particularly easy to manufacture and can still meet the requirements for the light guide to the measurement section 29. Notwithstanding the concave design shown in solid lines, the light exit surface 28 may be designed as a substantially flat surface, as indicated in Fig. 4 and thereby further simplifies the production of Lichtlei-telements 22.
    The illumination source 15 in the form of the LED element 23 is fastened to the printed circuit board 17, which is fastened in the demounted embodiment in the detachable, outer housing section 13. As FIG. 4 shows, it is possible to provide to the printed circuit board 17 in parallel or at an angle thereto a second printed circuit board 30 on which components of the sensor arrangement 9 can likewise be arranged. This builds for something higher, but can be performed with a smaller width and length in the direction of the cylinder axis 10. Thus, for example, the second printed circuit board 30 may have interfaces 31 for the data transmission and / or power supply and may be led to the connection socket 14 via an interface cable.
    As shown in FIG. 4, the light-guiding element 22 extends over the majority of the distance 32 between the illumination source 15 and the outer circumference 7 of the piston rod 6, but advantageously over at least 50% of the distance 32. This ensures that the majority of the light emitted by the illumination source 15 Luminous flux to the measuring section 29 is passed. Furthermore, FIG. 4 shows two further possibilities for achieving the most uniform possible illumination of the measurement section 29. The first possibility is to use a concave executed Uchtaustrittsfläche 28, which may also be locally flat or even sections convex. The illustrated concave design causes a further dispersion of the luminous flux and is thereby achieved a uniform illuminance. As an alternative or additional measure to achieve uniform illumination, the light-guiding element 22 has at its center a local disturbance 33, for example in the form of a bore 34 transversely to the direction of light propagation, as a result of which an illumination maximum Ν2009 / 06Θ00 25/08 2011 DO 13:50 [SE / EM NR 9891] @ 024 25 13:56:37 2S-0B-2011 25/38 25 13:56:37 2S-0B-2011 25/38 I ι «·» t · ·
    mum is lowered in the middle of the measurement section 29 and thereby also the illumination intensity is uniform.
    As an alternative to a bore 34, it is also possible to attach a local cover panel or a more concave or convex section in the center region of the light exit surface 28.
    Experiments have shown that it is advantageous for the manufacturing costs and the compactness of a position measuring device 2 according to the invention if the printed circuit board 17 has a distance from the piston rod surface 7 from a range between 15 and 25 mm. Furthermore, the circuit board 17 can be dimensioned so that it has a rectangular basic shape with a maximum edge length of 40 mm, whereby it projects even after installation in a housing 12 only slightly compared to the outer circumference of common fluid cylinder 1.
    In order to allow a further adaptation to different dimensions of a fluid cylinder 1, even if in each case the same upper housing portion 13 is used, it may be provided that the circuit board 17 is fixed in its position within the removable housing portion 13 from the outside, for example by means of adjustable screws , Thus, the sensor assembly 9 can be optimally adapted to different mounting positions and piston rod diameter in a simple manner.
    FIG. 3 shows a section through a position measuring device 2 according to line III-III in FIG. 4.
    In this embodiment, the main axis of the measuring optics 21 is oriented in the direction of the piston rod axis 10, but it is also possible to provide these eccentrically or skewed to the piston rod axis 10, whereby the measuring optics 21 is directed to a certain extent not perpendicular to the outer periphery 7 of the piston rod 6. As can further be seen, the illumination source 15 is arranged together with the adjoining light-guiding element 22 at a relatively small center distance 35 to the image sensor 16, here in the form of a line-scan camera element 20. The center distance 35 can be determined, for example, from a reference to Ν200Β / Ο6Θ00 25/08 2011 DO 13:50 [SE / EM NR 9891] 0025 25 13:56:55 25-OB-2011 26/38 25 13:56:55 25- OB-2011 26/38 • ·
    rich between 5 mm and 12 mm, whereby the sensor assembly 9 can be made very compact and the position measuring device 2 has few limitations in their possible application due to their small dimensions.
    In Fig. 3 is further indicated by dashed lines that the Lichtieitelement 22, as already described with reference to FIG. 2 about a pivot axis 25 pivotally mounted in the housing 12, e.g. in a strichiiert dargesteltte situation 22 ', whereby the main propagation direction of the luminous flux can be adjusted and the illumination of the Meßausschnittes 29 can be further optimized in a simple manner or can be adjusted depending on the relative position of the illumination source 15, image sensor 16 and piston rod surface 7.
    The optical detection is performed by the image sensor 16 at a high frequency e.g. with more than 1000 images per second, which gives a quasi-continuous position detection.
    The dimensions and technical specifications mentioned with reference to the exemplary embodiment are optimally suited for piston rod diameters between 20 mm and 80 mm, but can be suitably adapted for deviating dimensions of piston rods 6. The described embodiment of the sensor arrangement 9 has sufficient tolerances with regard to component tolerances or installation tolerances, which is why a very wide range of applications is given here. For the operating temperatures of -40 ° C. and + 100 ° C., the components used are suitable and also temperature effects on the measurement accuracy are negligible higher temperatures would be appropriate substitute materials to use, such as plastics with higher softening points or replacement by metallic, ceramic or crystalline materials.
    The Lichtieitelement 22 has in the illustrated embodiment, a light entrance surface 26 of 6 mm x 4 mm and a light exit surface 28 of 24 mm x 4 mm, whereby on the one hand the Abstrahlungsfiäche 24 of about 1 mm x 1 mm at the illumination source 15 and the measuring section 29 at the Piston rod surface N2009 / 06600 25/08 2011 THU 13:50 [SE / EM NR 9891] @ 026 -23- · * · - 25 13:57:15 25-08-2011 27/38 • «» · • · che 7 are sufficiently covered and only a small proportion of the luminous flux is lost.
    5 shows, in a radial section illustration, the optical image of the measurement section 29 on the image sensor 16 in the form of the line camera element 20, wherein the focusing takes place in a direction immediately in front of the line camera element 20 by a cylindrical lens.
    The embodiments show possible embodiments of the position measuring device 2, wherein it should be noted at this point that the invention is not limited to the specifically illustrated embodiments thereof, but also various combinations of the individual embodiments are mutually possible and this possibility of variation due to the teaching of technical action representational invention in the skill of those skilled in this technical field. So are all conceivable Ausfqhrungsvarianten, which are possible by combinations of individual details of the illustrated and described embodiment variant of the scope of protection.
    For the sake of order, it should finally be pointed out that for a better understanding of the structure of the position measuring device 2, these or their components have been shown partly un-scaled and / or enlarged and / or reduced in size.
    The task underlying the independent inventive solutions can be taken from the description.
    Above all, the individual in Figs. 1; 2; 3; 4 and 5 embodiments form the subject of independent, eriindungsgemäßen solutions. The relevant objects and solutions according to the invention can be found in the detailed descriptions of these figures. N2009 / 06800 25/08 2011 THU 13:50 [SE / EM NR 9891] @ 027 25 25-08-2011 34/38 13:59:04
    • · · · > · · *
    Reference numeral 1 Fluid cylinder 2 Position measuring device 3 Cylinder tube 4 Cylinder bottom 5 Cylinder head 6 Piston rod 7 Outer circumference 8 Code pattern 9 Sensor arrangement 10 Piston rod axis 11 Bar mark 12 Housing 13 Housing section 14 Connection socket 15 Illumination source 16 Image sensor 17 Circuit board 18 Evaluation unit 19 Microprocessor 20 Zeiienkamera element 21 Measuring optics 22 Light guide element 23 LED Element 24 Radiation surface 25 Swivel axis 26 Light entry surface 27 28 Light exit surface 29 Measuring section 30 Circuit board 31 Interface 32 Distance 33 Fault 34 Bore 35 Center distance N2009 / 06800 25/08 2011 DO 13:50 [SE / EM NR 9891] @ 034
    权利要求:
    Claims (34)
    [1]
    25 13:57:31 25-08-2011 28/38-ϊ · Claims 1. Position measuring device (2) for a piston rod (6) leading out of a fluid cylinder (1), comprising a piston rod (6) on the outer circumference (7). and along this arranged material measure in the form of an optically detectable code pattern (8), in particular a binary sequence of transverse to the piston rod axis (10) oriented bar marks (11), and in a housing (12) fixed to the fluid cylinder (1) arranged sensor arrangement (9 ) for the optical detection of a rectangular measuring section (29) of the code pattern (8), with a luminous flux on the code pattern (8) emitting illumination source (15), an image sensor (16), a measuring optics (21) for transmitting an image of the Measuring section (29) on the image sensor (16) and an evaluation unit (18) for determining the absolute position of the piston rod (6) using the image information captured by the image sensor (16), characterized in that the illumination source (15) and the image sensor (16) are fastened to a common printed circuit board (17) of the sensor arrangement (9) and a light-conducting element (22) for transmitting the luminous flux from the illumination source (15) and measurement section (29). 15) is arranged on the measuring cutout (29).
    [2]
    2. Position measuring device (2) according to claim 1, characterized in that the light-guiding element (22) directly adjoins the illumination source (15) or a light entry surface (26) identifies that positioned at a distance of less than 2 mm to the illumination source (15) is.
    [3]
    3. Position measuring device (2) according to claim 1 or 2, characterized in that the light-guiding element (22) over at least 50%, preferably over at least 75%, of the smallest distance (32) between the lighting-tesqueile (15) and outer circumference (7 ) of the piston rod (6). N2009 / 06800 25/08 2011 THU 13:50 [SE / EM NO 9891] @ 028 -2 25 13:57:49 25-08-2011 29/38 #
    [4]
    4. Position measuring device (2) according to one of claims 1 to 3, characterized in that the illumination source (15) by an LED element (23) is formed.
    [5]
    5. Position measuring device (2) according to any one of claims 1 to 4, characterized in that the illumination source (15) has an approximately square radiating surface (24).
    [6]
    6. position measuring device (2) according to one of claims 1 to 5, characterized in that the Lichtieitelement (22) has a frosted light entry surface (26) and / or a frosted light exit surface (28).
    [7]
    7. Position measuring device (2) according to claim 5 or Θ, characterized in that the edge length of the radiating surface (24) is less than 2 mm and the dimensions of the measuring section (29) amount to at least 10 mm by 2 mm.
    [8]
    8. Position measuring device (2) according to one of claims 1 to 7, characterized in that the light-guiding element (22) has an approximately rectangular cross-section, wherein a longer side of the rectangular cross section extends parallel to the piston rod axis (10).
    [9]
    9. position measuring device (2) according to one of claims 1 to 8, characterized in that the Lichtlettelement (22) has one of the light entry surface (26) to its light exit surface (28) increasing cross-section.
    [10]
    10. Position measuring device (2) according to claim 9, characterized in that the light exit surface (28) of the light-guiding element (22) corresponds at least to three times the light entry surface (26). N2009 / 06800 25/08 2011 THU 13:50 [SE / EM NO. 8891] © 029 -3 * • * · * · 25 13:58:03 25-08-2011 30/38
    [11]
    11. Position measuring device (2) according to one of claims 1 to 10, characterized in that the light entry surface (26) and / or the light exit surface (28) has a substantially planar surface.
    [12]
    12. Position measuring device (2) according to any one of claims 1 to 11, characterized in that the light guide element (22) in its center of the beam path has a local disturbance (33) in the form of a transverse bore (34), a Abdeckblende or an optically refractive element ,
    [13]
    13. Position measuring device (2) according to one of claims 1 to 12, characterized in that the light guide element (22) and / or the measuring optics (21) with respect to a piston rod axis (10) parallel pivot axis (25) pivotally mounted in the housing (12) is.
    [14]
    14. Position measuring device (2) according to claim 13, characterized in that the light-guiding element (22) is pivotably mounted on the measuring optics (21) or the measuring optics (21) are pivotably mounted on the light-guiding element (22).
    [15]
    15. Position measuring device (2) according to one of claims 1 to 14, characterized in that the code pattern (8) corresponds to the width of the bar marks (11) and the unmarked code sections each one millimeter or an integer multiple of one millimeter.
    [16]
    16. Position measuring device (2) according to one of claims 1 to 15, characterized in that the code pattern (8) is formed by a binary pseudo random code with interlaced, mutually different code words, wherein the length of the measuring section (29) at least corresponds to the length of the codewords and the codewords have a length of at least 8 bits, in particular 15 bits. N2009 / 06800 25/08 2011 THU 13:50 [SE / EM NR 9891] @ 030 25 13:58:19 25-06-2011 31/38
    [17]
    17. Position measuring device (2) according to claim 16, characterized in that the measuring cutout (29) on the piston rod surface (7) covers a length of at least 15 bits of the code pattern (8).
    [18]
    18. Position measuring device (2) according to any one of claims 1 to 15, characterized in that the code pattern (8) is formed by a binary block code with an alternating sequence of information bits of constant number and width and guard bits of constant number and width and the measurement of the piston rod position a measurement method is used in which the position or shift of the guard bits in the measurement section (29) is detected and the information bits each define absolute references for the Kolbenstangenpositron.
    [19]
    19. Position measuring device (2) according to any one of claims 1 to 18, characterized in that the image sensor (16) by a piston rod axis (10) arranged in parallel line scan camera element (20) or linear sensor array is formed.
    [20]
    20. Position measuring device (2) according to claim 19, characterized in that the line camera element (20) has between 32 and 2048 sensor points, in particular 128 sensor points.
    [21]
    21. Position measuring device (2) according to claim 19 or 20, characterized in that the line camera element (20) has a resolution between 200 and 1200 dpi, in particular 400 dpi.
    [22]
    22, position measuring device (2) according to one of claims 1 to 21, characterized in that the distance of the circuit board (17) from the piston rod surface (7) is selected from a range between 15 mm and 25 mm.
    [23]
    23. Position measuring device (2) according to one of claims 1 to 22, characterized in that the main axis of the measuring optics (21) eccentric N2008 / 06800 25/08 2011 DO 13:50 [SE / EM NR 9891] ®031 25 13:58 : 36 25-08-2011 32/38 * * * or skewed with respect to the piston rod axis (10) is oriented and / or eccentric or skewed with respect to the main propagation direction of the light rays coming from the Piston rod surface (7) are reflected, oriented.
    [24]
    24. Position measuring device (2) according to one of claims 1 to 23, characterized in that the center distance (35) from the illumination source (15) to the image sensor (16) on the circuit board (17) is selected from a range between 5 mm and 12 mm ,
    [25]
    25. Position measuring device (2) according to one of claims 1 to 24, characterized in that the evaluation unit (18) is arranged on the printed circuit board (17).
    [26]
    26. Position measuring device (2) according to one of claims 1 to 25, characterized in that on the circuit board (17) an interface (31) for power supply and data transmission is arranged.
    [27]
    27. Position measuring device (2) according to one of claims 1 to 26, characterized in that on the circuit board (18) at least a second printed circuit board (30), in particular is connected in parallel, to which an evaluation unit and / or a power supply component and / or a data interface is arranged.
    [28]
    28. Position measuring device (2) according to any one of claims 1 to 27, characterized in that the housing (12) is designed in two parts and the circuit board (17) on an outer removable housing portion (13) is attached
    [29]
    29. Position measuring device (2) according to claim 28, characterized in that the circuit board (17) in its position within the removable Ν2009 / ΟΘΒ00 25/08 2011 DO 13:50 [SE / EM NR 9891] 0032 25 13:58:51 25-08-2011 33/38

    -6 housing portion (13) from the outside, in particular by means of screws, is adjustably mounted.
    [30]
    30. Position measuring device (2) according to one of claims 1 to 29, characterized in that the measuring optics (21) and / or the light-guiding element (22) essentially comprise optical elements made of PMMA (plexiglass) or polycarbonate.
    [31]
    31. Position measuring device (2) according to one of claims 1 to 30, characterized in that the circuit board (17) has a rectangular basic shape with a maximum edge length of 40 mm.
    [32]
    32. Position measuring device (2) according to one of claims 1 to 31, that on the housing (12) on both sides of the measuring cutout (29) the piston rod (6) are arranged complete sealing rings or stripping elements.
    [33]
    33. fluid cylinder (1) with at least one led out of this piston rod (6), characterized in that for measuring the piston rod position at least two Positlonsmessvonichtungen (2) are provided according to one of claims 1 to 32.
    [34]
    34. Fluid cylinder according to claim 33, characterized in that the fluid cylinder has a double-sided and / or continuous piston rod and the position measuring devices (2) are arranged at opposite ends of the fluid cylinder. Weber-Hydraulik GmbH by] - / 4- 'Lawyers Burger & Partner Rechtsanwalt GmbH N2O09 / 06B0O 25/08 2011 DO 13:50 [SE / EM NR 9891] 0033
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    同族专利:
    公开号 | 公开日
    ES2560407T3|2016-02-18|
    WO2013026080A2|2013-02-28|
    WO2013026080A3|2013-07-18|
    AT511883B1|2013-09-15|
    EP2769104B1|2015-11-04|
    EP2769104A2|2014-08-27|
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    法律状态:
    2017-04-15| MM01| Lapse because of not paying annual fees|Effective date: 20160825 |
    优先权:
    申请号 | 申请日 | 专利标题
    AT12192011A|AT511883B1|2011-08-25|2011-08-25|POSITION MEASURING DEVICE FOR FLUID CYLINDER|AT12192011A| AT511883B1|2011-08-25|2011-08-25|POSITION MEASURING DEVICE FOR FLUID CYLINDER|
    EP12780072.0A| EP2769104B1|2011-08-25|2012-08-24|Position-measuring device for fluid cylinder|
    PCT/AT2012/050118| WO2013026080A2|2011-08-25|2012-08-24|Position-measuring device for fluid cylinder|
    ES12780072.0T| ES2560407T3|2011-08-25|2012-08-24|Position measuring device for fluid cylinders|
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