Abrasion tool and method for removing contamination from an object holder Lithographic Apparatus Adjustment Method Lithographic Apparatus and Method Radiation Source Radiation Source Carbon dioxide application device and method for capturing carbon dioxide contained in a combustion Carbon dioxide application device Smart lock and control method of smart lock Beam pointing monitor and compensation systems background Motor, dual stroke stage and lithographic apparatus Apparatus for Receiving a Conductive Fuel Methods and apparatuses for protecting a seal in a pressure vessel of a photolithography system Hierarchical unary/thermometer coder for controlling an analog to digital converter Metrology apparatus and method for determining a characteristic of one or more structures on a subst Control system for a lithographic apparatus Radiation Source Electronic module and method for manufacturing electronic module Optical arrangement for an inspection apparatus Self propping surfactant for well stimulation Substrate holder for use in a lithographic apparatus Lithographic apparatus and method Special peanut fertilizer prepared from peanut stalk and preparation method thereof Special film-coated controlled release fertilizer for peanut in dry poor soil and preparation method Apparatus and method for melting metal material Projection System Calibration Method Handlebar shock absorption structure Burls with altered surface topography for lithography applications Assembly for use in semiconductor photolithography and method of manufacturing same Truncated flat wire coil Metrology apparatus Illumination source for an inspection apparatus, inspection apparatus and inspection method Metrology apparatus and method for determining a characteristic of one or more structures on a subst Determining significant relationships between parameters describing operation of an apparatus Guard rail for a bed, guide rack for a guard rail and a bed with such guard rail Apparatus and methods for cleaning System for monitoring a plasma Lock of the steering rod of a motor vehicle Holographic metrology apparatus. Metrology apparatus and method for determining a characteristic of one or more structures on a subst High harmonic generation radiation source Metrology apparatus and photonic crystal fiber Metrology apparatus Glass-ceramics and glasses Dosing device for metered transmission of fatty particles Packaging device for packaging elongated packages A method of clamping a substrate to a clamping system, a substrate holder and a substrate support Electronic module Electronic module Lithographic cluster, lithographic apparatus, and device manufacturing method background Laser Beam Monitoring System Cleaning a surface of an optic within a chamber of an extreme ultraviolet light source Assembly for manufacturing a group of parts and identification device Electronic module and method of manufacturing the same Electronic module POWER CONVERSION CIRCUIT EUV Pellicles Method for environmental inspection, for example for green management along a railroad track. Object stage bearing for lithographic apparatus Electronic initiator sleeves and methods of use A system for producing hot tap water, and a method of producing hot tap water Process for improving skid resistance of rejuvenated porous asphalt road constructions System and method for dispensing and returning objects Damper device manufacturing method, lithographic apparatus, projection system, and device manufactur Regeneration of a debris flux measurement system in a vacuum vessel Device for reducing fault arcs in an electric distribution unit A computer-controlled method of and apparatus and computer program product for supporting visual cle Device for protecting cables Tank container Substrate holder for use in a lithographic apparatus Lithographic apparatus with improved patterning performance A fluid handling structure, a lithographic apparatus, a method of using a fluid handling structure a Lithographic Apparatus and Method Positioning device, lithographic apparatus, method for compensating a balance mass torque and device Lithographic Method and Apparatus Motor controller for a brushless DC-motor and method therefor Feed system A beverage fluid dispensing head and system Optical measurement method and sensor apparatus Self-service device for taking tableware Method for cascaded processing of fresh algae Accommodative combination to position a lens in the sulcus of the human eye Lithographic apparatus, an operating method and device manufacturing method MOSFET, METHOD OR MANUFACTURING MOSFET AND POWER CONVERSION CIRCUIT Trailer door monitoring and reporting Fibc liner film Apparatus and methods for determining the position of a target structure on a substrate Electronic module Magnetocaloric effect of Mn-Fe-P-Si-B-V alloy and use thereof Weir Device and method for detecting malfunctions of a hydraulic actuator. Apparatus for and method of controlling coalescence of droplets in a droplet stream Electronic module Stand system for arranging panels Apparatus and Method for Placing Bulbs Method for producing brick blanks for masonry bricks, in particular sand-lime bricks Wavelength tracking system, Method to calibrate a wavelength tracking system, Lithographic apparatus Motorized shutter assembly Connecting element for mounting a baffle element Apparatus Incorporating a Gas Lock Guide structure for chains for an article conveyer