Lithographic apparatus and device manufacturing method. Lithographic apparatus and device manufacturing method. Lithographic apparatus and device manufacturing method. Imprint lithography. Stage system calibration method, stage system, and lithographic apparatus comprising such stage syst Method and apparatus for estimating model parameters of and controlling a lithographic apparatus. Method for providing an ordered layer of self-assemblable polymer for use in lithography. Cooled spider and method for grazing-incidence collectors. Fluid handling structure, lithographic apparatus and device manufacturing method. Lithographic apparatus and method for correcting a position of an stage of a lithographic apparatus. Stage system calibration method, stage system, and lithographic apparatus comprising such stage syst Lithographic apparatus and method. A lithographic apparatus and a method of manufacturing a device using a lithographic apparatus. Calibration of lithographic apparatus. Design rule optimization in lithographic imaging based on correlation of functions representing mask Calibration of lithographic apparatus. Lithographic apparatus and method for measuring a position. A substrate table, a lithographic apparatus and a method for manufacturing a device using a lithogra Lithographic apparatus and device manufacturing method. Lithographic apparatus and method for correcting. Lithographic apparatus with support for an object and method for positioning same. FUEL CELL SYSTEM. Measurement system, stage, and lithographic apparatus. Lithographic apparatus and device manufacturing method. Lithographic apparatus and method. Stress-decoupling devices and methods for cooled mirror systems. Cover for a substrate table, substrate table for a lithographic apparatus, lithographic apparatus, a Shadow band assembly for use with a pyranometer and a shadow band pyranometer incorporating same bac Adjustable clips for grazing-incidence collectors. Lithographic apparatus and device manufacturing method. Method for carbon black production using preheated feedstock and apparatus for same. Alignment mark, substrate, set of patterning devices, and device manufacturing method. Inspection method and apparatus, and associated computer readable product. A lithographic apparatus, an illumination system, a projection system and a method of manufacturing Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover f Lithographic apparatus and device manufacturing method. Lithographic apparatus and device manufacturing method. Lithographic apparatus and device manufacturing method. Lithographic apparatus and device manufacturing method. Lithographic apparatus and device manufacturing method. Lithographic apparatus and device manufacturing method. Lithographic apparatus and device manufacturing method. Lithographic apparatus and device manufacturing method. Lithographic apparatus and device manufacturing method. Lithographic apparatus and device manufacturing method. Device capable of extending a foot end of a ladder. A fluid handling structure, a lithographic apparatus and a device manufacturing method. Lithographic apparatus and method. FUEL CELL SYSTEM WITH A REFORMER IN AN IMPROVED DEVICE. Lithographic apparatus, device manufacturing method, and substrate exchanging method. Transmission electron microscope. Control method and apparatus. Inspection apparatus and associated method and monitoring and control system. Lug type extruder screw. Lithographic apparatus and device manufacturing method. CRANE TIP DEVICE AND CRANE. Container. Substrate handling apparatus and lithographic apparatus. Fluid handling structure, lithographic apparatus and a device manufacturing method. Two-dimensional-array ultrasonic probe and ultrasonic diagnostic apparatus. Production of an alignment mark. Imprint lithography method and apparatus. Lithographic apparatus and device manufacturing method. Motorcycle provided with a fuel injection type engine. Euv collector system with enhanced euv radiation collection. DEVICE AND METHOD FOR MANUFACTURING SPECIAL FORMATS OF MASONSTONES OR MASONSTONE FORMATIONS, RESP. M A component of an immersion system, an immersion lithographic apparatus and a device manufacturing m Apparatus and method for contactless handling of an object. Lithographic apparatus and memory leak detection method. A substrate table, a lithographic apparatus, a method of flattening an edge of a substrate and a dev Euv mirror module. Optical system, inspection system and manufacturing method. System and method for pneumatic z supports. CONSUMPTION OPTIMIZED ROUTE PROVISION. Reticle clamping system. Lithographic apparatus and device manufacturing method. TRANSPORTER. Fluid handling structure, lithographic apparatus and device manufacturing method. Illumination system and lithographic apparatus. TRANSPORT TUBE EXCHANGE. METHOD FOR ASSISTING A DRIVER AND A DRIVER ASSISTING DEVICE. NAVIGATION SYSTEM AND NAVIGATION METHOD FOR VEHICLES. Self-assemblable polymer and method for use in lithography. A fluid supply system, a lithographic apparatus, a method of varying fluid flow rate and a device ma Multiple patterning lithography using spacer and self-aligned assist patterns. Reticle cooling in a lithographic apparatus. Stage apparatus and lithographic apparatus comprising such stage apparatus. Method and apparatus for measuring a structure on a substrate, computer program products for impleme Displacement device, lithographic apparatus and positioning method. Cooling method and cooling system for electronic device. Diesel engine injector fouling improvements with a highly paraffinic diesel. Position sensor and lithographic apparatus. Imprint lithography alignment method and apparatus. Lithographic apparatus. Measurement system, method and lithographic apparatus. Lithographic apparatus and lithographic apparatus cooling method. A method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus. Control system, lithographic apparatus, and method to control a position of a movable object. LIFTING DEVICE FOR COLLECTION CONTAINERS. Lithographic apparatus and method.